JPH0871901A - Curved surface polishing method - Google Patents
Curved surface polishing methodInfo
- Publication number
- JPH0871901A JPH0871901A JP23035194A JP23035194A JPH0871901A JP H0871901 A JPH0871901 A JP H0871901A JP 23035194 A JP23035194 A JP 23035194A JP 23035194 A JP23035194 A JP 23035194A JP H0871901 A JPH0871901 A JP H0871901A
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- polished
- abrasive grain
- curved surface
- grain size
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 173
- 238000000034 method Methods 0.000 title claims abstract description 23
- 239000006061 abrasive grain Substances 0.000 claims abstract description 54
- 238000007517 polishing process Methods 0.000 claims abstract description 12
- 239000003795 chemical substances by application Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 abstract description 16
- 239000011521 glass Substances 0.000 abstract description 11
- 230000033001 locomotion Effects 0.000 abstract description 8
- 239000007769 metal material Substances 0.000 abstract description 5
- 238000000465 moulding Methods 0.000 abstract description 2
- 239000000919 ceramic Substances 0.000 abstract 1
- 230000000717 retained effect Effects 0.000 abstract 1
- 229910003460 diamond Inorganic materials 0.000 description 9
- 239000010432 diamond Substances 0.000 description 9
- 239000002245 particle Substances 0.000 description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 7
- 239000003082 abrasive agent Substances 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 238000004554 molding of glass Methods 0.000 description 3
- 238000005266 casting Methods 0.000 description 2
- 229910000420 cerium oxide Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 2
- 239000011435 rock Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000008119 colloidal silica Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009940 knitting Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、例えば、ガラスレンズ
のプレス成形に用いる金型を形成するため、所定の硬質
材料を、例えば凹球面等の曲面形状に研磨加工する曲面
研磨方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a curved surface polishing method for polishing a predetermined hard material into a curved surface such as a concave spherical surface in order to form a mold used for press molding of glass lenses.
【０００２】[0002]
【従来の技術】従来より、ガラスレンズの形成におい
て、所定のガラス材料を例えば凸球面形状とする場合
に、凹球面に形成された皿形状の研磨ヘッドを用いて、
被研磨物であるガラス材料の被研磨面と研磨ヘッドの研
磨作用面である研磨皿面との間に、所定の研磨剤を介在
させた状態で、ガラス材料と研磨ヘッドとを相対運動さ
せて、該ガラス材料を研磨加工するようにした研磨方法
は、すでに知られている。また、研磨剤として、例えば
アルミナ、酸化セリウム、ダイヤモンドスラリー等の粒
状の砥粒を混入した液状のものが用いられる。これらの
研磨剤は、混入されている砥粒の平均粒径により区別さ
れている。2. Description of the Related Art Conventionally, in forming a glass lens, when a predetermined glass material is formed into a convex spherical surface, for example, a dish-shaped polishing head formed into a concave spherical surface is used.
The glass material and the polishing head are moved relative to each other with a predetermined abrasive interposed between the surface to be polished of the glass material, which is the object to be polished, and the polishing dish surface, which is the polishing action surface of the polishing head. A polishing method for polishing the glass material is already known. Further, as the abrasive, for example, a liquid one in which granular abrasive particles such as alumina, cerium oxide, diamond slurry, etc. are mixed is used. These abrasives are distinguished by the average particle size of the mixed abrasive grains.
【０００３】このようなガラス材料の研磨方法として、
砥粒径の異なる研磨剤を用いて、例えば、砂かけ（荒ず
り、中仕上、仕上）およびポリッシュからなる工程のよ
うに、複数の段階の研磨工程により、ガラス材料を所定
の球面形状とするとともに鏡面化する方法が一般的に採
用されている。これを図４により説明する。図４は、研
磨工程を示したもので、砂かけ工程は、荒ずりｓ１、中
仕上ｓ２、仕上ｓ３の３段階の工程から構成され、各段
階の工程で用いられる研磨剤は、順に砥粒径が小さくな
るように異なった粒径のものが選択される。この例で
は、アルミナ＃５００、アルミナ＃８００、アルミナ＃
１０００となっている。この例では、砂かけ工程では、
研磨ヘッドとして鋳物が用いられ、荒ずりｓ１、中仕上
ｓ２、仕上ｓ３の３段階の工程で同一の研磨ヘッドを用
いて行われ、最後のポリッシュ工程ｓ４では、研磨ヘッ
ドとしてピッチが、砥粒として酸化セリウムが用いられ
る。As a method of polishing such a glass material,
