JPH09120075A - Liquid crystal display element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inexpensive element of a color display type with which the display performance and yield are improved without using plastic beads and the number of stages is decreased. SOLUTION: The spacers 33 are composed of laminates (33R, 33G, 33B) of colored layers constituting color filters and are arranged in the position of an active matrix substrate 10 where the dielectric breakdown strength is high. As a result, the plastic beads are not used and, therefore, the display performance is improved and the insulation is maintained. If the spacers are formed into a reverse taper shape, conductive layers are not formed on the flanks and, therefore, the contact positions of the spacers are freely selectable. While the spacers are disposed on a counter substrate 30, the spacers may be disposed on the active matrix 10 side as well.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display element, and more particularly to a liquid crystal display element having good display performance, high yield, and a small number of steps.

[0002]

2. Description of the Related Art A liquid crystal display element that is generally used at present has two glass substrates having electrodes facing each other.
The periphery of the two substrates is fixed with an adhesive except the liquid crystal sealing port, the liquid crystal is sandwiched between the two substrates, and the liquid crystal sealing port is sealed with a sealing agent. As spacers for keeping the distance between the two substrates constant, plastic beads having a uniform particle diameter are scattered between the substrates.

In a liquid crystal display element for color display, one of two glass substrates is provided with a color filter having an RGB coloring layer. For example, in a simple matrix-driven color dot matrix liquid crystal display element, a Y substrate having Y electrodes patterned in a horizontal (Y) direction in a strip shape and an X electrode patterned in a strip shape in a vertical (X) direction are formed below the Y electrodes. An X substrate having a colored layer is arranged so as to face each other so that the Y electrode and the X electrode are substantially orthogonal to each other, and the liquid crystal composition is sandwiched therebetween. A liquid crystal display device has a display method, for example, TN (Twisted Nematic) type, STN
(Super Twisted Nematic) type, GH (Guest Host)
Shape, or ECB (Electrically Controlled Birefri
ngence) type and ferroelectric liquid crystal are used. As the sealant, for example, a heat- or UV-curable acrylic or epoxy adhesive or the like is used.

Further, in a color type active matrix drive liquid crystal display element, a switching element, for example, a thin film transistor (TFT) having a semiconductor layer of amorphous silicon (a-Si), a pixel electrode connected to it, a signal line and a gate line are provided. An electrode transfer member which has a TFT array substrate which is a formed active matrix substrate and a common electrode which is installed opposite to the TFT array substrate, forms an RGB color filter on the opposite substrate, and applies a voltage from the active matrix substrate to the opposite substrate ( As a transfer), a silver paste or the like is arranged in the peripheral portion of the screen, the two substrates are electrically connected by this electrode transition material, and the liquid crystal composition is sandwiched between the two substrates. Further, polarizing plates are sandwiched on both sides of these two sheets.

[0005]

However, in these liquid crystal display elements using plastic beads or the like as spacers, the alignment of the liquid crystal around the spacers scattered between the two substrates is disturbed, and light leaks from the periphery of the spacers. There is a problem that the contrast is reduced. Further, it is difficult to disperse the spacers uniformly, and the spacers are non-uniformly arranged in the step of dispersing the spacers on the substrate, resulting in a display failure and a reduction in yield.

Therefore, in order to realize a liquid crystal display device that does not use plastic beads or the like, there has been proposed a device in which a plurality of colored layers of a color filter are laminated on a TFT portion to form a columnar spacer.

Further, it is also proposed that the columnar spacer is arranged on the wiring located in the gate line or the signal line among the wirings for the active matrix, or that the columnar spacer is formed in the non-pixel portion with photoresist or the like. Has been done.

However, in a liquid crystal display element in which a columnar spacer is formed on the color filter substrate side and a common electrode is formed on the entire surface of the substrate including the columnar spacer, an ITO (Indium Tin Oxide) film which is a common electrode is formed on the top of the columnar spacer.
Since the film is also formed on the side portions, there is a problem that an electrical short circuit occurs with wirings, electrodes, etc. formed on the active matrix substrate side, resulting in display failure.

Further, it is difficult to reduce the area of the non-display area of the liquid crystal display element because the electrode transition member is arranged in the peripheral portion of the screen.

A main object of the present invention is to provide a color liquid crystal display device having good display performance.

A further object of the present invention is to provide a color liquid crystal display device having a high manufacturing yield.

Another object of the present invention is to provide an inexpensive color liquid crystal display device having a small number of steps.

[0013]

According to the present invention, in a liquid crystal display device in which a columnar spacer is formed on the color filter substrate side and a common electrode is formed on the entire surface of the substrate including the columnar spacer, the spacer formation position is formed. Are arranged at locations where the dielectric breakdown strength of the active matrix substrate is high. Specifically, it may be arranged on the lower layer wiring, the intermediate wiring, the upper layer wiring, the non-pixel non-wiring area, or the boundary portion between the non-pixel portion and the pixel portion. Spacers can be arranged through an insulating film formed on the matrix substrate. As a result, the plastic beads are not used and the insulating property of the spacer portion is improved, so that the display performance is improved by keeping the distance between the active matrix substrate and the counter substrate stable, and the manufacturing is facilitated. The yield and cost can be reduced.

Further, according to the present invention, since the cross-sectional shape of the spacer is inversely tapered, the formation of the conductive film on the side surface of the spacer is prevented, so that the common electrode on the spacer and the active matrix substrate side are formed. It is possible to prevent generation of unnecessary electric capacitance between the wiring and the electrodes, or an electric short circuit.

Further, the spacer having the inverse taper shape is formed at the same time as the color filter by forming the columnar colored layer so that the upper layer has a large diameter when the color filter is formed.

Further, by providing a cylindrical wall body arranged concentrically lower than the height of the columnar spacers on the outer periphery of the spacers, it is possible to prevent the conductive film from adhering to the side surfaces of the spacers, and to align with the columnar spacers. By providing a columnar barrier lower than the height of the columnar spacers at the position on the entry side in the alignment treatment direction of the film, it is possible to prevent the columnar spacers from falling off by the external force of the rubbing during the alignment treatment by rubbing the alignment film, which increases reliability. can do.

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, some of the embodiments of the present invention will be described in detail.

FIG. 1 is a sectional view of an active matrix liquid crystal display element according to the first embodiment of the present invention. This cross-sectional view includes, as a main part, a cross-section taken along a dashed line in the plan view shown in FIG.
In this liquid crystal display element, an active matrix substrate 10 and a counter substrate 30 are arranged so as to face each other, and a liquid crystal composition 40 is sealed between them.

FIG. 3 is a cross-sectional view showing in detail the structure of the active matrix substrate 10 used in the liquid crystal display element of FIG. 1, and this cross-sectional view is taken along the cutting line drawn by the one-dot chain line in the plan view shown in FIG. The main parts are included.

This figure corresponds to the plan view shown in FIG. The TFT portion of the active matrix substrate has a structure called an inverted stagger type. A gate electrode 12 is provided in the TFT portion on the main surface side of the glass substrate 11, a scanning line 13 is provided in the wiring portion, and an insulating film 14 of silicon nitride is deposited thereon. A semiconductor film 15 made of amorphous silicon is formed on the insulating film 14 and above the gate electrode 12, and a source 16 and a drain 17 are provided in a central portion of the semiconductor film 15 so as to extend over the semiconductor film 15 and the insulating film 14. Are formed so as to face each other with a distance of. A signal line 18 is connected to the drain 17, and a pixel electrode 19 is connected to the source 16. Then, a protective film 20 of silicon oxide is formed on the entire surface of the TFT portion and the wiring portion, and an alignment film 21 is formed on the entire surface of the pixel portion. In FIG. 3, the same elements as those in FIG. 1 are denoted by the same reference numerals, but some of the shapes are changed to make the invention easier to understand.

