JPH0857719A - Fine positioning method and device - Google Patents

Abstract

PURPOSE: To provide a simple, secure, and compact structure, and prevent deformation by shock or pressure of engagement of an adjusting member at the time of adjustment so as to provide high precision positioning in a fine positioning device formed to be position-adjustable from the external. CONSTITUTION: A socket part 14 to be engaged with a head part 8 of an adjusting bolt 7 of a fine positioning device 5 is applied to the head part 8 of the adjusting bolt 7 without being rotated, it is retracted when they are not engaged, it is rotated for a micro-angle and applied again, these procedures are repeated till they are engaged with each other, and after they are engaged, the adjusting bolt 7 is rotated by the socket part 14 for a specified rotation angle for positioning. After positioning, the socket part 14 is rotated reversely for a micro-angle to provide a micro-gap between the head part 8 of the adjusting bolt 7 and the socket part 14 before retracting.

Description

Detailed Description of the Invention

[0001]

FIELD OF THE INVENTION The present invention is
The present invention relates to a minute positioning method and device for angle or positioning, which can relatively move a component on a base surface or an inclination or distance between a base and a table.

[0002]

2. Description of the Related Art Conventionally, a work is mounted on a table, such as a machine tool table, which is capable of adjusting the position of parts on the surface of the base and adjusting the inclination or distance between the base and the table by screw connection. To do this, it is necessary to determine the angle and level. An index device or the like that meshes a pair of teeth or balls having a fine pitch is used for indexing or the like. Further, the level, height and the like were adjusted using wedges, push screws and the like.
However, in recent years, there has been an increasing demand for ultra-precision processing in ceramic processing, wafer processing, etc., and in order to improve processing accuracy, positioning on the order of microns and nanometers has been required.

For such fine positioning control, for example, a so-called fine alignment table is used. As shown in FIG. 5, this is a seesaw-shaped table 62 having a one-dimensional prismatic hinge 64 at one end of the asymmetric shape.
Is provided with a female thread portion 69 at the other end thereof, and one end of a push screw 70 screwed to this female thread is provided on the base side so as to be fixed in the axial direction and rotatable. The table can be moved up and down. Further, rotation of the push screw is performed by the measuring device 22 for measuring the work position by the servo motor 66 controlled by the NC device or the like while feeding back the measurement signal to automate the positioning and perform highly accurate positioning. I have to. In addition, in JP-A-4-23109, a push screw,
A method of directly controlling the table position by using a piezoelectric element or the like instead of the servo motor is disclosed.

However, in these methods, piezoelectric elements and
Since the servo motor is installed on the table or the base, it is necessary to connect a control cable, etc., and the micro alignment table cannot rotate infinitely, and the table rotates infinitely. Lapping machine, rotary table type surface grinder, etc. There was a problem that it could not be used for.

On the other hand, in Japanese Utility Model Publication No. 6-39030,
Taking a magnetic recording / reproducing apparatus (VTR) as an example, the tip engaging portion of the adjusting jig is brought into contact with the engaging portion formed at the tip of the attachment adjusting component of the VTR head portion, and the adjusting jig is screwed. Rotate with a rotational force less than the tightening force to insert and contact both engaging parts with each other, and then rotate the adjustment jig with a rotational force greater than the screw tightening force to finely adjust the position of the mounting adjustment component. Then, a position adjusting method for finely adjusting the positions of the screw-attached mounting parts and the like is disclosed. With this configuration, it is possible to perform position adjustment with high accuracy and speed, and automation can be achieved, which has effects such as improvement in work efficiency, quality, and reliable manufacturing.

According to such a positioning device, even in a minute positioning device such as a minute alignment table, the positioning can be adjusted from the outside of the table and the base side, infinite rotation is possible, and high accuracy is obtained. To be

[0007]

However, in such a structure, since the adjusting jig tip engaging portion is brought into contact with the mounting adjusting component while rotating the adjusting jig, a shock at the time of insertion contact (fitting) is caused. Occurs in a micro-positioning device such as a micro-alignment table that must be controlled on the order of sub-micron or micron.
Not only the error is amplified by the vibration but also the head of the adjusting bolt is deformed and the meshing accuracy is deteriorated, so that there is a problem that it is not possible to secure the fine positioning accuracy equivalent to the accuracy of the conventional push screw method.

