JPH0889741A - Packing method of adsorbent - Google Patents

Packing method of adsorbent

Info

Publication number
JPH0889741A
JPH0889741A JP6224880A JP22488094A JPH0889741A JP H0889741 A JPH0889741 A JP H0889741A JP 6224880 A JP6224880 A JP 6224880A JP 22488094 A JP22488094 A JP 22488094A JP H0889741 A JPH0889741 A JP H0889741A
Authority
JP
Japan
Prior art keywords
adsorbent
pressure
filling
gas
tower
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP6224880A
Other languages
Japanese (ja)
Inventor
Akira Hashimoto
彰 橋本
Tatsuo Kahata
達雄 加幡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP6224880A priority Critical patent/JPH0889741A/en
Publication of JPH0889741A publication Critical patent/JPH0889741A/en
Withdrawn legal-status Critical Current

Links

Abstract

PURPOSE: To completely pack an adsorbent without unavailable volume into an absorption tower of a pressure swing or pressure-temp. swing physical adsorbing system. CONSTITUTION: The adsorbent 2 is packed by gravity from a pressure packing hopper 14 to a packing bed formed by partitioning the inside of the adsorption tower 1 with an upper wire mesh 3, a lower wire mesh 7 and a perforated plate 8. After that, the adsorbent is packed under reduced pressure fluidizing by charging a pressurized gas into the tower from a blower 9 to pressurize in such a state that the adsorbent 2 is capable of being supplied from the pressure packing hopper 14 and after that, releasing the gas with the pressure reducing valve 13 opened to reduce the pressure.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は圧力スイング又は圧力・
温度スイング物理吸着法に於いて適用される吸着塔への
吸着剤充填法に関する。
BACKGROUND OF THE INVENTION The present invention relates to a pressure swing or pressure
The present invention relates to a method for filling an adsorption tower with an adsorbent applied in a temperature swing physical adsorption method.

【0002】[0002]

【従来の技術】図4、図5に物理吸着法方式の吸着塔に
おける従来の吸着剤充填法を示す。図4、図5におい
て、吸着塔1は縦円筒型の塔体の上下に処理対象ガスの
入口、出口配管をそれぞれ接続する下部鏡板11と上部
鏡板12が取付けられている。吸着塔1内は、内部を上
部金網3、下部を目皿8と下部金網7で仕切られ吸着剤
2を入れた吸着剤充填層が形成されている。
2. Description of the Related Art FIGS. 4 and 5 show a conventional adsorbent filling method in a physical adsorption type adsorption tower. In FIGS. 4 and 5, the adsorption tower 1 is provided with a lower end plate 11 and an upper end plate 12 that connect the inlet and outlet pipes of the gas to be processed to the upper and lower sides of a vertical cylindrical tower body. Inside the adsorption tower 1, an adsorbent-packed layer containing the adsorbent 2 is formed, which is partitioned by an upper wire net 3 inside and a lower plate 8 and a lower wire net 7 inside.

【0003】吸着塔1内には上部鏡板12を貫通して上
部金網3に接続する複数本の供給管が設けられ、それら
の供給管の頂部には充填ホッパ4が設けられている。ま
た、上部金網3の下方の塔体にはつつき棒用穴5が設け
られ、そこからつつき棒6が吸着剤充填層内へ挿入でき
るようになっている。
Inside the adsorption tower 1, there are provided a plurality of supply pipes which penetrate the upper end plate 12 and are connected to the upper wire netting 3, and a charging hopper 4 is provided at the top of these supply pipes. Further, the tower body below the upper wire netting 3 is provided with a hole 5 for a poking rod, through which the poking rod 6 can be inserted into the adsorbent-filled layer.

