JPH09125232A - Production of composite hard thin film excellent in decorativeness - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for producing a hard thin film in which, as for the color of the colored hard thin film, a single color is not revealed, but various colors are easily allowed to reveal and excellent in decorativeness and to provide a method for protecting the above colored hard thin film by coating with a transparent thin film excellent in oxidation resistance, wear resistance, weather resistance or the like. SOLUTION: A colored thin film (such as TiN) is formed on a substrate by a deposition method such as ion plating or the like, and after that, a transparent hard thin film (such as AlN) is formed thereon as an interference film in a laminated way. By forming the transparent hard thin film as an interference film in a laminated way in such a manner that it is regulated to various film thickness, various colors can be revealed. The colored hard thin film may be composed of a metallic thin film or a ceramics thin film, and the transparent thin film may be composed of a metallic oxide thin film or a ceramics thin film.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a composite hard thin film having an excellent decorative property, and in particular, it has an excellent decorative property by utilizing an interference film formed on a substrate by ion plating or another vapor deposition method. Providing a composite hard film.

[0002]

[Prior Art and Problems to be Solved by the Invention]
To provide high value-added thin films with excellent performance,
Attempts have been actively made to combine various thin films. The TiN thin film most practically used in the vapor deposition method, especially the ion plating method has a beautiful gold color and has heat resistance and high hardness. Is often used in. However, the color of the thin film obtained by the same method was based on a kind of color determined by the metal in the crucible for ion plating and the reaction gas. Therefore, it is difficult to form thin films of many colors and various colors.

[0003]

In order to solve the above problems, the present invention provides a hard thin film exhibiting various colors by coating a transparent hard thin film such as AlN as an interference film on a colored hard thin film such as TiN. That is, the invention comprises the following constitution invention.

(1) A colored hard thin film is formed on a substrate by ion plating or another vapor deposition method, and then a transparent hard thin film is further laminated thereon as an interference film. Excellent composite hard thin film manufacturing method. (2) A colored hard thin film is formed on the substrate by ion plating or another vapor deposition method, and then a transparent hard thin film is further formed on the substrate to form various layers as an interference film. A method for producing a composite hard thin film having excellent decorative properties. (3) A composite with excellent decorativeness, characterized in that a colored TiN thin film is formed on a substrate by ion plating or another vapor deposition method, and then a transparent AlN thin film is laminated thereon as an interference film. Hard thin film manufacturing method. (4) A colored TiN thin film is formed on a substrate by ion plating or another vapor deposition method, and then a transparent AlN thin film is further formed thereon to form an interference film by adjusting various thicknesses. A method for producing a composite hard thin film having excellent decorative properties. (5) The colored hard thin film is a metal thin film or a ceramic thin film, and the transparent hard thin film is a metal oxide thin film or a ceramic thin film, according to any one of (1) to (4) above. The method for producing a composite hard thin film having excellent decorativeness according to 1.

[0005]

BEST MODE FOR CARRYING OUT THE INVENTION Ion plating is a method of causing a gas discharge in an atmospheric gas to ionize and activate metal evaporating particles for coating, and a direct current discharge depending on a difference in ionization or evaporation method. Law,
The method is classified into the ARE method, the HCD method, the high frequency excitation method, the arc discharge method, the cluster ion beam method and the like, but in order to carry out the present invention, it is sufficient to secure at least two evaporation sources (crucibles) of metal. Therefore, the method of the present invention will be outlined by taking a method using an electron gun as an example. As shown in the schematic view of the practice of the present invention in FIG. 1, in the ion plating apparatus, first, in the first step (FIG. 1 (A)), Ti is contained in the crucibles 1a and 1b in the lower part of the chamber 4. First
The electron beam 2a from the electron beam source 2 is radiated to the crucible 1a to generate Ti vaporized particles, which are reacted with nitrogen gas as a reaction gas on the way to form a colored (gold) TiN thin film on the upper substrate 3. Form. Then, the second step (B)
In order to form a transparent AlN thin film on the colored TiN formed in the first step, a second layer containing Al is formed.
The electron beam 2a from the electron beam source 2 is radiated to the crucible 1b (which may be exchanged in position with the first crucible 1a) to generate Al vaporized particles, and to react with the nitrogen gas of the reaction gas on the way. On the TiN thin film on the surface of the substrate 3
A 1N thin film is formed by stacking. At this time, by finely controlling the film thickness of AlN, it becomes possible to form various colors excellent in decorativeness. The color that appears is determined by the viewing window (not shown) of the chamber 4 during thin film formation.
The film thickness monitor may be used to continue the stacked formation of the AlN thin films until the desired color is visually observed, and to increase the film thickness, and to control the film thickness more accurately. Further, if only the decorative property is important, it is not necessary to apply a bias, and the laminated coating can be performed only by vapor deposition. Normally, in a TiN single layer film, oxidation starts at about 400 ° C. and cannot be used. However, in the method of this example, a heat-resistant AlN thin film was laminated on the TiN thin film, so
N exerts not only a decorative effect as an interference film but also a high temperature oxidation preventing effect, and the obtained TiN / AlN composite hard thin film product is hardly oxidized even when exposed to the atmosphere at 900 ° C. .