Further, in Japanese Utility Model Publication No. 6-39030, a contact force is applied to the engaging portion, so that distortion due to the force acting between the engaging parts or the influence of residual stress generated after removing the force is prevented. There is a problem that the contact state and the contact state may be compared and adjusted. Furthermore, the control is complicated until the engaging part is fitted, the rotational torque after the fitting is detected, the fitting is confirmed, and the rotating speed is changed. The setting of was also complicated. Furthermore, when a plurality of minute alignment tables and the like are provided for mass production, the device becomes large, and the number of control axes of the NC control device is limited, so that a large number of control devices cannot be installed. Or, there was a problem that it became complicated. Further, there is a problem that the price becomes expensive.

The object of the present invention is to enable positioning adjustment from the outside of the table and the base side of a micro positioning device such as a micro alignment table, infinite rotation, and
In the minute positioning method and device, high accuracy equivalent to the accuracy of the conventional push screw method, which is easy and reliable, does not deteriorate due to shock of fitting during deformation, deformation due to pressing force, and accuracy deterioration. It is an object of the present invention to provide a fine positioning method and device. Another object of the present invention is to position a plurality of tables with a smaller number of control devices. Furthermore, it aims at miniaturization of a micro positioning device.

[0010]

In order to achieve the above object, according to the present invention, an adjusting bolt provided for inclining or relatively moving a positioning member such as a component or a table on a base surface is rotated. A fine positioning device for fine adjustment, for example, one of which is rotatably attached to the base or the table, and the other of which is a shaft via a screw, in order to tilt or move the table provided on the base relative to the base surface. A fine positioning device that has an adjusting bolt that is movably moved in a direction and that is screwed into a table or a base, and is capable of fine positioning by rotating the adjusting bolt, and has a rotation direction locking portion at the tip of the adjusting bolt. A socket provided with a head, separated from the member to be positioned, capable of meshing with the locking portion of the head of the adjusting bolt and slidable in the axial direction, and the socket moved in the axial direction. The axial movement member, a cushioning member provided between the socket portion and the axially movable member, and a rotary member for rotation control socket unit provided.

Then, the socket is moved to the adjusting bolt side by the axial moving member, and when the socket portion and the adjusting bolt are fitted, the rotating member rotates the adjusting bolt through the socket portion to position the positioned member. I do.
On the other hand, when the socket part interferes with the adjustment bolt head part and cannot be fitted, the socket part is once retracted, rotated by a small angle and moved to the adjustment bolt side again, so that the socket part fits with the adjustment bolt head part. I solved it by providing a way to make it repeat until.

Further, at the time of detaching the socket portion, it is preferable that the socket portion is reversely rotated by a small angle to provide a fitting gap and then the socket portion is retracted.

More specifically, a head having a rotational direction locking portion is provided at the tip of the adjusting bolt, and the head is separated from the member to be positioned so that it can mesh with the locking portion of the head of the adjusting bolt and is slidable in the axial direction. A socket portion, an axial movement member that axially moves the socket portion, a cushioning member that is provided between the socket portion and the axial movement member, a rotation member that controls the rotation of the socket portion, and a cover member. A measuring unit that measures the position of a measurement object such as a workpiece fixed to the positioning member or the positioned member, a detection unit that detects whether the socket portion and the adjustment bolt head are in contact with each other, or a fitting target, And a command unit for commanding the position of a measured object such as a workpiece fixed to the positioning member or the positioned member. Furthermore, the socket is retracted by the non-fitting signal of the detection unit, the rotating unit is rotated by a small angle, and the socket unit is moved again in the axial direction.The signal of the measuring unit is fed back by the fitting signal and the rotating member is controlled by the command signal. A control unit is provided.

[0014]

[Operation] The socket portion is moved to the adjustment bolt side by the axial movement member. When the socket portion and the adjustment bolt are fitted together, the adjustment bolt becomes rotatable by the socket portion. The member to be positioned can be positioned by rotating the adjusting bolt through the section.
On the other hand, when the socket portion and the adjustment bolt cannot be fitted, when the socket portion is moved toward the adjustment bolt side, the positions of the adjustment bolt locking portion and the socket locking portion shift,
Interfere with each other. At this time, since the buffer member is provided between the socket portion and the axially moving member, the axial force generated by the axially moving member is reduced by the buffering member so that the adjusting bolt and the positioned member are not subjected to excessive force. .

