JPH0876812A - Production system and automatic decision device for equipment operation parameter - Google Patents

Abstract

PURPOSE: To automatically decide each equipment operation parameter in real time and corresponding to the past processing contents of objects to be processed and production equipment, the internal states of the production equipment set before the start of processing, processing result data on some of objects to be processed obtained after processing, and the checking results respectively. CONSTITUTION: A knowledge definition system 61 sets an upper limit value, lower limit value and an equipment operation parameter calculation function in order to decide the past processing steps, the processing result data items and the reference value, and the propriety for change of the equipment operation parameters for every equipment operation parameter. An equipment group control system 41 acquires the set information from the system 61 and also acquires the past processing result data items and the data value of the past checking result data items from a host system 51. The data value, the upper limit value and the lower limit value are compared with each other in the system 41. When the equipment operation parameter must be changed, the equipment operation parameter value is calculated based on the set information and the data value and then instructed to the production equipments.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for automatically determining equipment operation parameters and a device for automatically determining equipment operation parameters in a production line for thin film products such as semiconductors or a production equipment including a plurality of units.

[0002]

2. Description of the Related Art Conventionally, equipment operating parameters of manufacturing equipment have been set based on desk trial calculations and few experimental results at the product development stage, and an engineer based on the inspection result of the workpiece on the manufacturing line. The adjustment value of the equipment operation parameter was calculated and the equipment operation parameter was changed.

For example, in the case of a manufacturing apparatus for performing oxidation diffusion, when a film thickness measurement value and a layer resistance value of a semiconductor wafer are stored in a database and an engineer manages the data and exceeds a data standard range. At any time, change the temperature gradient and oxidation time in the furnace and perform the test heat treatment to confirm whether the target film thickness and layer resistance can be obtained. The uniformity of the film thickness and the layer resistance was maintained by adjusting the time.

Therefore, in the semiconductor wafer oxidation / diffusion expert system described in Japanese Patent Laid-Open No. 184956/1992, a host computer for storing and executing a heat treatment sequence program to control the oxidation / diffusion device, film thickness data, and layer A database that stores the resistance data in association with the heat treatment conditions (temperature, time, sequence, etc.) of the semiconductor wafer, the type of heat treatment conditions, the temperature odor, the calculation method of the oxidation time, the heat treatment time and the limit of the temperature odor, etc. It has an inference mechanism that infers heat treatment conditions such as temperature distribution and oxidation diffusion time in the furnace based on a knowledge base that stores knowledge data, and automatically creates an optimum heat treatment sequence program.

Further, in the manufacturing system described in Japanese Patent Laid-Open No. 63-249328, the processing history received by the lot is grasped from the monitor of the manufacturing apparatus, and based on this, the recipe of the processing to be received in the future can be obtained. The optimization is automatically performed by simulation or the like to enable stable production of high-yield and high-quality products.

Further, in the semiconductor device disclosed in Japanese Patent Laid-Open No. 4-44208, when the abnormality of the device itself is automatically detected, the manufacturing conditions of the pre-process and the post-process are changed.

Further, in the manufacturing condition setting method described in Japanese Patent Application Laid-Open No. 4-69915, the processing history / actual data of the manufacturing equipment is collected in the database of the equipment performance management system to process the current work in process. By performing abutting analysis, it is possible to efficiently set manufacturing conditions in a short time in order to stably manufacture high-quality products with a high yield in a high-mix low-volume LSI manufacturing line.

[0008]

However, in the semiconductor wafer oxidation / diffusion expert system described in Japanese Patent Laid-Open No. 184956/1992, equipment operating parameters are calculated only from film thickness measurement data, layer resistance data and heat treatment conditions. Depending on the internal state of the processing equipment in the manufacturing equipment before the processing is started, the processing result data of the processing of the processing material in the manufacturing equipment, and the inspection results of the partial processing of the processing material. There is a problem that equipment operation parameters cannot be determined in real time.

Further, in the manufacturing system disclosed in Japanese Patent Laid-Open No. 63-249328, it is necessary to carry out a simulation or the like in order to optimize the recipe of the processing to be received in the future.

Further, in the semiconductor device disclosed in Japanese Patent Laid-Open No. 4-44208, the manufacturing conditions of the pre-process and the post-process can be changed only when the abnormality of the self-device is automatically detected.

