JPH09166228A - Rotary valve and vibration generating device using rotary valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To increase a number of generating times of vibration per one turn of a valve unit, so as to obtain a high vibration frequency even at a low angular speed, by making a reciprocating motion of an actuator by only rotating the valve unit without reciprocating an in-valve movable part. SOLUTION: Cylindrical holes 8a to 8f of quantity equal to a control port or more are provided in a valve unit 1, on the other hand, sleeves 9, 10 and 11, 12 and flow paths 13, 14 and 15, 16 are provided in casings 2, 3, the control ports 17, 18 are connected to an inner circumferential part of the sleeves 9, 10, and a supply/discharge port 19, 20 is connected to the flow paths 13, 14. Since an inflow/outflow is repeated by the same number of times to a number of the cylindrical holes while the valve unit 1 makes one turn, an actuator makes a reciprocating motion by a vibration frequency in proportion to a number of the cylindrical holes and an angular speed of the valve unit. Accordingly, without making a reciprocating motion of the valve unit, a high vibration frequency is obtained even at a low rotational speed, so that with no restriction by a limit or the like of the angular speed, a reciprocating motion of high vibration frequency can be easily realized.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotary valve and a vibration generator using the rotary valve.
Generates fluid pressure power that oscillates just by rotating the valve body,
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotary valve and a vibration generating device using the rotary valve, in which a large number of vibrations are generated per one rotation of a valve body and a high frequency can be easily realized at a low angular velocity.

[0002]

2. Description of the Related Art First, as a first conventional technique, in a vibration generator that obtains high-speed motion, a method has been adopted in which feedback control is performed using a servo valve having high response. Further, as a second conventional technique, in the case of obtaining a constant vibration, as described in JP-A-57-146902, it has a cylindrical hole connected to a control port opened in the pressure chamber of the cylinder. There has been a vibration generator having a structure in which a member having the same number of cylindrical holes as the control port is rotated with respect to the fixed member.

[0003]

When the fluid pressure actuator is used to move at high speed, the required flow rate increases in proportion to the required speed of movement. The above-mentioned first conventional technique is effective when controlling the motion of the load by following a changing target value, but in order to obtain a high-speed reciprocating motion, the movable part in the valve such as the spool is reciprocally moved. Since it is a control method, it is difficult to control at a frequency exceeding the natural frequency of the movable part, and there has been a limit to speeding up the reciprocating motion.
Generally, it is difficult to realize a reciprocating motion exceeding 100 Hz, and the larger the flow rate, the larger the servo valve becomes, and the response of the servo valve itself becomes low. Therefore, the vibration limit frequency becomes lower.

Therefore, the condition of exercise does not change so much,
When a substantially constant vibration is obtained, a vibration generator of the type in which the movable part in the valve is not reciprocated but is rotated in one direction to reciprocate the load is used as in the second conventional technique. . With this method, it is possible to obtain a higher frequency than the method using the servo valve. However, in the vibration generator according to the second prior art described above, the number of holes provided in the rotating valve body is the same as the number of control ports connected to the pressure chambers of the actuator. Has only one round trip. Therefore, in order to realize a high frequency, it is necessary to rotate the valve body at a high speed, and there is a problem that the limit of the vibration frequency that can be applied cannot be set too high due to the limit of the rotation speed. Also, because the characteristic of the change in the opening area of the orifice is fixed, for example,
There is also a problem that the amplitude of vibration cannot be adjusted when the rotational speed of the valve body is constant.

An object of the present invention is to solve the problems in the prior art as described above, and to reciprocate the load by rotating the valve body without reciprocating the movable part in the valve. Since the number of vibrations generated per rotation of the valve element is high, it is possible to easily achieve high frequencies even at low angular velocities. Moreover, the amplitude can be adjusted easily, and the driving energy is small, and it is easy to manufacture and reuse. An object of the present invention is to provide a possible rotary valve and a vibration generator using the rotary valve.

[0006]

The first feature of the present invention for achieving the above object is to increase the opening area of an orifice by relative movement of a casing and a valve element rotatably provided with respect to the casing. In a rotary valve that controls the flow of fluid by changing it, the casing is provided with the same number of first orifice forming members as there are control ports connected to the pressure chamber of the load driving actuator, while the valve body is provided with the first orifice. The second orifice forming member, which forms an orifice by forming a pair with the forming member, is provided in the same number as the control port or more. The second feature is that the second orifice forming member of the valve body is a cylindrical hole, while the first orifice forming member of the casing is a sleeve or a plug having an outer diameter equivalent to that of the cylindrical hole of the valve body. The two sides of the sleeve or plug are provided with flow paths separated from each other. Next, the third feature is that the second orifice forming member of the valve body and the first orifice forming member of the casing are both holes, and the second orifice forming member of the valve body is the same number as the control port or more. There are as many as. Further, the fourth feature is that the control port, the supply port, or the discharge port is provided with a throttle, and in particular, this throttle is an adjustable variable throttle.

By adopting the above-mentioned characteristic structure, the present invention can generate oscillating fluid pressure power without reciprocating the valve body, so that the driving energy is small and, like a servo valve, A high frequency can be obtained without being restricted by the natural frequency or the like of the movable part in the valve.
Moreover, since the number of vibrations generated per rotation of the valve element is large, it is possible to easily realize a high frequency without being restricted by the limit of the angular velocity of the valve element. In addition, since it is possible to change the frequency and the amplitude, it is possible to change the vibration condition during vibration and prevent the vibration condition from changing due to a change in the load condition. Further, since the manufacturing is easy and the valve portion can be reused, not only new manufacturing but also maintenance can be shortened in time and cost. Furthermore, if the rotary valve of the present invention is applied to a vibration generator of a width compression processing machine or a rolling mill and plastic working is performed while applying a vibration of a high frequency close to the resonance frequency of the material, uniform deformation can be obtained. In addition to improving quality, the energy required for processing can be reduced in combination with the reduction in frictional resistance due to the dither effect.
Further, if the rotary valve of the present invention is applied to a vibration generator of a continuous casting machine and vibration is applied to the mold, more stable vibration conditions can be maintained, driving energy can be reduced, and the mold can have a higher frequency. Since it is vibrated by, it is possible to further improve the surface quality and reduce the drawing force. Further, by applying the rotary valve of the present invention to the vibration generator of a rolling mill to vibrate the roll in the axial direction, the frictional force of each part can be reduced by the dither effect, and the stick slip between the work roll and the reinforcing roll can be reduced. Generation can be prevented, and the influence of vibration does not remain as a pattern on the surface after rolling. Therefore, it is possible to improve quality, reduce driving energy, and prolong the life of the roll.

[0008]

Embodiments of the present invention will be described below with reference to the drawings. One embodiment of the rotary valve of the present invention will be described with reference to FIGS. First, Figure 1
The structure of the rotary valve of the present embodiment will be described with reference to FIG. The valve body 1 is sandwiched by casings 2 and 3 together with a spacer 4 formed thicker by a predetermined thickness difference than that, and a shaft 5 is provided in the valve body 1 and bearings 6, 7 are provided in the casings 2 and 3. Respectively, and form the central axis of rotation of the valve element 1. The valve body 1 has a cylindrical hole 8 of the same inner diameter.
a, 8b, 8c, 8d, 8e, and 8f are provided on the same pitch circle at equal intervals, six in total, which is larger than the number of control ports.