Using a polishing agent with different abrasive grain diameters, the glass material is made into a predetermined spherical shape by a plurality of stages of polishing process, for example, a process consisting of sanding (roughing, medium finishing, finishing) and polishing. Along with this, a method of forming a mirror surface is generally adopted. This will be described with reference to FIG. FIG. 4 shows a polishing step. The sanding step is composed of three steps of roughening s1, intermediate finishing s2, and finishing s3. The abrasive used in each step is abrasive grains in order. Different particle sizes are selected to reduce the diameter. In this example, alumina # 500, alumina # 800, alumina #
It is 1000. In this example, in the sanding process,
Casting is used as the polishing head, and the same polishing head is used in the three steps of rough s1, medium finishing s2, and finishing s3. In the final polishing step s4, the pitch is used as the polishing head and the abrasive grains are used. Cerium oxide is used.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、上述の
ような研磨方法により、金属材料やセラミック材料等の
いわゆる硬質材料を球面形状に研磨すると、次のような
不都合な点を有するものであった。まず、研磨剤として
通常ダイヤモンドが用いられるが、ガラス材料の研磨に
比べて研磨に要する時間がかなり長い。また、同一の研
磨ヘッドを用いて行われる荒ずりｓ１、中仕上ｓ２、仕
上ｓ３の３段階の砂かけ工程において、この３段階の順
に、用いる研磨剤の砥粒径を小さくすると、ガラス材料
の研磨では問題とならなかった、被研磨物の中心部やそ
の近傍の研磨皿のもっとも強く当たる部分で研磨量が大
となる現象を無視することができなく、このため、所望
の形状とするまでの研磨時間が増大したり、さらには所
望の形状に研磨できない場合があった。これは、ガラス
材料の研磨においては、研磨剤は砥粒がアルミナであり
砥粒含有率が大きく、研磨ヘッドと被研磨物との間の間
隙を大きくしていわばクッション効果として作用するの
に対して、研磨剤の砥粒がダイヤモンドの場合には、間
隙が小さくクッション効果が小さいことにも起因してい
る。However, when a so-called hard material such as a metal material or a ceramic material is polished into a spherical shape by the above-described polishing method, it has the following disadvantages. First, although diamond is usually used as an abrasive, the time required for polishing is considerably longer than that for polishing a glass material. Further, in the three-step sanding process of rough s1, medium finishing s2, and finishing s3 performed using the same polishing head, if the abrasive grain size of the polishing agent used is reduced in the order of these three steps, It is not possible to ignore the phenomenon that the polishing amount becomes large at the center of the object to be polished and the part where it hits the strongest of the polishing dish in the vicinity, which was not a problem in polishing. In some cases, the polishing time was increased, and further, it could not be polished into a desired shape. This is because, in the polishing of glass materials, the abrasive has a large abrasive grain content because the abrasive grains are alumina, and acts as a cushion effect if the gap between the polishing head and the object to be polished is increased. In addition, when the abrasive grains of the abrasive are diamond, it also results from the fact that the gap is small and the cushioning effect is small.
【０００５】従って、ガラスレンズのプレス成形に用い
る金型を形成するための硬質材料においては、上述のよ
うな研磨方法は不都合なものであった。以下に詳述す
る。図５において、３０１は被研磨物で、金型となる硬
質材料である。３０１ａは被研磨面で、あらかた凹球面
形状に加工されている。３０２は研磨ヘッドである。３
０２ａは研磨作用面である。まず、図５（Ａ）に示すよ
うに、砥粒径ａ［μｍ］の研磨剤を用いて研磨が行われ
る。３０３は砥粒径ａ［μｍ］の砥粒であり、例えば砥
粒としてアルミナ＃５００が用いられる。ここで、研磨
ヘッド３０２の研磨作用面３０２ａの曲率ｒ1 ［μｍ］
は、被研磨物の仕上がるべき曲率ｒ0 ［μｍ］（すなわ
ち設計曲率）から砥粒径ａ［μｍ］を差し引いた値とな
るように設定されている。すなわち、ｒ1 ［μｍ］＝
（ｒ0 −ａ）［μｍ］である。このように構成されてい
て、研磨ヘッドと被研磨物とを相対運動させて、被研磨
物が研磨される。Therefore, the above-mentioned polishing method is inconvenient for a hard material for forming a mold used for press molding of glass lenses. The details will be described below. In FIG. 5, reference numeral 301 denotes an object to be polished, which is a hard material used as a mold. Reference numeral 301a denotes a surface to be polished, which is processed into a roughly concave spherical surface. 302 is a polishing head. Three
Reference numeral 02a is a polishing surface. First, as shown in FIG. 5A, polishing is performed using an abrasive having an abrasive grain size a [μm]. Reference numeral 303 is an abrasive grain having an abrasive grain size a [μm], and for example, alumina # 500 is used as the abrasive grain. Here, the curvature r 1 [μm] of the polishing surface 302 a of the polishing head 302
Is set to a value obtained by subtracting the abrasive grain size a [μm] from the curvature r 0 [μm] (that is, the design curvature) to be finished for the object to be polished. That is, r 1 [μm] =
(R 0 −a) [μm]. With such a configuration, the polishing head and the object to be polished are relatively moved to polish the object to be polished.
