JPH10163541A - Electromechanical conversion element, its manufacture, vibration actuator and its manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the drive force of a vibration actuator by making a plurality of electromechanical conversion sections by which main bodies of electromagnetic conversion element generate different piezoelectric effects, which are simultaneously displaceable in different directions. SOLUTION: A torsional oscillation displacement to be excited by means of a piezoelectric element 24 can be made roughly matched with that of an elastic body 23, to be excited actually by arranging two groups of torsional oscillation excited electromechanical conversion sections 24b-1 and 24d-1 and 24b-2 and 24d-2 with respect to secondary torsional oscillation and on group of longitudinal oscillation exciting electromechanical conversion sections 24c-1 and 24c-2 with respect to primary longitudinal oscillation. Therefore, the drive force and driving efficiency of an ultrasonic actuator can be improved, because the excitation of torsional oscillation and longitudinal oscillation becomes easier. So that the oscillating amplitudes of both oscillations can be secured.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electromechanical transducer for converting electrical energy into mechanical displacement or mechanical displacement into electrical energy, a method for manufacturing the electromechanical transducer, and using the electromechanical transducer. The present invention relates to a vibration actuator and a method for manufacturing the vibration actuator.

[0002]

2. Description of the Related Art FIG. 12 is a perspective view showing the structure of a conventional example of a longitudinal-torsional vibration type vibration actuator.

Conventionally, a stator (stator) 101 of this type of vibration actuator has two cylindrical vibrators 10.
A piezoelectric element 104 for torsional vibration is arranged between the elements 2 and 103. The piezoelectric element 10 for longitudinal vibration is provided above the vibrator 103.
5 are arranged. The torsional vibration piezoelectric element 104 is polarized in the circumferential direction. On the other hand, the longitudinal vibration piezoelectric element 105 is polarized in the thickness direction. Further, the moving element (rotor) 106
It is arranged above the longitudinal vibration piezoelectric element 105.

The vibrators 102, 1 constituting the stator 101
03 and the piezoelectric elements 104 and 105 are fixed to the threaded portion of the shaft 107 by screws. The mover 106 is
The shaft 107 is rotatably provided via a ball bearing 108 provided at the center. Shaft 107
A nut 110 is screwed to the tip of the nut via a spring 109. As a result, the moving element 106 is brought into contact with the stator 101 while being pressed by the pressing force F having a predetermined magnitude.

The piezoelectric element for torsional vibration 104 and the piezoelectric element for longitudinal vibration 105 are driven by controlling the phase of a voltage of the same frequency oscillated from an oscillator 111 by a phase shifter 112.

The torsional vibration piezoelectric element 104 is
06 provides a mechanical displacement for rotation. On the other hand, the longitudinal vibration piezoelectric element 105 periodically fluctuates the frictional force acting between the stator 101 and the moving element 106 in synchronization with the period of the torsional vibration by the piezoelectric element 104. This serves as a clutch that converts vibration into motion in one direction.

FIG. 13 is an exploded perspective view showing a stator 101 of the conventional vibration actuator. The torsional vibration piezoelectric element 104 needs to be polarized plurally in the circumferential direction. Therefore, as shown in FIG.
One end was divided into about 8 fan-shaped small pieces, and each piece was polarized in the circumferential direction and then assembled in an annular shape again. In addition,
Reference numeral 104a in FIG. 13 denotes a torsional vibration piezoelectric element 1.
04 is an electrode for applying a drive voltage.

[0008]

However, in the above-described conventional vibration actuator, the piezoelectric element 10 for torsional vibration is used.
When combining 4 in a ring shape, it was difficult to obtain shape accuracy.

On the other hand, the area of each of the longitudinal vibration piezoelectric element 105 and the torsional vibration piezoelectric element 104 is substantially equal to the cross-sectional area of the moving element 106 or
Was smaller than the cross-sectional area. Further, in order to penetrate the shaft 107, it is necessary to make a hole in the center of each of the piezoelectric element 105 for longitudinal vibration and the piezoelectric element 104 for torsional vibration. Therefore, the area of each of the longitudinal vibration piezoelectric element 105 and the torsional vibration piezoelectric element 104 is further reduced, and it has been difficult to achieve both high torque and high rotation of the vibration actuator.

In order to solve such a problem, the present applicant has already disclosed in Japanese Patent Application Laid-Open No. H8-103089 a variant that can be driven with high torque and high rotation and that is easy to structure and manufacture. A mode degenerate type vibration actuator was proposed. This vibration actuator uses a deformed mode degenerate type vibrator that generates primary longitudinal vibration and primary torsional vibration.

Further, the present applicant has disclosed in Japanese Patent Application Laid-Open No. 8-14037.
According to Japanese Patent Publication No. 7 (1994), two large-diameter portions and one small-diameter portion are formed on the outer peripheral surface of a columnar elastic body constituting a vibrator, so that the vibrator has primary longitudinal vibration and secondary screw. We have proposed that a vibration actuator can be constructed by simultaneously generating torsional vibration.

FIG. 14 shows a vibration actuator according to these proposals, in which the vibrator 1 generates longitudinal vibration and torsional vibration, and by combining these vibrations, the vibrator driving surface D
FIG. 6 is an explanatory diagram showing generation of elliptical motion over time.

The vibrator 1 has an elastic body 2 (not shown in FIG. 14 and will be described in detail with reference to FIG. 15 described later) composed of two semi-cylindrical elastic members. And a piezoelectric element 3 (not shown in FIG. 14 and described in detail with reference to FIG. 15 described later) which is an electromechanical conversion element that converts electric energy into mechanical displacement. The piezoelectric element 3, the piezoelectric element for torsional vibration using a piezoelectric constant d ₁₅ 3a and the piezoelectric constant d ₃₁
And a piezoelectric element 3b for longitudinal vibration using the same.

A two-phase AC voltage having a phase difference of (π / 2) is applied to these two types of piezoelectric elements 3a and 3b from a drive voltage generator (not shown). Then, the two kinds of piezoelectric elements 3a and 3b are excited. Thereby, torsional vibration in the axial direction and longitudinal vibration in the axial direction are generated in the elastic body 2. When the resonance frequencies of the longitudinal vibration and the torsional vibration are substantially matched, the longitudinal vibration and the torsional vibration are simultaneously generated in the elastic body 2 (hereinafter, such a state is referred to as “degenerate”). Due to this contraction, an elliptical motion is generated on the driving surface D, which is the end face of the vibrator 1, and the elliptical motion is extracted as a driving force.

FIGS. 15 and 16 are explanatory views showing the arrangement of two types of piezoelectric elements 3a and 3b joined to the elastic body 2. FIG. 15 is a top view of the vibrator 1, and FIG. 3 is a side view of the vibrator 1. FIG.

As shown in FIGS. 15 and 16, in the illustrated vibration actuator, the elastic body 2 is obtained by vertically dividing a hollow substantially cylindrical body into two halves on a plane including a substantially central axis. The elastic members 2a and 2b are again assembled in a substantially cylindrical shape.

On the two divided surfaces of the two semi-elastic members 2a and 2b, a torsional vibration piezoelectric element 3a, a longitudinal vibration piezoelectric element 3b and an electrode plate 4 are arranged in a stacked state. The piezoelectric elements 3a and 3b are arranged in two layers on each of the two divided surfaces, for a total of four layers.

The two layers of the four-layer piezoelectric element 3a is constituted by a piezoelectric element using a piezoelectric constant d _15. On the other hand, the piezoelectric element 3b in the remaining two layers, composed of a piezoelectric element using a piezoelectric constant d _31. The former piezoelectric element 3 a using the piezoelectric constant d ₁₅ generates a shear displacement in the axial direction of the elastic body 2.

[0019] Upon application of such a piezoelectric constant d ₁₅ a driving voltage to the vibrating piezoelectric element 3a torsional used, displacement torsion in the axial direction is generated in the elastic body 2. On the other hand, when a drive voltage is applied to the piezoelectric element 3b for longitudinal vibration using a piezoelectric constant d _31, the longitudinal displacement in the axial direction is generated in the elastic body 2.

Therefore, when a sine wave voltage is input to the torsional vibration piezoelectric element 3a, a torsional motion is generated in the elastic body 2 in response thereto. On the other hand, when a sinusoidal voltage is input to the piezoelectric element for longitudinal vibration 3b, the elastic body 2 expands and contracts accordingly.

When the torsional vibration piezoelectric element 3a and the longitudinal vibration piezoelectric element 3b are attached to the elastic body 2 to generate vibration, the torsional vibration generated in the elastic body 2 is to be reduced. The torsional vibration piezoelectric element 3a is arranged at a node position of the torsional vibration. On the other hand, regarding the longitudinal vibration, the longitudinal vibration piezoelectric element 3b is arranged at a node position of the longitudinal vibration generated in the elastic body 2. By arranging the respective piezoelectric elements for vibration at the nodes of the respective vibrations, it is possible to generate the torsional vibration and the longitudinal vibration most efficiently.

On the other hand, the torsional vibration piezoelectric elements 3a,
Even if the piezoelectric element 3b for longitudinal vibration is arranged at the antinode position of each vibration, it does not contribute much to the occurrence of torsional vibration and longitudinal vibration. Therefore, the amount of electric power input to the piezoelectric element disposed at the antinode position is wasted, and the driving efficiency of the vibration actuator is reduced.

That is, in the vibration actuator having the structure shown in FIGS. 14 to 16, the torsional vibration piezoelectric element 3 a and the longitudinal vibration piezoelectric element 3 b are both joined to the entire divided surface of the elastic body 2. It is held in a state of being sandwiched. For this reason, it is mounted not only at the node position of each vibration but also over the antinode position, and a reduction in driving efficiency cannot be avoided.

In particular, in the vibration actuator proposed in Japanese Patent Application Laid-Open No. 8-140377, since the torsional vibration is a secondary mode, it has two joint positions. At one node position, the torsional vibration piezoelectric element 3a generates a torsional vibration displacement in the same direction as the vibration to be excited on the vibrator 1. On the other hand, at the other node position, torsional vibration displacement occurs in the opposite direction. Therefore, if two different vibration displacements are to be generated using the torsional vibration piezoelectric element 3a and the longitudinal vibration piezoelectric element 3b, the input energy must be sufficiently output as the driving force at the other node position. However, the vibration amplitude could not be increased to a certain degree or more.