Referring again to FIG. 1, the upper counter substrate 3
0 is red, green, and blue color filters 32R, 32G, and 32B formed on the glass substrate 31 in accordance with pixel positions.
And a light shielding film 36 is formed between the color filters. Further, these color filter materials are laminated to form a columnar spacer 33. The spacer 33 includes a red layer 33R, a green layer 33G, and a blue layer 33B, which are color filters 32R and 32R.
It corresponds to G and 32B. Then, the transparent electrode film 34 and the alignment film 35 are deposited on the entire surface.

The two substrates are opposed to each other, and the spacers 33 of the counter substrate 30 are brought into contact with the scanning lines 13 of the active matrix substrate 10. As can be seen from FIG. 1, two insulating layers 14 and 20 are provided on the scanning line which is the lowermost layer.
Therefore, even if the spacers 33 come into contact with each other, it is extremely unlikely that the insulating property is deteriorated and a defect such as a short circuit occurs.
The liquid crystal composition 40 is filled and sealed between both substrates.

Next, a method of manufacturing such a liquid crystal display element will be described. First, similar to the process of forming a normal TFT, film formation and patterning are repeated on a # 7059 glass substrate 11 made by Corning and having a thickness of 1.1 mm to form thin film transistors and electrode wirings in a matrix. Here, it is assumed that an active matrix substrate 10 having an amorphous silicon TFT array with 100 pixels vertically and horizontally, 10000 pixels in total is formed. In this active matrix substrate, the scanning line is arranged in the lowermost layer, and two layers of insulating films 14 and 20 are formed on the scanning line. After that, AL-1051 (manufactured by Japan Synthetic Rubber Co., Ltd.) as an alignment film material is applied to the entire surface in a thickness of 500 angstrom, and a rubbing treatment is performed to form an alignment film 21.

Next, the counter substrate 30 is formed as follows. A photosensitive black resin CK-2000 is formed on a # 7059 glass substrate 31 made by Corning having a thickness of 1.1 mm.
(Fuji Hunt Technology Co., Ltd.) is applied using a spinner, dried at 90 ° C. for 10 minutes, and then a photomask having a predetermined pattern shape is used to apply light at a wavelength of 365 nm at 30 nm.
After exposure with an exposure amount of 0 mJ / cm ^2, the film is developed with an alkaline aqueous solution having a pH of 11.5 and baked at 200 ° C. for 60 minutes to form a light shielding layer 36 having a film thickness of 2.0 μm. Then, a UV-curable acrylic resin resist CR-2000 (manufactured by Fuji Hunt Technology Co., Ltd.) in which a red pigment is dispersed is applied to the entire surface by a spinner, and light is irradiated to the planned spacer formation locations and the red filter formation locations. Irradiate 100 mJ / cm ² at a wavelength of 365 nm using a photomask as described above, and use a 1% KOH solution for 10 times.
It is developed for a second, and a red colored layer is formed on that portion. Here, the arrangement position of the spacer is set to a position facing the scanning line of the active matrix substrate which is opposed to the signal line, the TFT,
The place where it overlaps with the pixel electrode is avoided. As described above, this is because at least two layers of the insulating film 14 are formed on the scanning line which is the lowermost layer in the active matrix substrate.
The reason for this is that since the spacers 20 are formed, the insulation is hardly damaged by the contact of the spacers.

Similarly, green and blue colored layers are respectively applied, exposed and developed to form spacers and color filters,
Finally, it is baked at 230 ° C. for 1 hour. Here, CG-2000 (manufactured by Fuji Hunt Technology Co., Ltd.) is used as the green coloring material, and CB-2000 (manufactured by Fuji Hunt Technology Co., Ltd.) is used as the blue coloring layer. After that, the transparent electrode 3
An ITO film having a thickness of 1500 A is formed as a film 4 by a sputtering method, a similar alignment film material is formed thereon, and then a rubbing process is performed to form an alignment film 35.

Thereafter, an adhesive 37 is printed along the periphery of the alignment film 35 of the counter substrate 30 except for a liquid crystal injection port (not shown), and an electrode transfer for applying a voltage from the active matrix substrate to the common electrode. The agent is formed on the electrode transfer electrode around the adhesive 37. Next, the alignment films 21 and 35 on both substrates
Are opposed to each other, and the substrates 10 and 30 are arranged so that the rubbing directions thereof are 90 degrees, and the adhesive is heated and cured to bond the substrates 10 and 30. Then, as a liquid crystal composition 40 from the injection port, ZLI-1565 was prepared by an ordinary method.
(Manufactured by E. Merck & Co., Inc.) is injected with 0.18% by weight of S811, and then the injection port is sealed with an ultraviolet curable resin.

The color display type active matrix liquid crystal display element thus formed has a high contrast ratio because it does not use plastic beads, and a high quality display is obtained, and high reliability is obtained.

The materials described in this embodiment and applicable in the following embodiments are not limited, and other materials can be used. For example, a non-photosensitive resin can be used as the black resin for forming the light-shielding layer, and an acrylic resin in which a dye is dispersed as a coloring material for forming the colored layer can be used as red resin in PicRe.
d02, green is Pic Green02, blue is Pic B
lue02 (both are Brewer Science Co., Ltd.)
Manufactured) may be used.

In this embodiment, the active matrix substrate has a structure in which the TFT portion is called an inverted stagger type, and the spacer is in contact with the scanning line, but it is generally the same as the scanning line. It may be on the auxiliary capacitance line formed in a layer, or on the lowermost layer in other types of active matrix substrates, and on this lowermost layer wiring,
The same effect can be expected by bringing it into contact with a position where no other wiring or electrode is formed.

When the spacer is formed on the auxiliary capacitance line and at a position where no other wiring or electrode is formed, there is no problem even if a short circuit occurs between the auxiliary capacitance line and the common electrode on the spacer. This is because the storage capacitor line and the common electrode are supplied with the same level of potential, so that even if they are short-circuited, there is no problem in operating characteristics. Therefore, even if it is not the bottom layer, if a spacer is arranged on the auxiliary capacitance line, there is no problem even if a short circuit occurs.

Although two layers of insulating films, that is, an oxide film and a nitride film, are formed on the scanning line or the auxiliary capacitance line, which is the lowermost layer in contact with the spacer of this embodiment, at least one insulating film is formed. It should be done.

In the present embodiment, among the wiring layers formed on the active matrix substrate, on the wiring closest to the substrate side, that is, on the lowermost layer wiring, and on this wiring, other wiring and electrodes, etc. Since the conductive material is not formed and the inorganic insulating film such as the oxide film or the nitride film is formed, the spacer is formed at the portion having high dielectric breakdown strength. It is possible to prevent a short circuit with the lower layer wiring. Further, when the spacer is arranged on the lowermost layer wiring, at least two layers of an insulating film formed on the lowermost layer wiring, another wiring layer, and an insulating film formed on the signal line in this case are formed. Therefore, the occurrence of the short circuit is less than that in the case where the spacer is arranged on the signal line which is the wiring other than the lowermost layer wiring.

FIG. 5 shows a sectional structure of an active matrix substrate 50 called a positive stagger type according to the second embodiment. The source 5 is provided in the TFT portion on the main surface side of the glass substrate 51.
2. The drains 53 are arranged facing each other with a predetermined distance. A semiconductor film 54 made of amorphous silicon is formed between these and a part of the source and drain, and a signal line 55 is connected to the drain 53. An insulating film 56 is deposited on the entire surface of these. The gate electrode 57 is formed on the insulating film 56 between the source and the drain described above. Further, in the wiring portion, the scanning line 58 is formed on the insulating film 56. An insulating film 59 is formed on the entire surface of the TFT section and the wiring section. Further, as in the case of FIG. 3, the alignment film 21 is formed on the entire surface of the pixel portion.

When such a positive stagger type active matrix substrate is used, the position where the spacer contacts is the signal line 55 which is the lowermost layer. In this case as well, the two insulating layers 56 and 59 are formed on the signal line 55, and there is the least possibility that the insulating characteristics will deteriorate when the spacers are brought into contact with each other.