【０００６】次に、図５（Ｂ）に示すように、砥粒径ｂ
［μｍ］の研磨剤を用いて研磨が行われる。ここで、ｂ
＜ａとなるように、ｂの値が選択される。４０３は砥粒
径ｂ［μｍ］の砥粒であり、例えば砥粒としてアルミナ
＃８００が用いられる。同様に、研磨ヘッドと被研磨物
とを相対運動させて、被研磨物が研磨される。ここで、
同一の研磨ヘッド３０２を用いているので、その研磨作
用面３０２ａの曲率は同じくｒ1 ［μｍ］であり、従っ
て、砥粒径ｂ［μｍ］の研磨剤を用いたときの有効曲率
ｒ2 ［μｍ］は、ｒ2 ［μｍ］＝（ｒ1 ＋ｂ）［μｍ］
となり、図５（Ｂ）の点線で示した曲線となり、従っ
て、前述のｒ1 ［μｍ］＝（ｒ0 −ａ）［μｍ］より、
ｒ2 ［μｍ］＝（ｒ0 −ａ＋ｂ）［μｍ］となる。一
方、本来なされるべき曲率はｒ0 ［μｍ］で、前述の有
効曲率ｒ2 ［μｍ］との差は（ｒ2 −ｒ0 ）［μｍ］＝
（ｂ−ａ）［μｍ］＜０、すなわち、ｒ2 ＜ｒ0 とな
り、 有効曲率ｒ2 ［μｍ］の方が、本来なされるべき
曲率ｒ0 ［μｍ］より小さいので、同一の研磨ヘッド３
０２を用いて研磨すると、いわゆる中当たり現象とな
り、所望の形状とは異なって、ｒ2 ［μｍ］＝（ｒ0 −
ａ＋ｂ）［μｍ］という曲率の形状、すなわち、図５
（Ｂ）の一点鎖線で示したような形状に形成されてしま
う。このため、これを考慮して調整しながら研磨を行う
必要が生じることとなり、従って、研磨時間の増大とな
り不都合であった。また、この調整の限界を越えた状況
において、研磨不能となる事態も発生したりした。Next, as shown in FIG. 5B, the abrasive grain size b
Polishing is performed using a [μm] abrasive. Where b
The value of b is selected so that <a. Reference numeral 403 is an abrasive grain having an abrasive grain size b [μm], and for example, alumina # 800 is used as the abrasive grain. Similarly, the polishing head and the object to be polished are relatively moved to polish the object to be polished. here,
Since the same polishing head 302 is used, the curvature of its polishing surface 302a is also r 1 [μm], and therefore the effective curvature r 2 [when using an abrasive having an abrasive grain size b [μm] is r 2 [ μm] is r 2 [μm] = (r 1 + b) [μm]
Next, will curve shown by the dotted line of FIG. 5 (B), therefore, from the foregoing r 1 [μm] = (r 0 -a) [μm],
r 2 [μm] = (r 0 −a + b) [μm]. On the other hand, the curvature to be originally made is r 0 [μm], and the difference from the above-mentioned effective curvature r 2 [μm] is (r 2 −r 0 ) [μm] =
(B−a) [μm] <0, that is, r 2 <r 0 , and the effective curvature r 2 [μm] is smaller than the originally intended curvature r 0 [μm], so the same polishing head 3 is used.
When polishing with 02, a so-called center hit phenomenon occurs, and unlike the desired shape, r 2 [μm] = (r 0 −
a + b) [μm] curvature shape, that is, FIG.
(B) The shape is formed as shown by the alternate long and short dash line. For this reason, it becomes necessary to carry out polishing while adjusting in consideration of this, and therefore the polishing time is increased, which is inconvenient. Further, in a situation where this adjustment limit was exceeded, there were cases where polishing became impossible.
【０００７】本発明は、このような点に鑑みてなされた
ものであり、その目的とするところは、金属材料やセラ
ミック材料等の硬質材料の研磨において、最小限の研磨
時間で被研磨物を所定の曲面形状となるように研磨する
曲面研磨方法を提供することにある。The present invention has been made in view of the above points, and an object thereof is to polish an object to be polished in a minimum polishing time in polishing a hard material such as a metal material or a ceramic material. It is an object of the present invention to provide a curved surface polishing method that polishes to a predetermined curved surface shape.
