JPH09132473A - Brazing filler metal for ceramics - Google Patents

Brazing filler metal for ceramics

Info

Publication number
JPH09132473A
JPH09132473A JP31170195A JP31170195A JPH09132473A JP H09132473 A JPH09132473 A JP H09132473A JP 31170195 A JP31170195 A JP 31170195A JP 31170195 A JP31170195 A JP 31170195A JP H09132473 A JPH09132473 A JP H09132473A
Authority
JP
Japan
Prior art keywords
ceramics
sample
brazing filler
metal
filler metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP31170195A
Other languages
Japanese (ja)
Inventor
Mare Okido
希 大木戸
Yoshiro Hirai
芳郎 平居
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHICHIZUN IWATE KK
Citizen Watch Co Ltd
Original Assignee
SHICHIZUN IWATE KK
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHICHIZUN IWATE KK, Citizen Watch Co Ltd filed Critical SHICHIZUN IWATE KK
Priority to JP31170195A priority Critical patent/JPH09132473A/en
Publication of JPH09132473A publication Critical patent/JPH09132473A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a brazing filler metal fit to carry out satisfactory joining of ceramics not accompanied by cracking without metallizing the ceramics by specifying a compsn. consisting of at least Cu, Ag, Ti and Zr. SOLUTION: This brazing filler metal consists of 2-10wt.% Ti, 1-8wt.% Zr and the balance Cu and Ag. It is fit to join ceramics to ceramics, a metal, etc., at 950 deg.C brazing temp. in vacuum.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明はセラミックスとセラ
ミックス、セラミックスと金属等を接合するのに適した
セラミック用ろう材に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a brazing material for ceramics suitable for joining ceramics to ceramics, ceramics to metal and the like.

【0002】[0002]

【従来の技術】近年セラミックス技術が大幅な進歩を遂
げ、セラミックス材料を使用したいろいろな製品が出現
するに到っている。しかしながらセラミックス単体で製
品が完成すれば何等問題がないが、セラミックスに同じ
セラミックスをろうづけ接合して完成品としたり、セラ
ミックスに金属をろうづけ接合して完成品としたりする
事が多くなってきた。ところがセラミックスは熱膨張係
数が金属に比較して小さく、金属とろう付けした際に膨
張係数の違いによって発生する熱応力のためセラミック
スにクラックを生じたりする事が多い。
2. Description of the Related Art In recent years, ceramics technology has made great progress, and various products using ceramics materials have come to the forefront. However, if a product is completed with ceramics alone, there is no problem at all, but it has become more common to braze the same ceramics to ceramics to complete the product, or braze metal to ceramics to complete the product. . However, the coefficient of thermal expansion of ceramics is smaller than that of metal, and cracks often occur in ceramics due to the thermal stress generated due to the difference in expansion coefficient when brazing with metal.

【0003】従来、上述したような一方がセラミックス
より成る材料の接合方法には、高融点金属法、活性金属
法、酸化物ソルダー法などが使用されていた。このうち
高融点金属法とは、セラミックスの上にMo−Mnの金
属膜を塗布焼成し、つまりセラミックス表面をあらかじ
めメタライジングして金属皮膜を形成しておくことで、
その後Ag−Cu共晶ろうを用いて接合する方法であ
る。また、酸化物ソルダー法とは、酸化物の各種混合物
をインサート剤として接合したい材料の間にはさみ、不
活性ガス雰囲気、還元性ガス雰囲気、真空中等で加熱処
理して接合する方法である。
Conventionally, a refractory metal method, an active metal method, an oxide solder method, or the like has been used as a method for joining the above-described materials, one of which is made of ceramics. Among them, the refractory metal method is a method in which a metal film of Mo—Mn is applied on ceramics and baked, that is, the surface of the ceramics is metallized in advance to form a metal film.
After that, it is a method of joining using Ag—Cu eutectic brazing. The oxide solder method is a method in which various oxide mixtures are sandwiched between materials to be bonded as an insert agent, and heat treatment is performed in an inert gas atmosphere, a reducing gas atmosphere, a vacuum, or the like to perform bonding.

【0004】活性金属法は、酸素に対して活性な(T
i、Zrなど)高融点金属とセラミックスの反応を利用
して接合を行うものである。この活性金属法による従来
方法の接合を表1により説明する。尚試料としては、セ
ラミックス板として縦15mm×横15mm×厚さ0.
55mmのAl2 O3 (以下試料1という)を用い、金
属板として縦15mm×横15mm×厚さ0.5mmの
SUS304(以下試料2という)を使用した。
The active metal method is active with respect to oxygen (T
(i, Zr, etc.) are joined by utilizing the reaction of refractory metal and ceramics. The conventional joining method using the active metal method will be described with reference to Table 1. As a sample, a ceramic plate having a length of 15 mm × width of 15 mm × thickness of 0.
55 mm Al 2 O 3 (hereinafter referred to as sample 1) was used, and SUS304 (hereinafter referred to as sample 2) having a length of 15 mm × width of 15 mm × thickness of 0.5 mm was used as a metal plate.

