JPH09117806A - Composite multilayer coated tool - Google Patents

Composite multilayer coated tool

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Publication number
JPH09117806A
JPH09117806A JP7302268A JP30226895A JPH09117806A JP H09117806 A JPH09117806 A JP H09117806A JP 7302268 A JP7302268 A JP 7302268A JP 30226895 A JP30226895 A JP 30226895A JP H09117806 A JPH09117806 A JP H09117806A
Authority
JP
Japan
Prior art keywords
film
layer
ticn
base material
film thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7302268A
Other languages
Japanese (ja)
Other versions
JP3705632B2 (en
Inventor
Norihiro Katou
範博 加藤
Manabu Yasuoka
学 安岡
Yuji Yamaguchi
祐二 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nachi Fujikoshi Corp
Original Assignee
Nachi Fujikoshi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nachi Fujikoshi Corp filed Critical Nachi Fujikoshi Corp
Priority to JP30226895A priority Critical patent/JP3705632B2/en
Publication of JPH09117806A publication Critical patent/JPH09117806A/en
Application granted granted Critical
Publication of JP3705632B2 publication Critical patent/JP3705632B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Physical Vapour Deposition (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a coat to improve adhesion with a base material by forming a multilayer film of a TiCN high hardness hard composite coat on a surface of a high speed tool as the base material, having high tenacity not to cause a defect while tool cutting by relaxing film stress and excellent in abrasion resistance. SOLUTION: A uniform organization of TiN or TiCN of total film thickness of a coated film of 2.0μm-6.0μm and of film thickness of 0.2μm-0.9μm structured of more than ten layers in multilayer constitution of a film with high speed tool steel as a base material is coated in a first layer as the lowest layer making contact with the base material. Additionally, TiCN is laminated on it as a second layer of 0.1μm-0.5μm in film thickness and TiN or TiCN is laminated on it as a third layer of 0.1μm-0.5μm in film thickness respectively, and thereafter, films of the same components as the second layer and the third layer of 1μm-0.5μm in film thickness are repeatedly laminated at least more than three times in order. The total number of layers is 10-20 by laminating TiCN of 0.2μm-1.0μm in film thickness on the top layer.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、切削工具の寿命向
上を目的として高速度工具鋼を母材とする工具本体に複
合多層被覆を施した複合多層被覆工具に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a composite multi-layer coated tool in which a composite multi-layer coating is applied to a tool body made of high-speed tool steel as a base material for the purpose of improving the life of a cutting tool.

【0002】[0002]

【従来の技術】従来の物理蒸着法による被覆工具はTi
Nを中心に各種の切削工具に応用されている。物理蒸着
法ではイオンプレ−ティングやスパッタリングが用いら
れ、低温(〜600℃)での被覆が可能なため高速度工
具鋼やダイス鋼を母材にした工具に適用されている。T
iNは比較的靭性に富む被覆膜であるがTi系ではこの
他にTiC、TiCN膜が良く知られている。
2. Description of the Related Art Conventional physical vapor deposition coated tools are Ti
It is applied to various cutting tools centering on N. In the physical vapor deposition method, ion plating or sputtering is used, and since coating at low temperature (up to 600 ° C) is possible, it is applied to tools using high speed tool steel or die steel as a base material. T
iN is a coating film having a relatively high toughness, but TiC and TiCN films are well known in addition to this in the Ti system.

