JPH09192933A - Micro-electrolytic machining process and device therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To facilitate a micro-grooving process with a high degree of accuracy having a degree of submicron by precisely controlling the degree of electrolytic machining of a workpiece. SOLUTION: An electrode tool 23 and a workpiece 22 are unmovably secured, relative to each other, with a predetermined gap defined therebetween, and a machining process is carried out without moving the electrode tool 23, and accordingly, the degree of accuracy of micro-grooving is prevented from lowering due to errors in feed of the electrode tool 23. Further, a power value fed from an electrolytic processing power source 24 is measured, and a degree of electrolytic processing for the workpiece is controlled by a process control means 27 in accordance with a relationship between the total power value which has been previously obtained and which is required for processing, and the degree of processing, and accordingly, the final micro-grooving degree can be precisely obtained.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a micro-electrolytic machining method in which a workpiece is electrolytically machined by passing an electric current through an electrolytic solution flowing at a high speed between an electrode tool and a workpiece which are arranged to face each other. The present invention relates to a small amount electrolytic processing method and apparatus.

[0002]

2. Description of the Related Art Electrolytic machining is carried out by concentrating electrolytic elution on a desired portion of a workpiece.
For example, an electrolytic processing apparatus as shown in FIG. 11 is conventionally known. That is, as shown in FIG. 11, while the workpiece 4 is placed on the jig 3 installed on the base 1 with the insulator 2 interposed therebetween, the jig 4 is placed close to the workpiece 4. The electrode tools 5 are arranged to face each other. The workpiece 4 is connected to the positive electrode (+ electrode) side of the electrolytic processing power source (not shown), and the electrode tool 5 is connected to the negative electrode (−) side.

The electrolytic solution 6 stored outside is supplied to the gap between the electrode tool 5 and the workpiece 4 through a filter 8 by a pump 7 as an electrolytic solution supply means, and the electrode tool 5 and the workpiece 4 are processed. While flowing the electrolytic solution 6 between the workpiece 4 and the workpiece 4, electricity is applied between them. As a result, the work piece 4 is electrochemically eluted and the work piece 4 is electrolytically machined.

At this time, the feeding device 1 is attached to the electrode tool 5.
0 is attached, and a predetermined machining gap (equilibrium gap) is maintained between the two as the electrode tool 5 is fed to the workpiece 4 side as the machining on the workpiece 4 progresses, and as a result, In addition, a shape that is the inverse of the shape of the electrode tool 5 is formed on the workpiece 4. The gas generated by such electrolytic processing is exhausted to the outside by the fan 11. Further, although various electrolytic products are contained in the electrolytic solution heated by Joule heat, the used electrolytic solution 12 is cleaned through the centrifuge 13, and then the electrode tool 5 and the work piece are processed again. It is designed to be supplied to the object 4.

[0005]

However, in the conventional device having such a structure, the electrode tool 5 is processed while being fed to the workpiece 4 side.
However, there is a problem that it is difficult to maintain the equilibrium gap at all times, and the machining amount cannot be controlled with high precision. Further, such a problem of processing accuracy also arises from the fact that the processing amount varies in the flowing direction of the electrolyte due to the influence of Joule heat and gas generated during processing. Therefore, it is considered that an error of about ± 30 μm naturally occurs in the conventional electrolytic machining in which the machining amount is controlled based on the equilibrium gap. Therefore, the electrolytic machining is currently applied only in a narrow range. Is.

On the other hand, an object of the present invention is to provide a minute amount electrolytic processing method and apparatus capable of easily performing high precision processing of submicron level at a processing depth of a minute amount. .

[0007]

In order to achieve the above object, a minute amount of electrolytic processing method according to the present invention is to place an electrode tool and a workpiece, which are respectively connected to a positive electrode and a negative electrode of an electrolytic processing power source, close to each other. In the minute amount electrolytic processing method, which is arranged facing each other and performs processing while eluting the work piece by flowing electricity while flowing an electrolytic solution between the electrode tool and the work piece, the electrode tool and the work piece The object is fixed in a relatively immovable state with a predetermined machining gap, and a small amount of electrolytic machining of the workpiece is controlled by controlling the total amount of electricity supplied from the electrolytic machining power source. There is.