Therefore, the applicant of the present application has previously filed Japanese Patent Application No.
According to No. 9603, in a vibration actuator using a vibrator that generates an n-th (n: natural number) longitudinal vibration and an m-th (m: natural number) torsional vibration, the longitudinal vibration piezoelectric element is positioned at the center position. A new type of vibration actuator has been proposed, in which n groups are arranged so as to coincide with the nodes of longitudinal vibration, and m groups of piezoelectric elements for torsional vibration are arranged so that the center position thereof coincides with the nodes of torsional vibration. did.

That is, in this vibration actuator,
The piezoelectric element for longitudinal vibration and the piezoelectric element for torsional vibration are arranged independently at the node position of each vibration and in the vicinity thereof in the axial direction. Therefore, each vibration piezoelectric element is not arranged at the antinode position of each vibration, and it is possible to reduce the input energy without reducing the vibration amplitude.

Further, according to the vibration actuator according to this proposal, even if there are a plurality of node positions in the vibration to be used,
In each case, the torsional vibration displacement to be excited by the torsional vibration piezoelectric element and the torsional vibration displacement of the elastic body to be actually excited can be substantially matched. Therefore, the vibration amplitude can be increased, and the loss of vibration energy can be reduced as much as possible.

FIG. 17 is an explanatory view showing the mounting state of the piezoelectric element 13 on the elastic body 12 constituting the vibrator 11 in the vibration actuator according to this proposal.
FIG. 17A is a top view of the vibrator 11, and FIG. 17B is a side view of the vibrator 11 showing examples of generated longitudinal vibration and torsional vibration.

The hollow columnar elastic member 12 is obtained by dividing a thick hollow cylindrical elastic member into two vertically by a plane including a substantially central axis, and obtains semi-hollow cylindrical elastic members 12a and 12b.
It is an elastic member obtained by assembling again in a cylindrical shape. On the outer peripheral surface of the elastic body 12, two small diameter portions 14a, 1 formed by providing two grooves are provided.
4b and three large diameter portions 14A, 14B and 14 formed by being separated by the small diameter portions 14a and 14b.
C is formed. Semi-hollow cylindrical elastic bodies 12a, 12b
Each of the two divided surfaces has two layers of piezoelectric elements 13a to 13a to
13c and the electrodes 15a to 15c are mounted in a sandwiched state.

The positions where the small diameter portions 14a and 14b are formed are the two nodes of the torsional vibration generated in the elastic body 12. As shown, the torsional vibration piezoelectric elements 13a, 13c
Are arranged at positions including two nodal positions of torsional vibration. The piezoelectric element 13b for longitudinal vibration is disposed at a position including one node position of longitudinal vibration.

The torsional vibration piezoelectric elements 13a and 13c
When a frequency voltage is applied, a shear deformation is generated in accordance with the voltage application direction, thereby generating a torsional vibration. That is, the first torsional vibration piezoelectric element 13a is composed of two torsional vibration piezoelectric elements 13a-1 positioned on the near side in the drawing and two torsional vibration piezoelectric elements 13a-1 positioned on the other side in the drawing. Element 1
3a-2.

The piezoelectric elements 13a-1, 13a for torsional vibration
-2 each shear deformation occurs in the opposite direction when the drive voltage in the same direction is applied. for that reason,
A torsional displacement occurs in the elastic body 12 in the axial direction. For example, as shown by the arrow in FIG. 17B, when the torsional vibration piezoelectric elements 13a-1 and 13a-2 each undergo shear deformation, the drive surface D moves in the direction indicated by the arrow in FIG. 17A. Twist. In addition, when a driving voltage is applied in a direction opposite to that in this case, a shearing deformation in the opposite direction occurs, so that the driving surface D is twisted in a direction opposite to the direction indicated by the arrow in FIG.

The second torsional vibration piezoelectric element 13c
Is composed of two torsional vibration piezoelectric elements 13c-1 located on the near side in the drawing and two torsional vibration piezoelectric elements 13c-2 located on the other side in the drawing circle. The shear deformation of each of the torsional vibration piezoelectric elements 13c-1 and 13c-2 occurs in opposite directions when a voltage is applied in the same direction. Therefore, torsional displacement occurs in the elastic body 12 in the axial direction.

The first torsional vibration piezoelectric element 13a-
The first and second torsional vibration piezoelectric elements 13c-1 are arranged so that when a driving voltage in the same direction is applied, the piezoelectric elements 13c-1 are sheared in different directions. Further, the first torsional vibration piezoelectric element 13a-2 and the second torsional vibration piezoelectric element 13c-
2 is arranged so that when a driving voltage in the same direction is applied, it is sheared in a different direction.

For example, as shown in FIG.
When the torsional vibration piezoelectric elements 13c-1 and 13c-2 are both sheared, the drive surface D is twisted in the direction opposite to the direction indicated by the arrow in FIG.

As described above, the torsional vibration piezoelectric element 13
When the same frequency voltage is applied to the first torsional vibration piezoelectric element 13a and the second torsional vibration piezoelectric element 13c by arranging the first and second torsional vibration elements 13a and 13c, The vibration direction in each of the second nodes is opposite, and the secondary torsional vibration mode is easily excited.

When a frequency voltage is applied, the longitudinal vibration piezoelectric element 13b expands and contracts in the axial direction of the vibrator, whereby the elastic body 12 generates longitudinal vibration. The piezoelectric element for vertical vibration 13b is located on the front side in the drawing.
It is composed of two longitudinal vibration piezoelectric elements 13b-1 and two longitudinal vibration piezoelectric elements 13b-2 located on the upper side in the drawing. The longitudinal vibration piezoelectric elements 13b are arranged so as to be vertically deformed in the same direction when a driving voltage in the same direction is applied. By arranging the longitudinal vibration piezoelectric element 13b in this manner, when the same frequency voltage is applied to the longitudinal vibration piezoelectric element 13b, the primary longitudinal vibration mode is easily excited.

In the vibration actuator having the vibrator 11 configured as described above, two drive signals having a (1/4) λ (λ: wavelength) phase difference are transmitted to the longitudinal vibration piezoelectric element 13b and the torsional vibration. Input to the piezoelectric elements 13a and 13c, the phase difference between the longitudinal vibration and the torsional vibration is 90 °.
An elliptical motion that combines the displacement, the longitudinal vibration, and the torsional vibration occurs on the drive surface D.

Such an elliptical motion generated on the drive surface D is propagated to a moving element (not shown) which is brought into pressure contact with the drive surface D by a pressure mechanism (not shown). Since the movable element is rotatably supported by a support mechanism (not shown), it is continuously driven in one direction.

As described above, the various vibration actuators already proposed combine the longitudinal vibration and the torsional vibration generated in the elastic body 12 to transmit the elliptical motion generated in the drive surface D to the moving element. is there. Therefore, it is necessary to attach at least the piezoelectric element 13b for generating the longitudinal vibration and the piezoelectric elements 13a and 13c for generating the torsional vibration to the elastic body 12.

Further, the direction of the poling (permanent polarization processing) that needs to be performed on the piezoelectric elements 13a to 13c depends on the torsional vibration piezoelectric elements 13a and 13c and the longitudinal vibration piezoelectric element 13a.
b is different for each.

FIG. 18 is a perspective view showing the poling direction of the piezoelectric element. FIG.
FIG. 18B shows the poling direction of the piezoelectric elements 13a and 13c for torsional vibration, respectively.

Since the poling directions are different between the longitudinal vibration piezoelectric element 13b and the torsional vibration piezoelectric elements 13a and 13c, these piezoelectric elements 13a to 13c have been produced by different manufacturing processes. Therefore, in order to configure the vibrator shown in FIG. 17, at least four piezoelectric elements 13b for longitudinal vibration and eight piezoelectric elements 13 for torsional vibration are used.
a and 13c had to be separately mounted on the elastic body 12.

As described above, in order to constitute the vibration actuator shown in FIG. 17, a large number of at least 12 piezoelectric elements 13a to 13c in total must be accurately mounted at predetermined positions on the elastic body 12 one by one. Must. Therefore, the mounting of the piezoelectric elements 13a to 13c to the elastic body 12 requires a great deal of man-hours, it is difficult to accurately mount the piezoelectric elements 13a to 13c at predetermined positions, and it is not easy to maintain the performance of the vibration actuator at the design target value. There was a problem that.

Further, in order to drive the vibration actuator shown in FIG. 17 with high efficiency, all the piezoelectric elements 13a to 13c, which are the constituent elements of the vibrator 11, are effectively displaced with respect to the elastic body 12 in the longitudinal displacement and the screw. It is necessary to transmit the torsion displacement. For that purpose, it is necessary that all the piezoelectric elements 13a to 13c are securely adhered to the elastic body 12 and the electrodes 15a to 15c without any gap.

However, in the vibration actuator shown in FIG. 17, the piezoelectric elements 13a to 13c to be mounted have a large number of installations and are manufactured in completely different manufacturing steps, so that it is extremely difficult to make the thickness uniform. Therefore, all the piezoelectric elements 13a to 13c are connected to the elastic body 12 and the electrode 15
It is extremely difficult to ensure close contact with a to 15c without any gap. For this reason, it has not been possible to avoid a decrease in drive efficiency and performance of the vibration actuator.

[0047]

According to a first aspect of the present invention, there is provided an electromechanical transducer for converting electrical energy into mechanical displacement or mechanical displacement into electrical energy, wherein the main body of the electromechanical transducer comprises: It has a plurality of electromechanical transducers that generate different piezoelectric effects (effects caused by a predetermined piezoelectric constant), and each of the plurality of electromechanical transducers is simultaneously displaceable in a different direction. And

According to a second aspect of the present invention, in the electromechanical transducer according to the first aspect, the main body simultaneously generates different vibration modes by a plurality of electromechanical transducers.

According to a third aspect of the present invention, in the electromechanical transducer according to the first aspect, the main body simultaneously and independently operates different vibration modes generated in the main body by a plurality of electromechanical conversion portions. It can be converted into electric energy.

According to a fourth aspect of the present invention, in the electromechanical transducer according to the first aspect, the main body simultaneously generates different vibration modes by the plurality of electromechanical conversion portions and simultaneously generates the vibration modes in the main body. It is characterized in that different vibration modes can be converted into electric energy simultaneously and independently.