【０００８】[0008]
【課題を解決するための手段】上記の目的を達成するた
め、本発明の曲面研磨方法は、研磨剤を介在させた状態
で被研磨物と研磨ヘッドとを相対運動させて被研磨物を
所定の曲面形状に研磨する曲面研磨方法において、砥粒
径の異なる複数種の研磨剤と、各砥粒径に対応した研磨
作用面に変更可能な研磨ヘッドとを用い、後段の研磨工
程における砥粒径が前段の研磨工程における砥粒径より
も小となるように研磨ヘッドの研磨作用面を変更させて
複数の研磨工程を施すことにより被研磨物を所定の曲面
形状に研磨するようにしたものである。また、本発明の
他の曲面研磨方法は、研磨作用面の変更は、各砥粒径に
対応した研磨作用面を有する複数の研磨ヘッドを用い
て、各砥粒径に対応させて研磨ヘッドを交換することに
より行うようにしたものである。In order to achieve the above object, the method for polishing a curved surface of the present invention is designed such that the polishing target and the polishing head are moved relative to each other with the polishing agent intervening. In the curved surface polishing method for polishing to a curved surface shape, a plurality of types of abrasives having different abrasive particle diameters and a polishing head capable of changing the polishing action surface corresponding to each abrasive particle diameter are used, and the abrasive grains in the subsequent polishing step are used. The polishing work surface of the polishing head is changed so that the diameter is smaller than the grain size in the previous polishing step, and a plurality of polishing steps are performed to polish the object to be polished into a predetermined curved surface shape. Is. Further, in another curved surface polishing method of the present invention, the polishing action surface is changed by using a plurality of polishing heads each having a polishing action surface corresponding to each abrasive grain size, and adjusting the polishing head corresponding to each abrasive grain size. This is done by exchanging them.
【０００９】[0009]
【作用】各砥粒径に対応した研磨作用面を有する研磨ヘ
ッドを複数設け、複数の段階の研磨工程により、被研磨
物が所定の曲面形状に研磨される。A plurality of polishing heads having a polishing action surface corresponding to each abrasive grain size are provided, and the object to be polished is polished into a predetermined curved shape by a plurality of stages of polishing process.
【００１０】[0010]
【実施例】本発明は、種々の構成の曲面研磨装置にて可
能であるが、好適なる一実施例として、ガラスレンズの
プレス成形に用いる金型を形成するための曲面研磨装置
に適用した場合について説明する。そこで、本発明の特
徴的な部分についての説明に先立って、まず、曲面研磨
装置の全体的な構成について、図１を用いて説明する。
図１は、本発明に用いられる曲面研磨装置を模式的に示
した概略側面図である。The present invention can be applied to a curved surface polishing apparatus having various configurations, but as a preferred embodiment, when the present invention is applied to a curved surface polishing apparatus for forming a mold used for press molding of glass lenses. Will be described. Therefore, before describing the characteristic part of the present invention, first, the overall configuration of the curved surface polishing apparatus will be described with reference to FIG.
FIG. 1 is a schematic side view schematically showing a curved surface polishing apparatus used in the present invention.
【００１１】１０１はカンザシで、一方端の先端部１０
１ａには、固定支持台１０２に固定保持された被研磨物
１０３が取付られている。カンザシ１０１は被研磨物１
０３と連係的に作動可能になっている。１０４は重り
で、図においてカンザシ１０１の上部側に配され、被研
磨物１０３側へ押圧力を付与するとともに調整可能に重
力負荷として作用する。１０５は基台で、図示しない本
体機構に固定されている。１０６はカンザシ支持台で、
支軸１０７にて基台１０５に調整可能に取付けられると
ともに固定可能になっている。１０８は安全ストッパー
腕で、ストッパー係止部１０９に係止されることによ
り、カンザシ支持台１０６が支軸１０７を回転軸として
左旋して先端側のカンザシ１０１が落下する等の事故を
防止する。Reference numeral 101 designates a kanzashi, which has a tip portion 10 at one end.
An object 103 to be polished, which is fixedly held by a fixed support 102, is attached to the la 1a. Kanzashi 101 is the object to be polished 1
It is possible to operate in cooperation with 03. Reference numeral 104 denotes a weight, which is arranged on the upper side of the arrow 101 in the drawing, applies a pressing force to the object 103 side and adjustably acts as a gravity load. A base 105 is fixed to a main body mechanism (not shown). 106 is a kanzashi support,
The support shaft 107 is adjustably attached and fixed to the base 105. Reference numeral 108 denotes a safety stopper arm, which is locked to the stopper locking portion 109, thereby preventing an accident such as the kanzashi support base 106 turning counterclockwise about the spindle 107 as a rotation axis and the tip side of the kanzashi 101 falling.
