JPH088506A - Through hole double-sided board - Google Patents

Through hole double-sided board

Info

Publication number
JPH088506A
JPH088506A JP15804194A JP15804194A JPH088506A JP H088506 A JPH088506 A JP H088506A JP 15804194 A JP15804194 A JP 15804194A JP 15804194 A JP15804194 A JP 15804194A JP H088506 A JPH088506 A JP H088506A
Authority
JP
Japan
Prior art keywords
hole
conductor
substrate
board
sided board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15804194A
Other languages
Japanese (ja)
Inventor
Kengo Oka
賢吾 岡
Yuji Otani
祐司 大谷
Takashi Nagasaka
長坂  崇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Priority to JP15804194A priority Critical patent/JPH088506A/en
Publication of JPH088506A publication Critical patent/JPH088506A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0306Inorganic insulating substrates, e.g. ceramic, glass
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4038Through-connections; Vertical interconnect access [VIA] connections
    • H05K3/4053Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques
    • H05K3/4061Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques for via connections in inorganic insulating substrates

Landscapes

  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Structure Of Printed Boards (AREA)

Abstract

PURPOSE:To eliminate contact failure caused by an increase in conductor resistance and disconnection on upper and lower ends of a through hole. CONSTITUTION:A through hole 2 penetrating a ceramic board 1 is provided, and an upper conductor 3 formed on the upper surface of the board 1 and a lower conductor 4 formed on the lower surface of the board 1 are brought into contact via the through hole 2. The through hole 2 is inclined in relation to the board 1, and the inclination is limited within a range of 35-55 deg. to a plane perpendicular to the board. Since at least a part of end portions at upper and lower apertures of the through hole 2 has an obtuse angle, the thickness of this part can be made sufficiently large, thus preventing disconnection.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、セラミック基板の両面
に設けた回路導体が、スルーホールを介して接続される
スルーホール両面基板に関する。このようなスルーホー
ル両面基板はハイブリッドIC製品における回路基板等
として利用される。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a through-hole double-sided board in which circuit conductors provided on both sides of a ceramic board are connected through through-holes. Such a through-hole double-sided board is used as a circuit board or the like in a hybrid IC product.

【0002】[0002]

【従来の技術】セラミック基板の両面に導体配線を行な
う場合、一般に、セラミック基板を貫通するスルーホー
ルを設けて、基板上面および下面に設けた導体間の接続
を確保している(例えば特開平4−206990号公報
等)。このようなスルーホール両面基板の一例を図8に
示すと、セラミック基板1を貫通する複数のスルーホー
ル2が所定個所に形成されており、基板1上面に形成さ
れる上部導体3は上記スルーホール2を介して基板下面
側の下部導体4と接続される(図9)。
2. Description of the Related Art When conductor wiring is provided on both sides of a ceramic substrate, a through hole penetrating the ceramic substrate is generally provided to secure a connection between the conductors provided on the upper and lower surfaces of the substrate (for example, Japanese Patent Laid-Open No. Hei 4). -206990, etc.). An example of such a through-hole double-sided board is shown in FIG. 8. A plurality of through-holes 2 penetrating the ceramic board 1 are formed at predetermined locations, and the upper conductor 3 formed on the upper surface of the board 1 is the through-hole. It is connected to the lower conductor 4 on the lower surface side of the substrate via 2 (FIG. 9).

