JPH0882525A - Vibration gyroscope with abnormality detecting function - Google Patents

Abstract

PURPOSE: To provide a vibration gyroscope with abnormality detecting function, which can detect the recoverable abnormality such as the deformation of supporting wires due to shock or the like and the displacement of a vibrating body. CONSTITUTION: In a vibration gyroscope, wherein piezoelectric elements 2a-2c are arranged on a pillar surface, and a vibrating body 1, which is supported with two sets of supporting wires 4a and 4b in the vicinities of vibration nodes 3a and 3b and driven by piezo-electric action, lead wires 6c from the electrodes of the piezo-electric elements 2a-2c are fixed and supported in the vicinities of the nodes 3a and 3b once. Thereafter, the length to the fixing and supporting point of the supporting wire 4a is set to the length, wherein the lead wire 6c is cut by the plastic deformation of the supporting wire 4a and fixed in a fixing member 7. When the wire breakdown of the lead wire 6c is detected, the value of an angular-velocity detecting signal is changed into the specified valur outside the normal output range.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration gyro, and more particularly to a vibration gyro with an abnormality detection function suitable for use in an attitude control system mounted on an automobile or the like, navigation and the like.

[0002]

2. Description of the Related Art In recent years, a vibration gyro as a sensor for detecting an angular velocity of an automobile or the like has been noticed in terms of reliability, startability, cost and the like, and has begun to be used in various fields. As such a conventional vibration gyro, for example, there is a vibration gyro using a columnar vibrating body as disclosed in Japanese Patent Laid-Open No. 223817/1990. The operation of the conventional vibration gyro will be described below with reference to FIGS. 17 and 18.

FIG. 17 is a perspective view showing a gyro element portion A of a conventional vibrating gyro. In the figure, reference numeral 1 is a vibrating body that causes bending vibration, and generally, ordinary enliver (constant elastic alloy) such as ceramic or metal is used. In this prior art example, the vibrating body 1 has a triangular prism shape. Two
a to 2c are piezoelectric elements (piezoelectric electrodes) attached to the respective pillar surfaces of the vibrating body 1 so that the longitudinal direction is the pillar axis direction at the center.
In particular, the piezoelectric elements 2a and 2b detect the vibration of the vibrating body 1 and output it as an electric signal. The piezoelectric element 2c drives, that is, vibrates the vibrating body 1. Each piezoelectric element 2a
2 to 2c are made of thin plate-shaped piezoelectric bodies having electrodes formed on the front and back surfaces.

Reference numerals 4a and 4b denote support wires for suspending and fixing the vibrating body 1 by welding or the like near the respective contact points 3a and 3b of the basic bending vibration. However, since the fixed support point is not on the neutral line of the vibration of the vibrating body 1, the fixed support point cannot be a complete node, and the fixed support point may be slightly deviated from the node depending on the assembly accuracy. Therefore, the vibration of the vibrating body 1 slightly propagates to the support line 4a or 4b. Therefore, the supporting wires 4a and 4b are made of thin metal wires to minimize the influence of vibration propagation.

Reference numeral 5 denotes a substrate on which support lines 4a and 4b are erected, and the support line 4 is provided on two pairs of lands 51 provided on the substrate 5.
The end portions of the legs of a and 4b are soldered and fixed vertically, and lead wires 6a to 6c from the piezoelectric elements 2a to 2c are also provided.
Are separately soldered to the lands 53a to 53c provided on the substrate 5, and the external circuit and each of the lands 53a to 53c are electrically connected by another means not shown. Each lead 6a to 6c
Uses, for example, an ultrafine copper wire in a slidable manner so as not to come into contact with the vibrating body 1 and affect its vibration.

FIG. 18 shows a vibration detector 100 of a vibration gyro.
FIG. 3 is a block diagram showing the configuration of FIG. The vibration detector 100 is
The drive circuit 101 for applying a drive voltage for excitation to the piezoelectric element 2c via the lead wire 6c, the piezoelectric voltage generated in the piezoelectric elements 2a, 2b by the vibration of the vibrating body 1 to the lead wires 6a, 6
An adder circuit 102 for inputting and adding via b, a drive control circuit 103 for controlling the drive voltage of the drive circuit 101 so that the addition result becomes a predetermined value, and leads 6a, for the piezoelectric voltage generated in the piezoelectric elements 2a, 2b. 6b, a differential circuit 104 for differential amplification and a differential output of the differential circuit 104 are synchronously detected by a control signal of the drive circuit 101, and a detection circuit 105 for outputting a DC voltage is output from the detection circuit 105. The output adjusting circuit 106 adjusts the DC voltage to a predetermined level. Here, the vibrating body 1 includes the support wires 4a (4b).
It is grounded through the land 51.

Next, the operation of the conventional vibration gyro will be described. When an alternating voltage is applied from the drive circuit 101 to the piezoelectric element 2c, the vibrating body 1 flexurally vibrates in the Y direction of the orthogonal three-dimensional coordinate system due to the expansion and contraction displacement of the piezoelectric element 2c in the longitudinal direction.
Due to the bending vibration of the vibrating body 1 in the Y direction, the piezoelectric element 2
Since a and 2b also expand and contract in the same phase, the piezoelectric elements 2a and 2b
A common-mode voltage develops at b.

The voltages generated in the piezoelectric elements 2a and 2b are added by the adder circuit 102, and the drive voltage of the drive circuit 101 is controlled by the drive control circuit 103 so that the result of this addition becomes a predetermined value. As a result, a positive feedback loop is formed with the vibrating body 1, the adder circuit 102, the drive control circuit 103, and the drive circuit 101, and the vibrating body 1 performs self-excited vibration with a constant vibration speed v at the basic bending resonance frequency ω. When the angular velocity Ω is generated around the Z axis perpendicular to the XY plane of the vibrating body 1 while the vibrating body 1 is performing self-excited vibration, the vibrating body 1 has the equivalent mass m as follows in the X direction. The Coriolis force FC proportional to the angular velocity Ω given by the equation (1) acts.

FC = 2 mΩ × v (1)

Due to the Coriolis force FC, a vibration component is generated in the vibrating body 1 in the X direction, and its amplitude is proportional to the angular velocity Ω. When the vibrating body 1 vibrates in the X direction, the piezoelectric elements 2a,
The expansion and contraction of 2b is in the opposite phase. Then, an anti-phase voltage component is generated in the piezoelectric elements 2a and 2b by the X-direction vibration component due to the Coriolis force FC. Therefore, the difference between the voltage components is calculated by the differential circuit 1.
If it is obtained in 04, it is possible to detect the anti-phase voltage component due to the generation of the Coriolis force.

