JPH0873266A - Production of dielectric ceramic - Google Patents
Production of dielectric ceramicInfo
- Publication number
- JPH0873266A JPH0873266A JP6207729A JP20772994A JPH0873266A JP H0873266 A JPH0873266 A JP H0873266A JP 6207729 A JP6207729 A JP 6207729A JP 20772994 A JP20772994 A JP 20772994A JP H0873266 A JPH0873266 A JP H0873266A
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- JP
- Japan
- Prior art keywords
- firing
- powder
- dielectric
- dielectric ceramic
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は例えば高周波（マイクロ
波）用の誘電体アンテナ、誘電体共振器等に使用して好
適な誘電体セラミクスの製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a dielectric ceramic suitable for use in, for example, a high frequency (microwave) dielectric antenna, a dielectric resonator, or the like.
【０００２】[0002]
【従来の技術及び発明が解決しようとする課題】近年、
高周波（マイクロ波）用の誘電体アンテナ、誘電体共振
器等の如き電子デバイスの小型化、高周波化、高性能化
にともないマイクロ波域で高誘電率でかつ低損失である
誘電体セラミクスが必要とされている。2. Description of the Related Art In recent years,
Dielectric ceramics with high permittivity and low loss in the microwave region are required as electronic devices such as high-frequency (microwave) dielectric antennas and dielectric resonators become smaller, higher in frequency, and higher in performance. It is said that.
【０００３】従来、この高誘電率で低損失である誘電体
セラミクスとしてＭｇＴｉＯ3 −ＣａＴｉＯ3 系の誘電
体セラミクスが知られている（エレクトロニクス・セラ
ミクス １９９３，Ｖｏｌ．２４，１２４号）。このＭ
ｇＴｉＯ3 −ＣａＴｉＯ3 系の誘電体セラミクスの特性
は誘電率ε＝２１でＱｆ（Ｑ値に共振周波数ｆを乗算し
た値）＝５６０００ＧＨｚである。Conventionally, MgTiO 3 —CaTiO 3 -based dielectric ceramics have been known as the dielectric ceramics having a high dielectric constant and low loss (Electronics Ceramics 1993, Vol. 24, 124). This M
The characteristics of the gTiO 3 —CaTiO 3 system dielectric ceramics are dielectric constant ε = 21 and Qf (Q value multiplied by resonance frequency f) = 56000 GHz.
【０００４】この従来のＭｇＴｉＯ3 −ＣａＴｉＯ3 系
の誘電体セラミクスの製造方法は、図３に示す如く、先
ずＴｉＯ2 ，ＭｇＯ，ＣａＣＯ3 の原料粉末を（Ｍｇ
0.95Ｃａ0.05）ＴｉＯ3 で示される組成に秤量し、ボー
ルミル等で１次混合し、その後乾燥し、これを粉砕す
る。これを１０００℃〜１２００℃の温度で仮焼し、こ
の仮焼後のセラミクスを再び粉砕し、その後、これを２
次混合し、これを乾燥し、その後造粒する。この造粒し
たものにバインダー（ＰＶＡ）を添加し、加圧成形し、
この成形体を１４００℃〜１６００℃で焼成した。As shown in FIG. 3, this conventional method of manufacturing a MgTiO 3 --CaTiO 3 -based dielectric ceramics first comprises forming raw material powders of TiO 2 , MgO, and CaCO 3 into (Mg
0.95 Ca 0.05 ) TiO 3 is weighed, primary mixed with a ball mill or the like, then dried and crushed. This is calcined at a temperature of 1000 ° C. to 1200 ° C., and the ceramics after the calcining are pulverized again, and thereafter, this is
Then mix, dry it and then granulate. A binder (PVA) is added to this granulated product, and pressure molding is performed.
This compact was fired at 1400 ° C to 1600 ° C.
【０００５】このようにして製造された従来のＭｇＴｉ
Ｏ3 −ＣａＴｉＯ3 系の誘電体セラミクスの特性は誘電
率ε＝２１で且つＱｆ＝５６０００ＧＨｚであった。Conventional MgTi produced in this way
The characteristics of the O 3 -CaTiO 3 -based dielectric ceramics were a dielectric constant ε = 21 and Qf = 56000 GHz.
【０００６】本発明は斯る点に鑑み、更に特性を向上し
た誘電体セラミクスを得ることを目的とする。In view of the above points, the present invention has an object to obtain a dielectric ceramics having further improved characteristics.