【0003】スルーホール2の形成は、保持台に載置し
た未焼成のセラミックグリーンシートをピン状の打抜き
具で打抜くことによりなされ、その後、焼成して基板1
とする。次いで、上部導体3を、スルーホール2部で真
空吸引しながら印刷、焼成し、さらに基板1を反転して
その下面に同様の工程により下部導体4を形成する。こ
れにより、これら導体3、4は上記スルーホール2内周
壁で重なり合い、導通可能となる。
The through holes 2 are formed by punching an unfired ceramic green sheet placed on a holding table with a pin-shaped punching tool, and then firing the substrate 1.
And Next, the upper conductor 3 is printed and fired while sucking vacuum in the through hole 2 portion, and the substrate 1 is inverted to form the lower conductor 4 on the lower surface thereof by the same process. As a result, the conductors 3 and 4 are overlapped with each other on the inner peripheral wall of the through hole 2 and can be electrically connected.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、上記従
来の構成では、図9に示すように上記基板1の上下表面
に開口するスルーホール2の端縁部21において、上記
導体3、4の膜厚が極端に薄くなり、導体抵抗の増大、
あるいは断線による接触不良をおこすおそれがあった。
これは、スルーホール2の上記端縁部21が直角である
ため導体ペーストの流れなどにより塗布される導体ペー
ストの膜厚を充分厚くすることが容易でない上、塗布
後、乾燥する際に導体ペーストが収縮することによる。
このため、通常、導体ペーストを二度塗りして膜厚の増
加を図っているが、工程が複雑となる上、必ずしも十分
な効果が得られるとは言えなかった。
However, in the above-mentioned conventional structure, as shown in FIG. 9, the film thickness of the conductors 3 and 4 at the edge portions 21 of the through holes 2 opened on the upper and lower surfaces of the substrate 1 is increased. Becomes extremely thin, increasing the conductor resistance,
Alternatively, there is a possibility that contact failure may occur due to disconnection.
This is because it is not easy to make the film thickness of the conductor paste to be applied sufficiently thick due to the flow of the conductor paste because the above-mentioned edge portion 21 of the through hole 2 is a right angle, and the conductor paste is dried after the application. Due to contraction.
For this reason, the conductor paste is usually applied twice to increase the film thickness, but the process is complicated and the sufficient effect cannot be always obtained.

【0005】しかして、本発明は、簡単な工程で、基板
上下表面に形成される上部導体および下部導体の膜厚を
厚くして、両者を確実に接続し、導体抵抗の増大や断線
による接触不良の発生といった不具合を解消することを
目的とするものである。
However, according to the present invention, the film thickness of the upper conductor and the lower conductor formed on the upper and lower surfaces of the substrate is increased in a simple process to surely connect them to each other, thereby increasing the conductor resistance and making contact due to disconnection. The purpose is to eliminate defects such as defects.

【0006】[0006]

【課題を解決するための手段】上記問題を解決するため
に、本発明のスルーホール両面基板は、図1に示すよう
に、セラミック基板1を貫通するスルーホール2を有
し、該スルーホール2を介して基板1上面に形成した第
1の導体3と基板1下面に形成した第2の導体4とが接
触している。上記スルーホール2は上記基板1に対して
傾斜しており、かつその傾斜角αを基板1に垂直な面に
対し35〜55°の範囲としてある。
In order to solve the above problems, the through-hole double-sided board of the present invention has a through-hole 2 penetrating a ceramic substrate 1 as shown in FIG. The first conductor 3 formed on the upper surface of the substrate 1 and the second conductor 4 formed on the lower surface of the substrate 1 are in contact with each other via. The through hole 2 is inclined with respect to the substrate 1, and its inclination angle α is in the range of 35 to 55 ° with respect to the plane perpendicular to the substrate 1.

【0007】[0007]

【作用】上記構成では、スルーホール2が傾斜している
ので、スルーホール2の上下開口縁の少なくとも一部は
鈍角となる(図1に矢印a、bとして示す)。従って、
少なくともこの部分においては導体ペーストの塗布が容
易にでき、導体膜厚を十分厚くできるので、断線による
接触不良等が防止される。また、第1の導体3と第2の
導体4はスルーホール2内において重なりを有し、電気
的に接続される。
In the above structure, since the through hole 2 is inclined, at least part of the upper and lower opening edges of the through hole 2 has an obtuse angle (shown as arrows a and b in FIG. 1). Therefore,
At least in this portion, the conductor paste can be easily applied and the conductor film thickness can be made sufficiently thick, so that contact failure or the like due to disconnection can be prevented. Further, the first conductor 3 and the second conductor 4 have an overlap in the through hole 2 and are electrically connected.

【0008】[0008]