Further, in the manufacturing condition setting method described in Japanese Patent Laid-Open No. 4-69915, a person decides the manufacturing condition, not an automatic decision.

The present invention has been made by paying attention to the above-mentioned problems of the prior art. The past processing contents of the workpiece, the internal state of the manufacturing equipment before the processing is started,
The purpose of the present invention is to automatically set equipment operation parameters in real time according to processing result data obtained by performing a part of processing of a workpiece in a manufacturing equipment or inspection results.

[0013]

In order to solve the above-mentioned problems, according to the present invention, a manufacturing facility, a host system, and a processing system, which are connected via a network and process a workpiece according to a set operation parameter, are provided. And a collecting unit configured to collect, from the manufacturing facility, processing result data representing a past processing result of at least a part of a workpiece from the manufacturing facility via the network, and the collecting unit. Storage means for storing the collected processing result data, wherein the processing device reads the processing result data stored in the storage means of the host system via the network, and the manufacturing device. A means for holding a function for generating the operation parameter of the equipment from the processing result data, and the read processing result data according to the held function. Operation parameters - can have a means for setting the production facility via the click - generating means for generating a data, generated operation parameters - the data the networks.

Further, manufacturing equipment for processing the workpiece according to the set operating parameters, and processing result data representing the past processing results of at least a part of the workpiece from the manufacturing equipment via the network. A facility operation parameter automatic determination device connected via a network to a host system for collecting and storing, and a reading means for reading the processing result data stored in the host system via the network, A means for holding a function for generating the operation parameter of the manufacturing equipment from the processing result data, and an operation parameter from the read processing result data according to the held function. It is also possible to have a generation means and a means for setting the generated operation parameter in the manufacturing facility via the network.

Further, a manufacturing facility for processing the workpiece according to the set operating parameters connected through a network, an inspection facility for inspecting the manufacturing facility and generating inspection result data, a host system and a processing unit. The host system, from the inspection equipment, collecting means for collecting, via the network, inspection result data representing the results of past inspection of at least a part of the workpiece,
Storage means for storing the inspection result data collected by the collecting means, and the processing device reads out the inspection result data stored in the storage means of the host system via the network. And a means for holding a function for generating the operation parameter of the manufacturing equipment from the processing result data, and an operation parameter from the read inspection result data according to the held function. It is also possible to have a generating means for generating and a means for setting the generated operation parameter in the manufacturing facility via the network.

Further, from the manufacturing equipment for processing the workpiece according to the set operating parameters and the manufacturing equipment,
An automatic equipment operation parameter determination device connected via a network to a host system that collects and stores inspection result data representing the results of past inspections of at least a part of a workpiece, wherein: Reading means for reading the inspection result data stored in the host system through the network, and means for holding a function for generating the operation parameter of the manufacturing equipment from the inspection result data, Generating means for generating operation parameters from the read inspection result data according to the held function; and means for setting the generated operation parameters in the manufacturing facility via the network. Can also have

Further, it has a manufacturing facility and a processing unit which are connected via a network and which process a workpiece according to a set operation parameter, and the processing unit is a facility before the start of processing from the manufacturing facility. Collection means for collecting state data items via the network, means for holding a function for generating operation parameters of the manufacturing equipment from the data items, and collection according to the held functions. It is also possible to have a generation means for generating the operation parameter from the data item and a means for setting the generated operation parameter in the manufacturing facility via the network.

Further, a facility connected to a manufacturing facility for processing the workpiece according to the set operation parameter via a network, and a facility for collecting data items of the facility state before the processing is started from the manufacturing facility via the network. An operating parameter automatic determination device, which holds a function for generating operation parameters of the manufacturing equipment from data items, and operates from the collected data items according to the held function. It is also possible to have a generation means for generating the parameter and a means for setting the generated operation parameter in the manufacturing facility via the network.

[0019]

[Operation] Manufacturing equipment consisting of a single processing unit,
In a manufacturing facility that consists of multiple processing units and inspection units, the past processing details of the workpiece, the internal state of the processing facility before processing the workpiece, and the partial processing of the workpiece in the manufacturing facility The equipment operation parameters are automatically determined in real time according to the processing result data or the inspection result data.