【0003】TiCNは非常に硬度が高く、耐摩耗性に
優れているが炭素成分と窒素成分の比率により特性が変
化して、代表的な50%窒素50%炭素近傍のTiCN
を被覆した工具、特にフライス工具などは刃先に欠損を
生じるため使用されない場合があった。これは硬度が上
昇することにより耐摩耗性が向上する反面、強度が低く
衝撃に弱いため切削工具として適用するには高硬度とし
ての特性が欠点となるからである。この欠点を補うべく
例えば特公昭62−42995号公報では、最初に膜厚
が0.5μm〜1.0μmのTiN膜を被覆した後に少
なくとも膜厚が1.0μm以上のTiC膜又はTiCN
膜を被覆して2層構造としているが、このような膜厚が
1.0μm以上のTiC膜又はTiCN膜を積層する方
法では被膜強度が十分に確保できず層間剥離を生ずる場
合があった。また特開平6−101018号公報では、
最初に膜厚が0.1μm〜3.0μmのTiN膜を被覆
した後にTiN膜とTiCN膜を3層積層する方法によ
り被膜強度の改善を図っているが、膜厚が1.0μm以
上のTiC膜では被膜強度が十分に確保できず層間剥離
を生ずる場合があり、このような4層構造では多層効果
が発揮されず十分な靭性を得ることができなかった。
TiCN has extremely high hardness and excellent wear resistance, but its characteristics change depending on the ratio of the carbon component and the nitrogen component.
A tool coated with, especially a milling tool, etc., may not be used because the cutting edge may be damaged. This is because the wear resistance is improved by increasing the hardness, but the strength is low and the shock resistance is low, so that the characteristics as high hardness is a drawback for application as a cutting tool. In order to make up for this drawback, for example, in Japanese Patent Publication No. 62-42995, a TiN film having a film thickness of 0.5 μm to 1.0 μm is first coated and then a TiC film or TiCN film having a film thickness of at least 1.0 μm or more.
Although the film is coated to have a two-layer structure, the film strength cannot be sufficiently secured by the method of laminating such a TiC film or TiCN film having a film thickness of 1.0 μm or more, and delamination may occur. Further, in Japanese Patent Laid-Open No. 6-101018,
At first, a TiN film having a film thickness of 0.1 μm to 3.0 μm is coated, and then the film strength is improved by a method of laminating three layers of TiN film and TiCN film. In the case of a film, sufficient film strength cannot be ensured and delamination may occur. In such a four-layer structure, the multi-layer effect is not exhibited and sufficient toughness cannot be obtained.

【0004】[0004]

【発明が解決しようとする課題】本発明の課題は、高速
度工具鋼を母材とする工具の表面にTiCN系高硬度硬
質複合被膜の多層膜を形成することにより母材との密着
性を高め、膜応力を緩和して工具切削中の欠損を引き起
こさないような高い靭性を有し、かつ耐摩耗性に優れる
被膜を提供することにある。
An object of the present invention is to form a multilayer film of a TiCN-based high hardness hard composite coating on the surface of a tool made of high-speed tool steel as a base material to improve adhesion to the base material. (EN) It is intended to provide a coating film which has a high toughness to increase the film stress, relaxes the film stress and does not cause a chip during tool cutting, and has excellent wear resistance.

【0005】[0005]