Color difference between the conventional TiN single layer film product and the AlN / TiN composite hard thin film product according to the embodiment of the present invention
It measured by the color computer and the result is shown in Table 1.

[0007]

[Table 1]

As is apparent from Table 1, in the conventional TiN single layer film, the Munsell color system is Y (yellow) system or GY (yellow green) system.
It was only a system. On the other hand, A according to the embodiment of the present invention
In the case of 1N / TiN composite hard thin film products, R (red) type, YR
(Yellow red) system, GY (yellow green) system, G (green) system, B (blue),
It turned out that various colors of P (purple) can be expressed. According to the method of the present invention, as described in Examples and the like, in the vapor deposition method including ion plating, which has conventionally been able to obtain only a monochromatic hard thin film, it is possible to produce a hard thin film of various colors, It is possible to provide a new product with excellent decorativeness. Further, not limited to the example of the TiN / AlN composite hard thin film, it is possible to manufacture a composite hard thin film having various colors and functions by various combinations of the colored hard thin film of the first layer and the transparent hard thin film of the second layer. Therefore, it can contribute to the development of products for new applications. Further, according to the method of the present invention, a high-performance composite thin film can be manufactured at low cost with a conventional device without manufacturing and using a new device.

[0009]

As described above, according to the present invention, the following operational effects are exhibited. . Conventionally, the color of the hard thin film obtained by ion plating etc. was monochromatic, but by forming a transparent hard thin film as an interference film on the surface and adjusting and changing the thickness of the transparent hard thin film, It has become possible to provide composite hard thin films that develop various colors. In particular, it has been impossible to produce a red-colored thin film by the ion plating method in the past, but the method of the present invention makes it easy to produce a red-colored hard thin film. . By changing the type of colored hard thin film on the substrate,
Combined with the effect of the interference film, it becomes possible to obtain a composite hard thin film of various colors rich in variety. . In particular, when heat-resistant transparent AlN is laminated on the outermost surface of the thin film, not only the decorative effect due to the interference color but also the high-temperature oxidation prevention effect due to the addition of heat resistance are given, and the wear resistance and weather resistance are excellent. A composite hard thin film can be provided. . Even when the conventional ion plating apparatus is used, the composite hard thin film can be formed simply by exchanging the crucible.

[Brief description of the drawings]

FIG. 1 is a schematic view of the implementation of the method of the present invention.

[Explanation of symbols]

 1a, 1b: crucible, 2: electron beam source, 2a: electron beam 3: substrate 4: chamber

Claims (5)

[Claims] 1. An excellent decorative property, characterized in that a colored hard thin film is formed on a substrate by ion plating or another vapor deposition method, and then a transparent hard thin film is laminated thereon as an interference film. For manufacturing composite hard thin film. 2. A colored hard thin film is formed on a substrate by ion plating or another vapor deposition method, and a transparent hard thin film is further formed thereon to form various layers as an interference film. And a method for producing a composite hard thin film with excellent decorativeness. 3. An excellent decorative property, characterized in that a colored TiN thin film is formed on a substrate by ion plating or another vapor deposition method, and then a transparent AlN thin film is laminated thereon as an interference film. For manufacturing composite hard thin film. 4. A colored TiN thin film is formed on a substrate by ion plating or another vapor deposition method, and a transparent AlN thin film is further formed thereon to form various layers as an interference film. And a method for producing a composite hard thin film with excellent decorativeness. 5. The colored hard thin film is a metal thin film or a ceramics thin film, and the transparent hard thin film is a metal oxide thin film or a ceramics thin film. A method for producing a composite hard thin film with excellent decorativeness.