JPH09203638A - Angular-velocity sensor device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inexpensive angular-velocity sensor device by decreasing soldering manhours. SOLUTION: A case 21 having walls 22 at least facing side surfaces, a substrate 24, which is provided at the bottom surface of the case 21, and a pair of supporting parts 27, which are provided on the upper part of the substrate in contact with the walls 22 of the case 21 with vibrationproof members 29, are provided. Furthermore, a sensor supporting plate 26, wherein a tuning-fork- unit attaching part 28 for bridging the supporting parts 27 and a tuning fork unit 25 mounted on the sensor supporting plate 26 are provided. An adjusting window 23 is provided so as to face a component mounted on the substrate 24 in the case 21, wherein the substrate 24 is arranged at the sensor supporting plate 26, and the case 21 is sealed. This device is constituted in this way.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to an aircraft, an automobile,
The present invention relates to an angular velocity sensor device used for attitude control of a vehicle or a navigation system.

[0002]

2. Description of the Related Art A conventional angular velocity sensor device will be described below with reference to the drawings.

FIG. 7 is an exploded perspective view of a conventional angular velocity sensor device, and FIG. 8 is a side sectional view of the same sensor. 7 to 8, 1 is a concave case formed by resin molding,
The upper surface thereof has four open ends and four pins 2 having a step that becomes narrower from the bottom surface toward the open end, and the side surfaces are provided with electric signal terminals 15 penetrating inward and outward and having airtightness. ing. 3 is a shape according to the inner shape of the case 1,
A sensor support plate having grooves 5 for fitting the vibration damping members 4 at two locations near the respective apexes of the opposite sides, and the vibration damping member 4 has a constricted portion 6 at the center. A vibration isolating member through hole 7 penetrating the pin 2 provided in the case 1 is formed on a surface which is fitted in the groove 5 and which is perpendicular to the constricted portion 6. A tuning fork unit 8 is provided on the sensor support plate 3. Reference numeral 9 is a collar provided on the antivibration member 4, and is composed of a collar through hole 10 that penetrates to the middle step of the pin 2 of the case 1. Reference numeral 11 drives the tuning fork unit 8 on one side or both sides to output an output signal. A board on which processing means for processing is mounted, and the case 1 is mounted on the board 11.
Has a substrate through hole 12 penetrating the pin 2. 13
Is a flexible wiring that electrically connects the tuning fork unit 8 and the substrate 11, and 14 is a lid that fits into the recess of the case 1 so as to seal it tightly. When the lid 14 is fitted into the recess of the case 1, nitrogen gas, etc. The dry inert gas in (1) was sealed and hermetically sealed to form an angular velocity sensor device.

[0004]

However, in the above-mentioned conventional structure, since the flexible wiring 13 is used to electrically connect the tuning fork unit 8 and the substrate 11, the material cost becomes high, and There is a problem that it takes a lot of man-hours for soldering for connecting to the substrate 11.

The present invention solves the above-mentioned conventional problems, and an object thereof is to provide an inexpensive angular velocity sensor device.

[0006]

In order to achieve the above object, the present invention has a structure in which a case in which a substrate is provided on a sensor support plate is provided with an adjustment window facing a component mounted on the substrate. Is to have.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION
A case having a wall on at least opposite side surfaces, a substrate provided on the bottom surface of the case, and a pair of support portions that are in contact with the wall of the case by a vibration isolation member provided on the top of the substrate, and A sensor support plate provided with a tuning fork unit mounting part bridging the support part, and a tuning fork unit mounted on the sensor support plate, and mounted on the substrate in a case where the substrate is arranged on the sensor support plate. The case is sealed by providing an adjusting window facing the above-mentioned component.

According to the invention of claim 2, the sensor support plate of the invention of claim 1 is H-shaped.

According to a third aspect of the invention, the sensor support plate of the first aspect of the invention is provided with a balance weight portion.

According to a fourth aspect of the invention, the sensor support plate of the first aspect of the invention is provided with a protrusion for ground wiring.