【課題を解決するための手段】このため本発明は、高速
度工具鋼を母材とする工具において次の(a)から
(c)の条件を満足させた; (a)被覆膜の成分がTi、C、Nよりなる複合膜であ
り、(b)膜の多層構成が10層以上の構造からなり、
被覆膜の全体の膜厚が2.0μm〜6.0μmであり、
その被覆膜の構成が原子比炭素比率=C/(C+N)=
tとして膜厚が0.2μm〜0.9μmのTiN又はT
iCN(0≦t≦0.2)の均一組織を前記母材に接す
る最下層として第1層に成膜し、さらにその上にいずれ
も膜厚が0.1〜0.5μmの第2層としてTiCN
(0.3≦t≦0.7)及びその上に第3層としてTi
N又はTiCN(0≦t≦0.2)を積層し、以後いず
れも膜厚が0.1〜0.5μmの前記第2層及び前記第
3層の成分の膜を順次少なくとも3回以上繰り返して積
層し、そして最上層に膜厚が0.2μm〜1.0μmの
TiCN(0.3≦t≦0.7)を積層して、全体の層
数が10層〜20層であることを特徴とし、(c)その
被覆工具もしくはそれと同時処理した同母材種のテスト
ピ−スが工具部材の機能要部と同等の被覆が施されてい
る部分の特性が、(1)母材は60HRC以上の硬度を
有し、50gのマイクロビッカ−ス硬度計で1900以
上、4000HV以下、Ry5μm以下の面粗さであ
り、(2)前記被覆膜に通常のCスケ−ルロックウェル
硬度計を押圧した場合に生じる圧痕を100倍の倍率で
観察した結果、圧痕の外側周囲1mm以上の範囲で膜の
剥離が認められない。高速度工具鋼を母材とする工具に
おいて次の(a)から(c)の条件を満足させた、こと
を特徴とする複合多層被覆工具を提供することで従来技
術の課題を解決した。
For this reason, the present invention satisfies the following conditions (a) to (c) in a tool using a high-speed tool steel as a base material: (a) coating film composition Is a composite film composed of Ti, C, and N, and (b) the multilayer structure of the film has a structure of 10 or more layers,
The total thickness of the coating film is 2.0 μm to 6.0 μm,
The composition of the coating film is atomic ratio carbon ratio = C / (C + N) =
TiN or T having a film thickness of 0.2 μm to 0.9 μm as t
A uniform structure of iCN (0 ≦ t ≦ 0.2) is formed as a lowermost layer in contact with the base material on the first layer, and a second layer having a thickness of 0.1 to 0.5 μm is formed on the first layer. As TiCN
(0.3 ≦ t ≦ 0.7) and Ti as a third layer thereon
N or TiCN (0 ≦ t ≦ 0.2) is laminated, and thereafter, the films of the components of the second layer and the third layer each having a film thickness of 0.1 to 0.5 μm are sequentially repeated at least three times or more. By stacking TiCN (0.3 ≦ t ≦ 0.7) having a film thickness of 0.2 μm to 1.0 μm on the uppermost layer so that the total number of layers is 10 to 20. Characteristically, (c) the characteristics of the coated tool or the portion of the test piece of the same base material type that has been simultaneously processed with the same coating as the functional main part of the tool member are (1) the base material is 60 HRC. It has the above hardness and has a surface roughness of 1900 or more and 4000 HV or less and Ry of 5 μm or less with a 50 g micro Vickers hardness tester. (2) A normal C scale Rockwell hardness tester is used for the coating film. As a result of observing the indentation generated when pressed at a magnification of 100 times, Peeling of the film is not observed in the range of more sides around 1 mm. The problem of the prior art was solved by providing a composite multilayer coated tool characterized by satisfying the following conditions (a) to (c) in a tool using high-speed tool steel as a base material.

【0006】TiN又はTiCNの原子比炭素比率=t
を第1層で0≦t≦0.2としたのは母材との密着性を
高め、膜応力の上昇を極力押えるためには高速度工具鋼
に対して密着力の高いTiN(t=0)または炭素濃度
の低いTiCN(0<t≦0.2)のが望ましいからで
あり、第2層でTiCN(0.3≦t≦0.7)とした
のは図2に示すTiCN被覆膜の炭素濃度と硬さの関係
から、耐摩耗性を確保するためにはTiCN被覆膜は最
も被膜が硬くかつ被膜組織が緻密であることが必要であ
り、t<0.3では被膜の硬さが十分ではなく、t>
0.7では被膜の硬さは高いが組織が緻密でなくなる欠
点を持っていることにより上記範囲に限定した。また積
層を図1に示すように10層以上にしたのは、10層以
下では耐欠損性に対する多層効果が顕著でなくなるから
であり、20層以上では1層あたりの膜自身のもつ強度
が不足するためである。そして最上層を第2層のTiC
N(0.3≦t≦0.7)としたのは、工具最表面を高
硬度被膜にすることで切削の切削抵抗を低減させること
ができるからである。また、この発明の複合多層膜工具
の各層の膜厚を0.1μm〜0.9μmとしたのは、膜
厚が0.1μm未満では優れた耐溶着性を確保すること
ができず、一方で膜厚が0.9μmを越えると被膜強度
が十分に確保できず層間剥離を生ずる場合があるからで
ある。さらに全体の膜厚を2.0μm〜6.0μmとし
たのは、膜厚が2.0μm未満では優れた耐摩耗性を確
保することができず、一方で膜厚が6.0μmを越える
と刃先が欠損しやすくなることによる。
Atomic ratio of TiN or TiCN Carbon ratio = t
In the first layer, 0 ≦ t ≦ 0.2 is set to increase the adhesiveness with the base material and to suppress the increase of the film stress as much as possible, TiN (t = t = 0) or TiCN (0 <t ≦ 0.2) having a low carbon concentration is preferable. The reason why TiCN (0.3 ≦ t ≦ 0.7) is used for the second layer is that the TiCN coating shown in FIG. From the relationship between the carbon concentration and hardness of the coating film, the TiCN coating film must have the hardest coating and the densest coating structure in order to secure wear resistance. Is not sufficiently hard, and t>
At 0.7, the hardness of the coating is high, but the structure is not dense, so the range is limited to the above range. In addition, as shown in FIG. 1, the number of layers is 10 or more because the multilayer effect on the fracture resistance is not significant when the number of layers is 10 or less, and the strength of the film per layer is insufficient when the number of layers is 20 or more. This is because And the uppermost layer is the second layer of TiC
The reason why N (0.3 ≦ t ≦ 0.7) is set is that the cutting resistance of cutting can be reduced by forming the outermost surface of the tool with a high hardness coating. Further, the thickness of each layer of the composite multilayer tool of the present invention is set to 0.1 μm to 0.9 μm, because when the thickness is less than 0.1 μm, excellent welding resistance cannot be ensured, while This is because if the film thickness exceeds 0.9 μm, sufficient film strength cannot be ensured and delamination may occur. Further, the overall film thickness is set to 2.0 μm to 6.0 μm, because when the film thickness is less than 2.0 μm, excellent wear resistance cannot be secured, while when the film thickness exceeds 6.0 μm. This is because the cutting edge is easily damaged.

