JPH09137276A - Method for removing iron component from electroless copper plating liquid - Google Patents

Method for removing iron component from electroless copper plating liquid

Info

Publication number
JPH09137276A
JPH09137276A JP29263995A JP29263995A JPH09137276A JP H09137276 A JPH09137276 A JP H09137276A JP 29263995 A JP29263995 A JP 29263995A JP 29263995 A JP29263995 A JP 29263995A JP H09137276 A JPH09137276 A JP H09137276A
Authority
JP
Japan
Prior art keywords
plating
liquid
plating liquid
electroless copper
permeated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29263995A
Other languages
Japanese (ja)
Inventor
Tatsuya Uchida
達也 内田
Satoshi Akazawa
諭 赤沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP29263995A priority Critical patent/JPH09137276A/en
Publication of JPH09137276A publication Critical patent/JPH09137276A/en
Pending legal-status Critical Current

Links

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  • Separation Using Semi-Permeable Membranes (AREA)
  • Chemically Coating (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

PROBLEM TO BE SOLVED: To suppress the occurrence of the gritty texture of a product by withdrawing a part of an electroless copper plating liquid from a plating cell, subjecting this liquid to circulation filtration in a filter device provided with an ultrafilter membrane and returning the permeated plating liquid to this plating cell. SOLUTION: A part of the plating liquid is withdrawn by a withdrawing pump 3 from the electroless plating cell 2 and is introduced into a filtering and circulating vessel 4. The plating liquid is continuously passed through the ultrafilter membrane 6 by an ultrafiltering and circulating pump 5. The permeated liquid 7 permeated through the filter membrane 6 is returned to the plating cell 2. The different metals concentrated and left in the circulating vessel 4 are discharged as the concd. plating liquid 8 to the outside of the system while the introduction of the plating liquid is temporarily stopped. Since the ultrafilter member has a very small pore size, the superfine particulates of the iron components in the plating liquid are removable. The ultrafilter membrane is of a cross flow filtration system and is, therefore, hardly clogged. The troubles, such as intrusion of the different metals into the plating liquid to contaminate the liquid with these metals and particularly the degradation in the plating rate by the contamination with the iron component and liquid dissolution, are prevented.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、プリント配線板やプラ
スチックの無電解銅めっき液中の、めっき阻害物質であ
る鉄成分を除去する方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for removing an iron component which is a plating inhibiting substance in an electroless copper plating solution for printed wiring boards and plastics.

【0002】[0002]

【従来の技術】従来、プリント配線板の回路形成やプラ
スチックの導電処理として、無電解銅めっきが多用され
てきた。この無電解銅めっき法は、一般的に次式により
銅イオンを銅箔や銅配線回路として析出させるものであ
る。
2. Description of the Related Art Conventionally, electroless copper plating has been widely used for forming circuits on printed wiring boards and conducting plastics. This electroless copper plating method generally deposits copper ions as a copper foil or a copper wiring circuit according to the following equation.

【0003】[0003]

【化1】CuSO4+2HCHO+4NaOH → Cu+Na2SO4+2HCOO
Na+2H2O+H2
[Chemical 1] CuSO 4 + 2HCHO + 4NaOH → Cu + Na 2 SO 4 + 2HCOO
Na + 2H 2 O + H 2

【0004】製品となる析出銅箔の特性は、硫酸ナトリ
ウム(Na2SO4)や蟻酸ナトリウム等の反応生成物の
蓄積や、基材であるプラスチック樹脂からの有機物の溶
出、さらには生産環境からの塵埃の混入等により影響を
受けるとされる。特に、原材料や環境の塵埃に起因する
異種金属の混入汚染は、めっきの析出速度の低下やめっ
き液の不安定化、強いてはめっきの異常析出等、めっき
特性や外観等へ悪影響を与えるため何らかの除去技術が
望まれていた。
The characteristics of the deposited copper foil as a product are that the accumulation of reaction products such as sodium sulfate (Na 2 SO 4 ) and sodium formate, the elution of organic substances from the plastic resin as the base material, and the production environment. It is said to be affected by the inclusion of dust, etc. In particular, contamination due to mixing of dissimilar metals caused by raw materials and environmental dust has a negative effect on the plating characteristics and appearance, such as a decrease in the plating deposition rate, instability of the plating solution, or abnormal plating deposition. Removal technology was desired.