Further, the data relating to the determination of the equipment operation parameters and the equipment operation parameter calculation function can be sequentially changed for each production equipment, and the equipment operation parameters of various production equipment can be automatically determined.

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a block diagram showing an embodiment of the present invention.

The equipment operation parameter automatic determination device includes a stocker controller 11 for controlling a stocker for storing a workpiece, and a transportation equipment controller 2 for controlling transportation equipment.
1. Multiple manufacturing equipment controllers 3 that control manufacturing equipment
1. A plurality of inspection equipment controllers 3 that control inspection equipment
2 inclusive. The manufacturing facility includes a plurality of processing unit controllers 331 and processing units. The inspection equipment includes a plurality of inspection unit controllers 332 and an inspection unit. Further, the equipment operation parameter automatic determination device includes the stocker controller 11 and the transportation equipment controller 2 described above.
1, a plurality of manufacturing equipment controllers 31, 33, an equipment group control system 41 for controlling a plurality of inspection equipment controllers 32, past processing result data 52 of a work piece from a manufacturing equipment via a network and the equipment group control system 41 An upper system 51 that collects and manages the inspection result data 53 collected by the inspection unit from the manufacturing equipment via the processing result data and the network / equipment group control system 41, an equipment operation parameter calculation function 621, and a collected data item. 622, reference data 623, and knowledge definition system 61 that manages knowledge definition data 62 such as standard data (upper limit value and lower limit value) 624 that determines whether or not to change facility operation parameters.

Here, for example, the processing unit is a coating / coating unit.
If it is an integrated photo & development machine, the processing results are resist temperature, cup temperature, cup humidity, oven temperature, cooling plate temperature, developer temperature, exposure time, focus offset, alignment offset, rotation correction value, chamber temperature. And so on. Also, the inspection results are the dimensional data,
Appearance data, etc. Equipment operation parameters include exposure time, focus offset, alignment offset,
Scaling, rotation, and XY orthogonality.

Next, the following four equipment operation parameter automatic determination methods will be described.

(1) Automatic determination method of equipment operation parameters according to past processing results of workpieces and inspection result data (2) Automatic equipment operation parameter determination method according to the state of equipment before the start of processing in manufacturing equipment (3) After processing a part of the workpiece in the manufacturing equipment, a method for automatically determining the equipment operation parameters according to the processed processing result data. (4) Performing a part of the processing in the manufacturing equipment. After that, the method for automatically determining the equipment operation parameters according to the processed inspection result data The first method for automatically determining the equipment operation parameters FIG. 2
According to.

In step 1, the information shown in FIG. 3 is defined in the knowledge definition system. That is, the recipe (PP
Equipment operation parameters (Pai (i = 1, ...,
For each m)), the past processing steps of the work piece and the processing result data items and reference values that affect the determination of the equipment operation parameters, the upper limit value and the lower limit value for determining whether or not the equipment operation parameter needs to be changed. , The equipment operation parameter calculation function, and the upper limit value and the lower limit value for determining whether the calculated equipment operation parameter is normal or not are set. Reference value, upper limit value for determining whether or not equipment operation parameters need to be changed, lower limit value, upper limit value for determining whether the calculated equipment operation parameters are normal,
The lower limit value is determined based on the experience of the user.

For example, the past processing steps of the work piece which affect the determination of the equipment operation parameter Pa1 are RF.
LID1, RFLID2 ..., The processing result data item is x
aj (j = 1, ..., n), xaj '(j' = 1, ..., n '), ...,
The reference value is yaj, yaj ', ..., The upper limit value for determining whether or not the equipment operation parameter needs to be changed is xuaj, xuaj', ..., The lower limit value is xlaj, xlaj ', ..., The equipment operation parameter calculation function is f.
PUaj can be set as the upper limit value and PLaj can be set as the lower limit value for determining whether a1 () and the calculated equipment operation parameter are normal.

In step 2, the equipment group control system 41
Acquires the information defined in step 1 from the knowledge definition system 61.

In step 3, the equipment group control system 41
When the start lot is determined, the upper system 51 is inquired about the data values of the past processing result data item of the workpiece and the past inspection result data item that affect the operation parameters of the equipment defined in the knowledge definition system 61, Get the data value.