【0004】以上のように構成された吸着塔1内の吸着
剤充填層へ吸着剤を充填する必要があるが、その充填工
程は粗充填工程とつつき棒充填工程の2つに分かれてお
り、図4は粗充填工程、図5はつつき棒充填工程を示し
ている。図4に示した粗充填工程では吸着塔1の上部に
設けられた複数の充填ホッパ4に吸着剤2を入れ、上部
鏡板12を貫通して上部金網3に接続する供給管を通じ
て、吸着剤2を重力により充填層に充填する工程であ
る。
It is necessary to fill the adsorbent packed bed in the adsorption tower 1 constructed as described above with the adsorbent, but the packing process is divided into a rough packing process and a pecking rod packing process. FIG. 4 shows a rough filling step, and FIG. 5 shows a poking rod filling step. In the rough filling step shown in FIG. 4, the adsorbent 2 is put in a plurality of filling hoppers 4 provided at the upper part of the adsorption tower 1, and the adsorbent 2 is passed through a supply pipe that penetrates the upper end plate 12 and is connected to the upper wire net 3. Is a step of filling the packed bed by gravity.

【0005】しかし、この方法では、吸着剤2の粒子が
安息角を作る為、上部金網3一杯には充填されず、図4
に示すように、充填されない所が出来る。これに対応し
て、図5に示すつつき棒による充填工程に入るわけであ
るが、これは吸着塔1の塔体の上部、上部金網3のすぐ
下に設けられたつつき棒用穴5につつき棒6を差し込み
更に充填を続けて、吸着剤2上部の平準化を行う工程で
あるが、完全には平準化出来ず空間が残ってしまうのが
実情である。
However, in this method, since the particles of the adsorbent 2 form an angle of repose, the upper wire netting 3 is not filled with the particles of the repose angle, as shown in FIG.
As shown in, some areas are not filled. Corresponding to this, the pouring rod filling process shown in FIG. 5 is started, and the pouring rod hole 5 provided in the upper part of the tower body of the adsorption tower 1 and immediately below the upper wire netting 3 is used. Although the process of inserting the rod 6 and continuing the filling to level the upper part of the adsorbent 2 is performed, the actual condition is that the level cannot be completely leveled and a space remains.

【0006】[0006]

【発明が解決しようとする課題】前項に説明したよう
に、従来の吸着剤の充填法では充填が不完全となり、充
填層内に吸着剤が充填されていない無効容積が多く、且
つ吸着剤上部表面に凸凹が出来る為、吸着剤の有効利用
率が低くなることが避けられなかった。本発明はこのよ
うな問題点を解決するためになされたもので、圧力スイ
ング又は圧力・温度スイング物理吸着方式の吸着塔に対
し吸着剤を無効容積なく完全に充填させることのできる
吸着剤の充填方法を提供することを課題としている。
As described in the preceding paragraph, in the conventional adsorbent filling method, the filling is incomplete, the adsorbent is not filled in the packed bed, and there is a large amount of ineffective volume. Since the surface has irregularities, it is unavoidable that the effective utilization rate of the adsorbent decreases. The present invention has been made to solve such a problem, and is to fill an adsorbent in a pressure swing or pressure / temperature swing physical adsorption system with an adsorbent that can be completely filled without an ineffective volume. The challenge is to provide a method.

【0007】[0007]

【課題を解決するための手段】本発明は、縦円筒型の塔
体の上下にガスの出口、入口配管をそれぞれ接続する鏡
板が取付けられ、かつ、その塔体の内部に上下を吸着剤
粒子の逸脱を防止する目皿部で仕切られた吸着剤充填層
が形成された圧力スイング又は圧力・温度スイング物理
吸着法方式の吸着塔における吸着剤充填層に吸着剤を充
填する方法における前記課題を解決するため次の方法を
採用する。
According to the present invention, end plates for connecting a gas outlet and an inlet pipe are attached to the top and bottom of a vertical cylindrical tower body, and the top and bottom are adsorbent particles inside the tower body. The problem in the method of filling the adsorbent in the adsorbent-packed layer in the adsorption tower of the pressure swing or the pressure-temperature swing physical adsorption method in which the adsorbent-packed layer partitioned by the perforated part for preventing the deviation of To solve the problem, the following method is adopted.

