JPH09178599A - Method and equipment for testing airtightness - Google Patents

Method and equipment for testing airtightness

Info

Publication number
JPH09178599A
JPH09178599A JP34250495A JP34250495A JPH09178599A JP H09178599 A JPH09178599 A JP H09178599A JP 34250495 A JP34250495 A JP 34250495A JP 34250495 A JP34250495 A JP 34250495A JP H09178599 A JPH09178599 A JP H09178599A
Authority
JP
Japan
Prior art keywords
container
test
gas
pressure
helium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP34250495A
Other languages
Japanese (ja)
Other versions
JP2827995B2 (en
Inventor
Harumi Sasaki
晴美 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP34250495A priority Critical patent/JP2827995B2/en
Publication of JPH09178599A publication Critical patent/JPH09178599A/en
Application granted granted Critical
Publication of JP2827995B2 publication Critical patent/JP2827995B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To reduce the cost of test while shortening the test time by setting a container, for receiving an article to be tested and applying a static pressure thereto by introducing a gas, into a liquid thereby eliminating the danger where the cover or a sealing member of a pressure test container is scattered due to gas leak. SOLUTION: A space is formed between a submarine relay and the inner side face of a container 14 and injected with helium gas 13 from a helium compressor 1. At the time of test, the space between a pressure test container 10 and the container 14 is filled with a liquid 12 and the opening 15, 16 of container 10 is sealed by applying a cover 5. Subsequently, gas 13 is injected from the compressor 1. The gas 13 is injected through piping parts 2, 8 into the container 14 and applies a static pressure to the submarine relay. Since the container 10 is filled with water and the liquid 12 has volume compression rate lower than that of gas, the container 10 does not expand significantly even if the inner pressure is 800 atm. In the airtightness test, a helium gas detector 4 detects helium gas leaking into the relay.

Description

【発明の詳細な説明】Detailed Description of the Invention

【発明の属する技術分野】本発明は気密容器の試験方法
と試験装置に関し、特に外部からの圧力に対する気密容
器の気密性を試験する方法とその装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for testing an airtight container, and more particularly to a method and an apparatus for testing the airtightness of an airtight container against external pressure.

【0001】[0001]

【従来の技術】耐圧容器の耐圧試験に関し、容器内部を
高圧にした場合の当該容器の気密性試験については従来
から数多くの提案がなされている。しかし、外部からの
圧力に対する容器の気密性試験に関しては、前者に比べ
て情報が少ない。外部から大きな圧力を受ける例とし
て、海底ケーブルやこれと共に海底に敷設される海底中
継器などの各種装置がある。これらの装置は海底におけ
る大きな静水圧を受けるため、その容器には静水圧に対
する耐久性、気密性が要求される。
2. Description of the Related Art With respect to a pressure test of a pressure vessel, many proposals have been made on an airtightness test of the vessel when the pressure inside the vessel is high. However, there is less information on the airtightness test of the container against external pressure as compared with the former. As an example of receiving a large pressure from the outside, there are various devices such as a submarine cable and a submarine repeater laid along the submarine cable. Since these devices receive a large hydrostatic pressure at the sea floor, their containers are required to have durability against the hydrostatic pressure and airtightness.

【0002】本発明者は、従来から上記静水圧に対する
耐圧容器の気密試験を行う場合、図2に示される試験装
置により気密試験を行ってきた。以下にその方法と装置
について説明する。
[0002] The present inventor has heretofore performed a hermetic test using a test apparatus shown in FIG. 2 when performing an hermetic test on the pressure-resistant container against the hydrostatic pressure. The method and apparatus will be described below.

