JPH0921648A - Vibration gyroscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To eliminate an acoustic wave interference and prevent standing waves from occurring in a vibration driving direction. SOLUTION: The vibration gyroscope comprises a vibrator 1 mounted on a substrate 4 and fitted in a case M, wherein the vibrator 1 is driven to bend- vibrate in a vibration driving direction X, and bend-vibration in a vibration detection direction Y caused by Corioli's force generated when rotational motion is received, thereby measuring a rotational angular velocity, while at least a part of the case is formed either of nonparallel faces and curved faces.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrating gyro device, and more particularly to a vibrating gyro device in which a vibrator is mounted on a substrate to reduce acoustic interference inside a case to be fitted to achieve miniaturization.

[0002]

2. Description of the Related Art Conventionally, as a vibrating gyroscope for measuring an angular velocity suitable for camera shake prevention, position and attitude control of various moving bodies such as flying bodies, ships, vehicles and robots, car navigation, etc., FIG. ), (B), it is known that Coriolis force Fc is generated in the y-axis direction when an angular velocity Ω is applied around the z-axis to an object bending in the x-axis direction.

Utilizing this principle, the vibrator 21 supported by the support pins 20 has two surfaces 21a, 21 that are adjacent to each other at a right angle.
The pair of transducers 22, 23 vibrates in the x-axis direction to cause a bending vibration to give a velocity, and the bending caused by the Coriolis force Fc generated in the y-axis direction when the angular velocity Ω is received about the z-axis. A vibration gyro has been proposed which detects a vibration from a pair of transducers 22 and 23 to measure an angular velocity Ω.

There are various types of vibration gyros such as a tuning fork type and a tuning piece type as shown in the figure when focusing on the vibrator. In each case, the transducer 21 has a bending motion in the x-axis direction or the y-axis direction by a transducer. The vibration is caused and the vibration caused by the Coriolis force Fc generated in the y-axis direction or the x-axis direction when the angular velocity Ω is received around the z-axis is detected by the transducer, and the angular velocity Ω is measured. Conventionally, this vibrating gyro has been commercialized by being fitted into the case 25 as follows.

(1) Transducer 2 supported by support pins 20
As shown in FIGS. 25 (a) and 25 (b), 1 is mounted on a substrate 24 and fitted in a case 25. Hole 2 in case 25
6 and 26 were drilled especially in the lower part to prevent the sound pressure from being sealed. (2) As shown in FIG. 26, the vibrator 21 supported by the support pins 20 is mounted on a substrate 24, and a damper 27 made of a flexible material is provided on the vibrator 24 to fit the case 25 to facilitate vibration. .

In both cases (1) and (2), the sensitivity of the vibrating gyroscope is reduced, and therefore the width 2L ₂ and height h (FIG. 25A) of the case 25 cannot be reduced so much that the air If the speed of sound inside is S and the wavelength of the vibration propagated from the oscillator is λ (= S / f ₀ , where f ₀ is the oscillation frequency of the oscillator 21), a clear design theory has not been published,
Generally, it was 2L ₂ and h> λ / 2.

[0007]

Problems to be Solved by the Invention FIGS. 25 (a) and 27
The oscillator 2 supported by the support pins 20 as shown in FIG.
According to the conventional vibrating gyro device in which No. 1 is mounted on the substrate 24 and fitted in the case 25, the width 2L _{2 of the} case 25 = 6.
If it is set to 0 mm, the sound wave emitted from the oscillator 21 is reflected by the inner wall surface of the case 25 facing each other, and the relationship of the standing waves inside the case 25 is as shown in FIG. 27 (b), and the sound wave interference becomes maximum. It was

As described above, the conventional vibrating gyro has a drawback that a standing wave is generated in the case 25 and the efficiency of the vibrating gyro is reduced. Therefore, the present invention has been made in view of the above drawbacks, and an object thereof is to provide a vibration gyro device that is miniaturized by preventing the occurrence of a standing wave in the driving vibration direction inside the case. is there.

[0009]

In order to achieve this object, a vibrating gyro device of the present invention mounts a vibrator on a substrate and fits it in a case, and drives the vibrator to bend and vibrate in the driving vibration direction. A vibration gyro that measures a rotational angular velocity by detecting a bending vibration in a detection vibration direction caused by a Coriolis force generated when receiving a rotary motion.
It is characterized in that at least a part of the case is formed by either a non-parallel surface or a curved surface.