The invention of claim 5 is the electromechanical transducer according to claim 1, a plurality of electro-mechanical conversion portion, the piezoelectric shear effect (caused by the piezoelectric constant d ₁₅ effect)
A first electromechanical conversion portion for generating, characterized in that it comprises a second electromechanical conversion portion generating a piezoelectric transverse effect (effect caused by the piezoelectric constant d _31).

According to a sixth aspect of the present invention, in the electromechanical transducer according to the fifth aspect, a torsional vibration is generated by a piezoelectric slip effect and a longitudinal vibration is generated by a piezoelectric transverse effect.

According to a seventh aspect of the present invention, in the electromechanical conversion element according to the fifth aspect, two first electromechanical conversion parts are formed apart from each other, and the second electromechanical conversion part is formed by: One is formed between the two first electromechanical conversion parts.

According to an eighth aspect of the present invention, in the electromechanical conversion element according to the fifth aspect, the first electromechanical conversion portion and the second electromechanical conversion portion are formed one by one adjacent to the main body. It is characterized by having been done.

The ninth aspect of the present invention is the seventh or eighth aspect.
In the electromechanical conversion element described in the above, the first electromechanical conversion part and the second electromechanical conversion part disposed adjacent to each other are parts that convert electric energy into mechanical displacement, A portion for converting mechanical displacement into electric energy is further formed on at least one end side of the main body with respect to the arrangement direction of the electromechanical conversion portion and the second electromechanical conversion portion. .

According to a tenth aspect of the present invention, in the electromechanical transducer according to any one of the fifth to ninth aspects, the main body is formed in a plate shape and the first
The thickness of each of the electromechanical conversion part and the second electromechanical conversion part is in a range that is substantially equal.

According to an eleventh aspect of the present invention, the base material of the electromechanical transducer for converting electric energy into mechanical displacement or converting mechanical displacement into electric energy is subjected to polling in a plurality of directions, so that It is characterized in that a plurality of electromechanical conversion portions which generate mutually different piezoelectric effects (effects caused by a predetermined piezoelectric constant) and are simultaneously displaceable in different directions are formed.

According to a twelfth aspect of the present invention, a base material of an electromechanical transducer for converting electric energy into mechanical displacement is provided with a first material.
After forming the first electro-mechanical conversion part by performing the polling of the second electro-mechanical conversion part, the second electro-mechanical conversion part
A second electromechanical transducer that generates a piezoelectric effect (effect caused by a predetermined piezoelectric constant) different from that of the first electromechanical transducer by performing polling of the electromechanical transducer. It is a manufacturing method of.

[0059] The invention of claim 13 is the manufacturing method of the electro-mechanical conversion device according to claim 12, the first electro-mechanical converting portion generates a piezoelectric shear effect (effect caused by the piezoelectric constant d ₁₅₎ a second electro-mechanical converting portion, characterized by generating a piezoelectric transverse effect (effect caused by the piezoelectric constant d _31).

According to a fourteenth aspect of the present invention, in the method for manufacturing an electromechanical transducer according to the twelfth aspect, the base material of the electromechanical transducer is formed in a plate shape and has a predetermined distance in a plane direction of the base material. Forming a pair of electrodes on both sides of the base material with a gap, and providing a plurality of pairs of electrodes, wherein the first poling applies an electric field between at least one pair of adjacent pairs of the plurality of pairs of electrodes. And the second poll is
It is characterized in that it is performed by applying an electric field between at least one pair of electrodes among a plurality of pairs of electrodes.

According to a fifteenth aspect of the present invention, in the method of manufacturing an electromechanical transducer according to the fourteenth aspect, after the first polling and the second polling are performed, the first electromechanical conversion portion and the second Characterized in that a process for equalizing the thickness of each of the electromechanical conversion parts is performed.

According to a sixteenth aspect of the present invention, in the method of manufacturing an electromechanical transducer according to the fifteenth aspect, the processing for uniforming is performed by first electromechanical conversion on the surface of the first electromechanical conversion portion. Forming an electrode so that the thickness of the conversion portion is equal to the thickness of the second electromechanical conversion portion; forming the electrode on the surface of the first electromechanical conversion portion; Removing a part of the electrode formed on the surface of each of the first electromechanical conversion part and the second electromechanical conversion part such that the thickness of each of the first and second electromechanical conversion parts is equal, or After removing the electrode formed on the second electromechanical conversion part and a part of the electromechanical conversion element to make the thickness of the electromechanical conversion element uniform, the first electromechanical conversion part and the second Form electrodes on the surface of each electromechanical transducer Characterized in that it is carried out by.

According to a seventeenth aspect of the present invention, in the method for manufacturing an electromechanical transducer according to the sixteenth aspect, when the electrode is formed on the electromechanical transducer in a process of uniforming, the first The method is characterized by using a forming method that does not involve heating to a temperature range that causes loss of the electromechanical conversion capability of each of the electromechanical conversion part and the second electromechanical conversion part.

According to an eighteenth aspect of the present invention, in the method for manufacturing an electromechanical transducer according to the seventeenth aspect, the forming method comprises:
It is characterized by a thin film forming method such as sputtering or vapor deposition or an electroless plating method.

According to a nineteenth aspect of the present invention, there is provided a vibrator having an electromechanical transducer, wherein a plurality of different types of vibrations are generated by the electromechanical transducer, and a relative motion member for performing relative motion between the vibrator and Wherein the main body of the electromechanical transducer has a plurality of electromechanical transducers that generate different piezoelectric effects (effects caused by a predetermined piezoelectric constant), and the plurality of electromechanical transducers are ,
Each can be simultaneously displaced in different directions.

[0066] The invention of claim 20 is the vibration actuator according to claim 19, a plurality of electro-mechanical conversion portion, a first electro-mechanical conversion to generate a piezoelectric shear effect (effect caused by the piezoelectric constant d ₁₅₎ a portion, characterized in that it comprises a second electromechanical conversion portion generating a piezoelectric transverse effect (effect caused by the piezoelectric constant d _31).

According to a twenty-first aspect of the present invention, in the vibration actuator according to the twentieth aspect, the vibrator is formed in a column shape by combining a plurality of elastic members, and the electromechanical conversion element includes at least one elastic member. And the plurality of vibrations are torsional vibration in the axial direction of the vibrator and longitudinal vibration oscillating in the axial direction of the vibrator.

According to a twenty-second aspect of the present invention, in the vibration actuator according to the twenty-first aspect, the first electromechanical transducer of the electromechanical transducer includes at least one node of torsional vibration generated in the vibrator. And a second electromechanical transducer of the electromechanical transducer is present at a location including at least one node of longitudinal vibration generated in the vibrator. .

According to a twenty-third aspect of the present invention, in a method of manufacturing a vibration actuator in which an electromechanical transducer for generating a plurality of vibrations different from each other is arranged between a plurality of elastic members, An electromechanical transducer according to any one of the preceding claims.

According to a twenty-fourth aspect of the present invention, in the method for manufacturing a vibration actuator according to the twenty-third aspect, the electromechanical transducer includes a node for torsional vibration generated by the first electromechanical transducer in the vibrator. Exists at a position including the position
Wherein the electromechanical conversion part is disposed at a position including a position serving as a node of longitudinal vibration generated in the vibrator.

[0071]

BEST MODE FOR CARRYING OUT THE INVENTION

(First Embodiment) Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings. In the following description of each embodiment, an ultrasonic actuator using an ultrasonic vibration region is used as an example of the vibration actuator. In the following description of each embodiment, a piezoelectric element is used as an example of an electromechanical conversion element that converts electrical energy into mechanical displacement or mechanical displacement into electrical energy.

FIG. 1 shows a piezoelectric element 2 which is an element of a vibrator 22 constituting an ultrasonic actuator 21 of the first embodiment.
4 is a perspective view showing a configuration of FIG. This piezoelectric element 24 has P
It has a rectangular thin plate-shaped main body made of ZT (lead zirconate titanate). This body is divided into five functionally different electromechanical conversion parts. In this embodiment, 5
Although the configuration is divided into one electromechanical conversion part, the configuration is not limited to this, and a plurality may be used. For example, 2
Or three.

The five electromechanical conversion parts are respectively a longitudinal vibration pickup electromechanical conversion part 24a, a torsional vibration excitation electromechanical conversion part 24b which constitutes a second electromechanical conversion part in the present invention, and the present invention. Electromechanical conversion part 24 for longitudinal vibration excitation forming a first electromechanical conversion part in
c, a torsion vibration exciting electromechanical conversion part 24d and a torsion vibration pickup electromechanical conversion part 24e, which form a second electromechanical conversion part in the present invention. The polarization state of the piezoelectric element 24 is as shown by the arrow in FIG.
A total of four polarization regions, two each in the thickness direction and the plane direction, are sequentially formed.

In this embodiment, the electromechanical transducer 24c for longitudinal vibration excitation is formed by poling in the thickness direction of the main body of the piezoelectric element 24. Further, the torsion vibration exciting electromechanical transducer portions 24b and 24d are formed by being polled in the plane direction of the piezoelectric element 24.

As shown in the figure, the electromechanical converters 24b and 24d for torsional vibration excitation are formed separately from each other in the plane direction of the main body, and the electromechanical converters 24c for longitudinal vibration excitation are formed. Is formed between the electromechanical transducer portions 24b and 24d for torsional vibration excitation.

Further, in the present embodiment, the torsional vibration for converting the mechanical displacement in the plane direction of the main body into electric energy is provided on both sides in the plane direction of the main body of the electromechanical conversion parts for torsional vibration excitation 24b and 24d. A pickup electromechanical conversion part 24e and a longitudinal vibration pickup electromechanical conversion part 24a that converts mechanical displacement in the thickness direction of the main body into electric energy are formed.

In the present embodiment, the electromechanical converter for longitudinal vibration pickup 24a, the electromechanical converter for torsional vibration excitation 24b, the electromechanical converter for longitudinal vibration excitation 24c, the electromechanical converter for torsional vibration excitation Electrodes 27a, 27b, 27c, 27d, 27e for applying a drive voltage to each electromechanical conversion part are formed on both sides of each of the electromechanical conversion parts 24d and the torsion vibration pickup electromechanical conversion part 24e. You.