【0007】本発明は高硬度のTiCN膜の特性を切削
工具に最大限利用しようとするために被膜の複合多層構
成を考案したものであり、上述した特公昭62−429
95号公報及び特開平6−101018号公報とは多層
膜の構成主旨から全く異るものである。すなわちTiC
Nはイオンプレ−ティング等で成膜される場合には組織
は微細となり、膜応力が大きいことが知見として得られ
ている。(日本機械学会発行『日本機械学会第70回通
常総会講演会講演論文集』〔1993.3.31〜4.2八王子〕33
1頁、332頁)。またTiCN膜の硬さも炭素濃度の増加
に伴って高硬度化することも図2に示した。したがって
TiCN膜を工具へ適用する場合は高硬度のTiCN層
を厚くすると膜応力が大きくなり母材との応力状態のギ
ャップから膜自体が破壊することが推定される。そこ
で、本発明では母材の表面に膜厚が0.2μm〜0.9
μmのTiNまたは炭素成分の低いTiCN層を配置す
ることによって密着性を高め、かつ膜厚が0.1μm〜
0.5μmの炭素を多く含んだ高硬度のTiCN層との
交互の積層により断続的に炭素成分を分配することで膜
応力の増加を極力押え、靭性を損なうことなくTiCN
膜を工具に被覆できた。
The present invention has been devised as a composite multilayer structure of coatings in order to maximize the use of the characteristics of a high hardness TiCN film for a cutting tool.
95 and Japanese Patent Laid-Open No. 6-101018 are completely different from the main point of the structure of the multilayer film. Ie TiC
It is known that N has a fine structure and a large film stress when it is formed into a film by ion plating or the like. (Proceedings of the 70th Ordinary General Meeting of the Japan Society of Mechanical Engineers, published by the Japan Society of Mechanical Engineers) [1993.3.31-4.2 Hachioji] 33
P. 1, 332). It is also shown in FIG. 2 that the hardness of the TiCN film increases as the carbon concentration increases. Therefore, when the TiCN film is applied to a tool, it is presumed that if the high hardness TiCN layer is thickened, the film stress will increase and the film itself will break from the gap in the stress state with the base material. Therefore, in the present invention, the thickness of the base material is 0.2 μm to 0.9 μm.
Adhesion is improved by arranging a TiN layer having a thickness of μm or a TiCN layer having a low carbon content, and a film thickness of 0.1 μm
By alternately depositing carbon components by alternately stacking with a high hardness TiCN layer containing a large amount of carbon of 0.5 μm, the increase in film stress is suppressed as much as possible, and TiCN is maintained without impairing toughness.
The film could be coated on the tool.

