JP3321499B2 - Manufacturing system and equipment operation parameter automatic determination device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for automatically determining equipment operation parameters in a production line for a thin film product such as a semiconductor or a production equipment comprising a plurality of units.

[0002]

2. Description of the Related Art Conventionally, equipment operation parameters of manufacturing equipment have been set based on a desk trial calculation and a few experimental results in a product development stage. The adjustment value of the equipment operation parameter was calculated, and the equipment operation parameter was changed.

For example, in the case of a manufacturing apparatus which performs oxidation diffusion, a measured value of film thickness and a layer resistance value of a semiconductor wafer are stored in a database, and a technician manages the data. As necessary, change the temperature odor and oxidation time in the furnace and perform test heat treatment to check whether the target film thickness and layer resistance can be obtained. By setting the time, uniformity of the film thickness and the layer resistance was maintained.

[0004] In view of the above, in a semiconductor wafer oxidation diffusion expert system described in Japanese Patent Application Laid-Open No. 4-184956, a host computer for storing and executing a heat treatment sequence program to control an oxidation diffusion device, film thickness data and layer thickness data, A database that stores resistance data and heat treatment conditions (temperature, time, sequence, etc.) of semiconductor wafers in correspondence with each other, and calculates the types of heat treatment conditions, temperature odors, oxidation time calculation methods, heat treatment time and temperature odor limit, etc. It has an inference mechanism that infers heat treatment conditions such as temperature odor in the furnace, oxidation diffusion time, etc., based on a knowledge base that stores knowledge data, and automatically creates an optimal heat treatment sequence program.

Further, in the manufacturing system described in Japanese Patent Application Laid-Open No. 63-249328, the processing history received by a lot is grasped from a monitor of a manufacturing apparatus, and the recipe of the processing to be received in the future is determined based on the history. Optimization is automatically performed by simulation or the like, so that high-yield, high-quality products can be stably manufactured.

Further, in the semiconductor device described in Japanese Patent Application Laid-Open No. 4-44208, when an abnormality of the self-device is automatically detected, manufacturing conditions of a preceding process and a subsequent process are changed.

Further, in the manufacturing condition setting method described in Japanese Patent Application Laid-Open No. 4-69915, the processing history / actual data of the manufacturing equipment is collected in the database of the equipment performance management system, and the processing of the current work in process is performed. By performing the comparison and analysis, it is possible to efficiently set the manufacturing conditions in a short period of time in order to stably manufacture high-quality products at a high yield in a large-scale, small-quantity LSI manufacturing line.

[0008]

However, in the semiconductor wafer oxidation diffusion expert system described in Japanese Patent Application Laid-Open No. Hei 4-184956, equipment operation parameters are calculated only from film thickness measurement data, layer resistance data and heat treatment conditions. Depending on the internal state before the start of processing of the workpiece in the manufacturing equipment, the processing result data of the processing of the workpiece in the manufacturing equipment, and the inspection result of the partial processing of the workpiece. There is a problem that the equipment operation parameters cannot be determined in real time.

In the manufacturing system described in Japanese Patent Application Laid-Open No. 63-249328, a simulation or the like must be performed in order to optimize a recipe for a process to be received in the future.

Further, in the semiconductor device described in Japanese Patent Application Laid-Open No. 4-44208, the manufacturing conditions in the preceding and subsequent steps can be changed only when the abnormality of the own apparatus is automatically detected.

Further, in the manufacturing condition setting method described in Japanese Patent Application Laid-Open No. 4-69915, a human determines the manufacturing conditions, not an automatic determination.

The present invention has been made in view of the problems of the prior art described above, and includes details of past processing of a workpiece, an internal state of a manufacturing facility before processing of the workpiece,
It is an object of the present invention to perform real-time automatic setting of equipment operation parameters according to processing result data or inspection results obtained by partially processing a workpiece in a manufacturing equipment.