Examining the area on the lowermost wiring layer with which the spacer abuts, the larger the area, the more stable the function of the spacer becomes. However, if the area is too large, the spacer is formed on the gate line and the spacer. The parasitic capacitance formed between the common electrode and the common electrode cannot be neglected, and the waveform of the applied voltage is blunted or delayed and the display characteristics are deteriorated.
Therefore, it is desirable that the total area of the switching elements, for example, the transistors is twice or less. However, in order to maintain a stable substrate-to-substrate distance, the total area on the lowermost layer wiring with which the spacer abuts needs to be 1/20 or more of the total area of the switching element, for example, the transistor. Here, the switching element area means the area of the semiconductor layer.

Further, the number of spacers abutting on the lowermost wiring layer must be a number corresponding to the number of switching elements, for example, transistors, and a fixed number according to the overall size at the end of the matrix. Is necessary,
It is necessary to have a linear function relationship with the number of switching elements, for example, transistors, and it is obvious that the spacers in the display region are uniformly distributed and the cell gap is uniform.

According to the above-mentioned embodiments, the spacer is made to contact the lowermost wiring layer, but it may be another layer as long as it has a high dielectric breakdown strength. Some of such embodiments are shown below.

FIG. 6 is a cross-sectional view of an active matrix liquid crystal device according to a third embodiment of the present invention. This cross-sectional view is taken along the cutting line drawn by the one-dot chain line in the plan view shown in FIG. Including things as main parts.

In this liquid crystal display element, an inverted stagger type active matrix substrate 60 and a counter substrate 80 are arranged so as to face each other, and a liquid crystal composition 40 is sealed between them.

The TFT portion of the active matrix substrate 60 has an inverted staggered structure, the gate electrode 62 is disposed on the TFT portion on the main surface side of the glass substrate 61, and the insulating film 63 made of silicon nitride is formed thereon. Have been deposited. A semiconductor film 64 made of amorphous silicon is formed on the insulating film 63 and above the gate electrode 62, and a source 65 and a drain 66 are formed in a predetermined central portion of the semiconductor film 64 so as to extend over the semiconductor film 64 and the insulating film 63. Are formed so as to face each other with a distance of. A signal line 67 is connected to the drain 66, and a pixel electrode 68 is connected to the source 65. An insulating film 69 is formed on the entire surface of the TFT portion, and an alignment film 71 is formed on the entire surface of the pixel portion. As is clear from FIG. 6, the gate electrode wiring 62 is located below the signal line 67 which is the upper layer wiring.

The upper counter substrate 80 has red, green, and blue color filters 82R, 82G, and 82B formed on the glass substrate 81 in accordance with pixel positions. Further, these color filter materials are laminated to form a columnar spacer 83. The spacer 83 includes a red layer 83R, a green layer 83G and a blue layer 83B, which correspond to the color filters 82R, 82G and 82B. A common electrode 84 and an alignment film 85 are deposited on the entire surface, and a black matrix 86, which is a light shielding film, is formed between the color filters.

Both substrates 60 and 80 are opposed to each other and fixed with an adhesive 87. The liquid crystal composition 4 is provided between both substrates.
0 is filled and sealed.

In the present embodiment, of the wiring layers formed on the active matrix substrate, the wiring farthest from the substrate side, that is, the uppermost wiring, other wirings and electrodes on the wirings in brackets. Since a conductive material such as is not formed, and a spacer is formed at a place with high dielectric breakdown strength where an inorganic insulating film such as a nitride film is formed, the common electrode and the top layer wiring formed on the spacer It is possible to prevent a short circuit with a certain signal line.

FIG. 8 is an element cross-sectional view of an active matrix liquid crystal element showing a fourth embodiment of the present invention, which corresponds to the plan view shown in FIG.

In this liquid crystal display device, an inverted stagger type active matrix substrate 90 and a counter substrate 100 are arranged so as to face each other, and a liquid crystal composition 40 is sealed between them.

The active matrix substrate 90 has a pixel region 92 in which a pixel electrode 93 is present on the main surface of a glass substrate 91.
And the element portion 94 in which the TFT is formed are repeatedly formed.

The counter substrate 100 has red, green, and blue color filters 102R, 102G, and 102B formed on the glass substrate 101 so as to match the pixel positions. Further, these color filter materials are laminated to form a columnar spacer 103.

The spacer contacts the active matrix substrate in the non-wiring area between the pixel area and the element area. However, since such a non-pixel non-wiring region is very narrow, the diameter of the spacer needs to be 3 to 4 μm.

In the method of manufacturing the liquid crystal display device having the inverted stagger type structure, after the source, drain and signal line are formed in the same layer,
A pixel electrode is formed so as to be connected to the source, then an insulating film is formed on the entire surface, and the insulating film in a portion substantially corresponding to the pixel electrode shape and corresponding to the pixel electrode pattern is removed. When forming the pixel electrode, it is necessary to form the pixel electrode and the signal line so that they are not short-circuited. However, since the pixel electrode is formed through the insulating film on the scanning line, the pixel electrode and the signal line are formed. To be 5 μm, for example, and to be wider than the distance 4 μm between the pixel electrode and the scanning line. In the case of such a design, arranging the spacer between the pixel electrode having a wide width and the scanning line causes the formation of the common electrode on the pixel electrode and the spacer rather than arranging between the pixel electrode and the signal line. This is preferable because the occurrence of a short circuit can be further prevented.

In the case of this embodiment, there is no fear of a short circuit, and high reliability can be maintained.

FIG. 10 is a cross-sectional view of an active matrix liquid crystal device according to a fifth embodiment of the present invention,
The columnar spacers provided on the counter substrate are brought into contact with both the non-pixel portion and the pixel portion of the active matrix substrate, that is, the boundary portion. This cross-sectional view includes, as a main part, a cross section taken along a dashed line in the plan view shown in FIG.

In this liquid crystal display element, the active matrix substrate 90 and the counter substrate 110 are arranged so as to face each other, and the liquid crystal composition 40 is sealed between them. The structure of the active matrix substrate 90 is shown in FIG.
Since it is exactly the same as in the above case, the same components are given the same reference numerals and the description thereof will be omitted.

The counter substrate 110 has red, green, and blue color filters 112R, 112G, and 112B formed on the glass substrate 111 in accordance with pixel positions. Further, these color filter materials are laminated to form a columnar spacer 113. This columnar spacer 11
3 is not provided in the green filter 112G.
This is because the color that is most easily recognized among the three primary colors is green due to the nature of human vision, and is most noticeable even when there is a defect. Therefore, when the spacer is provided so as to extend over the pixel portion, it is preferable that only the blue region, the red region, or the combination of the blue region and the red region be used as the pixel region that the spacer extends.

When the spacer is arranged so as to extend over the pixel portion, a part of the pixel electrode with which the spacer abuts is removed so that the spacer does not directly abut the pixel electrode. It is possible to reduce the possibility of short circuit between the common electrode and the pixel electrode formed on the pixel electrode.

Further, if the electrodes formed on the spacers in the portions contacting the active matrix substrate are not connected to the common electrode by, for example, a structure in which the electrodes are not formed on the side surfaces of the spacers, the pixel is formed. A short circuit can be prevented without removing a part of the electrode.

Further, in the inverted stagger type structure, when patterning the insulating film on the signal line, if the insulating film is patterned so that the peripheral portion of the pixel electrode pattern overlaps the insulating film, it is formed across the pixel electrodes. By disposing the spacer portion in the region where the pixel electrode and the insulating film overlap, the occurrence of short circuit can be prevented.

Although the spacer is in contact with the pixel portion and the non-pixel portion adjacent to the pixel portion as shown in the figure, when the diameter of the spacer is large, a part of the switching element is also disposed so as to straddle it. It doesn't matter.

Further, if the spacer abutment position is the final rubbing position in the pixel portion, the misaligned region due to the presence of the spacer during rubbing does not reach the adjacent pixel, and good rubbing can be performed.