Further, the microelectrolytic machining apparatus according to the present invention comprises an electrolytic machining power source, an electrode tool and a workpiece which are respectively connected to the positive electrode and the negative electrode of the electrolytic machining power source and are arranged in close proximity to each other. An electrolytic solution supply means for flowing an electrolytic solution between the electrode tool and the workpiece,
In an electrolytic machining apparatus adapted to perform electrolytic machining of a work piece by energizing between the electrode tool and the work piece, an electrode tool and a work piece that are fixed in a stationary state with a predetermined machining gap. And a machining control means for controlling a small amount of electrolytic machining of the workpiece by controlling the total amount of electricity supplied from the electrolytic machining power source.

In the minute amount electrolytic processing method and apparatus having such a configuration, since the machining is carried out while the electrode tool is fixed without moving, it is possible to prevent the machining accuracy from being lowered due to the feeding error of the electrode tool. Further, since the total amount of electricity is controlled by utilizing the relationship between the amount of electrolytic machining and the total amount of electricity required for the electrolytic machining, the machining depth is accurately manipulated and high-precision electrolytic machining is easily performed. It is like this.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION First, a minute electrolytic processing apparatus according to an embodiment of the present invention will be described with reference to the drawings.
As shown in FIG. 1, a hollow housing 21 made of a non-conductive material is provided with a cavity for electrolytic processing so as to extend in a substantially horizontal direction. A flat plate-shaped workpiece 22 made of a metal material is fixed therein in a substantially horizontal state. Stainless steel (SUS304) or copper is used as the material of the cylindrical workpiece 22 in this embodiment.

A flat plate electrode tool 23 is fixed substantially horizontally so as to face the flat plate workpiece 22 above. As shown in FIG. 2, the facing portion of the flat electrode tool 23 has a pair of electrode exposed portions 23a and 23a.
It is covered with the non-conductive material 23b except for a, and the parallelism between the electrode tool 23 and the flat plate-like work piece 22 is adjusted, whereby the electrode exposed portions 23a and the flat plate-like work piece 22 are Are configured to have uniform processing intervals over the entire surface. In this way, the electrode machining portion A is formed by the electrode exposed portion 23a of the electrode tool 23 and the flat plate-shaped workpiece 22 being opposed to each other with a predetermined machining gap therebetween. The processing gap in the electrolytic processing portion A is set to 0.1 mm in this embodiment.

Further, a contact piece 24a extending from the positive electrode (+ pole) of the pulsed power source 24 for electrolytic processing is connected to the flat work piece 22, and at a midway portion of the connection path,
An ammeter 25 is provided for detecting the value of current flowing between the electrode tool 23 and the flat work piece 22. On the other hand, a contact piece 24b extending from the negative electrode (−) of the electrolytic machining pulse power source 24 is connected to the electrode tool 23, and the electrolytic machining pulse power source 24 is provided at an intermediate portion of the connection path. An energizing switch 26 for turning on and off is provided. The output voltage of the pulsed power source 24 for electrolytic processing in the present embodiment is the same as that of the electrode tool 23 and the flat work piece 22.
Is set to a voltage such that the energization current density between the and is, for example, 40 A / cm ² .

Electrode tool 23 detected by the ammeter 25
The value of the energized current between the flat plate-shaped work piece 22 and the flat work piece 22 is used as data for calculating the current density together with the facing area between the electrode tool 23 and the flat work piece 22. Further, the output voltage of the electrolytic machining pulse power supply 24 is set so that the obtained current density becomes a predetermined value, and the total electric quantity for obtaining the target electrolytic machining quantity, that is, the total electric quantity, is set from the set output voltage. The energization time is determined. Each of these methods will be described later.

On the other hand, the above-mentioned energizing switch 26 is configured to be turned on / off by a command from the timer 27. Specifically, the total energization time for obtaining the above-described target electrolytic machining amount is set in the timer 27, and the command signal from the timer 27 causes the energization switch 26 to be turned off and cut off when the total energization time has elapsed. It Then, by controlling the total energizing time, a shallow flat concave portion is formed in the flat plate-shaped workpiece 22 at a predetermined depth.