Further, in the piezoelectric element 24 of this embodiment,
Electromechanical conversion part 24a for longitudinal vibration pickup, electromechanical conversion part 24b for torsional vibration excitation, electromechanical conversion part 24c for longitudinal vibration excitation, electromechanical conversion part 24d for torsional vibration excitation, and torsional vibration The thickness of each of the pickup electromechanical conversion parts 24e is set to be equal, including the thickness of the electrodes 27a to 27e.

The piezoelectric element 24 of this embodiment is configured as described above. Next, a method for manufacturing the piezoelectric element 24 will be described.
Each step will be described in detail with reference to the accompanying drawings.

FIGS. 2A to 2D are explanatory views showing a method of manufacturing the piezoelectric element 24 used in the present embodiment for each step. Briefly, by performing two pollings on the piezoelectric element 24, four polarization regions are formed.

(First Step) As shown in FIG. 2A, a rectangular flat piezoelectric element base material 25 before the poling process is performed.
The three poling electrodes 26a, 26b, and 26c are spaced apart from each other in the plane direction, which is the first direction.
To form

When the poling electrodes 26a to 26c are formed, no poling is performed on the piezoelectric element base material 25, so that the polarization is not destroyed even if heating is performed. Therefore, the poling electrodes 26a to 26c may be formed by heating a paste containing a silver alloy, a nickel alloy, or the like to a predetermined temperature range.

The position where the poling electrode 26a is formed is in a range where the piezoelectric element 24 is to be set as a region for a vertical vibration pickup when the piezoelectric element 24 is mounted on an ultrasonic actuator. Further, the formation position of the poling electrode 26b is a range to be set as a region for exciting longitudinal vibration. Further, the poling electrode 26c may be formed at the end of the piezoelectric element 24 as long as it does not hinder the subsequent poling process.

(Second Step) Next, the piezoelectric element base material 2 on which the poling electrodes 26a to 26c are thus formed
5, as shown in FIG. 2B, between the poling electrodes 26 a to 26 b, the poling electrodes 26 b to 26 c
By applying a strong electric field between them, FIG.
, A polling process is performed in the plane direction (first direction) indicated by the arrow. That is, by performing poling in the in-plane longitudinal direction of the piezoelectric element base material 25, two polarization regions in the plane direction (first direction) shown in FIG. 2B are formed.

In this way, the two electromechanical conversion parts for torsional vibration excitation (the torsion vibration excitation electromechanical conversion part 24b and the torsional vibration excitation electromechanical conversion part 24d) and the screw Electromechanical converter for torsional vibration pickup (electromechanical converter for torsional vibration pickup 2
4e) are formed. The torsion vibration exciting electromechanical conversion part 24d and the torsional vibration pickup electromechanical conversion part 24e are integrally formed.

(Third Step) Next, using a pair of poling electrodes 26a and 26b arranged opposite to each other, FIG.
As shown in (c), a polarization process in the thickness direction of the piezoelectric element 24 is performed by applying a strong electric field in the thickness direction of the piezoelectric element base material 25. By such a polarization process, a portion for longitudinal vibration excitation (electromechanical conversion portion 24 for longitudinal vibration excitation)
c) and a portion for vertical vibration pickup (electromechanical conversion portion 24a for vertical vibration pickup) are formed. As a result, as shown in FIG.
Further, two polarization regions in the thickness direction and the plane direction are further formed.

In the polling process in the second step, the electrodes used for the polling process are not arranged in a direction orthogonal to the poling direction. Therefore, in the vicinity of the poling electrodes 26b to 26c, the poling is not accurately performed in the plane direction, and the vicinity of the end is bent in an arc shape.
However, since the poling process in the third step is performed including the bent portion, the bent portion of the polarization in the second step is accurately polled in the thickness direction, and the poling electrode 26 is formed.
An arc-shaped bend (inaccuracy in the polling direction) in the vicinity of b to 26c is not a problem.

(Fourth Step) Next, the thickness of the piezoelectric element 24 having the four polarization regions thus formed is made uniform. In this embodiment, the piezoelectric element 24 is finished to a predetermined thickness by polishing the poling electrodes 26b to 26c formed on both surfaces of the piezoelectric element 24.

In general, a piezoelectric element has the property of expanding in the direction of application of electric field and contracting in the direction perpendicular to the direction of application of electric field during poling. Therefore, when the poling is performed in the direction of the thickness of the piezoelectric element, the thickness increases. On the other hand, when the poling is performed in the plane direction of the piezoelectric element, the thickness decreases. Therefore, in the piezoelectric element 24 of the present embodiment, by performing the polling, the plate thickness is reduced by the portion where the plate thickness increases (the electromechanical conversion portion 24a for vertical vibration pickup and the electromechanical conversion portion 24c for vertical vibration excitation). The parts (the torsion vibration excitation electromechanical conversion part 24b, the torsional vibration excitation electromechanical conversion part 24d, and the torsional vibration pickup electromechanical conversion part 24e) are alternately formed. Therefore, the piezoelectric element 24
May not be able to maintain the required constant plate thickness.

Therefore, in the present embodiment, after poling, both sides of the piezoelectric element 24 are polished so that the main body of the piezoelectric element 24 has a constant thickness. In the present embodiment, the poling electrode 26 formed on the piezoelectric element 24 is used.
By polishing b to 26c and a part of the piezoelectric element 24, the thickness of the piezoelectric element 24 after poling is kept constant.
It is not limited to this embodiment. For example, the main body of the piezoelectric element 24 may be kept at a constant thickness as listed below.

(1) The thickness of the torsion vibration exciting electromechanical conversion parts 24b, 24d is set on the surface of the torsional vibration excitation electromechanical conversion parts 24b, 24d (the first electromechanical conversion part). Electrodes are formed by appropriate means so as to have the same thickness as the excitation electromechanical conversion part 24c (second electromechanical conversion part).

(2) The electrodes are formed on the surfaces of the torsion vibration excitation electromechanical conversion parts 24b and 24d (first electromechanical conversion parts), and then the longitudinal vibration excitation electromechanical conversion parts 24c are formed.
And electromechanical converters 24b and 24d for torsional vibration excitation
A part of the electrodes formed on the surface of each of the electromechanical conversion part 24c for longitudinal vibration excitation and the electromechanical conversion parts 24b and 24d for torsional vibration excitation is removed by appropriate means so that the respective thicknesses are the same. I do.

In this embodiment, as shown in FIG. 2D, after the polishing, the electrodes 27a to 27e for inputting and outputting electric energy are placed at predetermined positions on both surfaces of the piezoelectric element 24 formed to have a uniform thickness. 27e are formed in a state where they are electrically insulated.

As described above, the electromechanical conversion part 24a for the vertical vibration pickup, the electromechanical conversion part 24b for the torsional vibration excitation, the electromechanical conversion part 24c for the vertical vibration excitation, and the electromechanical conversion part for the torsional vibration excitation 24d, an electromechanical conversion part 24e for torsional vibration pickup is formed.

When the electrodes 27a to 27e for inputting and outputting electric energy are formed, a film forming method such as sputtering or vapor deposition or a forming method such as electroless plating is performed so as not to destroy the polarization formed on the piezoelectric element 24. It is desirable to use

As described above, in the present embodiment, the thickness of the piezoelectric element 24 sandwiched between the two semi-elastic bodies 23a and 23b constituting the elastic body 23 is made constant, and all parts of the elastic body 23 are formed. The generated longitudinal displacement and torsional displacement can be efficiently propagated to the semi-elastic bodies 23a and 23b.

In other words, when arranging the piezoelectric elements 24 on the elastic body 23, conventionally, the piezoelectric elements having non-uniform thickness are mounted one by one because they are manufactured by separate and independent processes. In the present invention, it is possible to easily and surely perform processing to make the thickness of the integral piezoelectric element 24 uniform, and to easily make the thickness of all the piezoelectric elements 24 uniform.

Therefore, the mounting failure to the semi-elastic body caused by the gap between the piezoelectric element and the semi-elastic body caused by the variation in the thickness of the plurality of piezoelectric elements is eliminated, and the energy to the elastic body 23 is reduced. Propagation loss is minimized.

FIG. 3 is a longitudinal sectional view showing the structure of the ultrasonic actuator 21 of the first embodiment. The vibrator 22
The piezoelectric element 24 of the present embodiment having the structure shown in FIG. 1 (not shown in FIG. 3; will be described with reference to FIG. 4 described later) and the piezoelectric element 24 are joined, and the primary The elastic body 23 which generates a driving force on the driving surface D by generating longitudinal vibration and secondary torsional vibration of
It is composed of

The elastic body 23 constituting the vibrator 22 is formed by being divided by two small diameter portions 28a and 28b formed by providing two grooves on the outer peripheral portion, and by the small diameter portions 28a and 28b. Three large diameter portions 28A,
The semi-elastic bodies 23a and 23b obtained by vertically dividing a hollow thick cylindrical elastic body 23 having 28B and 28C into two in a plane including a substantially central axis thereof are combined into a cylindrical shape again. It is constituted by doing.

On the two divided surfaces of the elastic body 23, two layers of the above-described piezoelectric elements 24 used in this embodiment are mounted. Small diameter portion 2 formed on outer peripheral surface of elastic body 23
8a and 28b are formed so as to coincide with two node positions of torsional vibration generated in the elastic body 23.

On the other hand, the electromechanical converters 24b and 24d for torsional vibration excitation of the piezoelectric element 24 are arranged at the nodes of the torsional vibration, and the electromechanical converter 24c for longitudinal vibration excitation of the piezoelectric element 24 is It is located at the node of longitudinal vibration.

The semi-elastic bodies 23a and 23b have through holes 29a and 29b at a substantially central position in the height direction in a direction parallel to the laminating direction of the piezoelectric elements 24 (the left-right direction in the drawing). The semi-elastic bodies 23a and 23b have through holes 29a and 29b.
Bolts 30a, 30b are inserted into the bolts 30a, 30b.
b is screwed to a fixed shaft 31 vertically inserted into the axial center of the elastic body 23, thereby holding the piezoelectric element 24 in a state of being sandwiched between two divided surfaces by two layers, and also fixing the piezoelectric element 24 to the fixed shaft 31. Supported.