[0013]

According to the present invention, there is provided a manufacturing system for processing a workpiece in accordance with a set operation parameter, which is connected via a network, a host system, and a processing system. And a collecting unit for collecting, via the network, processing result data representing a past processing result of at least a part of the workpiece from the manufacturing facility, and Storage means for storing the collected processing result data, wherein the processing device reads the processing result data stored in the storage means of the host system via the network; and Means for holding a function for generating operation parameters of the equipment from the processing result data; and a means for storing the read processing result data in accordance with the stored function. Operation parameters - can have a means for setting the production facility via the click - generating means for generating a data, generated operation parameters - the data the networks.

[0014] Further, a manufacturing facility for processing a workpiece according to the set operation parameters, and processing result data representing the past performance of at least a part of the workpiece from the manufacturing facility via the network. An equipment operation parameter automatic determination device connected via a network to a higher-level system for collecting and storing the data, wherein reading means reads out the processing result data stored in the higher-level system via the network, Means for holding a function for generating operation parameters of the manufacturing equipment from the processing result data; and generating operation parameters from the read processing result data in accordance with the held function. It may also have a generating means and a means for setting the generated operation parameters to the manufacturing facility via the network.

Further, a manufacturing facility connected via a network for processing a workpiece in accordance with set operation parameters, an inspection facility for inspecting the manufacturing facility and generating inspection result data, a host system, and a processing device Having, from the inspection equipment, collection means for collecting inspection result data representing the result of at least a part of the past inspection of the workpiece via the network,
Storage means for storing test result data collected by the collection means, wherein the processing device reads the test result data stored in the storage means of the host system via the network. Means for holding a function for generating operation parameters of the manufacturing equipment from the processing result data; and operation parameters from the read inspection result data in accordance with the held function. It may also have a generating means for generating and a means for setting the generated operation parameters to the manufacturing equipment via the network.

Further, a manufacturing facility for processing a workpiece according to the set operation parameters,
An equipment operation parameter automatic determination device connected via a network to a higher-level system that collects and stores inspection result data representing past inspection results of at least a part of the workpiece via the network, Reading means for reading the inspection result data stored in the host system via the network; means for holding a function for generating operation parameters of the manufacturing equipment from the inspection result data; Generating means for generating operation parameters from the read inspection result data in accordance with the held function; and means for setting the generated operation parameters to the manufacturing facility via the network. Can also be provided.

[0017] Further, there is provided a manufacturing facility and a processing apparatus for processing the workpiece according to the set operation parameters, which are connected via a network. Collection means for collecting status data items via the network; means for holding a function for generating operation parameters of the manufacturing equipment from the data items; and collection in accordance with the held functions. It is also possible to have a generating means for generating operation parameters from the data items thus obtained, and a means for setting the generated operation parameters in the manufacturing facility via the network.

Further, a facility is connected via a network to a manufacturing facility for processing the workpiece in accordance with the set operation parameters, and collects, via the network, data items of the facility status before the processing is started from the manufacturing facility. An operation parameter automatic determination device, comprising: means for holding a function for generating operation parameters of the manufacturing equipment from data items, and operating from the collected data items according to the held functions. It may also have a generating means for generating parameters and a means for setting the generated operation parameters to the manufacturing facility via the network.

[0019]

[Function] Manufacturing equipment composed of a single processing unit,
In a manufacturing facility composed of multiple processing units and inspection units, the past processing contents of the workpiece, the internal state of the manufacturing facility before starting the processing of the workpiece, and the partial processing of the workpiece in the manufacturing facility Automatic determination of equipment operation parameters is performed in real time according to the performed processing result data or inspection result data.

Further, the data relating to the determination of the equipment operation parameters and the equipment operation parameter calculation function can be sequentially changed for each manufacturing equipment, and the equipment operation parameters of various manufacturing equipment can be automatically determined.

[0021]

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a block diagram showing an embodiment of the present invention.

