JPH09163768A - Manufacture of vibrating actuator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily assemble a vibrating actuator of a deformed-mode degradation type. SOLUTION: Electrodes 21 to 23 for a vibrating actuator are constituted in such a way that they are connected by a connecting member 26 so as to form a prescribed mounting position onto a vibrator 1. The connecting member 26 of the electrodes 21 to 23, for the vibrating actuator, provided with protruding parts 24, 25 in which a part of the connecting member 26 is formed so as to protrude to the outside of the vibrator 1 when it is mounted onto the prescribed mounting position is mounted onto the prescribed mounting posiiton. After that, the connecting member 26 is cut at the protruding parts 24, 25, the electrodes 21 to 23 for the vibrating actuator are separated from each other, and the vibrator 1 is assembled.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a vibration actuator including a modified mode degenerate vibrator.

[0002]

2. Description of the Related Art FIG. 9 is a perspective view showing the structure of a conventional vibration actuator. As shown in the figure, in this type of vibration actuator, the stator (stator) 101 is
Two layers of piezoelectric elements 104 for torsional vibration are arranged between the two cylindrical vibrators 102 and 103, and the vibrator 10
A piezoelectric element 105 for longitudinal vibration is arranged on the upper side of 3. The piezoelectric element 104 for torsional vibration is polarized in the circumferential direction, while
The piezoelectric element 105 for longitudinal vibration is polarized in the thickness direction. Further, the rotor (moving element) 106 is arranged above the piezoelectric element 105 for longitudinal vibration.

A vibrator 102 constituting the stator 101,
103 and the piezoelectric elements 104 and 105
The rotor 106 is rotatably attached to the shaft 107 via a ball bearing 108 by being screwed and fixed to a screw portion formed at the end of the rotor 106. A nut 110 is screwed onto the tip of the shaft 107 via a spring 109 to bring the rotor 106 into pressure contact with the stator 101 with a pressing force F.

The piezoelectric element 104 for torsional vibration and the piezoelectric element 105 for longitudinal vibration are driven by the drive voltages V _T and V _M whose phases are controlled by the phase shifter 112 to generate a voltage of the same frequency oscillated from the oscillator 111. Driven.

The piezoelectric element 104 for torsional vibration is the rotor 1
06 provides a mechanical displacement for rotation, while the piezoelectric element 105 for longitudinal vibration periodically synchronizes the frictional force acting between the stator 101 and the rotor 106 with the cycle of torsional vibration by the piezoelectric element 104. By virtue of this, it plays the role of a clutch that converts vibration into movement in one direction.

FIG. 10 is an exploded perspective view showing a stator 101 of this conventional vibration actuator. Since the piezoelectric element 104 for torsional vibration needs to be polarized in the circumferential direction, the piezoelectric material is once divided into about 6 to 8 fan-shaped small pieces as shown in FIG. It was combined in a ring. Reference numeral 104a is an electrode for applying a drive voltage to the piezoelectric element 104.

[0007]

However, in the conventional vibration actuator shown in FIG. 9, about 6 to 8 fan-shaped pieces are combined in an annular shape to form a piezoelectric element 10 for torsional vibration.
When forming No. 4, it was difficult to obtain shape accuracy.

On the other hand, the area of each of the piezoelectric element 104 for torsional vibration and the piezoelectric element 105 for longitudinal vibration is
It was substantially equal to or smaller than the cross-sectional area of the stator 106. Also, the shaft 10
It was also necessary to provide a through hole in the central portion of each of the piezoelectric element 104 for torsional vibration and the piezoelectric element 105 for longitudinal vibration in order to penetrate 7. Therefore, the area of each of the piezoelectric element 104 for torsional vibration and the piezoelectric element 105 for longitudinal vibration is further reduced, and it has been difficult to achieve both high torque and high rotation of the vibration actuator.

In order to solve such a problem, the applicant of the present invention has already been able to drive with high torque and high rotation according to Japanese Patent Application No. 6-275022 and the like, and moreover, the structure and the manufacturing are easy. We have proposed a vibration actuator with a so-called odd-mode degenerate oscillator.

FIG. 11 is a vertical cross-sectional view showing an example of a vibration actuator including such a deformed mode degenerate vibrator. The oscillator 1 includes two semi-cylindrical elastic bodies 2 obtained by vertically dividing a hollow cylindrical elastic body 2 into two planes including a rotation axis.
a and 2b are combined. Two piezoelectric bodies (not shown in FIG. 11, which will be described later with reference to FIG. 12), which are electromechanical conversion elements, face each other on two divided surfaces of the two semi-cylindrical elastic bodies 2a and 2b. In this state, a total of 12 pieces of three groups are joined in the axial direction of the vibrator.

Among these piezoelectric bodies, a total of eight piezoelectric bodies for torsional vibration are provided on each end side in the axial direction of the vibrator, and a total of eight piezoelectric bodies for longitudinal vibration are provided on the central side in the axial direction of the vibrator. It is arranged. When these piezoelectric bodies are excited by a drive signal, a secondary torsional vibration and a primary longitudinal vibration are generated in the vibrator 1.

A through hole is provided in the central portion of the cylindrical elastic body 2 in the axial direction, and the rod-shaped fixed shaft 6 is arranged in the through hole. Cylindrical elastic body 2
Is fixed to the fixed shaft 6 by a support member 7 which is mounted so as to penetrate the cylindrical elastic body 2 and the fixed shaft 6 in a direction orthogonal to the axial direction of the fixed shaft 6.