【0008】すなわち、吸着剤充填層に対し加圧用充填
ホッパから吸着剤を供給可能な状態にして前記した塔体
内に加圧ガスを送入して加圧したのち、そのガスを放出
して減圧することにより減圧流動化充填を行う吸着剤の
充填方法である。
That is, the adsorbent can be supplied to the adsorbent packed bed from the pressurizing filling hopper so that the pressurized gas is fed into the tower body to pressurize it, and then the gas is released to reduce the pressure. This is a method for filling an adsorbent in which fluidization under reduced pressure is carried out.

【0009】この場合、塔体内への加圧ガスは下部鏡板
に取付けられたガス入口管に接続したブロアによって送
入され、また塔体内からのガスの放出は、上部鏡板に取
付けられたガス出口管に接続された減圧弁を開放するこ
とによって行う。
In this case, the pressurized gas into the tower body is sent by the blower connected to the gas inlet pipe attached to the lower mirror plate, and the gas released from the tower body is discharged from the gas outlet port mounted to the upper mirror plate. This is done by opening the pressure reducing valve connected to the tube.

【0010】[0010]

【作用】このような手段を採ることによって、その充填
作用は次のように行われる。即ち、本発明の手段は上部
に設けた充填ホッパより内部の充填層への吸着剤の充填
を行う充填法として、充填ホッパよりの重力による粗充
填工程は従来と変わらないが、この後の従来行われてい
たつつき棒による平準化工程の代わりに、先ず、加圧工
程を設け、本設のブロアを用いて吸着塔内を加圧するの
である。当然、充填ホッパ自体も充填用吸着剤を入れて
いる状態で加圧されるので、この工程では密閉され且つ
耐圧の加圧用充填ホッパでなければならない。
By using such means, the filling operation is performed as follows. That is, the means of the present invention is a filling method for filling the adsorbent into the inner filling layer from the filling hopper provided at the upper part, and the rough filling step by gravity from the filling hopper is the same as the conventional method, but Instead of the leveling process using a pecking rod that has been performed, first, a pressurizing process is provided, and the inside of the adsorption tower is pressurized using a blower that is permanently installed. As a matter of course, the filling hopper itself is also pressurized in a state where the filling adsorbent is contained therein, and therefore, in this step, the filling hopper must be sealed and pressure-resistant.

【0011】ブロアによる加圧ガスの送入で吸着塔内が
一定の圧力に達したならばこの工程は終わり次の減圧流
動化充填の工程に入る。減圧流動化による充填は、上部
鏡板もしくはこれに接続するガス出口管取合部に備える
減圧弁を開閉操作して充填塔内のガスを放出することに
よって行なう。
When the pressure in the adsorption tower reaches a certain level due to the feeding of the pressurized gas by the blower, this step ends, and the next step of reduced pressure fluidization filling is started. The filling by reduced pressure fluidization is performed by opening and closing a pressure reducing valve provided in an upper end plate or a gas outlet pipe connecting portion connected to the upper end plate to release the gas in the packed column.

【0012】この操作で、加圧されており安息角を形成
している吸着剤粒が上部の減圧弁の開閉による減圧によ
って流動する、所謂流動化現象が発生するのである。こ
れにより充填層内の粉粒剤に形成されていた安息角は崩
れて減圧の過程で平準化しつつ粉粒剤の不足分は加圧用
充填ホッパより補充されて、最終的にこの工程の終了時
には上部目皿部の金網一杯まで吸着剤が充填されること
となる。このような作用により、本発明の吸着剤充填法
を用いることで、吸着塔内の無効容積を減じ、吸着剤の
利用率をあげることが出来るのである。
By this operation, a so-called fluidization phenomenon occurs in which the adsorbent particles which are pressurized and form an angle of repose flow by decompression by opening and closing the pressure reducing valve on the upper side. As a result, the angle of repose formed in the powder and granules in the packed bed collapses and is leveled in the process of depressurization, while the shortage of powder and granules is replenished by the pressurizing filling hopper, and finally at the end of this step. The adsorbent is filled up to the wire mesh of the upper part of the plate. By such an action, by using the adsorbent filling method of the present invention, the ineffective volume in the adsorption tower can be reduced and the adsorbent utilization rate can be increased.