Further, the present invention is not limited to the case where the position of the spacer extends over the pixel portion and the non-pixel portion as in the present embodiment.
In every spacer arrangement pattern of every switching element structure, arrange the spacers so that at least the green pixel does not include a defective rubbing area due to the presence of the spacers during the rubbing process of the alignment film, and the spacer arrangement location is within one pixel. It is effective to set the rubbing final position in.

FIG. 12 is an element cross-sectional view of an active matrix liquid crystal element showing a sixth embodiment of the present invention. This cross-sectional view is taken along the cutting line drawn by the alternate long and short dash line in the plan view shown in FIG. Including things as main parts.

In this liquid crystal display device, an inverted stagger type active matrix substrate 120 and a counter substrate 130 are arranged so as to face each other, and a liquid crystal composition 40 is sealed between them. The active matrix substrate 120 is provided with the TFTs as the switching elements and the pixel portion as in the previous embodiments, but the description of the TFTs is omitted because they have the same configuration. In the pixel portion, the auxiliary capacitance line 122 as the lowermost layer wiring is formed on the glass substrate 121, the entire pixel region including the auxiliary capacitance line 122 is covered with the insulating film 123, and the pixel electrode 124 is formed thereon. ing. An insulating film 125 is formed on the pixel electrode at a position corresponding to the auxiliary capacitance line. Further, an alignment film 126 is formed on the entire surface.

The auxiliary capacitance line is made of a non-transparent film such as MoT.
In the case of being formed of a, the auxiliary capacitance line is a non-display area, so that even if a spacer is formed thereon, it does not affect the display.

The counter substrate 130 has red, green, and blue color filters 132R, 132G, and 132B formed on the glass substrate 131 in accordance with pixel positions. A black matrix 136, which is a light-shielding film, is arranged between these color filters. Further, these color filter materials are laminated to form a columnar spacer 133. The columnar spacers 133 are provided at positions corresponding to the auxiliary capacitance lines 122 of the active matrix substrate 120.

The active matrix substrate 120 and the counter substrate 130 are opposed to each other and fixed with an adhesive 137. The liquid crystal composition 40 is filled and sealed between both substrates.

In this embodiment, the columnar spacer 133 is used.
Is provided at a position corresponding to the auxiliary capacitance line 122,
Even if the columnar spacers are in strong contact with the active matrix substrate 120, the reliability of the device is not impaired. Also,
Since the insulating film 125 is provided on the pixel electrode, the insulating property can be maintained even if the alignment film 126 is broken.

FIG. 14 is an element cross-sectional view of an active matrix liquid crystal element showing a seventh embodiment of the present invention.

In this liquid crystal display element, the active matrix substrate 140 and the counter substrate 130 are arranged so as to face each other, and the liquid crystal composition 40 is sealed between them. Since the counter substrate 130 is the same as that in the case of FIG. 12, description thereof will be omitted.

The active matrix substrate 140 is different from the above-described embodiments in that the T as a switching element is used.
The FT is a positive stagger type.

A semiconductor film 142 made of amorphous silicon is formed in the TFT portion on the main surface side of the glass substrate 141, and a source 146 and a drain 147 are formed so as to face each other with the semiconductor film 142 interposed therebetween. A gate electrode 14 is formed on the semiconductor film 142 via an insulating film 145.
8 are formed. An insulating film 149 is deposited on the entire surface of such a TFT portion. The pixel electrode 150 is connected to the source 146. An auxiliary capacitance line 152 made of the same polysilicon as the gate electrode and formed in the same step as the gate electrode is formed in the central portion through an insulating film 151. An alignment film 153 is formed on the entire surface of the pixel portion.

The active matrix substrate 140 and the counter substrate 130 are opposed to each other and fixed with an adhesive 137. The liquid crystal composition 40 is filled and sealed between both substrates.

In this embodiment, when the thin alignment films 135 and 153 are broken by pressure, the columnar spacer 133 directly contacts the auxiliary capacitance line 152, but the auxiliary capacitance line 152 and the common electrode 134 are supplied with the same potential. Therefore, even if both are short-circuited, there is no problem in operating characteristics. Further, since the insulating film 151 is provided on the pixel electrode,
Even if the alignment films 135 and 136 of the spacer portion are broken, a short circuit between the pixel electrode 150 and the common electrode 134 can be prevented,
Insulation can be maintained.

Further, for example, the spacer can be positively used as a conductor. That is, if each of the color filter materials is made conductive, a voltage is applied from the active matrix substrate to the common plate electrode 134.
The spacer 133 can play a role of an electrode transfer member (transfer) for applying the voltage via the spacer 133. This electrode transfer member is usually made of silver paste,
If the spacer is also used, this silver paste becomes unnecessary. In addition, the electrode transfer member had to be formed in the peripheral portion of the pixel pixel and had a large resistance. However, when the spacer functions as the electrode transfer member as in this embodiment, a large number of electrode transfer members are formed in the pixel region. Since it can be formed inside, the resistance can be reduced.

In this embodiment as well, as in each of the above-described embodiments, since the spacer can be formed in the non-pixel region, it is possible to eliminate display defects due to light leakage around the spacer and uneven diffusion of the spacer, and to improve the contrast. It is possible to provide an inexpensive liquid crystal display device having high display performance such as brightness and brightness.

Although the auxiliary capacitance line is formed on the pixel electrode via the insulating film in FIG. 12, the pixel electrode portion with which the spacer abuts is removed, and the insulating film is formed there to project the spacer. You may try to hit it.

FIG. 15 and FIG. 16 show such an example and are partial enlarged sectional views showing a modification of the auxiliary capacitance line portion in FIG.

In FIG. 15, the pixel electrode 124 in the portion where the spacer contacts is removed. In this case, a short circuit between the pixel electrode and the common electrode can be effectively prevented.

In FIG. 16, the pixel electrode 124 and the insulating film 123 thereunder are removed from the portion where the spacer is in contact. In this case, the spacer and the auxiliary capacitance line 1
Since 22 contacts, the short circuit between the pixel electrode and the common electrode can be effectively prevented. In this case, if the insulating film is not formed on the spacer, the spacer can be used as the electrode transfer member described above.

FIG. 17 shows an eighth embodiment in which a spacer is provided at a position corresponding to the intermediate wiring layer of the active matrix substrate. In this figure, the parts corresponding to those in FIG. 5 are given the same numbers.

A semiconductor layer 54 made of polysilicon is provided in the TFT portion on the main surface side of the glass substrate 51, a gate insulating film 56 is formed thereon, and the gate electrode 5 is formed thereon.
7 and an auxiliary capacitance line 67 formed in the same process as the above. An insulating film 59 made of silicon oxide and a silicon nitride film 14 are formed on these. At positions corresponding to both sides of the gate electrode, the source electrode 52 and the drain electrode 53 penetrate the silicon nitride film 14, the insulating film 59, and the gate insulating film 56 to reach the semiconductor layer 54. The drain electrode is connected to the signal line (not shown). The gate electrode 57 and the auxiliary capacitance line 67 together form an intermediate layer wiring.

Further, an insulating layer 221 whose surface is flattened is deposited on the whole of these, and a pixel electrode 222 is formed on the surface. The pixel electrode is connected to the source electrode 52 by a material such as aluminum filled in the contact hole 223.

The auxiliary capacitance line is electrically connected to the pixel electrode, and forms a capacitance Cs between the semiconductor layer and a layer formed in the same layer through a gate insulating film.

As is apparent from FIG. 17, the spacer 224 is provided on the gate electrode 57, which is an intermediate wiring, and at a position corresponding to a position where no other wiring or electrode is formed. However, if the ITO (Indium Tin Oxide) film, which is the common electrode, is formed on the top and side surfaces when contacting the pixel electrode like the spacer 224 ', an electrical short circuit may occur. As such, no spacers are provided at such locations.

In this embodiment, since polysilicon is used as the semiconductor layer instead of the conventional amorphous silicon, the charge mobility is good, and the semiconductor layer is formed simultaneously with the driver portion of the liquid crystal display element. Since it can be formed, it can also contribute to cost reduction.

