JPH09237965A - Reflow furnace - Google Patents

Reflow furnace

Info

Publication number
JPH09237965A
JPH09237965A JP6937796A JP6937796A JPH09237965A JP H09237965 A JPH09237965 A JP H09237965A JP 6937796 A JP6937796 A JP 6937796A JP 6937796 A JP6937796 A JP 6937796A JP H09237965 A JPH09237965 A JP H09237965A
Authority
JP
Japan
Prior art keywords
hot air
furnace
hot gas
zone
reflow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6937796A
Other languages
Japanese (ja)
Inventor
Katsuhiko Sano
克彦 佐野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Priority to JP6937796A priority Critical patent/JPH09237965A/en
Publication of JPH09237965A publication Critical patent/JPH09237965A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To reflow solder electronic components surely and rigidly to a board only by setting the temperature in a furnace at a specified value, by arranging a heating zone where hot gas makes convection in the length direction of the furnace main body and a heating zone where hot gas makes convection in the width direction of the furnace main body. SOLUTION: A hot gas jetting nozzle 7 is positioned on the upper surface of the inlet side of a furnace main body 1, and jetted hot gas makes convection in the length direction of the furnace main body 1. A suction duct 8 is positioned between a second preheat zone and a reflow zone, and the hot gas jetted from the nozzle 7 circulates from the suction duct 8 to a blower 4. A hot gas jetting nozzle 12 is positioned between small-sized infrared heaters 3, 3 which are arranged at specified intervals in the reflow zone, in the transversal direction on both sides of the center line in the substrate carriage direction. The hot gas jetted from the hot gas nozzle 12 is dispersed in the direction of furnace main body width and makes convection. The hot gas jetted from a hot gas duct 12 circulates from suction ducts 13, 13 arranged on both ends in the width direction of the furnace main body 1 to a blower 9.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明はリフロー炉に関する
ものである。
TECHNICAL FIELD The present invention relates to a reflow furnace.

【0002】[0002]

【従来の技術】従来のリフロー炉は図10に示すよう
に、プリヒートゾーンとリフローゾーンを構成する複数
に区分された加熱ゾーンに設けられた複数の小型の赤外
線ヒータ(面ヒータ)21、21と、この赤外線ヒータ
21、21間、または、赤外線放射面(図省略)に列設
した小径孔から下方に吹き出す熱風とで電子部品搭載基
板15を加熱し、基板に電子部品を半田付け実装するよ
うに構成されていた。
2. Description of the Related Art A conventional reflow furnace, as shown in FIG. 10, includes a plurality of small infrared heaters (plane heaters) 21 and 21 provided in a plurality of divided heating zones constituting a preheat zone and a reflow zone. The electronic component mounting board 15 is heated by the hot air blown downward between the infrared heaters 21 and 21 or from a small diameter hole arranged in a row on the infrared radiation surface (not shown), and the electronic components are mounted on the board by soldering. Was configured into.

【0003】また、図11に示すように、プリヒートゾ
ーンとリフローゾーンを構成する複数に区分された加熱
ゾーンに設けられた大型の赤外線ヒータ(面ヒータ)2
2・・22と、基板搬送方向に沿って対流する熱風とで
電子部品搭載基板15を加熱し、基板に電子部品を半田
付け実装するように構成されたリフロー炉が知られてい
る。
Further, as shown in FIG. 11, a large infrared heater (surface heater) 2 is provided in a plurality of divided heating zones which constitute a preheat zone and a reflow zone.
There is known a reflow furnace configured to heat the electronic component mounting substrate 15 with 2 ... 22 and hot air convection along the substrate transporting direction and solder the electronic components on the substrate.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、各ゾー
ンに設けた複数の小型の赤外線ヒータ21、21と、こ
の赤外線ヒータ21、21間、または、赤外線放射板に
列設した小径孔から下方に吹き出す熱風とで電子部品を
搭載した基板15を加熱するように構成されたリフロー
炉においては、小型の赤外線ヒータ(面ヒータ)を多数
必要とするため放射加熱温度のコントロールが難しく、
さらに、熱風の温度及び風速によっても赤外線ヒータ2
1や赤外線放射板が影響を受けるため炉内の温度コント
ロールが困難である等の問題点があった。
However, a plurality of small infrared heaters 21, 21 provided in each zone and the infrared heaters 21, 21 are blown downward between the infrared heaters 21, 21 or from small-diameter holes arranged in a row on the infrared radiation plate. In a reflow furnace configured to heat the substrate 15 on which electronic components are mounted with hot air, it is difficult to control the radiant heating temperature because many small infrared heaters (surface heaters) are required.
Furthermore, the infrared heater 2 can be used depending on the temperature and speed of the hot air.
1 and the infrared radiation plate are affected, it is difficult to control the temperature in the furnace.

