JPH09138304A - Mirror in changeable shape - Google Patents
Mirror in changeable shapeInfo
- Publication number
- JPH09138304A JPH09138304A JP31854895A JP31854895A JPH09138304A JP H09138304 A JPH09138304 A JP H09138304A JP 31854895 A JP31854895 A JP 31854895A JP 31854895 A JP31854895 A JP 31854895A JP H09138304 A JPH09138304 A JP H09138304A
- Authority
- JP
- Japan
- Prior art keywords
- reflecting mirror
- mirror
- actuator
- pin
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、形状可変鏡に係
り、特に、大気の揺らぎや光学鏡の変形等により生じた
光波面の歪を補正する補償光学系の主要構成機器として
の形状可変鏡に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a variable shape mirror, and more particularly, to a variable shape mirror as a main component of an adaptive optics system for correcting distortion of an optical wavefront caused by atmospheric fluctuations, deformation of an optical mirror, or the like. Regarding
【０００２】[0002]
【従来の技術】光学系の補償光学は、送信光学系におけ
る光の伝播性能の改善や受信光学系の受信光回折限界像
取得のための光学技術である。レーザーシステムにおけ
る応用例としては、レーザービームの質改善や集光性能
改善、レーザー通信、高性能レーザー測距装置などが考
えられる。また、受信光学系への応用では、大型天体望
遠鏡の観測像の高分解能化やリモートセンシングにおけ
る受信画像の高分解能化などが考えられる。この補償光
学系において、形状可変鏡は必要不可欠な構成機器の一
つである。一例として、受信光学系における補償光学系
の概要図を図２に示す。この補償光学系は、大気の揺ら
ぎ等により乱れた光波面１０が補償光学系の形状可変鏡
９に入射してきた時、ハーフミラー１３から光波面検出
器１１により光波面の歪量を検出し、この歪を極小化す
るように制御装置１２が形状可変鏡９を駆動して乱れ
（光路差）を補正するシステムである。光路差の補正
は、アクチュエータを作動させて形状可変鏡９の鏡面形
状を任意に変えて行う。ハーフミラー１３を通過した光
波面１０は、集光レンズ１４を経て観測装置１５に入力
する。従来の補償光学系用の形状可変鏡としては、特開
平６−８２７０６号公報において論じられ、また、「光
学」第２３巻３号（１９９４年３月）第１８３頁から第
１８４頁において論じられている。これらは反射鏡裏面
にアクチュエータを接着剤あるいはマグネットで取り付
けてある。2. Description of the Related Art The adaptive optics of an optical system is an optical technique for improving light propagation performance in a transmission optical system and obtaining a received light diffraction limit image of a reception optical system. Examples of applications in laser systems include laser beam quality improvement, focusing performance improvement, laser communication, and high-performance laser range finder. Moreover, in the application to the receiving optical system, it is possible to increase the resolution of the observation image of a large astronomical telescope and the resolution of the reception image in remote sensing. The deformable mirror is one of the essential components in this adaptive optics system. As an example, FIG. 2 shows a schematic diagram of an adaptive optics system in a receiving optical system. This adaptive optics system detects the amount of distortion of the optical wavefront by the optical wavefront detector 11 from the half mirror 13 when the optical wavefront 10 disturbed by atmospheric fluctuations or the like enters the variable shape mirror 9 of the adaptive optics system. In this system, the control device 12 drives the deformable mirror 9 so as to minimize this distortion and corrects the disturbance (optical path difference). The correction of the optical path difference is performed by operating the actuator to arbitrarily change the mirror surface shape of the deformable mirror 9. The light wavefront 10 that has passed through the half mirror 13 is input to the observation device 15 via the condenser lens 14. A conventional deformable mirror for an adaptive optics system is discussed in Japanese Patent Application Laid-Open No. 6-82706, and also in "Optics" Vol. 23, No. 3 (March 1994), pages 183 to 184. ing. These have an actuator attached to the back surface of the reflecting mirror with an adhesive or a magnet.