In step 4, the equipment group control system 41
Data collected in step 3 and knowledge definition system 6
The equipment group control system 41 compares the upper limit value and the lower limit value for determining the necessity of changing the equipment operation parameter defined in 1.

In step 5, when it is determined in step 4 that the change is necessary, the equipment group control system 41 uses the equipment operation parameter calculation function defined by the knowledge definition system 61, the collected data value, and the reference value of each data. Calculate equipment operation parameter values.

In step 6, the equipment group control system 41
The equipment operating parameters calculated by are instructed to the manufacturing equipment.

A second automatic operation parameter determination method will be described with reference to FIG.

In step 401, the knowledge definition system 6
1 defines the information shown in FIG. That is, for each equipment (MCID), equipment operation parameters (Pbi (i = 1,
,, m)) that influences the process of determining the equipment condition data items and reference values before the start of processing, the upper limit value and the lower limit value for determining the necessity of changing the equipment operation parameter, the equipment operation parameter calculation function, and the calculation Set the upper and lower limits to determine whether the specified equipment operation parameters are normal. The reference value, the upper limit value and the lower limit value for determining whether or not the equipment operation parameter needs to be changed, and the upper limit value and the lower limit value for determining whether the calculated equipment operation parameter is normal are set based on the experience of the user.

For example, the equipment state data item xbj and the reference value ybj before the start of processing which influences when determining the equipment operation parameter Pb1, the upper limit value xubj and the lower limit value xlbj for determining the necessity of changing the equipment operation parameter are set. However, the facility operation parameter calculation function fb1 () and the upper limit value PUb1 and the lower limit value PLb1 for determining whether the calculated facility operation parameter is normal can be set.

In step 402, the equipment group control system 41 acquires the information defined in step 401 from the knowledge definition system 61.

In step 403, the equipment group control system 41 recognizes that the equipment is in a standby state.

In step 404, the equipment group control system 41 acquires the equipment state data items defined by the knowledge definition system 61 from the manufacturing equipment.

In step 405, the data collected by the equipment group control system 41 in step 404 and the upper limit value and the lower limit value for determining the necessity of changing the equipment operation parameter defined in the knowledge definition system 61 are set in the equipment group. The control system 41 compares.

In step 406, when it is determined in step 405 that a change is necessary, the equipment group control system 41 uses the equipment operation parameter calculation function defined by the knowledge definition system 61, the collected data value, and the reference value of each data to install the equipment. Calculate operating parameter values.

In step 407, the equipment operating parameters calculated by the equipment group control system 41 are instructed to the manufacturing equipment.

A third automatic operation parameter determination method will be described with reference to FIG.

At step 601, the information shown in FIG. 7 is defined in the knowledge definition system. That is, for each equipment operation parameter (Pci) in the recipe (PPID), a part of the processing result data item (xcj) and the reference value (yc) that affect when determining the equipment operation parameter.
j), the upper limit value (xucj) and the lower limit value (xlcj) for determining the necessity of changing the equipment operation parameter are set, and the equipment operation parameter calculation function (fci ()) and the calculated equipment operation parameter are normal. The upper limit value (PUci) and the lower limit value (PLci) for determining whether or not are set.

In step 602, the equipment group control system 41 acquires the information defined in step 601 from the knowledge definition system 61.

In step 603, a part of the construction lot is processed in the manufacturing facility.

In step 604, the equipment group control system 41 collects the processing result data partially processed in step 603.

In step 605, the equipment group control system 41 compares the data collected in step 604 with the upper limit value and the lower limit value for determining the necessity of changing the equipment operation parameter defined by the knowledge definition system 61. .

In step 606, if it is determined in step 605 that a change is necessary, the knowledge definition system 6
The equipment operation parameter value is calculated by the equipment group control system 41 from the equipment operation parameter calculation function defined in 1 above, the collected data value, and the reference value of each data.

In step 607, the equipment operating parameters calculated by the equipment group control system 41 are instructed to the manufacturing equipment.

A fourth method for automatically determining equipment operation parameters will be described with reference to FIG.