In the electrolyte storage tank 30, NaN
Electrolyte 3 containing 30% by weight of O3 (sodium nitrate)
1 is stored in a predetermined amount, and a liquid supply pipe 32 and a liquid discharge pipe 33 as an electrolytic solution supply means are connected between the electrolytic solution storage tank 30 and the housing 21. Of these, the liquid supply pipe 32 enters the inside of the housing 21 from the right side in the upper part of the housing 21 via the pump 34 from the electrolyte storage tank 30 and extends downward in a substantially vertical direction by a predetermined amount to the right end in the figure of the cavity. It opens to the side. The liquid discharge pipe 33 extends from the left end of the cavity in the drawing toward the inside of the housing 21 in a substantially vertical direction by a predetermined amount, and extends from the upper left of the housing 21 in the drawing toward the electrolytic solution storage tank 30. That is, the electrolytic solution 3 supplied into the housing 21 through the liquid supply pipe 32
The reference numeral 1 indicates the left side of the flat plate-shaped work piece 22 from the right side of the flat plate-like work piece 22 through the electrolytic processing portion A between the flat plate-shaped work piece 22 and the electrode exposed portion 23a of the electrode tool 23. It is configured so as to be discharged into the electrolyte storage tank 30 through the liquid discharge pipe 33.

On the other hand, as shown in FIG. 3, pressure adjusting relief valves 35 and 36 are provided on the inlet side and the outlet side of the electrolytic processing section A, respectively, and these Pressure gauges 37 and 38 are attached to the pressure adjusting relief valves 35 and 36, respectively. The pressure adjusting relief valves 35 and 36 are appropriately operated so that these pressure gauges 37 and 38 show predetermined values, and accordingly, the flow velocity of the electrolytic solution 31 in the electrolytic processing section A is set to a predetermined value. Is configured to. In this embodiment,
Pressure gauge 37 is 10 kgf / cm ² , pressure gauge 38 is 1 kg
f / cm ² and is set to be, thereby, the flow velocity of the electrolytic solution 31 in the electrolytic processing unit A of the machining gap 0.1mm, are maintained at a value of 10 m / sec and forth.

At this time, the total amount of electricity for obtaining the above-described target electrolytic processing amount, that is, the voltage to be applied to the flat plate-shaped workpiece 22 and the total energization time are as follows based on the relational data obtained in advance. It is decided by various methods.

First, the current density (A / cm ² ) of the applied current between the electrode tool 23 and the flat plate-shaped workpiece 22.
And the applied voltage for obtaining the current density, that is, the output voltage (V) of the pulsed power source 24 for electrolytic processing, is shown by the material of the flat plate-shaped workpiece 22, for example, stainless steel (FIG. 4) or copper (FIG. 4). It is obtained in advance for each 5). The data shown in FIG. 4 and FIG. 5 and other data described below are the average values of the measured values when electrolytic processing is performed by several μm for each processing material. That is, as the machining gap gradually expands as the electrolytic machining progresses, the machining speed changes accordingly.
Minute amount (10μ) with respect to the initial processing gap (0.1mm)
It is the value obtained by averaging the values when only (m) is processed.

When stainless steel (SUS304) is adopted as the flat work piece 22, the current density of the energizing current between the electrode tool 23 and the flat work piece 22 (horizontal axis) will be described with reference to FIG. A / cm ² ) and the applied voltage (vertical axis; V) for obtaining the current density are obtained.
That is, from FIG. 4, the electrode tool 23 and the flat work piece 22 are
It can be seen that 6 V is required as the output voltage of the pulse power source 24 for electrolytic processing in order to set the current density of the energizing current between 40 and 40 A / cm ² .

Next, as shown in FIG. 6, the output voltage of the pulsed power source 24 for electrolytic processing, that is, the voltage applied to the plate-shaped workpiece 22 (horizontal axis; V) and the machining depth per unit time (vertical axis; μm). / Sec) in advance. As is clear from the relationship between the applied voltage to the flat work piece 22 and the working depth per unit time in FIG. 6, when the applied voltage to the flat work piece 22 is set to 6V,
It can be seen that the processing depth per unit time is about 8 μm.

If the current density is fixed and the machining time is changed in this way, the machining amount, that is, the machining depth, changes in accordance with the machining time. Therefore, as in this embodiment,
If the current density is managed based on the respective relational data obtained in advance, the target shape accuracy can be obtained. Therefore, for the final machining amount (machining depth), by strictly controlling the total amount of electricity required for machining, the machining amount of several microns can be controlled with sub-micron order accuracy, and high precision electrolytic machining is facilitated. can get.