【００１２】１１０はカンザシ前進移動ネジで、図１に
おいてカンザシ１０１を左右方向に移動させて、左右方
向の位置を調整する。１１１はカンザシ前進移動固定ネ
ジで、カンザシ前進移動ネジ１１０でカンザシ１０１の
左右方向の位置を調整した後、該位置に固定する。１１
２はカンザシ上下移動固定ネジで、図１においてカンザ
シ１０１の上下方向の位置を調整した後、該位置に固定
する。１１３はカンザシ振り幅固定ネジで、カンザシ１
０１の先端部１０１ａ側の振り幅を調整するため基台１
０５及びカンザシ支持台１０６内に設けられている伝達
ベルト等の伝達機構を所定の状態に設定した後、該伝達
機構をその状態に固定する。Reference numeral 110 denotes a kanzashi forward movement screw, which moves the kanzashi 101 in the left-right direction in FIG. 1 to adjust the position in the left-right direction. Reference numeral 111 denotes a kanzashi forward movement fixing screw, which adjusts the position of the kanzashi 101 in the left-right direction by means of the kanzashi forward movement fixing screw 110 and then fixes the position. 11
The numeral 2 is a vertical movement fixing screw for adjusting the vertical position of the arrow 101 in FIG. 1 and then fixing it. 113 is a screw for fixing the swing width, which is 1
01 for adjusting the swing width of the tip portion 101a side
05 and the transmission mechanism such as a transmission belt provided in the Kanzashi support 106 are set in a predetermined state, and then the transmission mechanism is fixed in that state.
【００１３】１１４は駆動機構で、図示しない本体側の
モータの回転駆動により作動する。この作動は前述伝達
機構に伝達されてカンザシ１０１が揺動するようになっ
ている。１１５はひとつの研磨ヘッドで、図示しない本
体側の回転機構部に交換可能に装着されていて、該回転
機構により回転駆動させられる。研磨ヘッド１１５は、
この実施例では、研磨皿１１５ａが研磨ヘッド１１５に
一体に形成されている。１１５ｂは研磨作用面で、この
実施例では凸球面形状となっている。被研磨物１０３
は、この実施例では、ガラスレンズのプレス成形に用い
る金型となる金属材料で、所望の形状に近い凹球面形状
１０３ａにあらかた形成されている。カンザシ１０１の
先端部１０１ａは凸球形状に形成され、固定支持台１０
２側は、先端部１０１ａの球径よりわずか大なる径の凹
球面形状に形成されていて、互いに回転運動が可能にな
っている。従って、カンザシ１０１の揺動によりみそ摺
り運動がなされ、該運動に従い、固定支持台１０２が揺
動回転し、固定支持台１０２と一体の被研磨物１０３が
同様に揺動回転運動をする。これにより研磨処理がなさ
れる。なお、研磨ヘッド１１５の研磨作用面１１５ｂと
被研磨物１０３の被研磨面１０３ａとの間に研磨剤１１
６を介在させた状態で研磨処理が行われる。Reference numeral 114 is a drive mechanism, which is operated by rotational driving of a motor (not shown) on the main body side. This operation is transmitted to the above-mentioned transmission mechanism so that the kanzashi 101 swings. Reference numeral 115 denotes one polishing head, which is replaceably mounted on a rotating mechanism portion on the main body side (not shown), and is rotationally driven by the rotating mechanism. The polishing head 115 is
In this embodiment, the polishing dish 115a is formed integrally with the polishing head 115. A polishing surface 115b has a convex spherical surface in this embodiment. Workpiece 103
In this embodiment, is a metallic material that becomes a mold used for press molding of a glass lens, and is roughly formed into a concave spherical surface shape 103a close to a desired shape. The tip 101a of the kanzashi 101 is formed in a convex spherical shape, and the fixed support 10
The second side is formed in a concave spherical surface shape having a diameter slightly larger than the spherical diameter of the tip portion 101a, and can rotate with respect to each other. Therefore, the rocking motion of the kanzashi 101 causes a rubbed motion, and the fixed support base 102 rocks and rotates in accordance with the motion, and the object 103 to be ground integrated with the fixed support base 102 also rocks and rotates. Thereby, the polishing process is performed. In addition, the polishing agent 11 is provided between the polishing surface 115 b of the polishing head 115 and the surface 103 a of the object 103 to be polished.
The polishing process is performed with 6 interposed.
【００１４】以上の曲面研磨装置では、被研磨物１０３
が凹球面形状に形成される場合にて説明しており、一般
的に、凹球面形状となる物の方をカンザシ機構に取付け
るという例に従って被研磨物１０３をカンザシ１０１に
取付ける構成としたが、研磨ヘッド１１５をカンザシ１
０１に取り付ける構成とした曲面研磨装置としてもよ
い。In the above curved surface polishing apparatus, the object 103 to be polished is
Is described as having a concave spherical shape, and generally, the object 103 to be polished is attached to the Kanzashi 101 according to an example in which an object having a concave spherical shape is attached to the Kanzashi mechanism. 1 for polishing head 115
The curved surface polishing device may be configured to be attached to No. 01.