【0013】[0013]

【実施例】以下、本発明による充填方法の実施の態様を
図1〜図3を用いて具体的に説明する。図1〜図3にお
いて、図4及び図5に示した装置と同じ構成の部分には
同じ符号を付してあり、それらについての重複する説明
は省略する。
Embodiments of the filling method according to the present invention will be specifically described below with reference to FIGS. 1 to 3, parts having the same configurations as those of the device shown in FIGS. 4 and 5 are denoted by the same reference numerals, and duplicate description thereof will be omitted.

【0014】図1〜図3において、上部鏡板12に取付
けられたガス出口管16には減圧弁13が接続されてい
る。また、充填用ホッパ14には、開閉可能な蓋15が
設けられ加圧用充填ホッパとなっている。下部鏡板11
に取付けられたガス入口管17には吸着塔ガス入口弁1
0が設けられていると共に、ガス入口管17から吸着塔
1内に加圧ガスを送入するブロア9が設けられている。
その他の構成は図4、図5に示した装置と実質的に同じ
である。
1 to 3, a pressure reducing valve 13 is connected to a gas outlet pipe 16 attached to the upper end plate 12. Further, the filling hopper 14 is provided with a lid 15 which can be opened and closed, and serves as a pressure filling hopper. Lower end plate 11
At the gas inlet pipe 17 attached to the adsorption tower gas inlet valve 1
0, and a blower 9 for feeding a pressurized gas into the adsorption tower 1 from the gas inlet pipe 17.
The other structure is substantially the same as that of the device shown in FIGS.

【0015】本発明による充填方法の一実施態様を示す
図1〜図3において、図1は粗充填工程、図2は加圧工
程、最後の図3は減圧流動化充填工程を示している。次
にその充填方法を説明すると、縦円筒型の塔体内部の上
下に設けられて吸着剤2粒子の逸脱を防止する上部金網
3及び下部目皿8の間に形成された充填層中に吸着剤2
を収める。
1 to 3 showing an embodiment of the filling method according to the present invention, FIG. 1 shows a rough filling step, FIG. 2 shows a pressurizing step, and finally FIG. 3 shows a reduced pressure fluidization filling step. Next, the filling method will be described. Adsorption in a packed bed formed between the upper wire net 3 and the lower plate 8 which are provided above and below the columnar column to prevent the particles of the adsorbent 2 from escaping. Agent 2
To store.

【0016】図1に示したその粗充填工程では、上部の
加圧用充填ホッパ14の蓋15を開放して吸着剤2を入
れ、同ホッパから上部鏡板12を貫通し上部金網3部に
接続するシュート管を通じて充填層に吸着剤2を重力に
より充填する。この操作は従来と変わらない。この工程
では吸着剤2は安息角を作る為に上部金網3一杯に充填
することは出来ない。
In the rough filling step shown in FIG. 1, the lid 15 of the upper pressure filling hopper 14 is opened to put the adsorbent 2, and the upper end plate 12 is penetrated from the hopper and connected to the upper wire net 3 part. The packed bed is filled with the adsorbent 2 by gravity through a chute tube. This operation is the same as before. In this step, the adsorbent 2 cannot fill the upper wire netting 3 to fill the reed angle.

【0017】そこで、次の図2の加圧工程に入るのだ
が、加圧用充填ホッパ14に吸着剤2を充分に入れた
上、加圧できるように蓋15を密閉された状態で本設の
ブロア9で対象ガスを用いて吸着塔内を加圧する。吸着
塔1内の圧力が一定の値になればこの工程は終了する。
Therefore, the next step of pressing shown in FIG. 2 is carried out. In this case, the adsorbent 2 is sufficiently put in the filling hopper 14 for pressurization, and the lid 15 is closed so that the pressurization can be performed. The inside of the adsorption tower is pressurized with the target gas by the blower 9. When the pressure in the adsorption tower 1 reaches a constant value, this process ends.