In this vibrating gyro device, since at least a part of the case is formed by either the non-parallel surface or the curved surface, the sound wave interference is eliminated and the standing wave in the driving vibration direction is prevented.

[0011]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment in which a vibrating gyro device of the present invention is applied to a sound piece type vibrator will be described below with reference to the drawings. As shown in FIGS. 17 (a), (b), and (c), the vibrating gyro device of the present invention is arranged so that, in this embodiment, a vibrator 1 constituted by a rectangular parallelepiped sound piece having a quadrangular cross section is disposed orthogonal to the vibrator 1. A pair of transducers 10a and 10b are attached to two adjacent surfaces 1a and 1b. With this arrangement,
The vibration direction of the vibrator 1 is set to the diagonal mode.

The vibrator 1 is generally made of a metal such as constant elasticity Ni-SPAN-C or Elinba in consideration of temperature characteristics. Also, as a special example, quartz, crystal,
It may be composed of an electrical insulator such as ceramic.
As the constant elastic electric insulator, Young's modulus has a small temperature coefficient and a small linear expansion coefficient, and glass is preferably used. In addition to the constant elasticity of glass, the mechanical Q is large and isotropic, and the glass has the necessary characteristics as a vibrator.

As the transducers 10a and 10b, ceramic piezoelectric elements such as PZT type, ZnO type and BaTiO ₃ type are used. This vibrating gyro device applies electric signals to a pair of transducers 10a and 10b at the same time, applies vibrations from these transducers 10a and 10b to a vibrator 1 in a y-axis direction which is a diagonal direction, and then an angular velocity Ω about a z-axis. When receiving, Coriolis force Fc generated in the x-axis direction which is the diagonal direction orthogonal to this diagonal direction
The vibration caused by the pair of transducers 1
The angular velocity Ω is measured by detecting from 0a and 10b.

As shown in FIG. 17 (b), a pair of transducers 10a and 10b are attached to two surfaces 1a and 1b of the vibrator 1 which are adjacent to each other at right angles, and the vibration direction (y direction) of the vibrator 1 is set. When the diagonal mode is set, the voltages Vm appearing on the transducers 10a and 10b during driving at the predetermined frequency f ₀ are equal in the transducers 10a and 10b. That is, the voltages Vm are Vm ₁ = Vm ₂ , respectively. In addition, 4a has shown the neutral line.

On the other hand, as shown in FIG. 17C, the voltage Vc generated by the Coriolis force Fc (x direction) when the angular velocity Ω is applied to the transducer 1 is the transducer 10
The polarities of a and 10b are opposite. That is, Vc ₁ = -Vc _2. In addition, 4b has shown the neutral line. Therefore, when the angular velocity Ω is applied to the vibrator 1, the output signals V ₁ and V ₂ appearing on the transducers 10a and 10b are V ₁ = Vm + Vc V ₂ = Vm−Vc, and (V ₁ + V ₂ ) / 2 = Vm It is constant, and even when the angular velocity Ω is applied to the transducer 1, the transducer 10
Since the average value signal Vm of the sum of the output signals V ₁ and V ₂ appearing in a and 10b does not change, when the angular velocity is applied to the vibrator as in the conventional case, the voltage and phase on the output side change and the excitation level becomes unstable. Stabilization and instability with respect to external vibrations are avoided.

On the other hand, when an electric signal is applied to the transducer 10a (10b) attached to the vibrator 1, the impedance change of the vibrator 1 including the transducer 10a (10b) changes according to the frequency of the electric signal. It exhibits the characteristics shown in. That is, the vibrator 1 has resistance, capacitance,
Since it has an inductive component, the impedance becomes minimum at the series resonance point and maximum at the parallel resonance point. Furthermore, at both resonance points, there is no capacitance or inductive component, and it is pure resistance.

As shown in FIG. 19, the transducer 1
If the input resistance R is connected in series to 0a (10b) and the drive signal Vin is applied from the input resistance R side, the voltage Vm appearing in the transducer 10a (10b) becomes maximum at the parallel resonance point, and the voltage drop of the input resistance R occurs. Becomes a minimum, becomes a minimum at the series resonance point, the voltage drop of the input resistance R becomes a maximum, and the impedance is only a pure resistance, so that the phase is also in phase with the drive signal Vin of the predetermined frequency f ₀ .