On the other hand, the casings 2 and 3 are provided with sleeves 9 and 10 and sleeves 11 and 12, and flow passages 13 and 14 and flow passages 15 and 16 which are separated from each other by these sleeves, respectively. Casing 2
At the inner circumference of the sleeves 9 and 10,
Connected to control ports 17 and 18 which connect to each pressure chamber of
A supply port 19 is connected to the flow path 13 and a discharge port 20 is connected to the flow path 14, respectively. Also, the flow paths 13 and 1
5 and the flow paths 14 and 16 communicate with each other through the cylindrical hole of the valve body 1. Further, the motor 22 is fixed to the casing 3, and the output shaft 23 of the motor 22 is coupled to the shaft 5 of the valve body 1 by the coupling 24.

The cylinder 21 is a double rod cylinder, and since the pressure receiving areas on the outward path and the return path are the same, the inflow amount and the outflow amount of the fluid accompanying the movement of the cylinder are the same. This may be a rocking motor.

Next, the operation of the rotary valve of this embodiment will be described with reference to FIGS. When the valve body 1 rotates with respect to the casings 2 and 3, the relationship between the valve body 1 and the casing 2 becomes as shown in FIGS. 5 and 6, for example, and the relative displacement between the inner edge of the cylindrical hole and the outer edge of the sleeve. Formed by the inner edges of the flow path, the first openings 25a, 25b and 26a, 26b surrounded by the outer edge, and the relative displacement between the inner edge of the cylindrical hole and the inner edge of the sleeve. Surrounded second openings 27a, 27
b appears, and the smaller one functions as an orifice that regulates the flow of fluid.

However, both openings are formed equally on both sides of the valve body 1, but as shown in FIG. 6, the first opening is the flow from the flow paths 13 and 15 to the cylindrical hole 8a, and Hole 8
Both sides function as an orifice that controls the flow from d to the flow paths 14 and 16, but the second opening does not function as an orifice because the opening on the casing 3 side does not flow, and the control port Only the opening between the sleeves 9 and 10 on the casing 2 side connected to 17 and 18 functions as an orifice.

Now, for example, the cylindrical hole 8 is formed on the sleeve 9.
When “a” passes, the opening area of the orifice with respect to the control port 17 changes as follows, and the characteristic becomes as shown in FIG. 7.

As shown in FIGS. 8 and 9, a cylindrical hole 8a
The opening area of the first opening is constant up to the point where the inner edge of the sleeve meets the outer edge of the sleeve 9 and gradually begins to decrease from here, but since the second opening is closed,
The fluid does not flow in this state. When the valve body 1 rotates,
In the state shown in FIG. 11 and FIG. 11, the second opening also opens, but since the opening area is smaller than that of the first opening,
In this state, the second opening functions as an orifice for adjusting the flow, and the opening area increases. At this time,
Since the inner peripheral portion of the sleeve 8a connected to the control port 17 is connected to the discharge port 20 via the flow path 14,
The fluid flows from the control port 17 to the discharge port 20.

When the valve body 1 is further rotated, as shown in FIGS.
In the state shown in FIG. 3, the opening area of the first opening is smaller than that of the second opening, so that the first opening functions as an orifice and the opening area gradually decreases. Then, when the inner edge of the cylindrical hole 8a overlaps with the outer edge of the sleeve 9, the first opening is closed, so that the flow of fluid stops again.

After that, when the valve body 1 further rotates,
The control port 17 is now connected to the inner peripheral portion of the sleeve 8a and the flow path 1.
Since it is connected to the supply port 19 via 3, the fluid flows from the supply port 19 into the control port 17, and follows a change opposite to the above, and draws one peak of increase or decrease of the opening area.

That is, the opening area of the orifice changes as shown by the hatched portion in FIG. 7, and the piston of the cylinder 21 is
It is displaced as shown in FIG. Therefore, each time one cylindrical hole passes over the sleeve, the fluid flows in and out once to reciprocate the cylinder once. Therefore, when six cylindrical holes are provided as in this embodiment. , The cylinder can be reciprocated 6 times while the valve body makes one revolution, and if the valve body 1 is rotated at an angular velocity of n revolutions per unit time, the cylinder reciprocates at a frequency of 6 × n times per unit time. Can be exercised.

That is, the frequency of vibration is proportional to the number of holes provided in the valve body and the angular velocity of rotation of the valve body, and the valve body provided with N holes is
If it is rotated at an angular velocity of n times per unit time, reciprocating motion with a frequency of N × n times per unit time can be obtained. For example, a valve body with 20 cylindrical holes is
When rotated at an angular velocity of 00 rotations, a vibration of 2 kHz is obtained.

Therefore, unlike the case where a servo valve is used, the cylinder can be reciprocated only by rotating the valve body without reciprocating the movable part in the valve, so that the driving energy can be small. It is possible to control up to a high frequency without being limited by the natural frequency or the like of the movable part in the valve. Moreover, by increasing the number of holes in the valve body, it is possible to obtain a high frequency even at low angular velocities, which requires less drive energy, and is not restricted by the angular velocity limits, and it is easy to achieve high frequencies. Can be realized.

Further, when manufacturing the rotary valve of this embodiment, after combining two casings,
The holes for mounting the sleeve may be processed at the same time, the outer diameter of the sleeve may be adjusted according to the inner diameters of these holes, and the sleeve may be attached to the casing, after which the end surface of the casing may be finished. Further, when the holes are formed by combining the valve body together with both casings, not only the sleeve mounting hole of the casing but also the cylindrical hole of the valve body is partially formed. If the remaining cylindrical holes are machined with reference to the holes thus formed, the valve body can be manufactured more easily and the machining accuracy is improved.

When used for a long period of time, the edge of the orifice is worn and the performance of the valve deteriorates. However, in the case of this rotary valve, the edge is on the end face of the valve body and the casing. , Refinish the end face of the valve body and casing,
If the spacer thickness is readjusted according to the valve body, the edge will be revived like a new one, and the valve performance will be restored. That is, it can be recycled.

As described above, according to this embodiment, it is possible to realize a rotary valve which can easily obtain a reciprocating motion with a high frequency with a small driving energy, is easy to manufacture, and can be recycled. it can.

In the above embodiment, the casing 3
Although the sleeves 11 and 12 are provided in the above, since the inner peripheral portions of these do not function as orifices, as shown in FIG.
These may be used as the plugs 28 and 29, and even in this case, the operation and effect are exactly the same.

As shown in FIG. 15, the casing 3
The side sleeves 11 and 12 or the plugs 28 and 29 may be eliminated, and the orifice may be formed only between the valve body 1 and the casing 2. In this case, since the first opening is also only on the casing 2 side, the opening area of the first opening is half the characteristic shown in FIG. 6, and the opening area of the orifice is shown in FIG. The characteristics are as shown. Even in this case, the same effect as that of the above embodiment can be obtained. In this case, the cylindrical holes 8a, 8b, 8 of the valve body 1
The c, 8d, 8e, and 8f do not have to penetrate.

Incidentally, as shown in FIG. 17, if the inner edges of the sleeve are inserted without gaps between the adjacent cylindrical holes so that the cylindrical holes are spaced from each other, the inner edge of the inner peripheral portion of the sleeve and the preceding cylindrical hole are separated. As soon as the second opening formed between closes, the second opening begins to open between the subsequent cylindrical hole,
As shown in FIG. 18, there is no dead zone where the orifice opening area remains zero and the cylinder moves smoothly.