【０００７】[0007]
【課題を解決するための手段】本発明誘電体セラミクス
の製造方法は少なくとも原料粉末の混合工程、仮焼工
程、粉砕工程、加圧成形工程、焼成工程を経て製造する
ＭｇＴｉＯ3 −ＣａＴｉＯ3 系の誘電体セラミクスの製
造方法において、この焼成工程における焼成温度を１２
００℃〜１２５０℃とし且つ焼成時間を２時間〜５時間
としたものである。The method for producing a dielectric ceramics of the present invention is based on at least a MgTiO 3 --CaTiO 3 system produced by a raw material powder mixing step, a calcination step, a crushing step, a pressure molding step, and a firing step. In the method for producing a dielectric ceramic, the firing temperature in this firing step is set to 12
The temperature is set to 00 ° C to 1250 ° C and the firing time is set to 2 hours to 5 hours.
【０００８】[0008]
【作用】斯る本発明によれば誘電体セラミクスのＱｆ値
が略６９０００ＧＨｚのものが得られ、それだけ特性が
改善される。According to the present invention, a dielectric ceramic having a Qf value of approximately 69000 GHz is obtained, and the characteristics are improved accordingly.
【０００９】[0009]
【実施例】以下図面を参照しながら本発明誘電体セラミ
クスの製造方法の一実施例につき説明する。本例の誘電
体セラミクスの製造方法の製造工程も図３に示す如くで
ある。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the method for producing dielectric ceramics of the present invention will be described below with reference to the drawings. The manufacturing process of the method for manufacturing dielectric ceramics of this example is also as shown in FIG.
【００１０】本例においては、先ずＴｉＯ2 ，ＭｇＯ，
ＣａＣＯ3 の原料粉末を（Ｍｇ0.95Ｃａ0.05）ＴｉＯ3
で示される組成に秤量し、これをボールミルで１５時間
湿式混合（１次混合）する。この湿式混合後これを乾燥
機を使用し、１００℃で２０時間乾燥し、これを粉砕す
る。In this example, first, TiO 2 , MgO,
The raw material powder of CaCO 3 is (Mg 0.95 Ca 0.05 ) TiO 3
Is weighed to a composition shown by and wet-mixed (primary mixing) for 15 hours with a ball mill. After this wet mixing, this is dried at 100 ° C. for 20 hours using a drier and then pulverized.
【００１１】次にこの粉砕した粉末を仮焼する。この仮
焼はジルコニアるつぼを用いて焼成炉で１１００℃，５
時間，Ｏ2 雰囲気中で行う。Next, the pulverized powder is calcined. This calcination was performed at 1100 ° C. for 5 hours in a firing furnace using a zirconia crucible.
Time, O 2 atmosphere.
【００１２】この仮焼後のセラミクスを粉砕し、２次混
合することにより粉末粒子径を調整する。この仮焼後の
粉末を乾燥し、その後この仮焼後の粉末に成形用のバイ
ンダーとしてＰＶＡ１０％の水溶液を１０％添加し、＃
２８のふるいで分級し、これを造粒粉とする。The calcinated ceramics are crushed and secondarily mixed to adjust the powder particle size. The powder after the calcination is dried, and then 10% aqueous solution of PVA is added as a molding binder to the powder after the calcination.
Classify with a No. 28 sieve and use this as granulated powder.
【００１３】この造粒粉を水分調整して、プレス圧８．
２ＭＰａ，加圧時間２００秒で加圧成形を行う。この成
形体を焼成炉を用いてＯ2 雰囲気中で、図１に示す如く
焼成温度及び焼成時間を変化させて焼成を行った。The granulated powder is adjusted for water content and pressed at a pressure of 8.
Pressure molding is performed at a pressure of 2 MPa for 200 seconds. This molded body was fired in an O 2 atmosphere using a firing furnace while changing the firing temperature and firing time as shown in FIG.
【００１４】この焼成温度としては１１００℃，１２０
０℃，１２５０℃，１３００℃，１３５０℃とし、それ
ぞれ０〜１０時間焼成した。The firing temperature is 1100 ° C., 120
The temperature was 0 ° C., 1250 ° C., 1300 ° C., and 1350 ° C., and the firing was performed for 0 to 10 hours.
【００１５】この場合焼成セラミクスを直径１９ｍｍ，
厚さ７．６ｍｍの円柱に加工し、誘電体共振器法により
測定周波数３ＧＨｚ〜６ＧＨｚの範囲で共振周波数ｆと
そのＱ値を測定し、これからＱｆ値を算出した。この結
果を図１に示す。また図２に本例により製造した誘電体
セラミクスの誘電率εと焼成時間との関係を示す。In this case, the firing ceramic has a diameter of 19 mm,
It was processed into a cylinder having a thickness of 7.6 mm, the resonance frequency f and its Q value were measured in the range of measurement frequency 3 GHz to 6 GHz by the dielectric resonator method, and the Qf value was calculated from this. The result is shown in FIG. FIG. 2 shows the relationship between the dielectric constant ε and the firing time of the dielectric ceramics manufactured according to this example.