The detected anti-phase voltage component is detected by the detection circuit 10
5, the synchronous detection is performed based on the drive control signal of the drive circuit 101 to rectify it, and then the output adjustment circuit 106 applies a predetermined gain and bias to the output, and an angular velocity detection signal (gyro output) becomes a DC output proportional to the angular velocity Ω. Can be obtained.

[0012]

Since the conventional vibrating gyro outputs the angular velocity detection signal when the vibrating body is rotated about the Z axis in the state where the vibrating body is self-excited as described above, Even if the vibration gyro is accidentally dropped during transportation or when it is attached to the vehicle to give a shock, or even if a large shock is applied during use to deform the support wire, as long as the vibrator can vibrate self-excited There is a problem that the deformation of the support line cannot be detected.

Explaining this in detail with reference to FIG. 19, for example, when a large impact is applied to the gyro element part,
Since the supporting wire is usually a very fine wire, it exceeds the elastic limit and is plastically deformed as shown in FIG. Even in such a state, the vibration gyro operates as long as the lead wire is not broken.

However, since the detection axis deviates from the original axis to be detected by the angle θ due to the deformation of the support line, an error occurs in the angular velocity detection signal. Further, since the influence of the vibration propagation of the vibrating body on the support line is different from that before the support line is deformed, the output from the piezoelectric element and the temperature characteristic of the output are largely deformed when the angular velocity is not applied. Therefore, when the vibrating gyro that has been damaged is used, it is impossible to accurately detect the angular velocity Ω.

The present invention has been made to solve the above problems, and an object thereof is to obtain a vibration gyro with an abnormality detecting function capable of detecting an unrecoverable abnormality of a gyro element portion due to an unexpected impact or the like. And

[0016]

A vibrating gyroscope with an abnormality detecting function according to the invention of claim 1 is a piezoelectrically driven columnar vibration supported on a supporting member standing on a substrate in the vicinity of a vibration node. A vibrating gyro having a body and a piezoelectric electrode attached to at least two or more column surfaces of the columnar vibrating body, and outputting an electric signal according to a displacement of the columnar vibrating body from a set coordinate position. And an abnormality detecting means for fixing the output of the vibrating gyro to a constant value when the irreversible displacement of the columnar vibrating body is detected based on the output signal of the signal outputting means.

A vibrating gyroscope with an abnormality detecting function according to a second aspect of the present invention includes a piezoelectrically driven columnar vibrating body supported near a vibration node on a supporting member provided upright on a substrate, and the columnar vibrating body. A vibrating gyroscope having piezoelectric electrodes respectively attached to at least two or more columnar surfaces of a body, wherein the support member is plastic for a lead wire extended from the at least one piezoelectric electrode via the support member. A fixing member that is erected on the substrate and is fixed at a position where it is cut when deformed, a disconnection detecting unit that detects a disconnection of a lead wire fixed to the fixing member, and a detection signal of the disconnection detecting unit. And an abnormality detecting means for fixing the output of the vibration gyro to a constant value when the irreversible displacement of the columnar vibrating body is detected.

A vibration gyro with an abnormality detection function according to a third aspect of the present invention is the vibration gyro with an abnormality detection function according to the second aspect of the present invention, wherein each of the piezoelectric electrodes adhered to the columnar vibrating body in a column-axis symmetry. The lead wire is extended through a support member to a fixed member which is symmetrically provided upright on the substrate with the columnar vibrating body sandwiched therebetween, and is fixed at a length portion cut by the plastic deformation of the support member. is there.

A vibrating gyroscope with an abnormality detecting function according to a fourth aspect of the present invention includes a piezoelectrically driven columnar vibrating body supported near a vibration node on a supporting member provided upright on a substrate, and the columnar vibrating body. A vibrating gyroscope having piezoelectric electrodes respectively attached to at least two or more columnar surfaces of a body, the electrodes being provided in close proximity to a portion of the columnar vibrating body excluding the piezoelectric electrodes. A plate, a capacitance detecting means for detecting the electrostatic capacitance between the columnar surface of the columnar vibrating body and the electrode plate, and the columnar shape based on the amount of change from the initial setting value of the electrostatic capacitance by the capacitance detecting means. It is provided with abnormality detecting means for determining an irreversible displacement of the vibrating body and fixing the output of the vibrating gyro to a constant value.

A vibration gyro with an abnormality detecting function according to a fifth aspect of the present invention is the vibration gyro with an abnormality detecting function according to the fourth aspect of the invention, wherein the capacitance detecting electrode has at least one end of the columnar vibrating body with a predetermined gap. It is a cover electrode configured to be provided and covered.

A vibrating gyro with an abnormality detecting function according to a sixth aspect of the present invention is the vibrating gyro with an abnormality detecting function according to the fourth aspect, wherein the capacitance detecting electrode covers the entire columnar vibrating body including the substrate, and The part is a case member in which the inner wall surface closely faces at least two different surfaces of the columnar vibrating body excluding the attached piezoelectric electrodes.

[0022]

The vibrating gyroscope with an abnormality detecting function according to the invention of claim 1 responds to the displacement when the supporting member for supporting the columnar vibrating body is deformed and displaced from the set position on the coordinate axis of the columnar vibrating body. It is possible to output a signal and detect the irreversible displacement of the vibrating body based on the output signal.

In the vibrating gyroscope with an abnormality detecting function according to the second aspect of the present invention, when the supporting wire for supporting the columnar vibrating body is deformed due to impact or the like, the lead wire from the piezoelectric electrode is fixed to the fixing supporting point and the fixing point of the fixing member. The output of the vibrating gyro is changed outside the normal output range by detecting the disconnection of the lead wire and detecting the irreversible displacement of the columnar vibrating body.

In the vibration gyroscope with an abnormality detecting function according to the third aspect of the present invention, the piezoelectric gyro which is stretched from the support line supporting the columnar vibrating body at each node sandwiching the columnar vibrating body to the fixing member arranged on the axis is provided. The disconnection of the lead wire is detected, the irreversible displacement of the columnar vibrating body due to the deformation of one of the supporting wires is detected, and the output of the vibration gyro is changed to outside the normal output range.

In the vibrating gyroscope with an abnormality detecting function according to a fourth aspect of the present invention, when the support wire that supports the columnar vibrating body is deformed by impact or the like, the electrostatic capacitance between the columnar surface of the columnar vibrating body and the electrode plate is more than the initial setting. By the change, the irreversible displacement of the columnar vibrating body due to the deformation of the support line is detected by detecting the change in the electrostatic capacitance, and the output of the vibrating gyro is changed outside the normal output range.