【0005】また、各ゾーンに設けられた大型の赤外線
ヒータ22・・22と、基板搬送方向に沿って対流する
熱風とで電子部品を搭載した基板15を加熱するように
構成されたリフロー炉においては、基板15の長手方向
中央部の風速が大きく、基板15の長手方向中央部の温
度が高くなり両端部の温度が低くなる等の原因から、基
板表面の温度分布に不均一が生じ易いという問題点があ
り、また、図11に示すように基板搬送方向に沿って対
流する熱風により外気が炉本体入口から内部に吸い込ま
れ易く炉内の熱効率が低下し、また、炉本体出口方向に
熱風が吹き出されるためフラックス等により汚染された
炉内の空気が炉外部に排出され易いなどの問題点があっ
た。
In addition, in a reflow furnace configured to heat the substrate 15 on which electronic components are mounted by the large-sized infrared heaters 22 provided in each zone and hot air convection along the substrate transport direction. Is that the wind velocity at the central portion in the longitudinal direction of the substrate 15 is high, the temperature at the central portion in the longitudinal direction of the substrate 15 becomes high, and the temperature at both end portions becomes low. There is a problem, and as shown in FIG. 11, convection of hot air along the substrate transport direction makes it easy for the outside air to be sucked into the interior of the furnace body from the inside, reducing the thermal efficiency in the furnace. However, there is a problem that the air in the furnace, which is contaminated by the flux or the like, is easily discharged to the outside of the furnace because the air is blown out.

【0006】本発明は、炉内温度を所定の温度に設定す
るだけの極めて簡単な作業で電子部品を基板に確実強固
にリフロー半田付け実装することができるリフロー炉を
提供することを目的とする。
An object of the present invention is to provide a reflow furnace which can securely and firmly mount electronic components on a substrate by reflow soldering by an extremely simple operation of setting the temperature inside the furnace to a predetermined temperature. .

【0007】[0007]

【課題を解決するための手段】本発明は、複数に区分さ
れた加熱ゾーンに設けた赤外線ヒータと熱風の対流とに
より電子部品を基板に半田付け実装するリフロー炉にお
いて、炉本体長手方向に熱風が対流する加熱ゾーンと、
炉本体幅方向に熱風が対流する加熱ゾーンを設けたもの
である。
SUMMARY OF THE INVENTION The present invention is a reflow oven for soldering and mounting electronic components on a substrate by an infrared heater provided in a plurality of divided heating zones and convection of hot air. A heating zone where convection occurs,
A heating zone where hot air convection is provided in the width direction of the furnace body.

【0008】炉本体長手方向に熱風が対流する加熱ゾー
ンと、炉本体幅方向に熱風が対流する加熱ゾーンによ
り、基板は縦横から全面均一に加熱される。従って、炉
内温度を所定の温度に設定するだけの極めて簡単な作業
で電子部品を基板に確実強固にリフロー半田付け実装し
得る。
The substrate is uniformly heated in the vertical and horizontal directions by the heating zone where hot air is convected in the longitudinal direction of the furnace body and the heating zone where hot air is convected in the width direction of the furnace body. Therefore, it is possible to securely and firmly mount the electronic component on the substrate by reflow soldering by an extremely simple operation of setting the temperature inside the furnace to a predetermined temperature.