The apparatus for automatically determining equipment operation parameters includes a stocker controller 11 for controlling a stocker for storing workpieces and a transport equipment controller 2 for controlling transport equipment.
1. Multiple manufacturing equipment controllers 3 for controlling manufacturing equipment
1. Multiple inspection equipment controllers 3 for controlling inspection equipment
2 inclusive. The manufacturing facility includes a plurality of processing unit controllers 331 and processing units. The inspection equipment includes a plurality of inspection unit controllers 332 and an inspection unit. The apparatus for automatically determining equipment operation parameters includes the stocker controller 11 and the transport equipment controller 2.
1. An equipment group control system 41 for controlling a plurality of manufacturing equipment controllers 31 and 33, a plurality of inspection equipment controllers 32, and past processing result data 52 of a workpiece from a manufacturing equipment via a network and the equipment group control system 41. An upper system 51 that collects and manages the processing result data and the inspection result data 53 collected by the inspection unit from the manufacturing equipment via the network and the equipment group control system 41, an equipment operation parameter calculation function 621, and collected data items 622, reference data 623, and a knowledge definition system 61 that manages knowledge definition data 62 such as standard data (upper limit value, lower limit value) 624 for judging the necessity of changing equipment operation parameters.

Here, for example, when the processing unit
In the case of integrated photo-development and development equipment, the processing results include resist temperature, cup temperature, cup humidity, oven temperature, cooling plate temperature, developer temperature, exposure time, focus offset, alignment offset, rotation correction value, and chamber temperature. And so on. In addition, inspection results include dimension data,
It becomes appearance data. Equipment operation parameters include exposure time, focus offset, alignment offset,
Scaling, rotation, and XY orthogonality.

Next, the following four methods for automatically determining equipment operation parameters will be described.

(1) Method of automatically determining equipment operation parameters according to past processing results of workpieces and inspection result data (2) Method of automatically determining equipment operation parameters according to the state of equipment before starting processing in manufacturing equipment (3) After processing a part of the workpiece in the manufacturing equipment, automatically determine the equipment operation parameters according to the processed processing result data (4) Perform a part of the processing in the manufacturing equipment After that, the method for automatically determining the equipment operation parameters according to the processed inspection result data The first method for automatically determining the equipment operation parameters is shown in FIG.
It states according to.

In step 1, information shown in FIG. 3 is defined in the knowledge definition system. That is, the recipe (PP
Equipment operation parameters (Pai (i = 1, ...,
m)) In each case, the past processing steps of the workpiece that affect the determination of the equipment operation parameters, the processing result data items and reference values, the upper limit value, and the lower limit value that determine whether the equipment operation parameters need to be changed , An equipment operation parameter calculation function, and an upper limit value and a lower limit value for determining whether the calculated equipment operation parameter is normal. A reference value, an upper limit value for determining whether or not the equipment operation parameters need to be changed, a lower limit value, an upper limit value for determining whether the calculated equipment operation parameters are normal,
The lower limit is determined based on the experience of the user.

For example, the past processing step of the workpiece which affects the determination of the equipment operation parameter Pa1 is RF.
LID1, RFLID2 ..., the processing result data item is x
aj (j = 1, ..., n), xaj '(j' = 1, ..., n '), ...,
The reference value is yaj, yaj ', ..., the upper limit value for judging the necessity of changing the equipment operation parameter is xuaj, xuaj', ..., the lower limit value is xlaj, xlaj ', ..., and the equipment operation parameter calculation function is f.
a1 () and the upper limit value for judging whether the calculated equipment operation parameter is normal can be set to PUaj, and the lower limit value can be set to PLaj.

In step 2, the equipment group control system 41
Acquires the information defined in step 1 from the knowledge definition system 61.

In step 3, the equipment group control system 41
When the start lot is determined, the upper system 51 is inquired about the data values of the past processing result data item and the past inspection result data item of the workpiece which affect the operation parameters of the equipment defined in the knowledge definition system 61, Get the data value.

In step 4, the equipment group control system 41
Collected in step 3 and the knowledge definition system 6
The equipment group control system 41 compares the upper limit value and the lower limit value for determining whether or not to change the equipment operation parameters defined in 1.

In step 5, when it is determined in step 4 that a change is necessary, the equipment group control system 41 uses the equipment operation parameter calculation function defined by the knowledge definition system 61, the collected data value, and the reference value of each data. Calculate equipment operation parameter values.

In step 6, the equipment group control system 41
Is instructed to the manufacturing equipment.

A second method for automatically determining equipment operation parameters will be described with reference to FIG.