【0018】次に、図3の減圧流動化充填工程は、前工
程で加圧された吸着塔1内の圧力を上部のガス出口管1
6に設けられた減圧弁13を開閉操作して減圧すること
によって行なう。この操作で、加圧されており安息角を
形成している充填層内の吸着剤粒は、上部の減圧弁13
の開放による減圧によって流動する、所謂流動化現象が
発生するのである。
Next, in the reduced pressure fluidization filling step of FIG. 3, the pressure in the adsorption tower 1 pressurized in the previous step is adjusted to the upper gas outlet pipe 1
The pressure reducing valve 13 provided at 6 is opened and closed to reduce the pressure. By this operation, the adsorbent particles in the packed bed, which are pressurized and form the angle of repose, become
The so-called fluidization phenomenon occurs in which the fluid flows due to the decompression caused by the release of.

【0019】これによって、充填層内の安息角は崩れて
減圧の過程で平準化しつつ不足分は加圧用充填ホッパ1
4より補充されて、最終的に、この工程の終了時には上
部金網3部の金網一杯まで吸着剤2が充填されることに
なる。
As a result, the angle of repose in the packed bed collapses and is leveled in the process of depressurization, while the deficient portion is filled by the pressurizing hopper 1.
4 and finally, at the end of this step, the adsorbent 2 is filled up to the wire mesh of the upper wire mesh 3 part.

【0020】以上、本発明を図示した一実施態様に基づ
いて具体的に説明したが、本発明がこれに限定されず特
許請求の範囲に示す本発明の範囲内で、その具体的やり
方に種々の変更を加えてよいことはいうまでもない。
The present invention has been specifically described above based on the illustrated embodiment, but the present invention is not limited to this, and within the scope of the present invention as set forth in the claims, various concrete methods can be used. It goes without saying that changes may be made.

【0021】[0021]

【発明の効果】以上に述べて来たように、圧力スイング
又は圧力・温度スイング物理吸着法方式が適用される吸
着塔での吸着剤充填法に対し、本発明による加圧工程と
減圧流動化充填工程を用いた充填方法によって、吸着塔
内の無効容積を減ずる事が出来るとともに、吸着剤の利
用率を上昇させる効果がある。
As described above, as compared with the adsorbent filling method in the adsorption tower to which the pressure swing or pressure / temperature swing physical adsorption method is applied, the pressurizing step and the reduced pressure fluidization according to the present invention are performed. By the filling method using the filling step, it is possible to reduce the ineffective volume in the adsorption tower and to increase the utilization rate of the adsorbent.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施態様による吸着剤充填法におけ
る粗充填工程を示す説明図。
FIG. 1 is an explanatory view showing a rough filling step in an adsorbent filling method according to an embodiment of the present invention.

【図2】本発明の一実施態様による吸着剤充填法におけ
る加圧工程を示す説明図。
FIG. 2 is an explanatory view showing a pressurizing step in an adsorbent filling method according to an embodiment of the present invention.

【図3】本発明の一実施態様による吸着剤充填法におけ
る減圧流動化充填工程を示す説明図。
FIG. 3 is an explanatory view showing a reduced pressure fluidization filling step in the adsorbent filling method according to an embodiment of the present invention.

【図4】従来の吸着剤充填法における粗充填工程を示す
説明図。
FIG. 4 is an explanatory view showing a rough filling step in a conventional adsorbent filling method.

【図5】従来の吸着剤充填法におけるつつき棒充填工程
を示す説明図。
FIG. 5 is an explanatory view showing a pecking rod filling step in a conventional adsorbent filling method.

【符号の説明】[Explanation of symbols]

1 吸着塔 2 吸着剤 3 上部金網 4 充填ホッパ 5 つつき棒用穴 6 つつき棒 7 下部金網 8 下部目皿 9 ブロア 10 吸着塔ガス入口弁 11 下部鏡板 12 上部鏡板 13 減圧弁 14 加圧用充填ホッパ 15 蓋 16 ガス出口管 17 ガス入口管 1 Adsorption Tower 2 Adsorbent 3 Upper Wire Mesh 4 Filling Hopper 5 Hole for Stick Rod 6 Stick Rod 7 Lower Wire Mesh 8 Lower Plate 9 Blower 10 Adsorption Tower Gas Inlet Valve 11 Lower End Plate 12 Upper End Plate 13 Pressure Reduction Valve 14 Pressurizing Filling Hopper 15 Lid 16 Gas outlet pipe 17 Gas inlet pipe

