JPH09159924A - Stereoscopic microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide the microscope which is equipped with an optical system that is extremely close to coaxial lighting and can obtain an observation image having neither a flare nor a ghost originating from illumination light and obtain a sufficient observation light quantity with a small eclipse of the illumination light. SOLUTION: This microscope consists of a lighting optical system composed of lighting lenses 1a, 1b, and 1c, a light guide 2, and a reflecting mirror 3 and an observation optical system composed of an observation light deflecting and reflecting mirror 4, an objective 5, prisms 6 and 7, a power variation optical system 8, a beam splitter 9, an image forming lens 11, and an ocular. In this case, the observation light deflecting and reflecting mirror 4 is arranged on the optical axis of the said lighting optical system to obtain a nearly coaxial lighting optical system.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a stereomicroscope equipped with a substantially coaxial illumination optical system whose observation light path is arranged in the illumination light path.

[0002]

2. Description of the Related Art FIG. 8A is a sectional view taken along the optical axis showing the configuration of an illumination optical system in a conventional stereoscopic microscope.
(B) is the figure seen from the direction of the arrow shown in the figure (a). As shown here, in the illumination optical system in the conventional stereoscopic microscope, a prism (or mirror) that illuminates the illumination light in the direction of the observation object 46 in the vicinity of the observation optical system 41.
42 are arranged. At this time, the optical axis 43 of the illumination light beam emitted from the prism 42 needs to be set at a certain angle with respect to the observation optical axis 44 in order to match the observation visual field and the illumination field on the surface of the observation object 46. There is. In particular, in order to obtain a sufficient amount of illumination light, the aperture of the prism 42 must be made large, so the distance between the illumination light axis 43 and the observation light axis 44 widens, and the angle formed by both optical axes becomes large. . In addition, in the Galileo type stereomicroscope, a mirror or prism that constitutes illumination means is arranged between the variable magnification optical system and the objective lens so that the observation optical axis and the illumination optical axis are parallel to each other. The observation field on the observation object plane and the illumination field are matched by the objective lens.

On the other hand, in German Patent Specification No. 4,122,536, a reflecting member for separating and deflecting observation light is arranged in a parallel light beam formed by the illumination optical system, and the front objective lens is used as the observation optical system and the illumination optical system. A coaxial illumination optics configured for common use is disclosed. Furthermore, in order to form a complete coaxial illumination, as shown in FIG. 9, a half prism (or half mirror) 4 is placed on the observation optical axis 44.
There is also known a configuration in which the illumination optical axis 43 is combined with the observation optical axis 44 by arranging 5 and the like.

[0004]

There are various problems with the conventional illumination means for a stereoscopic microscope. First, in the configuration shown in FIGS. 8A and 8B, when observing the bottom portion 48 of the observation object 46 in which a narrow opening 47 is formed with a recess having a certain depth, the observation light beam is observed. Object 46
Even if the light beam reaches the bottom portion 48 from the opening 47, since the illumination optical axis 43 has a certain angle with the observation optical axis 44, vignetting of the illumination light flux may occur at the opening 47. Often. This is because even if the observation field of view and the illumination field match on the object plane, the parallax of the optical axis is changed by the inclination between the observation optical axis and the illumination optical axis in the vicinity of the opening of a deep observation object. It will happen. Therefore, the observation light flux and the illumination light flux deviate from each other, and only a part of the illumination light flux can enter the opening 47, and the bottom portion 48 of the observation object 46 cannot obtain a sufficient amount of light.