Further, in the above embodiment, the inner peripheral portion of the sleeve is a right circular cylinder having a constant inner diameter, but as shown in FIG. 19, only in the vicinity of the end face on the valve body 1 side forming the second opening. May have a desired size, and the other parts may have a larger inner diameter. By doing so, the flow velocity in the inner peripheral portion of the sleeve is reduced and the pressure loss is reduced, so that it is possible to obtain a higher frequency or to vibrate a larger cylinder. To be

In the above embodiment, the sleeve 9,
Although the control port was connected to the inner peripheral portion of 10, the discharge port 20 was provided at the inner peripheral portion of the sleeve 9, the supply port 19 was provided at the inner peripheral portion of the sleeve 10, and the flow paths 13 and 14 were connected as shown in FIG.
Alternatively, the control ports 17 and 18 may be connected to each other. Further, in the above embodiment, the control port is located at a point-symmetrical position with respect to the rotation center axis, but it may be located at another position as shown in FIG.

Even in this case, the same effect as that of the above-described embodiment can be obtained. In particular, in the case where a large number of cylindrical holes are provided in the valve body, the flow path connected to the supply port becomes smaller if the configuration shown in FIG. Can be reduced, which is advantageous in strength.

Furthermore, the inner diameters of the sleeves 9, 10, 11, 12 do not have to be the same. For example, as shown in FIG. 22, when the single rod cylinder 30 is reciprocated, the pressure receiving area of the cylinder is such that the forward path in which the fluid flows into the head side is driven and the forward path in which the fluid flows into the rod side is driven. If the change in the opening area on the control port 17 side is the same as the change on the opening area on the 18 side, the displacement amount on the outward path becomes smaller than that on the return path, so the piston of the cylinder 30 gradually shifts to the return path side. I will end up. The inner diameter of the sleeve may remain the same when it is desired to shift the piston in a certain direction while vibrating it. However, when it is desired to vibrate around a predetermined position, the following configuration may be adopted.

That is, if the inner diameter of the sleeve 9 connected to the control port 17 on the head side having a large pressure receiving area is made larger than the inner diameter of the sleeve 10 connected to the control port 18 on the rod side having a small pressure receiving area, the piston shifts. Can be made smaller. Particularly, if the ratio of the inner diameter of the sleeve 9 and the inner diameter of the sleeve 10 is set to a value equal to the ratio of the head side pressure receiving area of the cylinder 30 and the rod side pressure receiving area, the amount of inflow and outflow to each pressure chamber is received. Since the ratio can be made equal to the ratio of the areas, the amount of displacement on the outward path and the amount of displacement on the return path are almost the same, and the displacement of the piston can be prevented.

Alternatively, as shown in FIG. 23, the control ports 17 and 18 may be provided with throttles 31 and 32 having different flow passage cross-sectional areas. Even if these throttles are used, the amount of displacement in the forward path and the amount in the return path are the same. Can be. In particular, FIG.
As shown in FIG.
Variable throttle 3 whose channel cross-sectional area can be adjusted by 3, 34
If the variable diaphragms are adjusted to 5 and 36 and the variable diaphragm is adjusted according to the displacement of the piston, the displacement of the piston can be prevented more reliably. Alternatively, on the contrary, it is also possible to control so as to shift the piston of the cylinder in a desired direction while vibrating the piston.

Further, the throttle may be provided in the supply port or the discharge port. By doing so, particularly in the case of a two-way valve whose control port is the supply port or the discharge port, or another control valve. This is effective when used in combination with.

Further, these throttles may be provided not on the inside of the rotary valve body but on the piping of the fluid pressure circuit or the port on the cylinder side. For example, as shown in FIG. 26, throttles 37 and 38 may be provided on the pipe on the control port side. In this case, both throttles or only one may be provided. Alternatively, as shown in FIG. 27, a throttle 39 may be provided on the pipe on the supply port side. Further, these throttles may be servo valves, proportional valves, or manual flow rate adjusting valves.
Even in this case, the same effect as when the throttle is provided inside the rotary valve body can be obtained.

In the above embodiment, the output shaft of the motor is directly connected to the valve body, and the valve body is driven at the same angular velocity as the motor. However, other driving methods may be used. For example, as shown in FIG. 28, a gear 40 may be coupled to the shaft 5 of the valve body 1 and mechanically coupled to the rotary power source 42 via a gear train 41. Alternatively, as shown in FIG. 29, the belt wheel 43 is coupled to the shaft 5 of the valve body 1 and the belt 44
It may be mechanically coupled to the rotary power source 45 via. Alternatively, as shown in FIG. 30, a valve body 46 having a gear formed on its outer peripheral surface may be used and mechanically connected to the rotary power source 48 via a gear train 47.

According to these embodiments, since the angular velocity of the rotary power source can be accelerated or decelerated to drive the valve body, the angular velocity of the rotary drive source is not limited but high. The frequency can be controlled. Also,
Since the valve element can be driven by a rotary power source other than the electric motor, such as an engine or a hydraulic motor, it is particularly useful when the power source for driving the motor cannot be obtained or when there is already another rotary power source. It is valid.

Next, another embodiment of the rotary valve of the present invention will be described with reference to FIGS. Valve 5
1 is rotatably provided inside the casings 52 and 53 about a rotation center axis formed by a shaft 54 and bearings 55, 56. A hole 57 is provided in the valve body 51.
a, 57b, 57c, 57d, 57e, and 57f, which are larger than the number of control ports, are provided in total at 6 on the same pitch circle at equal intervals, and the holes 57a, 57c, and 57e are provided in the shaft 54. Through hole 58 to supply port 60
b, 57d and 57f are connected to the discharge port 61 through the groove 59.
Connected to each other. That is, in the valve body 51, holes connected to the supply port 60 and holes connected to the discharge port 61 are alternately arranged.

On the other hand, the casing 52 is provided with two holes 62 and 63 forming a control port, each of which is connected to each pressure chamber of the cylinder 64. Also, the casing 5
The motor 65 is fixed to the motor 3, and the output shaft 66 of the motor 65 is
Are coupled to the shaft 54 of the valve body 51 by a coupling 67.

Now, as shown in FIGS. 32 and 33,
When the valve element 51 rotates, the portion where the hole of the valve element and the hole of the casing overlap is opened to form an orifice. For example,
In the case of the same drawing, the hole 62b forming the first control port is connected to the hole 57b connecting to the discharge port 61, and the hole 63 forming the second control port is connected to the hole 57e connecting to the supply port 60, respectively, and the fluid is supplied. Flow from the port 60 to the second control port 63 and from the first control port 62 to the exhaust port 61 to drive the cylinder 64.

When the valve body 51 is further rotated, the opening area of the orifice is increased, and the inner edge of the hole 62 and the inner edge of the hole 57b,
Also, the inner edge of the hole 63 and the inner edge of the hole 57e overlap with each other, and the opening area is maximized here, and then decreases and closes. Then, the hole 62 is connected to the supply port 60, and the hole 63 is connected to the discharge port 61.
d, respectively, and fluid flows from the supply port 60 through the hole 57a to the hole 62 and from the hole 63 through the hole 57d to the discharge port 61, driving the cylinder 64 in the opposite direction. At this time, the opening area also changes.