Further, the cylindrical elastic body 2 is formed with three small diameter portions 2c, 2d and 2e in a stepped shape, and these small diameter portions 2c to 2e form four large diameter portions 2A, 2B,
2C and 2D are formed.

Bolts 8a to 8a penetrating through the large diameter portions 2A to 2D in a direction orthogonal to the axial direction of the cylindrical elastic body 2.
d is attached. Bolts 8a-8d and bolts 8a-
The semi-cylindrical elastic bodies 2a and 2b are fastened and fixed by the nuts 9a to 9d that are screwed into the 8d.

FIG. 12 is an explanatory view showing the structure of the vibrator 1 in more detail. FIG. 12A is a side view showing a half of the vibrator 1 with the axis of the vibrator 1 as a boundary, and FIG. (B)
FIG. 13 is a sectional view showing an AA section in FIG.

As shown in FIG. 12 (A) and FIG. 12 (B), a vibrator 1 has a combination of semi-cylindrical elastic bodies 2a and 2b obtained by vertically dividing a hollow cylindrical body 2 into two parts, and dividing surfaces thereof. Is
The piezoelectric bodies 3a to 3c and the electrode plates 15a to 15c are sandwiched in a laminated state as shown in the drawing.

The piezoelectric bodies 3a to 3c are composed of three groups in the axial direction of the cylindrical elastic body 2, and each group is composed of two layers. 2 groups (torsional vibration piezoelectric member 3a, 3c) of each piezoelectric body of a piezoelectric material the piezoelectric constant d ₁₅ is large, the remaining 1 group (for longitudinal vibration piezoelectric element 3b) is a piezoelectric piezoelectric constant d ₃₁ is greater , Respectively. The torsional vibration piezoelectric bodies 3 a and 3 c having a large piezoelectric constant d ₁₅ generate shear displacement in the axial direction of the cylindrical elastic body 2.

When a sinusoidal voltage is applied to the torsional vibration piezoelectric bodies 3a and 3c having a large piezoelectric constant d ₁₅ , a torsional displacement (torsional vibration) is generated in the cylindrical elastic body 2 accordingly. On the other hand, the vertical displacement (stretching vibration) is generated in response to this the cylindrical elastic body 2 by applying a sinusoidal voltage to the piezoelectric 3b for longitudinal vibration piezoelectric constant d ₃₁ is large.

As described above, by applying the voltage to each piezoelectric body, longitudinal vibration and torsional vibration are generated in the vibrator 1. When the respective resonance frequencies of the generated longitudinal vibration and torsional vibration are substantially the same, longitudinal vibration and torsional vibration are simultaneously generated in the vibrator 1 (hereinafter, such a state is referred to as "degeneracy"). At the time of this contraction, an elliptic motion in which a fixed point oscillates in an elliptical shape occurs on the driving surface 1a, which is one end surface of the vibrator 1.

As shown in FIG. 11, the generated elliptical movement rotationally drives the moving element 10 which is a relative moving member which is brought into pressure contact with the driving surface 1a. The mover 10 includes a mover base material 10a that is rotatably supported by a fixed shaft 6 by a positioning member 11 such as a bearing provided in the center of the mover 10, and an end surface of the mover base material 10a on the vibrator 1 side. And a ring-shaped sliding member 10b attached to the.

The positioning member 11 is pressed toward the vibrator 1 by a pressing member 12, which is a coil spring, for example, through a column-shaped pressing force transmission member 13 having a large diameter portion on the end surface. The pressurizing member 12 is held by a pressurizing amount adjusting member 14 such as a nut attached to a screw portion 6a formed at the end of the fixed shaft 6.

The vibration actuator having such a modified mode degenerate oscillator has higher torque, smaller size, and smaller size than the conventional vibration actuator using the same mode as represented by the ring type vibration actuator. Is expected to be lighter, and research and development have been actively conducted so far.

However, the vibration actuator including the variant mode degenerate type vibrator generally includes a plurality of piezoelectric elements which are electromechanical conversion elements. Therefore, when the odd-mode degenerate oscillator is used as a vibration actuator, it is necessary to independently input electric energy (apply a drive voltage) to each of the plurality of electromechanical conversion elements.

In order to apply such a driving voltage, it is necessary to independently provide an electrode for each piezoelectric element. Also,
In some cases, it is necessary to provide a pickup that is a mechanical-electrical conversion element that converts mechanical displacement into electrical energy in order to obtain information such as the operating state of the vibration actuator and the state of the relative motion member driven thereby. Therefore, also for this pickup, an electrode is required for transmitting the output electrical energy to the outside.

Therefore, also in the variant mode degenerate vibration actuator shown in FIGS. 11 and 12, twelve piezoelectric elements 3a are provided between the semi-cylindrical elastic bodies 2a and 2b.
3c and the six electrodes 15a to 15c must be accurately arranged at predetermined positions in a laminated state. Therefore, when the piezoelectric elements 3a to 3c and the electrodes 15a to 15c are installed, a dedicated jig is used to install them at accurate positions.

However, according to FIGS. 11 and 12, in the conventional assembly of the variant mode degenerate vibration actuator, a great number of man-hours are required to fix the piezoelectric elements 3a to 3c and the electrodes 15a to 15c at the correct positions. The work efficiency was low because it was necessary. Further, since it is difficult to perform the work reliably, the assembling accuracy is low, and there are individual differences in the performance of the assembled vibration actuator. Further, when the piezoelectric elements 3a to 3c are small, it is necessary to make the electrodes 15a to 15c small accordingly, so that the manual assembly becomes extremely difficult.