On the other hand, a stereoscopic microscope in which an illuminating means having a mirror, a prism or the like is arranged between the variable magnification optical system and the objective lens, or coaxial illumination by sharing a part of the observation optical path and the illumination optical path. In the stereomicroscope configured as above, the illumination optical system and the observation optical system share an optical system such as an objective lens. In such a stereoscopic microscope, when the illumination light passes through a shared optical system having an image forming action such as an objective lens, a part of the illumination light is reflected by the curved lens surface. Since this reflected light also enters the observation optical system, the observer also observes flares and ghosts caused by the reflected light at the same time, which causes deterioration of the observed image.
Further, in the configuration in which the half prism (or half mirror) is arranged in the observation optical path shown in FIG. 9, since a part of the optical path is shared, flare occurs due to surface reflection of the objective lens and scattering on the mirror surface. A ghost may occur and illumination light may be dimmed when passing through the half prism, which may cause a shortage of light quantity.

Therefore, the present invention has been made in view of the above-mentioned problems of the prior art, and is provided with an optical system extremely close to coaxial illumination, and an observation image free of flare and ghost caused by illumination light is obtained. In addition, it is an object of the present invention to provide a stereomicroscope capable of obtaining a sufficient amount of observation light with less vignetting of illumination light.

[0007]

In order to achieve the above object, a stereoscopic microscope according to the present invention is a stereoscopic microscope having an observation optical system and an illumination optical system in a body, wherein the observation optical system and the illumination optical system are respectively provided. It is composed of an independent optical system, and the observation optical path is included in a part of the illumination optical path.
It is characterized in that a substantially coaxial illumination optical system in which an observation visual field is located in the illumination field is configured. Further, the stereoscopic microscope of the present invention is characterized in that a reflection member for deflecting the observation optical path to the outside of the illumination optical path is provided on the observation object side of the illumination optical system, and the observation object is illuminated from behind the reflection member. And
Furthermore, in the stereomicroscope of the present invention, the reflecting member may be formed of a mirror, and a reflecting mirror that deflects the illumination light reflected on the back surface of the reflecting member to be emitted toward the observation object may be separately provided. Also, even if the direction of the observation visual field can be changed by rotating the reflecting member,
The above object can be achieved.

[0008]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described in detail below with reference to Examples.

First Embodiment FIG. 1A is a sectional view taken along the optical axis showing the configuration of a stereomicroscope according to the present embodiment, and FIG. 1B is an arrow A shown in FIG. It is the figure seen from the direction. The stereomicroscope 10 of this embodiment includes an illumination optical system including illumination lenses 1a, 1b, 1c, a light guide 2 and a reflection mirror 3, an observation light deflection reflection mirror 4, an objective lens 5, prisms 6 and 7, variable power optics. The system includes a system 8, a beam splitter 9, an imaging lens 11 and an observation optical system including an eyepiece lens (not shown).

In this stereoscopic microscope 10, first, the light emitted from the light guide 2 is reflected by the reflection mirror 3 through the illumination lens 1a, and then passes through the cover glass 12 through the illumination lenses 1b and 1c in this order. It is irradiated toward the observation object 13. Then, the observation light from the observation object 13 passes through the cover glass 12 again, and is reflected downward by 90 ° by the observation light deflection reflection mirror 4 arranged on the illumination optical axis in the illumination optical path and outside the illumination optical path. Be led to. After that, the observation light is observed through the objective lens 5, the prisms 6 and 7, the variable power optical system 8, the beam splitter 9, the imaging lens 11 and the eyepiece lens in order. A part of the observation light is guided by the beam splitter 9 to a photographing optical system (not shown). The cover glass 12
Is for preventing dust and the like from entering the body.

Further, in the vicinity of the observation light deflection reflection mirror 4 arranged in the illumination light path, the observation light deflection reflection mirror 4 is covered so as to prevent the illumination light from directly entering the observation light path. The light shielding body 14 is arranged. The light shield 14 has an opening in the direction in which the observation light deflection reflection mirror 4 emits the observation light so that the observation light beam is not vignetted.
Around the opening, there is a protrusion 1 for preventing entrance of illumination light.
5 are provided. A similar special portion 15 is also provided at the entrance end of the observation optical path of the stereomicroscope 10.