As described above, in the present invention, in the liquid crystal display element in which the spacer is formed on the counter substrate and the common electrode is formed on the front surface of the substrate including the spacer, the inorganic insulating film formed on the active matrix substrate is used. By arranging the spacers via the spacers, it is possible to prevent a short circuit between the common electrode formed on the spacers and the conductive material such as wiring or electrodes on the active matrix substrate, and a liquid crystal display device with good yield and good display can be provided. can get. Further, the same effect can be obtained not only by the columnar spacer of the laminated layer of the colored layer but also by the columnar spacer made of a single layer of resin. When the spacer is formed on the same substrate as the substrate on which the colored layer is formed, the spacer can be formed at the same time when the colored layer is formed. Therefore, the colored layer-stacked spacer can reduce the conventional spherical spacer spraying process.

18 to 20 are element sectional views showing a ninth embodiment of the present invention. In this embodiment, FIG.
Although the columnar spacers are formed in the same manner as in the case of the first embodiment illustrated in FIG. 3, the contact position of the columnar spacers does not matter.

That is, referring to FIG. 18, a gate line 164 is formed in a region corresponding to one pixel on the surface of the lower active matrix substrate 161, and the gate insulating film 1 is formed thereon.
A thin film transistor (not shown) made of amorphous silicon formed via 62, and the signal lines 16 on the left and right sides thereof.
3 and pixel electrodes 165 made of ITO are respectively formed, and an alignment film 166 is formed thereon. These are repeatedly formed in pixel units.

In the upper counter substrate 170, a light shielding layer 172 and a coloring layer 173 are formed on the surface of a glass substrate 171 in a region corresponding to one pixel. The colored layer is repeatedly formed on the pixel in the order of red 173R, green 173G, and blue 173B. A spacer 174 made of a cylindrical resist having an inverse taper is formed on a part of the light shielding layer, and a common electrode 175 and an alignment film 176 are formed on the tip and each colored layer. Since the spacer has an inverse tapered shape in this manner, when forming the common electrode by sputtering, a film is not formed on the side surface of the spacer due to overhang, and the spacer itself does not serve as a conductor. Therefore, since such a spacer is insulative, it does not matter where it abuts. Therefore, it is possible to prevent generation of unnecessary electric capacity and electric short circuit, and it is possible to make contact with any layer, thus increasing the degree of freedom in design.

Next, a method of manufacturing such a liquid crystal display element will be described. First, an active matrix substrate is manufactured. Similar to the process of forming a normal TFT, film formation and patterning are repeated on a # 7059 glass substrate 161 manufactured by Corning Co. having a thickness of 1.1 mm to form a thin film transistor made of amorphous silicon, a signal line 163, and a gate line 16.
4. An array substrate having a pixel electrode 165 made of ITO is formed. After that, as an alignment film material, AL-1051
(Nippon Synthetic Rubber Co., Ltd.) is applied over the entire surface to a thickness of 500 angstrom, and a rubbing treatment is performed to form an alignment film 16
6 is formed.

Next, a counter substrate is prepared. The method is the same as in the case of the first embodiment, on the # 7059 glass substrate 171 manufactured by Corning, a photosensitive black resin CK-2000 (Fuji Hunt Technology Co., Ltd.).
(Manufactured), applied, exposed, and developed, and baked to form a light-shielding layer 172 having a film thickness of 2.0 μm. Then, a UV curable acrylic resin resist C in which a red pigment is dispersed
R-2000 (manufactured by Fuji Hunt Technology Co., Ltd.) was used to form a red colored layer 173R, and similarly green and blue colored layers 173G and 173B were repeatedly formed to form 23 layers each.
Bake at 0 ° C. for 1 hour. Here, the green coloring material is CG
-2000 (manufactured by Fuji Hunt Technology Co., Ltd.), CB-2000 (manufactured by Fuji Hunt Technology Co., Ltd.) is used as the blue coloring material, and the R, G, and B film thicknesses are each 1.5.
μm.

Next, a UV-curable acrylic resin resist containing no pigment is applied over the entire surface with a spinner, and a photomask is used to irradiate the desired spacer formation positions on the light-shielding layer with light having a wavelength of 365 nm. 100 mJ / cm
Irradiate ² and develop with a 1% aqueous solution of KOH for 30 seconds to form spacers 174 having a film thickness of 4 μm. The development at this time is strongly performed. As a result, the diameter of the tip portion which is sufficiently irradiated with light and is sufficiently hardened is maintained as planned, but the root portion, which is not always sufficiently hardened, is excessively etched to form an inverse tapered shape. After that, an ITO film was formed as the transparent electrode 175 by a sputtering method so as to have a thickness of 1500 angstrom, a similar alignment film material was formed thereon, and then a rubbing treatment was performed to form an alignment film 176. Since the spacer 174 has an inversely tapered shape and has an overhanging upper portion, the ITO film and the alignment film are not deposited on the side surface of the spacer during this sputtering. In addition, by forming the spacer before forming the transparent electrode, the adhesion of the spacer can be obtained.

Thereafter, an adhesive is printed along the periphery of the alignment film 176 on the substrate 171 except for the injection port (not shown), and an electrode transfer material for applying a voltage from the active matrix substrate to the common electrode. (Not shown) is formed on the electrode transfer electrode around the adhesive.

Next, the alignment films 176 and 166 face each other,
In addition, the substrate 1 is set so that each rubbing direction is 90 degrees.
Place 60 and 170 and heat to cure the adhesive and bond them together. Then, as a liquid crystal composition 40, a liquid crystal composition 40 containing ZLI-1565 (manufactured by E. Merck) containing 0.18 wt% of S811 was injected by an ordinary method.
After that, the injection port is sealed with an ultraviolet curable resin to complete the process.

The color display type active matrix liquid crystal display element thus formed is of a type that does not use plastic beads or the like, and since the spacer can be brought into contact with an arbitrary layer, light leakage from the spacer is prevented. In addition, it is possible to prevent a short circuit and to prevent the occurrence of delay and delay of the applied voltage due to the parasitic capacitance generated between the wiring and the spacer, and it is possible to obtain a reliable liquid crystal display device with high display performance.

In order to obtain a shape having an overhang, adjustment was made by development in this embodiment, but it can be realized by hardening only the surface by weakening the irradiation light at the time of exposure. FIG. 19 is a modification of the embodiment shown in FIG. 18, and the same elements as those in FIG. 18 are designated by the same reference numerals and detailed description thereof will be omitted.

According to this embodiment, the structure of the active matrix substrate 160 is exactly the same, and the counter substrate 1
The only difference is that 70 'is a spacer 77 composed of three colored layers 177R, 177G, and 177B. The three colored layers 177R, 177G, and 177B are formed such that the diameters of the layers at the tip end are larger, and are substantially inversely tapered as a whole.

Next, a method of manufacturing this liquid crystal display element will be described. Since the manufacturing of the active matrix substrate 160 and the whole assembly are the same as those in FIG. 17, the description thereof is omitted, and the manufacturing of the counter substrate 170 ′ will be described.

On the glass substrate 171, a light-shielding layer 172 having a thickness of 2.0 μm is formed by using a photosensitive black resin CK-2000 (manufactured by Fuji Hunt Technology Co., Ltd.). Then, by the same method, the red colored layers 173R, 177
R, green colored layer 173G, 177G, blue colored layer 173
B and 177B are repeatedly formed. The red coloring material used here is CR-2000 (manufactured by Fuji Hunt Technology Co., Ltd.), the green coloring material is CG-2000 (manufactured by Fuji Hunt Technology Co., Ltd.), and the blue coloring material is CB-20.
00 (manufactured by Fuji Hunt Technology Co., Ltd.), and the thickness of each colored layer is 1.5 μm. In the spacer 77, colored layers of three colors are laminated, but the diameter of each layer is R; 1
0 μm, G; 13 μm, B; 16 μm, and the diameter is increased toward the upper layer. In this way, the spacers can be formed simultaneously with the formation of the color filters.