【0009】また、請求項2に記載したように、炉本体
入口側最先端部の加熱ゾーンにおける熱風の対流方向
を、炉本体長手方向であって基板搬送方向と逆方向とす
ることにより、炉本体内に外気が吸い込まれ炉内の熱効
率が低下するのを有効に防止し得る。なお、他に熱風の
対流方向が炉本体長手方向であって基板搬送方向となる
加熱ゾーンを並設すれば、基板は前後方向及び横方向か
らの熱風により極めて効率よく全面均一に加熱される。
Further, as described in claim 2, the convection direction of the hot air in the heating zone at the frontmost end of the furnace main body is set in the longitudinal direction of the furnace main body and in the opposite direction to the substrate transfer direction. It is possible to effectively prevent the outside air being sucked into the main body from lowering the thermal efficiency in the furnace. In addition, if the heating zones in which the convection direction of the hot air is the longitudinal direction of the furnace main body and the substrate conveying direction are arranged in parallel, the substrate is heated very efficiently and uniformly over the entire surface by the hot air from the front-back direction and the lateral direction.

【0010】さらにまた、請求項3に記載したように最
終加熱ゾーンにおける熱風の対流方向を炉本体幅方向と
することにより、フラックス等により汚染された炉内空
気が炉外に放散するのを極めて有効に防止することがで
きる。
Furthermore, by setting the convection direction of the hot air in the final heating zone to be the width direction of the furnace body as described in claim 3, it is extremely possible that the air inside the furnace contaminated by flux or the like is diffused outside the furnace. It can be effectively prevented.

【0011】[0011]

【発明の実施の形態】以下、本発明の実施の形態を図面
により説明する。図1は本発明の第1の実施の形態を示
す説明図、図2は熱風の対流状態を示す説明図で、図1
において1は炉本体で、炉本体1の内部は入口側から第
1プリヒートゾーン、第2プリヒートゾーン、リフロー
ゾーンに区分けされている。2は第1プリヒートゾーン
及び第2プリヒートゾーンの上面に設けられた大型の赤
外線ヒータ(面ヒータ)、3、3はリフローゾーンに設
けられた小型の赤外線ヒータ(面ヒータ)で、この赤外
線ヒータ3、3は図示するように基板搬送方向中心線を
挟んで横方向に所定の間隔で設けられている。4はブロ
ア、5はブロア4と後述するヒータ6とを連結したダク
ト、6はヒータで、このヒータ6はブロア4から吹き出
される空気を加熱する。7は熱風吹出ノズルで、この熱
風吹出ノズル7は炉本体1の入口側上面に位置し、吹き
出された熱風は炉本体長手方向(基板搬送方向)に対流
する。8は吸気ダクトで、この吸気ダクト8は第2プリ
ヒートゾーンとリフローゾーンとの間に位置し、前記熱
風吹出ノズル7から吹き出された熱風はこの吸気ダクト
8からブロア4に還流する。9はブロア、10はブロア
9と後述するヒータ11とを連結したダクト、11はヒ
ータで、このヒータ11はブロア9から吹き出される空
気を加熱する。12は熱風吹出ノズルで、この熱風吹出
ノズル12はリフローゾーンに基板搬送方向中心線を挟
んで横方向に所定の間隔で設けられた小型の赤外線ヒー
タ3、3間に位置し、熱風吹出ノズル12から吹き出さ
れた熱風は炉本体幅方向(基板横方向)に分散して対流
する。13、13は炉本体1の幅方向両端部に設けられ
た吸気ダクトで、前記熱風吹出ノズル12から吹き出さ
れた熱風はこの吸気ダクト13、13からブロア9に還
流する。なお、リフローゾーンで炉本体幅方向(基板横
方向)に対流する熱風は、炉本体1の一方の側面から他
方の側面に向けて対流させてもよい。14は電子部品を
搭載した基板15を炉本体1内に搬送するコンベアであ
る。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. 1 is an explanatory view showing a first embodiment of the present invention, and FIG. 2 is an explanatory view showing a convection state of hot air.
In FIG. 1, 1 is a furnace main body, and the inside of the furnace main body 1 is divided into a first preheat zone, a second preheat zone, and a reflow zone from the inlet side. Reference numeral 2 is a large infrared heater (surface heater) provided on the upper surfaces of the first preheat zone and the second preheat zone, and 3 and 3 are small infrared heaters (surface heater) provided in the reflow zone. As shown in the drawing, 3 are provided at predetermined intervals in the lateral direction with the center line in the substrate transport direction sandwiched therebetween. Reference numeral 4 denotes a blower, 5 denotes a duct connecting the blower 4 and a heater 6 described later, 6 denotes a heater, and the heater 6 heats air blown from the blower 4. Reference numeral 7 denotes a hot air blowing nozzle. The hot air blowing nozzle 7 is located on the inlet side upper surface of the furnace body 1, and the hot air blown out convects in the furnace body longitudinal direction (substrate transfer direction). Reference numeral 8 denotes an intake duct, which is located between the second preheat zone and the reflow zone, and the hot air blown from the hot air blowing nozzle 7 is returned from the intake duct 8 to the blower 4. Reference numeral 9 is a blower, 10 is a duct connecting the blower 9 and a heater 11 described later, 11 is a heater, and the heater 11 heats the air blown from the blower 9. Reference numeral 12 is a hot air blowing nozzle. The hot air blowing nozzle 12 is located between the small infrared heaters 3 provided laterally at a predetermined interval in the reflow zone with a center line in the substrate transfer direction interposed therebetween. The hot air blown out of the furnace disperses and convects in the width direction (horizontal direction of the substrate) of the furnace body. Intake ducts 13 and 13 are provided at both ends of the furnace body 1 in the width direction. The hot air convection in the furnace body width direction (substrate lateral direction) in the reflow zone may be convected from one side surface of the furnace body 1 to the other side surface. Reference numeral 14 is a conveyor that conveys a substrate 15 on which electronic components are mounted into the furnace body 1.