Next, the socket is retracted and rotated by a small angle so that the socket does not come into contact with the adjusting bolt. As a result, the relative position of the locking portion of the adjusting bolt and the locking portion of the socket portion is changed. Then, the socket portion is moved to the adjustment bolt side again, and the operation is repeated until the locking portion of the socket portion and the locking portion of the adjustment bolt head are in phase with each other and fitted, so that the socket portion separated from the positioned member Can be positioned by.

When the socket is detached, it is rotated by a small angle reversely,
Since the fitting gap is provided, there is no interference between the adjustment bolt and the socket when the socket is retracted, and there is no deformation or malfunction.
There is no difference in set values.

More specifically, the retreat of the socket portion or the rotation of the socket portion is selected by the detection portion for detecting whether or not the socket portion and the head portion of the adjusting bolt are fitted. When the rotation of the socket is selected, the position signal is fed back by the measuring unit that measures the table position or the position of the workpiece such as the workpiece fixed to the table, and the measurement of the table position or the workpiece fixed to the table is performed. Feedback control of the positioning of the table is performed by comparing and controlling the rotation member by the signal from the command unit that commands the position of the object, rotating the rotating member, and rotating the adjusting bolt via the socket unit. At this time, only the rotational force is applied to the engaging portion and no axial force is applied.

[0018]

Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is an explanatory view of a first embodiment of the present invention.
FIG. 2 illustrates a method of controlling the head and socket of the adjusting bolt according to the present invention. In FIG. 1, a fine alignment table (angle adjustment table) 5 in which a table 2 to which a work 1 can be fixed is provided on a base 3 via a one-dimensional prism hinge 4 is, for example, a machining table of a machine tool (not shown). It is provided in. Micro alignment table 5
Bearing 6 whose lower end is fixed to the base 3 on the side opposite to the hinge
There is provided an adjusting bolt 7 which is axially fixed and rotatable via the. The head portion of the adjusting bolt is provided with a locking portion 8 having a hexagonal cross section. A female screw 9 is provided at a position corresponding to the adjustment bolt on the side opposite to the hinge of the table 2 and is screwed with the adjustment bolt 7.

A spline shaft 10 having a spline in its inner diameter is rotatably supported by a bearing (not shown) so that the axis coincides with the axis of the adjusting bolt 7 of the fine alignment table 5 on the machining table of the machine tool. It is fixed to the side. A servo motor 11, which is a rotating member, is attached to the upper end of the spline shaft 10. Spline shaft 1
A shaft 12 that is fitted to a spline 0 and is movable in the vertical direction is connected to a socket portion 14 with a connecting plate 13 interposed therebetween. A locking portion 15 having a hole having a hexagonal cross section is provided at the lower end of the socket portion 14 so that it can be engaged with the hexagonal head portion of the head portion of the adjusting bolt. The connecting plate 13 is rotatably fixed to the shaft 12 via a bearing so as to be rotatable in the axial direction, and further extends in a direction perpendicular to the axis. The extending portion 13a has a lower end fixed to the machine tool main body, and a support plate 17a provided at a rod tip of an air cylinder 17 which is a movable member that can move in the vertical direction.
The upper support plate 17b provided on the upper part of the rod via the spring 18 so that the connecting plate 13 is supported in the vertical direction. Further, the shaft 12 and the socket portion 14 are supported by the air cylinder 17 via the connecting plate 13.

The air cylinder 17 has a socket 1 at the upper end.
4 can be moved to a position above the position where the adjustment bolt locking portion 8 separates (hereinafter referred to as a disengagement position), and to a position where the socket portion and the adjustment bolt head portion fit at the lower end (hereinafter referred to as a meshing position). The spring 18 has a bending length that is larger than the distance from the meshing position of the socket portion 14 to the separating position. An iron plate 16 is provided at one end of the connecting plate 13.
Is provided, and a proximity switch 19 that outputs a meshing signal is provided on the main body side while the socket is in the disengaged position from the meshed position.