In the stereomicroscope 10 of the present embodiment having such a configuration, the optical axis of the exit end of the illumination optical system and the optical axis of the entrance end of the observation optical system are aligned with each other, and the illumination optical path is the observation optical path. Since it includes a part, even when observing an object having a depression, vignetting of illumination light does not occur. Further, although a part of the illumination light is shielded by the light shield 14, the illumination light flux that has passed through the peripheral portion of the light shield 14 spreads later, so there is no fear that a dark portion is formed on the observation object surface. Further, since the light shield 14 is arranged at the position where the luminous flux diameter is largest in the illumination optical path (near the pupil of the illumination lens 1c), uneven light distribution does not occur on the observation object plane.

Further, in order to make it possible to change the direction of the observation visual field, it is preferable that the observation light deflection reflection mirror 4 is rotatable. In fact, also in the stereoscopic microscope 10 of this embodiment, the observation light deflection reflection mirror 4 is shown in FIG.
It is configured to be rotatable in the direction of arrow B shown in (a),
In addition, a sufficient clearance is provided between the observation light deflection reflection mirror 4 and the light shielding plate 14 so as not to hinder the rotation of the observation light deflection reflection mirror 4. When the observation light deflecting / reflecting mirror 4 rotates, the observation optical axis changes within a range of twice the rotation angle of the observation light deflecting / reflecting mirror 4, so that the observation visual field also changes. At this time, the illumination field is set in advance to a size including the moving range of the observation field of view, so that it is possible to prevent a shortage of the light amount due to a shift between the observation field of view and the illumination field. Further, the optical axis of the objective lens 5 and the optical axis of the variable power optical system 6 are configured to be substantially V-shaped because the prisms 6 and 7 are arranged. For this reason, the eyepiece lens can be arranged at a position where it can be easily observed and guided to the upper part of the mirror body without enlarging the observation optical path more than necessary. Therefore, the stereomicroscope 10 can be made compact.

Second Embodiment FIG. 2 (a) is a sectional view taken along the optical axis showing the configuration of a stereomicroscope according to the present embodiment, and FIG. 2 (b) is an arrow A shown in FIG. 2 (a). It is the figure seen from the direction. The stereomicroscope 20 of the present embodiment is also an illumination optical system including illumination lenses 1a, 1b, 1c, a light guide 2 and a reflection mirror 3, an observation light deflection reflection mirror 4, an objective lens 5, prisms 6, 7 and variable magnification optics. The system includes a system 8, a beam splitter 9, an imaging lens 11 and an observation optical system including an eyepiece lens (not shown).

In this stereoscopic microscope 20, first, the light emitted from the light guide 2 is reflected by the reflection mirror 3 through the illumination lens 1a, and then passes through the cover glass 12 through the illumination lenses 1b and 1c in order. It is irradiated toward the observation object 13. Then, the observation light from the observation object 13 is transmitted through the cover glass 12 again, is reflected downward by 90 ° by the observation light deflection reflection mirror 4 arranged in the illumination light path, and is guided to the outside of the illumination light path. After that, the observation light is observed through the objective lens 5, the prisms 6 and 7, the variable power optical system 8, the beam splitter 9, the imaging lens 11 and the eyepiece lens in order. A part of the observation light is guided by the beam splitter 9 to a photographing optical system (not shown). The cover glass 12 is for preventing dust and the like from entering the mirror pair. Further, in the vicinity of the observation light deflection reflection mirror 4 arranged in the illumination light path, in order to prevent the illumination light from directly entering the observation light path, the observation light deflection reflection mirror 4 is covered so as to shield the light. 14 are arranged. At this time, since the light shield 14 is arranged below the optical axis of the illumination optical system, the observation object 1
3 is illuminated by illumination light emitted from the upper portion of the illumination optical system and the peripheral portion of the light shield 14.

