JPH088978B2 - Chemical filter device - Google Patents
Chemical filter deviceInfo
- Publication number
- JPH088978B2 JPH088978B2 JP9802489A JP9802489A JPH088978B2 JP H088978 B2 JPH088978 B2 JP H088978B2 JP 9802489 A JP9802489 A JP 9802489A JP 9802489 A JP9802489 A JP 9802489A JP H088978 B2 JPH088978 B2 JP H088978B2
- Authority
- JP
- Japan
- Prior art keywords
- chemical liquid
- filter
- pure water
- carbon dioxide
- dioxide gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は薬液濾過装置に関し、特に半導体基板処理に
使用する無機薬液の微粒子除去を行なう薬液濾過装置に
関する。TECHNICAL FIELD The present invention relates to a chemical liquid filtering device, and more particularly to a chemical liquid filtering device for removing fine particles of an inorganic chemical liquid used for semiconductor substrate processing.
従来、この種の濾過器は、瀘材を内蔵し、薬液の流入
口及び流出口を有し、この流入口，流出口に接続する配
管により構成されていた。Conventionally, this type of filter has a filter material built therein, has a chemical solution inlet and an outlet, and is configured by a pipe connected to the inlet and the outlet.
上述した従来の濾過器は、交換に際し、瀘材が弗素樹
脂膜でできているため疎水性となっており、無機薬液の
濾過を行なう場合は、あらかじめ瀘材をアルコールで浸
漬し、純水でアルコールを洗浄する作業を行なった後、
薬液配管を接続する様になっているので、薬液配管を接
続する作業の過程で瀘材が乾燥し、薬液の瀘材透過が円
滑に行なわれないという欠点がある。When replacing the conventional filter described above, the filter is hydrophobic because it is made of a fluororesin film.When filtering the inorganic chemical solution, dip the filter beforehand in alcohol and use pure water. After cleaning the alcohol,
Since the chemical liquid pipe is connected, the filter material is dried in the process of connecting the chemical liquid pipe, and there is a drawback that the chemical liquid cannot be smoothly transmitted through the filter material.
本発明の目的は、弗素樹脂膜の瀘材を有する濾過器の
交換に際し、直ちに薬液配管を行ない、薬液の透過を行
なうことができる薬液濾過装置を提供することにある。An object of the present invention is to provide a chemical liquid filtration device which can immediately perform chemical liquid piping and permeate a chemical liquid when replacing a filter having a fluororesin membrane filter material.
本発明の薬液濾過装置は、弗素樹脂膜を瀘材とする濾
過器と、炭酸ガスが濾過器を通って排出する様配管接続
した炭酸ガス供給口及び排出口と、濾過器の薬液流入口
に接続した純水供給口及び薬液流出口に接続した純水排
出口とを有している。The chemical liquid filtration device of the present invention comprises a filter using a fluororesin membrane as a filter material, a carbon dioxide gas supply port and a gas discharge port connected so that carbon dioxide gas is discharged through the filter, and a chemical liquid inlet of the filter. It has a pure water supply port connected thereto and a pure water discharge port connected to the chemical solution outlet.
次に、本発明について図面を参照して説明する。第１
図は本発明の一実施例の配管系統図である。濾過器１の
薬液流入口1aに接続するバルブＡ及びＣと、薬液流出口
1bに接続するバルブＢ及びＤと、濾過器２次側へ通ずる
接続口1cに接続するバルブＥ及び１次側へ通ずる接続口
1dに接続するバルブＦを閉じ、濾過器１を交換した後、
バルブＥ及びＦを開け炭酸ガスを内部の空気が完全に炭
酸ガスと置換するまで通じ、バルブＥを閉める。次にバ
ルブＣを開け、純水を導入し、濾過器１の１次側内が完
全に純水で満たされた後、バルブＦを閉じバルブＤを開
ける。この時瀘材内の炭酸ガスが純水に溶解する事によ
り純水が濾過器２次側に達する。２次側内炭酸ガスをバ
ルブＤより純水とともに排出した後、バルブＣ及びＤを
閉じ、バルブＡ及びＢを開け薬液を流す。Next, the present invention will be described with reference to the drawings. First
FIG. 1 is a piping system diagram of an embodiment of the present invention. Valves A and C connected to the chemical liquid inlet 1a of the filter 1 and the chemical liquid outlet
Valves B and D connected to 1b, a connection port leading to the secondary side of the filter, and a valve E connected to 1c and a connection port leading to the primary side
After closing the valve F connected to 1d and replacing the filter 1,
The valves E and F are opened, the carbon dioxide gas is passed until the air inside is completely replaced with the carbon dioxide gas, and the valve E is closed. Next, the valve C is opened, pure water is introduced, and after the primary side of the filter 1 is completely filled with pure water, the valve F is closed and the valve D is opened. At this time, the carbon dioxide gas in the filter material is dissolved in the pure water, so that the pure water reaches the secondary side of the filter. After the carbon dioxide gas in the secondary side is discharged together with pure water through the valve D, the valves C and D are closed and the valves A and B are opened to allow the chemical solution to flow.
