JPH09141035A - Device to remove siloxane - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily remove siloxane in air by changing gaseous siloxane into a particulate state. SOLUTION: Gaseous siloxane is scattered in a clean room 10 from a silicone gel 11 and a silicone seal 9 which are used to tightly seal the clean room 10. By disposing an electrode body 1 having a discharge electrode 2 between an air blower 4A and a high-performance filter 3 in the clean room 10, the gaseous siloxane is changed into a particulate state and then collected by the high- performance filter 3 in the succeeding stage.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a siloxane removing device for cleaning air.

[0002]

BACKGROUND ART Gaseous siloxane is most often generated from sealing materials such as silicon sealants and silicon gels used for the purpose of maintaining airtightness in a clean room. It is said that there is a problem of changing from hydrophilic to hydrophobic. An air cleaning system is mainly used for cleaning a clean room.

The air cleaning system has an air blowing function for supplying air to a clean space, and a high performance filter for removing dust, and an impurity collecting function such as a chemical filter for removing chemical liquid components in the air. And have.

[0004]

In this conventional air cleaning system, it was difficult to remove the gaseous siloxane component.

As described in JP-A-60-222144, ferrous sulfate and ferric sulfate are known as substances that adsorb siloxane. These substances are used in the filter of an air cleaning system. To hold and use
This is extremely difficult to realize because of the drawbacks such as difficulty in blowing air due to pressure loss and the like.

An object of the present invention is to provide a siloxane removing device which can easily remove siloxane contained in air.

[0007]

The siloxane removing apparatus of the present invention comprises an electrode section for changing the gaseous siloxane into fine particles and a collecting section for removing the changed fine particles.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings. FIG. 1 is a sectional view of a siloxane removing device for explaining a first embodiment of the present invention.

In FIG. 1, the siloxane removing device is a grid-shaped electrode body 1 fixed to a pedestal 6 and having a plurality of gaps for allowing air containing siloxane to pass therethrough and connected to an AC power source (not shown). A needle-shaped discharge electrode 2 (for example, a diameter of about 0.5 mm, a length of 3 to 3) provided below the electrode body 1.
5 mm) and a high-performance filter 3 (for example, ultra-ULPA, ULPA, HEPA filter) for collecting siloxane that has been made into fine particles by discharge from the discharge electrode.

The siloxane removing device thus constructed is installed in, for example, a clean room, and a voltage is applied to the electrode body 1 to rotate the blower 4 to send air 5, which has been generated and circulated in the clean room. Gaseous siloxane passes through the electrode body 1, changes into fine particles, and is collected by the high-performance filter 3. As a result, the siloxane component in the clean room can be removed.

FIG. 2 is a sectional view for explaining the second embodiment of the present invention, showing a case where the siloxane removing apparatus of the present invention is incorporated in a clean room.

The clean room 10 has a blower 4A for sending the air 5 to the clean space 12, a system ceiling 7 for preventing untreated air from leaking from the pressurized ceiling, and a siloxane and a dust attached to this ceiling for removing siloxane and dust. It is mainly composed of a high performance filter 3 for performing.

On the other hand, in the clean room 10, the silicon gel 11 filling the system ceiling 7 and the partition 8
Gaseous siloxane is scattered from the silicon seal 9 that prevents leakage from the connection part of the. An electrode body 1 having a discharge electrode 2 for changing the gaseous siloxane into fine particles is installed between the blower 4A and the high performance filter 3. Therefore, by applying a voltage to the electrode body 1 and rotating the blower, the inside of the clean room 10 can be made a clean space 12.

In the above-mentioned embodiment, the electrode main body is described as a grid type, but it may be a mesh type or may be composed of a plurality of metal wires stretched in parallel.

[0015]

As described above, according to the present invention, the electrode portion for changing the gaseous siloxane into fine particles and the collecting portion for removing the changed fine particles are used to easily remove the siloxane component. The effect is that a siloxane removing device that can remove the siloxane can be obtained.

[Brief description of the drawings]

FIG. 1 is a sectional view for explaining a first embodiment of the present invention.

FIG. 2 is a sectional view for explaining a second embodiment of the present invention.

[Explanation of symbols]

 1 Electrode Main Body 2 Discharge Electrode 3 Filter 4, 4A Blower 5 Air 6 Stand 7 System Ceiling 8 Partition 9 Silicon Seal 10 Clean Room 11 Silicon Gel 12 Clean Space

Claims (4)

[Claims] 1. A siloxane removing device for converting siloxane existing in a gaseous state into fine particles and collecting the fine particles of the siloxane by a filter. 2. An electrode body having a plurality of gaps for allowing air containing siloxane to pass therethrough, a needle-shaped discharge electrode provided under the electrode body, an AC power source connected to the electrode body, and the discharge. A siloxane removing device, comprising: a filter for collecting siloxane that has been made into fine particles by discharge from an electrode. 3. The siloxane removing device according to claim 2, wherein the electrode body is formed in a mesh shape or a grid shape. 4. The siloxane removing device according to claim 2, wherein the electrode body is composed of a plurality of metal wires stretched in parallel.