【0008】日本工業出版が1993年10月に発行した『新
素材』Vol.4 NO.10 37頁〜41頁に記載するように経験
的であるが工具に被覆する膜については請求項1(c)
に示すロックウェルの圧痕法による剥離判定がひとつの
目安となる。図3は高速度工具鋼エンドミルについてそ
れぞれ膜構成で示す、本発明、単層及び2層の場合の各
膜の比較を示す。膜厚が3.0μmのTiCN単層及び
膜厚が3.0μmのTiN+TiCN積層膜の場合はロ
ックウェル圧子の進入により膜破壊が生じているが、膜
厚が3.0μmの12層の本発明品は剥離は生じておら
ず微小亀裂のみ発生するに留まっている。
[0008] As described in "New Material" Vol.4 NO.10, pages 37 to 41, published by Nippon Kogyo Publishing Co., Ltd. in October 1993, it is empirical. c)
One of the criteria is the judgment of delamination by the Rockwell indentation method shown in. FIG. 3 shows a comparison of the films of the present invention, single layer and double layer, each shown in film configuration for a high speed tool steel end mill. In the case of a TiCN single layer having a film thickness of 3.0 μm and a TiN + TiCN laminated film having a film thickness of 3.0 μm, film breakage occurs due to the entry of a Rockwell indenter, but the present invention has 12 layers having a film thickness of 3.0 μm. The product did not peel and only micro cracks occurred.

【0009】本発明の作用は、図2の炭素を多く含んだ
高硬度のTiCN膜を、靭性の高いTiN又は炭素濃度
の低い複合膜TiCNとの組み合せで膜厚が0.1μm
〜0.5μmの多層膜にすることによつて高硬度でかつ
靭性の高い複合多層被膜を実現することにより、これを
切削工具に適用することによって、これまで困難とされ
ていた高硬度材料や高速条件での切削を可能にした。
The function of the present invention is to combine the high hardness TiCN film containing a large amount of carbon shown in FIG. 2 with TiN having high toughness or the composite film TiCN having a low carbon concentration to obtain a film thickness of 0.1 μm.
By realizing a multi-layered film having high hardness and high toughness by forming a multi-layered film having a thickness of up to 0.5 μm, by applying the multi-layered film to a cutting tool, it is possible to obtain high hardness materials and Enables cutting under high speed conditions.

【0010】[0010]