【0005】それらの除去技術の一つとして、例えば小
林、本間の研究論文「無電解銅めっきの精密ろ過効果;
表面技術、VoL,44,No.10,1993」にあ
るように、0.2μmの精密フィルターで微粒子を除去
すれば、めっきの異常析出が減少できることが示されて
いる。
As one of the techniques for removing them, for example, Kobayashi and Honma's research paper “Microfiltration Effect of Electroless Copper Plating;
Surface Technology, VoL, 44, No. 10, 1993 ”, it is shown that removal of fine particles with a 0.2 μm precision filter can reduce abnormal deposition of plating.

【0006】[0006]

【発明が解決しようとする課題】しかし、通常のフィラ
メントフィルター方式は、微細なフィルター孔径であれ
ばあるほど、微粒子はフィルター上に蓄積し、その蓄積
物を核としてめっきの異常析出が生じ、やがては閉塞に
陥ることが確認されている。従って、通常のフィルター
方式では、より微細な異種金属微粒子や金属粒子の除去
は不可能に近かった。
However, in the ordinary filament filter system, the finer the filter pore size, the finer the particles are, and the finer particles are accumulated on the filter. Has been confirmed to fall into obstruction. Therefore, it was almost impossible to remove finer different kinds of fine metal particles and metal particles by the ordinary filter method.

【0007】[0007]

【課題を解決するための手段】本発明は、無電解銅めっ
き液中の微細なフロック状の鉄成分の除去方法として、
めっき液を限外ろ過膜により循環分離ろ過すると同時に
濃縮し、定期的に系外に排出する方法を提供するもので
ある。即ち、めっき槽のめっき液の一部を断続的もしく
は連続的に抜き取り、この液を限外ろ過膜を設けたろ過
装置で循環ろ過し、透過めっき液のみを再びめっき槽に
返送する方法である。
The present invention provides a method for removing fine flock-like iron components in an electroless copper plating solution.
It is intended to provide a method in which the plating solution is circulated and filtered through an ultrafiltration membrane, concentrated at the same time, and periodically discharged out of the system. That is, this is a method in which a part of the plating solution in the plating tank is intermittently or continuously withdrawn, the solution is circulated and filtered by a filtration device provided with an ultrafiltration membrane, and only the permeation plating solution is returned to the plating tank again. .

【0008】[0008]

【発明の実施の形態】限外ろ過膜は、通常0.01μm
位の孔径であり、微粒子の除去や高分子化合物の除去濃
縮に用いられるもので、通常のろ過膜と異なりいわゆる
クロスフローろ過方式のため、閉塞しにくいという特徴
を持つ。また、形状は細管の中空子タイプ、太管のチュ
ウブラータイプ、平膜タイプ、平膜を巻いたスパイラル
タイプ等があり、何れも使用できるが耐熱性、耐アルカ
リ性であることが必要である。
BEST MODE FOR CARRYING OUT THE INVENTION The ultrafiltration membrane is usually 0.01 μm.
This is a pore size of the order of magnitude and is used for removing and concentrating fine particles and for removing and concentrating polymer compounds. Unlike ordinary filtration membranes, it is a so-called cross-flow filtration system and has the characteristic of being less likely to be clogged. Further, the shape includes a hollow tube type of a thin tube, a tuber type of a thick tube, a flat film type, a spiral type wound with a flat film, and the like, and any of them can be used, but it is required that they have heat resistance and alkali resistance.