In the vibrating gyroscope with an abnormality detecting function according to the invention of claim 5, when the supporting wire for supporting the columnar vibrating body is deformed due to impact or the like, the vibrating gyroscope is provided between the end of the columnar vibrating body and the cover electrode covering the end. When the capacitance changes from the initial setting, the deformation of the support line is detected by detecting the change in capacitance, which detects the irreversible displacement of the columnar vibrating body and changes the output of the vibration gyro to outside the normal output range. To do.

In the vibration gyro with an abnormality detecting function according to the invention of claim 6, the whole vibration gyro is covered with a case member with a predetermined gap, and an initial set value of the electrostatic capacitance between the inner wall surface of the case member and the vibration gyro. The irreversible displacement of the columnar vibrating body due to the deformation of the support line is detected by the amount of change from, and the output of the vibration gyro is changed outside the normal output range.

[0028]

【Example】

Example 1. An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing the configuration of the gyro element portion according to this embodiment. In the figure, the same reference numerals as those in FIG.
Or, shows a considerable portion. In this embodiment, the triangular prism vibrating body 1 is placed on the support lines 4a and 4b at the nodes 3a and 3b, and welded to the support lines 4a and 4b at the nodes 3a and 3b so as to be fixedly supported.

Reference numeral 6c denotes a lead wire extending from the piezoelectric element 2c. The lead wire 6c is sufficiently slid in the middle so that the vibration of the vibrating body 1 is not transmitted, and the lead wire 6c is attached to the support wire 4a in the vicinity of the node 3a. After being wound more than once, the wound portion is molded with an elastic adhesive or the like to be fixedly supported, and then the land 52 on the substrate 5 is
It extends to the fixing member 7 which is erected upright to fix the end portion by soldering. The fixing member 7 is soldered and fixed to the land 52 to stand upright. Other piezoelectric elements 2a, 2
Similarly, the lead wires 6a, 6b of b are also slid and soldered directly to the respective lands 53 on the substrate 5.

Here, the height between the fixed support point near the node 3a of the lead wire 6c and the fixed point of the fixing member 7 is made substantially equal to each other from the surface of the substrate 5, and the stretched lead wire is the following (2). It is stretched to satisfy the ceremony.

L (1 + εr)> 1 (1 + εs) (2) where l is the natural length of the lead wire 6c stretched between the fixed support point and the fixed point of the fixed member 7, and L is the node 3a. And fixing member 7
, The distance between the fixed points, εr is the minimum plastic elongation of the support line 4a,
εs is the yield elongation at which the lead wire 6c breaks. Further, here, the gyro element unit A is installed with the −Z axis direction as the upper side.

That is, what can be said from the above equation (2) is that when the supporting wire 4a is impacted by an external force and is deformed to reach the minimum plastic elongation εr, the lead wire 6c is also pulled along with the deformation of the supporting wire 4a. Grow. And support line 4
When a finally reaches the minimum plastic elongation εr, the lead wire 6c reaches the yield elongation εs and breaks. Therefore, the material of the lead wire 6c is selected such that the elongation of the support wire 4a reaches the yield elongation εs and breaks when the support wire 4a reaches the minimum plastic elongation εr.

In such a structure, a large impact is applied to the gyro element part A, and the supporting wire 4a has a relatively low strength ±.
When deformed in the Y direction or the + Z direction, the lead wire 6c stretched between the fixing support point and the fixing point of the fixing member 7 becomes the supporting wire 4a.
Is stretched and ruptured due to deformation. However, since the lead wire 6c is once supported by the node 3a of the vibrating body 1, it is not cut by the vibration of the vibrating body 1 due to normal driving.

FIG. 2 is a block diagram showing the overall structure of a gyro having an abnormality detecting function, which includes the gyro element unit A having the structure shown in FIG. In the figure, reference numeral 100 is a vibration detection unit having the same configuration as the conventional one. 107 is the vibration detection unit 100.
From the drive control circuit 103 incorporated in the drive circuit 101
Is a comparison circuit for inputting a control voltage output to a reference voltage for disconnection detection set in advance, and this comparison circuit 107 is made to judge that the control voltage is at a level equal to or higher than the set reference voltage. If so, an H-level comparison signal is output.

Reference numeral 108 denotes an output changing circuit composed of a transistor Tr. The transistor Tr of the output changing circuit 108 inputs the comparison signal from the comparison circuit 107 to its base, its emitter is grounded, and its collector is a vibration detector. An angular velocity detection signal from the output adjustment circuit 106 incorporated in 100 is input.

Next, the operation of this embodiment will be described.
Normally, when an alternating voltage is applied to the piezoelectric element 2c by the drive circuit 101 to drive it, the vibrating body 1 flexurally vibrates in the Y direction in its resonance mode. The vibration is detected by the piezoelectric elements 2a and 2b, the addition circuit 102 extracts the vibration component in the driving direction, and the driving control circuit 103 controls the driving circuit 101 so that the vibration speed v of the vibrating body 1 becomes constant.

In practice, the drive circuit 101, the gyro element part A, the adder circuit 102, and the drive control circuit 103 constitute a positive feedback loop, so that the vibrating body 1 self-excitedly vibrates at the fundamental resonance frequency ω. In this self-excited vibration state, the vibrating body 1
Coriolis force Fc generated at the angular velocity Ω about the Z axis
If the piezoelectric elements 2a and 2b detect the X-axis direction vibration component due to and the detection outputs are differentially amplified by the differential circuit 104, the voltage associated with the Coriolis force is separated and output.

The voltage output separately is detected by the detection circuit 10.
After the detection and rectification in step 5, the output adjustment circuit 106 applies a predetermined offset voltage and gain to the angular velocity Ω within a predetermined range.
Output as a DC voltage proportional to. As for the relationship between the angular velocity Ω and the output voltage, as shown in the output characteristic diagram of FIG.
It is the output voltage V0 when the angular velocity Ω is not applied, and the output voltage increases toward a constant value as the angular velocity Ω increases in the positive direction. Further, the output voltage decreases toward a constant value as the angular velocity Ω increases in the negative direction.

However, if the vibration gyro is accidentally dropped during transportation or during installation, or if a large impact is applied to the vibration gyro during use, the support wire 4a is buckled and deformed in the ± Y direction or + Z direction, which has low strength. Sometimes. When the support wire 4a is deformed from the normal fixing position to the minimum plastic elongation εr, the lead wire 6c stretched between the support wire 4a and the fixing member 7 extends to the yield elongation εs and breaks.

When the lead wire 6c is broken, the piezoelectric element 2c
Since the supply of the alternating voltage to the piezoelectric element 2c is stopped and the piezoelectric element 2c is not driven, the drive control circuit 103 that forms the feedback loop.
Sends a high level control voltage to the drive circuit 101 in order to increase the drive voltage or drive current of the piezoelectric element 2c.