Therefore, the change in the opening area of the orifice due to the rotation of the valve body 51 has a characteristic as shown in FIG. 34, and a hole connected to the supply port 60 of the valve body 51 and a discharge hole are formed above the hole of the casing 52. Each time one set of holes and the holes connected to the port 61 pass, the cylinder 64 reciprocates one cycle by describing a change in one cycle. Therefore, when the valve body 51 is provided with six holes as in the present embodiment, the cylinder 64 reciprocates three times while the valve body 51 makes one rotation, and the valve body 5
When 1 is rotated at an angular velocity of n times per unit time, the cylinder 64 can be reciprocated at a frequency of 3 × n times per unit time.

That is, the frequency of vibration is proportional to the number of holes provided in the valve body and the angular velocity of rotation of the valve body. If the valve body provided with N holes is rotated at an angular velocity of n times per unit time, A reciprocating motion with a frequency of N × n / 2 times can be obtained per unit time. For example, a valve body with 20 holes is
When rotated at an angular velocity of 000 rotations, vibration of 1 kHz can be realized.

Therefore, in the present embodiment as well as in the above-described embodiments, compared with the case where a servo valve that reciprocates the movable part in the valve is used, etc., the natural frequency of the valve is not restricted and the value is small. High frequency can be obtained with drive energy. Further, if the number of holes in the valve body is increased, a high frequency can be obtained even at a low angular velocity, so that it is difficult to be restricted by the limit of the angular velocity. In addition, both the valve body and the casing are centered on hole processing and flat finishing of the end faces, so it is easy to manufacture, and even if the edge wears out after long-term use, if the end faces of the valve body and the casing are refinished, it is new. Since it returns to the same state, it can be recycled.

Further, as shown in FIG. 35, the inner diameters of the holes may not be the same. That is, the hole 62 forming the control port.
If the ratio of the inner diameters of the cylinders 63 and 63 is made equal to the ratio of the pressure receiving areas of the pressure chambers connected to them, as in the embodiment shown in FIG. It is possible to prevent the position from gradually shifting.

Further, as shown in FIG. 36, in the holes 62 and 63 forming the control port, the throttles 68 and 6 having different flow passage cross-sectional areas are formed.
Even if 9 is provided, the same effect can be obtained. In particular, if these are variable throttles, the displacement of the piston can be more reliably prevented, or conversely, control can be performed such that the piston is displaced. Further, these throttles may be provided not on the inside of the rotary valve body but on the piping of the fluid pressure circuit or the like.

Further, also in the rotary valve of this embodiment, the hole forming the control port does not necessarily have to be in a point symmetrical position with respect to the central axis of rotation as in the above embodiment, as shown in FIG. It may be in any position. Also,
The motor 65 may be omitted, and instead, the gear train as shown in FIGS. 28 and 30, or the belt wheel and belt as shown in FIG. 29 may be used to drive the valve element. The same effect can be obtained even with these configurations.

Hereinafter, an embodiment of the vibration generator using the rotary valve of the present invention will be described. First, FIG.
FIG. 1 shows an embodiment of a vibration generating device using the rotary valve of the present invention. A rotary valve 72 is provided to vibrate the load 70 using the cylinder 71, and the rotary valve 72 is connected to a fluid pressure power unit 73 that supplies and recovers a working fluid. The controller 74 sets the valve body of the rotary valve 72 to the target angular velocity value 75
A control command 76 for rotating at an angular velocity proportional to is given.

If a signal as shown in FIG. 38 is inputted as the target angular velocity value 75, the rotary valve 72 generates a vibration having a frequency proportional to the angular velocity of the valve body. As described above, the frequency of the reciprocating motion of the cylinder 71 can be controlled so as to gradually increase. On the other hand, if the target angular velocity value 75 is a signal as shown in FIG. 39, vibration is generated only while the valve body is rotating, so the number of times vibration is generated in the cylinder 71 can be controlled.

Next, FIG. 40 shows another embodiment of the vibration generator using the rotary valve of the present invention. Load 77
A rotary valve 79 and a control valve 80 are connected to a cylinder 78 for driving the cylinder 78, and a fluid pressure power unit 81 for supplying and recovering a working fluid is provided to the rotary valve 79 and the control valve 80. The control valve 80 drives the cylinder 78 by receiving a control command 83 according to the target value 82 from the controller 84. The cylinder 78 is provided with a rack 85 which moves together with the load 77, and the valve element of the rotary valve 79 is mechanically driven by a gear 86 meshing with the rack 85. According to this embodiment, since the valve element rotates at an angular velocity proportional to the speed of the cylinder 78, it is possible to give the cylinder 78 a vibration having a frequency proportional to the speed.

FIG. 41 shows another embodiment of the vibration generator using the rotary valve of the present invention. A rotary valve 89 and a servo valve 90 are connected to a cylinder 88 that drives a load 87, and the rotary valve 89 and the servo valve 9 are connected.
A fluid pressure power unit 91 for supplying and recovering the working fluid is connected to 0. The rotary valve 89 sends a control command 9 according to the target angular velocity value 93 from the controller 92.
4 is given. On the other hand, the cylinder 88 is provided with a displacement amount sensor 95, and the output signal of the displacement sensor 95 is passed through a low pass filter 96 and then fed back to the controller 9 for feedback.
7, a closed loop is configured to compare with a target value 98 of the cylinder displacement amount and give a control command to the servo valve 90 according to the deviation between the two.

According to the present embodiment, the rotary valve 89 is used in addition to the displacement amount which is accurately controlled by using the servo valve 90.
It is possible to superimpose a vibration having a high frequency given by the above, and it is possible to control the displacement amount and the frequency independently.
Even if a single rod cylinder is used, the displacement deviation due to the difference in pressure receiving area between the head side and the rod side when vibrating,
Since the position control loop using the servo valve 90 corrects it, it is not necessary to devise a rotary valve 89 such as providing a throttle.

Further, due to the effect of dither, the frictional force of the cylinder 88 and the load 87 can be reduced, and smooth motion can be obtained. If the vibration given from the rotary valve 89 has a frequency sufficiently higher than the response frequency of the servo valve 90, even if a signal having a high frequency is superimposed on the deviation via the feedback signal, the servo valve 90
Does not respond, the low-pass filter 96 may not be provided.

Next, an embodiment of a vibration generator using a plurality of rotary valves of the present invention will be described with reference to FIGS. A rotary valve 102 and a rotary valve 103 are connected to a cylinder 101 that drives a load 100, and a fluid pressure power unit 104 that supplies and recovers a working fluid to and from these is provided. The rotary valves 102 and 103 are respectively connected to the controller 10
Control commands corresponding to the respective target angular velocity values are given from 5 and 106, and the controllers 105 and 106 are controlled by the host controller 107.

Now, assuming that a command is issued from the host controller 107 to rotate the valve elements of the rotary valves 102 and 103 with a phase difference, the change in the opening area of each rotary valve is shown in FIG. The solid lines in (a) and (b) are shown, and the total opening area of both rotary valves obtained by adding these is as shown by the solid line in (c) of the figure. As a result, the cylinder 101
Is displaced as shown by the solid line in FIG. Then, when the phase difference of the valve body rotation of both rotary valves is changed,
It changes as shown by the one-dot chain line and the two-dot chain line in the figure.