【0003】被試験品11は海底中継器である。この中
継器の気密保護容器は通常、ベリリウム銅合金により作
製され、形状は直径が約20から30センチメートル、
長さが約60から100センチメートルである。まず光
ファイバアンプを内部に設置した海底中継器の気密保護
容器に開孔を形成し、該開孔に配管部9を気密に接続す
る。配管部9は接続部7により配管部3に接続され、配
管部3はヘリウムガス検出器4に接続される。
The device under test 11 is a submarine repeater. The airtight protective container of this repeater is usually made of a beryllium copper alloy and has a shape of about 20 to 30 cm in diameter,
It is about 60 to 100 centimeters in length. First, an opening is formed in an airtight protection container of a submarine repeater in which an optical fiber amplifier is installed, and a pipe portion 9 is airtightly connected to the opening. The pipe section 9 is connected to the pipe section 3 by the connection section 7, and the pipe section 3 is connected to the helium gas detector 4.

【0004】次に、被試験品11を例えばステンレスな
どの金属製の圧力試験容器10内に設置する。被試験品
11はふた5の下面にワイヤで吊り下げられて設置され
る。圧力試験容器10の開口部はふた5で封止される。
ふた5には配管部8、9が貫通しており、配管部8は接
続部6により配管部2につながている。該配管部2はヘ
リウムガス圧縮器1に接続している。
Next, the DUT 11 is placed in a pressure test container 10 made of metal such as stainless steel. The DUT 11 is suspended from the lower surface of the lid 5 by a wire. The opening of the pressure test container 10 is sealed with the lid 5.
Piping portions 8 and 9 penetrate through the lid 5, and the piping portion 8 is connected to the piping portion 2 by a connection portion 6. The piping section 2 is connected to the helium gas compressor 1.

【0005】試験を行うときは、ヘリウムガス圧縮器1
から配管部2、8と開口部16を介してヘリウムガスを
圧力試験容器10内に導入する。試験圧力は800気圧
であり、これは8000メートルの海底を想定したもの
である。圧力試験容器10内がこの圧力になったてか
ら、1時間保持し、被試験品11内に通じているヘリウ
ムガス検出器4によりヘリウムを検出する。ヘリウムガ
ス検出器4は公知の装置であり、ヘリウム分子を磁界に
より曲げて他の気体分子から選別し、カウントする。被
試験品11においてリーク可能性のある部分は、ベリリ
ウム銅合金の溶接部、光ファイバ取り出し部のハンダ封
止部分、電線取り出し部のポリエチレン等を用いた封止
部分である。試験終了後は通常ヘリウムガスは回収され
る。
[0005] When performing the test, the helium gas compressor 1
Helium gas is introduced into the pressure test container 10 through the piping sections 2 and 8 and the opening 16 from the opening. The test pressure was 800 atm, which assumes a sea bottom of 8000 meters. After the pressure in the pressure test container 10 reaches this pressure, the pressure is maintained for one hour, and helium is detected by the helium gas detector 4 communicating with the DUT 11. The helium gas detector 4 is a known device, and helium molecules are bent by a magnetic field to select from other gas molecules and count. The portions of the DUT 11 that may leak are the welded portions of the beryllium copper alloy, the soldered portions of the optical fiber takeout portions, and the sealed portions of the electric wire takeout portions using polyethylene or the like. After the test, helium gas is usually collected.

【0006】[0006]

【発明が解決しようとする課題】しかし、上記気密試験
方法および気密試験装置には次のような問題がある。ま
ず、800気圧もの高圧を印加しており、また気体は外
圧に対する圧縮率が大きいため、圧力試験容器10の破
損による危険が大きいことである。特に、圧力試験容器
10の開孔部に設置するふた5を封止しているOリング
などの封止部材が破損し、大量のヘリウムガスが吹き出
し、ふた5またはOリングなどの封止部材が飛び散って
事故を起こす危険がある。
However, the above-described airtightness test method and airtightness test apparatus have the following problems. First, a pressure as high as 800 atm is applied, and the gas has a high compression ratio with respect to the external pressure. In particular, a sealing member such as an O-ring that seals the lid 5 installed in the opening of the pressure test container 10 is damaged, a large amount of helium gas is blown out, and the sealing member such as the lid 5 or the O-ring is damaged. There is a risk of scattering and causing an accident.