On the other hand, since the state in which the piezoelectric element 2c is not driven is the same as the state in which the angular velocity Ω is not applied to the vibrator 1, the output adjusting circuit 106 as shown in the output characteristic diagram of FIG.
A DC voltage of approximately V0 is output to the collector of the transistor Tr of the output changing circuit 108. At this time, the control voltage output from the drive control circuit 103 is equal to the comparison circuit 1
If the control voltage is compared with the reference voltage set to determine the disconnection of the lead wire at 07 and it is determined that the control voltage has a higher level than the reference voltage, an H level comparison signal is output to the base of the transistor Tr.

As a result, the transistor Tr is turned on to forcibly reduce the output voltage of the output adjusting circuit applied to the collector to the ground level. In this way, since the deformation of the support wire 4a of the vibrating body 1 is detected by intentionally breaking the lead wire 6c of the piezoelectric element 2c, the output of the vibration gyro is changed outside the normal output range by the lead wire breakage detection. It is possible to avoid the risk of using a vibrating gyro that has received an unexpected impact and is irreversibly damaged, and using an incorrect angular velocity detection signal as angular velocity information of the vibrating gyro system.

Example 2. In the above embodiment, the deformation of the support wire 4a with respect to the impact received from the ± Y direction or the −Z direction is detected, but the deformation of the support wire 4a with respect to the impact received from the ± Y direction or the ± Z direction is detected. You can

FIG. 4 is a top view of the vibrating gyro element portion A in this embodiment. Reference numerals 21c and 22c denote piezoelectric elements provided in the center of the upper columnar surface of the vibrating body 1 having a triangular prism shape in a column-axis symmetry, and are used to drive the vibrating body 1.
Reference numerals 61a and 61c are lead wires having one ends soldered to the piezoelectric elements 21c and 22c, respectively. As described in the first embodiment, the lead wire 61a has the node 3 in the fully bent state.
In the vicinity of a, the support wire 4a is wound one or more times to bond the winding portion, and then the winding portion is stretched and fixed to the fixing member 7a by soldering or the like. Similarly, the lead wire 6c is wound around the support wire 4b one or more times in the vicinity of the node 3b in a state in which the lead wire 6c is sufficiently slid to bond the winding portion, and then is erected in a symmetrical position with the fixing member 7a with the vibrating body 1 interposed therebetween. The fixed member 7b provided is extended and fixed by soldering or the like.

Here, the relationship between the length l of each lead wire and the distance L between the node and the fixing member is set to L (1 + εr)> 1 (1 + εs) which satisfies the above equation (2).
In such a configuration, if either the support wire 4a or 4b is deformed and either the lead wire 61a or 61c is disconnected, the driving force of the vibrating body 1 is halved.

As a result, the drive control circuit 103 forming the feedback loop sends a high level control voltage to the drive circuit 101 in order to increase the drive voltage or drive current of the piezoelectric element 2c. At this time, the control voltage output from the drive control circuit 103 is compared with the reference voltage set in the comparison circuit 107 to determine the disconnection of the lead wire, and if it is determined that the control voltage has a higher level than the reference voltage. For example, an H level comparison signal is output to the base of the transistor Tr.

As a result, the transistor Tr is turned on to forcibly reduce the level of the angular velocity detection signal of the output adjusting circuit 106 applied to the collector to the ground level, and the node is irreversible due to the deformation of the support line 61a or 61c. Notify that the displacement has occurred. In the case of this embodiment, the comparison circuit 1
Only by changing the reference voltage of 07, the displacement of the support line can be detected with the same circuit configuration as that of the first embodiment.

Example 3. In Example 1.2 described above, the displacement of the support line 4a was detected by detecting the disconnection of the lead wire 6c of the driving piezoelectric element 2c for driving the vibrating body 1. However, the vibration detecting piezoelectric element 2a or 2b is detected. Alternatively, the disconnection of the lead wire 6a or 6b may be detected to detect the displacement of the support wire 4a or 4b.

FIG. 5 is a perspective view of the gyro element portion A according to this embodiment. Unlike the first embodiment, the gyro element portion A suspends the triangular prism vibrating body 1 on the indicator lines 4a and 4b so that the applied driving piezoelectric element 2c faces the substrate 5 side. still. The suspended position of the vibrating body 1 is selected near the nodes 3a and 3b.

The lead wire 6a of the piezoelectric element 2a for vibration detection, which is attached to the center of the one upper cylindrical surface of the vibrating body 1, is slid and a part thereof is attached to the support wire 4a in the vicinity of the node 3a as in the first embodiment. Fixing member 7 which is erected on the substrate 5 after being fixedly supported by various methods.
It is stretched to a and fixed in the same manner as in Example 1.

The lead wire 6b of the vibration detecting piezoelectric element 2b attached to the center of the other upper cylindrical surface of the vibrating body 1 is slid and a part thereof is attached to the support wire 4b in the vicinity of the node 3b as in the first embodiment. Fixing member 7 which is erected on the substrate 5 after being fixedly supported by various methods.
The film is stretched in b and fixed in the same manner as in Example 1.
The relationship between the length l of each of the vibrating elements 2a and 2b and the length L of the lead wire 6a and 6b and the distance L between the node and the fixed member is L (1 + εr)> 1 (1 + εs) that satisfies the above equation (2). It is set. In such a configuration, the deformation of the support wire 4a or 4b is detected by detecting the disconnection of either the lead wire 6a or 6b.

Next, FIG. 6 is a block diagram showing the overall structure of a vibrating gyro with an abnormality detecting function, which includes the gyro element unit A configured as shown in FIG. In the figure, reference numeral 100 is a vibration detection unit having the same configuration as the conventional one. 109a, 10
Reference numeral 9b denotes an amplitude detection circuit for detecting and amplifying the amplitude of the signals output from the vibrating elements 2a and 2b, and 107a and 1a.
07b compares the level of the amplitude detection signal amplified and output from each of the amplitude detection circuits 109a and 109b with the level of the preset reference voltage for determining the disconnection of the lead wire, and the level of the amplitude detection signal is the level of the reference voltage. When it is further lowered, a comparison circuit for making a comparison signal of H level, 110 is an OR circuit, and this OR circuit 110 is the comparison circuit 107a or 1
When the comparison signal of H level is input from 07b, the transistor of the output change circuit 108 outputs the signal of H level
Output to the base of r.

Next, the operation of this embodiment will be described.
Now, when the deformation of the support wire 4a is detected by breaking the lead wire 6a, the amplitude detection circuit 10 passes through the lead wire 6a.
The level of the signal input to 9a drops extremely. Therefore, when the comparison circuit 107a compares the level of the amplitude detection signal amplified and output from the amplitude detection circuit 109a with the preset voltage level for disconnection determination, the level of the amplitude detection signal is lower than the set voltage level. The H-level comparison signal is output to the OR circuit 110.