As shown in FIG. 20, the transducer 1
A drive signal Vin is applied from an input resistor R connected in series to 0a (10b), and an average value signal Vm which is an average value (V ₁ + V ₂ ) / 2 of a voltage appearing in the transducer 10a (10b) and a predetermined frequency f ₀ . The drive signal Vin is differentially amplified by the amplifier 15 and the low pass filter or the band pass filter 16 vibrates only the fundamental wave at the resonance point of the vibrator 1 to prevent the overtone from vibrating, and the phase shifter 17
By forming a self-excited oscillation loop circuit that adjusts the phase and positively feeds back, it is possible to configure a drive circuit that drives the vibrator 1 at a resonance frequency at which the vibrator 1 substantially resonates in series. In this way, the transducer 10a (10
The drive signal of b) can be obtained.

The loop gain is set to be larger than 1 at the time of series resonance. Further, the phase shifter 17 is not always necessary, and a positive feedback may be performed by adjusting the phase by adding a filter so that the phase condition is met.
Further, if the output signals V ₁ and V ₂ appearing on both transducers 10 a (10 b) are differentially amplified to obtain a difference signal, then V ₁ −V ₂ = ₂ Vc, and a detection signal of angular velocity Ω is generated.

As described above, the vibrating gyro device of the present invention is
The rotational angular velocity is measured by driving the vibrator 1 to cause bending vibration in the driving vibration direction X, and detecting bending vibration in the detection vibration direction Y caused by the Coriolis force Fc generated when receiving the rotational motion. is there. As shown in FIG. 21, the vibrator 1 is supported by the support pins 2 and mounted on the substrate 4. The vibrator 1 mounted on the substrate 4 has a case M in which one of the hexahedron has an opening M ₁ and side walls M ₂ , M ₃ and a top wall M _6.
Then, the opening M ₁ is fitted so as to be arranged on the substrate 4. In this case, the center of the vibrator 1 is arranged at the center between the inner surfaces of the opposing side walls M ₂ -M ₃ of the case M and the center between the inner surface 4 a of the substrate 4 and the inner surface of the top wall M ₆ of the case M, respectively. It

In this case, the dimension 2Lx between the inner surfaces of the side walls M ₂ -M ₃ of the case M in the driving vibration direction X and the detection vibration direction Y
At least one of the dimensions 2Ly between the inner surface 4a of the substrate 4 and the inner surface of the top wall M ₆ of the case M is set to λ / 4 or less.
Where λ is the wavelength of the vibration propagated from the oscillator, and λ =
S / f ₀ , where S is the speed of sound in the air. In particular, the dimension 2 between the inner surfaces of the side walls M ₂ -M ₃ of the case M in the driving vibration direction X is 2
Lx is set to λ / 4 or less.

[0022]

[Experiment]

[0023]

[Experimental purpose] To measure the acoustic effect of self-excited sound pressure on self-vibration when the vibrator is vibrated in a closed case.

[0024]

[Experimental apparatus] As shown in FIGS. 1 (a) and 1 (b), the top wall 3, the substrate 4, the side frames 7 and 8 and the top wall 3, the substrate 4, and the side frames 7 and 8 are symmetrically moved. Possible slide sidewalls 5, 6
A case M is formed by The vibrator 1 is supported by the support pins 2, mounted on the substrate 4, and fitted in the case M.
The center of the vibrator 1 is arranged at the center of the side walls 5 and 6 of the case M with the dimension 2L ₁ .

[0025]

[Experiment 1] An AC power supply of frequency f ₀ through a resistor R ₀ as shown in FIG. 3 through a pair of piezoelectric transducers 10 and 10 on the vibrator 1 shown in FIGS. V
= Vcosωt, V ′ = − vcosωt is applied. FIG. 4 shows an equivalent circuit of the vibrator 1 that vibrates at this time. Vibrations excited by the pair of transducers 10 and 10 are replaced by a series resonance circuit of an inductance L, a capacitance C and a resistance R. The capacitance C ₀ represents a resonance capacitance.

Here, a pair of transducers 10, 10
The power supplies V and V'applied to V = -V ', that is, the phases are inverted. By doing so, the vibrator 1 is excited in the X-axis direction. Also, the angular frequency ω of the applied power source (= 2πf
₀ ) is the series resonance ω ₀ = 1 / √L · C (f ₀ = 30 KHz) shown in the figure. Take dimension 2L ₁ (position of the slide 5 and 6) to the X-axis, the change of the voltage E ₁ of dimension 2L ₁ tap Tp ₁ due to varying, Tp _2, E ₂ (Fig. 4) in the Y-axis, Dimension 2L
When E _L1 / E0 (dB) is taken with reference to the value E ₀ when ₁ = ∞ (that is, point E after slide removal), the characteristic as shown in FIG. 5 is shown. Here, the resonance sharpness Q of the vibration is the minimum when E _L1 / E ₀ is the maximum (near point a in FIG. 5), and the resonance sharpness Q is the resonance when the minimum (near b in FIG. 5). The sharpness Q is the maximum (a state in which it easily vibrates).