A servo amplifier 20 for controlling the servo motor 11 and an NC controller 21 for controlling the servo amplifier are provided in a machine tool body side controller (not shown). A measuring device 22 for feeding back the table position or work position signal to the servo motor through the NC control unit, and a counter 23 for converting a signal from the measuring device into an input signal to the NC control unit are provided. The measuring device 22 is composed of, for example, a plunger type measuring device for measuring the position of the work by directly contacting the tip of the work, a microscope and a camera capable of measuring the work in a non-contact manner. In the case of the plunger type measuring device, an air cylinder or the like for bringing the measuring device into or out of contact with the work is provided, and in the microscope and the camera, it is attached to the machine tool main body side. The counter 23 is a numerical converter when the measuring device 22 is a plunger type, and an image processing device is used when the measuring device 22 is a microscope, a camera, or the like.

In the positioning mode, when the air cylinder 17 descends while the servo motor is stopped and the engagement signal of the proximity switch 19 is input, the NC control unit 21 indicates the supported position by a feedback signal from the measuring instrument 22. The servo motor is rotated while being controlled by. Further, even if the air cylinder 17 descends, if the meshing signal is not input, the air cylinder is once raised and the minute angle servomotor 11 is rotated to change the angle of the socket portion 14 by a minute angle and to rotate the air cylinder again. It is designed to descend.

The operation of the first embodiment of the present invention will be described. Referring to FIG.
When is set to the positioning position and the positioning mode is started, the air cylinder 17 descends and the socket portion 14 descends via the connecting plate 13. As shown in (c-3) of FIG. 2, when the socket portion 14 and the locking portion 8 of the adjusting bolt 7 are fitted together, the socket portion reaches the meshing position without any resistance. Since the meshing signal is input from the proximity switch 19 at the meshing position, the servo motor is rotated while the spline 10, the shaft 12, and the socket portion 14 are rotated while being controlled by the feedback signal from the measuring instrument 22,
As shown in (d), the adjustment bolt 7 is rotated through the locking portion 8 that meshes with the locking portion 15 of the socket portion, and the table 2 is raised and positioned until the signal from the measuring instrument reaches the specified value. After the positioning is completed, as shown in FIG. 2 (e), the socket portion is slightly reversely rotated to provide a meshing gap, and the air cylinder 17 is lifted to return the socket portion to the original position.

On the other hand, when the engaging portion 15 of the socket portion 14 and the engaging portion 8 of the adjusting bolt 7 are not fitted, for example, as shown in FIG. 2 (a-3), the air cylinder is lowered. On the other hand, since the socket cannot be lowered, the spring 18
Is compressed. Since the spring 18 pushes the connecting plate 13 with a very weak force, the adjusting bolt is not deformed, and the fine alignment table 5
The deformation of is small. Even when the air cylinder reaches the lower end, the connecting plate 13 does not descend due to the elastic compression of the spring 18, so that the iron plate 16 also does not reach the proximity switch 19 and no engagement signal is input from the proximity switch, so the air cylinder moves up. The servo motor is slightly rotated at the rising end to shift the phase of the locking portion 15 of the socket portion as shown in FIG. 2B-2, and the air cylinder is lowered again.

However, if the phases do not match as shown in FIG. 2 (b-3), the air cylinder is raised and the servo motor is slightly rotated again at the rising end, as shown in FIG. 2 (c). -2), the phase of the locking portion 15 of the socket portion is shifted, and the operation is repeated until the engagement is achieved as shown in (c-3) of FIG. As the air cylinder moves up and down without rotating the socket to engage with each other, there is no shock at the time of engagement, there is no axial pressing force, there is no deformation of the device, error due to vibration, deformation of the adjustment bolt, etc., and high positioning accuracy can be secured. . When the phases of the engaging portions are aligned and engaged with each other, the positioning control is performed as described above. After the positioning is completed, for example, the machine tool table rotates and the work on the fine alignment table 5 is processed. Since the micropositioning table 5 is not provided with a drive device, it can rotate infinitely without wiring, etc. Moreover, the micropositioning table is small and simple, and the accuracy of the table itself is improved. It is possible to obtain higher positioning accuracy without powder or the like adhering to the table, the measuring device, the servomotor or the socket.