Furthermore, in order to apply a driving power supply to the electrodes 15a to 15c, it is necessary to bond lead wires connected to the driving voltage generator by, for example, soldering. However, if soldering is performed before mounting on the semi-cylindrical elastic bodies 2a and 2b, the piezoelectric elements 3a to 3c are pulled to predetermined positions by the restoring force generated in the lead wires when the piezoelectric elements 3a to 3c are arranged. Difficult to place accurately.
Therefore, it is necessary to perform soldering after mounting, but the characteristics of the piezoelectric elements 3a to 3c change due to the heat caused by the soldering, or the semi-cylindrical elastic bodies 2a to 2c and the piezoelectric elements 3a to 3c.
There is also a problem that the adhesion state with c is deteriorated.

[0028]

SUMMARY OF THE INVENTION The present invention is directed to electrodes 15a ...
15c is integrally molded before being assembled to the semi-cylindrical elastic bodies 2a and 2b, and after mounting and positioning on the vibrator 1, the electrodes 15a to 15c are separated by cutting or the like to secure an insulating state. SUMMARY OF THE INVENTION It is intended to solve the above-mentioned problems by improving the assembling workability of a vibration actuator including a modified mode degenerate oscillator.

According to a first aspect of the present invention, there is provided a method of manufacturing a vibration actuator including a deformed mode degenerate type vibrator, wherein a plurality of vibration actuator electrodes are connected to the vibrator at predetermined mounting positions. And a connecting member of the electrodes for the vibration actuator, the connecting member having a protruding portion formed by protruding at least a part of the connecting member to the outside of the vibrator when mounted at the predetermined mounting position. After mounting to the predetermined mounting position,
The plurality of electrodes for vibration actuators are separated from each other by cutting the connecting member at the protruding portion.

According to a second aspect of the present invention, in the method of manufacturing the vibration actuator according to the first aspect, the electrode for the vibration actuator is adhered and fixed when the connecting body is attached to the vibrator. To do.

The invention of claim 3 is the same as claim 1 or claim 2.
In the method of manufacturing a vibration actuator described above, a lead wire connected to an external power source is attached to the protruding portion before the connecting body is attached to the vibrator.

According to a fourth aspect of the present invention, in the method of manufacturing a vibration actuator according to the third aspect, the connecting member is cut by a cutting line while leaving the mounting portion of the lead wire in the protruding portion. It is characterized by cutting.

According to a fifth aspect of the invention, in the method of manufacturing a vibration actuator according to the fourth aspect, the cutting line is a straight line. The vibration actuator according to any one of claims 1 to 5 uses, as a drive source, a composite vibration of a plurality of vibrations generated in the vibrator. It also includes vibration.

[0034]

BEST MODE FOR CARRYING OUT THE INVENTION

(First Embodiment) Hereinafter, a method of manufacturing a vibration actuator according to the present invention will be described in detail with reference to the accompanying drawings. It should be noted that the following description of each embodiment will be given by taking an ultrasonic actuator as an example of the vibration actuator.

FIG. 1 is a longitudinal sectional view of an example of a modified mode degenerate ultrasonic actuator utilizing longitudinal vibration and torsional vibration. In the figure, a vibrator 1 is a piezoelectric body 3, 4, 5 which is an electromechanical conversion element excited by a drive signal.
And an elastic body 2 in which a driving force is generated on the drive surface 1a by joining the piezoelectric bodies 3 to 5 and exciting the piezoelectric bodies 3 to 5 to generate primary longitudinal vibration and secondary torsional vibration. Composed of. Both the longitudinal vibration and the torsional vibration are vibrations in the ultrasonic range. In addition, in FIG.
Reference numeral 5 is not shown, and will be described in detail with reference to the drawing in FIG.

As shown in FIG. 1, the elastic body 2 is divided into two semi-cylindrical elastic bodies 2a and 2b along the height direction, and is divided into four large diameter portions 2A, 2B, 2C and 2D, and these large diameter portions 2A, 2B, 2C and 2D. Three small diameter portions 2c, 2d and 2e arranged between the large diameter portions 2A to 2D are formed. On the two dividing surfaces of the elastic body 2,
The piezoelectric bodies 3 to 5 are held in a sandwiched state.

The elastic body 2 is provided with through holes 2f, 2g, 2h and 2i substantially in the longitudinal center of each of the four large diameter portions 2A to 2D in parallel with the stacking direction of the piezoelectric bodies 3 to 5.
Bolts 8a to 8d are inserted into these through holes 2f to 2i, and nuts 9a to 9 are attached to the respective ends of the bolts 8a to 8d.
By screwing d, the semi-cylindrical elastic bodies 2a and 2b are fastened to sandwich the piezoelectric bodies 3-5.

Further, a columnar support member 7 for fixing the elastic body 2 to the fixed shaft 6 penetrates through a portion of the small diameter portion 2d and near the node of the primary longitudinal vibration. The mover 10 includes a thick hollow cylindrical mover base material 10 a and a mover base material 10 a.
The sliding member 10b is attached to one end surface of a and contacts the driving surface 1a. Positioning means 11 such as a bearing is fitted to the inner peripheral side central portion of the surface of the moving element 10 opposite to the surface on which the sliding material is attached. The mover 10 is positioned with respect to the fixed shaft 6 by the positioning means 11.
Further, the moving element 10 is pressed against the drive surface 1a by the pressing means 12 including a spring spring (other than this, for example, a disc spring or a leaf spring may be used).