【0005】[0005]

【表1】 [Table 1]

【0006】(従来例1)従来例1に示すように、Ag
70、Cu28、Ti2(単位wt%)のろう材を試料
1と試料2の間に挟み、真空中950℃の温度で接合し
たところ、セラミックスにクラックが入り使用不能の状
態となった。
(Conventional Example 1) As shown in Conventional Example 1, Ag
When a brazing material of 70, Cu28, and Ti2 (unit: wt%) was sandwiched between Sample 1 and Sample 2 and joined at a temperature of 950 ° C. in vacuum, the ceramics cracked and became unusable.

【0007】(従来例2)従来例2に示すように、Ag
70、Cu25、Ti3、In2(単位wt%)のろう
材を試料1と試料2の間に挟み、同様に真空中950℃
の温度で接合したところ、セラミックスにクラックが入
り使用不能の状態となった。
(Conventional Example 2) As shown in Conventional Example 2, Ag
70, Cu25, Ti3, In2 (unit wt%) brazing filler metal is sandwiched between sample 1 and sample 2, and similarly in vacuum at 950 ° C.
When joined at the temperature of 1, the ceramics cracked and became unusable.

【0008】[0008]

【発明が解決しようとする課題】高融点金属法は接合の
前にメタライジング工程があるため、工程が煩雑とな
り、コストが高くなる欠点を有する。また、酸化物ソル
ダー法は低融点のものと高融点のものがあるが、低融点
は300〜400℃の作業温度で接合部分の耐熱温度が
低くなり、逆に高融点は1200〜2000℃と作業温
度が高くなりすぎてエネルギーコストが上昇してしまう
欠点がある。
The refractory metal method has a drawback that the process is complicated and the cost is high because there is a metallizing step before joining. The oxide solder method has a low melting point and a high melting point, but the low melting point lowers the heat resistant temperature of the joint at a working temperature of 300 to 400 ° C, and conversely the high melting point is 1200 to 2000 ° C. There is a drawback that the working temperature becomes too high and the energy cost rises.

【0009】更に、活性金属法はAg−Cu−Ti、A
g−Cu、等のろう材があり、広く使用されている。こ
の方法はメタライジング無しに直接金属−セラミック
ス、またはセラミックス−セラミックスを接合する事が
出来るが、熱膨張係数の違いから生じる熱応力が発生し
てしまう。このため、表1に示すように薄い非接合材を
含む異質の材料を接合する場合において、特に厚さ1m
m以下のセラミックスではクラックが発生し接合するこ
とが困難であった。
Further, the active metal method is Ag-Cu-Ti, A
There are brazing materials such as g-Cu and they are widely used. According to this method, metal-ceramics or ceramics-ceramics can be directly joined without metalizing, but thermal stress is generated due to the difference in thermal expansion coefficient. Therefore, as shown in Table 1, when joining dissimilar materials including a thin non-bonding material, the thickness is particularly 1 m.
With ceramics of m or less, cracks were generated and it was difficult to bond them.

【0010】本発明は、上記実状に鑑みなされたもの
で、本発明の目的は前述の活性金属法を応用し、セラミ
ックスにメタライジング無しに、かつセラミックスの割
れを発生させず、一方がセラミックス材料からなる接合
を行うセラミックス用ろう材を提供するものである。
The present invention has been made in view of the above circumstances, and an object of the present invention is to apply the above-mentioned active metal method to the ceramic material without metalizing and without causing cracking of the ceramic material, one of which is a ceramic material. The present invention provides a brazing material for ceramics, which is composed of

【0011】[0011]

【課題を解決するための手段】上記の課題を解決するた
めに本発明の要旨は、少なくともCu、Ag、Ti、Z
rの4成分からなるセラミックス用ろう材であり、Ti
2〜10wt%、Zr1〜8wt%含有することを特徴
とするものである。
In order to solve the above problems, the gist of the present invention is at least Cu, Ag, Ti, Z.
It is a brazing material for ceramics consisting of four components of r, Ti
It is characterized by containing 2 to 10 wt% and Zr 1 to 8 wt%.