【０００３】[0003]
【発明が解決しようとする課題】上記の形状可変鏡にお
いては、反射鏡面を光の波長オーダで、かつ、高速に変
形させる必要がある。しかし、従来の技術では、反射鏡
とアクチュエータの取り付けがマグネット方式あるいは
接着方式であったために、特に高周波のアクチュエータ
の作動に対して、反射鏡の変形が十分に追従できなかっ
たり、取付部が剥離することが予想される。また、接着
方式では部品交換が必要になった場合、手間と時間を要
すると共に、当初維持していた反射鏡の面精度が著しく
低下（うねりが増大）していた。さらに、高い鏡面精度
を出すために、アクチュエータに反射鏡を取り付けた
後、鏡面の切削あるいは研磨を行っていたが、反射鏡の
厚さが極めて薄いために、反射鏡裏面の支持状態の違い
により、加工時の面圧の負荷が異なることとなり、反射
鏡の厚さが不均一になり、反射鏡面にうねりが発生する
という問題があった。In the above variable shape mirror, it is necessary to deform the reflecting mirror surface at a high speed at the wavelength order of light. However, in the conventional technology, since the reflection mirror and the actuator are attached by the magnet method or the adhesion method, the deformation of the reflection mirror cannot be sufficiently tracked or the attachment part is peeled off especially when the actuator is operated at high frequency. Expected to do. Further, in the bonding method, when parts replacement is required, it takes time and labor, and the surface accuracy of the reflecting mirror that is initially maintained is significantly reduced (waviness increases). Furthermore, in order to obtain high mirror surface accuracy, the mirror surface was cut or polished after the mirror was attached to the actuator.However, since the thickness of the mirror is extremely thin, there is a difference in the support state on the back surface of the mirror. However, since the load of the surface pressure at the time of processing is different, the thickness of the reflecting mirror becomes non-uniform, and there is a problem that undulation occurs on the reflecting mirror surface.
【０００４】本発明の課題は、上述した事情に鑑み、反
射鏡とアクチュエータとの固定部分を改善し、反射鏡の
鏡面変形の柔軟性の向上、形状可変鏡の応答速度の向上
及び耐久性の向上を図るとともに、形状可変鏡の組立・
保守時の作業性を向上させ、かつ、反射鏡面を常に高精
度に維持するに好適な形状可変鏡を提供することにあ
る。In view of the above-mentioned circumstances, an object of the present invention is to improve the fixed portion between the reflecting mirror and the actuator, to improve the flexibility of the mirror surface deformation of the reflecting mirror, to improve the response speed of the deformable mirror, and to improve the durability. Assembling the deformable mirror while improving
An object of the present invention is to provide a deformable mirror suitable for improving workability during maintenance and always maintaining the reflecting mirror surface with high accuracy.
【０００５】[0005]
【課題を解決するための手段】上記課題を解決するた
め、反射鏡と、反射鏡裏面に反射鏡と一体的に形成し、
小断面積部を有するピンと、このピンと機械的に固定し
て接合するアクチュエータと、反射鏡表面の切削あるい
は研磨時に、ハウジング内をスライドして前記反射鏡裏
面に押し当てる当板からなる。In order to solve the above-mentioned problems, a reflecting mirror and a reflecting mirror are integrally formed on the rear surface of the reflecting mirror,
It consists of a pin having a small cross-sectional area, an actuator that is mechanically fixed and joined to this pin, and an abutting plate that slides in the housing and presses against the back surface of the reflecting mirror when the surface of the reflecting mirror is cut or polished.
【０００６】[0006]
【発明の実施の形態】以下、本発明の実施形態について
図面を用いて説明する。図１は、本発明の一実施形態を
示す形状可変鏡の基本構成要素図である。変形可能な反
射鏡１の裏面に複数個のアクチュエータ３を配置し、こ
のアクチュエータ３を反射鏡１と一体物として成形した
ピン２、及びプッシャー４を介して反射鏡１と連結す
る。さらに、反射鏡１の裏面には、アクチュエータ３を
取り付けた領域に穴が開けられた当板６を挿入する。反
射鏡１と連結されているアクチュエータ３と当板６は、
ハウジング５及びバックプレート７に囲まれた内部に納
め、アクチュエータ３をバックプレート７に固定する。
当板６は、反射鏡面に対して垂直方向に取り付けたバー
８に固定し、このバー８を上下に動かすことによってハ
ウジング５内を自由にスライドできる構造とする。い
ま、アクチュエータ３に駆動信号を入力すると、アクチ
ュエータ３は伸縮運動し、結果的に薄い反射鏡面がアク
チュエータ３の動きに連動して変形する。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a basic component diagram of a deformable mirror showing an embodiment of the present invention. A plurality of actuators 3 are arranged on the back surface of the deformable reflecting mirror 1, and the actuators 3 are connected to the reflecting mirror 1 via a pin 2 and a pusher 4, which are molded integrally with the reflecting mirror 1. Further, on the back surface of the reflecting mirror 1, a contact plate 6 having a hole formed in the area where the actuator 3 is attached is inserted. The actuator 3 and the contact plate 6 connected to the reflecting mirror 1 are
The actuator 3 is fixed inside the housing surrounded by the housing 5 and the back plate 7, and the actuator 3 is fixed to the back plate 7.