The moving element 32, which is a relative moving member, is provided with a hollow thick cylindrical moving element base material 32a and an end face of the moving element base material 32a on the vibrator 22 side, and is provided on a driving surface D of the vibrator 22. And a sliding member 32b that comes into contact with the sliding member 32b. Mover 32
Is rotatably positioned with respect to the fixed shaft 31 by a bearing 33 which is a positioning member fitted to the inner peripheral portion thereof.

At the upper end of the outer peripheral surface of the moving element base material 32a,
A gear 34 for taking out output is provided. The gear 34 meshes with a gear of a driven body (not shown), whereby the rotation of the moving element 32 is transmitted to the driven body.

In the present embodiment, the moving element base material 32a is brought into pressure contact with the drive surface D of the vibrator 22 by a disc spring 35 (a spring or a leaf spring or the like) which is a pressing member. .

The fixed shaft 31 penetrates through a hollow portion formed in the axial direction of the elastic body 23, fixes and holds the vibrator 22, and positions the movable member 32 so as to be rotatable in the radial direction. At one end of the fixed shaft 31, a screw portion 31a is formed, and a nut 3 serving as a pressing force adjusting member of the disc spring 35 is formed.
6 is screwed. By adjusting the screw fixing position of the nut 36 with respect to the fixed shaft 31, the pressing force of the disc spring 35 is adjusted. The other end of the fixed shaft 31 is fixed to a fixing part (not shown) by appropriate means.

FIGS. 4A and 4B are explanatory views showing the state of attachment of the piezoelectric element 24 to the vibrator 22. FIG. 4A is a top view of the vibrator 22, and FIG. It is a side view of the vibrator 22 which also shows the occurrence state of torsional vibration. The side view of FIG. 4B is 9% different from the longitudinal sectional view shown in FIG.
It is the side view seen from the direction shifted by 0 degrees.

A two-layer piezoelectric element 24 is sandwiched between the two divided surfaces of the two semi-elastic bodies 23a and 23b. The small-diameter portions 28a and 28b formed on the outer peripheral surface of the elastic body 23 are provided so as to coincide with nodes of torsional vibration generated in the elastic body 23. The electromechanical converters 24b and 24d for torsional vibration excitation of the piezoelectric element 24 are arranged at positions including nodes of torsional vibration generated in the elastic body 23. On the other hand, the electromechanical conversion part 24c for longitudinal vibration excitation is arranged at a position including a node position of the longitudinal vibration generated in the elastic body 23.

Electromechanical converter 24 for torsional vibration excitation
When the frequency voltage is applied, b and 24d generate shearing deformation in accordance with the direction of the driving voltage, whereby the elastic body 23 generates secondary torsional vibration.

Electromechanical converter 24 for torsional vibration excitation
The b and 24d groups include the torsion vibration excitation electromechanical conversion parts 24b-1 and 24d-1 located on the near side in the drawing and the torsion vibration excitation electromechanical conversion part 24b- located on the other side in the drawing. 2, 24d-2. When a drive voltage is applied to the piezoelectric element 24 in the same direction, the electromechanical converters for torsional vibration excitation 24b-1, 24d-1
And the shear deformation by the torsional vibration excitation electromechanical transducers 24b-2 and 24d-2 are arranged to be generated in opposite directions, respectively. Vibration occurs.

For example, as shown in FIG. 4B, torsional vibration excitation electromechanical conversion parts 24b-1 and 24d-1 and torsional vibration excitation electromechanical conversion parts 24b-2 and 24d.
When −2 is sheared, the drive surface D is twisted in the direction indicated by the arrow in FIG. When a voltage is applied to the piezoelectric element 24 in the opposite direction, shearing deformation occurs in the opposite direction, so that the drive surface D is twisted in the direction opposite to the direction indicated by the arrow in FIG. .

As described above, the piezoelectric element 24 is mounted on the elastic body 23, and the electromechanical transducer 24b for torsional vibration excitation is mounted.
1,24d-1 and electromechanical converter for torsional vibration excitation 2
When the same frequency voltage is applied to 4b-2 and 24d-2,
The directions of the torsional vibration generated in the elastic body 23 in FIG. 4B in the first node E and the second node F are opposite to each other, so that the secondary torsional vibration mode is easily excited.

The electromechanical transducer 24c for longitudinal vibration excitation of the piezoelectric element 24 expands and contracts in the axial direction of the elastic body when a frequency voltage is applied.
Generates longitudinal vibration.

The electromechanical conversion part 24c for longitudinal vibration excitation is
It is composed of two electromechanical conversion parts for longitudinal vibration excitation 24c-1 located on the near side and two electromechanical conversion parts for longitudinal vibration excitation 24c-2 located on the other side. The electromechanical converters 24c-1 and 24c-2 for longitudinal vibration excitation are arranged so as to be vertically deformed in the same direction when a voltage in the same direction is applied.

As described above, the piezoelectric element 24 is mounted on the elastic body 23, and the electromechanical transducer 24c-1 for longitudinal vibration excitation is mounted.
When the same frequency voltage is applied to 24c-2, the primary longitudinal vibration mode is easily excited.

The ultrasonic actuator 21 of the present embodiment
Is configured as described above. The two (1/4) λ phase differences between the electromechanical converters 24b and 24d for torsional vibration excitation and the electromechanical converter 24c for longitudinal vibration excitation formed on the piezoelectric element 24 used in the ultrasonic actuator 21. When a drive signal having the following is input, the phase of each of the longitudinal vibration and the torsional vibration generated in the elastic body 23 is 90 °.
When the vibrations are combined, an elliptical motion is generated on the driving surface D.

FIG. 5 is an explanatory diagram showing, over time, the occurrence of an elliptical motion on the drive surface D by combining the longitudinal vibration and the torsional vibration generated in the vibrator 22. FIG.
Here, for convenience of explanation, neither the moving member 32 that presses and contacts the driving surface D of the vibrator 22 nor the pressing mechanism that presses the moving member 32 toward the vibrator 22 is illustrated.

That is, the phase difference between the periods of the torsional motion and the longitudinal motion generated in the elastic body 23 is (１ ／) λ
(Λ indicates the wavelength.) If the setting is shifted, the vibrator 22
An elliptical motion occurs at a fixed point on the drive surface D of.

That is, assuming that the driving frequency is f and the angular frequency at this time is ω (= 2πf), in FIG.
At time t = (6/4) · (π / ω), the displacement of the torsional vibration is maximum on the left side, while the displacement of the longitudinal vibration is zero. In this state, the moving element 32 contacts the driving surface D of the vibrator 22 by the pressing mechanism.

From this state, t = (7/4) · (π /
From (ω) to 0 (2/4) · (π / ω), the torsional vibration is displaced from the maximum on the left to the maximum on the right. On the other hand, the longitudinal vibration is displaced from zero to an upper maximum and returns to zero again. Therefore, the fixed point of the driving surface D of the vibrator 22 is
The moving member 32 is driven rightward while pressing and the moving member 32 is driven.

Next, t = (2/4) · (π / ω)-(6
/ 4) · (π / ω), the torsional vibration is displaced from the maximum on the right to the maximum on the left. On the other hand, the longitudinal vibration is displaced from zero to a lower maximum and returns to zero again. Therefore, the driving surface D of the vibrator 22 rotates to the left while moving away from the moving element 32, so that the moving element 32 is not driven. At this time, the moving element 32 is pressed by the pressing member, but does not follow the contraction of the vibrator 22 because the natural frequency of the pressing member is significantly lower than the ultrasonic vibration range.

In the present embodiment, two groups of torsion vibration exciting electromechanical conversion parts 24b-
By arranging 1,24d-1 and 24b-2, 24d-2 and arranging a group of electromechanical transducers 24c-1, 24c-1 for longitudinal vibration for primary longitudinal vibration, Electromechanical converters 24b-1, 24d-1 and 24b-2, 2 for torsional vibration excitation are provided at antinode positions of torsional vibration.
4d-2 is prevented from being arranged, and the electromechanical conversion part 24c-1 for longitudinal vibration excitation is provided at the antinode of longitudinal vibration.
And 24c-1 are prevented from being arranged. Thereby, the capacitance of the piezoelectric element 24 is reduced.

The current input to the ultrasonic actuator 21 is approximated by the following equation. Input current I = V / ((R ² + (ωL) ² ) ^1/2 / ωC)

Where C: capacitor component of the ultrasonic actuator 21 (mainly the capacitance of the piezoelectric element) V: applied voltage R: resistance component of the ultrasonic actuator 21 ω: angular velocity of the frequency voltage L: of the ultrasonic actuator 21 Inductance component

As shown in the equation, the input current to the ultrasonic actuator 21 is reduced by reducing the capacitance C of the piezoelectric element 24 by eliminating the excitation portion at the antinode position of the vibration that does not contribute much to the vibration. Can be reduced. Therefore, the driving efficiency of the vibration actuator 21 is improved.

Further, in this embodiment, two groups of torsion vibration exciting electromechanical transducers 24 are provided for the secondary torsional vibration.
b-1 and 24d-1 and 24b-2 and 24d-2, and a group of electromechanical transducers 24c-1 and 24c-1 for longitudinal vibration excitation for primary longitudinal vibration. Accordingly, the torsional vibration displacement to be excited by the piezoelectric element 24 and the torsional vibration displacement of the elastic body 23 to be actually excited can be made substantially equal to each other. Therefore, the torsional vibration and the longitudinal vibration are each easily excited, and the vibration amplitude of each can be secured large, and the driving force and the driving efficiency of the ultrasonic actuator 21 can be improved.

In this embodiment, the electromechanical converters 24b-1, 24d- for torsional vibration excitation of the piezoelectric element 24 are used.
2 are arranged such that their respective central portions coincide with the first nodes of the torsional vibration generated in the elastic body 23. Also, the electromechanical conversion part 24b for torsional vibration excitation of the piezoelectric element 24
−2 and 24d−2 are arranged such that the center thereof coincides with the second node of the torsional vibration generated in the elastic body 23.

As described above, the torsion vibration exciting electromechanical converters 24b-1, 24d-1 and 24b-2, 24d
By arranging -2, natural torsional vibration is likely to be excited in the elastic body 23, and it is possible to secure a larger torsional vibration amplitude.