【実施例】図1は本発明のスルーホール両面基板の断面
図である。図においてセラミック基板であるアルミナ基
板1には、適当個所に基板1を貫通するスルーホール2
が形成してある。上記スルーホール2は、基板1を斜め
に貫通しており、その傾斜角度αは基板1に垂直な面に
対し35°以上となるようにしてある。上記スルーホー
ル2の傾斜角度αを35°以上とすることにより、スル
ーホール2の上下開口部において、図に矢印a、bで示
す周縁部の一部が基板1表面より続く緩やかな傾斜とな
り、導体切れを防止することができる。傾斜角度αが3
5°より小さいと、上記周縁部における導体膜厚を十分
厚くできず、断線が生じるおそれがあるので好ましくな
い。なお、傾斜角度αが大きくなるほど断線の可能性は
小さくなるが、スペースに余裕がない場合などは形成が
難しく実用的でないので、好ましくは35°ないし55
°の範囲とするのがよい。
1 is a cross-sectional view of a through-hole double-sided board of the present invention. In the figure, an alumina substrate 1, which is a ceramic substrate, has through holes 2 penetrating the substrate 1 at appropriate places.
Is formed. The through hole 2 penetrates the substrate 1 obliquely, and its inclination angle α is 35 ° or more with respect to a plane perpendicular to the substrate 1. By setting the inclination angle α of the through hole 2 to be 35 ° or more, in the upper and lower openings of the through hole 2, a part of the peripheral edge portion shown by arrows a and b in the figure becomes a gentle inclination continuing from the surface of the substrate 1, It is possible to prevent conductor breakage. Inclination angle α is 3
If it is less than 5 °, the conductor film thickness at the peripheral portion cannot be made sufficiently thick, and there is a risk of disconnection, which is not preferable. Although the possibility of wire breakage decreases as the inclination angle α increases, it is difficult to form when the space is insufficient, and it is not practical. Therefore, it is preferably 35 ° to 55 °.
It is good to set it in the range of °.

【0009】また、上記スルーホール2上端開口縁の、
上記矢印aで示す緩斜面部に対向する位置は、上記基板
1表面より滑らかに続く曲面部22となしてあり、これ
により曲面部22上に導体ペーストを均一に塗布するこ
とができる。かくしてスルーホール2上端開口部は、ほ
ぼ全周において十分な膜厚を確保でき、断線等の不具合
を防止できる。
Further, at the upper end opening edge of the through hole 2,
The position facing the gentle slope portion indicated by the arrow a is a curved surface portion 22 that continues smoothly from the surface of the substrate 1, and the conductor paste can be evenly applied onto the curved surface portion 22. Thus, the upper end opening of the through hole 2 can secure a sufficient film thickness over almost the entire circumference, and can prevent problems such as disconnection.

【0010】上記基板1上面には第1の導体たる上部導
体3が形成され、一方、基板1下面には第2の導体たる
導体4が形成されていて、両導体3、4はスルーホール
2内に進入してその内壁面を上下より覆うとともに、中
間部付近において重なりを有し、電気的に接続してい
る。なお、図中、5は抵抗体である。
An upper conductor 3 serving as a first conductor is formed on the upper surface of the substrate 1, while a conductor 4 serving as a second conductor is formed on the lower surface of the substrate 1, and both conductors 3 and 4 are through holes 2 It enters inside and covers the inner wall surface from above and below, and has an overlap in the vicinity of the middle part and is electrically connected. In the figure, 5 is a resistor.

【0011】上記形状のスルーホール2を形成する方法
を以下に示す。図2において、保持台6はその傾斜角度
βを35°以上としてあり、この上に未焼成のアルミナ
グリーンシート11を載置する。打抜き具7は、グリー
ンシート11面に平行な押さえ面と、その下方に垂直に
突出するピン状打抜き部71を有し、該打抜き部71は
基端部の一部をスルーホール2の上記曲面部22に対応
する曲面状に成形してある。この打抜き具7を用いて上
記グリーンシート11を上方より押圧し、打抜き部71
を貫通させると、グリーンシート11は斜めに打抜か
れ、曲面部22を有するスルーホール2が形成される
(図3)。抜きカスは保持台6に設けた孔61から下方
へ抜ける(図2)。
A method of forming the through hole 2 having the above shape will be described below. In FIG. 2, the holding table 6 has an inclination angle β of 35 ° or more, and the unfired alumina green sheet 11 is placed thereon. The punching tool 7 has a pressing surface parallel to the surface of the green sheet 11 and a pin-shaped punching portion 71 that vertically projects downward from the pressing surface. The punching portion 71 has a base end part of the curved surface of the through hole 2. It is formed into a curved surface corresponding to the portion 22. Using the punching tool 7, the green sheet 11 is pressed from above, and the punching portion 71 is pressed.
Through, the green sheet 11 is punched obliquely to form the through hole 2 having the curved surface portion 22 (FIG. 3). The scraps escape downward through the holes 61 provided in the holding table 6 (FIG. 2).