【0012】上述のように構成した本発明のリフロー炉
により基板に搭載された電子部品をリフロー半田付けす
るには、電子部品を搭載した基板15をコンベア14に
セットして炉本体1内に搬送する。炉本体1内に搬送さ
れた基板15は各ゾーンに設けられた赤外線ヒータ2、
3と、炉本体長手方向(基板搬送方向)に対流する熱風
と炉本体幅方向に対流する熱風により縦横から全面均一
に加熱され、電子部品は基板15に確実強固に半田付け
実装される。従って、従来のように面倒な温度調整を一
切必要とせず、炉内温度を所定の温度に設定するだけの
極めて簡単な作業で、電子部品を基板に確実強固にリフ
ロー半田付けすることができ、しかも、リフローゾーン
では熱風が炉本体幅方向に対流しているのでフラックス
等により汚染された空気が炉外に放散するのを極めて有
効に防止し得る。
In order to reflow-solder the electronic components mounted on the board by the reflow furnace of the present invention having the above-described structure, the board 15 on which the electronic components are mounted is set on the conveyor 14 and conveyed into the furnace body 1. To do. The substrate 15 transferred into the furnace body 1 is an infrared heater 2 provided in each zone,
3, the entire surface is uniformly heated in the vertical and horizontal directions by the hot air convection in the longitudinal direction of the furnace body (the substrate carrying direction) and the hot air convection in the width direction of the furnace body, and the electronic components are securely and firmly soldered and mounted on the substrate 15. Therefore, it does not require any troublesome temperature adjustment as in the prior art, and the electronic components can be reliably and firmly reflow-soldered to the substrate by an extremely simple operation of setting the temperature inside the furnace to a predetermined temperature. Moreover, since hot air is convection in the width direction of the furnace body in the reflow zone, it is possible to very effectively prevent the air contaminated by the flux or the like from escaping outside the furnace.