After that, an ITO film is formed as the common electrode 175 to a thickness of 1500 angstrom by the sputtering method, a similar alignment film material is formed thereon, and then a rubbing process is performed to form an alignment film 176. Since the spacer portion has a shape having an overhang whose diameter increases toward the upper layer, when the ITO film and the alignment film are deposited by sputtering, the spacer does not adhere to the side surface and the insulating property of the spacer is maintained. The points are the same as in the case of FIG.

Also in the liquid crystal display element formed by using such a counter substrate, since the spacer can be brought into contact with an arbitrary layer, not only short circuit but also the applied voltage due to the parasitic capacitance generated between the wiring and the spacer is caused. It was possible to prevent the occurrence of dullness and delay, and to obtain a reliable liquid crystal display device with high display performance.

As described above, as a structure in which the electrode formed on the spacer at the portion contacting the active matrix substrate and the common electrode are in a non-connected state, the thickness of the spacer becomes smaller toward the upper layer as seen from the substrate. If the spacer is provided with a portion that changes from a thin portion to a thick portion, it becomes difficult for the transparent electrode to be formed at the time of forming the transparent electrode, and as a result, the electrode portion formed on the spacer and the common electrode are formed. And are disconnected.

FIG. 20 is a partial sectional view showing a modification of the embodiment shown in FIG. In this embodiment, two layers of cylindrical walls 178R and 178G are formed concentrically with the spacer 177 when forming the spacer. In such a structure, since the cylindrical wall bodies are stacked for two colors, the height is lower than that of the spacer. This concentric cylindrical wall body prevents the sputtered particles from entering from an oblique direction, prevents the film formation on the sidewall of the spacer, and prevents the spacer from falling off during rubbing, thus improving reliability. It is effective for

FIG. 21 is a partial sectional view showing another modification of the embodiment shown in FIG. In this embodiment, two columnar barrier layers 17 having a diameter of 10 μm are provided at a position on the entry side in the alignment treatment direction of the alignment film with respect to the columnar spacers 177.
9R and 179G are provided.

According to this embodiment, during the alignment treatment,
The columnar spacers can be prevented from falling off by the external force of the rubbing, and the reliability can be increased. This embodiment can be carried out even when there is not enough space to form the concentric cylindrical wall body as shown in FIG.

Various modifications can be made to the embodiment shown in FIG. 21. For example, a columnar spacer having an overhang is brought into contact with the lowermost wiring layer at a position corresponding to that shown in FIG. be able to.

FIG. 22 is a sectional view showing a tenth embodiment of the present invention, which is applied to a liquid crystal display device having a color filter formed on the active matrix substrate side.

This active matrix substrate 180 has a gate electrode 182 and a scanning line 1 on the main surface of a glass substrate 181.
83 and a pixel electrode 188 are respectively arranged, and an insulating film 184 is deposited on the gate electrode 182 and the scanning line 183. A semiconductor film 185 made of amorphous silicon is formed on the insulating film 184 and above the gate electrode 182.
A source 187 and a drain 186 are formed so as to straddle the semiconductor film 185 and the insulating film 184 so as to face the central portion of the semiconductor film 185 with a predetermined distance therebetween. A signal line (not shown) is connected to the drain 86 to form the source 187 and the pixel electrode 1.
88 is connected. A red layer 189R, a green layer 189G, and a blue layer 189B that form a color filter are sequentially formed on the pixel electrode 188 for each pixel. An alignment film 190 is formed on the entire surface of these.

The counter substrate 200 on the upper side is the glass substrate 20.
A transparent electrode film 202 and an alignment film 203 are deposited on the entire surface of the film 1. In addition, the active matrix substrate 180
Corresponding to the scan line 183 of the red layer 204R and the green layer 20
A columnar spacer 20 in which 4G and a blue layer 204B are laminated
4 are formed.

These two substrates are opposed to each other, and the spacer 204 of the counter substrate 200 is the active matrix substrate 1
It is arranged to abut on the scanning line which is the lowermost layer of 80.

In the structure in which the normal color filter is formed on the pixel electrode, there is a problem of voltage drop due to the colored layer, but the problem of voltage drop can be solved by making the colored layer conductive. However, when a spacer is formed by laminating such conductive colored layers, if the spacer is formed on the lowermost layer, two layers are formed on the scanning line which is the lowermost layer, as in the case of FIG. The insulating layer is present, and even if the spacers 204 come into contact with each other, it is extremely unlikely that a defect such as a short circuit occurs due to loss of the insulating property. And both substrates are adhesive layers 19
1, and the liquid crystal composition 40 is filled and sealed between both substrates.

In order to realize such a structure, an array may be formed almost in the same manner as in FIG. 1 described above, and then a colored layer may be selectively formed on the pixel electrode.

If the conductive colored layer functions sufficiently as an electrode, it is not necessary to separately form the pixel electrode.

FIG. 23 is an element sectional view showing an eleventh embodiment of the present invention, which is an active matrix substrate 160.
And the counter substrate 210 are arranged so as to face each other, and the liquid crystal composition 40 is sealed between the both substrates. Since the active matrix substrate 160 is exactly the same as that shown in FIG. 18, its description is omitted.

The counter substrate 210 is formed by repeatedly forming a light shielding layer 212, a red coloring layer 213R, a green coloring layer 213G, and a blue coloring layer 213B on the surface of the glass substrate 211. A red coloring layer 213 is formed on a part of the light shielding layer 212.
A columnar spacer 214 is formed by stacking layers 214R, 214G, and 214B corresponding to R, the green coloring layer 213G, and the blue coloring layer 213, respectively. A common electrode 215 and an alignment film 216 are formed on the tip of the spacer and each colored layer. Further, an insulating film 217 is formed on the tip portion of the columnar spacer.

24 and 25 are simplified sectional views drawn by paying attention to the structure of the tip portion of the spacer, and FIG. 24 is a transparent electrode (ITO film) 215 only on the tip surface of the spacer 214.
25 shows the case where the entire surface of the spacer is covered with the insulating film 217, and FIG. 25 shows the case where the entire spacer 214 is covered with the insulating film 217 and the transparent electrode (ITO film) 215 is formed only on the tip. There is. By doing this,
It is possible to suppress the adverse effect that the impurity component is eluted from the spacer member and exerts on the element, and further it is possible to prevent a short circuit between the common electrode and the conductive film formed on the active matrix substrate.

The present invention can be modified in various ways other than the embodiment described above.

For example, when the spacer having the colored layer shown in FIG. 8 formed stepwise is brought into contact with the lowermost wiring layer as shown in FIG. 1, the insulating property in the spacer portion is further enhanced. be able to.

The order of forming the colored layers in each of the embodiments is an example, and the order is not limited to this.

Further, in each of the embodiments, the laminated spacer is formed by laminating the colored layers of three colors, but it may be formed by laminating the colored layers of two colors by appropriately selecting the thickness of the colored layers. It is possible. Further, as the laminated spacer, one whose diameter is continuously reduced from the tip to the root in a laminated state, or the diameter of a specific layer is gradually reduced from top to bottom, and the reduced diameter is maintained in the lower layer Things are also included.

[0119]

As described above, according to the present invention, the colored layers of the color filter are overlapped to form the spacers, and the spacers are arranged at the positions where the dielectric breakdown strength of the active matrix substrate is high. It is possible to improve the display performance and the yield and to realize the low cost because the spacer is not used and the insulating property of the spacer is improved.

[Brief description of the drawings]

FIG. 1 is an element cross-sectional view showing a schematic configuration of a first embodiment of a liquid crystal display element according to the present invention.

FIG. 2 is a device plan view showing a cross-sectional portion of FIG.

3 is a cross-sectional view showing a detailed configuration of an active matrix substrate used in the liquid crystal display element of FIG.

FIG. 4 is a device plan view showing a cross-sectional portion of FIG.