In step 401, the knowledge definition system 6
1 defines the information shown in FIG. That is, for each facility (MCID), the facility operation parameters (Pbi (i = 1,
…, M)) the equipment status data items and reference values that affect the processing before starting the processing, the upper limit value, lower limit value for determining whether or not the equipment operation parameters need to be changed, the equipment operation parameter calculation function, and Set the upper and lower limits to determine whether the set equipment operation parameters are normal. The reference value, the upper limit value and the lower limit value for judging the necessity of changing the equipment operation parameter, and the upper limit value and the lower limit value for judging whether the calculated equipment operation parameter is normal are set based on the experience of the user.

For example, an equipment status data item xbj and a reference value ybj before starting the processing which affect the determination of the equipment operation parameter Pb1 are set, and an upper limit xubj and a lower limit xlbj for determining whether or not the equipment operation parameter needs to be changed are set. Then, it is possible to set the equipment operation parameter calculation function fb1 (), and the upper limit value PUb1 and the lower limit value PLb1 for determining whether the calculated equipment operation parameter is normal.

In step 402, the equipment group control system 41 acquires the information defined in step 401 from the knowledge definition system 61.

In step 403, the equipment group control system 41 recognizes that the equipment is in a standby state.

In step 404, the equipment group control system 41 acquires the equipment state data items defined in the knowledge definition system 61 from the manufacturing equipment.

In step 405, the equipment group control system 41 compares the data collected in step 404 with the upper limit value and the lower limit value for determining whether or not the equipment operation parameters defined in the knowledge definition system 61 need to be changed. The comparison is made by the control system 41.

In step 406, if it is determined in step 405 that a change is required, the equipment group control system 41 uses the equipment operation parameter calculation function defined by the knowledge definition system 61, the collected data value, and the reference value of each data. Calculate the operation parameter value.

In step 407, the equipment operation parameters calculated by the equipment group control system 41 are instructed to the manufacturing equipment.

A third method for automatically determining equipment operation parameters will be described with reference to FIG.

In step 601, information shown in FIG. 7 is defined in the knowledge definition system. That is, for each equipment operation parameter (Pci) in the recipe (PPID), the processing result data item (xcj) and the reference value (yc) of a part of the workpiece that affect the determination of the equipment operation parameter
j), an upper limit value (xucj) and a lower limit value (xlcj) for determining whether the equipment operation parameters need to be changed are set, and the equipment operation parameter calculation function (fci ()) and the calculated equipment operation parameters are normal. An upper limit value (PUci) and a lower limit value (PLci) for judging whether or not are set.

In step 602, the equipment group control system 41 acquires the information defined in step 601 from the knowledge definition system 61.

In step 603, a part of the start lot is processed in the manufacturing facility.

In step 604, the equipment group control system 41 collects the processing result data partially processed in step 603.

In step 605, the equipment group control system 41 compares the data collected in step 604 with the upper limit value and the lower limit value for determining whether or not to change the equipment operation parameters defined by the knowledge definition system 61. .

In step 606, if it is determined in step 605 that a change is required, the knowledge definition system 6
The equipment group control system 41 calculates the equipment operation parameter value from the equipment operation parameter calculation function defined in 1, the collected data value, and the reference value of each data.

In step 607, the equipment operation parameters calculated by the equipment group control system 41 are instructed to the manufacturing equipment.

A fourth method for automatically determining equipment operation parameters will be described with reference to FIG.

In step 801, information shown in FIG. 9 is defined in the knowledge definition system. That is, the equipment operation parameters (Pdi (i = 1, 1) in the recipe (PPID)
.., M)), it is determined whether or not the inspection result data items and the reference values after performing a part of the processing of the workpiece which affect the determination of the equipment operation parameters, the reference values, and the necessity of changing the equipment operation parameters. An upper limit value, a lower limit value, a facility operation parameter calculation function, and an upper limit value and a lower limit value for determining whether the calculated facility operation parameter is normal are set.