[0027]

[Study of Results] From the relationship between the speed of sound and the temperature in the case M shown in Table 1, it is assumed that a standing wave with a sound pressure of λ / 4 is generated at point a in FIG. 5 as shown in FIG. 2 (a). Conceivable. Similarly, at point b, a standing wave having a sound pressure of wavelength λ / 2 is considered to be generated as shown in FIG. From FIG. 2a, the position of minimum sound pressure (λ
The resonance sharpness Q is the minimum when the sound pressure is located at / 4), and the resonance sharpness Q is the maximum when the sound pressure is located at the maximum position (λ / 2) as shown in b. The result is obtained.

[0028]

[Table 1]

[0029]

[Experiment 2] Transducer 1 on vibrator 1 shown in FIG.
AC power source V = vcosωt is applied to terminals 0 and 10 via terminals 9 and 9 through a resistor R _{0 as} shown in FIG. The equivalent circuit at this time is shown in FIG. Unlike the experiment 1, the transducer 1 is excited in the Y-axis direction because the in-phase alternating current V is applied to the pair of transducers 10 and 10. Here, the vibrator 1 is rotated together with the case M as shown in FIG. 6 to apply the rotational angular velocity ω. At that time, if the voltages E ₁ and E ₂ of the taps Tp ₁ and Tp ₂ are measured and the difference voltage E _j = E ₁ −E ₂ is obtained, this difference voltage E _j
Becomes the gyro output. FIG. 8 is a graph in which the value of the difference voltage E _j is plotted by changing the value of the dimension L ₁ while keeping the angular velocity ω constant.

[0030]

[Examination of Results] As can be seen from FIG. 8, the dimension L ₁ = 6 to 7
The difference voltage E _j is maximum between mm and E _j is minimum near the dimension L ₁ = 3 mm. It can be seen that this value correlates with the change in the resonance sharpness Q of Experiment 1. It is easy to understand if a standing wave is generated in the X-axis direction due to a component force in the X-axis direction (shown by a chain line ---) as shown in FIG. 9 even when excitation is performed in the Y-axis direction.

[0031]

[Clarification of operation] From Experiments 1 and 2, the point where the sound pressure generated in case M by self-excitation and disturbing self-excitation is minimum (λ /
When the oscillator 1 is placed in 4), it is Q minimum (self-excitation is disturbed), and when it is placed at the maximum (λ / 2) point, it is Q maximum (self-excitation is not disturbed). I know that there is. This fact seems to be contradictory. There is no literature that clarifies this fact. Therefore, the invention and the like were considered as follows.

An equivalent circuit of the voice piece type vibration gyro is shown in FIG. In FIG. 10, Z _x and Z _Y represent mechanical impedances when the vibrator 1 is vibrating in the X-axis direction and when vibrating in the Y-axis direction, and G _x ⁻¹ and G _Y of the matrix are gyroscopes. The conversion coefficient is shown. When the rotational angular velocity ω is set to ω = 0 and the vibrator 1 is vibrated in the X-axis direction (Experiment 1)
The equivalent circuit of can be expressed as shown in FIG. 11 when the disturbing sound pressure is ignored. Now take into account the disturbing sound pressure, sound pressure in the case M, the wave impedance z _x1 of air by sealing the sound pressure in the distribution of particle velocity 13, and the case M z _x1 = jZ ₀ cotkL ₁ Can be expressed as Where k is the propagation constant of a sound wave in air, Z ₀
Indicates the acoustic impedance of air, respectively. It is considered that the impedance in the direction perpendicular to the length direction of the vibrator 1 is distributed constant in the length direction of the vibrator 1. In order to simplify the equivalent circuit, it is considered that z _x1 is connected in parallel with Z _x as shown in FIG. Now, the oscillator 1 has the inductance L and the capacitance C of the frequency f ₀ (= 1 / √L in FIG. 11).
If it is excited in C), its equivalent circuit is shown in FIG.
Becomes In FIG. 14, R ₀₁ represents resonance resistance, and R ₀₁ ∝
1 / Q ₀ , and Q ₀ is the resonance sharpness (z _x1
Resonance sharpness when is ignored. Oscillator 1
By changing the value of the dimension L ₁ from the center of the vibrator 1 remains 1 was excited at a frequency f ₀ to the inner wall M 'of the case M a,
In the case of impedance z _x1 = jZ ₀ cotkL ₁ , when kL ₁ = λ / 4, z _x1 = 0 (1) When kL ₁ = λ / 2, z _x1 = infinity (2).