【0013】なお、第1プリヒートゾーン及び第2プリ
ヒートゾーンでは熱風は炉本体1の長手方向(基板搬送
方向)に対流しているので、外気が炉本体内に吸い込ま
れ易いが、この外気の吸い込みを考慮した上で炉内温度
を所定の温度に設定しておくことにより何ら問題なく電
子部品を基板に確実強固にリフロー半田付けし得る。
In the first preheat zone and the second preheat zone, the hot air is convected in the longitudinal direction of the furnace body 1 (the substrate carrying direction), so that the outside air is easily sucked into the furnace body. By setting the temperature inside the furnace to a predetermined temperature in consideration of the above, it is possible to securely and firmly reflow solder the electronic component to the substrate without any problem.

【0014】図3及び図4は本発明の第2の実施の形態
を示す説明図と、熱風の対流状態を示す説明図である。
この実施の形態においてはヒータ6で加熱された熱風を
吹き出す熱風吹出ノズル7を第1プリヒートゾーン及び
第2プリヒートゾーンに設けた赤外線ヒータ(面ヒー
タ)2、2間に位置させ、この熱風吹出ノズル7から吹
き出した熱風を第1プリヒートゾーンでは基板搬送方向
と逆方向に対流させて炉本体1の入口端部に位置する吸
気ダクト8からブロア4に還流させると共に、第2プリ
ヒートゾーンでは基板搬送方向に対流させて第2プリヒ
ートゾーンとリフローゾーンとの間に位置する吸気ダク
ト8からブロア4に還流させ、リフローゾーンでは前述
したと同様にヒータ11により加熱された熱風を吹き出
す熱風吹出ノズル12を赤外線ヒータ(面ヒータ)3、
3間に位置させ、この熱風吹出ノズル12から吹き出し
た熱風を炉本体幅方向(基板横方向)に対流させて吸気
ダクト13、13からプロア9に還流するようにリフロ
ー炉を構成したものである。なお、図中5はブロア4と
ヒータ6を連結したダクトを示し、10はブロア9とヒ
ータ11を連結したダクトを示す。
FIGS. 3 and 4 are an explanatory view showing a second embodiment of the present invention and an explanatory view showing a convection state of hot air.
In this embodiment, the hot air blowing nozzle 7 for blowing hot air heated by the heater 6 is located between the infrared heaters (surface heaters) 2 provided in the first preheat zone and the second preheat zone, and the hot air blowing nozzle In the first preheat zone, the hot air blown from 7 is convected in the direction opposite to the substrate transport direction to recirculate from the intake duct 8 located at the inlet end of the furnace body 1 to the blower 4, and in the second preheat zone, the substrate transport direction. To the blower 4 from the intake duct 8 located between the second preheat zone and the reflow zone, and in the reflow zone, the hot air blowing nozzle 12 that blows out the hot air heated by the heater 11 is used for infrared rays. Heater (surface heater) 3,
The reflow furnace is located between the three hot air blowing nozzles 12 so as to convect the hot air blown from the hot air blowing nozzle 12 in the width direction of the furnace body (lateral direction of the substrate) and to recirculate the hot air from the intake ducts 13 and 13 to the blower 9. . In the figure, 5 indicates a duct connecting the blower 4 and the heater 6, and 10 indicates a duct connecting the blower 9 and the heater 11.

【0015】上述のようにリフロー炉を構成することに
より、コンベア14により炉本体1内に搬送される基板
は、第1プリヒートゾーンでは前方からの熱風を受け、
第2プリヒートゾーンでは後方からの熱風を受け、さら
に、リフローゾーンでは横方向からの熱風を受けるの
で、基板は前後方向及び横方向から極めて効率よく全面
均一に加熱されるので、炉内温度を所定の温度に設定し
ておくだけの極めて簡単な作業で電子部品を基板に確実
強固にリフロー半田付けし得る。また、第1プリヒート
ゾーンでは基板搬送方向と逆方向に熱風が対流している
ので、炉本体1内への外気の侵入を極めて有効に防止し
得る。
By configuring the reflow furnace as described above, the substrate carried into the furnace body 1 by the conveyor 14 receives hot air from the front in the first preheat zone,
Since the second preheat zone receives hot air from the rear and the reflow zone receives hot air from the lateral direction, the substrate is heated very efficiently and uniformly over the entire surface in the front-rear direction and the lateral direction. The electronic component can be securely and firmly reflow-soldered to the board by an extremely simple operation of setting the temperature to. Further, in the first preheat zone, hot air is convected in the direction opposite to the substrate transport direction, so that the invasion of outside air into the furnace body 1 can be very effectively prevented.