According to a fifth aspect of the invention, in the tuning fork unit of the first aspect of the invention, the axis of the tuning fork is provided near the center of gravity of the sensor support plate.

An angular velocity sensor device according to an embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is an exploded perspective view of an angular velocity sensor device according to an embodiment of the present invention, FIG. 2 is a top view showing a main part of the angular velocity sensor device, and FIG. 3 is a sectional view of the same.

1 to 3, reference numeral 21 is a case formed by resin molding, and a wall 22 is formed on at least the opposite side surfaces.
And a window 23 for adjusting the volume is provided on the bottom surface. The case 21 is preferably made of polybutylene terephthalate (hereinafter referred to as "PBT"), polyphenylene sulfide (hereinafter referred to as "PPS"), other engineering plastics, and the like.
BT is preferable in terms of thermal stability, mechanical strength, ease of molding, and electrical insulation.

Reference numeral 24 is a substrate made of glass epoxy attached to the bottom surface of the case 21, and a processing means (not shown) for driving the tuning fork unit 25 and processing an output signal is mounted on one side or both sides.

Reference numeral 26 denotes an H-shaped sensor support plate, which is provided on the upper portion of the substrate 24 and has a vibration damping member 29 which will be described later.
1 has a pair of support portions 27 that come into contact with the wall of the first wall, and a groove 30 for fixing the vibration damping member 29 on the side surface of the support portion 27.
And a tuning fork unit mounting portion 28 which has a bridge and which bridges the support portion 27. Reference numeral 25 is a tuning fork unit in which the axis of the tuning fork is provided near the center of gravity of the sensor support plate 26. The sensor support plate 26 is preferably made of a metal plate having a mass difference of about 10 times that of the tuning fork unit 25 and having a mechanical strength enough to support the tuning fork unit 25. Can be used for foam metal, brass, iron, other metals, ceramics, engineering plastics, etc., especially brass is workable, resistant to corrosion, mechanical strength, high vibration absorption and vibration absorption. This is preferable from the viewpoint of securing an appropriate mass for the purpose. The vibration isolator 29 has a U-shaped cross section,
It is fitted into the groove 30 of the sensor support plate 26. The vibration isolator 29 preferably has a mechanical strength for holding a sensor support plate 26 to which a tuning fork unit 25 described later is joined,
It is made of silicon rubber and is used after being compressed by about 15%. Silicon rubber, butyl rubber, urethane rubber or the like can be used as the material of the vibration isolating member 29, and silicon rubber is particularly preferable in terms of temperature characteristics.

Reference numeral 25 is a tuning fork unit, which is a sensor support plate 26.
It is provided above. Reference numeral 31 denotes a lead wire wired on the tuning fork unit, which has a tuning fork drive side lead wire 34 and an angular velocity detection side lead wire 35, and is directly wired to the board 24 and electrically connected thereto.

Reference numeral 32 denotes a lid which fits in the case 21, and the lid 3
2 includes a holding portion 33 for compressing and fixing the vibration damping member 29.
I own 4 of them and insert them between the case 21 and the anti-vibration member 2
9 is fixed. The material of the lid 32 is PB
T, PPS, other engineering plastics and the like can be used, and PBT is particularly preferable in terms of thermal stability, mechanical strength, ease of molding and electrical insulation.

FIG. 4 is an exploded perspective view of a tuning fork unit which is a main part of the angular velocity sensor device according to the embodiment of the present invention. In FIG. 4, one of the metal bodies 41 on the orthogonal plate is the detection unit 43, and the other is the drive unit 45. Detector 4
A plurality of vibrating piece through holes 53 are arranged in the metal body 41 of No. 3, the piezoelectric body 44 is mounted on one surface of the metal body 41, and one surface of the metal body 41 of the drive unit 45 is mounted. The piezoelectric element 44 is attached to the to form the resonator element 46. The vibrating piece through-holes 53 of the detecting section 43 are arranged so as to form a row in the orthogonal axis direction of the vibrating piece 46, and the metal block 47 described later matches the dimension of the metal body 41 of the driving section 45 in the plate width direction. Each of the vibrating bars 46 is arranged so as to be plane-symmetric with respect to a plane passing through the central axis of the tuning fork vibration and parallel to the metal body 41 of the drive unit 45. It has electrical continuity between them. Then, the two vibrating pieces 46 are bonded to the metal blocks 47 by soldering the driving portions 45 of the respective vibrating pieces 46, and the support pins 48 extending from the metal blocks 47 are used to interpose the support 4
The tuning fork unit 25 is fixed to 9 to form a tuning fork unit 25.