【0012】スルーホール2を形成したグリーンシート
11は、次いで、1500〜1600℃で焼成し、基板
1とした後、さらに上部表面に上部導体3を形成する
(図4)。導体材料としては、金、銀、銅、銀−パラジ
ウム、銀−白金等が使用でき、通常の厚膜形成手法によ
り、基板下面方向より真空吸引しながら導体ペーストを
印刷、乾燥した後、800〜950℃で焼成する。膜厚
は7〜15μmとする。このようにして形成される上部
導体3は、スルーホール2内に進入しその内壁面の主に
上半部を覆う。ここで、スルーホール2の上部開口縁
は、一部が矢印aで示すように鈍角となっており、ま
た、この対向位置には曲面部22が形成されているの
で、少なくともこれらの部分において上部導体3の膜厚
を十分厚くすることができる。
The green sheet 11 having the through holes 2 is then fired at 1500 to 1600 ° C. to form the substrate 1, and then the upper conductor 3 is further formed on the upper surface (FIG. 4). As the conductor material, gold, silver, copper, silver-palladium, silver-platinum, or the like can be used. After the conductor paste is printed and dried by vacuum suction from the lower surface of the substrate by a normal thick film forming method, 800 to Bake at 950 ° C. The film thickness is 7 to 15 μm. The upper conductor 3 thus formed enters the through hole 2 and mainly covers the upper half of the inner wall surface thereof. Here, the upper opening edge of the through hole 2 has an obtuse angle as shown by an arrow a, and since the curved surface portion 22 is formed at this facing position, at least these portions have an upper portion. The film thickness of the conductor 3 can be made sufficiently thick.

【0013】その後、同様にして基板1下面に導体ペー
ストを印刷し、焼成を行なって、下部導体4とする。ス
ルーホール2内では、下部導体4はスルーホール2内壁
面の主に下半部を覆い、下端開口では矢印bで示す部分
が鈍角となるのでこの部分において膜厚を厚く形成でき
る。なお、矢印cで示す部分は鋭角となるので膜厚が薄
くなるおそれがあるが、対向するb部において導通が確
保できるので、接触不良等が生ずるおそれはない。これ
ら上部導体3および下部導体4は、図5に示すようにス
ルーホール2内において重なり、特に曲面部22下方の
内壁面においてこの重なりを厚くできるので、確実に両
導体3、4を接続することができる。
Thereafter, in the same manner, a conductor paste is printed on the lower surface of the substrate 1 and fired to form the lower conductor 4. In the through hole 2, the lower conductor 4 mainly covers the lower half of the inner wall surface of the through hole 2, and the portion shown by the arrow b at the lower end opening has an obtuse angle, so that a thick film can be formed in this portion. It should be noted that the portion indicated by arrow c has an acute angle and thus the film thickness may be thin, but since conduction can be secured at the facing portion b, contact failure or the like does not occur. The upper conductor 3 and the lower conductor 4 overlap each other in the through hole 2 as shown in FIG. 5, and the overlap can be thickened especially on the inner wall surface below the curved surface portion 22, so that the conductors 3 and 4 can be reliably connected. You can

【0014】なお、上記実施例ではスルーホール2の上
部開口縁に曲面部22を形成したが、この曲面部22は
必ずしも設ける必要はない。この場合には、図6、7に
示すように、上部開口縁においても鋭角となる部分が生
じるが、図6に太線で示す右半部が鈍角となるため、こ
の部分において断線は生じない。下端開口においても同
様であり、図6に太線で示す左半部が鈍角となる。そし
て、上部導体3と下部導体4は、スルーホール2内で確
実に接続し、導通が確保される。
Although the curved portion 22 is formed at the upper opening edge of the through hole 2 in the above embodiment, the curved portion 22 does not necessarily have to be provided. In this case, as shown in FIGS. 6 and 7, a portion having an acute angle also occurs at the upper opening edge, but since the right half portion shown by the thick line in FIG. 6 has an obtuse angle, no disconnection occurs at this portion. The same applies to the lower end opening, and the left half portion shown by the thick line in FIG. 6 has an obtuse angle. Then, the upper conductor 3 and the lower conductor 4 are surely connected in the through hole 2 to ensure conduction.