It should be noted that the adjusting bolt 7 after meshing may be rotated leftward or rightward (the table is lowered or raised), but it is always rotated rightward (the table is raised) during positioning, and when the table position is lowered, it is temporarily moved from a predetermined position. By rotating the table to the left (downward) and rotating it to the right (upward), the backlash can be prevented.

Next, a second embodiment of the present invention will be described. The same parts as those in the first embodiment described above are designated by the same reference numerals, and a part of the description will be omitted. In the second embodiment, a plurality of adjusting bolts and minute table positioning devices are provided, and after all the socket parts and adjusting bolts are fitted, the rotating member is rotated for positioning. As shown in FIG. 3, the table 42 and the base 43 can be moved relative to each other. The base 43 and the table 42 are integrated with the first embodiment described above, and the base 43
Two adjustment bolts 7 are provided at both ends of the table, female screws 9 for screw-fitting the adjustment bolts are provided on the table, and sockets 14 for rotating the adjustment bolts are provided respectively.

By doing so, for example, the table can be moved up and down by rotating the plurality of adjusting bolts, so that the height and inclination of the table can be arbitrarily set, and the table can be inclined and the relative position can be moved. You can also The adjustment bolts and the like are not limited to two and may be three or four. If the socket part and the adjusting bolt locking part are fitted separately or simultaneously, and then the socket part is simultaneously rotated in real time for positioning, mutual interference of movements can be canceled out, so positioning can be performed at high speed. . In addition,
Even in such a case, the control becomes complicated by the method of meshing and fitting while rotating.

A third embodiment of the present invention shown in FIG. 4 will be described. The same parts as those in the first and second embodiments described above are designated by the same reference numerals, and a part of the description will be omitted. In the third embodiment, a plurality of tables are provided and a single or a plurality of minute table positioning devices, which are smaller than the number of tables, are provided. As shown in FIG. 4A, a drive device 52 including the socket portion 14, the servo motor 11, etc. is provided on the main body side. Further, as shown in FIG. 4B, a plurality of minute positioning tables 5 are arranged on the machine tool processing table 51. Adjustment bolts 7 are provided on the respective tables, and are arranged so that the adjustment bolts can be engaged with the socket portion 14 of the drive unit 52 by rotating the processing table.

According to such a configuration, the position of a plurality of minute positioning tables 5 can be controlled by one driving device 52, and it is not necessary to dispose a plurality of expensive control devices. In addition,
As in the second embodiment, the fine positioning table 5 is provided with a plurality of adjusting bolts, and a plurality of driving devices having a socket portion capable of driving the plurality of adjusting bolts are provided. It goes without saying that the height and the like can be adjusted.

In the embodiment, the positioning device for the vertical tilt and height position has been described, but it goes without saying that it is possible even when the machining table is in a vertical or oblique state. Further, although the drive unit having the socket portion is attached to the machine tool main body, it can be attached to the wrist of the robot. In this case, the fine positioning table can be arranged freely. The shape of the locking portion is not limited to a hexagon, but may be a square, an octagon, an ellipse, or the like, but the hexagonal shape is preferable because it is easy to process and the meshed state is good. Further, the sensor may be a limit switch, a reed switch, a pressure sensor directly connected to a spring, or the like.

[0032]

According to the present invention, a fine positioning device,
For example, a fine positioning table is arranged on the processing table, a driving unit is provided separately from the processing table and the fine positioning table, and the socket portion that fits into the adjusting bolt and rotates is rotated up and down without being rotated to engage with each other. Since there is no deformation or shock when the socket is engaged with the adjustment bolt and there is no deformation due to the pressing force during adjustment, it is possible to prevent a decrease in precision, so it is as accurate as the conventional push screw method. A micropositioning method and device that can obtain the above are provided.
Further, since the fitting gap is provided before the disengagement, the setting accuracy does not change due to friction or vibration at the time of disengagement, and the high-precision positioning method and device have a long life.

Further, since the socket portion is contacted while being slightly rotated and the fitting is detected by the sensor, the control is simple and reliable. Further, even if there are one or several driving devices for a large number of minute positioning tables, positioning can be performed and the number of NC control axes does not increase, so that the device can be downsized and the cost can be reduced.