The operation of the angular velocity sensor device according to the embodiment of the present invention configured as described above will be described below.

FIG. 5 is a diagram for explaining the operating principle of the tuning fork unit which is the main part of the angular velocity sensor device according to the embodiment of the present invention. First, the force of action generated when an input angular velocity is applied will be explained. In FIG. 5, assuming that a rotation of angular velocity ω is applied around the central axis of the sensor in a state of flexural vibration at the velocity V in the driving direction, the Coriolis force F is “F = 2 mVω ”.

Since the Coriolis force F is perpendicular to the direction of the vibration velocity V, the angular velocity ω applied to the sensor can be detected by detecting the Coriolis force F. The detection of the Coriolis force F is converted into an electric signal by the piezoelectric body 42 stretched over the detection portion 43.

This electric signal corresponds to Coriolis force F when the detection unit 43 bends in the thickness direction due to Coriolis force, and the piezoelectric body 42 attached to the detection unit 43 is distorted due to expansion or contraction. The generated electric charge is generated and becomes an electric signal.

The electric signal generated in the piezoelectric body 42 is processed by the board 24 on which the signal processing means is mounted, whereby the input angular velocity ω given to the tuning fork unit 25 can be obtained.

In the present embodiment, the sensor support plate 2
6 is an H type, but as shown in FIG.
6 may be provided. Further, the sensor support plate may be provided with a protrusion 37 for ground wiring.

[0026]

As described above, according to the present invention, since the flexible wiring which has been used conventionally is deleted and the man-hour for soldering is reduced, an inexpensive angular velocity sensor device can be obtained.

[Brief description of drawings]

FIG. 1 is an exploded perspective view of an angular velocity sensor device according to an embodiment of the present invention.

FIG. 2 is a top view of the main part with a lid removed.

FIG. 3 is a sectional view of the same.

FIG. 4 is an exploded perspective view of a tuning fork unit, which is a main part of the same.

FIG. 5 is a diagram explaining the same operation.

FIG. 6 is a diagram in which a balance weight portion is provided on a sensor support plate which is a main portion in another embodiment of the present invention.

FIG. 7 is an exploded perspective view of a conventional angular velocity sensor device.

FIG. 8 is a sectional view of the same.

[Explanation of symbols]

 21 Case 22 Wall 23 Window 24 Substrate 25 Tuning Fork Unit 26 Sensor Support Plate 29 Anti-Vibration Member

Claims (5)

[Claims] 1. A case having a wall on at least opposite side surfaces, a substrate provided on the bottom surface of the case, and a pair of support portions abutting against the wall of the case by a vibration-proof member provided on the top of the substrate. And a tuning fork unit attached to the sensor supporting plate, and a tuning fork unit mounted on the sensor supporting plate, and a case in which the substrate is arranged on the sensor supporting plate. An angular velocity sensor device in which an adjustment window facing the parts mounted on the substrate is provided and the case is sealed. 2. The angular velocity sensor device according to claim 1, wherein the sensor support plate is H-shaped. 3. The angular velocity sensor device according to claim 1, wherein the sensor support plate is provided with a balance weight portion. 4. The angular velocity sensor device according to claim 1, wherein the sensor support plate is provided with a protrusion for ground wiring. 5. The angular velocity sensor device according to claim 1, wherein the tuning fork unit is provided with a shaft of the tuning fork near the center of gravity of the sensor support plate.