【0007】また、圧力試験容器10の大きさにもよる
が、上記試験装置は高価なヘリウムガスを大量に使用す
るため、試験がコスト高になることである。試験後、ヘ
リウムを回収しているが、回収できないロス分が必ず発
生する。また圧力試験容器10からリークすると大量の
ヘリウムガスが失われる。
[0007] Further, depending on the size of the pressure test container 10, the above test apparatus uses a large amount of expensive helium gas, so that the test becomes expensive. After the test, helium is recovered, but loss that cannot be recovered always occurs. Further, if a leak occurs from the pressure test container 10, a large amount of helium gas is lost.

【0008】次に、やはり大量にヘリウムガスを使用す
るため、圧力試験容器10内が約800気圧になるまで
に、例えば本発明者が使用している試験器では1時間程
度必要であり、試験に長時間を要することである。海底
中継器は全数試験しており、気密試験の作業能率向上は
重要な課題である。
Next, since a large amount of helium gas is used, it takes about one hour with the tester used by the present inventor until the inside of the pressure test container 10 becomes about 800 atm. It takes a long time. All submarine repeaters have been tested, and improving the work efficiency of the airtight test is an important issue.

【0009】本発明は以上の問題点を解決し、圧力試験
容器10、そのふた5や封止部材などが破損しても危険
性が少なく、また高価なヘリウムの使用量を大幅に低減
し、試験時間を短縮できる試験方法とその装置を提供す
るものである。
The present invention solves the above problems and reduces the risk of damage to the pressure test container 10, its lid 5 and the sealing member, and greatly reduces the amount of expensive helium used. It is an object of the present invention to provide a test method and a test apparatus capable of shortening a test time.

【0010】[0010]

【課題を解決するための手段】本発明の気密試験方法
は、被試験品を第1の容器内に収納し、該第1の容器を
液体が充填された第2の容器内に設置して第2の容器を
封止し、前記第1の容器中に気体を注入して該第1の容
器内を高圧状態とし、被試験品の外圧に対する気密状態
を試験する方法である。
According to the airtightness test method of the present invention, the DUT is housed in a first container, and the first container is placed in a second container filled with a liquid. This is a method of sealing the second container, injecting gas into the first container to bring the inside of the first container into a high pressure state, and testing the airtight state of the DUT against the external pressure.

【0011】また、本発明の気密試験装置は、被試験品
を収納する第1の容器と、該第1の容器内に気体を注入
する手段と、第1の容器を収容しかつ気密に封止するこ
とができる第2の容器と、被試験品の内部に通じる位置
に配置された気体検知器とを備えている。
Further, the airtightness test apparatus of the present invention comprises a first container for storing a test object, a means for injecting gas into the first container, and an airtightly sealed housing for accommodating the first container. A second container that can be shut off; and a gas detector disposed at a position communicating with the inside of the DUT.

【0012】[0012]

【発明の実施の形態】次に、本発明の具体的な形態を図
1を参照して説明する。
Next, a specific embodiment of the present invention will be described with reference to FIG.

【0013】まず、本発明の試験装置の構成例について
説明する。図1において被試験品11は、図2と同じ海
底中継器であり、その気密保護容器に開孔を形成し、該
開孔に配管部9を溶接、ハンダ封止などにより気密に接
続する。配管部9はふた5内を通って接続部7により配
管部3に接続され、さらにヘリウムガス検出器4に接続
される。
First, a configuration example of the test apparatus of the present invention will be described. In FIG. 1, the DUT 11 is the same submarine repeater as in FIG. 2. An opening is formed in the hermetic protection container, and a pipe 9 is connected to the opening by welding, solder sealing, or the like in an airtight manner. The pipe section 9 passes through the lid 5, is connected to the pipe section 3 by the connection section 7, and is further connected to the helium gas detector 4.