FIG. 5 is an element sectional view showing a structure of a positive stagger type active matrix substrate according to a second embodiment of the present invention.

FIG. 6 is a sectional view showing a configuration using an inverted staggered active matrix substrate according to a third embodiment of the present invention.

7 is a device plan view showing a cross-sectional portion of FIG. 6. FIG.

FIG. 8 is a cross-sectional view showing a fourth embodiment of the present invention and showing a schematic configuration of an embodiment in which a spacer is brought into contact with a non-pixel non-wiring region.

9 is a plan view of an element showing a cross section of FIG. 8. FIG.

FIG. 10 is a cross-sectional view showing a fifth embodiment of the present invention and showing a schematic configuration of an embodiment in which a spacer is in contact with a non-pixel region and a pixel region.

11 is a plan view of an element showing a cross-sectional portion of FIG.

FIG. 12 is a cross-sectional view showing a sixth embodiment of the present invention and showing a schematic configuration of an embodiment in which a spacer is brought into contact with an auxiliary capacitance line.

FIG. 13 is a device plan view showing a cross-sectional portion of FIG. 12;

FIG. 14 shows a seventh embodiment of the present invention and is a cross-sectional view showing a schematic configuration of the embodiment in which a spacer is brought into contact with the auxiliary capacitance line.

15 is a partial enlarged cross-sectional view showing a modified example of the auxiliary capacitance line portion of FIG.

16 is a partial enlarged cross-sectional view showing a modified example of the auxiliary capacitance line portion of FIG.

FIG. 17 shows an eighth embodiment of the present invention and is a cross-sectional view showing a schematic configuration of an embodiment in which a spacer is brought into contact with an intermediate wiring layer.

FIG. 18 shows a ninth embodiment of the present invention and is a cross-sectional view showing a schematic configuration of an embodiment in which a spacer is brought into contact with an intermediate wiring layer.

19 is a partial cross-sectional view showing a modified example of the embodiment shown in FIG.

20 is a partial cross-sectional view showing a modified example of the embodiment shown in FIG.

FIG. 21 is a partial cross-sectional view showing a modified example in which the columnar spacers are prevented from falling off during the alignment treatment.

FIG. 22 shows a tenth embodiment of the present invention,
It is sectional drawing which shows the schematic structure applied to what is called a color filter on array type which provided the color filter in the active matrix substrate side.

FIG. 23 shows an eleventh embodiment of the present invention,
It is sectional drawing which shows the schematic structure of what made the spacer an insulation type.

FIG. 24 is a partially enlarged view of a spacer.

FIG. 25 is a partially enlarged view of a spacer.

[Explanation of symbols]

10, 50, 60, 90, 120, 140, 160, 1
80 active matrix substrate 11, 31, 51, 61, 71, 81, 91, 100,
121, 131, 141, 161, 171, 181, 2
01, 211 glass substrate 12, 57, 62, 148, 164, 182 gate electrode 13, 54 scanning line 14, 20, 56, 59, 123, 221 insulating film 15, 54, 64, 185 semiconductor film 16, 52, 63 , 65,146 Source 17, 53, 66, 147 Drain 18, 55, 163 Signal line 16, 68, 124, 222 Pixel electrode 21, 35, 66, 85, 153, 166, 176, 1
90, 203, 216 Alignment film 30, 80, 100, 110, 130, 170, 20
0, 210 counter substrate 32R, 32G, 32B, 33R, 33G, 33B, 8
2R, 82G, 82B, 83R, 83G, 83B, 10
2R, 102G, 102B, 112R, 112G, 11
2B, 132R, 132G, 132B, 133R, 13
3G, 133B, 173R, 173G, 173B, 17
7R, 177G, 177B, 204R, 204G, 20
4B Colored layers 33, 74, 83, 103, 113, 133 Spacers 34, 175, 202, 215 Common electrode 35, 86, 103, 136, 172 Light-shielding film 40 Liquid crystal composition 61, 122, 152, 183 Storage capacitance line

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Jin Hafuji 8 Shinsugita-cho, Isogo-ku, Yokohama-shi, Kanagawa Prefecture Inside the Toshiba Yokohama Office (72) Inventor Teruyuki Midorikawa 7 Nisshincho, Kawasaki-ku, Kawasaki-shi, Kanagawa-ken Address 1 Inside Toshiba Electronics Engineering Co., Ltd.

Claims (48)