Further, the electromechanical conversion part 24 for longitudinal vibration excitation
c-1 and 24c-2 are arranged such that the center thereof coincides with the node of the longitudinal vibration generated in the elastic body 23. By arranging the electromechanical converters 24c-1 and 24c-2 for longitudinal vibration excitation in this manner, natural torsional vibration is easily excited in the elastic body 23, and the amplitude of the longitudinal vibration is further increased. It is possible to do.

As described above, the torsion vibration exciting electromechanical converters 24b-1, 24d-1 and 24b-2, 24
d-2, the piezoelectric element 24 so that the central part of each of the electromechanical transducer parts 24c-1 and 24c-2 for longitudinal vibration excitation coincides with the node of each vibration generated in the elastic body 23.
By constructing and arranging, the longitudinal vibration amplitude and the torsional vibration amplitude can be secured large, and the driving efficiency and driving force of the ultrasonic actuator 21 can be improved.

As described above, in the ultrasonic actuator 21 of this embodiment, the piezoelectric elements for torsional vibration and longitudinal vibration sandwiched by the elastic body 23 are arranged in a row as separate components. Instead, it is replaced with a single piezoelectric element 24.

Therefore, according to the ultrasonic actuator 21 of the present embodiment, it is possible to greatly reduce the number of components of the piezoelectric element 24. Therefore, the productivity of the ultrasonic actuator 21 is significantly improved.

Further, since the thickness of the piezoelectric element 24 can be made very simple and constant, the variation in the thickness between many piezoelectric elements 24 as separate components can be completely eliminated.
Energy propagation loss to the elastic body 23 can be minimized.

Further, even if there are a plurality of node positions of the vibration generated in the elastic body 23, the torsional vibration displacement to be excited by the piezoelectric element and the torsional vibration displacement of the elastic body to be actually excited are substantially equal. Can be matched. Thereby, the vibration is easily excited, and the driving force and the driving efficiency of the ultrasonic actuator 21 can be improved.

The electromechanical converter 24 for exciting longitudinal vibrations
c and the node position of the longitudinal vibration substantially coincide with each other, and the electromechanical converters 24b and 24d for torsional vibration excitation
In order to make the central part of the
Vibration can be generated very efficiently.

Further, even if there are a plurality of node positions of the vibration generated in the elastic body 23, the arrangement of the vibration excitation section at the antinode of the vibration is eliminated, and the input energy can be reduced. Thereby, the driving efficiency of the ultrasonic actuator 21 is improved.

(Second Embodiment) As described in detail in the first embodiment, in the present invention, a large number of piezoelectric elements arranged in a line are integrated with an ultrasonic actuator,
The greatest feature is that it is replaced with one piezoelectric element plate.

FIG. 6 is a perspective view showing the configuration of a piezoelectric element 41 used in the ultrasonic actuator 40 according to the second embodiment. The piezoelectric element 41 is functionally divided into four parts. These correspond to the vertical vibration pickup piezoelectric element 41a, the vertical vibration excitation piezoelectric element 41b, the torsional vibration excitation piezoelectric element 41c, and the torsional vibration pickup piezoelectric element 41d, respectively. The polarization state of the piezoelectric element 41 has a polarization direction indicated by an arrow in FIG. 6, and is roughly classified into two polarization regions (41a, 41a, 41a) in one piezoelectric element 41.
41b) and polarization regions (41c, 41d).

Next, a method for manufacturing the piezoelectric element 41 will be described. FIG. 7 is an explanatory diagram showing this manufacturing method for each step. First, as shown in FIG. 7A, the poling electrodes 43a, 4a are placed on one end surface of the piezoelectric element plate 42 before the poling process and a plane near the end surface facing the one end surface.
3b is provided. The means for forming the poling electrodes 43a and 43b is not limited to a specific means. At this point, since no poling is performed on the piezoelectric element plate 42, there is no fear that the poling process is broken. for that reason,
The formation of the poling electrodes 43a and 43b may be performed by applying a paste of silver, nickel, or the like accompanied by a heating step.

Next, as shown in FIG. 7B, by applying a strong electric field to the poling electrodes 43a and 43b, a poling process in the longitudinal direction of the piezoelectric element plate 42 is performed. As a result, a torsional vibration excitation section 41c and a torsional vibration pickup section 41d are formed. By this poling process, a polarization as shown in FIG. 7B is formed.

Next, as shown in FIG. 7C, a strong electric field is applied in the thickness direction of the piezoelectric element plate 42 using the poling electrodes 43b, 43b, thereby
The polling process in the thickness direction 2 is performed. This allows
The vertical vibration excitation section 41b and the vertical vibration pickup section 41a are formed. By this poling process, a polarization as shown in FIG. 7C is formed.

Next, as shown in FIG. 7D, a piezoelectric element plate 42 having two polarization regions (41a, 41b) and polarization regions (41c, 41d) formed in this way.
Is polished on both sides to finish the piezoelectric element plate 42 to a predetermined thickness.

Finally, as shown in FIG. 7E, electrodes 44a to 44d for inputting and outputting electric energy are formed on both surfaces of each of the polarization regions 41a to 41d. In the piezoelectric element plate 42 according to the present embodiment, the polarization regions 41a to 41d including the electrodes 44a to 44d are respectively formed by a vertical vibration pickup unit, a vertical vibration excitation unit, a torsional vibration excitation unit, and a torsional vibration pickup unit. It has two functions.

In FIG. 7E, the electrode 44a
It is preferable that the heating of the piezoelectric element plate 42 is performed as little as possible to avoid the destruction of the polarization performed on the polarization regions 41a to 41d. Therefore, the electrodes 44a to 44d are formed by a film forming method such as sputtering or vapor deposition or a method such as electroless plating.
It is desirable to form.

As described above, the piezoelectric element generally expands in the direction of applying the electric field by the poling process and contracts in the direction perpendicular to the direction of applying the electric field. for that reason,
Also in the present embodiment, the thickness of the piezoelectric element plate 42 increases in the polarization regions 41a and 41b, while the thickness of the polarization region 4a increases.
This is because 1c and 41d become thin, and the thickness of the piezoelectric element plate 42 may not be constant.

By performing the polishing step shown in FIG. 7D to make the thicknesses of the polarization regions 41a and 41b and the polarization regions 41c and 41d constant, it is possible to effectively propagate the vibration to the elastic body described later in the entire region. Can be done.

In other words, a large number of piezoelectric elements conventionally manufactured by independent processes are arranged in parallel at predetermined positions, but according to the present embodiment, the integrated piezoelectric element plate 42
The processing up to the processing can be performed. for that reason,
In all of the length direction and the width direction of the piezoelectric element plate 42,
The thickness can be very easily made constant.

For this reason, as shown in FIG.
The piezoelectric element plate 4 is sandwiched between two opposing elastic bodies.
When 2 is arranged, the generation of a gap between the piezoelectric element plate 42 and the two elastic bodies is suppressed, and the loss of energy propagation from the piezoelectric element to the elastic body is suppressed to a minimum.

In FIG. 7, the poling regions 41a to 41d are formed by performing the polling twice, but they may be formed by a single polling process. A method of manufacturing the piezoelectric element 41 in this case will be described with reference to FIG.

First, in the same manner as in FIG. 7A, a poling electrode 43a is formed on one end surface of the plate-shaped piezoelectric element body 42 before the poling process is performed. Also, a poling electrode 43b is provided on one side of a plane near the end face opposed to the end face, and a poling electrode 43b 'is provided on the other side (see FIG. 19A).

Next, as shown in FIG. 19B, a strong electric field is applied simultaneously between the poling electrode 43b and the poling electrode 43a and between the poling electrode 43b and the poling electrode 43b '. Polling electrode 43
By applying a strong electric field to b and the poling electrode 43a, a torsional vibration excitation section 41c and a torsional vibration pickup section 41d are formed. By applying a strong electric field in the thickness direction of the piezoelectric element 42 using the poling electrode 43b and the poling electrode 43b ', the longitudinal vibration excitation unit 41b and the longitudinal vibration pickup unit 41a are formed. In this manner, one polling process is performed as shown in FIG.
Polarization is formed as shown in FIG.

Next, as shown in FIG. 19C, the two polarization regions (41a, 41b) and (41c,
The piezoelectric element 42 having 41d) is polished on both sides. By doing so, the piezoelectric element 42 is finished with a predetermined thickness.

Finally, as shown in FIG. 19D, electrodes 44a to 44d for inputting and outputting electric energy are formed on both surfaces of each of the polarization regions 41a to 41d. In the method shown in FIG. 19, only one polling process is required in the manufacturing process of the piezoelectric element 42, and the number of steps is reduced, and the productivity is further improved. Such a manufacturing method is effective when the thickness of the piezoelectric element 42 is small. At the boundary between the polarization in the thickness direction and the polarization in the longitudinal direction of the piezoelectric element 42, the accuracy of the poling direction may be inferior to the case where the method shown in FIG. 7 is used. Therefore, an electrode may be provided avoiding this boundary portion.

In the examples shown in FIGS. 6 and 7, an embodiment in which one longitudinal vibration excitation section 41b is formed is shown, but the present invention is not limited to such an embodiment. FIG. 8 is a perspective view showing a piezoelectric element 51 obtained by modifying the piezoelectric element 41 shown in FIG.

The piezoelectric element 51 shown in FIG.
It is divided into two parts. Each of the piezoelectric element 51a for vertical vibration pickup and the piezoelectric element 5 for vertical vibration excitation
1b-1, a piezoelectric element 51b-2 for longitudinal vibration excitation, a piezoelectric element 51c for torsional vibration excitation, and a piezoelectric element 51d for torsional vibration pickup are formed.

When two piezoelectric elements for longitudinal vibration excitation are formed as in the piezoelectric element 51 shown in FIG. 8, the input area can be largely changed according to the amount of vertical displacement to be generated. . Thereby, the degree of freedom in controlling the ultrasonic actuator is increased.

That is, by disposing a group of torsional vibration excitation units for torsional vibration, the displacement amount is slightly smaller than when two groups of torsional vibration excitation units are disposed. Although it is reduced, the input energy to the vibration excitation unit can be halved, so that the driving efficiency can be improved.