That is, according to this embodiment, the amplitude of the motion of the cylinder 101 can be changed by changing the phase difference. In particular, if you increase the phase difference in advance and gradually set the phase difference to zero, you can start the vibration smoothly, and gradually change the phase difference from the state where the phase difference is zero. If you go big,
Since the vibration can be finished smoothly, the impact on the device can be reduced.

If the rotary valves 102 and 103 are driven with angular velocities of the valve bodies having a difference in speed, a low vibration corresponding to the difference in frequency generated by each rotary valve is generated on the same principle as that of the beat of sound. The amplitude of the cylinder 101 can be changed by a number, and the cycle of the amplitude change can be changed by changing the difference in angular velocity.

Further, as shown in FIG. 44, the supply port side pipe 108 may be provided with throttles 109, 110 and controllers 111, 112 for controlling the opening areas of these. With this configuration, the rotary valve 1
In addition to the phase difference and the angle difference of 02 and 103, the amplitude of each control flow rate can also be changed, so that more complicated control can be realized.

Hereinafter, a system to which the vibration generator using the rotary valve of the present invention is applied will be described. First, FIG. 45 shows an embodiment of a vibration generator of a width compression machine using the rotary valve of the present invention. The width compression processing machine 113 has cylinders 117 and 1 for applying a compression force in the width direction to the material 116 via the left and right dies 114 and 115.
18 are provided, and control valves 120 and 121 and rotary valves 122 and 123 of the present invention are arranged in parallel on the left and right sides in order to control the flow of the working fluid supplied or discharged from the fluid pressure power unit 119 to the cylinders 117 and 118. It is provided. The control valves 120 and 121 adjust the cylinder 11 to the target value of the die distance according to the target plate width.
7 and 118 are followed, and the rotary valve 12
It is configured to superimpose the vibrations generated by 2, 123.

When the plastic working is performed while applying the vibration close to the resonance frequency of the material, the vibration is well transmitted not only in the vicinity of the contact with the mold but also inside the material, so that the plastic deformation can be uniformly performed inside. In addition, the effect of dither can reduce the frictional force of each part of the device. But usually
Since the width compression processing machine is provided in the upper process of the rolling equipment, the material is thick and the mass is large, so a large force is required to vibrate it, and as a result, the cylinders 117 and 118 become large, A large flow rate valve is required to vibrate this.

Therefore, when a conventional control valve such as a servo valve is used, the natural frequency of the movable part in the valve is lowered due to the increase in size of the valve, so that the resonance frequency of the material is high. It is difficult to achieve the frequency. On the other hand, when the rotary valve of the present invention is used, a high frequency can be obtained without such a restriction, and therefore, the material can be made to resonate.

Therefore, the shape of the material after deformation is improved,
Further, since a larger deformation can be obtained with the same compression force, it is possible to obtain effects such as downsizing of the device and energy saving, and improvement of production capacity. In particular, if the angular velocity of the valve elements of the rotary valves 122 and 123 is changed in accordance with the resonance frequency of the material that changes according to the dimensional change, the plastic deformation can be performed more efficiently, and a greater effect can be obtained. .

Next, FIG. 46 shows an embodiment of a vibration generator of a continuous casting machine using the rotary valve of the present invention. Molten steel 134 is injected into the mold 135 from the tundish 132 through the nozzle 133, and a solidified shell is grown in the mold 135, and then a continuous casting machine 138 that continuously draws and produces the slab 137 by the pulling force of the pinch roller 136. Is provided with a cylinder 139 for applying vibration to the mold 135 and a rotary valve 140 of the present invention for controlling the movement of the cylinder 139 for the purpose of improving the surface quality of the slab and reducing the slab withdrawing force. A fluid pressure power unit 141 that supplies and recovers a working fluid is connected to the rotary valve 140.

In the continuous casting machine, the same casting condition continues for a long time once the casting is started, so the condition of vibration of the mold 135 is almost constant for a long time. Therefore, it is more stable to obtain the vibration by rotating the valve body by using the rotary valve of the present invention than to obtain the vibration by the reciprocating motion of the movable portion in the valve as in the conventional case. Vibrations can be obtained and driving energy can be small.

Further, as described above, the rotary valve of the present invention can obtain a high frequency without being restricted by the natural frequency or the like of the moving part in the valve like the servo valve even with a large flow rate specification. Therefore, even with a large-sized continuous casting machine having a large mold mass, the mold can be vibrated at a sufficiently high frequency. Alternatively, since it is possible to obtain a high frequency that cannot be realized by the conventional device using a servo valve or the like, it is possible to further enhance the effects such as improving the surface quality of the slab and reducing the slab drawing force. Become.

FIG. 47 shows an embodiment of a vibration generator for a rolling mill using the rotary valve of the present invention. Rolling machine 1
42 is provided with a cylinder 148 as a pressing means for applying a rolling load to the material 147 via the upper and lower work rolls 143, 144 and the reinforcing rolls 145, 146, and the fluid pressure power unit 149 to the cylinder 14 are provided.
Servo valve 150 and the rotary valve 151 of the present invention to control the flow of working fluid supplied to or discharged from
And are provided in parallel. The servo valve 150 moves the cylinder 14 to the target value of the work roll gap according to the target plate thickness.
8 is made to follow, and the vibration generated by the rotary valve 151 is superposed on it.

Similar to the embodiment of the width compression machine shown in FIG. 45, when rolling is performed while applying a vibration close to the resonance frequency of the material, the vibration is well transmitted to the inside of the material, so that the plastic deformation is evenly distributed to the inside. The dither effect can reduce the frictional force of each part of the device. However, since the material to be rolled has a thin plate thickness, the resonance frequency of the material is extremely high, and it is almost impossible to give a vibration close to this resonance frequency using a servo valve or the like.

On the other hand, the rotary valve of the present invention is
As described above, since it is possible to realize a remarkably high frequency as compared with the servo valve or the like, it is possible to vibrate at a frequency closer to the resonance frequency of the material. Therefore, according to this embodiment, the quality of the rolled product is improved, the rolling load is reduced,
It is possible to achieve a small size of the device and energy saving, and it is possible to obtain excellent effects such as improvement in production capacity.

Finally, FIG. 48 shows another embodiment of the vibration generator for a rolling mill using the rotary valve of the present invention. This embodiment is similar to the embodiment shown in FIG.
The motion of the cylinder 148, which provides the rolling load, is determined by the servo valve 1
The work rolls 143, 14 are controlled only by 50.
4 is an embodiment in which a cylinder 152 is newly provided at the shaft end of 4, and the rotary valve 151 of the present invention is connected to this.
The configuration and operation of the other parts are the same as those of the embodiment shown in FIG. That is, the rotary valve 151 vibrates the cylinder 152 to vibrate the work rolls 143 and 144 in the axial direction, thereby applying vibration to the material 147.

According to this embodiment, it is possible to reduce the frictional force of each part of the device by the effect of dither. In particular, when stick-slip occurs between the work rolls 143, 144 and the reinforcing rolls 145, 146, the material 14 is affected by the stick-slip.
No. 7 remains as an unfavorable pattern on the surface after rolling, and the quality deteriorates. On the other hand, if the rotary valve of the present invention is used, vibration of a very high frequency can be given to the work roll, so that the occurrence of stick-slip can be prevented by the effect of dither, and the effect of the added vibration is the surface of the rolled product. It does not remain as a pattern. Therefore, according to the present embodiment, not only the quality of the rolled product is improved but also the driving energy is reduced and the roll life is extended.