[Claims] 1. A plurality of scanning lines and a plurality of signal lines arranged so as to intersect with each other on one main surface, and formed at each intersection of the scanning lines and the signal lines. An active matrix substrate having connected switching elements, pixel electrodes connected to each switching element, and auxiliary capacitance lines, and a spacer having a columnar protrusion on one main surface, and including the spacer. In a liquid crystal display device comprising a counter substrate having a common electrode formed on the entire surface of the substrate, the active matrix substrate and the main faces of the counter substrate are opposed to each other, and a liquid crystal composition is sandwiched between these spacers, A liquid crystal display element, which is formed at a position where the dielectric breakdown strength of the active matrix substrate is high. 2. The liquid crystal display element according to claim 1, wherein the spacer is on a lower wiring layer formed closest to the active matrix substrate side of the scanning line signal line or the auxiliary capacitance line. A liquid crystal display element, characterized in that it is formed at a position where a conductive substance is not formed. 3. The liquid crystal display element according to claim 2, wherein two or more insulating films are formed on at least the lower wiring layer portion contacting the spacer. 4. The liquid crystal display element according to claim 3, wherein the scanning line is formed on the switching element via an insulating film, and the lower wiring layer with which the spacer contacts is the signal line. Liquid crystal display device characterized by. 5. The liquid crystal display element according to claim 3, wherein the switching element is formed on the scanning line via an insulating film, and the lower wiring layer with which the spacer abuts has the scanning line or the scanning line. A liquid crystal display element characterized by being an auxiliary capacitance line formed in the same layer as a scanning line. 6. The liquid crystal display element according to claim 3, wherein the two layers of insulating films are an oxide film and a nitride film. 7. The liquid crystal display element according to claim 1, wherein the spacer is an upper wiring layer formed farthest from the active matrix substrate side in the wiring layer of the scanning line signal line or the supplement capacitance line. A liquid crystal display device, characterized in that the liquid crystal display device is formed at a position above which a conductive substance is not formed. 8. The liquid crystal display element according to claim 7, wherein at least one insulating film is formed on at least the upper wiring layer portion contacting the spacer. 9. The liquid crystal display element according to claim 8, wherein the insulating film is a nitride film. 10. The liquid crystal display element according to claim 1, wherein the spacer is arranged on the auxiliary capacitance line, which is a lower wiring layer, and at the position where the pixel electrode is formed with the pixel electrode via an insulating film. A liquid crystal display element, wherein a pixel electrode portion corresponding to the arrangement position of the spacer is removed. 11. The liquid crystal display element according to claim 1, wherein the spacer is formed on the counter substrate, the common electrode is formed on the counter substrate including the spacer, and the spacer is a lower layer. A liquid crystal display element, which is formed on the auxiliary capacitance line which is a wiring layer, and a common electrode on the spacer is electrically connected to the auxiliary capacitance line. 12. The liquid crystal display element according to claim 1, wherein a colored layer is formed on the counter substrate, the spacer is formed by stacking a plurality of the colored layers, and includes the colored layer and the spacer. A liquid crystal display device, wherein the common electrode is formed on a substrate. 13. The liquid crystal display element according to claim 1, wherein a total of spacer areas of portions where the spacers abut is:
A liquid crystal display element, which is 1/20 or more and 2 times or less of the total area of the switching elements. 14. The liquid crystal display element according to claim 1, wherein the number of the spacers has a linear function relationship with the number of switching elements. 15. The liquid crystal display element according to claim 1, wherein the spacer has an inverse taper shape in which the diameter thereof monotonically decreases from the tip to the root. 16. The liquid crystal display device according to claim 15, further comprising a cylindrical wall body, which is lower than a height of the spacer and is concentric with the spacer, on an outer periphery of the spacer. Display element. 17. The liquid crystal display element according to claim 1, wherein an alignment film is formed on each of the active matrix substrate and the counter substrate, and the alignment film is provided on the entry side of the alignment film in the alignment treatment direction with respect to the columnar spacer. A liquid crystal display device, comprising a columnar barrier at a position lower than the height of the spacer. 18. A semiconductor layer formed on one main surface, a scanning line formed on the semiconductor layer via a first insulating film, and an auxiliary capacitance line formed in the same layer as the scanning line. Via the second insulating film formed thereon, the signal line formed on the second insulating film, and the first through hole formed in the semiconductor layer and the first insulating film. A drain electrode and a source electrode connected to each other, and a pixel electrode formed on the second insulating film connected to the source electrode through the second through hole of the second insulating film, An active matrix substrate in which the drain electrode and the signal line are connected to each other, a counter substrate including a common electrode formed on one main surface, and the main surfaces of the active matrix substrate and the counter substrate are opposed to each other, Liquid crystal composition sandwiched between these When a liquid crystal display device and a pillar projection for holding between the two substrates a distance between said active matrix substrate and the counter substrate. 19. The liquid crystal display element according to claim 18, wherein the spacer is arranged on the scanning line or the auxiliary capacitance line, which is an intermediate layer wiring, and at a position where no conductive substance is formed. A liquid crystal display device characterized in that 20. The liquid crystal display element according to claim 18, wherein the spacer is formed in the same step as the step of forming the second insulating film. 21. The liquid crystal display element according to claim 20, wherein the second insulating film is formed of a colored layer, and the spacer is formed by laminating a plurality of the colored layers. 22. The liquid crystal display device according to claim 18, wherein a plurality of colored layers are formed on the counter substrate, and the spacer is formed by laminating a plurality of the colored layers. A liquid crystal display device, wherein the common electrode is formed on a substrate including the. 23. The liquid crystal display element according to claim 18, wherein the spacer is arranged on the auxiliary capacitance line, which is an intermediate wiring layer, and at a position where the pixel electrode is formed with the pixel electrode via an insulating film. A liquid crystal display element, wherein a pixel electrode portion corresponding to the arrangement position of the spacer is removed. 24. The liquid crystal display element according to claim 18, wherein the spacer is formed on the counter substrate, the common electrode is formed on the counter substrate including the spacer, and the spacer is an intermediate layer. A liquid crystal display element, which is formed on the auxiliary capacitance line which is a wiring layer, and a common electrode on the spacer is electrically connected to the auxiliary capacitance line. 25. The liquid crystal display element according to claim 18, wherein a total of spacer areas of portions where the spacers abut is:
A liquid crystal display element, which is 1/20 or more and 2 times or less of the total area of the switching elements. 26. The liquid crystal display element according to claim 18, wherein the number of spacers has a linear function relationship with the number of switching elements. 27. The liquid crystal display element according to claim 18, wherein the spacer has an inverse taper shape in which the diameter thereof monotonically decreases from the tip to the root. 28. The liquid crystal display device according to claim 27, further comprising a cylindrical wall body, which is lower than a height of the spacer and is concentric with the spacer, on an outer periphery of the spacer. Display element. 29. The liquid crystal display element according to claim 18, wherein an alignment film is formed on each of the active matrix substrate and the substrate, and the position of the columnar spacer on the entry side in the alignment treatment direction of the alignment film. A liquid crystal display device comprising a columnar barrier having a height lower than that of the spacer. 30. A plurality of scanning lines and a plurality of signal lines arranged so as to intersect with each other on one main surface, and formed at each intersection of the scanning lines and the signal lines. An active matrix substrate having connected switching elements, a pixel electrode connected to each switching element, and an auxiliary capacitance line, an opposite substrate having a common electrode on one main surface, and the active matrix substrate A spacer that forms a columnar protrusion is provided between the counter substrates, the spacer is provided in a non-wiring portion in a non-pixel region, and main surfaces of the active matrix substrate and the counter substrate are opposed to each other, and a space between them is provided. A liquid crystal display device sandwiching a liquid crystal composition. 31. The liquid crystal display element according to claim 30, wherein the spacer is provided on the counter substrate side and the common electrode is formed. 32. The liquid crystal display device according to claim 30, wherein a colored layer and the spacer are formed on the active matrix substrate, and the spacer is formed by laminating a plurality of the colored layers. Liquid crystal display device characterized by. 33. The liquid crystal display device according to claim 31, wherein a colored layer and the spacer are formed on the counter substrate, and the spacer is formed by laminating a plurality of colored layers. element. 34. The liquid crystal display element according to claim 30, wherein a total of spacer areas of portions where the spacers abut is:
A liquid crystal display element, which is 1/20 or more and 2 times or less of the total area of the switching elements. 35. The liquid crystal display element according to claim 30, wherein the number of the spacers has a linear function relationship with the number of switching elements. 36. The liquid crystal display element according to claim 30, wherein the spacer has an inverse tapered shape in which the diameter thereof monotonically decreases from the tip to the root. 37. The liquid crystal display device according to claim 36, further comprising a cylindrical wall body, which is lower than a height of the spacer and is concentric with the spacer, on an outer periphery of the spacer. Display element. 38. The liquid crystal display element according to claim 30, wherein an alignment film is formed on each of the active matrix substrate and the counter substrate, and the alignment film is provided on the entry side of the alignment film with respect to the columnar spacer. A liquid crystal display device, comprising a columnar barrier at a position lower than the height of the spacer. 39. A plurality of scanning lines and a plurality of signal lines arranged so as to intersect with each other on one main surface, and formed at each intersection of the scanning lines and the signal lines. An active matrix substrate having switching elements connected to each other and pixel electrodes connected to each switching element, and a counter substrate having a common electrode on one main surface, and between the active matrix substrate and the counter substrate. A main surface of the active matrix substrate and a main surface of the counter substrate are opposed to each other so that the spacer abuts including a boundary portion between the non-pixel portion and the pixel portion of the active matrix substrate. A liquid crystal display device in which a liquid crystal composition is sandwiched between. 40. The liquid crystal display element according to claim 39, wherein the spacer is provided on a counter substrate side, the common electrode is formed on a substrate including the spacer, and the spacer and the pixel portion are provided. A liquid crystal display element, characterized in that an insulating film is formed between them. 41. The liquid crystal display element according to claim 39, wherein the spacer is provided on a counter substrate side, the common electrode is formed on a substrate including the spacer, and the non-pixel portion and the pixel portion are formed. A liquid crystal display device, wherein a part of the pixel electrode existing in the boundary region is removed. 42. The liquid crystal display element according to claim 39, wherein a colored layer and the spacer are formed on the active matrix substrate, and the spacer is formed by laminating a plurality of the colored layers. Liquid crystal display device. 43. The liquid crystal display element according to claim 40, wherein a colored layer and the spacer are formed on the counter substrate, and the spacer is formed by laminating a plurality of colored layers. Liquid crystal display device. 44. The liquid crystal display element according to claim 39, wherein a total of spacer areas of portions where the spacer contacts is:
A liquid crystal display element, which is 1/20 or more and 2 times or less of the total area of the switching elements. 45. The liquid crystal display element according to claim 39, wherein the number of the spacers has a linear function relationship with the number of switching elements. 46. The liquid crystal display element according to claim 39, wherein the spacer has an inverse taper shape whose diameter decreases monotonically from the tip to the root. 47. The liquid crystal display device according to claim 46, further comprising a cylindrical wall body, which is lower than a height of the spacer and is concentric with the spacer, on an outer periphery of the spacer. Display element. 48. The liquid crystal display element according to claim 39, wherein an alignment film is formed on each of the active matrix substrate and the counter substrate, and the alignment film is formed on an entrance side of the alignment film with respect to the columnar spacer. 2. A liquid crystal display device, characterized in that a columnar barrier lower than the height of the spacer is provided at the position.