The fixed shaft 6 for fixing the vibrator 1 is composed of the vibrator 1
Is disposed so as to penetrate through a hollow portion formed in the central portion of the shaft in the axial direction. The fixed shaft 6 fixes the vibrator 1 and positions the mover 10 in the radial direction. Further, a pressing force adjusting means 14 such as a nut for adjusting the pressing force of the pressing means 12 is screwed into the threaded portion 6a formed at the end of the fixed shaft 6, and the pressing force adjusting means 14 is fixed. By changing the screwing position with respect to the shaft 6, the pressing force of the pressing means 12 is adjusted.

The drive circuit includes an oscillator for oscillating a drive signal (not shown), a phase shifter for dividing the drive signal into signals having a 1 / 4λ phase difference, and a drive for inputting to the torsional vibration piezoelectric bodies 3, 5. It is composed of a T amplifying section for amplifying a signal and an L amplifying section for amplifying a drive signal inputted to the piezoelectric body 4 for longitudinal vibration.

FIG. 2 is an explanatory view of the vibrator 1 used in the ultrasonic actuator shown in FIG. 1, and FIG. 2 (A) is a side view showing the left half from the center line, and FIG. )
2A is a cross section taken along the line A-A, a cross section taken along the line BB, and a line C- in FIG.
It is sectional drawing which shows the C cross section with a drive voltage application state.

In FIG. 2 (A), at one location near the node of the first-order longitudinal vibration of the vibrator 1, a total of four piezoelectric bodies 4 each having a large piezoelectric constant d ₃₁ of four layers and a second-order torsional vibration. Two piezoelectric layers 3 and 5 each having a large piezoelectric constant d ₁₅ are arranged in two places near the node of 8 in total, that is, 8 layers in total.

The piezoelectric bodies 3 and 5 having a large piezoelectric constant d ₁₅ generate shear displacement in the longitudinal direction of the elastic body 2.

The cross section AA and the line CC in FIG.
The two sets of piezoelectric bodies 3 and 5 in each cross section are arranged so that the shear deformation alternates between the front direction and the opposite direction with respect to the circumferential direction.

Further, the piezoelectric bodies 3 and 5 are arranged so that the twisting directions of the AA section and the CC section are opposite. When the piezoelectric bodies 3 and 5 are arranged in this way and are sheared and deformed, a secondary torsional displacement is generated in the vibrator 1.

On the other hand, the piezoelectric body 4 having a large piezoelectric constant d ₃₁ is
Expansion and contraction displacement occurs in the longitudinal direction of the elastic body 1. The two sets of longitudinal vibration piezoelectric bodies 4 in the B-B cross section are arranged so that displacement occurs in the same direction when a potential of a certain value is applied.

In this embodiment, as shown in FIG. 2A, the piezoelectric elements 3 and 5 for torsional vibration, which have a large piezoelectric constant d ₁₅ ,
The piezoelectric body 4 for longitudinal vibration having a large piezoelectric constant d ₃₁ is arranged. Then, as shown in FIG. 2B, by inputting the sine wave voltage V _t to the piezoelectric elements 3 and 5 for torsional vibration, torsional vibration is generated in the vibrator 1 accordingly. On the other hand, when the sinusoidal voltage V _l is input to the piezoelectric body 4 for longitudinal vibration, stretching vibration is generated in the vibrator 1 accordingly.

According to the above-described ultrasonic actuator and the drive voltage generator including the drive circuit thereof,
The oscillating unit oscillates a drive signal, and the drive signal is divided into two signals having a 1 / 4λ phase difference by the phase shift unit and amplified by the T amplification unit and the L amplification unit, respectively. The drive signal amplified by the T amplification section is input to the torsional vibration piezoelectric bodies 3 and 5, while the drive signal amplified by the L amplification section is input to the longitudinal vibration piezoelectric body 4.

In the vibrator 1 to which the drive signal is input, the primary longitudinal vibration and the secondary torsional vibration are generated by the excitation of the piezoelectric bodies 3 to 5. FIG. 3 shows the primary longitudinal vibration (L1 mode) and the secondary torsional vibration (T2 mode) generated in the vibrator 1.
It is explanatory drawing which shows an example of each vibration waveform.

As shown in FIG. 3, the drive signal amplified by the T amplification section is input to the torsional vibration piezoelectric bodies 3 and 5, and the drive signal amplified by the L amplification section is input to the longitudinal vibration piezoelectric body 4. When input, the primary longitudinal vibration (L1 mode) and the secondary torsional vibration (T2) having antinodes and nodes of vibration shown in FIG.
Mode) and occur.

Here, the phase difference of the periodic voltages applied to the piezoelectric elements 3 and 5 for torsional vibration and the piezoelectric element 4 for longitudinal vibration is (1/4).
When λ (λ: wavelength) is shifted, an elliptic motion is generated on the driving surface 1a which is the end surface of the vibrator 1.

FIG. 4 is an explanatory diagram showing the operation of the ultrasonic actuator driven by the elliptic motion generated on the driving surface 1a of the variant mode degenerate oscillator 1 with the passage of time. Note that, in FIG. 4, the moving element 10 that is brought into pressure contact with the driving surface 1 a of the vibrator 1 is not shown.

As shown in FIG. 4, the period of the torsional vibration T,
The phase difference from the period of the longitudinal vibration L is (1/4) λ (λ: wavelength)
When they are displaced, elliptical motion is generated at a fixed point on the driving surface 1a. At time t = (6/4) π, the displacement of the torsional vibration T is maximum on the left side. On the other hand, the displacement of the longitudinal vibration L is zero.
In this state, the mover 10 is brought into pressure contact with the driving surface 1a of the vibrator 1 by a pressure member (not shown).