On the other hand, in the vibration detecting section 100, since one input signal of the differential amplifier 104 in which the lead wire 6a is disconnected is lost, the synchronous detection circuit 105 and the output adjusting circuit 1
The output of the angular velocity detection signal output to the output changing circuit 108 through 06 goes out of the normal range and becomes an abnormal value. However, the OR circuit 110 supplies H to the base of the transistor TR.
Since the level signal is input, it is turned on, and the voltage level of the angular velocity detection signal applied to the collector is forcibly fixed to the ground potential of the emitter.

In each of the above embodiments, the triangular prism vibrating body 1 is used.
The piezoelectric elements 2c for driving and the piezoelectric elements 2a, 2b for detecting vibration are provided on the respective pillar surfaces of the piezoelectric element 2c, but the piezoelectric element 2c is omitted and the output of the drive circuit 101 is connected to the piezoelectric elements 2a, 2b. The elements 2a and 2b may be used for both driving and vibration detection. In this case, the circuit shown in FIG. 2 can be used for the wire breakage detection.

In each of the above embodiments, the vibrating body 1 is used.
As an example, a triangular columnar vibrating body made of an elinvar material is shown, but the vibrating body 1 may also be a columnar vibrating body that generally vibrates such as a metal material or a ceramic.

Further, the fixing members 7, 7 on the substrate 5
The positions of a and 7b and the positions of the fixing points of the lead wires 6a, 6b and 6c on the fixing members 7, 7a and 7b are determined by the supporting wires 4a and 4b.
The shape may be changed according to the expected deformation direction.

Example 4. In each of the above-described embodiments, the displacement of the vibrating body is detected by disconnecting the lead wire from the piezoelectric element when the supporting line is deformed, but the deformation of the supporting line may be detected based on the displacement of the vibrating body.

The vibration gyro with an abnormality detecting function according to this embodiment will be described below with reference to the drawings. FIG. 7 is a perspective view of the gyro element portion A in this embodiment. Reference numerals 8a and 8b denote flat plate-like electrode plates which are erected on the substrate 5 with a predetermined gap from the end surface of the vibrating body 1, and 8c is a part of two adjacent pillar surfaces on the upper side of the vibrating body 1. Piezoelectric elements 2a, which are provided in parallel with each other with a predetermined gap, and are attached to the respective pillar surfaces,
It is a roof-shaped electrode plate in which the electrode portions of 2b are cut out and arranged to face each other.

The legs of the electrode plates 8a, 8b and 8c are soldered to the lands 54 of the substrate 5. Here, the area of the electrode plates 8a and 8b is larger than the area of the end face of the vibrating body 1, the gaps between the end faces are substantially equal, and the electrode plate 8c and the vibrating body 1 have two areas.
The gap between the two pillars is almost the same. In such a structure, the vibrating body 1 has the land 51 for fixing the support wire 4 by soldering.
Grounded through. Although not shown in FIG. 8, the piezoelectric elements 2a to 2c attached to the respective pillar surfaces of the vibrating body 1 are not shown.
17, the lead wire is sufficiently slid and soldered to the land 53 provided on the substrate 5.

FIG. 8 is a block diagram of a vibrating gyro with an abnormality detecting function for detecting an abnormality in the gyro element unit A configured as shown in FIG. In FIG. 8, the configuration of the vibration detection unit 100 and the connection relationship between the vibration detection unit 100 and each of the piezoelectric elements 2a to 2c are the same as those in FIG. In the figure, C
Reference numerals 1 and C2 are capacitors whose one ends are commonly connected to the AC power supply circuit 111. The electrostatic capacitance Cc formed between the pillar surface of the vibrating body 1 and the electrode plate 8c is connected to the other end of the capacitor C1 via the terminal 55a.

Therefore, if the other end of the AC power supply circuit 11 is grounded and the vibrating body 1 is grounded through the support line 4, the AC power supply circuit 11 is provided at both ends of the series circuit of the capacitor C1 and the electrostatic capacitance Cc. It becomes the circuit form to be connected. The electrode plate 8a and the capacitance Ca formed on the end surface of the vibrating body 1 and the electrode plate 8b and the capacitance Cb formed on the end surface of the vibrating body 1 are commonly connected to the substrate 55b by the electrode plates 8a and 8b. And the vibrating body 1 is grounded through the support line 4, so that the capacitance C
a and Cb are parallel capacitances (Ca + Cb) and are connected in series to the capacitor C2 via the terminal 55b. And
The AC power supply circuit 11 is connected to both ends of the series circuit of the capacitor C2 and the parallel capacitance (Ca + Cb).

Further, 109a is an amplitude detection circuit for detecting the amplitude value by inputting the divided voltage of the output voltage of the AC power supply circuit 11 which changes according to the change of the electrostatic capacitance Cc from the terminal 55a, and 109b is a parallel electrostatic capacitance ( Ca + Cb) is an amplitude detection circuit for detecting the amplitude value by inputting the divided voltage of the output voltage of the AC power supply circuit 11 from the terminal 55b, and 107a is a level at which the amplitude value detected by the amplitude detection circuit 109a is preset. A comparator circuit for outputting an H-level comparison signal when it deviates from the range, and 107b is an amplitude detection circuit 1
A comparator circuit which outputs an H level comparison signal when the amplitude value detected in 09b is equal to or lower than a preset level, and 110 is an output change circuit when the H level comparison signal is input from either one of the comparison circuits 107a and 107b. An OR circuit that outputs a drive signal to the base of the transistor Tr of 108.

Next, the operation of this embodiment will be described by specifying the abnormality detection function. The input voltage to the amplitude detection circuit 109a is determined by the ratio of the impedances of the capacitor C1 and the electrostatic capacitance Cc. Similarly, the input voltage to the amplitude detection circuit 109b is parallel to the capacitor C2 and the parallel capacitance (Ca + C).
It depends on the ratio of the impedances in b).

In such a structure, when a shock is applied to the gyro element part A and the support wire 4 is deformed, the vibrating body 1 is displaced from the initial position, and the electrostatic capacitance between the vibrating body 1 and the electrode plate 8 changes. In FIG. 7, when an impact force is applied in the column axis direction (Z direction) of the vibrating body 1 and the supporting lines 4a and 4b are deformed and the vibrating body 1 is displaced in the Z direction, the gap between the vibrating body 1 and the electrode plate 8a is It becomes smaller than the initial value Z0 by ΔZ, and vibrating body 1 and electrode plate 8b
Since the gap between and increases by ΔZ, the parallel capacitance (Ca +
Cb) is represented by the following formula.