【0014】海底中継器が収納される容器14は、内部
が海底中継器よりやや大きい。容器14には配管部9が
Oリングなどで気密に封止され貫通しており、また容器
14内にガスを注入するための配管部8がやはり同様に
気密に封止されて接続されている。配管部8はふた5内
を通って接続部6により配管部2につながり、該配管部
2はヘリウムガス圧縮器1に接続している。
The interior of the container 14 in which the submarine repeater is stored is slightly larger than the submarine repeater. A piping portion 9 is hermetically sealed with an O-ring or the like and penetrates the container 14, and a piping portion 8 for injecting gas into the container 14 is similarly hermetically sealed and connected. . The pipe section 8 passes through the inside of the lid 5 and is connected to the pipe section 2 by the connection section 6, and the pipe section 2 is connected to the helium gas compressor 1.

【0015】海底中継器と容器14の内側面との間には
空間が形成され、ここにヘリウムガス圧縮器1からヘリ
ウムガスが注入される。試験時には圧力試験容器10と
容器14の間は液体で充たされ、圧力試験容器10の開
孔部にはふた5が設置され封止される。
[0015] A space is formed between the submarine repeater and the inner surface of the container 14, into which helium gas is injected from the helium gas compressor 1. At the time of the test, the space between the pressure test container 10 and the container 14 is filled with a liquid, and the lid 5 is installed and sealed at the opening of the pressure test container 10.

【0016】本構成例では容器14は柔軟性のあるゴム
系材料を用いた。前述のように試験時には圧力試験容器
10と容器14の間は液体で充たされるので、容器14
を構成する材料はこの液体を透過させない材料であるこ
とが必要である。また該材料は他の高分子材料や樹脂や
金属でもよく、ヘリウムガス注入に伴ってある程度の変
形が可能な材料であることが望ましい。もちろんゴム系
材料や高分子その他の樹脂、金属などを併せて使用し構
成することもできる。また、その形状がほとんど変化し
ない容器でも、容器内外の圧力差はわずかなので、使用
可能である。
In this embodiment, the container 14 is made of a flexible rubber material. As described above, since the space between the pressure test container 10 and the container 14 is filled with the liquid during the test, the container 14
Is required to be a material that does not allow this liquid to permeate. The material may be another polymer material, resin, or metal, and is desirably a material that can be deformed to some extent with helium gas injection. Of course, it is also possible to use a combination of a rubber-based material, a polymer, other resins, and metals. Even a container whose shape is hardly changed can be used because the pressure difference between the inside and the outside of the container is small.

【0017】気密試験を行う場合、まず、内部に光ファ
イバアンプが設置された海底中継器のベリリウム銅合金
で作製された気密保護容器の一部に開孔部を形成し、配
管部9を溶接して取り付けた。この状態の海底中継器を
該中継器とほぼ同等の大きさのゴム製の容器14内に収
納し、配管部9が貫通する部分をOリングで封止し、さ
らに容器14の開口部に配管部8を取付け、該取付部を
同様に封止した。
When performing an airtight test, first, an opening is formed in a part of an airtight protection container made of beryllium copper alloy of a submarine repeater in which an optical fiber amplifier is installed, and a pipe portion 9 is welded. And attached. The submarine repeater in this state is housed in a rubber container 14 having substantially the same size as the repeater, a portion through which the piping portion 9 penetrates is sealed with an O-ring, and The part 8 was attached, and the attachment part was similarly sealed.

【0018】次に、圧力試験容器10に防錆剤を添加し
た水を充たした。圧力試験容器10と容器14の間を充
たす液体はこれに限らず、たとえば各種の油圧機器等に
使用されている油類なども使用可能である。
Next, the pressure test vessel 10 was filled with water to which a rust inhibitor was added. The liquid that fills the space between the pressure test container 10 and the container 14 is not limited to this, and for example, oils used for various hydraulic devices and the like can be used.