The contact plate 6 is fixed to a bar 8 attached in a direction perpendicular to the reflecting mirror surface, and is structured to be freely slidable in the housing 5 by moving the bar 8 up and down. Now, when a drive signal is input to the actuator 3, the actuator 3 expands and contracts, and as a result, the thin reflecting mirror surface is deformed in conjunction with the movement of the actuator 3.
【０００７】図３は、本実施形態の反射鏡１とアクチュ
エータ３との接合部の詳細図である。反射鏡裏面に設け
るピン２は、反射鏡１と一体物として成形し、また、ピ
ン２の根元部を細くくびれた形状とする。アクチュエー
タ３とプッシャー４とは接着等により取り付け、プッシ
ャー４とピン２とはネジ１６によって締結し、機械的に
固定する。本実施形態によれば、反射鏡１の裏面に一体
的に成形するピン２を設け、このピン２を介して反射鏡
１とアクチュエータ３を接合するため、アクチュエータ
３と反射鏡１の接合部が鏡面変形によって破断・分離す
ることなく、反射鏡１とアクチュエータ３の接合部の強
度及び耐久性を向上させることになる。また、アクチュ
エータ３の高周波振動に対して、ピン２の根元部を細く
くびれた形状つまり小断面積部とするため、アクチュエ
ータ３の太さに関係なく、反射鏡１の反射鏡面をアクチ
ュエータ３の伸縮に的確にかつ自在に応答して変形させ
ることになる。さらに、アクチュエータ３とピン２を機
械的に固定するため、アクチュエータ３の取付けや取外
しが容易にかつ短時間で行うことが可能になり、形状可
変鏡の組立て時及びメンテナンス時の作業効率が向上す
る。FIG. 3 is a detailed view of the joint between the reflecting mirror 1 and the actuator 3 of this embodiment. The pin 2 provided on the rear surface of the reflecting mirror is formed integrally with the reflecting mirror 1, and the root portion of the pin 2 has a thin and narrow shape. The actuator 3 and the pusher 4 are attached by adhesion or the like, and the pusher 4 and the pin 2 are fastened with a screw 16 and mechanically fixed. According to the present embodiment, the integrally molded pin 2 is provided on the back surface of the reflecting mirror 1, and the reflecting mirror 1 and the actuator 3 are joined via the pin 2, so that the joint portion between the actuator 3 and the reflecting mirror 1 is formed. The strength and durability of the joint between the reflecting mirror 1 and the actuator 3 are improved without breaking or separating due to mirror deformation. Further, since the root of the pin 2 has a thin, narrowed shape, that is, a small cross-sectional area portion against high frequency vibration of the actuator 3, the reflecting mirror surface of the reflecting mirror 1 expands and contracts regardless of the thickness of the actuator 3. Will be deformed in response to the target accurately and freely. Further, since the actuator 3 and the pin 2 are mechanically fixed, the actuator 3 can be easily attached and detached in a short time, and the work efficiency at the time of assembling and maintaining the deformable mirror is improved. .
【０００８】次に、当て板５を使用する実施形態を図４
を用いて説明する。（ａ）に示すように、当板６は、反
射鏡１の裏面に設置し、ハウジング５内を反射鏡面に対
して垂直方向にスライド可能な構造とする。形状可変鏡
用の反射鏡１は薄いために、外力（例えば、研磨する
際）が反射鏡表面に加わると、（ｂ）に示すように、た
わみが生じてしまう。しかし、（ｃ）に示すように、反
射鏡裏面に当板６を押し当てると、外力が生じても反射
鏡がたわむことがない。本実施形態によれば、形状可変
鏡を組み立てた後に反射鏡１の表面を研磨する場合にお
いて、当板６を押し当てることにより、切削力による反
射鏡１のたわみを抑えて表面を加工することが可能とな
り、反射鏡面を常に高精度に維持することができる。ま
た、メンテナンスには、特別な治具を用いることなく、
鏡面が加工できるため、作業性の向上が図れる。Next, an embodiment using the backing plate 5 is shown in FIG.