第２図は本発明の他の実施例の配管系統図である。濾
過器１の、ハウジング部を下側に取付け濾過器１の１次
側へ通ずる接続口1dにバルブＥを接続し、２次側へ通ず
る接続口1cにバルブＦを接続し、第１の実施例と同手順
により炭酸ガスをバルブＥを開け導入し、バルブＦより
排出し、純水及び薬液と順次置換する。この実施例で
は、炭酸ガスを濾過器１の１次側より導入する構造であ
るため、炭酸ガス中の微粒子が２次側にはいらないとい
う利点がある。FIG. 2 is a piping system diagram of another embodiment of the present invention. The housing of the filter 1 is attached to the lower side, the valve E is connected to the connection port 1d leading to the primary side of the filter 1, and the valve F is connected to the connection port 1c leading to the secondary side. By the same procedure as in the example, carbon dioxide gas was introduced by opening the valve E, discharged through the valve F, and sequentially replaced with pure water and a chemical solution. In this embodiment, since the carbon dioxide gas is introduced from the primary side of the filter 1, there is an advantage that the fine particles in the carbon dioxide gas do not need to enter the secondary side.
以上説明したように本発明は、薬液配管を接続した状
態で、空気から炭酸ガスに完全に置換し、炭酸ガスが純
水に溶解しやすい事を利用し、瀘材の細孔内に純水を浸
透させて、炭酸ガスと純水を完全に置換し、無機薬液が
純水に溶解する事により、無機薬液と純水が完全に置換
し、弗素樹脂膜の瀘材を効率良く使用できる効果があ
る。As described above, the present invention, in the state where the chemical liquid pipe is connected, completely replaces air with carbon dioxide gas, and utilizes the fact that carbon dioxide gas is easily dissolved in pure water. By permeating water and completely replacing carbon dioxide gas with pure water and dissolving the inorganic chemical liquid in pure water, the inorganic chemical liquid and pure water are completely replaced, and the filter material of the fluororesin film can be used efficiently. There is.
第１図は本発明の一実施例の薬液濾過装置の配管系統
図、第２図は本発明の他の実施例の配管系統図である。 １……濾過器、1a……薬液流入口、1b……薬液流出口、
1c……２次側接続口、1d……１次側接続口、Ａ……薬液
流入バルブ、Ｂ……薬液流出バルブ、Ｃ……純水供給バ
ルブ、Ｄ……純水排出バルブ、Ｅ……炭酸ガス供給バル
ブ、Ｆ……炭酸ガス排出バルブ。FIG. 1 is a piping system diagram of a chemical liquid filtering device of one embodiment of the present invention, and FIG. 2 is a piping system diagram of another embodiment of the present invention. 1 ... Filter, 1a ... Chemical liquid inlet, 1b ... Chemical liquid outlet,
1c ... Secondary side connection port, 1d ... Primary side connection port, A ... Chemical solution inflow valve, B ... Chemical solution outflow valve, C ... Pure water supply valve, D ... Pure water discharge valve, E ... … Carbon dioxide supply valve, F …… Carbon dioxide discharge valve.
Claims (1)
環式濾過機構に於いて使用する弗素樹脂膜を用いた濾過
器と、炭酸ガスが濾過器を通って排出する様配管接続し
た炭酸ガス供給口及び排出口と、濾過器の薬液流入口に
接続した純水供給口及び薬液流出口に接続した純水排出
口とを有する事を特徴とする薬液濾過装置。1. A carbon dioxide gas connected to a pipe for supplying a chemical liquid or a filter using a fluororesin membrane used in a circulation type filtration mechanism of a chemical liquid storage tank, and a pipe so that carbon dioxide gas is discharged through the filter. A chemical liquid filtration device having a supply port and a discharge port, and a pure water supply port connected to a chemical liquid flow inlet of a filter and a pure water discharge port connected to a chemical liquid flow outlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9802489A JPH088978B2 (en) | 1989-04-17 | 1989-04-17 | Chemical filter device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9802489A JPH088978B2 (en) | 1989-04-17 | 1989-04-17 | Chemical filter device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02277527A JPH02277527A (en) | 1990-11-14 |
| JPH088978B2 true JPH088978B2 (en) | 1996-01-31 |
Family
ID=14208350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9802489A Expired - Lifetime JPH088978B2 (en) | 1989-04-17 | 1989-04-17 | Chemical filter device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH088978B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2908044B2 (en) * | 1991-02-01 | 1999-06-21 | 九州日本電気株式会社 | Semiconductor wafer cleaning equipment |
-
1989
- 1989-04-17 JP JP9802489A patent/JPH088978B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02277527A (en) | 1990-11-14 |
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