【0019】ここでは、配管部8、9が予めふた5を貫
通し封止されて取り付けられているようにした。海底中
継器はその外周部の突起部がふた5の下面とがワイヤま
たは取付具(図示していない)により取り付けられてお
り、ワイヤまたは取付具と容器14とはOリングまたは
ポリエチレンで封止した。このふた5を圧力試験容器1
0の開口部に設置し、圧力試験容器10とふた5を気密
に封止した。この際、圧力試験容器10内をできるだけ
水で充たすようにし、空気を残さないことが望ましい。
In this case, the pipe portions 8 and 9 are pre-penetrated through the lid 5 and are sealed and attached. The submarine repeater has a protrusion on the outer periphery and a lower surface of the lid 5 attached to the lower surface of the lid 5 by a wire or a fixture (not shown), and the wire or the fixture and the container 14 are sealed with an O-ring or polyethylene. . Put this lid 5 in the pressure test vessel 1
0, and the pressure test container 10 and the lid 5 were hermetically sealed. At this time, it is desirable to fill the inside of the pressure test container 10 with water as much as possible and leave no air.

【0020】なお、ヘリウムガスと水を隔てる容器14
の封止は、数気圧の圧力差に耐えるものでよい。なぜな
ら、ヘリウムガスが注入される容器14の内部と、容器
14の外部の水で充たされた領域の圧力は、ヘリウムガ
スの注入に従ってほぼ同じ気圧で昇圧してゆき、大きく
ても気圧差は数気圧以下である。目的の圧力になったと
き両部分の圧力は等しくなる。
The container 14 for separating helium gas and water is used.
May be one that can withstand a pressure difference of several atmospheres. This is because the pressure inside the container 14 into which the helium gas is injected and the pressure outside the container 14 filled with water rises at about the same pressure as the helium gas is injected, and even if the pressure is large, the pressure difference is large. Below a few atmospheres. When the desired pressure is reached, the pressure in both parts will be equal.

【0021】ふた5が封止された後、ヘリウムガス圧縮
器1からヘリウムガスを注入した。ヘリウムガスは配管
部2、8を経由して容器14に注入され海底中継器に静
水圧を加える。しかし、圧力試験容器10内は水で充た
されており、かつ液体は気体に比べ体積圧縮率が非常に
小さいので、容器14内はその内部が800気圧になっ
てもあまり膨張しない。
After the lid 5 was sealed, helium gas was injected from the helium gas compressor 1. The helium gas is injected into the container 14 via the piping portions 2 and 8 and applies hydrostatic pressure to the submarine repeater. However, since the inside of the pressure test container 10 is filled with water, and the volume compression ratio of the liquid is much smaller than that of the gas, the inside of the container 14 does not expand so much even when the inside reaches 800 atm.

【0022】気密試験は、容器14内が800気圧にな
ってから1時間その状態を保ち、配管部9、3で海底中
継器内部とつながっているヘリウムガス検出器4によ
り、該中継器内部へリークするヘリウムを検出し、気密
性を試験した。
In the airtight test, the state is maintained for one hour after the pressure in the container 14 becomes 800 atm. The helium gas detector 4 connected to the inside of the submarine repeater by the pipes 9 and 3 enters the inside of the repeater. Leaked helium was detected and tested for air tightness.

【0023】なお、基準を充たした海底中継器は、配管
部9が取り外され、その開口部にはピンが打ち込まれ、
溶接シール、さらにOリング等の封止手段が併用され封
止される。
In the submarine repeater satisfying the standard, the pipe portion 9 is removed, and a pin is driven into the opening thereof.
A sealing means such as a welded seal and an O-ring are used in combination for sealing.