【0009】無電解銅めっき液への異種金属の混入によ
る問題点としては、種々の不良現象が挙げられる。発明
者等のめっき実験によれば、コバルト、モリブデン、亜
鉛、ニッケル等の金属成分は、20ppm程度の混入で
も問題はなかったが、鉄分の混入につていは5ppm程
度以上になると、析出銅箔厚みが不均一でざらつきのあ
る異常析出が生じ、さらに20ppm程度になると青色
のめっき液が緑変し、めっき反応が停止することが判明
した。この時、鉄成分を5ppm以上添加しためっき液
には、当初懸濁粒子は目だたないが、数時間放置すると
微細なフロック成長が確認でき、このフロックをろ過す
ると、ろ紙に鉄を主成分とする固形物が得られた。即
ち、めっき製品にざらつきが発生する原因は、この固形
物の成長過程にある微細なフロックが分散し、被めっき
製品表面に付着することが、ざらつき発生の原因になる
ものと考えられた。従って、材料及び装置等からの鉄分
の混入を極力さけることは勿論であるが、万一混入し微
細な固形物を形成しても、微細な懸濁粒子のうちに速や
かに除去することが重要な課題となっていた。本発明に
よる無電解めっき液からの鉄分の除去について、実施例
に基づき効果を確認した結果によれば、超微細な鉄成分
微粒子は、公称孔径0.01μm、分子量分画10,0
00の限外ろ過膜で十分分離できることが分かった。分
離された鉄成分は、繰り返し循環ろ過することで循環槽
に濃縮されるため、一定時間毎に系外に排出することで
除去できる。また、同時に他の不溶解性懸濁物質も同様
に除去でき、めっき製品への異常析出は認められなかっ
た。
Problems caused by mixing different kinds of metals into the electroless copper plating solution include various defective phenomena. According to the plating experiments conducted by the inventors, the metal components such as cobalt, molybdenum, zinc, and nickel were not problematic even when mixed in about 20 ppm, but when the content of iron was about 5 ppm or more, the deposited copper foil It was found that abnormal deposition with uneven thickness and roughness occurred, and when the concentration reached about 20 ppm, the blue plating solution turned green and the plating reaction stopped. At this time, in the plating solution containing 5 ppm or more of iron component, suspended particles were not noticeable at first, but fine floc growth could be confirmed when left for several hours, and when this floc was filtered, iron was mainly contained in the filter paper. A solid product was obtained. That is, it is considered that the cause of the roughness of the plated product is that the fine flocs in the growth process of the solid matter are dispersed and adhere to the surface of the product to be plated to cause the roughness. Therefore, it is of course possible to avoid mixing iron from materials and equipment as much as possible, but it is important to quickly remove fine suspended particles even if mixed to form fine solid matter. It was a problem. Regarding the removal of iron from the electroless plating solution according to the present invention, the result of confirming the effect based on the examples shows that ultrafine iron component fine particles have a nominal pore diameter of 0.01 μm and a molecular weight fraction of 10,0.
It was found that an ultrafiltration membrane of No. 00 could be used for sufficient separation. Since the separated iron component is concentrated in the circulation tank by repeatedly circulating and filtering, it can be removed by discharging it out of the system at regular intervals. At the same time, other insoluble suspended substances could be similarly removed, and no abnormal deposition on the plated product was observed.

【0010】[0010]

【実施例】以下、実施例につき図1で説明する。プリン
ト配線板1の製造のための無電解銅めっき槽2(約5,
000リットル)の一部のめっき液を、引き抜きポンプ
3により抜き取り、ろ過循環槽4(約500リットル)
に導入し、限外ろ過循環ポンプ5で中空糸タイプの限外
ろ過膜6であるSLP−1053(旭化成工業株式会社
製、商品名)に、平均圧力2.5kg/cm2 で連続的
に通液した。透過めっき液7は、めっき槽2に返送し
た。この結果、初期濃度1.6mg/lであっためっき
液鉄濃度は、徐々に減少し5時間後には、0.55mg
/lまで低下し、逆にろ過循環槽では12.1mg/l
まで上昇が認められ、明らかに分離濃縮が可能であるこ
とが確認できた。循環槽に濃縮された鉄成分は、一時め
っき液の導入を停止し、透過めっき液を可能な限りめっ
き槽に返送後、減量した濃縮めっき液8を系外に排出し
た。
EXAMPLES Examples will be described below with reference to FIG. Electroless copper plating bath 2 for manufacturing printed wiring board 1 (about 5,
(000 liters) of a part of the plating solution is drawn by the drawing pump 3 and the filtration circulation tank 4 (about 500 liters)
Was introduced into SLP-1053 (Asahi Kasei Kogyo Co., Ltd., trade name), which is a hollow fiber type ultrafiltration membrane 6 with an ultrafiltration circulation pump 5, and an average pressure of 2.5 kg / cm 2. The solution was continuously passed through. The transparent plating solution 7 was returned to the plating tank 2. As a result, the iron concentration of the plating solution, which had an initial concentration of 1.6 mg / l, gradually decreased to 0.55 mg after 5 hours.
/ L, and conversely 12.1 mg / l in the filtration circulation tank
It was confirmed that it was possible to separate and concentrate. For the iron component concentrated in the circulation tank, the introduction of the temporary plating solution was stopped, the permeation plating solution was returned to the plating tank as much as possible, and then the reduced concentrated plating solution 8 was discharged out of the system.