【0015】本実施例ではセラミック基板としてアルミ
ナ基板の例について説明したが、本発明でいうセラミッ
ク基板としては、それ以外にも、例えば窒化アルミニウ
ム、炭化けい素、ベリリア、ガラスセラミックス等の種
々の基板が使用できる。
In the present embodiment, an example of an alumina substrate was described as the ceramic substrate, but other than this, various substrates such as aluminum nitride, silicon carbide, beryllia, glass ceramics, etc. may be used as the ceramic substrate. Can be used.

【0016】[0016]

【発明の効果】以上のように、本発明のスルーホール形
状とすることにより、スルーホールの上下端縁における
導体膜厚を充分に厚くすることができる。従って、導体
抵抗の増大や断線による接触不良の発生を防止でき、信
頼性が向上する。また、導体ペーストの2度塗り等の手
間が省け、製造工程が簡略化できる。
As described above, by adopting the through hole shape of the present invention, the conductor film thickness at the upper and lower edges of the through hole can be made sufficiently thick. Therefore, it is possible to prevent the occurrence of contact failure due to increase in conductor resistance and disconnection, and reliability is improved. Further, the labor such as double coating of the conductor paste can be saved and the manufacturing process can be simplified.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例におけるスルーホール両面基
板の部分拡大断面図である。
FIG. 1 is a partially enlarged cross-sectional view of a through-hole double-sided board according to an embodiment of the present invention.

【図2】スルーホール両面基板の製造工程を示す部分拡
大断面図である。
FIG. 2 is a partially enlarged cross-sectional view showing a manufacturing process of a through-hole double-sided board.

【図3】スルーホールを形成したグリーンシートの部分
拡大断面図である。
FIG. 3 is a partially enlarged sectional view of a green sheet having a through hole formed therein.

【図4】両面に導体を形成したスルーホール両面基板の
部分拡大断面図である。
FIG. 4 is a partially enlarged sectional view of a through-hole double-sided board having conductors formed on both sides.

【図5】図4のV−V線断面図である。5 is a sectional view taken along line VV of FIG.

【図6】本発明の他の実施例におけるスルーホール両面
基板の平面図である。
FIG. 6 is a plan view of a through-hole double-sided board according to another embodiment of the present invention.

【図7】図6のVII−VII線断面図である。7 is a sectional view taken along line VII-VII in FIG.

【図8】従来のスルーホール両面基板の全体斜視図であ
る。
FIG. 8 is an overall perspective view of a conventional through-hole double-sided board.

【図9】従来のスルーホール両面基板の部分拡大断面図
で、図8のIX−IX線断面図である。
9 is a partially enlarged sectional view of a conventional through-hole double-sided board, which is a sectional view taken along line IX-IX of FIG.

【符号の説明】[Explanation of symbols]

1 セラミック基板 2 スルーホール 22 曲面部 3 上部導体(第1の導体) 4 下部導体(第2の導体) 5 抵抗体 6 保持台 7 打抜き具 1 Ceramic Substrate 2 Through Hole 22 Curved Surface Part 3 Upper Conductor (First Conductor) 4 Lower Conductor (Second Conductor) 5 Resistor 6 Holding Base 7 Punching Tool

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 セラミックス基板を貫通するスルーホー
ルを有し、該スルーホールを介して基板上部表面に形成
した第1の導体と基板下部表面に形成した第2の導体と
が接触しているスルーホール両面基板であって、上記ス
ルーホールが、上記基板に対して傾斜しており、かつそ
の傾斜角を基板と垂直な面に対し35〜55°の範囲と
したことを特徴とするスルーホール両面基板。
1. A through hole having a through hole penetrating a ceramic substrate, and a first conductor formed on the upper surface of the substrate and a second conductor formed on the lower surface of the substrate are in contact with each other through the through hole. A double-sided hole through-hole substrate, wherein the through-hole is inclined with respect to the substrate and the inclination angle thereof is within a range of 35 to 55 ° with respect to a plane perpendicular to the substrate. substrate.
JP15804194A 1994-06-16 1994-06-16 Through hole double-sided board Pending JPH088506A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15804194A JPH088506A (en) 1994-06-16 1994-06-16 Through hole double-sided board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15804194A JPH088506A (en) 1994-06-16 1994-06-16 Through hole double-sided board

Publications (1)

Publication Number Publication Date
JPH088506A true JPH088506A (en) 1996-01-12

Family

ID=15663000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15804194A Pending JPH088506A (en) 1994-06-16 1994-06-16 Through hole double-sided board

Country Status (1)

Country Link
JP (1) JPH088506A (en)

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