【0016】なお、本発明は前述した実施の形態に限定
されるものではなく、図5に示すように、第1プリヒー
トゾーンでは基板搬送方向に熱風を対流させ、第2プリ
ヒートゾーンでは基板搬送方向と逆方向に熱風を対流さ
せるようにしてもい。
The present invention is not limited to the above-described embodiment, and as shown in FIG. 5, hot air is convected in the substrate transport direction in the first preheat zone and the substrate transport direction in the second preheat zone. You may make hot air convection in the opposite direction.

【0017】また、図6に示すように第1プリヒートゾ
ーンでは熱風を炉本体幅方向に対流させ、第2プリヒー
トゾーンでは基板搬送方向に熱風を対流させ、リフロー
ゾーンでは基板搬送方向と逆方向に熱風を対流させても
よい。この際、熱風が炉本体幅方向(基板横方向)に対
流するプリヒートゾーンでは、前述したように小型の赤
外線ヒータ3、3を基板搬送方向中心線を挟んで横方向
に所定の間隔で設け、この赤外線ヒータ3、3間に熱風
吹出ノズルを位置させ熱風を炉本体幅方向に対流させ
る。
Further, as shown in FIG. 6, hot air is convected in the width direction of the furnace body in the first preheat zone, hot air is convected in the substrate transfer direction in the second preheat zone, and in the reflow zone in the direction opposite to the substrate transfer direction. You may make hot air convection. At this time, in the preheat zone in which hot air is convected in the width direction of the furnace body (horizontal direction of the substrate), as described above, the small infrared heaters 3, 3 are provided at predetermined intervals in the lateral direction with the center line in the substrate transport direction interposed therebetween. A hot air blowing nozzle is positioned between the infrared heaters 3 to allow hot air to convect in the width direction of the furnace body.

【0018】また、図7に示すように第1プリヒートゾ
ーンでは熱風を炉本体幅方向に対流させ、第2プリヒー
トゾーンでは基板搬送方向と逆方向に熱風を対流させ、
リフローゾーンでは基板搬送方向に熱風を対流させても
よい。
Further, as shown in FIG. 7, in the first preheat zone, hot air is convected in the width direction of the furnace body, and in the second preheat zone, hot air is convected in the direction opposite to the substrate carrying direction.
In the reflow zone, hot air may be convected in the substrate transfer direction.

【0019】さらに、図8に示すようにプリヒートゾー
ンが2区分以上に区分されている場合には、炉本体長手
方向に対流する加熱ゾーンを第1プリヒートゾーンと第
3プリヒートゾーンに間欠的に設けるようにしてもよ
い。
Further, as shown in FIG. 8, when the preheat zone is divided into two or more sections, heating zones convection in the longitudinal direction of the furnace body are intermittently provided in the first preheat zone and the third preheat zone. You may do it.