Further, the relationship between the target electrolytic processing amount and the processing time for obtaining this target electrolytic processing amount, that is, the total energization time is obtained as shown in FIG. 7, for example. The relational data shown in FIG. 7 is obtained by previously obtaining the relation between the target electrolytic machining depth (vertical axis; μm) and the machining time (horizontal axis; sec). The ON / OFF time of the output voltage from the pulse power source 24, the type of electrolyte, the amount of gap (machining gap) between the electrode tool 23 and the flat work piece 22, and the applied voltage are parameters.

More specifically, FIG. 7 shows that the on time of the output voltage from the electrolytic machining pulse power supply 24 is 5 mse.
c shows the relationship between the electrolytic machining amount and the total energization time (machining time) when the off time is 45 msec. From FIG. 7, the target machining amount (machining depth) is 10
It can be seen that the processing time required for μm is 12 seconds.

The output voltage (6 V) and the machining time (12 V) of the electrolytic machining pulse power source 24 thus obtained and set.
8) shows the result of the actual processing by the second). That is, in FIG. 8, the four electrode plates P1 and P
2, P3, P4 is 10mm processing area length (from P1 tip to P4
Are arranged side by side along the flow of the electrolytic solution indicated by the arrow (up to the rear end), and the actual machining depth by these electrode plates P1, P2, P3, P4 is measured as an error with respect to the target machining depth of 10 μm. I tried to. The result is +0.1 μm, ± 0.0 μm, − in order from the upstream side in the flow direction of the electrolytic solution.
The results were 0.2 μm and 0.2 μm, which were within the extremely small processing error on the order of submicron.

Next, a mode of the electrolytic processing method according to the present invention using the above-described electrolytic processing apparatus will be described. First, the electrode tool 23 is placed in the housing 21 of the electrolytic processing apparatus described above.
And the flat plate-shaped workpiece 22 are fixed so as to face each other in parallel to form an electrolytically processed portion A having a predetermined processing gap (0.1 mm). Then, the energizing switch 26 is turned on, so that the electrolytic machining pulse power source 24 moves the electrolytic machining section A.
A predetermined pulse voltage is applied to. By using such a pulse voltage, it is possible to suppress the accumulation of gas such as Joule heat and hydrogen gas generated by electrolytic processing, and the "variation" of the processing amount in the flow path direction is reduced as compared with the case of DC. The processing accuracy can be improved.

Next, the output voltage from the pulsed power source 24 for electrolytic processing and the total energizing time (processing time) are determined based on the respective relational data (see FIGS. 4 to 7) previously obtained as described above. For example, an output voltage of 6 V is set for the electrolytic machining pulse power source 24, and a total energization time (processing time) of 12 seconds is set for the timer 27. Then, the electrolytic machining is started by the start of the voltage output from the electrolytic power source 24 for electrolytic machining, and the energizing switch 26 is turned off by a signal from the timer 27 when the total energizing time has elapsed after the machining is started. Processing ends with.

In the minute amount electrolytic processing method and apparatus according to such an embodiment, since the machining is performed while the electrode tool 23 is fixed without moving, the electrode tool 2
It is possible to prevent the processing accuracy from being lowered due to the feeding error of No. 3.
Further, since the total amount of electricity is controlled on the basis of the relationship between the amount of electrolytic machining and the total amount of electricity required for the electrolytic machining, the machining depth is accurately controlled and high-precision electrolytic machining is performed. .

In the above embodiment, the machining depth is controlled by using the range in which the relationship between the electrolytic machining amount and the total electricity amount required for the electrolytic machining is in a substantially linear proportional relationship.
It is not always necessary to use a linear proportional relationship, and it is also possible to use a range that is not in a proportional relationship.

Next, in the embodiment apparatus according to FIG. 9 in which the same components as those of the above-described embodiment apparatus are represented by the same symbols, the electrode tool 23 detected by the ammeter 25 and the workpiece 2 are detected.
The value of the energizing current between 2 and 2 is input to the electricity amount calculation means 28 which constitutes the processing control means. In the electricity quantity calculating means 28, the current density is calculated from the energizing current value between the electrode tool 23 and the workpiece 22 detected by the ammeter 25 and the facing area of the electrode surface of the electrode tool 23. At the same time, the total amount of electricity for obtaining the target electrolytic processing amount, that is, the total energization time and the applied voltage are calculated from this current density. The calculation method in this electric quantity measuring means 28 is the same as that described above, and therefore its explanation is omitted.