In step 801, the information shown in FIG. 9 is defined in the knowledge definition system. That is, the equipment operation parameter (Pdi (i = 1,
…, M)) for each, determine the inspection result data items and reference values after performing some processing of the work piece that affects the determination of equipment operation parameters, and whether or not the equipment operation parameters need to be changed. The upper limit value, the lower limit value, the equipment operation parameter calculation function, and the upper limit value and the lower limit value for determining whether the calculated equipment operation parameter is normal are set.

For example, the process of inspecting a workpiece that affects the determination of the equipment operation parameter Pd1 is FLID.
1, FLID2 ..., the inspection data item is xdj (j = 1,
..., n), xdj '(j' = 1, ..., n '), ..., the reference value is y
dj, ydj ', ..., Upper limit values for determining whether or not to change facility operation parameters are xudj, xudj', ..., Lower limit values are xldj, xl
dj ', ..., Fd1 () for the equipment operation parameter calculation function, and PUdj can be set for the upper limit value and PLdj for the lower limit value for determining whether the calculated equipment operation parameter is normal.

In step 802, the equipment group control system 41 acquires the information defined in step 801 from the knowledge definition system 61.

In step 803, a part of the construction lot is processed in the manufacturing facility.

In step 804, the inspection equipment inspects the partially processed workpiece.

In step 805, the equipment group control system 41 acquires the inspection result data inspected in step 804 from the inspection equipment.

In step 806, the equipment group control system 41 compares the data collected in step 805 with the upper limit value and the lower limit value for determining the necessity of changing the equipment operation parameter defined in the knowledge definition system 61. .

In step 807, if it is determined in step 806 that the change is necessary, the knowledge definition system 6
From the equipment operation parameter calculation function defined in 1 and the collected data value and the reference value of each data, the equipment group control system 41
The equipment operation parameter value is calculated by.

In step 808, the facility operating parameters calculated by the facility group control system 41 are instructed to the manufacturing facility.

Next, the equipment operation parameter calculation function will be described.

There are the following facility operation parameter calculation functions.

Pai = Pai0 + fai (xa1-ya1, ...
., Xaj-yaj, ..., xan-yan, xa1'-ya
1 ', ...) Pai0: Reference value of equipment operation parameter Pai fai: Equipment operation parameter calculation function xaj: Processing result data value of workpiece or inspection result data value of workpiece yaj: Reference value of data xaj Pbi = Pbi0 + fbi (xb1-yb1, ..., xbj-yb
j, ..., Xbn-ybn) Pbi0: Reference value of equipment operation parameter Pbi fbi: Equipment operation parameter calculation function xbj: State data before processing of equipment ybj: Reference value of data xbj Pci = Pci0 + fci (xc1-yc1, ..., xcj-yc
j, ..., xcn-ycn) Pci0: Reference value of equipment operation parameter Pci fci: Equipment operation parameter calculation function xcj: Partial processing result data value of workpiece ycj: Reference value of data xcj Pdi = Pdi0 + fdi ( xd1-yd1, ..., xdj-yd
j, ..., xdn-ydn, xd1'-yd1 ', ...) Pdi0: Reference value of equipment operation parameter Pdi fdi: Equipment operation parameter calculation function xdj: Workpiece inspection result data value ydj: Data xdj Reference values for these equipment operation parameter calculation functions are derived by statistical processing based on the data and reference values collected on the experimental / trial production line or mass production line, and the equipment operation parameter values at the time of processing.

Further, with respect to the equipment in which the manufacturing equipment is composed of a plurality of processing units and the inspection equipment is composed of a plurality of inspection units, the manufacturing equipment is replaced with the processing unit and the inspection equipment is replaced with the inspection unit, and the operating parameters of the processing unit are automatically changed. decide. Two methods will be described below.

The first method is specified in advance in the knowledge definition system from the processing result data obtained by processing the work piece in another processing unit before starting the processing of the work piece in a certain processing unit. When the value of the processing result data item of another processing unit is searched, the necessity of changing the facility operation parameter of the processing unit is judged by comparing the data value with the standard value, and when the change is necessary , The collected data, the reference value of each data, and the equipment operation parameter calculation function, the equipment operation parameter automatic determination method for automatically determining the operation parameter of the processing unit.