From this state, t = (7/4) π˜0
Up to (2/4) π, the torsional vibration T is displaced from the maximum on the left side to the maximum on the right side. On the other hand, the longitudinal vibration L is displaced from zero to the upper maximum and returns to zero again. Therefore, the fixed point of the driving surface 1a of the vibrator 1 rotates to the right while pushing the mover 10, and the mover 10 is driven.

Next, from t = (2/4) π to (6/4) π, the torsional vibration T is displaced from the maximum on the right side to the maximum on the left side. On the other hand, the longitudinal vibration L is displaced from zero to the maximum on the lower side and returns to zero again. Therefore, the fixed point of the driving surface 1a of the vibrator 1 rotates leftward while moving away from the moving element 10, so that the moving element 10 is not driven. At this time, mover 1
0 is pressed by a pressing member (not shown), but does not follow the contraction of the vibrator 1 because the natural frequency of the pressing member is smaller than the driving frequency.

When a sinusoidal voltage is input to the piezoelectric elements 3 and 5 for torsional vibration, torsional vibration T is generated in the vibrator 1 in response to this, and at this time, each vibration generated in the vibrator 1 is generated. When the piezoelectric elements 4 and 5 are arranged in the nodes, vibrations are efficiently excited.

In this way, elliptical motion is generated on the driving surface 1a of the vibrator 1. At this time, in the torsional vibration T, nodes are generated at two places, that is, the small diameter portions 2c to 2e having weak torsional rigidity and the substantially central portion of the first large diameter portion 2A, and the driving surface 1a becomes an antinode of vibration. On the other hand, in the vertical vibration L, nodes of vibration occur near the small diameter portions 2c to 2e, and the drive surface 1a becomes an antinode of vibration.

The moving element 10 pressed against the driving surface 1a is driven by frictionally receiving a driving force from the vibrator 1. Here, as shown in FIG. 4, when the phase difference between the periods of the torsional motion T and the longitudinal vibration L is shifted by (1/4) λ (λ: wavelength), an elliptic motion occurs at a fixed point on the driving surface 1a. To do. The frequency of the torsional vibration T causes substantially coincides with the resonance frequency omega _0T of the torsional vibration T, when substantially match the frequency of the longitudinal vibration L of the longitudinal vibration L in the resonance frequency omega _0L, torsional vibration T and the longitudinal vibration L Resonate with each other, and the elliptic motion generated on the driving surface 1a expands.

In the ultrasonic actuator used in this embodiment, the resonance frequency ω _0T of the torsional vibration T is generated only by the vibrator 1.
And the resonance frequency ω _0L of the longitudinal vibration L can both be determined, so that the degree of freedom regarding the shape setting of the mover 10 increases.

In order to set the shape of the mover 10 relatively freely, it is necessary to minimize the propagation of vibration from the vibrator 1 to the mover 10. For example, by using a sliding material 10b having a high vibration damping property such as a fluororesin, or by configuring the moving element base material 10a with a material having a high vibration damping property, such as an aluminum alloy material, the vibration damping of the moving element 10 itself. The sex is sufficiently secured.

Next, a method of manufacturing the vibration actuator of this embodiment will be described in detail with reference to the accompanying drawings. FIG.
5A and 5B are explanatory views showing a method for manufacturing the vibration actuator of the present embodiment, FIG. 5A is a side view showing the vibrator 1 in a state where half is seen from the center line, and FIG. (A)
It is AA sectional drawing in.

As shown in FIG. 5A, in the present embodiment, a copper-made ultrasonic actuator electrode coupling body 26 is used. In this connecting body 26, the ultrasonic actuator electrodes 21 and 22 are connected by a connecting member 24 so that the rectangular flat plate-shaped ultrasonic actuator electrodes 21, 22 and 23 are at predetermined attachment positions to the vibrator 1. In addition, the electrodes 22 and 23 for the ultrasonic actuator are connected by the connecting member 25 to be configured.

The connecting member 24 is an electrode overhanging portion 21b formed in a projecting shape at the end of the ultrasonic actuator electrode 21.
And a connecting portion 22a formed in a protruding shape on the end of the ultrasonic actuator electrode 22.

On the other hand, the connecting member 25 has a protruding portion 22b formed on the end of the ultrasonic actuator electrode 22 and a connecting portion formed on the end of the ultrasonic actuator electrode 23 in a protruding shape. It connects with the part 23a.

These connecting members 24 and 25 are both
The connecting body 26 is formed so as to protrude to the outside of the vibrator 1 when the connecting body 26 is mounted on the vibrator 1 at a predetermined mounting position. FIG.
The broken line in (A) indicates the outer contour position of the vibrator main body when the connecting body 26 is mounted on the vibrator 1 at a predetermined mounting position.

Therefore, when the connecting body 26 is attached to the vibrator 1 at a predetermined attaching position and then the connecting body 26 is cut along the above-described broken line, the ultrasonic actuator electrodes 2 are formed.
1 to 23 are separated to be in an insulating state.

That is, the broken line in FIG. 5A is a cutting line which is a virtual straight line with respect to the connecting body 26.

The connecting body 26 is integrally cut out from a material plate (usually a copper plate) of an electrode for an ultrasonic actuator by a wire cutter method,
It is formed.

Further, in the present embodiment, even if the lead wires are soldered to the ultrasonic actuator electrodes 21 to 23 before being mounted on the vibrator 1, since the connecting body 26 is used, The mounting workability of does not deteriorate.