According to this structure, the illumination light from the illumination optical system does not directly enter the observation optical path.
It is possible to prevent flare and ghost from occurring due to illumination light. Although the observation optical axis is shifted slightly below the illumination optical axis, since part of the observation optical path is included in the illumination optical path, the vignetting of the illumination light beam is the same as in the stereoscopic microscope of the first embodiment. There is no possibility of occurrence of unevenness or uneven light distribution on the surface of the observation object. Further, since the observation light deflecting / reflecting mirror 4 is also configured to be rotatable in the direction of arrow B shown in FIG. 2A as in the stereomicroscope of the first embodiment, the first embodiment is also applicable in this respect. It has the same effect as the stereoscopic microscope of the example.

FIG. 3 (a) is a diagram showing a first modification of the present embodiment, and FIG. 3 (b) is an arrow A shown in FIG. 3 (a).
It is the figure seen from the direction of. Stereomicroscope 2 shown here
At 0 ', the observation light deflection reflection mirror 4 and the light shield 14 are
It is formed in a rectangular shape so that a light beam near the center of the illumination optical system (around the illumination optical axis) is emitted. According to this configuration,
The effect similar to that of the stereomicroscope 20 shown in FIGS. 2A and 2B is obtained, and the light near the center of the illumination luminous flux is used to reach the bottom even when observing an object with a narrow aperture. It is possible to provide sufficient illumination light and improve the observation accuracy.

FIG. 4 (a) is a diagram showing a second modification of this embodiment, and FIG. 4 (b) is an arrow A shown in FIG. 4 (a).
It is the figure seen from the direction of. Stereomicroscope 2 shown here
0 ″ is provided with the observation light deflecting / reflecting mirror 4 which is miniaturized to the extent that the observation light flux 16 having the necessary minimum size can be formed. By making the size smaller, the diameter of the observation light beam 16 is further reduced.Even with this configuration, the same effect as that of the stereoscopic microscope 20 shown in FIGS. Since the size of the mirror 4 is minimized (therefore, the light shield 14 can also be configured to be minimum), the illumination light is not shielded more than necessary, and therefore bright observation light can be obtained.

Third Embodiment FIG. 5 (a) is a sectional view taken along the optical axis showing the configuration of a stereomicroscope according to the present embodiment, and FIG. 5 (b) is an arrow A shown in FIG. 5 (a). It is the figure seen from the direction. The stereomicroscope 30 of the present embodiment includes an illumination optical system including illumination lenses 1a, 1b, 1c, a light guide 2, a reflection mirror 3 and an illumination light deflection reflection mirror 17, an observation light deflection reflection mirror 4 and an objective lens 5. It is composed of an observation optical system. still,
In FIG. 5A, the members after the objective lens 5 constituting the observation optical system are the same as those shown in the first and second examples, and are therefore omitted.

In this stereoscopic microscope 30, first, the light emitted from the light guide 2 is reflected by the reflection mirror 3 via the illumination lens 1a, passes through the illumination lenses 1b and 1c in order, and then a part of the light flux thereof is opened. The light passes through the portion 18a, passes through the cover glass 12, and is irradiated toward the observation object 13. Further, the remaining light flux is reflected on the back surface of the observation light deflection reflection mirror 4 and then again by the illumination light deflection reflection mirror 17 arranged above the observation light deflection reflection mirror 4 and passes through the opening 18b. It is transmitted through the cover glass 12 and irradiated toward the observation object 13. The observation object 13
The path followed by the observation light from is similar to that of the stereomicroscopes of the first and second embodiments, and the description thereof will be omitted. The observation light deflection reflection mirror 4 arranged in the illumination light path is provided with a light shielding portion 4a for preventing the illumination light emitted from the opening 18a from entering the observation light path. Also, the opening 18
A light-shielding plate 21 having an opening that does not cause eclipse of the observation light flux is provided in the observation light path that traverses the illumination light flux passing through b, and the illumination light flux is prevented from entering the observation light path around the opening. Protrusions 21a are provided for prevention.