【0011】[0011]

【発明の効果】従来より無電解めっきや電気めっき液の
フィルターによるろ過は、実施されてきたが、除去の対
象が厳密に明確にされているとは言えず、実質的な効果
を得にくかった。本発明によれば、あらゆる面から可能
性があるめっき液への異種金属の混入汚染、特に鉄成分
の汚染によるめっき製造上でのめっき速度の低下や、液
分解等のトラブルの発生防止と、製品へのざらつきの発
生を抑制できることが可能となった。
EFFECTS OF THE INVENTION Although the electroless plating and the filtration of the electroplating solution with a filter have been carried out conventionally, it cannot be said that the object of removal is strictly defined, and it is difficult to obtain a substantial effect. . According to the present invention, contamination by mixing different kinds of metals into the plating solution that is possible from all sides, particularly the reduction of the plating rate in the plating production due to the contamination of the iron component, and the prevention of troubles such as solution decomposition, It has become possible to suppress the occurrence of graininess on the product.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例を示す概要図である。FIG. 1 is a schematic diagram showing one embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1.プリント配線板 2.無電解銅めっ
き槽 3.めっき液引き抜きポンプ 4.ろ過循環槽 5.限外ろ過循環ポンプ 6.限外ろ過膜 7.透過めっき液 8.濃縮めっき液
1. Printed wiring board 2. Electroless copper plating bath 3. Plating solution drawing pump 4. Filtration circulation tank 5. Ultrafiltration circulation pump 6. Ultrafiltration membrane 7. Transparent plating solution 8. Concentrated plating solution

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】めっき槽の無電解銅めっき液の一部を断続
的もしくは連続的に抜き取り、この抜き取っためっき液
を、限外ろ過膜を設けたろ過装置で循環ろ過し、透過め
っき液のみを再びめっき槽に返送することを特徴とする
無電解銅めっき液から鉄成分を除去する方法。
1. A part of the electroless copper plating solution in a plating tank is intermittently or continuously withdrawn, and the extracted plating solution is circulated and filtered by a filtration device provided with an ultrafiltration membrane to obtain only a permeation plating solution. Is returned to the plating bath again, and a method for removing iron components from the electroless copper plating solution.
JP29263995A 1995-11-10 1995-11-10 Method for removing iron component from electroless copper plating liquid Pending JPH09137276A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29263995A JPH09137276A (en) 1995-11-10 1995-11-10 Method for removing iron component from electroless copper plating liquid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29263995A JPH09137276A (en) 1995-11-10 1995-11-10 Method for removing iron component from electroless copper plating liquid

Publications (1)

Publication Number Publication Date
JPH09137276A true JPH09137276A (en) 1997-05-27

Family

ID=17784397

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29263995A Pending JPH09137276A (en) 1995-11-10 1995-11-10 Method for removing iron component from electroless copper plating liquid

Country Status (1)

Country Link
JP (1) JPH09137276A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102029089A (en) * 2010-08-31 2011-04-27 北大方正集团有限公司 System and method for circulating and filtering chemical copper deposition solution

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102029089A (en) * 2010-08-31 2011-04-27 北大方正集团有限公司 System and method for circulating and filtering chemical copper deposition solution

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