【0024】この気密試験では、海底中継器の気密保護
容器と容器14の内側面との間のわずかな空間にヘリウ
ムを注入するので、使用するヘリウム量が従来より非常
に少なくてすみ、また800気圧に達するまでの時間も
かなり短くなる。具体的には図2と同じ圧力試験容器1
0を用いた場合、本発明者の従来の方式に比べ、使用す
るヘリウム量は十分の一以下に低減でき、800気圧に
達するまでの時間は約十分の一になった。さらにヘリウ
ムの量が少ないので、当然回収の際に失われるヘリウム
量も非常に少ない。
In this airtight test, helium is injected into a small space between the airtight protection container of the submarine repeater and the inner surface of the container 14, so that the amount of helium to be used is much smaller than before, and the amount of helium used is 800. The time to reach atmospheric pressure is also significantly shorter. Specifically, the same pressure test container 1 as in FIG.
When 0 was used, the amount of helium used could be reduced to one-tenth or less, and the time required to reach 800 atm was reduced to about one-tenth as compared with the conventional method of the present inventor. Furthermore, since the amount of helium is small, the amount of helium lost during recovery is naturally very small.

【0025】また、容器14からヘリウムガスがリーク
した場合でも、圧力試験容器10内には水が充たされて
いるので、大量のヘリウムガスが吹き出し、ふた5また
は封止部材などが飛び散って事故を起こすことはない。
Even when helium gas leaks from the container 14, since the pressure test container 10 is filled with water, a large amount of helium gas blows out and the lid 5 or the sealing member splatters, causing an accident. Will not occur.

【0026】圧力試験容器10内の容器14以外の部分
はすべて水で充たされていることが望ましいが、わずか
な空気が残っていても上記効果は失われない。
It is desirable that all parts other than the container 14 in the pressure test container 10 are filled with water. However, even if a small amount of air remains, the above effect is not lost.

【0027】これまで説明した各種封止はポリエチレン
などの樹脂封止、Oリングと金属製の取付具、またはハ
ンダ、溶接など封止個所の必要により適切なものを1ま
たは複数選択できる。
For the various types of sealing described so far, one or a plurality of appropriate types can be selected according to the necessity of a sealing portion such as resin sealing of polyethylene or the like, an O-ring and a metal fitting, soldering, welding, or the like.

【発明の効果】以上のように、本発明の気密試験方法お
よび試験装置では、被試験品を設置して気体を導入して
被試験品に静水圧を印加するための容器を、さらに液体
中に設置する構成としたので、圧力試験容器のふたや封
止用部材が気体のリークによって飛び散る危険をなくす
ことができた。また高価なヘリウムを使用する場合、使
用量が従来方法に比べ、少なくて済むので試験コストの
低減、試験時間の短縮を実現できた。
As described above, in the airtightness test method and test apparatus of the present invention, a container for installing a device under test and introducing gas to apply a hydrostatic pressure to the device under test is further provided with a liquid container. As a result, it was possible to eliminate the danger that the lid and the sealing member of the pressure test container would be scattered by gas leakage. In addition, when expensive helium is used, the amount used is smaller than that of the conventional method, so that the test cost and the test time can be reduced.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の気密試験装置の具体例の構成図であ
る。
FIG. 1 is a configuration diagram of a specific example of an airtightness test apparatus according to the present invention.

【図2】本発明者が従来行っている気密試験装置の例を
示す構成図である。
FIG. 2 is a configuration diagram showing an example of an airtightness test device conventionally performed by the inventor.

【符号の説明】[Explanation of symbols]

1 ヘリウム圧縮器 2、3、8、9 配管部 4 ヘリウムガス検出器 5 ふた 6、7 接続部 10 圧力試験容器 11 被試験品 12 液体 13 ヘリウムガス 14 容器 15、16 開口部 DESCRIPTION OF SYMBOLS 1 Helium compressor 2, 3, 8, 9 Piping part 4 Helium gas detector 5 Lid 6, 7 Connection part 10 Pressure test container 11 Product under test 12 Liquid 13 Helium gas 14 Container 15, 16 Opening