Incidentally, the rotary valve used in the vibration generator shown in FIG.
As shown in FIGS. 1 to 30, the valve body having the cylindrical hole may be a rotary valve that generates vibration by rotating with respect to the casing having the sleeve or the plug, or as shown in FIGS. 31 to 37. As described above, the valve body having the hole may be a rotary valve that rotates with respect to the casing having the hole to generate vibration. However, since the former uses twice the frequency even at the same angular velocity,
In particular, the vibration generator of the width compression processing machine shown in FIG.
When a higher frequency is required as in the vibration generator for a rolling mill shown in FIG. 47, it is advantageous to use the former.

As described above, according to these embodiments of the present invention, the oscillating fluid pressure power can be generated without reciprocating the valve element, so that the driving energy can be small and the servo can be performed. It is possible to obtain a high frequency without being restricted by the natural frequency or the like of the movable part in the valve like the valve. Moreover, since the number of vibrations generated per one rotation of the valve body is large, there is no restriction on the angular velocity of the valve body or the like,
A high frequency can be easily realized. In addition, since it is possible to change the frequency and the amplitude, it is possible to change the vibration condition during vibration and prevent the vibration condition from changing due to a change in the load condition. Further, since the manufacturing is easy and the valve portion can be reused, not only new manufacturing but also maintenance can be shortened in time and cost.

Further, if the rotary valve of the present invention is applied to a vibration generator of a width compression processing machine or a rolling mill and plastic working is performed while applying a vibration having a high frequency close to the resonance frequency of the material, uniform deformation can be achieved. In addition to improving the quality, it is possible to reduce the energy required for processing in combination with the reduction in frictional resistance due to the dither effect. Further, if the rotary valve of the present invention is applied to a vibration generator of a continuous casting machine and vibration is applied to the mold, more stable vibration conditions can be maintained,
Since the driving energy can be reduced and the mold can be vibrated at a higher frequency, it is possible to further improve the surface quality and reduce the drawing force. Further, by applying the rotary valve of the present invention to the vibration generator of a rolling mill to vibrate the roll in the axial direction, the frictional force of each part can be reduced by the dither effect, and the stick slip between the work roll and the reinforcing roll can be reduced. Generation can be prevented, and the influence of vibration does not remain as a pattern on the surface after rolling. Therefore, it is possible to improve quality, reduce driving energy, and prolong the life of the roll.

[0072]

As described above, according to the rotary valve of the present invention, the load can be reciprocated only by rotating the valve body without reciprocating the movable part in the valve, and the valve body can be reciprocated. Since there are many vibrations per revolution,
A high vibration frequency can be easily achieved even at a low angular velocity, the amplitude can be easily adjusted, the drive energy is small, and the rotary valve and the vibration generating device using the rotary valve are easy to manufacture and can be recycled. Can be provided. Further, if the vibration generator using the rotary valve of the present invention is applied, not only the performance of the facility can be improved but also the productivity and the quality can be improved, and a great economic effect can be obtained.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view of parts of an embodiment of a rotary valve of the present invention.

FIG. 2 is a vertical sectional view taken along the line AA showing the assembled state of the embodiment of FIG.

3 is a BB line arrow view of FIG. 2 showing the relationship between the valve body and the casing.

FIG. 4 is a sectional development view showing the relationship between the valve body and the casing, which is developed along the line C-C in FIG. 3.

5 is a view taken along the line BB of FIG. 2 showing the opening state of the orifice.

FIG. 6 is a cross-sectional developed view taken along the line D-D in FIG. 5 showing the opening state of the orifice.

FIG. 7 is a characteristic diagram showing changes in opening area and cylinder displacement.

FIG. 8 is a diagram showing a relationship between a cylindrical hole and a sleeve.

9 is a development view of a cross section taken along line EE of FIG. 8 showing the relationship between the cylindrical hole and the sleeve.

FIG. 10 is a view showing the relationship between the cylindrical hole and the sleeve in the next state of FIG.

11 is a development view of a cross section taken along line FF of FIG. 10, showing the relationship between the cylindrical hole and the sleeve in the next state of FIG. 9.

FIG. 12 is a view showing the relationship between the cylindrical hole and the sleeve in the next state of FIG.

13 is a development view of a cross section taken along the line GG of FIG. 12, showing the relationship between the cylindrical hole and the sleeve in the next state of FIG. 11.

FIG. 14 is a vertical cross-sectional view showing an embodiment in which one sleeve is a plug.

FIG. 15 is a vertical cross-sectional view showing an embodiment in which an orifice is formed on one surface of a valve body.

16 is a characteristic diagram showing changes in opening area and cylinder displacement in the embodiment of FIG.

FIG. 17 is a hole arrangement view showing the arrangement of the cylindrical hole and the inner edge of the sleeve.

FIG. 18 is a characteristic diagram showing changes in opening area and cylinder displacement in the embodiment of FIG.

FIG. 19 is a vertical cross-sectional view showing a modified example in which the shape of the sleeve is changed.

FIG. 20 is a hole layout showing another port connection method.

FIG. 21 is a hole layout diagram showing another port layout method.

FIG. 22 is a vertical sectional view showing an embodiment in which sleeves having different inner diameters are used.

FIG. 23 is a longitudinal sectional view showing an embodiment in which control ports are provided with throttles having different flow passage cross-sectional areas.

FIG. 24 is a longitudinal sectional view showing an embodiment in which a variable aperture is provided in the control port.

FIG. 25 is an H- of FIG. 24 showing the arrangement of the variable diaphragm of FIG.
The H line arrow view.

FIG. 26 is a view showing an embodiment in which a throttle is provided on the pipe on the control port side.

FIG. 27 is a diagram showing an embodiment in which a throttle is provided on the pipe on the supply port side.

FIG. 28 is a diagram showing an embodiment of driving using a gear train.

FIG. 29 is a diagram showing an embodiment in which a belt and a pulley are used for driving.

FIG. 30 is a diagram showing another embodiment in which a gear train is used for driving.

FIG. 31 is a vertical cross-sectional view showing another embodiment of the rotary valve of the present invention.

32 is a view showing the opening state of the orifice in FIG.
Line arrow view.

FIG. 33 is a sectional view taken along the line KK of FIG.
Sectional developed view developed in the line.

FIG. 34 is a characteristic diagram showing changes in opening area and cylinder displacement.

FIG. 35 is a hole arrangement view showing an embodiment in which holes having different inner diameters are provided.

FIG. 36 is a vertical sectional view showing an embodiment in which control ports are provided with throttles having different flow passage cross-sectional areas.

FIG. 37 is a hole layout showing another port layout method.

FIG. 38 is a configuration diagram showing an embodiment of a vibration generator using the rotary valve of the present invention.

FIG. 39 is a configuration diagram showing another embodiment of a vibration generator using the rotary valve of the present invention.

FIG. 40 is a configuration diagram showing an embodiment in which a rotary valve of the present invention is driven in association with movement of an actuator.

FIG. 41 is a configuration diagram showing an embodiment of a vibration generator using the rotary valve of the present invention and another control valve together.

FIG. 42 is a configuration diagram showing an embodiment of a vibration generator using a plurality of rotary valves of the present invention.