Therefore, in the present embodiment, before the connecting body 26 is mounted on the vibrator 1, the lead wires 27 connected to an external power source (not shown) are respectively attached to the electrode protruding portions 21b to 23b.
Can be attached by soldering. Therefore,
The adverse effects on the piezoelectric bodies 3 to 5 due to heat during soldering are eliminated.

Next, a procedure for assembling the vibrator 1 according to this embodiment will be described. FIG. 6 shows that the vibrator 1 has piezoelectric elements 3-5.
It is explanatory drawing for showing an example of the jig | tool used when installing and the electrodes 21-23, and an installation procedure. In FIG. 6, the large diameter portion 2 provided on the outer peripheral surface of the columnar elastic body 2 is used.
A to 2D and small diameter portions 2c to 2e are not shown.

As shown in the figure, a rectangular flat plate-shaped substrate 16
A groove 16a with which the outer peripheral surface of the semi-cylindrical elastic body 2a or 2b is fitted is formed on one plane. Semi-cylindrical elastic member fixing members 17 and 18 are arranged on both sides of the groove 16a so as to face each other.

In FIG. 6, since the semi-cylindrical elastic body fixing members 17 and 18 are symmetrical and have the same shape, the semi-cylindrical elastic body fixing member 18 is not shown. In the following description, the semi-cylindrical elastic body fixing member 17 will be described as an example.

The semi-cylindrical elastic member fixing member 17 is composed of a rectangular parallelepiped main body 17a and three plate-like supporting portions 17b to 17d provided so as to project toward the groove 16a side.

Main body 17a of semi-cylindrical elastic member fixing member 17
Slots 17e and 17f penetrating in the thickness direction. Bolts 19 penetrating the elongated holes 17e, 17f
The main body 17 a is fixed to the substrate 16 by screwing a and 19 b into a screw portion (not shown) formed on the substrate 16.

By loosening the bolts 19a and 19b, the main body 17a is moved to the groove 16 formed on the surface of the substrate 16.
It can be moved in a direction (arrow direction in the drawing) orthogonal to the forming direction of a. In addition, the bolt 8a is provided in the groove 16a.
The nuts 9a to 9d for fitting with the to 8d are arranged in advance.

In order to assemble the vibrator 1 using such a jig, the bolts 19a and 19b are loosened, and then the semi-cylindrical elastic member fixing member 17 is retracted to a position apart from the groove 16a. In this state, the groove 1 formed on the surface of the substrate 16
The semi-cylindrical elastic body 2b is fitted and arranged on the 6a.

Next, the piezoelectric elements 3 to 5 are arranged at predetermined positions on the divided surface of the semi-cylindrical elastic body 2b. At this time, in this embodiment, the piezoelectric elements 3 to 5 are connected to the semi-cylindrical elastic body 2b.
It is the piezoelectric element 3 that should be adhered and fixed to one split surface.
It is desirable in order to reliably propagate the displacements (5) to (5) to the columnar elastic body 2.

Next, at a predetermined position above the mounted piezoelectric elements 3 to 5, the lead wire 27 is connected to the electrode projecting portions 21b to 23b of the ultrasonic actuator electrodes 21 to 23 to form the connecting body 26. Mounting.

At the time of this mounting, in order to mount it accurately at a predetermined position, in this embodiment, the connecting body 26 is connected to the piezoelectric element 3.
It is fixed to ~ 5 by adhesion.

In this state, the semi-cylindrical elastic member fixing member 17
Is moved toward the groove 16a side, the supporting portion 17
b to 17d restrain the side surfaces of the piezoelectric elements 3 to 5 and the electrodes 21 to 23 mounted on the divided surfaces of the semi-cylindrical elastic body 2b. At this time, the fixing member 17 is the semi-cylindrical elastic body 2
The horizontal movements of a and 2b are restricted, and the vertical movements are not restricted.

In the present embodiment, the supporting portions 17b to 17d of the semi-cylindrical elastic body fixing member 17 have a horizontal cross-sectional shape that fits into the three recesses formed in the connecting body 26. The position of the connecting body 26 is regulated reliably and easily.

After that, the cylindrical member 20a for positioning which is formed in two splits for allowing the bolts 8a to 8d to penetrate through the entire length of the cylindrical hollow portion formed in the central portion of the semi-cylindrical elastic body 2b. And 20b. Note that, in FIG. 6, the positioning cylinder member 20b is omitted for convenience of explanation, but it is mounted at a position facing the positioning cylinder member 20a.

Then, the piezoelectric elements 3 to 5 are adhered to the connecting body 26 accurately arranged on the dividing surface of the semi-cylindrical elastic body 2b so as to be in a predetermined mounting position, and thereafter, these piezoelectric elements are bonded. The semi-cylindrical elastic body 2a is fixed on the 3 to 5 at a predetermined position by adhesion.

In this state, the bolts 8a to 8d are passed through the through holes 2f to 2i provided in the semi-cylindrical elastic bodies 2a and 2b. Then, the bolts 8a to 8d are attached to the nuts 9a to
By screwing 9d, the semi-cylindrical elastic bodies 2a and 2b are fastened and fixed. After this, loosen the bolts 19a, 19b,
The semi-cylindrical elastic member fixing member 17 is retracted in the direction away from the groove 16a.

Further, the integrated semi-cylindrical elastic bodies 2a and 2b are removed from the substrate 16, and the positioning cylinder members 20a and 20b are pulled out from the elastic body 1.

