JPH0885548A - Ozone gas reservoir - Google Patents
Ozone gas reservoirInfo
- Publication number
- JPH0885548A JPH0885548A JP22433794A JP22433794A JPH0885548A JP H0885548 A JPH0885548 A JP H0885548A JP 22433794 A JP22433794 A JP 22433794A JP 22433794 A JP22433794 A JP 22433794A JP H0885548 A JPH0885548 A JP H0885548A
- Authority
- JP
- Japan
- Prior art keywords
- ozone gas
- internal face
- airtight container
- oxygen
- ozone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Details Of Rigid Or Semi-Rigid Containers (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、オゾンガスの貯蔵容器
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a storage container for ozone gas.
【0002】[0002]
【従来技術】オゾンガスはステンレス鋼容器やガラス容
器に充填されるが、酸素への自己分解性が強く、従来は
オゾンガスを長期間保存することはできないとされてい
た。本発明は、オゾンガスを長期間保存できる貯蔵容器
を提供することを目的とする。2. Description of the Related Art Although ozone gas is filled in a stainless steel container or a glass container, it has been considered that ozone gas cannot be stored for a long period of time because of its strong self-decomposability into oxygen. An object of the present invention is to provide a storage container that can store ozone gas for a long period of time.
【0003】[0003]
【課題を解決するための手段】上述の目的を達成するた
めに、電解研磨して鏡面仕上げしたステンレス鋼製貯蔵
容器の内面を不動態膜で覆ったことを特徴としている。In order to achieve the above-mentioned object, the present invention is characterized in that the inner surface of a stainless steel storage container which is electrolytically polished and mirror-finished is covered with a passive film.
【0004】[0004]
【作用】本発明では、電解研磨して鏡面仕上げしたステ
ンレス鋼製貯蔵容器の内面を不動態膜で覆っているの
で、貯蔵容器の内周面の活性が抑制され、自己分解性が
抑制される。これにより、オゾンを貯蔵することができ
る。In the present invention, since the inner surface of the stainless steel storage container which is electrolytically polished and mirror-finished is covered with the passivation film, the activity of the inner peripheral surface of the storage container is suppressed and the self-decomposition property is suppressed. . Thereby, ozone can be stored.
【0005】[0005]
【実施例】内面に電解研磨を施し、加工変質層のない状
態に鏡面仕上げしたSUS316Lステンレス鋼製の気
密容器を真空引きしたのち、気密容器内に対酸素比がほ
ぼ100%の高濃度オゾンガスをゲージ圧0.63kg/c
m2程度の圧力で充填し、48時間程度放置して、気密容
器の内面に不動態膜を形成した。なお、この不動態膜の
形成処理は常温(室温)の状態で行う。[Examples] After vacuum-evacuating an airtight container made of SUS316L stainless steel, which has been subjected to electrolytic polishing on the inner surface and mirror-finished in a state without a work-affected layer, a high-concentration ozone gas having an oxygen-to-oxygen ratio of almost 100% is placed in the airtight container. Gauge pressure 0.63kg / c
It was filled with a pressure of about m 2 and left for about 48 hours to form a passivation film on the inner surface of the airtight container. The passivation film formation process is performed at room temperature (room temperature).
【0006】このようにして内面に不動態膜を形成した
気密容器と、内面に不動態膜を形成していない気密容器
とを使用して、対酸素比5%のオゾンガスを751.5T
orrで貯蔵した場合の時間経過によるオゾン比率の変化
を調べた。その結果は図1に示す通りであり、内面に不
動態膜を形成していない気密容器の場合、7時間半程度
ですべて酸素に分解されるのに対し、内面に不動態膜を
形成した容器では、10時間経過してもほとんど対酸素
比に変化がなく、自己分解は起こっていないことが分か
った。[0006] Thus, using an airtight container having a passivation film formed on the inner surface and an airtight container having no passivation film formed on the inner surface, 751.5T of ozone gas having an oxygen ratio of 5% is used.
The change of ozone ratio with the passage of time when stored in orr was investigated. The results are shown in Fig. 1. In the case of an airtight container that does not have a passivation film formed on its inner surface, it is completely decomposed into oxygen in about seven and a half hours, whereas a container with a passivation film formed on its inner surface. Then, it was found that there was almost no change in the oxygen-to-oxygen ratio even after 10 hours, and that autolysis did not occur.
【0007】次に内面に不動態膜を形成した気密容器
と、内面に不動態膜を形成していない気密容器とを使用
して、対酸素比50%のオゾンガスを0.63Kg/cm
2(ゲージ圧)で貯蔵した場合の時間経過によるオゾン比
率の変化を調べた。その結果は図2に示す通りであり、
内面に不動態膜を形成していない気密容器の場合、80
時間程度ですべて酸素に分解されるのに対し、内面に不
動態膜を形成した容器では、90時間を経過しても対酸
素比は5%程度の低下しか見られず、自己分解が抑制さ
れていることが分かった。Next, using an airtight container having a passivation film formed on the inner surface thereof and an airtight container having no passivation film formed on the inner surface thereof, an ozone gas having an oxygen ratio of 50% is added at 0.63 Kg / cm.
The change of the ozone ratio with the passage of time when stored at 2 (gauge pressure) was examined. The result is shown in Fig. 2.