For example, the process of inspecting the workpiece which affects the determination of the equipment operation parameter Pd1 is FLID
1, FLID2 ..., the inspection data item is xdj (j = 1,
.., N), xdj ′ (j ′ = 1,..., N ′),.
dj, ydj ', ..., upper limit values for judging the necessity of changing equipment operation parameters are xudj, xudj', ..., lower limit values are xldj, xl
dj ',..., the facility operation parameter calculation function can set fd1 (), the upper limit value for judging whether the calculated facility operation parameter is normal is PUdj, and the lower limit value is PLdj.

In step 802, the equipment group control system 41 acquires the information defined in step 801 from the knowledge definition system 61.

In step 803, a part of the start lot is processed in the manufacturing facility.

At step 804, the inspection of the workpiece which has been partially processed by the inspection equipment is performed.

In step 805, the equipment group control system 41 acquires the inspection result data inspected in step 804 from the inspection equipment.

In step 806, the equipment group control system 41 compares the data collected in step 805 with the upper limit value and the lower limit value for determining whether the equipment operation parameters defined in the knowledge definition system 61 need to be changed. .

In step 807, if it is determined in step 806 that a change is necessary, the knowledge definition system 6
From the equipment operation parameter calculation function defined in 1, the collected data value, and the reference value of each data, the equipment group control system 41
To calculate the equipment operation parameter value.

In step 808, the equipment operation parameters calculated by the equipment group control system 41 are instructed to the manufacturing equipment.

Next, the equipment operation parameter calculation function will be described.

There are the following facility operation parameter calculation functions.

Pai = Pai0 + fai (xa1-ya1,...)
・, Xaj-yaj, ..., xan-yan, xa1'-ya
1 ', ...) Pai0: Reference value of equipment operation parameter Pai fai: Function for calculating equipment operation parameter xaj: Actual processing data value of workpiece or inspection result data value of workpiece yaj: Reference value of data xaj Pbi = Pbi0 + fbi (xb1-yb1, ..., xbj-yb
j, ..., xbn-ybn) Pbi0: reference value of equipment operation parameter Pbi fbi: equipment operation parameter calculation function xbj: state data before equipment processing ybj: reference value of data xbj Pci = Pci0 + fci (xc1-yc1, ..., xcj-yc
j,..., xcn-ycn) Pci0: reference value of equipment operation parameter Pci fci: equipment operation parameter calculation function xcj: actual processing data value of a part of workpiece ycj: reference value of data xcj Pdi = Pdi0 + fdi ( xd1-yd1, ..., xdj-yd
j, ..., xdn-ydn, xd1'-yd1 ', ...) Pdi0: Reference value of equipment operation parameter Pdi fdi: Equipment operation parameter calculation function xdj: Inspection result data value of workpiece Ydj: Data xdj These facility operation parameter calculation functions are derived by statistical processing or the like based on data and reference values collected in an experimental / prototype line or a mass production line, and facility operation parameter values at the time of processing.

For equipment in which the manufacturing equipment is composed of a plurality of processing units and the inspection equipment is composed of a plurality of inspection units, the manufacturing equipment is replaced with a processing unit and the inspection equipment is replaced with an inspection unit, and the operating parameters of the processing unit are automatically adjusted. decide. The two methods are described below.

In the first method, before the processing on the workpiece is started in one processing unit, the processing result data obtained by processing the workpiece in another processing unit is specified in advance in the knowledge definition system. When the value of the processing result data item of another processing unit is searched, and the data value is compared with the standard value to determine whether or not the equipment operation parameter of the processing unit needs to be changed. This is a method for automatically determining the operation parameters of the processing unit based on the collected data, the reference value of each data and the function for calculating the equipment operation parameters.

In the second method, before the processing on the workpiece is started in one processing unit, the inspection result data by the inspection unit after the processing of the workpiece in another processing unit is performed.
From the data, the value of the inspection result data item in the inspection unit specified in advance in the knowledge definition system is searched, and the equipment operation parameter of the processing unit needs to be changed by comparing the data value with the standard value. It is determined whether or not the operation parameters of the processing unit are automatically determined based on the collected data, the reference value of each data, and the function for calculating the equipment operation parameters. This is a method for automatically determining data.

