JPH09159012A - Carrying device used in vacuum - Google Patents

Abstract

PROBLEM TO BE SOLVED: To hardly damage the rotational supporter of a pulley in a long term. SOLUTION: A wire for driving a movable body in a carrying device used in a vacuum is hung to a pulley 20 which is made of synthetic resin, for example Teflon. A shaft pin 9 is inserted in the shaft hole of the pulley and both can be rotated relatively. The shaft pin is pivoted rotatably by a bearing 21 supported by a pulley holder 11 and the bearing is made of synthetic resin, for example Teflon.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a transfer device used in an ultrahigh vacuum device such as a molecular beam epitaxy device.

[0002]

2. Description of the Related Art In a molecular beam epitaxy apparatus, a transfer robot and a transfer apparatus are used to transfer a film formation substrate in an ultrahigh vacuum region. FIG. 2 is a principle block diagram of an example of such a transport device. The first movable body 2 having the mounting portion of the film formation substrate 1 at its tip is movably arranged with respect to the second movable body 3, and the second movable body is relative to a fixed body (not shown). It is movable, and pulleys 4 and 5 are attached to the front and rear ends of the second movable body, and a wire 6 is stretched around these pulleys. In this wire, point A in the lower part is connected to the fixed body or the fixed point, and point B in the upper part.
The point is connected to the first movable body 1. A rack gear 7 is provided on the second movable body 2, and an operating pinion gear 8 pivotally supported by a fixed body (not shown) is meshed with the rack gear portion. When the second movable body 3 is moved by rotating the pinion gear 8, the movable body and the wire 6 relatively move, and the first movable body 1 coupled to the wire moves to the second movable body. Move further with respect to the body.

FIG. 3 is a structural view of the supporting mechanism portion of the pulleys 4 and 5, in which (a) is a sectional view and (b) is a side view.
Pulleys 4 and 5 around which the wire 6 is stretched are rotatably attached to a shaft pin 9 by a bearing 10, and the shaft pin 9 is fixedly supported by a pulley holder 11.

[0004]

As shown in FIG. 3, since the pulleys 4 and 5 are supported by the rolling bearing type bearing 10, they can normally rotate smoothly, but molecular beam epitaxy is possible. The friction coefficient between metals becomes large under a high vacuum such as a device, and the bearing that can be used for the carrier device in the molecular beam epitaxy device has a small diameter, and because it cannot use lubricating oil, it is poor in durability and has a poor rotational support. It causes irreparable damage and bearings must be replaced regularly. If the bearing 10 is damaged, the pulleys 4 and 5 will lock and will not rotate,
This further leads to a trouble such as disconnection of the wire 6.

It is an object of the present invention to provide a conveyor device for use in a vacuum equipped with a pulley mechanism that can be used for a long period of time, while supporting the rotation of a pulley without using a bearing.

[0006]

A transport device used in a vacuum according to the present invention is a transport device used in a vacuum in which a movable body is driven via a wire suspended on a pulley,
The pulley is made of synthetic resin, and a shaft pin fitted in a shaft hole formed in the pulley is fitted and supported by a bearing made of synthetic resin supported by a pulley holder. The shaft pin and the bearing are rotatable relative to each other.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION With respect to the rotation support of the pulley in a conveying device used in a vacuum in which a movable body is driven through a wire wound around a pulley, metal is not brought into contact with each other, and a plurality of rollers are supported. Do it in place. That is, the pulley is made of synthetic resin and has a small coefficient of friction, for example, Teflon. The shaft pin fits into the shaft hole of the pulley, and the pulley is rotatable with respect to the shaft pin. The shaft pin is rotatably fitted and supported by a bearing made of synthetic resin, for example, Teflon, and the bearing is supported by a pulley holder. The shaft pin and pulley holder are the same as before,
It is made of metal.

Since no metal bearing is used, damage is unlikely to occur for a long period of time, and the pulley and the shaft pin and the shaft pin and the bearing can rotate relative to each other. Since it can be rotationally supported by, it is possible to prevent the pulley from being locked.

[0009]

Embodiments of the present invention will be described with reference to the drawings. 1A and 1B are configuration diagrams of a support mechanism portion of a pulley used in a transport device, FIG. 1A is a cross-sectional view, and FIG. 1B is a side view, and the principle configuration of the transport device itself is the same as that shown in FIG. is there. The same reference numerals as those in FIGS. 1 and 2 denote the same parts.

The pulley 20 is made of a synthetic resin having a small coefficient of friction, for example, Teflon, and has a wire 6 for driving a movable body in a conveying device used in vacuum. The shaft pin 9 made of metal is fitted in the shaft hole of the pulley 20, and the pulley and the shaft pin are relatively rotatable. The shaft pin 9 is rotatably supported by a bearing 21 supported by a pulley holder 11. The bearing is made of synthetic resin having a small friction coefficient, for example, Teflon, and the pulley holder is made of metal.

The pulley 20 is different from the pulley holder 11 in that
Since the pulley and the shaft pin 9 and the shaft pin and the bearing 21 are rotatably supported at two places, the pulley can be kept rotating at any one place after being locked at any one place. Further, the bearing 21 may be rotatably supported by the pulley holder 11.

[0012]

Since the present invention is configured as described above, the rotary support portion of the pulley in the conveying device used in vacuum does not utilize the contact between the metals, but the pulley and the bearing made of synthetic resin. Since it is configured by using it, it is less likely to be damaged for a long period of time.Because the pulley and the shaft pin and the shaft pin and the bearing can rotate relative to each other, the rotation of the pulley at least in any of these places Since it can be maintained, the pulley can be prevented from locking.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a main part of an embodiment of the present invention and a structure of a supporting mechanism part of a pulley used in a conveying device.
(B) is a side view.

FIG. 2 is a principle configuration diagram of an example of a carrier device used in a molecular beam epitaxy device.

3A and 3B are diagrams showing a configuration of a support mechanism portion of a pulley in the transport device of FIG. 2, FIG. 3A being a sectional view and FIG.

[Explanation of symbols]

 2, 3 Movable body 4, 5 Pulley 6 Wire 7 Rack gear 8 Pinion gear 9 Axis pin 11 Pulley holder 20 Synthetic resin pulley 21 Synthetic resin bearing

Claims (1)

[Claims] 1. A transport device used in a vacuum in which a movable body is driven via a wire wound around a pulley, wherein the pulley is made of synthetic resin and is fitted in a shaft hole formed in the pulley. In a vacuum, characterized in that the shaft pin is engaged with and supported by a synthetic resin bearing supported by a pulley holder, and the pulley and the shaft pin, and the shaft pin and the bearing are rotatable relative to each other. Conveyor used in.