【００１５】次に、研磨工程について、図２を用いて説
明する。図２においては、被研磨物をカンザシ機構に取
付けた構成としている。図２（Ａ）は、研磨工程の第１
段階目を示す。まず、図２（Ａ）に示すように、砥粒径
Ａ［μｍ］の研磨剤を用いて研磨が行われる。１は砥粒
径Ａ［μｍ］の砥粒であり、例えば砥粒としてダイヤモ
ンドが用いられる。この工程で用いられる研磨ヘッド２
は、研磨皿２ａが研磨ヘッド２に一体に形成されてい
て、凸球面形状の研磨作用面２ｂを有しており、研磨作
用面２ｂの曲率Ｒ2b［μｍ］は、被研磨物の仕上がるべ
き曲率Ｒ0 ［μｍ］（すなわち設計曲率）から砥粒径Ａ
［μｍ］を差し引いた値となるように設定されている。
すなわち、Ｒ2b［μｍ］＝（Ｒ0 −Ａ）［μｍ］であ
る。このように構成されていて、研磨ヘッドと被研磨物
とを相対運動させて、被研磨物が研磨される。Next, the polishing process will be described with reference to FIG. In FIG. 2, the object to be polished is attached to the knitting mechanism. FIG. 2A shows the first polishing step.
The stage is shown. First, as shown in FIG. 2A, polishing is performed using an abrasive having an abrasive grain size A [μm]. Reference numeral 1 is an abrasive grain having an abrasive grain size A [μm], and for example, diamond is used as the abrasive grain. Polishing head 2 used in this step
Has a polishing dish 2a formed integrally with the polishing head 2 and has a polishing surface 2b having a convex spherical shape, and the curvature R 2b [μm] of the polishing surface 2b should be the finish of the object to be polished. From the curvature R 0 [μm] (that is, the design curvature) to the abrasive grain size A
The value is set to be a value obtained by subtracting [μm].
That is, R 2b [μm] = (R 0 −A) [μm]. With such a configuration, the polishing head and the object to be polished are relatively moved to polish the object to be polished.
【００１６】次に、図２（Ｂ）に示すように、砥粒径Ｂ
［μｍ］の研磨剤を用いて、第２の段階の研磨が行われ
る。なお、Ｂ＜Ａとなるように研磨剤が選択される。３
は砥粒径Ｂ［μｍ］の砥粒であり、例えば砥粒としてダ
イヤモンドが用いられる。第２の段階では、研磨ヘッド
４が用いられる。研磨ヘッド４は、研磨ヘッド２と同様
に、研磨皿４ａが研磨ヘッド４に一体に形成されてい
て、凸球面形状の研磨作用面４ｂを有しているが、研磨
作用面４ｂの曲率は、研磨ヘッド２の研磨作用面２ｂの
曲率とは異なっている。すなわち、研磨ヘッド４の研磨
作用面４ｂの曲率Ｒ4b［μｍ］は、被研磨物の仕上がる
べき曲率Ｒ0 ［μｍ］（すなわち設計曲率）から砥粒径
Ｂ［μｍ］を差し引いた値となるように設定されてい
る。すなわち、Ｒ4b［μｍ］＝（Ｒ0 −Ｂ）［μｍ］で
ある。そして、同様に、研磨ヘッドと被研磨物とを相対
運動させて、被研磨物が研磨される。Next, as shown in FIG. 2B, the abrasive grain size B
The second stage polishing is performed using a [μm] abrasive. The abrasive is selected so that B <A. Three
Is an abrasive grain having an abrasive grain size B [μm], and for example, diamond is used as the abrasive grain. In the second stage, the polishing head 4 is used. Similar to the polishing head 2, the polishing head 4 has a polishing dish 4a formed integrally with the polishing head 4 and has a polishing action surface 4b having a convex spherical surface shape, but the curvature of the polishing action surface 4b is It is different from the curvature of the polishing action surface 2b of the polishing head 2. That is, the curvature R 4b [μm] of the polishing action surface 4b of the polishing head 4 is a value obtained by subtracting the abrasive grain size B [μm] from the curvature R 0 [μm] (that is, the design curvature) to finish the object to be polished. Is set. That is, R 4b [μm] = (R 0 −B) [μm]. Then, similarly, the polishing head and the object to be polished are relatively moved to polish the object to be polished.
【００１７】以上のように、砥粒径の異なる複数種の研
磨剤に対し、各砥粒径に対応した研磨作用面を有する複
数の研磨ヘッドを用意して、後段の研磨工程における砥
粒径が前段の研磨工程における砥粒径よりも小となるよ
うに、各砥粒径に対応させて研磨ヘッドを交換すること
により、複数の研磨工程を行うことにより、被研磨物を
所定の曲面形状、この実施例では球面形状に研磨するこ
とができる。すなわち、研磨ヘッドの研磨作用面すなわ
ち研磨皿の曲率をＲ、被研磨物の仕上がるべき曲率すな
わち被研磨物の設計曲率をＷ、そして砥粒径をｒとする
と、Ｒ＝Ｗ−ｒとなる研磨ヘッドをあらかじめ作成して
おいて、研磨ヘッドを交換して複数の研磨工程を施せば
よい。As described above, for a plurality of types of abrasives having different abrasive grain sizes, a plurality of polishing heads having a polishing surface corresponding to each abrasive grain size are prepared, and the abrasive grain sizes in the subsequent polishing step are prepared. Is smaller than the abrasive grain size in the previous polishing step, by exchanging the polishing head for each abrasive grain size and performing a plurality of polishing steps, the object to be polished has a predetermined curved surface shape. In this embodiment, it can be polished into a spherical shape. That is, R is W = r, where R is the curvature of the polishing surface of the polishing head, that is, the curvature of the polishing dish, W is the curvature to be the object to be polished, that is, the designed curvature of the object to be polished, and the abrasive grain size is r. The head may be prepared in advance, the polishing head may be replaced, and a plurality of polishing steps may be performed.