[0067]

As described above, according to the present invention, in a manufacturing facility composed of a single processing unit, the processing content of the workpiece, the internal state of the manufacturing facility before the processing of the workpiece, and the processing status of the manufacturing facility. The internal state during processing of the workpiece and at least a part of the processing of the workpiece in the manufacturing equipment are performed, and the equipment operation parameters can be automatically determined in real time according to the inspection result.

[Brief description of the drawings]

FIG. 1 is a block diagram of the overall configuration of an equipment operation parameter automatic determination device.

FIG. 2 is a flowchart showing a procedure for determining equipment operation parameters according to past processing contents of a workpiece;

FIG. 3 is an explanatory diagram of a knowledge definition for determining equipment operation parameters according to the past processing content of a workpiece.

FIG. 4 is a flowchart showing a procedure for determining equipment operation parameters according to the state of the manufacturing equipment.

FIG. 5 is an explanatory diagram of a knowledge definition for determining equipment operation parameters according to the state of a manufacturing equipment.

FIG. 6 is a flowchart showing a procedure for determining equipment operation parameters according to a result of processing a part of a workpiece;

FIG. 7 is an explanatory diagram of a knowledge definition for determining equipment operation parameters according to the processing results of a part of a workpiece.

FIG. 8 is a flowchart showing a procedure for determining equipment operation parameters according to a result of inspection of a part of a workpiece;

FIG. 9 is an explanatory diagram of a knowledge definition for determining equipment operation parameters according to a result of inspection of a part of a workpiece.

[Explanation of symbols]

11: Stocker controller 21: Transport equipment controller 31: Manufacturing equipment controller 32: Inspection equipment controller 331: Processing unit controller 332: Inspection unit controller 33: Controls the processing unit and inspection unit Manufacturing equipment controller 41: equipment group control system 52: past processing result data of the workpiece 53: inspection result data 51: host system 621: equipment operation parameter calculation function 622: collection data Data item 623: Standard data 624: Standard data 62: Knowledge definition data 61: Knowledge definition system

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Masao Sakata 292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa Prefecture Inside the Hitachi, Ltd. Production Engineering Laboratory (72) Inventor Hideshi Kobayashi 292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa (56) References JP-A-2-131848 (JP, A) JP-A-6-214997 (JP, A) JP-A-4-197566 (JP, A) JP 4-101722 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) G05B 15/00-15/02 G06F 17/60 B23Q 41/08

Claims (12)