In the second method, the inspection result data by the inspection unit is processed before the processing of the work piece is started by a certain processing unit and after the processing of the work piece by another processing unit.
It is necessary to change the equipment operation parameter of the processing unit by searching the value of the inspection result data item in the inspection unit specified in advance in the knowledge definition system from the data and comparing the data value with the standard value. When it is necessary to change, the equipment operation parameter that automatically determines the operation parameter of the processing unit based on the collected data, the reference value of each data and the equipment operation parameter calculation function. This is an automatic determination method.

[0067]

As described above, according to the present invention, in the manufacturing equipment composed of a single processing unit, the processing contents of the workpiece, the internal state of the workpiece in the manufacturing equipment before the start of processing, and the manufacturing equipment. It is possible to process at least a part of the workpiece in the internal state during processing of the workpiece and the manufacturing facility, and automatically determine the facility operating parameters in real time according to the inspection result.

[Brief description of drawings]

FIG. 1 is a block diagram of the overall configuration of an equipment operation parameter automatic determination device.

FIG. 2 is a flowchart showing a procedure for determining equipment operation parameters according to past processing contents of a work piece.

FIG. 3 is an explanatory diagram of a knowledge definition of equipment operation parameter determination according to past processing contents of a workpiece.

FIG. 4 is a flowchart showing a procedure for determining equipment operation parameters according to the state of manufacturing equipment.

FIG. 5 is an explanatory diagram of knowledge definition for determining equipment operation parameters according to the state of manufacturing equipment.

FIG. 6 is a flow chart showing the procedure for determining equipment operation parameters according to the processing results of a part of the workpiece.

FIG. 7 is an explanatory diagram of a knowledge definition for determining equipment operation parameters according to a processing result of a part of a workpiece.

FIG. 8 is a flow chart showing a procedure for determining equipment operation parameters according to the inspection result of a part of the workpiece.

FIG. 9 is an explanatory diagram of a knowledge definition for determining equipment operation parameters according to the inspection result of a part of the workpiece.

[Explanation of symbols]

11: Stocker controller 21: Conveyor equipment controller 31: Manufacturing equipment controller 32: Inspection equipment controller 331: Processing unit controller 332: Inspection unit controller 33: Control processing unit and inspection unit Manufacturing equipment controller 41: Equipment group control system 52: Past processing result data of work piece 53: Inspection result data 51: Upper system 621: Equipment operation parameter calculation function 622: Collection data Data item 623: Standard data 624: Standard data 62: Knowledge definition data 61: Knowledge definition system

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hide Kobayashi 292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa Prefectural Institute of Technology Hitachi, Ltd.

Claims (12)