The electric quantity calculating means 28 outputs a total electric quantity for obtaining the target electrolytic processing quantity, that is, a total energization time and applied voltage setting command signal. The signal is received by the energization control means 29 which also constitutes the processing control means. The processing control means 29 is provided with a timer 27, and in response to a command from this timer 27, the above-mentioned energizing switch 26.
Is turned on and off. Specifically, the turning-off operation of the energizing switch 26 by the timer 27 is performed when the total energizing time set by the electricity amount calculating means 28 has elapsed. The applied voltage setting command signal is received by the electrolytic machining pulse power supply 24, and the applied voltage designated by the setting command signal is set by the electrolytic machining pulse power supply 24.

In such an electrolytic machining apparatus, first, the output voltage of the electrolytic machining pulse power supply 24 is set so as to obtain a predetermined current density.
The current value from 4 is always detected by the ammeter 25.
The actual energization current value between the electrode tool 23 and the flat plate-shaped workpiece 22 detected by the ammeter 25 is input to the electric quantity calculating means 28 constituting the processing control means, and the electric quantity calculating means 28 is supplied. At, the current density is calculated based on the actual energization current value detected by the ammeter 25. Further, from this current density, the total amount of electricity required for processing, that is, the total energization time is calculated based on the relational data obtained in advance (see FIGS. 4 to 7).

Then, the energization control means 29 is operated by the total energization time setting signal output from the electricity amount calculation means 28.
The total energization time is set in the timer 27 provided in the above, whereby the energization switch 26 is turned off by the switching signal issued from the timer 27 when the total energization time after the ON operation has elapsed, and thereby the machining is completed.

According to the apparatus according to such an embodiment, the control of the total energization time (processing time) and the applied voltage is automatically and accurately performed in real time.
The above-described fine electrolytic processing is performed more efficiently and with high accuracy. That is, the output voltage value of the pulsed power source 24 for electrolytic processing, the processing gap (gap) between the workpiece 22 and the tool electrode 23, the electric conductivity of the electrolytic solution 30, and the like deviate from the planned values due to some reason. In this case, the current density changes and an error occurs in the machining amount.However, if the control system as in the above-mentioned embodiment is provided, each set value is automatically maintained at a substantially constant value. , Fine electrolytic processing is performed extremely well.

Next, the electrolytic processing apparatus of the embodiment shown in FIG. 10 will be described. In this embodiment, a hollow housing 41 made of a non-conductive material is provided with a cavity for electrolytic processing, and a metal is provided at a substantially central portion in the cavity in the axial direction (vertical direction in the drawing). A hollow cylindrical workpiece 42 made of a material is fixed.

A solid cylindrical electrode tool 43 is fixed to the housing 41 so as to penetrate the cylindrical workpiece 42 in the axial direction. Both ends of the electrode tool 43 in the axial direction (vertical direction in the drawing) are fixed to the closing walls 41a and 41b at both ends of the housing 41 in the axial direction, respectively, and are formed at a substantially central portion in the axial direction of the electrode tool 43. The electrode exposed portions 43a, 43a are arranged so as to face the inner peripheral wall surface 42a of the cylindrical workpiece 42.

That is, the outer surface of the electrode tool 43 is covered with the non-conductive material 43b except the above-mentioned electrode exposed portions 43a, 43a, and the electrode exposed portion 23a of the electrode tool 43 is a cylindrical work piece. The coaxiality of the electrode tool 43 and the cylindrical work piece 42 is adjusted so that a uniform working gap is provided over the entire circumference with respect to the inner circumferential wall surface 42a of the work piece 42. Then, as described above, the electrode exposed portion 43a of the electrode tool 43 is
The electrolytic processed portion B is formed by the and the inner peripheral wall surface 42a of the cylindrical workpiece 42 being opposed to each other with a predetermined processing gap therebetween. The machining gap in this electrolytic machining section B is
In this embodiment, it is set to 0.1 mm.