【0020】さらにまた、図9に示すように第1プリヒ
ートゾーンでは基板搬送方向と逆方向に熱風を対流さ
せ、第2プリヒートゾーン以降は基板搬送方向に熱風を
対流させてもよい。なお、図示するように第1プリヒー
トゾーンに設けた赤外線ヒータ2及びリフローゾーンに
設けた赤外線ヒータ3、3とコンベア14(図1参照)
を挟んで赤外線ヒータ(面状ヒータ)2a、2aを相対
向させて設け、或いは、これに限らず必要に応じて各プ
リヒートゾーンに設けた赤外線ヒータ2とコンベア14
を挟んで赤外線ヒータ2aを相対向させて設けてもよ
く、また、炉本体長手方向に熱風が対流する加熱ゾーン
と炉本体幅方向に熱風が対流する加熱ゾーンを設ける位
置等は前述した実施の形態に限定されるものではなく、
必要に応じて適宜設計変更し得ることは勿論である。
Furthermore, as shown in FIG. 9, in the first preheat zone, hot air may be convected in the direction opposite to the substrate transport direction, and after the second preheat zone, hot air may be convected in the substrate transport direction. As shown, the infrared heater 2 provided in the first preheat zone, the infrared heaters 3 and 3 provided in the reflow zone, and the conveyor 14 (see FIG. 1).
Infrared heaters (planar heaters) 2a and 2a are provided to face each other with the heater sandwiched therebetween, or not limited thereto, and the infrared heaters 2 and the conveyor 14 provided in each preheat zone as necessary.
The infrared heaters 2a may be provided so as to face each other with the heating heater interposed therebetween, and the heating zone where hot air is convected in the longitudinal direction of the furnace body and the heating zone where hot air is convected in the width direction of the furnace body are provided in the above-described embodiment. It is not limited to the form,
It goes without saying that the design can be changed as needed.

【0021】[0021]

【発明の効果】本発明によれば上述のように、炉内温度
を所定の温度に設定するだけの極めて簡単な作業で電子
部品を基板に確実強固にリフロー半田付け実装すること
ができるばかりでなく、炉本体入口側最先端部の加熱ゾ
ーンにおける熱風の対流方向を炉本体長手方向であって
基板搬送方向と逆方向とすることで、外気が炉本体1の
内部に吸い込まれ炉内の熱効率が低下するのを有効に防
止することができ、さらに、最終加熱ゾーンにおける熱
風の対流方向を炉本体の幅方向とすることでフラックス
等で汚染された炉内空気が炉外に放散するのを極めて有
効に防止し得る等の優れた利点がある。
As described above, according to the present invention, the electronic components can be surely and firmly reflow-soldered and mounted on the board by an extremely simple operation of setting the temperature in the furnace to a predetermined temperature. Instead, by setting the convection direction of the hot air in the heating zone at the front end of the furnace main body to be the longitudinal direction of the furnace main body and the direction opposite to the substrate transfer direction, the outside air is sucked into the furnace main body 1 and the thermal efficiency in the furnace is increased. Can be effectively prevented from falling, and by setting the convection direction of the hot air in the final heating zone to be the width direction of the furnace body, it is possible to prevent the air inside the furnace contaminated with flux from being discharged outside the furnace. There are excellent advantages such as very effective prevention.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1の実施の形態を示す説明図FIG. 1 is an explanatory diagram showing a first embodiment of the present invention.

【図2】第1の実施の形態における熱風の対流状態を示
す説明図
FIG. 2 is an explanatory diagram showing a convection state of hot air according to the first embodiment.

【図3】本発明の第2の実施の形態を示す説明図FIG. 3 is an explanatory diagram showing a second embodiment of the present invention.

【図4】第2の実施の形態における熱風の対流状態を示
す説明図
FIG. 4 is an explanatory diagram showing a convection state of hot air according to the second embodiment.

【図5】本発明の他の実施の形態における熱風の対流状
態を示す説明図
FIG. 5 is an explanatory diagram showing a convection state of hot air in another embodiment of the present invention.

【図6】本発明の他の実施の形態における熱風の対流状
態を示す説明図
FIG. 6 is an explanatory view showing a convection state of hot air according to another embodiment of the present invention.

【図7】本発明の他の実施の形態における熱風の対流状
態を示す説明図
FIG. 7 is an explanatory diagram showing a convection state of hot air according to another embodiment of the present invention.

【図8】本発明の他の実施の形態における熱風の対流状
態を示す説明図
FIG. 8 is an explanatory view showing a convection state of hot air according to another embodiment of the present invention.