This will be described with reference to FIG. As shown in (a), the contact plate 6 is installed on the back surface of the reflecting mirror 1 and has a structure capable of sliding inside the housing 5 in a direction perpendicular to the reflecting mirror surface. Since the reflecting mirror 1 for the deformable mirror is thin, when an external force (for example, during polishing) is applied to the reflecting mirror surface, bending occurs as shown in (b). However, as shown in (c), when the contact plate 6 is pressed against the back surface of the reflecting mirror, the reflecting mirror does not bend even if an external force is generated. According to the present embodiment, when the surface of the reflecting mirror 1 is polished after the variable shape mirror is assembled, the contact plate 6 is pressed to suppress the bending of the reflecting mirror 1 due to the cutting force to process the surface. Therefore, the reflecting mirror surface can always be maintained with high accuracy. Also, without using a special jig for maintenance,
Since the mirror surface can be processed, workability can be improved.
【０００９】[0009]
【発明の効果】以上説明したように、本発明によれば、
反射鏡の裏面に一体的に成形するピンを設け、このピン
を介して反射鏡とアクチュエータを接合することによ
り、形状可変鏡の強度及び耐久性を向上させることがで
きる。また、ピンの根元部を小断面積部とすることによ
り、アクチュエータ３の高周波振動に対して、反射鏡１
の反射鏡面をアクチュエータ３の伸縮に的確にかつ自在
に応答して変形させ、この結果、反射鏡の鏡面変形の柔
軟性の向上、ひいては、形状可変鏡の応答速度の向上を
図ることができる。また、アクチュエータとピンを機械
的に固定することにより、アクチュエータ３の取付けや
取外しが容易にかつ短時間で行うことが可能になり、形
状可変鏡の組立て時及びメンテナンス時の作業効率の向
上を図ることができる。また、当板を反射鏡の裏面に設
置することにより、外力による反射鏡１のたわみを抑え
て表面を加工することが可能となり、反射鏡面を常に高
精度に維持することができる。また、メンテナンスに
は、特別な治具を用いることなく、鏡面が加工できるた
め、作業性の向上を図ることができる。As described above, according to the present invention,
By providing a integrally molded pin on the back surface of the reflecting mirror and joining the reflecting mirror and the actuator via this pin, the strength and durability of the deformable mirror can be improved. In addition, by making the root portion of the pin a small cross-sectional area portion, the reflecting mirror 1 against high frequency vibration of the actuator 3
The reflecting mirror surface can be accurately and freely deformed in response to expansion and contraction of the actuator 3, and as a result, the flexibility of the mirror surface deformation of the reflecting mirror can be improved, and the response speed of the deformable mirror can be improved. Further, by mechanically fixing the actuator and the pin, the actuator 3 can be easily attached and detached in a short time, and the work efficiency at the time of assembling and maintaining the deformable mirror is improved. be able to. Also, by disposing the contact plate on the back surface of the reflecting mirror, it becomes possible to suppress the bending of the reflecting mirror 1 due to an external force and to process the surface, and the reflecting mirror surface can always be maintained with high accuracy. Further, since the mirror surface can be processed for maintenance without using a special jig, workability can be improved.
【図１】本発明の形状可変鏡の基本構成要素図である。FIG. 1 is a basic component diagram of a deformable mirror of the present invention.
【図２】形状可変鏡を用いた補償光学系の概略図であ
る。FIG. 2 is a schematic diagram of an adaptive optics system using a deformable mirror.
【図３】反射鏡とアクチュエータとの結合部の詳細図で
ある。FIG. 3 is a detailed view of a connecting portion between a reflecting mirror and an actuator.
【図４】当板を利用した実施形態を示した図である。FIG. 4 is a view showing an embodiment using a contact plate.