[Brief description of drawings]

FIG. 1 is an explanatory diagram of a minute table positioning device according to a first embodiment of the present invention.

FIG. 2 is an explanatory view showing a process of the engagement state of the adjustment bolt head and the socket portion of the present invention, and FIGS.
-1) (c-1) is the head phase of the hexagon adjustment bolt, (a-
2) (b-2) (c-2) is the phase of the hexagon socket part,
(A-3) (b-3) (c-3) (d) (e) is explanatory drawing which shows the meshing state of the head of a hexagon adjustment bolt and a hexagon socket part.

FIG. 3 is an explanatory diagram of a minute table positioning device according to a second embodiment of the present invention.

FIG. 4 is an explanatory diagram of a minute table positioning device according to a third embodiment of the present invention, (a) is an explanatory diagram of an adjusting method,
(B) is a schematic layout diagram on the processing table.

FIG. 5 is an explanatory diagram of a conventional minute alignment table.

[Explanation of symbols]

1 Work 2, 42 Positioned member (positioning table) 3, 43 Base 4, 44 One-dimensional prismatic hinge 5 Micro positioning device (micro positioning table, micro alignment table) 6 Bearing 7 Adjustment bolt 8 Adjustment bolt locking part ( Head part 9 Female screw 10 Spline shaft 11 Servo motor (rotating member) 12 Shaft 13 Connecting plate 14 Socket part 15 Socket part locking part 16 Iron plate 17 Air cylinder (moving member) 18 Spring (buffer member) 19 Proximity switch (Mating / meshing detection member) 20 Servo amplifier 21 NC controller 22 Measuring instrument 23 Counter 52 Drive device

Claims (3)

[Claims] 1. A fine positioning method in which a fine adjustment is performed by rotating an adjustment bolt provided for inclining or relatively moving a member to be positioned such as a component or a table on a base surface, and rotating the adjustment bolt at a tip end portion of the adjustment bolt. A socket portion provided with a head portion having a direction locking portion, separated from the positioned member, engageable with the locking portion of the adjusting bolt head portion, and slidable in the axial direction, and the socket portion. An axially moving member for axially moving, a buffer member provided between the socket portion and the axially moving member, and a rotating member for rotationally controlling the socket portion. When the socket is moved to the adjustment bolt side and the socket portion and the adjustment bolt are fitted to each other, the rotation member rotates the adjustment bolt through the socket portion to determine the position to be determined. When the socket portion interferes with the adjustment bolt head portion and cannot be fitted, the socket portion is once retracted, rotated by a small angle, and the socket portion is moved to the adjustment bolt side again. A fine positioning method characterized in that the step is repeated until the socket part is fitted to the head part of the adjusting bolt. 2. When the socket portion and the adjusting bolt head portion are disengaged, the socket portion is rotated by a small angle in the reverse direction so that a gap is provided between the socket portion locking portion and the adjusting bolt head portion. The minute positioning method according to claim 1, wherein the part is retracted. 3. A fine positioning device capable of finely adjusting by rotating an adjusting bolt provided for inclining or relatively moving a positioned member such as a component or a table on a base surface, the tip of the adjusting bolt. A head portion having a rotation direction locking portion is provided in the portion, and is separated from the positioned member,
A socket portion that can be engaged with a locking portion of the adjustment bolt head and slidable in the axial direction; an axial moving member that axially moves the socket portion; and the socket portion and the axial moving member. A buffer member provided therebetween, a rotating member for controlling the rotation of the socket portion, a measuring portion for measuring the position of the positioned member or the position of a workpiece such as a workpiece fixed to the positioned member, and the socket Detection unit for detecting whether or not the unit and the adjustment bolt head are fitted together,
A command unit for commanding the position of the positioned member or the position of an object to be measured such as a workpiece fixed to the positioned member, and the socket unit is retracted by a non-fitting signal of the detection unit so that the rotating unit has a small angle. A micropositioning device comprising a control unit that rotates and moves the socket unit again in the axial direction, feeds back the signal of the measuring unit according to the fitting signal, and controls the rotating member according to the command signal.