Finally, the connecting members 24, 25 of the connecting body 26.
Are cut along the cutting line described above, so that the ultrasonic actuator electrodes 21 to 23 are separated from each other to be in an insulating state. Note that the positioning cylinder members 20a and 20b may be extracted from the elastic body before the semi-cylindrical elastic bodies 2a and 2b integrated by bolting are removed from the substrate 16.

As described above, according to the method of manufacturing the vibration actuator of the present embodiment, since the connecting body 26 is used, the ultrasonic actuator electrodes 21 to 23 can be positioned easily and accurately.

Further, according to the present embodiment, even if the lead wire 27 is soldered to each of the ultrasonic actuator electrodes 21 to 23 before the connecting body 26 is attached to the vibrator 1, the ultrasonic actuator electrode 21 is not soldered. 23 to 23 are integrally formed as the connecting body 26, the rigidity of the connecting body 26 is high.

Therefore, the workability of mounting on the vibrator 1 is not deteriorated, so that the lead wire 27 can be soldered before the connecting body 26 is mounted on the vibrator 1, and the piezoelectric element 3 mounted on the vibrator 1 can be mounted. It is possible to eliminate the adverse effect of heat when soldering to 5 to 5. Therefore, it is possible to reliably eliminate the occurrence of a solid difference in performance due to heat when soldering the lead wires to the piezoelectric elements 3 to 5.

According to the method of manufacturing the vibration actuator of the present embodiment, the ultrasonic actuator electrode 21 is used.
The piezoelectric elements 3 to 5 are fixed by adhesion when the connected body 26 in which the elements 23 to 23 are connected is mounted on the vibrator 1. for that reason,
The piezoelectric actuators 3 to 5 are connected to the ultrasonic actuator electrodes 21 to 23.
It can be mounted very easily and accurately at a predetermined position of.

Further, according to this embodiment, the connecting body 26
Since it is cut by a straight cutting line, the cutting operation is simple and reliable.

As described above, in this embodiment, the ultrasonic actuator electrodes 21 to 23 for applying the drive voltage to the torsional vibration piezoelectric bodies 3 and 5 and the longitudinal vibration piezoelectric body 4 are used as the coupling body 26. They are integrally molded together, and after positioning and adhering and fixing to the cylindrical elastic body 2, the connecting portions 24 and 25 are cut by a cutting line to separate and insulate the ultrasonic actuator electrodes 21 to 23.

Therefore, the ultrasonic actuator electrode 2
1 to 23 are piezoelectric elements for torsional vibration 3, 5, piezoelectric elements for longitudinal vibration 4
Can function independently of.

(Second Embodiment) FIG. 7 is an explanatory view showing a method of manufacturing a vibration actuator according to a second embodiment of the present invention, and FIG. 7 (A) shows a half of the center line as seen through. A side view and FIG. 7B are sectional views taken along line AA in FIG. 7A. In the following description of each embodiment, only the parts different from the first embodiment will be described, and the same parts will be denoted by the same reference numerals in the drawings to omit redundant description.

In the method of manufacturing the vibration actuator according to this embodiment, the coupling body 26 includes the ultrasonic actuator electrodes 21 to 21.
It is not configured to connect only 23, but a pickup 28 that is a mechanical-electrical conversion element that detects the displacement of the generated torsional vibration T and converts it into an electric signal, and the generated vertical vibration L.
Is further connected integrally with a pickup 29 that is a mechanical-electrical conversion element that detects the displacement of the element and converts it into an electric signal.

The pickups 28 and 29 are used to obtain information on the operating state of the ultrasonic actuator and the state of the relative motion member 10 driven by it.
That is, also in the present embodiment, in the connector 26-1, the ultrasonic actuator electrodes 21 and 22 are connected by the connecting member 24 and the ultrasonic actuator electrodes 22 and 23 are connected by the connecting member 25.

Further, in the present embodiment, the connecting body 2
In 6-1, the ultrasonic actuator electrode 21 and the pickup 28 are connected by the connecting member 30, and the ultrasonic actuator electrode 23 and the pickup 29 are connected.
Are connected by the connecting member 31. Pickup 28,
The lead wire 27 is attached by soldering to the portion of the pickup 29 that remains after cutting.

According to this embodiment, even when the pickups 28 and 29 for detecting the vibration displacement are formed, the ultrasonic actuator electrode and the pickup can be positioned easily and accurately.

Other than this, it is exactly the same as the first embodiment.

(Third Embodiment) FIG. 8 is an explanatory view showing a part of a connecting member used in the method of manufacturing a vibration actuator according to the third embodiment.

In this embodiment, the electromechanical conversion element 21-1 is used.
The dimension is very small, and it is not easy to position and bond the transducer 1 and the lead wire 27. That is, by using the connecting body 26-2, it is easy to accurately mount the small-sized ultrasonic actuator electrodes 21-1 to 23-1.

As described above, according to the first to third embodiments described above, a plurality of ultrasonic actuator electrodes provided for each group of electromechanical conversion elements are connected to each other before assembly. Is integrally formed, the connecting body is positioned and fixed to the vibrator, and after the vibrator is assembled, the connecting body is cut to separate the ultrasonic actuator electrodes.

Therefore, since each ultrasonic actuator electrode is accurately set at a predetermined mounting position, the mounting workability of the ultrasonic actuator electrode is greatly improved, and
The positioning accuracy of the ultrasonic actuator electrode is also improved. Furthermore, even when the ultrasonic actuator electrode is very small, the work can be reliably performed.