【００１８】このようにして、例えば図３に示すような
研磨工程を施すことにより、所望の凸球面形状となる。
図３は、研磨工程を示したもので、ラップ工程は、Ｓ１
荒仕上、Ｓ２中仕上、Ｓ３仕上の３段階の工程から構成
され、各段階の工程で用いられる研磨剤は、順に砥粒径
が小さくなるように異なった粒径のものが選択される。
この例では、第１段階Ｓ１の荒仕上ではダイヤモンド５
μｍ又は１５μｍ、第２段階Ｓ２の中仕上ではダイヤモ
ンド３μｍ、第３段階Ｓ３の仕上ではダイヤモンド１μ
ｍが用いられる。この実施例では、ラップ工程（Ｓ１〜
Ｓ３）では、研磨ヘッドとして鋳物が用いられ、荒仕上
Ｓ１、中仕上Ｓ２、仕上Ｓ３の３段階の工程において、
それぞれの砥粒径に対応させた研磨ヘッドを用いて行わ
れ、最後のポリッシュ工程Ｓ４では、研磨ヘッドとして
ポリウレタンが、砥粒としてダイヤモンド１μｍ又はコ
ロイダルシリカが用いられる。In this way, a desired convex spherical surface shape is obtained by performing the polishing process as shown in FIG. 3, for example.
FIG. 3 shows the polishing step, and the lapping step is S1.
It comprises three steps of rough finishing, S2 medium finishing and S3 finishing. The abrasives used in each step are selected to have different particle diameters so that the abrasive particle diameter becomes smaller in order.
In this example, diamond 5 is used in the rough finishing of the first stage S1.
μm or 15 μm, diamond 3 μm for intermediate finishing of the second stage S2, diamond 1 μ for finishing of the third stage S3
m is used. In this embodiment, the lapping process (S1 to
In S3), a casting is used as a polishing head, and in a three-step process of rough finishing S1, intermediate finishing S2, and finishing S3,
The polishing is performed by using a polishing head corresponding to each abrasive grain size. In the final polishing step S4, polyurethane is used as the polishing head and diamond 1 μm or colloidal silica is used as the abrasive grains.
【００１９】この実施例においては、加工時間が従来と
比較して６０〜７０％の削減ができる。また、形状変化
（バラツキ）は、従来は２μｍ程度あったものが、１μ
ｍ程度以下に抑えることができる。In this embodiment, the processing time can be reduced by 60 to 70% as compared with the conventional case. In addition, the change in shape (variation) was about 2 μm in the past, but 1 μm.
It can be suppressed to about m or less.
【００２０】また、上述のように、本発明の曲面研磨方
法は、砥粒径の異なる複数種の研磨剤より選択した研磨
剤を供給する供給手段と、各砥粒径に対応した研磨作用
面を有する複数の研磨ヘッドより選択した研磨ヘッドに
交換可能な交換手段とを備えた曲面研磨装置を用いるこ
とにより、被研磨物を所望の球面形状とすることができ
る。Further, as described above, in the curved surface polishing method of the present invention, the supply means for supplying the polishing agent selected from a plurality of types of polishing agents having different polishing particle diameters, and the polishing action surface corresponding to each polishing particle diameter. By using the curved surface polishing apparatus provided with the replacement means capable of replacing the polishing head selected from the plurality of polishing heads having the above, it is possible to make the object to be polished into a desired spherical shape.