[Claims] 1. A manufacturing facility for processing a workpiece according to a set operating parameter, which is connected via a network, a host system, and a processing device, wherein the host system processes the workpiece from the manufacturing facility. The processing device includes: a collecting unit that collects processing result data representing a past processing result of at least a part of an object via the network; and a storage unit that stores the processing result data collected by the collecting unit. Is a reading means for reading the processing result data stored in the storage means of the host system via the network, and a function for generating operation parameters of the manufacturing equipment from the processing result data. And a generating means for generating motion parameters from the read processing result data according to the held function. Lame - said data networks - manufacturing system characterized by having a means for setting the production facility via the click. 2. The processing device according to claim 1, wherein the processing device holds an upper limit value and a lower limit value of the processing result data for determining whether or not the operation parameter needs to be changed, and the processing device reads the read result by the reading device. It has a comparison means for comparing the processed performance data with the upper limit value and the lower limit value, and when the processing performance data is larger than the upper limit value or smaller than the lower limit value by the comparison means. A manufacturing system characterized in that, when judged, the operation parameter is generated by the generating means. 3. Manufacturing equipment for processing a workpiece in accordance with set operating parameters, and processing performance data representing the past processing performance of at least a part of the workpiece from the manufacturing equipment via the network. A facility operation parameter automatic determination device connected via a network to a host system for collecting and storing, and a reading means for reading the processing result data stored in the host system via the network, Means for holding a function for generating the operation parameter of the manufacturing facility from the processing result data, and generating the operation parameter from the read processing result data according to the held function. An equipment operation parameter comprising: a generation means and a means for setting the generated operation parameter in the manufacturing equipment via the network. Automatic meter determination device. 4. The facility operation parameter automatic determination device according to claim 3, wherein the device operation parameter automatic determination device holds an upper limit value and a lower limit value of the processing result data for determining whether or not the operation parameter needs to be changed; The processing performance data read by the output means and a comparison means for comparing the upper limit value and the lower limit value are provided, and the processing performance data is larger or lower than the upper limit value by the comparison means. An equipment operation parameter automatic determination device characterized in that the operation parameter is generated by the generation means when it is determined to be smaller than the above. 5. A manufacturing facility for processing a workpiece according to a set operating parameter, an inspection facility for inspecting the manufacturing facility and generating inspection result data, a host system, and a processing unit, which are connected via a network. The host system collects, from the inspection facility, inspection result data representing results of past inspections of at least a part of a workpiece via the network; And a storage unit for storing the inspection result data, wherein the processing unit reads out the inspection result data stored in the storage unit of the host system via the network, and the manufacturing facility. Means for holding a function for generating operation parameters from processing result data, and the read inspection result data according to the held function. A manufacturing system comprising: a generation unit that generates an operation parameter from a computer; and a unit that sets the generated operation parameter in the manufacturing facility via the network. 6. The processing device according to claim 5, wherein the processing device holds the upper limit value and the lower limit value of the inspection data for determining whether or not the operation parameter needs to be changed, and the reading device reads the inspection data. The inspection data is compared with the upper limit value and the lower limit value, and the comparison unit determines that the inspection data is larger than the upper limit value or smaller than the lower limit value. In this case, the manufacturing system is characterized in that the operation parameter is generated by the generating means. 7. Manufacturing equipment for processing a workpiece according to set operating parameters, and inspection result data representing results of past inspection of at least a part of the workpiece from the manufacturing equipment via the network. An equipment operation parameter automatic determination device connected via a network to a host system for collecting and storing, and a reading means for reading the inspection result data stored in the host system via the network, Means for holding a function for generating the operation parameter of the manufacturing facility from the inspection result data, and generating operation parameter from the read inspection result data according to the held function. An equipment operation parameter comprising: a generation means and a means for setting the generated operation parameter in the manufacturing equipment via the network. Automatic meter determination device. 8. The automatic equipment operation parameter determination device according to claim 7, wherein the equipment operation parameter automatic determination device holds an upper limit value and a lower limit value of the processing result data for determining whether or not the operation parameter needs to be changed, The processing performance data read by the output means and a comparison means for comparing the upper limit value and the lower limit value are provided, and the processing performance data is larger or lower than the upper limit value by the comparison means. An equipment operation parameter automatic determination device characterized in that the operation parameter is generated by the generation means when it is determined to be smaller than the above. 9. A manufacturing facility for treating a workpiece according to a set operation parameter, which is connected via a network, and a treatment device, wherein the treatment device is a facility before the start of treatment from the production facility. Collecting means for collecting state data items through the network; means for holding a function for generating operation parameters of the manufacturing equipment from data items; and the collecting function according to the held function. And a means for setting the generated operation parameter in the manufacturing facility via the network. 10. The processing device according to claim 9, wherein the processing device holds an upper limit value and a lower limit value of a data item for determining whether or not to change the operation parameter, and the collected data item. , And a comparison means for comparing the upper limit value and the lower limit value, the generation means, when the comparison means determines that the data item is larger than the upper limit value or smaller than the lower limit value. A manufacturing system characterized in that an operating parameter is generated by means. 11. A facility that is connected via a network to a manufacturing facility that processes a workpiece according to set operating parameters, and that collects data items of the facility status from the manufacturing facility before starting processing through the network. An operating parameter automatic determination device, which holds a function for generating operation parameters of the manufacturing equipment from data items, and operates from the collected data items according to the held function. An equipment operation parameter automatic determination device comprising: a generation means for generating a parameter, and a means for setting the generated operation parameter in the manufacturing equipment via the network. 12. The facility operation parameter automatic determination device according to claim 11, wherein the device operation parameter automatic determination device holds an upper limit value and a lower limit value of a data item for determining whether or not the operation parameter needs to be changed, A data item and a comparing means for comparing the upper limit value and the lower limit value, and the comparing means determines that the data item is larger than the upper limit value or smaller than the lower limit value. In addition, the facility operation parameter automatic determination device characterized in that the operation parameter is generated by the generation means.