43 is a characteristic diagram showing changes in the opening area and the cylinder displacement in FIG. 42.

FIG. 44 is a configuration diagram showing an embodiment in which a throttle is provided on the pipe on the supply port side.

FIG. 45 is a configuration diagram showing an embodiment of a vibration generator of a width compression machine using a rotary valve of the present invention.

FIG. 46 is a configuration diagram showing an embodiment of a vibration generating device of a continuous casting machine using the rotary valve of the present invention.

FIG. 47 is a configuration diagram showing an embodiment of a vibration generating device of a rolling mill using the rotary valve of the present invention.

FIG. 48 is a configuration diagram showing another embodiment of a vibration generating device of a rolling mill using the rotary valve of the present invention.

[Explanation of symbols]

 1 Valve body 2, 3 Casing 4 Spacer 5 Shaft 6, 7 Bearing 8a, 8b, 8c, 8d, 8e, 8f Cylindrical hole 9, 10, 11, 12 Sleeve 13, 14, 15, 16 Flow path 17, 18 Control port 19 supply port 20 discharge port 21 cylinder 22 motor 23 output shaft 24 coupling 25a, 25b, 26a, 26b first opening 27a, 27b second opening 28, 29 plug 30 single rod cylinder 31, 32 throttle 33, 34 drive device 35, 36 variable throttle 37, 38, 39 throttle 40 gear 41 gear train 42 rotational power source 43 belt wheel 44 belt 45 rotational power source 46 valve disc 47 gear train 48 rotational power source 51 valve disc 52, 53 casing 54 Shafts 55, 56 Bearings 57a, 57b, 57c, 57d, 57e, 57f Holes 58, 59 60 Supply Port 61 Exhaust Port 62, 63 Hole 64 Cylinder 65 Motor 66 Output Shaft 67 Coupling 68, 69 Aperture 70 Load 71 Cylinder 72 Rotary Valve 73 Fluid Pressure Power Unit 74 Controller 75 Angular Velocity Target Value 76 Control Command 77 Load 78 Cylinder 79 Rotary Valve 80 Control valve 81 Fluid pressure power unit 82 Target value 83 Control command 84 Controller 85 Rack 86 Gear 87 Load 88 Cylinder 89 Rotary valve 90 Servo valve 91 Fluid pressure power unit 92 Controller 93 Angular velocity target value 94 Control command 95 Displacement sensor 96 Low pass filter 97 Controller 98 Target value 100 Load 101 Cylinders 102, 103 Rotary valve 104 Fluid power unit 105, 106 Controller 107 Upper controller 108 Supply port side piping 109, 110 Throttling 111, 112 Controller 113 Width compression processing machine 114, 115 Mold 116 Material 117, 118 Cylinder 119 Fluid pressure power unit 120, 121 Control valve 122, 123 Rotary valve 132 Tundish 133 Nozzle 134 Molten Steel 135 Mold 136 Pinch Roller 137 Cast Piece 138 Continuous Casting Machine 139 Cylinder 140 Rotary Valve 141 Fluid Pressure Power Unit 142 Rolling Machine 143, 144 Working Roll 145, 146 Reinforcing Roll 147 Material 148 Cylinder 149 Fluid Pressure Power Unit 15 150 Servo Valve Rotary valve 152 cylinder

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hironori Shimogama 3-1-1, Saiwai-cho, Hitachi-shi, Ibaraki Hitachi Ltd. Hitachi factory (72) Inventor Hiroyuki Sato 3-chome, Saiwai-cho, Hitachi, Ibaraki No. 1 Hitachi Ltd. Hitachi factory

Claims (29)