【００２１】[0021]
【発明の効果】上述のように、本発明においては、砥粒
径の異なる複数種の研磨剤と、各砥粒径に対応した研磨
作用面に変更可能な研磨ヘッドとを用い、後段の研磨工
程における砥粒径が前段の研磨工程における砥粒径より
も小となるように研磨ヘッドの研磨作用面を変更させて
複数の研磨工程を施すことにより被研磨物を所定の曲面
形状に研磨するようにした曲面研磨方法とすることによ
り、また他の方法として、研磨作用面の変更は、各砥粒
径に対応した研磨作用面を有する複数の研磨ヘッドを用
いて、各砥粒径に対応させて研磨ヘッドを交換すること
により行うようにした曲面研磨方法とすることにより、
金属材料やセラミック材料等の硬質材料の研磨におい
て、最小限の研磨時間で被研磨物を所定の曲面形状とす
ることができる。As described above, according to the present invention, a plurality of types of abrasives having different abrasive grain sizes and a polishing head capable of changing the polishing action surface corresponding to each abrasive grain size are used, and the subsequent polishing step is performed. The object to be polished is polished into a predetermined curved surface shape by changing the polishing surface of the polishing head so that the abrasive grain size in the process is smaller than the abrasive grain size in the preceding polishing process and performing a plurality of polishing processes. With this curved surface polishing method, or as another method, the polishing action surface can be changed by using a plurality of polishing heads each having a polishing action surface corresponding to each abrasive grain size. By using the curved surface polishing method which is performed by replacing the polishing head,
In polishing a hard material such as a metal material or a ceramic material, the object to be polished can have a predetermined curved surface shape in a minimum polishing time.
【図１】本発明に用いられる曲面研磨装置を模式的に示
した概略側面図である。FIG. 1 is a schematic side view schematically showing a curved surface polishing apparatus used in the present invention.
【図２】本発明の一実施例を示し、研磨要部を示す概略
断面図である。FIG. 2 is a schematic cross-sectional view showing an essential part of polishing according to one embodiment of the present invention.
【図３】本発明の一実施例を示し、研磨工程を示すフロ
ーチャート図である。FIG. 3 is a flowchart showing an embodiment of the present invention and showing a polishing step.
【図４】従来例を示し、研磨工程を示すフローチャート
図である。FIG. 4 is a flowchart showing a conventional example and showing a polishing process.
【図５】従来例を示し、研磨要部を示す概略断面図であ
る。FIG. 5 is a schematic cross-sectional view showing a conventional example and a polishing main part.
１、３ 砥粒 ２、４ 研磨ヘッド ２ａ、４ａ 研磨皿 ２ｂ、４ｂ 研磨作用面 １０１ カンザシ １０１ａ 先端部 １０２ 固定支持台 １０３ 被研磨物 １０３ａ 被研磨面 1, 3 Abrasive grains 2, 4 Polishing heads 2a, 4a Polishing plates 2b, 4b Polishing action surface 101 Kanzashi 101a Tip part 102 Fixed support base 103 Polishing object 103a Polishing surface
Claims (2)
磨ヘッドとを相対運動させて被研磨物を所定の曲面形状
に研磨する曲面研磨方法において、 砥粒径の異なる複数種の研磨剤と、各砥粒径に対応した
研磨作用面に変更可能な研磨ヘッドとを用い、後段の研
磨工程における砥粒径が前段の研磨工程における砥粒径
よりも小となるように研磨ヘッドの研磨作用面を変更さ
せて複数の研磨工程を施すことにより前記被研磨物を所
定の曲面形状に研磨することを特徴とした曲面研磨方
法。1. A curved surface polishing method for polishing an object to be polished into a predetermined curved surface shape by relatively moving the object to be polished and a polishing head with an abrasive interposed, wherein a plurality of types of polishing having different abrasive grain sizes are used. Agent and a polishing head capable of changing the polishing action surface corresponding to each abrasive grain size, so that the abrasive grain size in the subsequent polishing step is smaller than the abrasive grain size in the previous polishing step. A method of polishing a curved surface, characterized in that the object to be polished is polished into a predetermined curved surface shape by changing a polishing surface and performing a plurality of polishing steps.
た研磨作用面を有する複数の研磨ヘッドを用いて、各砥
粒径に対応させて研磨ヘッドを交換することにより行う
こととした請求項１記載の曲面研磨方法。2. The polishing action surface is changed by using a plurality of polishing heads each having a polishing action surface corresponding to each abrasive grain size and exchanging the polishing heads corresponding to each abrasive grain size. The curved surface polishing method according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23035194A JPH0871901A (en) | 1994-08-31 | 1994-08-31 | Curved surface polishing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23035194A JPH0871901A (en) | 1994-08-31 | 1994-08-31 | Curved surface polishing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0871901A true JPH0871901A (en) | 1996-03-19 |
Family
ID=16906502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23035194A Pending JPH0871901A (en) | 1994-08-31 | 1994-08-31 | Curved surface polishing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0871901A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102909641A (en) * | 2012-11-09 | 2013-02-06 | 昆山市大金机械设备厂 | Dome polishing device |
| CN105322065A (en) * | 2014-07-08 | 2016-02-10 | 兆远科技股份有限公司 | Curve-surface substrate manufacture method and forming device |
-
1994
- 1994-08-31 JP JP23035194A patent/JPH0871901A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102909641A (en) * | 2012-11-09 | 2013-02-06 | 昆山市大金机械设备厂 | Dome polishing device |
| CN105322065A (en) * | 2014-07-08 | 2016-02-10 | 兆远科技股份有限公司 | Curve-surface substrate manufacture method and forming device |
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