【発明の実施の形態】BEST MODE FOR CARRYING OUT THE INVENTION

(実施例1)本発明の実施例として、高速度工具鋼を母
材とするエンドミルをイオンプレ−ティングにより表1
に示す膜構成に成膜した。イオンプレ−ティング装置を
10-2Paまで排気し、処理物を電子照射加熱により4
00〜500℃まで加熱した。その後アルゴンイオンボ
ンバ−ドにより処理物表面のクリ−ニングを行ってから
コ−ティング処理をした。コ−ティングはTiの蒸発源
に対し窒素およびアセチレンを導入して行い、その際窒
素を導入してTiN層を形成し、その後窒素を減少させ
ながらアセチレンを増加させTiCN層を形成し、以後
所望の層数だけこれを繰り返し行い、これら2種類の反
応ガスの混合比率の切り替および2種類の反応ガスの開
閉の切り替の組み合せることにより各層を成膜した。こ
のようにこのようにして、本発明品のTiCNの複合多
層膜と、比較のための各種類似した膜構成のもの11種
類を、高速度工具鋼エンドミルと同母材種のテストピ−
スに成膜した。同時処理した同母材種のテストピ−スを
圧痕剥離法で調べたところ、No.10 はTiN層とTiC
N層で剥離が確認されたが、それ以外は圧痕の外周1m
m以上の範囲で膜の剥離は認められなかった。切削試験
の結果から本発明品は他の比較品と較べて逃げ面摩耗と
コ−ナ摩耗に著しい摩耗の減少が確認された。
(Example 1) As an example of the present invention, an end mill having a high-speed tool steel as a base material was subjected to ion plating to obtain the results shown in Table 1.
The film was formed into the film structure shown in. The ion plating device was evacuated to 10 -2 Pa, and the processed product was heated by electron irradiation to 4
Heated to 00-500 ° C. After that, the surface of the object to be treated was cleaned with an argon ion bombardment, and then the coating treatment was performed. The coating is performed by introducing nitrogen and acetylene into a Ti evaporation source, in which case nitrogen is introduced to form a TiN layer, and then acetylene is increased while reducing nitrogen to form a TiCN layer. This was repeated for the number of layers, and each layer was formed by switching the mixing ratio of these two types of reaction gases and switching the opening and closing of the two types of reaction gases. Thus, in this way, 11 kinds of TiCN composite multilayer films of the present invention and various similar film constitutions for comparison were tested with a high speed tool steel end mill and a test piece of the same base material type.
Was formed into a film. When the test pieces of the same base material that were simultaneously treated were examined by the indentation peeling method, No. 10 was TiN layer and TiC
Peeling was confirmed in the N layer, but other than that, the outer circumference of the indentation was 1 m.
No peeling of the film was observed in the range of m or more. From the results of the cutting test, it was confirmed that the product of the present invention had a significant reduction in flank wear and corner wear as compared with the other comparative products.

【0011】[0011]

【表1】 [Table 1]

【0012】(実施例2)高速度工具鋼を母材とするド
リルの切削試験の結果を表2に示す。ドリルはいずれも
イオンプレ−ティングで実施例1と同様な方法で6種類
を成膜した。その結果本発明の10層以上のTiCN多
層膜被覆ドリルの穴明け数は比較品より著しく向上して
いることが確認できた。
(Example 2) Table 2 shows the results of a cutting test of a drill having a high-speed tool steel as a base material. Each of the drills was ion plating, and six kinds of films were formed by the same method as in Example 1. As a result, it was confirmed that the drill number of the TiCN multilayer film-coated drill of 10 or more layers of the present invention was significantly improved as compared with the comparative product.

【0013】[0013]

【表2】 [Table 2]

【0014】(実施例3)高速度工具鋼を母材とする歯
切り工具ホブの実施例を示す。イオンプレ−ティングを
用いて、本発明品のTiCN複合多層膜と従来品である
TiN被覆とTiN+TiCN被覆を、それぞれ施した
ホブを作成して切削試験した結果を図4に示す。それぞ
れ膜厚が3.0μmの単層のTiNと1.5μmのTi
N+1.5μmのTiCN(ただし(C/C+N)=0.3 )2層
のを被覆したホブはいずれも早期に摩耗が増加するのに
対して、0.2μmのTiNと各膜厚が0.2μmの
(TiN+TiCN(ただし(C/C+N)=0.3 ))8層+
0.2μmのTiCN(ただし(C/C+N)=0.3 )を被覆し
た本発明品は1.5〜2.0倍の耐摩耗性の改善が見ら
れた。
(Embodiment 3) An embodiment of a gear cutting tool hob having a high speed tool steel as a base material will be described. FIG. 4 shows the results of cutting tests by forming hobs using the TiCN composite multilayer film of the present invention and the conventional TiN coating and TiN + TiCN coating by ion plating. Single-layer TiN with a thickness of 3.0 μm and Ti with a thickness of 1.5 μm
The hobs coated with two layers of N + 1.5 μm TiCN (however, (C / C + N) = 0.3) increase wear at an early stage, while 0.2 μm TiN and each film thickness of 0. 2 layers of (TiN + TiCN (however (C / C + N) = 0.3)) 8 layers +
The product of the present invention coated with 0.2 μm TiCN (however, (C / C + N) = 0.3) showed an improvement in wear resistance of 1.5 to 2.0 times.