Further, a contact piece 24a extending from the positive electrode (+ pole) of the pulsed power source 24 for electrolytic processing is connected to the cylindrical workpiece 42, and the electrode tool 43 is provided in the middle of the extension. An ammeter 25 is provided to detect the value of the energizing current between the cylindrical workpiece 42 and the workpiece 42. On the other hand, a contact piece 24b extending from the negative electrode (−) of the electrolytic processing pulse power source 24 is connected to the electrode tool 43,
An energizing switch 26 for turning on / off the pulsed power source 24 for electrolytic processing is provided in the extending portion. The output voltage of the electrolytic machining pulse power source 24 in the present embodiment is set to a voltage at which the energization current density on the tool electrode surface between the electrode tool 43 and the cylindrical workpiece 42 is, for example, 40 A / cm ^2. Has been done.

Of the liquid supply pipe 52 and the liquid discharge pipe 53 as the liquid electrolyte supply means for connecting between the liquid electrolyte storage tank 30 and the housing 41, the liquid supply pipe 52 is a pump from the liquid electrolyte storage tank 50. The liquid discharge pipe 53 is connected to the upper side of the housing 41 in the figure, that is, the cavity on the upper side of the cylindrical work piece 42 via 54, and the liquid discharge pipe 53 is connected to the lower side of the housing 41 in the figure, that is, It extends from the inside of the cavity on the lower side of the cylindrical workpiece 42 toward the electrolyte solution storage tank 50,
The electrolytic solution 51 supplied from the liquid supply pipe 52 into the housing 41 is electrolytically machined between the cylindrical workpiece 42 and the electrode exposed portion 43a of the electrode tool 43 from the upper side of the cylindrical workpiece 42. It is configured so as to pass through the portion B to the lower side of the cylindrical work piece 42 and be recovered from there through the liquid discharge pipe 53 into the electrolytic solution storage tank 50.

Since other configurations are the same as those of the above-described embodiment, the corresponding components are designated by the same reference numerals and the description thereof will be omitted. The same electrolytic processing method can be performed, the same action and effect can be obtained, and a shallow annular recess is formed in the inner surface of the cylindrical workpiece 42 to a predetermined depth.

In this case, since the electrode exposed portion 43a of the electrode tool 43 and the cylindrical work piece 42 are concentrically arranged so as to face each other at the inner and outer circumferences, the both of them face each other. The areas differ from each other by the arrangement relationship on the inner circumference side and the outer circumference side. Therefore, since the current densities differ by the area difference between the two, in setting the total amount of electricity for obtaining the above-described target electrolytic processing amount, that is, the voltage to be applied to the cylindrical workpiece 42 and the total energization time. Requires that the relational data obtained in advance be corrected corresponding to the area difference between the two.

Although the embodiment of the invention made by the present inventor has been specifically described above, the present invention is not limited to the above-mentioned embodiment, and various modifications can be made without departing from the scope of the invention. Needless to say. For example, in the above-described embodiment, the on / off operation of the energizing switch 26 is performed by the timer means (see reference numeral 27), but the output pulses from the pulse power source 24 for electrolytic processing are counted and based on the total number of pulses. It is also possible to configure so that the energizing switch 26 is turned on and off.

Further, the present invention can be similarly applied to the electrolytic processing for the above-mentioned SUS material and metal materials other than copper, and also applicable to all kinds of shape processing.

[0043]

As described above, the minute amount electrolytic processing method and apparatus according to the present invention fixes the electrode tool and the workpiece in a relatively immovable state with a predetermined processing gap, and does not move the electrode tool. By performing machining, the machining accuracy is prevented from lowering due to the error in feeding the electrode tool, and the amount of electricity supplied from the electrolytic machining power source is measured, based on the relationship between the total amount of electricity required for machining and the amount of machining. Since it is configured to accurately obtain the final machining amount by controlling the electrolytic machining amount of the workpiece, it is possible to accurately control the machining amount to the workpiece and perform high precision machining of sub-micron level. Can be easily obtained.

Therefore, according to the present invention, machining which must be performed by high-cost machining such as cutting can be realized at low cost by electrolytic machining, and a shape which cannot be formed by rolling is also provided by the present invention. By the electrolytic processing according to the above, it is possible to perform the processing easily, with high accuracy and at low cost. Since more accurate processing is possible, electrolytic processing can be adopted as surface finishing processing such as obtaining a glossy surface or a mirror surface with a surface roughness of 1 μRmax or less by appropriately controlling the electrolytic conditions. Therefore, the reliability and applicability of electrolytic processing can be dramatically improved.

[Brief description of the drawings]

FIG. 1 is a principle explanatory diagram showing a minute amount electrolytic processing apparatus according to an embodiment of the present invention.