FIG. 9 is an explanatory diagram showing a method of manufacturing the piezoelectric element 51 shown in FIG. 8 for each step. The manufacturing method shown in FIG. 9 is basically the same as the manufacturing method shown in FIG.
Only different portions will be described, and portions common to those of the manufacturing method shown in FIG. 8 will be denoted by reference numerals changed to the 50's, and redundant description will be omitted.

In FIG. 9E, each of the polarization regions 51a, 51b-1, 51b-2,
Electrodes 54a, 54b-1, 54b-2, 54c for input / output of electric energy are provided on both surfaces of 51c and 51d, respectively.
And 54d. Thus, the piezoelectric element 51 shown in FIG. 8 is formed.

FIG. 10 is a sectional view showing an ultrasonic actuator 60 according to this embodiment. The vibrator 61 is formed by joining the piezoelectric element 41 of the present embodiment, which is an electromechanical conversion element excited by a drive signal, to the primary longitudinal vibration and the secondary longitudinal vibration by excitation of the piezoelectric element 41. The elastic member 62 generates a driving force on the driving surface 62c by the occurrence of torsional vibration.

The elastic body 62 has a groove formed on the side surface.
Three small-diameter portions 62a, 62b, 62c and the small-diameter portions 62a to 62c.
Semi-elastic bodies 61a and 61b obtained by vertically dividing a hollow thick elastic body having four large-diameter portions 62A, 62B, 62C and 62D formed by being divided into 62c are divided into two. , Again obtained by combining them in a columnar shape.

The piezoelectric element 41 is mounted on the divided surfaces of the semi-elastic bodies 61a and 61b with the piezoelectric element 41 sandwiched therebetween. Small diameter section 62
a and 62c are located at two nodes of the secondary torsional vibration generated in the vibrator 61. On the other hand, the small-diameter portion 62 b is located at a node of the primary longitudinal vibration generated in the vibrator 61.

The torsional vibration excitation section 41c formed on the piezoelectric element 41 is disposed at a position including one node of the secondary torsional vibration, and the longitudinal vibration excitation section 41b is connected to the longitudinal vibration node. And the other node of the torsional vibration.

In the elastic body 62, through holes 63a to 63d are formed substantially at the centers of the large diameter portions 62A to 62D in the height direction, respectively, in the direction parallel to the thickness direction of the piezoelectric element 41. The semi-elastic bodies 61a and 61b
Insert the bolts 64a to 64d into the nuts 6a to 63d.
It is fastened and fixed by screwing 5a to 65d. In this way, the elastic body 62 holds the piezoelectric element 41 sandwiched therebetween.

A through hole for a fixing pin 66 is formed substantially at the center of the elastic body in the longitudinal direction, and the fixing pin 66 passes through the elastic body 62 and the fixed shaft 67 in the axial direction of the elastic body 62.
, The elastic body 62 is fixed and held on the fixed shaft 67.

The moving element 68 is a thick annular moving element base material 68.
a, and a sliding member 68b affixed to a sliding portion annularly protruding from the end face on the vibrator 61 side. A bearing 69, which is a positioning member, is fitted to the inner peripheral portion of the end face of the movable element base material 68a on the anti-vibrator side, and the bearing 69 performs positioning with respect to the fixed shaft 67.

A gear for taking out driving force is provided on the outer peripheral surface of the moving element base material 68a (not shown), and a gear of a driven body (not shown) meshes with this gear to drive. The force is output to the outside.

The moving element 68 is a coned disc spring 70 as a pressing member (a spring or a leaf spring may be used).
As a result, the driving surface 62 c of the vibrator 61 is brought into pressurized contact with the vibrator 61 via the pressing force transmitting member 71.

The fixed shaft 67 is disposed so as to penetrate a hollow portion formed in the axial direction of the elastic body 62, and fixes the vibrator 61 and positions the movable member 68 in the radial direction. A screw 6 is provided at one end of the fixed shaft 67.
7a is formed, and a nut 72 which is a pressing force adjusting member for adjusting the pressing force of the disc spring 70 is screwed. By changing the screwing position of the nut 72, the spring force of the disc spring 70 is changed, and the pressing force of the moving element 68 on the vibrator 61 is adjusted.

FIG. 11 is an explanatory diagram showing the arrangement of the piezoelectric elements in the vibrator in the present embodiment. FIG.
In the description of 1, the arrangement of the piezoelectric element will be mainly described,
The same reference numerals as in FIG. 10 denote the same parts in FIG. 10, and a redundant description will be omitted.

The torsional vibration excitation section 4 in the piezoelectric element 41
1c generates a shear deformation according to the direction of the voltage when the frequency voltage is applied, whereby torsional vibration is generated in the vibrator 61.

The torsional vibration exciting section group is composed of two torsional vibration exciting sections 41c on the front side and two torsional vibration exciting sections 41c on the other side in the drawing. If the shearing deformations generated by the torsional vibration excitation portions 41c on the front side and the opposite side are made to be in opposite directions when a voltage in the same direction is applied, the vibrator 61 may be twisted in a certain direction. Torsion occurs.

For example, when the torsional vibration exciting parts 41c are arranged as shown in FIG. 11, the two torsional vibration exciting parts 41c on the near side and the two on the other side are sheared and deformed.
The drive surface 62c of the vibrator 61 is twisted in the direction indicated by the white arrow. When a voltage in the opposite direction is applied, reverse shearing deformation occurs, so that the driving surface 62c is twisted in the direction opposite to the direction shown in FIG.

Further, the vertical vibration excitation section 41b of the piezoelectric element 41 expands and contracts when a frequency voltage is applied, whereby the vibrator 61 generates a vertical vibration. The vertical vibration excitation unit group includes two vertical vibration excitation units 41b on the front side in the drawing.
And two longitudinal vibration exciters 41b on the other side. When a voltage in the same direction is applied to each of the vertical vibration excitation sections 41b, each of the vertical vibration excitation sections 41b is vertically deformed in the same direction. By arranging the above-described arrangement of the longitudinal vibration excitation sections 41b of the piezoelectric elements, when the same frequency voltage is applied to all the longitudinal vibration excitation sections 41b, the longitudinal primary vibration mode is easily excited.

The ultrasonic actuator 60 thus configured is supplied with a drive signal having two (1/4) λ phase differences, respectively, by the longitudinal vibration exciter 41b and the torsional vibration exciter 41.
c, the phases of the longitudinal vibration and the torsional vibration are shifted by 90 °, and an elliptical motion obtained by combining the vibrations is formed on the driving surface 6.
2c.

Since the principle of generation of vibration is exactly the same as that of the ultrasonic actuator 21 of the first embodiment (see FIG. 5), further description is omitted. As described above, according to the present embodiment, it is possible to greatly reduce the number of piezoelectric element parts by integrating a large number of piezoelectric elements into one piezoelectric element plate. As a result, the man-hour for mounting the piezoelectric element on the ultrasonic actuator is greatly reduced, thereby significantly improving the productivity. In addition, since the thickness variation inevitably present in many piezoelectric elements is eliminated, the piezoelectric element is eliminated. Energy transmission loss from the element to the elastic body is minimized.

(Modification) In the embodiment described above,
An ultrasonic actuator using an ultrasonic vibration region is taken as an example of the vibration actuator. However, the vibration actuator according to the present invention is not limited to such a mode, and is equally applicable to a vibration actuator using another vibration region.

Further, in the first embodiment, the elastic body is constituted by the two semi-elastic members, but the present invention is not limited to such an embodiment. The elastic body may be formed in a columnar shape by three or more elastic members.
In the first embodiment, the piezoelectric element, which is an electromechanical conversion element, is disposed so as to be sandwiched between the divided surfaces of the elastic member. However, the present invention is not limited to such an embodiment. For example, the elastic member may be mounted on the outer peripheral surface by an appropriate means such as bonding.

In each embodiment, the primary longitudinal vibration and the
Although a vibration actuator including a vibrator that generates the following torsional vibration is used, the vibration actuator according to the present invention is not limited to such an embodiment. That is, the n-th (n: natural number) longitudinal vibration and the m-th (m: natural number)
For a vibration actuator having a vibrator that generates a torsional vibration, an n-group longitudinal vibration excitation unit is disposed at each node, and an m-group torsional vibration excitation unit is disposed at each node. By arranging, the same effect as in the embodiment can be obtained.

In each of the embodiments, the piezoelectric element is used as the electromechanical transducer. However, the vibration actuator according to the present invention is not limited to such an embodiment. For example, it is also possible to use an electrostrictive element other than the piezoelectric element.

In the first embodiment, two second electromechanical converters in the thickness direction of the piezoelectric element main body are formed, and one first electromechanical converter in the planar direction of the piezoelectric element main body is formed. However, the vibration actuator according to the present invention is not limited to only such an embodiment. For example, as shown in the second embodiment, a mode in which the first electromechanical conversion part and the second electromechanical conversion part are formed one by one adjacently in the planar direction of the piezoelectric element body can be exemplified. .

In the first embodiment, the formed first
An electromechanical conversion part 24a for a longitudinal vibration pickup, which is a electromechanical conversion part which is adjacent to the electromechanical conversion part 24b and converts mechanical displacement in a planar direction into electric energy
And a torsion vibration pickup electro-mechanical conversion portion 24e which is a electro-mechanical conversion portion for converting mechanical displacement in the thickness direction into electric energy adjacent to the formed first electro-mechanical conversion portion 24d. Is formed.

However, the vibration actuator according to the present invention is not limited to such an embodiment. That is, only one of the electromechanical conversion part 24a for the longitudinal vibration pickup and the electromechanical conversion part 24e for the torsional vibration pickup may be installed, or both may not be installed.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a piezoelectric element which is an element of a vibrator constituting an ultrasonic actuator according to a first embodiment.

FIG. 2 is an explanatory diagram showing a method of manufacturing a piezoelectric element used in the first embodiment for each step.

FIG. 3 is a longitudinal sectional view illustrating a configuration of the ultrasonic actuator according to the first embodiment.

FIGS. 4A and 4B are explanatory views showing how the piezoelectric element is mounted on the vibrator according to the first embodiment. FIG. 4A is a top view of the vibrator, and FIG. FIG. 4 is a side view of the vibrator, also showing the state of occurrence of vibration.

FIG. 5 is an explanatory diagram showing, over time, generation of elliptical motion on a drive surface by combining longitudinal vibration and torsional vibration generated in the vibrator of the first embodiment.