【0015】[0015]

【発明の効果】以上のように、高速度工具鋼を母材とす
る切削工具に対して、炭素を多く含んだ高硬度ではある
が反面靭性の低いTiCN膜の特性を効果的に利用する
ため、比較的靭性の高いTiNまたは炭素濃度の低いT
iCNとの組み合せで膜厚が0.1μm〜0.5μmの
複合多層の構成方法を提供することにより、母材との密
着性を確保するとともに皮膜の内部応力を押えてること
が可能となり、工具切削中の欠落および欠損現象を引き
起こさないで耐摩耗性を向上させることができた。
As described above, in order to effectively utilize the characteristics of a TiCN film containing a large amount of carbon and having a high hardness but a low surface toughness, with respect to a cutting tool using a high speed tool steel as a base material. , Relatively high toughness TiN or low carbon concentration T
By providing a method for constructing a composite multilayer having a film thickness of 0.1 μm to 0.5 μm in combination with iCN, it becomes possible to secure the adhesion with the base material and suppress the internal stress of the film. It was possible to improve wear resistance without causing chipping and chipping during cutting.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明品の複合多層被覆工具の構成を示す説明
図。
FIG. 1 is an explanatory view showing the structure of a composite multi-layer coated tool of the present invention.

【図2】TiCN皮膜の炭素濃度と50gのマイクロビ
ッカ−ス硬さとの関係を示すグラフ。
FIG. 2 is a graph showing the relationship between the carbon concentration of the TiCN coating and the micro Vickers hardness of 50 g.

【図3】工具に被覆する膜についてのロックウェルの圧
痕法による剥離判定結果を示す説明図で、高速度工具鋼
エンドミルについてそれぞれ膜構成で示す、本発明、単
層及び2層の場合の各膜の比較を示す。
FIG. 3 is an explanatory diagram showing the results of judgment of delamination by Rockwell's indentation method for a film to be coated on a tool, showing the present invention, a single layer and a two-layer case, each showing a film configuration for a high-speed tool steel end mill. A comparison of membranes is shown.

【図4】発明品のTiCN複合多層膜と従来品である
TiN被覆とTiN+TiCN被覆を、それぞれ施した
ホブを作成した切削試験結果を示すグラフ。
FIG. 4 is a graph showing a cutting test result of forming a hob on which the TiCN composite multilayer film of the present invention product and the conventional TiN coating and TiN + TiCN coating are applied.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】高速度工具鋼を母材とする工具において次
の(a)から(c)の条件を満足させたことを特徴とす
る複合多層被覆工具; (a)被覆膜の成分がTi、C、Nよりなる複合膜であ
り、 (b)膜の多層構成が10層以上の構造からなり、被覆
膜の全体の膜厚が2.0μm〜6.0μmであり、その
被覆膜の構成が原子比炭素比率=C/(C+N)=tと
して膜厚が0.2μm〜0.9μmのTiN又はTiC
N(0≦t≦0.2)の均一組織を前記母材に接する最
下層として第1層に成膜し、さらにその上にいずれも膜
厚が0.1μm〜0.5μmの第2層としてTiCN
(0.3≦t≦0.7)及びその上に第3層としてTi
N又はTiCN(0≦t≦0.2)を積層し、以後いず
れも膜厚が0.1μm〜0.5μmの前記第2層及び前
記第3層の成分の膜を順次少なくとも3回以上繰り返し
て積層し、そして最上層に膜厚が0.2μm〜1.0μ
mのTiCN(0.3≦t≦0.7)を積層して、全体
の層数が10層〜20層であることを特徴とし、 (c)その被覆工具もしくはそれと同時処理した同母材
種のテストピ−スが工具部材の機能要部と同等の被覆が
施されている部分の特性が、 (1)母材は60HRC以上の硬度を有し、50gのマ
イクロビッカ−ス硬度計で1900以上、4000HV
以下、Ry5μm以下の面粗さであり、 (2)前記被覆膜に通常のCスケ−ルロックウェル硬度
計を押圧した場合に生じる圧痕を100倍の倍率で観察
した結果、圧痕の外側周囲1mm以上の範囲で膜の剥離
が認められない。
1. A composite multi-layer coated tool characterized by satisfying the following conditions (a) to (c) in a tool using a high speed tool steel as a base material; It is a composite film composed of Ti, C, and N, and (b) the multilayer structure of the film has a structure of 10 layers or more, and the total film thickness of the coating film is 2.0 μm to 6.0 μm. The composition of the film is TiN or TiC having a film thickness of 0.2 μm to 0.9 μm with an atomic ratio of carbon ratio = C / (C + N) = t.
A uniform structure of N (0 ≦ t ≦ 0.2) is formed on the first layer as the lowermost layer in contact with the base material, and a second layer having a thickness of 0.1 μm to 0.5 μm is formed thereon. As TiCN
(0.3 ≦ t ≦ 0.7) and Ti as a third layer thereon
N or TiCN (0 ≦ t ≦ 0.2) is laminated, and thereafter, the films of the components of the second layer and the third layer having a film thickness of 0.1 μm to 0.5 μm are sequentially repeated at least three times or more. Layered, and the top layer has a film thickness of 0.2 μm to 1.0 μm.
m of TiCN (0.3 ≦ t ≦ 0.7) is laminated, and the total number of layers is 10 to 20 layers. (c) The coated tool or the same base material treated simultaneously with the coated tool The characteristics of the part where the test piece of the seed is coated equivalent to the functional main part of the tool member are as follows: (1) The base material has a hardness of 60 HRC or more, and is 1900 with a 50 g micro Vickers hardness meter. Above 4000 HV
Below, the surface roughness is Ry 5 μm or less, and (2) the result of observing the indentation generated when the ordinary C-scale Rockwell hardness meter is pressed against the coating film at a magnification of 100 times, shows that the outer periphery of the indentation No peeling of the film is observed in the range of 1 mm or more.
JP30226895A 1995-10-27 1995-10-27 Composite multi-layer coating tool Expired - Lifetime JP3705632B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30226895A JP3705632B2 (en) 1995-10-27 1995-10-27 Composite multi-layer coating tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30226895A JP3705632B2 (en) 1995-10-27 1995-10-27 Composite multi-layer coating tool