【0012】[0012]

【発明の実施の形態】以下に、本発明の実施の形態につ
いて説明する。本発明によるセラミックス用ろう材はC
u、Ag、Ti、Zrの4つの成分から構成されてい
て、このうちTiは2〜10wt%、Zr1〜8wt%
を含有し、残余成分としてCu、Agを含んでいる。
Embodiments of the present invention will be described below. The brazing material for ceramics according to the present invention is C
It is composed of four components of u, Ag, Ti, and Zr, of which Ti is 2 to 10 wt% and Zr is 1 to 8 wt%.
And Cu and Ag are contained as the remaining components.

【0013】Ti2〜10wt%にした理由は、2wt
%以下ではろう材がセラミックスと反応が進行せず10
wt%以上ではセラミックスと反応しなかったTiが堅
くて脆い合金を生成し、接合強度の低下の原因と成るか
らである。
The reason for setting Ti2 to 10 wt% is 2 wt
% Or less, the brazing filler metal does not react with the ceramics 10
This is because Ti that has not reacted with the ceramics produces a hard and brittle alloy at a content of more than wt% and causes a decrease in the bonding strength.

【0014】一方、ZrをZr1〜8wt%にした理由
は、1wt%以下だとろう材のセラミックスに対する濡
れが悪くなるからであり、8wt%以上だとTiと同様
に堅くて脆い合金を生成して接合強度の低下を招くから
である。
On the other hand, the reason why Zr is set to Zr1 to 8 wt% is that if the content is 1 wt% or less, the wetting of the brazing material to the ceramics will be poor. This leads to a decrease in bonding strength.

【0015】(実施例)以下に、上記数値の理由を証明
するために表2を用いて本発明の実施例を説する。試料
については、試料1と試料2は従来例と同じものを用
い、試料3としてセラミックス板の縦15mm×横15
mm×厚さ0.55mmのZrO2 (以下試料3とい
う)を使用した。
(Embodiment) An embodiment of the present invention will be described below using Table 2 in order to prove the reason for the above numerical values. As the sample, the same samples as those in the conventional example were used for sample 1 and sample 2, and as sample 3, the length of the ceramic plate was 15 mm × width 15
ZrO2 (hereinafter referred to as sample 3) having a size of 0.5 mm and a thickness of 0.55 mm was used.

【0016】[0016]

【表2】 [Table 2]

【0017】(実施例1)表2の実施例1に示すよう
に、Ag70、Cu25、Ti2、Zr1(単位wt
%)のろう材を試料1と試料2の間に挟み、真空中95
0℃の温度で接合したところ、セラミックスにクラック
は見られず、使用可能であった。
(Example 1) As shown in Example 1 of Table 2, Ag70, Cu25, Ti2, Zr1 (unit: wt)
%) Brazing filler metal between sample 1 and sample 2
When bonded at a temperature of 0 ° C., no cracks were found in the ceramics and it was usable.

【0018】(実施例2)表2の実施例2に示すよう
に、Ag36、Cu53、Ti6、Zr5(単位wt
%)のろう材を試料1と試料2の間に挟み、真空中95
0℃の温度で接合したところ、セラミックスにクラック
は見られず、使用可能であった。
Example 2 As shown in Example 2 of Table 2, Ag36, Cu53, Ti6, Zr5 (unit: wt)
%) Brazing filler metal between sample 1 and sample 2
When bonded at a temperature of 0 ° C., no cracks were found in the ceramics and it was usable.

【0019】(実施例3)表2の実施例3に示すよう
に、Ag49、Cu35、Ti9、Zr7(単位wt
%)のろう材を試料1と試料2の間に挟み、真空中95
0℃の温度で接合したところ、セラミックスにクラック
は見られず、使用可能であった。
(Example 3) As shown in Example 3 of Table 2, Ag49, Cu35, Ti9, Zr7 (unit: wt)
%) Brazing filler metal between sample 1 and sample 2
When bonded at a temperature of 0 ° C., no cracks were found in the ceramics and it was usable.

【0020】(実施例4)表2の実施例4に示すよう
に、Ag47、Cu35、Ti10、Zr8(単位wt
%)のろう材を試料1と試料2の間に挟み、真空中95
0℃の温度で接合したところ、セラミックスにクラック
は見られず、使用可能であった。
Example 4 As shown in Example 4 of Table 2, Ag47, Cu35, Ti10, Zr8 (unit: wt)
%) Brazing filler metal between sample 1 and sample 2
When bonded at a temperature of 0 ° C., no cracks were found in the ceramics and it was usable.