Ca + Cb = 2ε0S / Z0 [1- (ΔZ / Z0) ² ] (3) where ε0 is the dielectric constant of the gap between the end face of the vibrating body 1 and the electrode plates 8a and 8b, and S is Electrode plate 8 for the end face of the vibrating body 1
It is the facing area of a and 8b.

Therefore, the parallel capacitance C in the initial state
a + Cb = 2ε0 S / Z0 is 1 / [1- (ΔZ / Z0) ² ]
It becomes bigger by the amount of. Therefore, the parallel capacitance Ca + Cb
The impedance of is lower than that of Z = 1 / ω (Ca + Cc). C2 and terminal 5 due to reduced impedance
The AC partial pressure that appears at the connection point with b decreases, and the amplitude of the output voltage detected by the amplitude detection circuit 109b becomes lower than before the deformation of the vibrating body 1.

As a result, if the comparison circuit 107b determines that the amplitude is lower than the preset amplitude level, O is set.
An H level comparison signal is output to the R circuit 110, an H level signal is output from the OR circuit 110 to the output changing circuit 108, and the angular velocity detection signal output from the vibration detection circuit 100 is forced to the ground level. .

Alternatively, a shock is applied to the gyro element portion A, the supporting wire 4 is deformed, and the vibrating body 1 is displaced in the X direction or the Y direction from the initial position, but the capacitance of the parallel capacitance (Ca + Cb) does not change. The electrostatic capacitance Cc of the vibrating body 1 and the electrode plate 8c changes. For example, if the support wire 4 is deformed and the vibrating body 1 changes in any of the X directions, the vibrating body 1 will move to the electrode plate 8C.
The capacitance Cc is larger than that before the deformation as in the case of the change of the parallel capacitance, and the vibrating body 1 moves to the electrode plate 8c if it changes in the Y direction. The capacitance Cc is large in the approaching direction and small in the approaching direction. That is, in any case, when the vibrating body 1 is displaced in the X or Y direction due to the deformation of the support line 4, the electrostatic capacitance Cc is changed, so that the impedance is changed, the impedance ratio with the capacitor C1 is changed, and the amplitude is changed. The amplitude of the divided voltage detected by the detecting means 109a changes to be larger or smaller than that before the deformation.

The comparator circuit 107a is provided with an upper limit value and a lower limit value of the amplitude level in advance, and the amplitude detecting means 10
The amplitude level of the output voltage of 9a is compared with the upper limit value,
If it is determined that the amplitude level is higher than the upper limit value or lower than the lower limit value, the H level comparison signal is output to the OR circuit 110, and the H level signal is output from the OR circuit 110 to the output changing circuit 108 to vibrate. The angular velocity detection signal output from the detection circuit 100 is forced to the ground level. It should be noted that the end portion and the central portion of the vibrating body 1 are vibratingly displaced at the resonance frequency due to the driving of the vibrating body 1, but since the vibration amplitude is extremely small, it does not affect the change in the capacitance and the abnormality detection accuracy. Does not reduce.

According to this embodiment, the supporting wire 4 of the vibrating body 1 is used.
Displacement of the vibrating body 1 due to deformation of a, 4b, etc.
a to 8c and the vibrating body 1 are detected by a change in capacitance, and the output of the angular velocity detection signal is forcibly changed to outside the normal output range. It is possible to avoid the risk of using the received vibration gyro.

In FIG. 8, the electrode plates are arranged so as to face each other on both end surfaces of the vibrating body 1 and on two adjacent pillar surfaces on the upper side of the vibrating body 1 so as to face each other, but as shown in FIG. The electrode plate 8d may be arranged on the lower surface of the vibrating body 1 in addition to the two adjacent pillar surfaces on the upper side. Further, as shown in FIG. 10, the electrode plate 8c is arranged adjacent to and opposed to only one pillar surface on the upper side of the vibrating body 1, and the electrode plate 8d is arranged on the lower surface of the vibrating body 1.
May be adjacently arranged to face each other.

Further, as shown in FIG. 11, the shape of the vibrating body is a quadrangular prism, and the electrode plates 8c are arranged in close proximity to each other on two adjacent upper pillar surfaces of the vibrating body 1A, and the lower side thereof is arranged. Electrode plate 8d on each of the two adjacent pillar surfaces of
May be closely arranged to face each other. Furthermore, as shown in FIG. 12, the electrode plates 8c and 8e may be arranged so as to oppose each other on each of two opposing columnar surfaces of the vibrating body 1A. in this way,
Electrode plates having various shapes and arrangements can be used according to the shape of the vibrating body.

Example 5. In each of the above embodiments, the vibrator 1,
Electrode plates were arranged adjacent to and facing each of the pillar surfaces of the central portion of 1A except for the piezoelectric element, but as shown in FIG. 13, both end surfaces of the vibrating body 1 were matched with the cross-sectional shape of the vibrating body 1, respectively. The electrode plates are arranged adjacent to each other so as to face each other, and the electrode plates having a predetermined width are arranged along the respective sides of the electrode plate so as to face the respective pillar surfaces of the vibrating body 1 and are wound so as to cover the end portions to form the cover electrode 9. You may. The cover electrode 9 may be provided only on one end surface of the vibrating body 1.

Each cover electrode 9 is provided with legs and fixed to the land 54 on the substrate 5 by soldering. Therefore, the gap between each inner surface of the cover electrode 9 and the end of the vibrating body 1, that is, the capacitance is kept constant. Although not shown, the land 54 fixed to each cover electrode 9 is formed on the substrate 5 as shown in FIG.
5b commonly connected to the capacitor C via the terminal 55b.
Connected to 2. Therefore, the capacitor C2 is connected in series to the parallel capacitance Cp formed by the two cover electrodes 9. Also, the other side capacitor C
1, the amplitude detection circuit 109a, the comparison circuit 107a, and the OR circuit 110 are unnecessary, and the output of the comparison circuit 107b is directly connected to the base of the transistor Tr of the output change circuit 108.

In such a circuit configuration, the support line 4
When a and 4b are deformed and the vibrating body 1 is displaced in a predetermined direction, the parallel capacitance between the vibrating body 1 and each cover electrode 9 is given by the above formula (3).
It changes like. Therefore, the impedance of the parallel capacitance decreases from the relationship of Z = 1 / ωCp. The AC partial pressure that appears at the connection point between C2 and the terminal 5b decreases due to the decrease in impedance, and the amplitude of the output voltage detected by the amplitude detection circuit 109b becomes lower than before the deformation of the vibrating body 1.