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 縦円筒型の塔体の上下にガスの出口、入
口配管をそれぞれ接続する鏡板が取付けられ、かつ、前
記塔体の内部に上下を吸着剤粒子の逸脱を防止する目皿
部で仕切られた吸着剤充填層が形成された圧力スイング
又は圧力・温度スイング物理吸着法方式の吸着塔におけ
る前記吸着剤充填層に吸着剤を充填する方法であって、
前記吸着剤充填層に対し加圧用充填ホッパから吸着剤を
供給可能な状態にして前記塔体内に前記ガス入口管に接
続したブロアから加圧ガスを送入して加圧したのち、そ
のガスを前記ガス出口管に接続された減圧弁から放出し
て減圧することにより減圧流動化充填を行うことを特徴
とする吸着剤の充填方法。
1. A vertical cylinder type column body is provided with upper and lower end plates for connecting a gas outlet and an inlet pipe, respectively, and a top and bottom part of the column body which prevents deviation of adsorbent particles. A method of filling an adsorbent into the adsorbent-packed layer in an adsorption tower of a pressure swing or pressure-temperature swing physical adsorption method in which an adsorbent-packed layer partitioned by is formed,
After adsorbing a pressurized gas from a blower connected to the gas inlet pipe into the tower body so that the adsorbent can be supplied to the adsorbent packed bed from a pressurizing filling hopper, the gas is pressurized. A method for filling an adsorbent characterized in that reduced pressure fluidization filling is performed by discharging from a pressure reducing valve connected to the gas outlet pipe and reducing the pressure.
JP6224880A 1994-09-20 1994-09-20 Packing method of adsorbent Withdrawn JPH0889741A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6224880A JPH0889741A (en) 1994-09-20 1994-09-20 Packing method of adsorbent

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6224880A JPH0889741A (en) 1994-09-20 1994-09-20 Packing method of adsorbent

Publications (1)

Publication Number Publication Date
JPH0889741A true JPH0889741A (en) 1996-04-09

Family

ID=16820620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6224880A Withdrawn JPH0889741A (en) 1994-09-20 1994-09-20 Packing method of adsorbent

Country Status (1)

Country Link
JP (1) JPH0889741A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009012188A2 (en) * 2007-07-13 2009-01-22 Donaldson Company, Inc. Contaminant control filter with fill port
CN114307529A (en) * 2021-12-30 2022-04-12 中国化学工程第六建设有限公司 Molecular sieve packing equipment of air separation device
CN115121090A (en) * 2022-09-01 2022-09-30 湖南复泰机电设备工程有限公司 Molecular sieve vacuum negative pressure adsorption loading vibration platform

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009012188A2 (en) * 2007-07-13 2009-01-22 Donaldson Company, Inc. Contaminant control filter with fill port
WO2009012188A3 (en) * 2007-07-13 2009-04-30 Donaldson Co Inc Contaminant control filter with fill port
US8033304B2 (en) 2007-07-13 2011-10-11 Donaldson Company, Inc. Contaminant control filter with fill port
US8864884B2 (en) 2007-07-13 2014-10-21 Donaldson Company, Inc. Contaminant control filter with fill port
CN114307529A (en) * 2021-12-30 2022-04-12 中国化学工程第六建设有限公司 Molecular sieve packing equipment of air separation device
CN114307529B (en) * 2021-12-30 2023-01-24 中国化学工程第六建设有限公司 Molecular sieve packing equipment of air separation device
CN115121090A (en) * 2022-09-01 2022-09-30 湖南复泰机电设备工程有限公司 Molecular sieve vacuum negative pressure adsorption loading vibration platform
CN115121090B (en) * 2022-09-01 2022-12-02 湖南复泰机电设备工程有限公司 Molecular sieve vacuum negative pressure adsorption loading vibration platform

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