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】被試験品を第1の容器内に収納し、該第1
の容器を液体が充填された第2の容器内に設置して第2
の容器を封止し、前記第1の容器中に気体を注入して該
第1の容器内を高圧状態とし、被試験品の外圧に対する
気密状態を試験することを特徴とする気密試験方法。
1. A device under test is stored in a first container,
The second container is installed in the second container filled with the liquid.
The airtightness test method, wherein the container is sealed, gas is injected into the first container to bring the inside of the first container into a high pressure state, and the airtightness state of the DUT against external pressure is tested.
【請求項2】被試験品の内部に通じる位置に配置された
気体検出器により被試験品の気密状態を試験する請求項
1に記載の気密試験方法。
2. The airtightness test method according to claim 1, wherein the gastightness of the DUT is tested by a gas detector arranged at a position communicating with the inside of the DUT.
【請求項3】気体はヘリウムである請求項1または2に
記載の気密試験方法。
3. The airtightness test method according to claim 1, wherein the gas is helium.
【請求項4】封止された第2の容器の内部は第1の容器
以外の空間が液体で充たされている請求項1、2または
3に記載の気密試験方法。
4. The airtightness test method according to claim 1, wherein a space other than the first container is filled with a liquid inside the sealed second container.
【請求項5】被試験品を収納する第1の容器と、該第1
の容器内に気体を注入する手段と、第1の容器を収容し
かつ気密に封止することができる第2の容器と、被試験
品の内部に通じる位置に配置された気体検出器とを備え
たことを特徴とする気密試験装置。
5. A first container for accommodating a DUT, and the first container.
A means for injecting gas into the container, a second container capable of accommodating the first container and hermetically sealing it, and a gas detector arranged at a position communicating with the inside of the DUT. An airtightness test device characterized by being provided.
【請求項6】第1の容器に用いられる材料は試験時に第
2の容器に充填される液体を透過させない材料である請
求項5に記載の気密試験装置。
6. The airtightness test apparatus according to claim 5, wherein the material used for the first container is a material that does not allow the liquid filled in the second container to pass through during the test.
【請求項7】第1の容器は気体の注入に伴って容積が変
化し得る容器である請求項5または6に記載の気密試験
装置。
7. The airtightness test apparatus according to claim 5 or 6, wherein the first container is a container whose volume can change with the injection of gas.
JP34250495A 1995-12-28 1995-12-28 Airtightness test method and airtightness test device Expired - Fee Related JP2827995B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP34250495A JP2827995B2 (en) 1995-12-28 1995-12-28 Airtightness test method and airtightness test device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34250495A JP2827995B2 (en) 1995-12-28 1995-12-28 Airtightness test method and airtightness test device

Publications (2)

Publication Number Publication Date
JPH09178599A true JPH09178599A (en) 1997-07-11
JP2827995B2 JP2827995B2 (en) 1998-11-25

Family

ID=18354265

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP2827995B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100893001B1 (en) * 2007-05-22 2009-04-10 주식회사 한텍 Helium leak detector
CN102853973A (en) * 2012-08-16 2013-01-02 爱普科斯科技(无锡)有限公司 Pressure cooker helium charging system
CN113432798A (en) * 2021-07-07 2021-09-24 上海航天精密机械研究所 Carrier rocket compensator external pressure test system and method

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101108564B1 (en) * 2009-11-02 2012-01-30 한국표준과학연구원 Pressure-Resistant Test Device and Pressure-Resistant Test Method
KR101113784B1 (en) * 2009-11-02 2012-02-27 한국표준과학연구원 Pressure-Resistant Test Device and Pressure-Resistant Test Method of Metallic Container

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100893001B1 (en) * 2007-05-22 2009-04-10 주식회사 한텍 Helium leak detector
CN102853973A (en) * 2012-08-16 2013-01-02 爱普科斯科技(无锡)有限公司 Pressure cooker helium charging system
CN113432798A (en) * 2021-07-07 2021-09-24 上海航天精密机械研究所 Carrier rocket compensator external pressure test system and method

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