【0021】(実施例5)表2の実施例5に示すよう
に、Ag41、Cu54、Ti3、Zr2(単位wt
%)のろう材を試料2と試料3の間に挟み、真空中95
0℃の温度で接合したところ、セラミックスにクラック
は見られず、使用可能であった。
Example 5 As shown in Example 5 of Table 2, Ag41, Cu54, Ti3, Zr2 (unit: wt)
%) Brazing filler metal between sample 2 and sample 3
When bonded at a temperature of 0 ° C., no cracks were found in the ceramics and it was usable.

【0022】(実施例6)表2の実施例6に示すよう
に、Ag47、Cu35、Ti10、Zr8(単位wt
%)のろう材を試料2と試料3の間に挟み、真空中95
0℃の温度で接合したところ、セラミックスにクラック
は見られず、使用可能であった。
Example 6 As shown in Example 6 of Table 2, Ag47, Cu35, Ti10, Zr8 (unit: wt)
%) Brazing filler metal between sample 2 and sample 3
When bonded at a temperature of 0 ° C., no cracks were found in the ceramics and it was usable.

【0023】(参考例1)表2の参考例1に示すよう
に、Ag47、Cu35、Ti12、Zr10(単位w
t%)のろう材を試料1と試料2の間に挟み、真空中9
50℃の温度で接合したところ、セラミックスにクラッ
クが発生し、接合強度も接合界面の破壊で0.05kg
/mm2 と弱く使用不可能であった。
Reference Example 1 As shown in Reference Example 1 of Table 2, Ag47, Cu35, Ti12, Zr10 (unit w
t%) brazing filler metal is sandwiched between sample 1 and sample 2,
When bonded at a temperature of 50 ° C, cracks occur in the ceramics and the bonding strength is 0.05 kg due to the destruction of the bonding interface.
/ Mm2 was weak and could not be used.

【0024】[0024]

【発明の効果】以上記載の通り、本発明のセラミックス
用ろう材は、メタライジング工程を必要とせず、セラミ
ックスの割れが無い良好な接合を行う事が出来る。
As described above, the brazing material for ceramics of the present invention does not require a metalizing step and can perform good joining without cracking of the ceramics.

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 C22C 5/08 C22C 5/08 9/00 9/00 ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI Technical indication C22C 5/08 C22C 5/08 9/00 9/00

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 少なくともCu、Ag、Ti、Zrの4
成分から成るろう材であって、このうちTiを2〜10
wt%、Zrを1〜8wt%含有し、残余はCuとAg
より構成されている事を特徴とするセラミックス用ろう
材。
1. At least 4 of Cu, Ag, Ti and Zr
A brazing filler metal composed of components, of which Ti is 2 to 10
wt%, containing 1-8 wt% Zr, the balance Cu and Ag
A brazing material for ceramics, which is characterized by being composed of
JP31170195A 1995-11-07 1995-11-07 Brazing filler metal for ceramics Pending JPH09132473A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31170195A JPH09132473A (en) 1995-11-07 1995-11-07 Brazing filler metal for ceramics

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31170195A JPH09132473A (en) 1995-11-07 1995-11-07 Brazing filler metal for ceramics

Publications (1)

Publication Number Publication Date
JPH09132473A true JPH09132473A (en) 1997-05-20

Family

ID=18020435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31170195A Pending JPH09132473A (en) 1995-11-07 1995-11-07 Brazing filler metal for ceramics

Country Status (1)

Country Link
JP (1) JPH09132473A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011051015A (en) * 2009-06-15 2011-03-17 Schneider Electric Industries Sas Assembly method by reactive brazing and vacuum cartridge assembled using this method
CN102699567A (en) * 2012-06-14 2012-10-03 中南大学 Zirconium-containing copper silver titanium solder alloy
WO2018221493A1 (en) * 2017-05-30 2018-12-06 デンカ株式会社 Ceramic circuit board and module using same

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011051015A (en) * 2009-06-15 2011-03-17 Schneider Electric Industries Sas Assembly method by reactive brazing and vacuum cartridge assembled using this method
CN102699567A (en) * 2012-06-14 2012-10-03 中南大学 Zirconium-containing copper silver titanium solder alloy
WO2018221493A1 (en) * 2017-05-30 2018-12-06 デンカ株式会社 Ceramic circuit board and module using same
CN110709369A (en) * 2017-05-30 2020-01-17 电化株式会社 Ceramic circuit board and module using the same
KR20200013678A (en) * 2017-05-30 2020-02-07 덴카 주식회사 Ceramic Circuit Boards and Modules Using the Same
JPWO2018221493A1 (en) * 2017-05-30 2020-04-02 デンカ株式会社 Ceramic circuit board and module using the same
US11570890B2 (en) 2017-05-30 2023-01-31 Denka Company Limited Ceramic circuit board and module using same

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