In the case of an airtight container with no passivation film formed on the inner surface, 80
All of them are decomposed into oxygen in about time, but in the container with the passivation film formed on the inner surface, the ratio of oxygen to oxygen is decreased by about 5% even after 90 hours, and self-decomposition is suppressed. I found out.
【0008】なお、容器内面に不動態膜を形成する際に
導入するオゾンガスの対酸素比が50%を切ると、常温
操作では不動態膜の生成が十分ではなく、自己分解の抑
制を行うことができなかった。したがって、不動態膜生
成時に導入するオゾンガスは対酸素比50%以上でよい
が、75%以上の高濃度オゾンガスが望ましい。If the ratio of ozone gas to oxygen introduced when forming the passivation film on the inner surface of the container is less than 50%, the formation of the passivation film is not sufficient at normal temperature operation, and self-decomposition is suppressed. I couldn't. Therefore, the ozone gas introduced at the time of forming the passivation film may have a ratio of oxygen to oxygen of 50% or more, but a high concentration ozone gas of 75% or more is desirable.
【0009】上記実施例では、対酸素比50%以上の高
濃度オゾンガスを用いて不動態膜を形成したものについ
て説明したが、不動態膜は母材を400℃〜500℃に
加熱した状態で酸素ガスと接触させる処理や、母材を硝
酸溶液等の酸化力のある溶液に浸漬させる処理で形成し
たものであってもよい。In the above embodiment, the case where the passivation film is formed by using the high-concentration ozone gas having the oxygen ratio of 50% or more has been described. However, the passivation film is formed by heating the base material at 400 ° C to 500 ° C. It may be formed by a treatment of contacting with oxygen gas or a treatment of immersing the base material in a solution having oxidizing power such as a nitric acid solution.
【0010】[0010]
【発明の効果】本発明では、電解研磨して鏡面仕上げし
たステンレス鋼製貯蔵容器の内面を不動態膜で覆ったの
で、容器内面での活性が抑制され、貯蔵したオゾンガス
の自己分解を抑制して、長期間にわたってオゾンガスを
貯蔵することができる。According to the present invention, since the inner surface of the stainless steel storage container which is electrolytically polished and mirror-finished is covered with the passivation film, the activity on the inner surface of the container is suppressed and the self-decomposition of stored ozone gas is suppressed. Thus, ozone gas can be stored for a long period of time.
【図1】対酸素比5%のオゾンガスの時間経過によるオ
ゾン比率変化を示すグラフである。FIG. 1 is a graph showing changes in ozone ratio with time of ozone gas having an oxygen ratio of 5%.
【図2】対酸素比50%のオゾンガスの時間経過による
オゾン比率変化を示すグラフである。FIG. 2 is a graph showing changes in ozone ratio with time of ozone gas having an oxygen ratio of 50%.
Claims (2)
鋼製貯蔵容器の内面を不動態膜で覆ってなるオゾンガス
貯蔵容器。1. An ozone gas storage container comprising a stainless steel storage container that has been electrolytically polished and mirror-finished, and the inner surface of the storage container is covered with a passivation film.
を使用して不動態膜を形成した請求項1に記載のオゾン
ガス貯蔵容器。2. The ozone gas storage container according to claim 1, wherein the passive film is formed by using a high-concentration ozone gas having an oxygen to oxygen ratio of 50% or more.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22433794A JP2893081B2 (en) | 1994-09-20 | 1994-09-20 | Ozone gas storage container |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22433794A JP2893081B2 (en) | 1994-09-20 | 1994-09-20 | Ozone gas storage container |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0885548A true JPH0885548A (en) | 1996-04-02 |
JP2893081B2 JP2893081B2 (en) | 1999-05-17 |
Family
ID=16812178
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22433794A Expired - Lifetime JP2893081B2 (en) | 1994-09-20 | 1994-09-20 | Ozone gas storage container |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2893081B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006522226A (en) * | 2003-03-25 | 2006-09-28 | イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー | Method for reducing degradation of reactive compounds during transport |
JP2007222714A (en) * | 2006-02-21 | 2007-09-06 | Iwatani Internatl Corp | High-concentration ozone water production apparatus |
RU2503605C2 (en) * | 2007-10-23 | 2014-01-10 | Эвоник Дегусса Гмбх | Big barrel for use and for transportation of high-purity and ultra high-purity chemicals |
JP2018138824A (en) * | 2018-04-25 | 2018-09-06 | 東横化学株式会社 | Storage container |
-
1994
- 1994-09-20 JP JP22433794A patent/JP2893081B2/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006522226A (en) * | 2003-03-25 | 2006-09-28 | イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー | Method for reducing degradation of reactive compounds during transport |
JP2007222714A (en) * | 2006-02-21 | 2007-09-06 | Iwatani Internatl Corp | High-concentration ozone water production apparatus |
RU2503605C2 (en) * | 2007-10-23 | 2014-01-10 | Эвоник Дегусса Гмбх | Big barrel for use and for transportation of high-purity and ultra high-purity chemicals |
JP2018138824A (en) * | 2018-04-25 | 2018-09-06 | 東横化学株式会社 | Storage container |
Also Published As
Publication number | Publication date |
---|---|
JP2893081B2 (en) | 1999-05-17 |
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