According to this structure, substantially coaxial illumination can be achieved through the observation light path in the illumination light path, and the light passing through the illumination light path overlapping the observation light path is reflected by the observation light deflection reflection mirror 4.
Since the irradiation is performed toward the observation object 13 by the combination of the back surface of the above and the illumination light deflection reflection mirror 17, the loss of the light amount of the illumination light can be reduced. Also, in the stereoscopic microscope 30 of the present embodiment, the observation light deflecting / reflecting mirror 4 is rotatable as in the stereoscopic microscopes of the first and second embodiments. The tilt angle of the illumination light deflection reflection mirror 17 may be changed in synchronization with the change of the tilt angle. When the observation light deflection reflection mirror 4 is rotated to change the direction of the observation field, the illumination light reflected on the back surface of the observation light deflection reflection mirror 4 is reflected by the illumination light deflection reflection mirror 17, and then the observation light is reflected. It will be emitted in the direction opposite to the direction of the visual field. Therefore, in order to correct the illumination light so that it is emitted in front of the gabber glass 12 or in the direction of the observation visual field, the illumination light deflection reflection mirror 17 is also rotated in synchronization with the observation light deflection reflection mirror 4. The observation light deflection reflection mirror 4
In the above, if the portion that does not affect the reflected observation light is made of a transparent member, brighter illumination light can be emitted toward the observation object 13.

FIG. 6 (a) is a diagram showing a first modification of this embodiment, and FIG. 6 (b) is an arrow A shown in FIG. 6 (a).
It is the figure seen from the direction of. Stereomicroscope 3 shown here
In 0 ′, the objective lens 5 of the observation optical system is arranged between the light shielding plate 21 on the observation object 13 side of the observation light deflection reflection mirror 4, and also serves as the cover glass of the observation optical system.
Further, the objective lens 5 is detachable. According to this configuration, the stereoscopic microscope 30 shown in FIGS.
In addition to the same effect as above, since the objective lens 5 is arranged on the outer surface of the mirror body, it is easy to attach and detach, and by using a plurality of lenses having different focal lengths, it is possible to easily observe You can change the distance.

FIG. 7 (a) is a diagram showing a second modification of this embodiment, and FIG. 7 (b) is an arrow A shown in FIG. 7 (a).
It is the figure seen from the direction of. Stereomicroscope 3 shown here
At 0 ″, the observation light deflection reflection mirror 4 is placed against the lower surface of the opening of the illumination optical system so that the illumination light flux does not cross the observation optical path. Light emitted above the optical axis of the illumination lens 1c. Is emitted toward the observation object directly through the cover glass 12. Further, the light emitted below the optical axis is reflected by the back surface of the observation light deflection reflection mirror 4 and the illumination light deflection mirror 17. According to this configuration, the same effect as that of the stereomicroscope 30 shown in FIGS. 5A and 5B is obtained, and the observation optical system and the illumination optical system are provided. Since they are completely separated, it is possible to prevent flare and ghost from occurring in the observed image due to the illumination light.

In each of the embodiments described above, a variable working distance objective lens having a continuously changing focal length may be adopted as the objective lens 5 in the observation optical system, and such a complicated optical system is used. However, since the stereoscopic microscope of the present invention has the illumination optical system and the observation optical system separated from each other, there is no possibility that flare or ghost will occur in the observed image. Further, in the stereoscopic microscopes shown in the above-mentioned respective embodiments, the observation light deflecting / reflecting member is constituted by using the mirror, but instead of this, it may be constituted by the prism.

As described above, the stereomicroscope of the present invention has the following features (1) to (4) in addition to the features described in the claims.

(1) The stereomicroscope according to claim 3, wherein the illumination light is transmitted through a portion of the reflecting member which is not illuminated by the observation light beam.