【００１６】この図１，図２の結果よりして焼成工程に
おける焼成温度が１２００℃〜１２５０℃で、焼成時間
が２時間〜５時間の条件で製造した上述の誘電体セラミ
クスは誘電率εが従来と同等で２１と高く且つＱｆ値が
略６９０００ＧＨｚに改善されている。From the results shown in FIGS. 1 and 2, the above-mentioned dielectric ceramics manufactured under the conditions that the firing temperature in the firing step is 1200 ° C. to 1250 ° C. and the firing time is 2 hours to 5 hours have a dielectric constant ε. It is 21 as high as the conventional one and the Qf value is improved to about 69000 GHz.
【００１７】以上述べた如く本例によれば（Ｍｇ0.95Ｃ
ａ0.05）ＴｉＯ3 の誘電体セラミクスの焼成工程におけ
る焼成温度を１２００℃〜１２５０℃とし且つ焼成時間
を２時間〜５時間としているのでＱｆ値が略６９０００
ＧＨｚのものが得られ、それだけ特性が改善された、即
ちそれだけ低損失の誘電体セラミクスが得られる利益が
ある。As described above, according to this example, (Mg 0.95 C
a 0.05 ) Since the firing temperature in the firing process of the dielectric ceramic of TiO 3 is 1200 ° C. to 1250 ° C. and the firing time is 2 hours to 5 hours, the Qf value is about 69000.
There is an advantage that a dielectric material ceramics of GHz is obtained and the characteristics thereof are improved, that is, the dielectric ceramics of lower loss are obtained.
【００１８】尚本発明は上述実施例に限ることなく本発
明の要旨を逸脱することなく、その他種々の構成が採り
得ることは勿論である。The present invention is not limited to the above-mentioned embodiments, and it goes without saying that various other configurations can be adopted without departing from the gist of the present invention.
【００１９】[0019]
【発明の効果】本発明によればＱｆ値即ち低損失特性の
改善された誘電体セラミクスを得ることができる利益が
ある。According to the present invention, there is an advantage that a dielectric ceramic having an improved Qf value, that is, a low loss characteristic can be obtained.
【図面の簡単な説明】[Brief description of drawings]
【図１】本発明の説明に供する線図である。FIG. 1 is a diagram for explaining the present invention.
【図２】本発明の説明に供する線図である。FIG. 2 is a diagram for explaining the present invention.
【図３】誘電体セラミクスの製造工程を示す線図であ
る。FIG. 3 is a diagram showing a manufacturing process of dielectric ceramics.
Claims (1)
程、粉砕工程、加圧成形工程、焼成工程を経て製造する
ＭｇＴｉＯ3 −ＣａＴｉＯ3 系の誘電体セラミクスの製
造方法において、 前記焼成工程における焼成温度を１２００℃〜１２５０
℃とし且つ焼成時間を２時間〜５時間としたことを特徴
とする誘電体セラミクスの製造方法。1. A method for producing a MgTiO 3 —CaTiO 3 -based dielectric ceramics, which is produced through at least a raw material powder mixing step, a calcination step, a crushing step, a pressure molding step, and a firing step. Temperature 1200 ℃ ~ 1250
The method for producing a dielectric ceramics is characterized in that the temperature is set to 0 ° C. and the firing time is set to 2 hours to 5 hours.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6207729A JPH0873266A (en) | 1994-08-31 | 1994-08-31 | Production of dielectric ceramic |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6207729A JPH0873266A (en) | 1994-08-31 | 1994-08-31 | Production of dielectric ceramic |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0873266A true JPH0873266A (en) | 1996-03-19 |
Family
ID=16544578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6207729A Withdrawn JPH0873266A (en) | 1994-08-31 | 1994-08-31 | Production of dielectric ceramic |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0873266A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0856489A1 (en) * | 1997-01-31 | 1998-08-05 | Kubota Corporation | Powder of titanium compounds |
| CN109206134A (en) * | 2018-10-24 | 2019-01-15 | 天津大学 | A kind of preparation method of high quality factor magnesium titanate base microwave medium ceramics |
-
1994
- 1994-08-31 JP JP6207729A patent/JPH0873266A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0856489A1 (en) * | 1997-01-31 | 1998-08-05 | Kubota Corporation | Powder of titanium compounds |
| US5962551A (en) * | 1997-01-31 | 1999-10-05 | Kubota Corporation | Powder of titanium compounds |
| CN109206134A (en) * | 2018-10-24 | 2019-01-15 | 天津大学 | A kind of preparation method of high quality factor magnesium titanate base microwave medium ceramics |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20040319 |