That is, in the case of the equation (1) (kL ₁ = λ /
2), the equivalent circuit is as shown in FIG. 15, and z _x1 is in a parallel resonance state, and has little influence on the vibration of the vibrator. Similarly, in the case of equation (2) (kL ₁ = λ / 4), the equivalent circuit is shown in FIG. 16, and the total resonance sharpness Q of this circuit is 1 / Q = 1 / Q ₀ + 1 / Q ′, that is, Q = Since Q ₀ Q '/ (Q ₀ + Q'), the total resonance sharpness Q is lowered. Here, Q ′ indicates the standing wave resonance sharpness in the air in the case M.

Further, from Table 1, when λ / 4, the dimension L ₁ = 3
When mm and λ / 2, the dimension L ₁ = 6 mm. E _L1 / E ₀ is the largest in terms of dimension L ₁ = 3 mm in FIG. 5 from the above results (Q min), it can be seen that the minimum (Q max) when the dimension L ₁ = 6 mm. In these experiments,
Center of the vibrator 1 is placed in the center of dimension 2L ₁ between the inner surface of the side wall of the case M, since the measurement for the dimensions L ₁ from the transducer 1 to the sidewall inner surface, the dimension between the inner surface of the side wall of the case M is twice that (= 2L ₁ ).

According to a feature of the present invention, the present invention prevents the occurrence of a standing wave in the driving vibration direction X with reference to FIGS.
As shown in FIG. 3, the case M in which the vibrator 1 is mounted on the substrate 4 and fitted therein is formed by either a non-parallel surface or a curved surface. As a specific example, when the opposing inner wall surfaces of the case M in the drive vibration direction X are non-parallel surfaces as shown in FIG. 22, the frequency f ₀ of the sound element type vibrator 1 is 30 KHz, and the width of the case M is 2.
L ₁₁ = 6.0 mm, 2L ₁₂ = 8.0 mm, height h = 3.
As a result of carrying out with 4 mm, the sensitivities before covering with the case M and after covering with the case M were substantially the same.

Furthermore, if you curved case M as shown in FIG. 23, as the frequency f ₀ = 30 KHz the tuning-bar vibrator 1, the width 2L ₁₁ = 6.0 mm in case M, 2L ₁₂ = 8.
As a result of carrying out with 0 mm and a height h = 3.4 mm, the sensitivity before covering with the case M and the sensitivity after covering with the case M were substantially the same in this case as well. In addition, in any case where the case M is formed into a non-parallel surface or a curved surface, the sound wave interference in the driving vibration direction X inside the case M is substantially zero.
Met.

In the above embodiment, the driving vibration direction is X.
Although the detection vibration direction is set to Y in the above, it may be set in the opposite direction. Further, in the above embodiment, an example in which the vibrating gyro device is applied to a sound piece type that uses a rectangular parallelepiped rectangular parallelepiped vibrator has been described. ) Is applicable to the polyhedron sound piece type, and is equally applicable to the case of being applied to a tuning fork type or the like. In this case, the above-mentioned x-axis direction and y-axis direction refer to the x-axis direction component and the y-axis direction component of the n-sided cross section. Further, in the above embodiment, the pair of transducers are attached to the two adjacent faces of the vibrator which are composed of rectangular parallelepiped sound pieces each having a quadrangular cross section, but the three or more transducers are attached and driven.・ Detection can be performed.

[0038]

As is apparent from the above description, according to the vibrating gyro device of the present invention, the standing wave in the driving vibration direction is prevented from being generated inside the case, the acoustic interference is reduced, and the size is reduced. be able to.

[Brief description of drawings]

1A and 1B are an explanatory top view and an explanatory plan view, respectively, of a vibration gyro device assembled and verified as an experimental device.

FIG. 2A and FIG. 2B are characteristic diagrams showing a relationship between a vibrator of a vibrating gyro device, dimensions of a case, and standing waves, respectively.