Publications (2)

Publication Number Publication Date
JPH09117806A true JPH09117806A (en) 1997-05-06
JP3705632B2 JP3705632B2 (en) 2005-10-12

Family

ID=17906973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30226895A Expired - Lifetime JP3705632B2 (en) 1995-10-27 1995-10-27 Composite multi-layer coating tool

Country Status (1)

Country Link
JP (1) JP3705632B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012144574A1 (en) * 2011-04-20 2012-10-26 株式会社タンガロイ Coated cutting tool
CN103052456A (en) * 2010-08-04 2013-04-17 株式会社图格莱 Coated tool
JP2019038097A (en) * 2017-08-24 2019-03-14 株式会社タンガロイ Coated cutting tool
JP2019171547A (en) * 2018-03-29 2019-10-10 住友電工ハードメタル株式会社 Surface-coated cutting tool and method of manufacturing the same
JP2019171546A (en) * 2018-03-29 2019-10-10 住友電工ハードメタル株式会社 Surface-coated cutting tool and method of manufacturing the same

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103052456A (en) * 2010-08-04 2013-04-17 株式会社图格莱 Coated tool
WO2012144574A1 (en) * 2011-04-20 2012-10-26 株式会社タンガロイ Coated cutting tool
JPWO2012144574A1 (en) * 2011-04-20 2014-07-28 株式会社タンガロイ Coated cutting tool
JP5679048B2 (en) * 2011-04-20 2015-03-04 株式会社タンガロイ Coated cutting tool
JP2019038097A (en) * 2017-08-24 2019-03-14 株式会社タンガロイ Coated cutting tool
US10814402B2 (en) 2017-08-24 2020-10-27 Tungaloy Corporation Coated cutting tool
JP2019171547A (en) * 2018-03-29 2019-10-10 住友電工ハードメタル株式会社 Surface-coated cutting tool and method of manufacturing the same
JP2019171546A (en) * 2018-03-29 2019-10-10 住友電工ハードメタル株式会社 Surface-coated cutting tool and method of manufacturing the same

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