2 is an explanatory plan view showing an electrode tool used in the apparatus of FIG. 1. FIG.

FIG. 3 is a system explanatory view showing a circulation system of an electrolytic solution used in the apparatus of FIG.

[Fig. 4] Stainless steel (SUS304) as a processing material
6 is a data diagram in which the relationship between the current density and the applied voltage in the case of adopting is obtained in advance.

FIG. 5 is a data diagram in which the relationship between the current density and the applied voltage is previously obtained when copper is used as the processing material.

[Fig. 6] Stainless steel (SUS304) as a processing material
It is a data diagram which calculated beforehand the relationship between the voltage and the processing depth per unit time in the case of adopting.

FIG. 7 is a previously obtained data diagram showing the relationship between processing time and processing depth under predetermined conditions.

FIG. 8 is a target value 1 for the difference in machining amount depending on the position in the flow direction.
It is a plane explanatory view showing the result measured as an error from 0 micrometer.

FIG. 9 is a principle explanatory view showing an electrolytic processing apparatus according to another embodiment of the present invention.

FIG. 10 is a principle explanatory view showing an electrolytic processing apparatus according to still another embodiment of the present invention.

FIG. 11 is a principle explanatory view showing a general electrolytic processing apparatus.

[Explanation of symbols]

 22, 42 Workpiece 23, 43 Electrode tool A, B Electrolytic machining unit 24 Electrolytic machining pulse power supply 25 Ammeter 26 Energizing switch 27 Timer 28 Electric quantity computing means (machining control means) 29 Energization control means (machining control means)

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Masato Gomei 5329 Shimosuwa Town, Suwa District, Nagano Prefecture Sankyo Seiki Co., Ltd.

Claims (7)

[Claims] 1. An electrode tool respectively connected to a negative electrode and a positive electrode of an electrolytic processing power source and a work piece are arranged in close proximity to each other, and an electrolytic solution is caused to flow between the electrode tool and the work piece. In a minute amount electrolytic processing method of performing processing while eluting the work piece by energizing the electrode tool while fixing the electrode tool and the work piece in a relatively stationary state with a predetermined working gap, A minute amount of electrolytic machining method characterized in that a minute amount of electrolytic machining of a workpiece is controlled by controlling a total amount of electricity supplied from a power source. 2. The total amount of electricity according to claim 1 is obtained by measuring a current value flowing between an electrode tool and a workpiece to obtain a current density, and obtaining a current density and a machining depth of a micron order obtained in advance. A minute amount electrolytic processing method, characterized in that it is calculated based on relational data with. 3. The electrolytic machining amount control according to claim 1, wherein energization between the electrode tool and the workpiece is stopped when a total energization time for obtaining a total electricity amount corresponding to a target machining amount has elapsed. A minute amount of electrolytic processing method characterized in that it is performed by. 4. An electrolytic processing power source, an electrode tool and a workpiece which are respectively connected to a negative electrode and a positive electrode of the electrolytic processing power source and are arranged in close proximity to each other, and between the electrode tool and the workpiece. In a minute amount electrolytic processing apparatus having an electrolytic solution supply means for flowing an electrolytic solution, and performing electrolytic processing of the workpiece by energizing between the electrode tool and the workpiece. An electrode tool and a workpiece that are fixed in a relatively immovable state with a gap, and machining control that controls a minute amount of electrolytic machining of the workpiece by controlling the total amount of electricity given from the electrolytic machining power source. And a minute amount of electrolytic processing apparatus. 5. The machining control means according to claim 4, wherein the current density is obtained by measuring the value of the current flowing between the electrode tool and the workpiece, and the current density and the machining depth on the order of microns are obtained in advance. A minute amount electrolytic processing apparatus comprising an electric quantity calculation means for calculating a total electric quantity required for processing based on relational data with the electric quantity. 6. The machining control means according to claim 4, wherein the energization between the electrode tool and the workpiece is stopped after a lapse of a total energization time for obtaining a total quantity of electricity corresponding to a target quantity of machining. A minute amount electrolytic processing apparatus comprising an energization control means for controlling a processing amount. 7. The minute amount electrolytic processing apparatus, wherein the energization control means according to claim 6 has a timer means for stopping energization when a set time calculated by the electricity amount calculation means has elapsed.