FIG. 3 is a circuit diagram for exciting a vibrator of the vibration gyro device in the X-axis direction.

FIG. 4 is an equivalent circuit diagram of a vibrator excited in the X-axis direction.

FIG. 5 is an output voltage characteristic diagram when the dimensions of the case are changed.

FIG. 6 is a circuit diagram for exciting a vibrator of the vibrating gyro device in the Y-axis direction.

FIG. 7 is an equivalent circuit diagram of a vibrator excited in the Y-axis direction.

FIG. 8 is an output voltage characteristic diagram when the dimensions of the case are changed.

FIG. 9 is an explanatory diagram showing a component force in the X-axis direction generated when a vibrator of the vibrating gyro device is excited in the Y-axis direction.

FIG. 10 is an equivalent circuit diagram of the vibration gyro device.

FIG. 11 is an equivalent circuit diagram of the vibration gyro device when the vibrator of the vibration gyro device is vibrated in the X-axis direction and the interfering sound pressure is ignored.

12 is an equivalent circuit diagram of the vibration gyro device, which is drawn by simplifying the equivalent circuit diagram shown in FIG.

FIG. 13: Sound pressure in the case, taking into account the disturbing sound pressure,
The figure which shows distribution of particle velocity.

FIG. 14 shows a vibrator of the vibration gyro device with a frequency f ₀ (= 1 / √L) of the inductance L and the capacitance C in FIG.
The equivalent circuit diagram of the vibration gyro device when excited by C).

FIG. 15 is an equivalent circuit diagram of the vibration gyro device when the value of the dimension is changed and the value is a specific value.

FIG. 16 is an equivalent circuit diagram of the vibration gyro device when the dimension value is changed and the value is a specific value.

17 (a) is a schematic perspective view of a vibrator and a transducer of the vibration gyro device according to the present invention, FIG.
17B is an explanatory diagram showing the vibration direction and voltage of the transducer when the vibration gyro device shown in FIG. 17A is driven, and FIG. 17C is a graph showing the angular velocity of the vibration gyro device shown in FIG. Explanatory drawing which shows the generation | occurrence | production direction of Coriolis force, and voltage.

FIG. 18 is a characteristic diagram showing the relationship between the impedance change of a transducer including a transducer used in a vibration gyro device and the frequency of an excitation signal.

FIG. 19 is a circuit diagram showing a concept of driving / angular velocity detection of the vibration gyro device.

FIG. 20 is a circuit diagram showing the principle of a drive circuit of a vibration gyro device.

FIG. 21 is an explanatory diagram showing dimensions of a vibrator and a case of the vibration gyro device.

FIG. 22 is an explanatory view showing shapes of a vibrator and a case of the vibration gyro device according to the present invention.

FIG. 23 is an explanatory view showing the shapes of a vibrator and a case of the vibration gyro device according to the present invention.

24A and 24B are respectively a schematic perspective view and a plan view of a vibrator and a transducer of a conventional vibrating gyro device.

25 (a) and 25 (b) are a plan explanatory view and a bottom explanatory view showing a state of being fitted in the case of the conventional vibrating gyro device, respectively.

FIG. 26 is an explanatory plan view showing a state in which the case is fitted in another conventional vibration gyro device.

27 (a) and 27 (b) are respectively a plan explanatory view showing a state of being fitted in a case of a conventional vibrating gyro device and a characteristic view showing a relationship between standing waves inside the case.

[Explanation of symbols]

 1 ... Resonator 4 ... Substrate M ... Case Fc ... Coriolis force X ... Drive vibration direction Y ... Detection vibration direction

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Yoshitaka Kanano 2-1-1, Oda Sakae, Kawasaki-ku, Kawasaki City, Kanagawa Prefecture, Showa Electric Wire & Cable Co., Ltd. (72) Takeo Yokoyama, 2 Sakae Oda, Kawasaki-ku, Kanagawa No. 1-1 No. 1 Showa Electric Cable Co., Ltd.

Claims (1)

[Claims] 1. A vibrator mounted on a substrate and fitted in a case,
A vibrating gyroscope for measuring a rotational angular velocity by detecting a bending vibration in a detection vibration direction caused by Coriolis force generated when a vibrator is driven to cause the bending vibration in a driving vibration direction to be generated. A vibrating gyro device, wherein at least a part of the case is formed by either a non-parallel surface or a curved surface.