１ 反射鏡 ２ ピン ３ アクチュエータ ４ プッシャー ５ ハウジング ６ 当板 ７ バックプレート ８ バー ９ 形状可変鏡 １０ 乱れた光波面 １１ 光波面検出器 １２ 制御装置 １３ ハーフミラー １４ 集光レンズ １５ 観測装置 １６ ネジ 1 Reflector 2 Pin 3 Actuator 4 Pusher 5 Housing 6 This Plate 7 Back Plate 8 Bar 9 Deformable Mirror 10 Disturbed Light Wavefront 11 Light Wavefront Detector 12 Control Device 13 Half Mirror 14 Condenser Lens 15 Observer 16 Screw
Claims (5)
出し、この歪を補正するように駆動される形状可変鏡に
おいて、反射鏡裏面に反射鏡と一体的に形成するピン
と、このピンとアクチュエータを機械的に固定して接合
することを特徴とする形状可変鏡。1. A variable shape mirror that is driven so as to detect the distortion of the light wavefront when the light wavefront is incident and correct the distortion, and a pin formed integrally with the reflecting mirror on the rear surface of the reflecting mirror. A deformable mirror characterized by mechanically fixing and joining a pin and an actuator.
を有し、この小断面積部を介して反射鏡裏面に接合する
ことを特徴とする形状可変鏡。2. The deformable mirror according to claim 1, wherein the pin has a small cross-sectional area portion and is joined to the rear surface of the reflecting mirror via the small cross-sectional area portion.
反射鏡裏面に対して垂直に取り付けられることを特徴と
する形状可変鏡。3. The actuator according to claim 1, wherein the actuator is
A variable shape mirror that is mounted perpendicular to the back surface of the reflecting mirror.
容するハウジングを設け、このハウジング内をスライド
する当板を設置し、反射鏡表面の切削あるいは研磨時
に、前記当板を反射鏡裏面に押し当てることを特徴とす
る形状可変鏡。4. The housing according to claim 1, wherein a housing for accommodating the actuator is provided, and a contact plate that slides in the housing is installed, and the contact plate is pressed against the back surface of the reflector when cutting or polishing the surface of the reflector. Deformable mirror characterized by.
に形成し、小断面積部を有するピンと、前記反射鏡裏面
に対して垂直に取り付けられるとともに、前記ピンと機
械的に固定して接合するアクチュエータと、このアクチ
ュエータを収容するハウジングと、反射鏡表面の切削あ
るいは研磨時に、前記ハウジング内をスライドして前記
反射鏡裏面に押し当てる当板と、前記アクチュエータを
固定するバックプレートからなることを特徴とする形状
可変鏡。5. A reflecting mirror, a pin integrally formed with the reflecting mirror on the back surface of the reflecting mirror, and a pin having a small cross-sectional area portion. The pin is mounted perpendicular to the back surface of the reflecting mirror and mechanically fixed to the pin. An actuator that is joined together, a housing that accommodates the actuator, a contact plate that slides in the housing and presses against the back surface of the reflecting mirror when the surface of the reflecting mirror is cut or polished, and a back plate that fixes the actuator. A deformable mirror characterized in that
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31854895A JPH09138304A (en) | 1995-11-13 | 1995-11-13 | Mirror in changeable shape |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31854895A JPH09138304A (en) | 1995-11-13 | 1995-11-13 | Mirror in changeable shape |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09138304A true JPH09138304A (en) | 1997-05-27 |
Family
ID=18100365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31854895A Pending JPH09138304A (en) | 1995-11-13 | 1995-11-13 | Mirror in changeable shape |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09138304A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006194783A (en) * | 2005-01-14 | 2006-07-27 | Nikon Corp | Measuring apparatus and its adjustment method |
| JP2012018290A (en) * | 2010-07-08 | 2012-01-26 | Mitsubishi Electric Corp | Deformable mirror |
| CN103278924A (en) * | 2012-12-28 | 2013-09-04 | 清华大学 | Driving device and displacement transmitting component |
-
1995
- 1995-11-13 JP JP31854895A patent/JPH09138304A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006194783A (en) * | 2005-01-14 | 2006-07-27 | Nikon Corp | Measuring apparatus and its adjustment method |
| JP4639808B2 (en) * | 2005-01-14 | 2011-02-23 | 株式会社ニコン | Measuring apparatus and adjustment method thereof |
| JP2012018290A (en) * | 2010-07-08 | 2012-01-26 | Mitsubishi Electric Corp | Deformable mirror |
| CN103278924A (en) * | 2012-12-28 | 2013-09-04 | 清华大学 | Driving device and displacement transmitting component |
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