As a result, if the comparison circuit 107b determines that the amplitude is lower than the preset amplitude level, O is set.
An H level comparison signal is output to the R circuit 110, an H level signal is output from the OR circuit 110 to the output changing circuit 108, and the value of the angular velocity detection signal output from the vibration detection circuit 100 is forcibly grounded. And

As described above, when the cover electrodes 9 are provided on both end faces of the vibrating body 1 and are connected in parallel, the parallel capacitance is reduced to the vibrating body 1.
Regardless of the direction of displacement, the displacement always changes in a large direction by the displacement as shown in equation (3), so that the comparison voltage of the comparison circuit 107 can be easily set. Further, the omnidirectional displacement of the vibrating body 1 can be detected only by providing the cover electrode 9 on the end surface of the vibrating body 1, and by connecting the cover electrodes on both end surfaces in parallel, ± X
It is possible to easily configure a detection circuit capable of detecting displacements in directions, ± Y, and ± Z.

Example 6. In each of the above-described embodiments, the electrode plates are arranged adjacent to each other on each surface of the vibrating body 1 so as to face each other.
Although the displacement of the vibrating body 1 was detected from the change in the electrostatic capacitance between the vibrating body 1 and the gyro element part A, the entire gyro element part A was covered with a metallic case member so that the gap between the end part of the vibrating body 1 and the case member was The displacement of the vibrating body 1 may be detected based on the change in the electrostatic capacitance.

FIG. 14 is a cross-sectional view of the gyro element part A in this embodiment, and its overall shape is shown in the external perspective view of FIG. In FIG. 14, reference numeral 10 denotes a case member having an appearance as shown in FIG. 15 and covering the gyro element portion A. The case member 10 is provided on each end face of the triangular prism vibrating body 1 and adjacent to each other on the upper side in the vicinity of each end face. It has a shape in which two pillar surfaces are closely opposed to each other. Reference numeral 11 denotes a case lower member adhered to the substrate 5, and 12 denotes a lead lead which is fixed by penetrating the land 53 on the upper surface of the substrate 5 from the case lower member 11.

The case member 10 mechanically protects the gyro element portion A and forms an electrostatic capacitance C between itself and the end face of the vibrating body 1. Therefore, as shown in FIG. 8, one end of the AC power supply circuit 111 is connected to the case member 10 through the capacitor C2, the other end of the AC power supply circuit 111 is grounded, and amplitude detection is performed at the connection point between the capacitor C2 and the case member 10. By connecting the circuit 109b, a change in the capacitance C between the case member 10 and the vibrating body 1 can be detected by the amplitude detection circuit 109b as a change in the divided voltage. In this case,
In the same manner as described above, the capacitor C1, the amplitude detection circuit 109a, the comparison circuit 107a, and the OR circuit 110 on the other side are unnecessary, and the output of the comparison circuit 107b is the direct output change circuit 10.
8 transistor Tr. The comparison circuit 107b uses a comparison circuit that compares the upper and lower limit values. With this circuit configuration, the positional displacement of the vibrating body 1 with respect to the inner wall of the case member 10 can be detected by the same procedure as described above.

This embodiment also has the same effect as that of the fifth embodiment, and since part of the case member 10 also serves as the capacitance detection electrode, an electrode plate for capacitance detection is provided on the substrate 5. Since there is no need to newly prepare, there is an effect that production is simplified.

FIG. 16 shows another shape of the case member 10. 2 on both sides of the rectangular case member
The vibrating body 1 is formed in a mountain shape so as to face two adjacent column surfaces of the vibrating body 1, and the end surface of the case member 10 is formed so that the inner wall surface faces the end surface of the vibrating body 1.

In each of the above embodiments, each operation has been described in the case where the vibrating body 1 is grounded. However, the electrostatic capacitance detecting electrode such as the case member 10 may be grounded with the vibrating body 1 as an intermediate potential. In this case, the power supply frequency of the AC power supply circuit that generates the divided voltage in the electrostatic capacitance is set to a frequency different from the driving frequency of the vibrating body 1.

In the above Examples 4 to 6, the vibrating body 1 is used.
As an example, a polygonal columnar vibrating body made of an elinvar material has been described, but the vibrating body 1 may be a columnar vibrating body that generally vibrates such as other metal materials or ceramics. When the vibrating body 1 is made of a non-metal material such as ceramics, at least the end face or the column face facing the electrode plate for capacitance detection is metalized by vapor deposition or sputtering to form an electrode.

[0086]

According to the first aspect of the present invention, a piezoelectrically driven columnar vibrating body is supported by a supporting member standing on a substrate in the vicinity of a vibration node, and at least two or more of the columnar vibrating body are provided. A vibrating gyroscope having piezoelectric electrodes attached to the respective column surfaces of the column vibrating body, the signal outputting means outputting an electric signal according to the displacement of the columnar vibrating body from the set coordinate position; An abnormal detection means that fixes the output of the vibration gyro to a constant value when the irreversible displacement of the columnar vibrating body is detected based on the output signal is provided, so the unrecoverable function of deforming the support member of the vibration gyro due to an unexpected impact force. The effect is that damage can be detected.

According to the second aspect of the invention, the piezoelectrically driven columnar vibrating body is supported on the supporting member standing on the substrate in the vicinity of the vibration node, and at least two or more of the columnar vibrating body are provided. A vibrating gyroscope having piezoelectric electrodes respectively attached to column surfaces, wherein a lead wire extended from the at least one piezoelectric electrode via the support member is cut when the support member is plastically deformed. A fixing member that is erected on the substrate and that is fixed at a position of a certain length, and a disconnection detecting unit that detects a disconnection of a lead wire fixed to the fixing member,
Since the abnormality detecting means for fixing the output of the vibrating gyro to a fixed value when the irreversible displacement of the columnar vibrating body is detected based on the detection signal of the disconnection detecting means is referred to as deformation of the supporting member of the vibrating gyro due to an unexpected impact force. This has the effect that irreversible functional damage can be detected with high sensitivity by selecting lead wires.

According to the invention of claim 3, in the vibrating gyroscope with an abnormality detecting function according to the invention of claim 2, the lead wire of each piezoelectric electrode adhered to the columnar vibrating body in a column axis symmetry is supported by a supporting member. Since the columnar vibrating body is sandwiched between them to extend symmetrically to a fixed member provided upright on the substrate and fixed at a position where the supporting member is cut when the supporting member is plastically deformed, the effect of claim 2 is obtained. In addition, there is an effect that the deformation of the support member with respect to impacts from various directions can be reliably detected.