【図9】本発明の他の実施の形態における熱風の対流状
態を示す説明図
FIG. 9 is an explanatory diagram showing a convection state of hot air in another embodiment of the present invention.

【図10】従来のリフロー炉を示す説明図FIG. 10 is an explanatory view showing a conventional reflow furnace.

【図11】従来のリフロー炉における熱風の対流状態を
示す説明図
FIG. 11 is an explanatory diagram showing a convection state of hot air in a conventional reflow furnace.

【符号の説明】[Explanation of symbols]

1 炉本体
2 赤外線ヒータ 3 赤外線ヒータ
1 furnace body
2 Infrared heater 3 Infrared heater

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 複数に区分された加熱ゾーンに設けた赤
外線ヒータと熱風の対流とにより電子部品を基板に半田
付け実装するリフロー炉において、炉本体長手方向に熱
風が対流する加熱ゾーンと、炉本体幅方向に熱風が対流
する加熱ゾーンを設けたことを特徴とするリフロー炉。
1. A reflow furnace in which an electronic component is soldered and mounted on a substrate by an infrared heater provided in a plurality of divided heating zones and convection of hot air, and a heating zone in which hot air is convected in the longitudinal direction of the furnace body, and a furnace A reflow furnace characterized by having a heating zone in which hot air is convected in the width direction of the main body.
【請求項2】 炉本体入口側最先端部の加熱ゾーンにお
ける熱風の対流方向が炉本体長手方向であって基板搬送
方向と逆方向であることを特徴とする請求項1記載のリ
フロー炉。
2. The reflow furnace according to claim 1, wherein the convection direction of the hot air in the heating zone at the most front end of the furnace body on the inlet side is the longitudinal direction of the furnace body and the direction opposite to the substrate conveying direction.
【請求項3】 最終加熱ゾーンにおける熱風の対流方向
が炉本体幅方向であることを特徴とする請求項1又は請
求項2記載のリフロー炉。
3. The reflow furnace according to claim 1, wherein the convection direction of the hot air in the final heating zone is the width direction of the furnace body.
JP6937796A 1996-02-29 1996-02-29 Reflow furnace Pending JPH09237965A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6937796A JPH09237965A (en) 1996-02-29 1996-02-29 Reflow furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6937796A JPH09237965A (en) 1996-02-29 1996-02-29 Reflow furnace

Publications (1)

Publication Number Publication Date
JPH09237965A true JPH09237965A (en) 1997-09-09

Family

ID=13400823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6937796A Pending JPH09237965A (en) 1996-02-29 1996-02-29 Reflow furnace

Country Status (1)

Country Link
JP (1) JPH09237965A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6345757B1 (en) * 1997-07-31 2002-02-12 Fujitsu Limited Reflow soldering method
JP2008311250A (en) * 2007-06-12 2008-12-25 Tokyo Electron Ltd Reflow system and reflow method
JP2011066318A (en) * 2009-09-18 2011-03-31 Tokyo Electron Ltd Heat processing apparatus
JP2012124365A (en) * 2010-12-09 2012-06-28 Tokyo Electron Ltd Heat treatment apparatus, and coating and developing apparatus including the same
KR101237092B1 (en) * 2005-03-01 2013-02-25 도쿄엘렉트론가부시키가이샤 Thermal processing unit

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6345757B1 (en) * 1997-07-31 2002-02-12 Fujitsu Limited Reflow soldering method
KR101237092B1 (en) * 2005-03-01 2013-02-25 도쿄엘렉트론가부시키가이샤 Thermal processing unit
JP2008311250A (en) * 2007-06-12 2008-12-25 Tokyo Electron Ltd Reflow system and reflow method
JP2011066318A (en) * 2009-09-18 2011-03-31 Tokyo Electron Ltd Heat processing apparatus
JP2012124365A (en) * 2010-12-09 2012-06-28 Tokyo Electron Ltd Heat treatment apparatus, and coating and developing apparatus including the same

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