FIG. 6 is a perspective view illustrating a configuration of a piezoelectric element used for an ultrasonic actuator according to a second embodiment.

FIG. 7 is an explanatory diagram showing a method of manufacturing a piezoelectric element according to a second embodiment for each step.

FIG. 8 is a perspective view showing a modification of the piezoelectric element of the second embodiment.

FIG. 9 is an explanatory view showing a manufacturing method of a modified example of the piezoelectric element of the second embodiment for each step.

FIG. 10 is a cross-sectional view illustrating an ultrasonic actuator according to a second embodiment.

FIG. 11 is an explanatory diagram showing an arrangement of a piezoelectric element in a vibrator in a second embodiment.

FIG. 12 is a perspective view showing a structure of a conventional example of a longitudinal-torsion vibration type vibration actuator.

FIG. 13 is an exploded perspective view showing a stator of a conventional vibration actuator.

FIG. 14 is an explanatory diagram showing, with time, a vibration actuator that generates a longitudinal vibration and a torsional vibration in a vibrator and generates an elliptical motion on a vibrator driving surface by combining these vibrations.

FIG. 15 is a top view of a vibrator showing an arrangement of piezoelectric elements bonded to an elastic body.

FIG. 16 is a side view of the vibrator showing an arrangement of piezoelectric elements bonded to an elastic body.

FIG. 17 shows a vibration actuator proposed earlier.
FIG. 17A is an explanatory view showing a state of mounting a piezoelectric element to an elastic body constituting a vibrator, and FIG.
(B) is a side view of the vibrator showing both the longitudinal vibration mode and the torsional vibration mode that occur.

18A and 18B are perspective views showing the poling direction of the piezoelectric element. FIG. 18A shows the poling direction of the longitudinal vibration piezoelectric element, and FIG. 18B shows the poling direction of the torsional vibration piezoelectric element. Shown respectively.

FIG. 19 is an explanatory view showing a modification of the method for manufacturing a piezoelectric element of the second embodiment for each step.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 21 Vibration actuator (ultrasonic actuator) 22 Vibrator 23 Elastic body 24 Piezoelectric element (Electro-mechanical conversion element) 24a Electromechanical conversion part for vertical vibration pickup 24b Electromechanical conversion part for torsional vibration excitation 24c Electric machine for vertical vibration excitation Conversion part 24d Electromechanical conversion part for torsional vibration excitation 24e Electromechanical conversion part for torsional vibration pickup 25 Piezoelectric element main body 26a to 26e Polling electrode 27a to 27e Electrode 28A to 28C Large diameter part 28a to 28b Small diameter part 29a , 29b Through hole 30a, 30b Bolt 31 Fixed shaft 31a Screw part 32 Movement member (relative motion member) 33 Bearing 34 Screw part 35 Disc spring (pressing member) 36 Nut (pressing force adjusting member)

Claims (24)

[Claims] 1. An electromechanical transducer for converting electrical energy into mechanical displacement or mechanical displacement into electrical energy, wherein a main body of the electromechanical transducer includes a plurality of electrical devices generating different piezoelectric effects. An electromechanical conversion element having a mechanical converting part, wherein each of the plurality of electromechanical converting parts is simultaneously displaceable in different directions. 2. The electromechanical transducer according to claim 1, wherein the main body generates different vibration modes simultaneously by the plurality of electromechanical transducers. 3. The electromechanical transducer according to claim 1, wherein the main body is configured to simultaneously and independently generate different vibration modes simultaneously generated in the main body by the plurality of electromechanical conversion portions. An electromechanical conversion element characterized in that it can be converted into an electromechanical element. 4. The electromechanical transducer according to claim 1, wherein the main body causes different vibration modes to be simultaneously generated by the plurality of electromechanical conversion portions, and different vibrations simultaneously generated in the main body. An electromechanical conversion element capable of simultaneously and independently converting modes into electric energy. 5. The electromechanical transducer according to claim 1, wherein the plurality of electromechanical transducers include a first electromechanical transducer that generates a piezoelectric slip effect and a second electromechanical transducer that generates a piezoelectric transverse effect. An electromechanical conversion element, comprising: 6. The electromechanical transducer according to claim 5, wherein a torsional vibration is generated by the piezoelectric slip effect, and a longitudinal vibration is generated by the piezoelectric transverse effect. . 7. The electromechanical conversion element according to claim 5, wherein the first electromechanical conversion part is formed two apart from each other, and the second electromechanical conversion part is formed of the two electromechanical conversion parts. An electromechanical transducer, wherein one is formed between the first electromechanical transducers. 8. The electromechanical transducer according to claim 5, wherein the first electromechanical transducer and the second electromechanical transducer are formed one by one adjacent to the main body. An electromechanical conversion element characterized in that: 9. The electromechanical conversion element according to claim 7, wherein the first electromechanical conversion part and the second electromechanical conversion part disposed adjacent to each other transfer electric energy. A portion for converting mechanical displacement into mechanical displacement, wherein at least one end side of the main body with respect to the disposition direction of the first electromechanical converting portion and the second electromechanical converting portion is further provided with mechanical energy. An electromechanical conversion element, characterized in that a part for converting into an element is formed. 10. The electromechanical transducer according to claim 5, wherein the main body is formed in a plate shape, and the first electromechanical transducer and the first electromechanical transducer are connected to each other. 2. The electromechanical conversion element according to claim 2, wherein the thickness of each of the electromechanical conversion portions is substantially equal to each other. 11. A base material of an electromechanical transducer for converting electric energy into mechanical displacement or converting mechanical displacement into electric energy in a plurality of directions, so that the base material has different piezoelectric effects. And forming a plurality of electromechanical conversion parts which are simultaneously displaceable in different directions. 12. A first electromechanical conversion part is formed by performing a first polling on a base material of an electromechanical conversion element that converts electric energy into mechanical displacement, and then forming the first electromechanical conversion part. Performing a second polling operation on a portion including a part of the portion to form a second electromechanical conversion portion that generates a piezoelectric effect different from the first electromechanical conversion portion. Device manufacturing method. 13. The method of manufacturing an electromechanical transducer according to claim 12, wherein the first electromechanical transducer generates a piezoelectric slip effect, and wherein the second electromechanical transducer includes a piezoelectric transverse element. A method for producing an electromechanical transducer, wherein the method produces an effect. 14. The method for manufacturing an electromechanical transducer according to claim 12, wherein a base material of the electromechanical transducer is formed in a plate shape and at a predetermined interval in a plane direction of the base material. An electrode pair is formed on both surfaces of the base material to provide a plurality of electrode pairs, and the first poling is performed among the plurality of electrode pairs.
The second polling is performed by applying an electric field between at least one pair of adjacent electrode pairs.
A method for manufacturing an electromechanical conversion element, wherein the method is performed by applying an electric field between at least one pair of electrodes. 15. The method for manufacturing an electromechanical transducer according to claim 14, wherein after performing the first polling and the second polling, the first electromechanical transducer and the second A method for manufacturing an electromechanical transducer, wherein a process for equalizing the thickness of each electromechanical transducer is performed. 16. The method for manufacturing an electro-mechanical conversion element according to claim 15, wherein the processing for uniforming is performed on a surface of the first electro-mechanical conversion part. Forming an electrode such that the thickness of the first electromechanical conversion portion is equal to the thickness of the second electromechanical conversion portion. After forming an electrode on the surface of the first electromechanical conversion portion, the first electromechanical conversion portion is formed. A part of an electrode formed on a surface of each of the first electromechanical conversion part and the second electromechanical conversion part is removed so that a thickness of each of the part and the second electromechanical conversion part is equal. Or, after removing the electrode formed on the second electromechanical conversion part and a part of the electromechanical conversion element to make the thickness of the electromechanical conversion element uniform, An electromechanical converter and the second Method for manufacturing electromechanical transducer, characterized in that it is carried out by forming electrodes on transducer portion each surface. 17. The method for manufacturing an electromechanical transducer according to claim 16, wherein the first electrode is formed on the electromechanical transducer in a process of the homogenization process. A method for manufacturing an electromechanical conversion element, characterized by using a forming method that does not involve heating to a temperature range where the electromechanical conversion capability of each of the mechanical conversion part and the second electromechanical conversion part is lost. 18. The method for manufacturing an electromechanical transducer according to claim 17, wherein the forming method is a thin film forming method such as sputtering or vapor deposition or an electroless plating method. Manufacturing method. 19. A vibration having an electromechanical transducer, a vibrator in which a plurality of different types of vibrations are generated by the electromechanical transducer, and a relative motion member performing relative motion between the vibrator. An actuator, wherein the main body of the electromechanical transducer has a plurality of electromechanical transducers that generate different piezoelectric effects, and the plurality of electromechanical transducers are each simultaneously displaceable in different directions. A vibration actuator, characterized in that: 20. The vibration actuator according to claim 19, wherein the plurality of electromechanical transducers include a first electromechanical transducer that generates a piezoelectric slip effect and a second electric machine that generates a piezoelectric transverse effect. A vibration actuator comprising a mechanical conversion part. 21. The vibration actuator according to claim 20, wherein the vibrator is formed in a column shape by combining a plurality of elastic members, and the electromechanical transducer is mounted on at least one of the elastic members. The vibration actuator is characterized in that the plurality of vibrations are torsional vibration in the axial direction of the vibrator and longitudinal vibration in the axial direction of the vibrator. 22. The vibration actuator according to claim 21, wherein the first electromechanical transducer portion of the electromechanical transducer element is a position serving as at least one node of torsional vibration generated in the vibrator. And the second electromechanical transducer portion of the electromechanical transducer element is present at a location including at least one node of longitudinal vibration generated in the vibrator. Vibration actuator. 23. A method of manufacturing a vibration actuator in which electromechanical transducers for generating a plurality of vibrations different from each other are arranged between a plurality of elastic members, wherein the electromechanical transducers are configured as described above. A method for manufacturing a vibration actuator, comprising the electromechanical transducer described in any one of the above. 24. The method of manufacturing a vibration actuator according to claim 23, wherein the electromechanical transducer is a node of the torsional vibration generated in the vibrator by the first electromechanical transducer. Wherein the second electromechanical transducer is disposed at a position including a position that is a node of the longitudinal vibration generated in the vibrator. Production method.