(57) [Claims] 1. A connected via a network, comprising: a production facility for processing a workpiece according to the operating parameters set, the upper level system, a processing device, wherein the host system, the manufacturing A collection unit for collecting, via the network, processing result data representing a past processing result of at least a part of the workpiece from the equipment; a storage unit for storing the processing result data collected by the collecting unit; The processing device determines whether or not the operation parameter needs to be changed, and
Meter definition and knowledge definition data for performing
Data holding means, and the processing result data stored in the storage means of the host system, reading means for reading via the network, the processing result data read by the reading means ,
Knowledge definition data stored in advance by the data storage means
Judging means for judging whether or not it is necessary to change the operation parameter
When the judging means the operation parameters - determining required changes data
The processing result data and the knowledge definition data
Manufacturing system characterized by having a means for setting the production facility via the click - generating means for generating a data, the operation parameters - - the networks of data the operation parameters and a. 2. A setting device connected via a network.
Manufacturing equipment that processes workpieces according to the specified operating parameters.
Has a Bei, a host system and a processing unit, wherein the host system, from said manufacturing facility, at least a portion of the workpiece past
The processing results data representing the processing results
Collecting means for collecting the processing result data collected by the collecting means, and processing result data collected by the collecting means
Storage means, wherein the processing device stores the processing result data stored in the storage means of the host system.
Reading means for reading data via the network
And the operation parameters of the manufacturing equipment are generated from the processing result data.
Means for holding a function for performing the processing, and the readout processing result according to the held function.
Generating means for generating operation parameters from data; means for holding upper and lower limit values of processing result data for determining whether or not the operation parameters need to be changed; and reading by the reading means. And comparing means for comparing the obtained processing result data with the upper limit value and the lower limit value, wherein the processing result data is larger than the upper limit value or smaller than the lower limit value. A manufacturing system, wherein when it is determined, an operation parameter is generated by the generation unit. 3. A manufacturing facility for processing a workpiece in accordance with set operation parameters, and processing performance data representing a past performance of at least a part of the workpiece from the manufacturing facility via the network. An equipment operation parameter automatic determination device connected via a network to a higher-level system for collecting and storing , wherein a determination is made as to whether the operation parameter needs to be changed, and
Meter definition and knowledge definition data for performing
Data holding means, reading means for reading processing result data stored in the host system via the network, and processing result data read by the reading means;
Knowledge definition data stored in advance by the data storage means
Judging means for judging whether or not it is necessary to change the operation parameter
And the determining means determines that the operation parameter needs to be changed.
In such a case, the processing result data and the knowledge definition data
A generating means for generating data, the operation parameters - - et the operation parameters said data networks - equipment operation parameter automatic determination apparatus characterized by having a means for setting the production facility via the click. 4. Processing according to set operation parameters.
A production facility for processing a workpiece, and a workpiece
Process result data that represents the past process results of at least a part of
Data collected and stored via the network
Operation system connected to the system via a network
A parameter automatic determination device, wherein the processing result data stored in the host system is stored in the network.
Reading means for reading through a network and operation parameters of the manufacturing equipment from processing result data.
Means for holding a function for performing the processing, and the readout processing result according to the held function.
Generating means for generating operation parameters from data; means for holding upper and lower limit values of processing result data for determining whether or not the operation parameters need to be changed; and reading by the reading means. And comparing means for comparing the obtained processing result data with the upper limit value and the lower limit value, wherein the processing result data is larger than the upper limit value or smaller than the lower limit value. An apparatus for automatically determining equipment operation parameters, wherein an operation parameter is generated by the generation means when it is determined. 5. connected via a network, and production facilities for processing a workpiece according to the operating parameters set, the test equipment to produce a test result data inspects of the manufacturing equipment, and the upper level system includes a processing unit, wherein the host system, from the inspection equipment, and collecting means for collecting through the network test result data representing at least some of the results of the past test of the workpiece, Storage means for storing test result data collected by the collection means, wherein the processing device determines whether or not the operation parameter needs to be changed, and
Pre-coercive and the generation of the meter, the knowledge definition data of the line Utame
Data holding means, reading means for reading the test result data stored in the storage means of the host system via the network, and the test result data read by the reading means.
Knowledge definition data stored in advance by the data storage means
Judging means for judging whether or not it is necessary to change the operation parameter
And the determining means determines that the operation parameter needs to be changed.
In such a case, the inspection result data and the knowledge definition data
Et the operation parameters - the manufacturing system characterized by having a means for setting the production facility via the click - generating means for generating a data, the operation parameters - the networks and data. 6. A setting device connected via a network.
Manufacturing equipment that processes workpieces according to the specified operating parameters.
And inspects the manufacturing equipment to generate inspection result data.
Inspection equipment, a host system, and a processing device, the host system, from the inspection equipment, at least part of the past of the workpiece
Inspection result data representing the result of the inspection
Collection means for collecting through, and stores the inspection result data collected by the collection means
Storage means, wherein the processing device stores the inspection result data stored in the storage means of the host system.
Reading means for reading data via the network