[Claims] 1. A rotary valve for controlling the flow of fluid by changing the opening area of an orifice by relative movement of a valve element rotatably provided with respect to a casing, wherein a pressure chamber of a fluid pressure actuator is provided in the casing. The same number of first orifices as the control ports to be connected are formed, and the valve body is provided with the second orifices paired with the first orifices in the same number or more as the control ports. A characteristic rotary valve. 2. The rotary valve according to claim 1, wherein the second orifice is a cylindrical hole, and the first orifice is a flow rate adjusting means such as a sleeve or a plug having a diameter substantially the same as that of the cylindrical hole. A rotary valve, characterized in that, on both sides of the sleeve or plug, flow paths are provided which are separated from each other by these flow rate adjusting means. 3. The rotary valve according to claim 1, wherein both the first and second orifices are holes,
A rotary valve, wherein the second orifices are provided in the same number as or more than the control ports. 4. A casing having a control port for outputting a control flow and a first orifice forming member for adjusting the control flow; and a casing rotatably provided with respect to the casing and forming the first orifice. A valve body having a second orifice forming member forming a pair of members and forming an orifice, wherein the rotary valve controls the flow of the control flow by relative rotation of the valve body with respect to the casing. The valve body has at least the same number of holes as the second orifice forming member as the number of the control ports, and the casing has a control flow adjusting means such as a sleeve or a plug or a hole forming the first orifice. And a fluid pressure power that vibrates by changing the opening area of the orifice by the rotational movement of the valve body is generated. Rotary valve to be used. 5. A casing having a control port that outputs a control flow and a first orifice forming member that adjusts the control flow; and a casing that is rotatably provided with respect to the casing and that forms the first orifice. A valve body having a second orifice forming member forming a pair of members and forming an orifice, wherein the rotary valve controls the flow of the control flow by relative rotation of the valve body with respect to the casing. The rotary valve is characterized in that the cycle of change of the opening area of the orifice due to the rotation of the valve body is the same as or shorter than the cycle of rotation of the valve body. 6. The rotary valve according to claim 1, wherein at least one port of the control port and the supply port is provided with a throttle. 7. The rotary valve according to claim 6, wherein the throttle is an adjustable variable throttle. 8. The rotary valve according to claim 6, wherein two control ports having the throttle are provided, and the pressure receiving areas of the forward path side and the return path side are different from each other in the fluid pressure chamber of the single rod cylinder. And the throttles provided in the two control ports have different flow passage cross-sectional areas, and the ratio of the flow passage cross-sectional areas is equal to the pressure receiving area of each pressure chamber of the one-rod cylinder connected to each control port. A rotary valve characterized by being configured to be equal to the ratio. 9. A casing having a control port for outputting a control flow and a first orifice forming member for adjusting the control flow; and a casing provided rotatably with respect to the casing and forming the first orifice. A valve body having a second orifice forming member forming a pair of members and forming an orifice, wherein the rotary valve controls the flow of the control flow by relative rotation of the valve body with respect to the casing. The valve body has at least the same number of cylindrical holes as the second orifice forming member as the number of control ports, and at least one of the casings has an outer diameter equivalent to the inner diameter of the cylindrical holes. And provided with a control flow adjusting means such as a sleeve or a plug forming the first orifice and separated from each other by the sleeve or the plug. A rotary valve having a flow passage, wherein fluid pressure power that oscillates by changing the opening area of the orifice is generated by rotational movement of the valve body. 10. The rotary valve according to claim 9, wherein the cylindrical hole of the valve body penetrates in the direction of the rotation center axis of the valve body, and is formed thicker by a predetermined thickness difference than the valve body. And the two casings so as to sandwich the spacer and the valve body from both sides, and the first casing has the control port and the sleeve and is separated from each other by the sleeve. And the second casing has a control flow adjusting means such as the sleeve or the plug,
The rotary valve, wherein the flow paths are separated from each other by the sleeve or the plug, and orifices are formed on both surfaces of the valve body. 11. The rotary valve according to claim 9 or 10, wherein the cylindrical holes of the valve body are provided at equal intervals in the circumferential direction, and the intervals of the adjacent cylindrical holes are the cylindrical holes. A rotary valve characterized in that the inner edge of the sleeve of the casing is inserted between the gaps without any gap. 12. The rotary valve according to claim 9, 10 or 11, wherein a sleeve provided on the casing connects an inner peripheral portion to the control port and one of the flow paths to a supply port. A rotary valve, wherein the rotary valve is configured to be connected and the other flow path is connected to an exhaust port. 13. The rotary valve according to claim 11 or 12, wherein the control valve has two or more control ports, and the inner peripheral portion of the sleeve of the casing is connected to the control port. A rotary valve characterized in that the inner diameters of the parts are different. 14. A casing having a control port for outputting a control flow and a first orifice forming member for adjusting the control flow; and a casing provided rotatably with respect to the casing and forming the first orifice. A valve body having a second orifice forming member forming a pair of members and forming an orifice, wherein the rotary valve controls the flow of the control flow by relative rotation of the valve body with respect to the casing. , The valve body is provided with holes that form the second orifice forming member, the number of which is equal to or larger than the number of the control ports, and the casing includes the holes that form the first orifice. A rotary valve, wherein fluid pressure power that oscillates is generated by changing an opening area of the orifice. 15. The rotary valve according to claim 14, wherein the holes of the valve body are provided at equal intervals in the circumferential direction, and the intervals of the holes of the adjacent valve bodies are equal to each other. A rotary valve characterized in that the inner edge of the hole of the casing is inserted between the two without any gap. 16. The rotary valve according to claim 14 or 15, wherein the control valve has two or more control ports, the hole of the casing is connected to the control port, and has different inner diameters. A rotary valve characterized by. 17. The rotary valve according to any one of claims 1 to 16, wherein the number of vibrations of the oscillating fluid pressure power per unit time is controlled by the angular velocity of the rotation of the valve element. How to control the valve. 18. The rotary valve according to any one of claims 1 to 16, wherein the number of times vibration of the oscillating fluid pressure power is generated is controlled by the amount of angular displacement of the rotation of the valve body. How to control the valve. 19. A method of driving a rotary valve according to claim 1, wherein the rotary valve drives the valve element by an electric motor. 20. A method of driving a rotary valve, wherein a fluid pressure actuator driven by the rotary valve according to any one of claims 1 to 16 drives the valve element. 21. A rotary valve provided with a fluid pressure actuator for driving a load, a control valve for controlling movement of the fluid pressure actuator, and a power source for pressurizing and supplying a working fluid of the fluid pressure actuator. In the vibration generator, the control valve is provided with a casing having a control port for outputting a control flow and a first orifice forming member for adjusting the control flow, and rotatably provided with respect to the casing. A valve body having a second orifice forming member that forms an orifice by forming a pair with the first orifice forming member, and the valve body has a hole forming the second orifice forming member. At least the same number as the number of control ports are provided, while the casing is a control flow adjusting means such as a sleeve, a plug or a hole forming the first orifice. A vibration generating device using a rotary valve, comprising: a rotary valve for generating fluid pressure power that vibrates by changing the opening areas of the first and second orifices by the rotational movement of the valve body. 22. A vibration generator using a rotary valve according to claim 21, wherein two rotary valves are provided as the control valves, and the two rotary valves have a phase difference in rotational movement of the valve body. A vibration generating device using a rotary valve, characterized in that it is driven with a pressure difference and controls the phase difference. 23. A vibration generator using a rotary valve according to claim 21, wherein two rotary valves are provided as the control valves, and the two rotary valves have an angular velocity of rotational movement of the valve body. A vibration generator using a rotary valve, characterized by being driven with a speed difference and controlling the speed difference. 24. A vibration generating device using a rotary valve according to claim 21, wherein the rotary valve has two control ports, while the fluid pressure actuator has a single rod having different pressure receiving areas on the forward path side and the return path side. In addition to a cylinder, the flow passage cross-sectional area is different between the control port and the fluid pressure chamber of the single rod cylinder, and the ratio of the flow passage cross-sectional area is equal to the ratio of the pressure receiving area of the single rod cylinder. A vibration generator using a rotary valve, characterized in that 25. The vibration generator using a rotary valve according to claim 21, wherein the control valve uses the rotary valve and a second control valve other than the rotary valve in combination. A vibration generator using a rotary valve. 26. A vibration generator using a rotary valve according to claim 25, wherein the second control valve compares the position of the fluid pressure actuator with a target value, and drives the second control valve in accordance with a deviation between the two. A vibration generator using a rotary valve having the above structure. 27. A vibration generating device of a width compression machine for applying a compressive force through a mold while applying vibration to a material to compress the material in the width direction, and a fluid pressure actuator for applying the vibration, and the fluid. A vibration generating means having a control valve for controlling the movement of the pressure actuator and a power source for pressurizing and supplying a working fluid to the control valve is provided, and the control valve has a control port for outputting a control flow and the control flow And a second orifice forming member that is rotatably provided with respect to the casing and that forms an orifice by forming a pair with the first orifice forming member. And a valve body having at least the same number of holes as the second orifice forming member as the number of control ports. Is equipped with a control flow adjusting means such as a sleeve, a plug or a hole forming the first orifice, and a rotary valve for generating fluid pressure power that oscillates by changing the opening area of the orifice by the rotational movement of the valve body. A vibration generating device for a width compression processing machine having. 28. In a vibration generator of a continuous casting machine, wherein a casting piece is pulled out and continuously cast while vibrating a mold, a fluid pressure actuator that applies the vibration, and a control valve that controls the movement of the fluid pressure actuator. And a vibration generating means having a power source for pressurizing and supplying a working fluid to the control valve, wherein the control valve has a control port for outputting a control flow and a first orifice forming member for adjusting the control flow. And a valve body that is rotatably provided with respect to the casing and that has a second orifice forming member that forms an orifice by forming a pair with the first orifice forming member, and The valve body has at least the same number of holes as the second orifice forming member as the number of the control ports, while the casing has the first orifice. A rotary valve that includes a control flow adjusting means such as a sleeve, a plug, or a hole that forms a valve, and that generates a fluid pressure power that oscillates by changing the opening area of the orifice by the rotational movement of the valve body. Vibration generator for continuous casting machine. 29. In a vibration generator of a rolling mill, which applies a rolling load through a roll while applying vibration to a material to roll the material, controlling a fluid pressure actuator for applying the vibration and a motion of the fluid pressure actuator. And a vibration generating means having a power source for supplying a working fluid under pressure to the control valve, and the control valve is
A casing having a control port that outputs a control flow and a first orifice forming member that adjusts the control flow; and a pair that is provided rotatably with respect to the casing and that is provided with the first orifice forming member. A valve body having a second orifice-forming member that forms an orifice by means of the valve body, and the valve body has the same number or more of holes as the second orifice-forming member as the number of the control ports, while the casing is A rotary valve that includes a control flow adjusting means such as a sleeve, a plug, or a hole that forms the first orifice, and that generates a fluid pressure power that oscillates by changing the opening area of the orifice by the rotational movement of the valve body. A vibration generator for a rolling mill.