According to the fourth aspect of the present invention, the piezoelectrically driven columnar vibrating body is supported on the supporting member erected on the substrate in the vicinity of the vibration node, and at least two or more of the columnar vibrating body are provided. A vibrating gyroscope having piezoelectric electrodes attached to the respective pillar surfaces, wherein an electrode plate provided in close proximity to a portion of the columnar vibrating body excluding the piezoelectric electrodes attached to the pillar surfaces,
Capacitance detecting means for detecting the electrostatic capacitance between the columnar surface of the columnar vibrating body and the electrode plate, and the capacitance of the columnar vibrating body based on the amount of change from the initial setting value of the electrostatic capacitance by the capacitance detecting means. Equipped with an abnormality detection unit that determines irreversible displacement and fixes the output of the vibration gyro to a fixed value, it detects unrecoverable functional damage such as deformation of the support member of the vibration gyro due to unexpected impact force with a simple configuration. The effect is that you can do it.

According to the fifth aspect of the present invention, in the vibration gyroscope with an abnormality detecting function according to the fourth aspect of the invention, the capacitance detection electrode is configured to cover at least one end of the columnar vibrating body with a predetermined gap. In addition to the effect of the fourth aspect, there is an effect that the displacement of the vibrating body in all directions can be detected with a small number of electrodes.

According to the invention of claim 6, in the vibrating gyroscope with an abnormality detecting function according to the invention of claim 4, the capacitance detecting electrode covers the entire columnar vibrating body including the substrate, and a part thereof is the columnar vibrating body. Since the case wall has inner walls closely facing each other except at least two different piezoelectric electrodes attached, the vibrating body can be displaced in all directions even if the electrodes are not installed near the vibrating gyro. Can be detected, and the vibration gyro can be protected mechanically and from an external magnetic field.

[Brief description of drawings]

FIG. 1 is a perspective view of a gyro element unit A according to an embodiment of the present invention.

FIG. 2 is a block diagram showing a configuration of a vibration detection unit in the present embodiment.

FIG. 3 is an output characteristic diagram of a vibration gyro.

FIG. 4 is a top view of a gyro element unit A according to another embodiment.

FIG. 5 is a perspective view of a gyro element unit A according to another embodiment.

FIG. 6 is a block diagram showing a configuration of a vibration detection unit according to another embodiment.

FIG. 7 is a perspective view of a gyro element unit A according to another embodiment.

FIG. 8 is a block diagram showing a configuration of a vibration detection unit according to another embodiment.

FIG. 9 is a transverse cross-sectional view of a gyro element part showing an arrangement of electrode plates for capacitance detection.

FIG. 10 is a cross-sectional view of a gyro element part showing another arrangement of the electrode plate for detecting electrostatic capacitance.

FIG. 11 is a transverse cross-sectional view of a gyro element part showing another arrangement of an electrode plate for capacitance detection.

FIG. 12 is a transverse cross-sectional view of a gyro element part showing another arrangement of the electrode plate for capacitance detection.

FIG. 13 is a perspective view of a gyro element unit A according to another embodiment.

FIG. 14 is a perspective view of a gyro element unit A according to another embodiment.

FIG. 15 is an external perspective view showing a case shape example.

FIG. 16 is an external perspective view showing another example of the shape of the case.

FIG. 17 is a perspective view showing a gyro element unit A of a conventional vibrating gyro.

FIG. 18 is a block diagram showing a configuration of a vibration detection unit of a conventional vibration gyro.

FIG. 19 is a perspective view of a vibrating gyro element part A in which a supporting wire is deformed by an impact.

[Explanation of symbols]

1 Vibrating body, 2a-2c, 21c, 22c Piezoelectric element,
3a, 3b nodes, 4a, 4b support lines, 5 substrates, 6
a to 6c, 61a, 61c Lead wire, 7, 7a, 7b
Fixing member, 8a to 8e electrode plate, 9 cover electrode, 1
0 case member, 100 detection circuit, 107a, 107
b comparator circuit, 108 output change circuit, 109a, 10
9b Amplitude detection circuit, 110 OR circuit, 111 AC power supply circuit.

Claims (6)

[Claims] 1. A piezoelectrically driven columnar vibrating body supported in the vicinity of a vibration node on a supporting member erected on a substrate, and at least two or more columnar surfaces of the columnar vibrating body, respectively. A vibrating gyro having a piezoelectric electrode, the signal output means for outputting an electric signal according to the displacement of the columnar vibrating body from the set coordinate position, and the vibrating gyro of the columnar vibrating body based on the output signal of the signal output means. A vibration gyro with an abnormality detection function, comprising: an abnormality detection unit that fixes the output of the vibration gyro to a constant value when irreversible displacement is detected. 2. A piezoelectrically driven columnar vibrating body supported in the vicinity of a vibration node on a supporting member provided upright on a substrate, and at least two or more columnar surfaces of the vibrating columnar body, respectively. A vibrating gyro having a piezoelectric electrode, wherein a lead wire extended from the at least one piezoelectric electrode via the supporting member is fixed at a position of a length cut when the supporting member is plastically deformed. And a disconnection detecting means for detecting disconnection of the lead wire fixed to the fixing member, and an irreversible displacement detection of the columnar vibrating body based on the detection signal of the disconnection detecting means. A vibration gyro with an abnormality detection function, which is equipped with an abnormality detection means for fixing the output of the vibration gyro to a constant value. 3. A fixing member vertically arranged on a substrate in a symmetrical manner with lead wires of each piezoelectric electrode, which are attached to the columnar vibrating body in a column-axis-symmetrical manner, sandwiching the columnar vibrating body via a supporting member. The vibrating gyroscope with an abnormality detecting function according to claim 2, wherein the vibrating gyro is stretched to a fixed length and is fixed at a position where the support member is cut when it is plastically deformed. 4. A piezoelectrically driven columnar vibrating body supported in the vicinity of a vibration node on a supporting member provided upright on a substrate, and at least two or more columnar surfaces of the columnar vibrating body, respectively. A vibrating gyro having a piezoelectric electrode, the electrode plate being provided in close proximity to a portion of the columnar vibrating body excluding the piezoelectric electrode attached to the columnar surface, and the columnar surface of the columnar vibrating body and the electrode. A capacitance detecting means for detecting the capacitance between the plate and the plate, and the capacitance detecting means determines the irreversible displacement of the columnar vibrating body on the basis of the amount of change from the initial setting value of the capacitance to determine the vibration gyro. A vibration gyro with an anomaly detection function, comprising an anomaly detection means for fixing the output to a constant value. 5. The vibration with an abnormality detection function according to claim 4, wherein the capacitance detection electrode is a cover electrode configured to cover at least one end of the columnar vibrating body with a predetermined gap. gyro. 6. The capacitance detecting electrode covers the entire columnar vibrating body including the substrate, and a part of the columnar vibrating body has an inner wall surface closely opposed to at least two different surfaces except the attached piezoelectric electrodes. The vibration gyro with an abnormality detection function according to claim 4, wherein the vibration gyro is a case material.