And the operation parameters of the manufacturing equipment are generated from the processing result data.
Means for holding a function for performing the test, and the read test result according to the held function.
Generating means for generating operation parameters from data; means for holding upper and lower limit values of inspection data for determining whether or not the operation parameters need to be changed; and reading by the reading means And a comparing unit that compares the upper limit value and the lower limit value. The comparing unit determines that the test data is larger than the upper limit value or smaller than the lower limit value. A production system for generating an operation parameter when the operation parameter is generated. 7. A manufacturing facility for processing a workpiece in accordance with set operation parameters, and inspection result data representing at least a part of past inspection results of the workpiece from the manufacturing facility via the network. An equipment operation parameter automatic determination device connected via a network to a higher-level system for collecting and storing , wherein a determination is made as to whether the operation parameter needs to be changed, and
Meter definition and knowledge definition data for performing
Data holding means, reading means for reading the test result data stored in the storage means of the host system via the network, and the test result data read by the reading means.
Knowledge definition data stored in advance by the data storage means
Judging means for judging whether or not it is necessary to change the operation parameter
And the determining means determines that the operation parameter needs to be changed.
In such a case, the inspection result data and the knowledge definition data
A generating means for generating data, the operation parameters - - et the operation parameters said data networks - automatic determination apparatus characterized by having a means for setting the production facility via the click. 8. Processing according to the set operation parameters.
A production facility for processing a workpiece, and a workpiece
Test result data representing the results of at least some of the past tests
Data collected and stored via the network
Operation system connected to the system via a network
An automatic parameter determination device, wherein the inspection result data stored in the host system is stored in the network.
Reading means for reading through a network and operating parameters of the manufacturing equipment from inspection result data.
Means for the hold function for forming, in accordance with the held function test results said read
Generating means for generating operation parameters from data; means for holding upper and lower limit values of processing result data for determining whether or not the operation parameters need to be changed; and reading by the reading means. Comparison processing means for comparing the obtained processing result data with the upper limit value and the lower limit value ,
It has, by the comparison means, said processing actual data, if the is determined to be smaller than the greater or the lower limit than the upper limit value, and generates the operating parameters by the generation unit facilities Automatic operation parameter determination device. 9. connected via a network, comprising: a production facility for processing a workpiece according to the operating parameters set, the processing unit, wherein the processing unit, from the manufacturing facility, process start Collecting means for collecting data items of the previous equipment status via the network, determining whether or not the operation parameters need to be changed;
Meter definition and knowledge definition data for performing
Data holding means to have, data items of the equipment state collected by the collecting means,
Knowledge definition data stored in advance by the data storage means
Judging means for judging whether or not it is necessary to change the operation parameter
And the determining means determines that the operation parameter needs to be changed.
In this case, the equipment status data item and the knowledge definition data
Manufacturing system and having means for setting the production facility via the click, the - generating means for generating a data, the operation parameters - - the operating parameters from the data the data the networks. 10. A setting connected via a network.
For processing workpieces according to specified operating parameters
Facilities and has a processing unit, wherein the processing unit, wherein the manufacturing facility, the data items of the state of the equipment prior to start of treatment
Means for collecting data via the network, and operating parameters of the manufacturing equipment are generated from data items.
Means for holding a function for performing the operation, and the collected data items according to the held function.
Generating means for generating more operation parameters, means for holding upper and lower limit values of data items for determining whether or not the operation parameters need to be changed, the collected data items, and the upper limit Comparing means for comparing the value and the lower limit, and when the comparing means determines that the data item is larger than the upper limit or smaller than the lower limit, A manufacturing system for generating an operation parameter. 11. A facility connected via a network to a manufacturing facility for processing a workpiece in accordance with set operation parameters, and collecting, via the network, data items of the facility status before the start of processing from the manufacturing facility. An operation parameter automatic determination device, comprising: a determination whether the operation parameter needs to be changed,
Meter definition and knowledge definition data for performing
Data holding means for holding the data, the collected data items of the equipment status, and the data
From the knowledge definition data stored in advance by the
Determining means for determining whether or not the operation parameters need to be changed; and determining that the operation parameters need to be changed by the determining means.
The data item of the equipment status and the knowledge definition
Generating means for generating the operation parameters from data
When the operation parameters - the other networks - equipment operation parameter automatic determination apparatus characterized by having a means for setting the production facility via the click. 12. the pressurized according to the set operating parameters
Connected via a network to manufacturing equipment that processes
From the manufacturing equipment,
Equipment operation parameters for collecting items via the network
An automatic meter determination device, wherein operation parameters of the manufacturing equipment are generated from data items.
Means for holding a function for performing the operation, and the collected data items according to the held function.
Generating means for generating more operation parameters ; means for holding an upper limit value and a lower limit value of data items for determining whether the operation parameters need to be changed; the collected data items; and the upper limit Comparing means for comparing the data item with the lower limit value. When the comparing means determines that the data item is larger than the upper limit value or smaller than the lower limit value, the operation by the generating means is performed. An equipment operation parameter automatic determination device characterized by generating a parameter.