Before separation of the connected body, the electrodes for ultrasonic actuators are integrally formed, so that the rigidity is high. Therefore, even if the lead wire or the like is soldered to each ultrasonic actuator electrode before being separated, the positional displacement or the like due to the restoring force of the lead wire does not occur at the assembly stage.

Therefore, it becomes possible to provide the connecting member with a lead wire to be connected to the external power source before the positioning and fixing, and the solder wire is provided as compared with the conventional case where the lead wire is provided after the positioning and fixing. The adverse effect of heat due to attachment or the like is not propagated to the electromechanical conversion element, the assembling adhesive, or the like, and it is possible to prevent the performance difference between the ultrasonic actuators from occurring.

(Modification) In each of the above embodiments, the case where a piezoelectric element is used as the electromechanical conversion element or the electromechanical conversion element is taken as an example. However, the present invention is not limited to such an aspect. The electromechanical conversion element or the electromechanical conversion element may be one that can mutually convert electric energy and mechanical displacement. For example, other than the piezoelectric element, an electrostrictive element, a magnetostrictive element or the like can be exemplified.

Further, in each of the embodiments, the ultrasonic actuator using the deformed mode degenerate type oscillator in which the elastic body generates the secondary torsional vibration and the primary longitudinal vibration is taken as an example. However, the present invention is not limited to such an aspect. Similar effects can be obtained with an ultrasonic actuator in which an elastic body generates m-th order torsional vibration and an n-th order longitudinal vibration, and other ultrasonic actuators using vibrations. Equally included in the present invention.

[Brief description of the drawings]

FIG. 1 is a vertical cross-sectional view of an example of a modified mode degenerate ultrasonic actuator that utilizes longitudinal vibration and torsional vibration.

2A and 2B are explanatory views of a vibrator used in the ultrasonic actuator shown in FIG. 1, FIG. 2A is a side view showing a left half from a center line, and FIG. Figure 2
It is sectional drawing which shows the A section, B section, and C section in (A) with a drive voltage application state.

FIG. 3 is an explanatory diagram showing an example of vibration waveforms of the primary longitudinal vibration and the secondary torsional vibration generated in the vibrator 1.

FIG. 4 is an explanatory diagram showing an operation of an ultrasonic actuator driven by an elliptic motion generated on a drive surface of a variant mode degenerate oscillator used in the first embodiment, with time.

FIG. 5 is an explanatory view showing the method of manufacturing the vibration actuator according to the first embodiment, and FIG. 5 (A) is a side view showing a half of the vibrator seen from the center line, and FIG. 5A is a sectional view taken along line AA in FIG.

FIG. 6 is an explanatory view showing a jig and an installation procedure used when installing the piezoelectric element and the electrode on the vibrator in the first embodiment.

7A and 7B are explanatory views showing a method of manufacturing the vibration actuator according to the second embodiment, FIG. 7A is a side view showing a half of the center line as seen through, and FIG. 7
It is an AA sectional view in (A).

FIG. 8 is an explanatory view showing a part of a connecting member used in the method of manufacturing the vibration actuator according to the third embodiment.

FIG. 9 is a perspective view showing a structure of a conventional ultrasonic actuator.

FIG. 10 is a perspective view showing a developed stator of a conventional ultrasonic actuator.

FIG. 11 is a vertical cross-sectional view showing an example of an ultrasonic actuator including a modified mode degenerate oscillator proposed in Japanese Patent Application No. 6-275022.

12 is an explanatory diagram showing in detail the structure of a vibrator in the ultrasonic actuator shown in FIG.
FIG. 12A is a side view showing a half of which is seen through the axis of the vibrator, and FIG. 12B is AA in FIG.
It is sectional drawing which shows a cross section.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 vibrator 1a drive surface 2 elastic body 2a, 2b semi-cylindrical elastic body 2c-2e small diameter part 2A-2D large diameter part 3,4,5 piezoelectric element 6 fixed shaft 7 support member 8a-8d bolt 9a-9d nut 10 Moving element 10a Moving element base material 10b Sliding material 11 Positioning means 12 Pressurizing means 14 Pressurizing amount adjusting means 21,22,23 Ultrasonic actuator electrodes 21b, 22b, 23b Electrode overhanging parts 24, 25, 30, 31 Connection member 26 Connection body 27 Lead wire 28, 29 Pickup

Claims (5)

[Claims] 1. A method of manufacturing a vibration actuator including a modified mode degenerate type vibrator, comprising a plurality of vibration actuator electrodes connected by a connecting member so as to form a predetermined mounting position on the vibrator. In addition, at least a part of the connecting member is attached to the predetermined mounting position, and the connected body of the electrodes for the vibration actuator is provided with a protruding portion formed by protruding at least part of the connecting member to the outside of the vibrator. A method for manufacturing a vibration actuator, comprising: separating the plurality of electrodes for the vibration actuator from each other by cutting the connecting member at the protruding portion after mounting at a position. 2. The method of manufacturing a vibration actuator according to claim 1, wherein the vibration actuator electrode is adhered and fixed when the connecting body is attached to the vibrator. Law. 3. The method of manufacturing a vibration actuator according to claim 1, wherein a lead wire connected to an external power source is attached to the protruding portion before attaching the connecting body to the vibrator. A method of manufacturing a vibration actuator, which is characterized by the following. 4. The method of manufacturing a vibration actuator according to claim 3, wherein the connecting member is cut along a cutting line with the lead wire mounting portion of the protruding portion left. Manufacturing method of vibration actuator. 5. The method of manufacturing a vibration actuator according to claim 4, wherein the cutting line is a straight line.