(2) The direction of the observation field is changed by rotating the reflecting member, and the mirror for reflecting the illumination light is also rotated in synchronization with the reflecting member so that the direction of the illumination field can be changed. The stereomicroscope according to claim 3 or 4, characterized in that

(3) The objective lens of the observation optical system is detachable and replaceable with objective lenses having different focal lengths.
The stereoscopic microscope according to any one of (2).

(4) The objective lens of the observation optical system is a variable working distance objective lens whose focal length continuously changes, according to any one of claims 1 to 4 or (1) to (3). The stereoscopic microscope according to any one of claims.

[0030]

As described above, in the stereomicroscope of the present invention, the observation optical paths are mixed in the illumination optical path to form a substantially coaxial illumination optical system, so that the observation field of view is provided in the illumination field on the observation object plane. It can be positioned, and the vignetting of the illumination light does not occur to cause a shortage of the illumination light. Further, since the illumination optical system and the observation optical system are not shared, the illumination light does not directly enter the observation optical system, and it is possible to prevent flare and ghost from occurring in the observed image.

[Brief description of the drawings]

1A is a sectional view taken along the optical axis showing the configuration of a stereoscopic microscope according to a first embodiment, and FIG. 1B is a view seen from the direction of arrow A shown in FIG. .

2A is a sectional view taken along the optical axis showing the configuration of a stereoscopic microscope according to a second embodiment, and FIG. 2B is a view seen from the direction of arrow A shown in FIG. .

3A is a diagram showing a first modification of the second embodiment, and FIG. 3B is a diagram seen from the direction of arrow A shown in FIG.

4A is a diagram showing a second modification of the second embodiment, and FIG. 4B is a diagram seen from the direction of arrow A shown in FIG. 4A.

5A is a sectional view taken along the optical axis showing the configuration of a stereoscopic microscope according to a third embodiment, and FIG. 5B is a view seen from the direction of arrow A shown in FIG. .

6A is a diagram showing a first modification of the third embodiment, and FIG. 6B is a diagram seen from the direction of arrow A shown in FIG.

7A is a diagram showing a second modification of the third embodiment, and FIG. 7B is a diagram seen from the direction of arrow A shown in FIG. 7A.

FIG. 8A is a sectional view taken along the optical axis showing the configuration of an illumination optical system included in a conventional stereomicroscope, and FIG.
[Fig. 6] is a view seen from the direction of the arrow shown in (a).

FIG. 9 is a diagram for explaining the configuration of a conventional stereoscopic microscope.

[Explanation of symbols]

1a, 1b, 1c Illumination lens 2 Light guide 3 Reflection mirror 4 Observation light deflection reflection mirror 4a Light-shielding part 5 Objective lens 6,7 Prism 8 Variable magnification optical system 9 Pem splitter 10, 20, 20 ', 20 ", 30, 30 ', 30'
Stereomicroscope 11 Imaging lens 12 Cover glass 13 Observed object 14 Light-shielding body 15, 21a Projection 16 Observed light beam 17 Illumination light deflection reflection mirror 18a, 18b Opening 21 Light-shielding plate

Claims (4)

[Claims] 1. A stereomicroscope having an observation optical system and an illumination optical system in a mirror body, wherein the observation optical system and the illumination optical system are each constituted by an independent optical system, and observation is made on a part of an illumination optical path. A stereoscopic microscope including a substantially coaxial illumination optical system including an optical path and an observation field of view located in an illumination field. 2. A reflection member for deflecting the observation optical path to the outside of the illumination optical path is provided on the observation object side of the illumination optical system, and the observation object is illuminated from behind the reflection member. Item 3. The stereoscopic microscope according to Item 1. 3. The reflecting member is composed of a mirror,
3. The stereoscopic microscope according to claim 2, further comprising a reflection mirror that deflects the illumination light reflected by the back surface of the reflection member so as to be emitted toward the observation object. 4. The stereomicroscope according to claim 2, wherein the direction of the observation visual field can be changed by rotating the reflecting member.