JPH0854214A - Gap measuring method - Google Patents

Abstract

PURPOSE:To obtain a highly accurate gap measuring method in which the detection space can be held in a constant state while suppressing disturbance, e.g. the effect of external light. CONSTITUTION:An optical measuring apparatus 1 is brought into tight contact with the surface of an object 11 and a light is projected from a section 6 having a light emitting element 6a arranged linearly, toward the surface of the object 1. The light reflected on the surface of the object 11 is received at a light receiving section 4 and the gap between the objects 11 is detected based on the range where the output signal from the light receiving section 4 is zero.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention measures a gap generated between objects by a contact type optical measuring device having a light emitting portion and a light receiving portion and detecting the amount of reflected light from a measuring surface in which the light receiving portion is in close contact. The method for measuring the gap.

[0002]

2. Description of the Related Art As a method for measuring the gap between objects, a relatively large gap is read using a measuring instrument such as a scale or a caliper, and a minute gap is measured using a gap gauge or the like. How to do it is known. Further, a method of projecting linear light obliquely from the outside, photographing the gap with a CCD camera or the like, and performing image processing is also generally used.

[0003]

However, in the above technique, since the detection is performed by human judgment or the image processing of the camera, the reading error of the measuring instrument, the accuracy of the image processing, the influence of external light, etc. It is difficult to perform stable measurement due to the above problem, and when the number of measurement points is large, it takes a lot of time to move the human hands and the device, which is a troublesome work.

Therefore, in view of the above problems, the present invention provides a highly accurate gap measuring method which can easily keep the detection space in a constant state and is resistant to disturbance such as the influence of external light. Has an aim.

[0005]

According to the present invention, a contact type optical measuring device having a light emitting portion and a light receiving portion for detecting the amount of reflected light from a measuring surface with which the light receiving portion is in close contact is generated between objects. In the gap measuring method for measuring the gap, the contact type optical measuring device is brought into close contact with the surface of the DUT, and the projection light from the light emitting section having the light emitting elements arranged linearly of the optical measuring device is measured. Gap measuring method, characterized in that the light is projected onto the surface of the object, the reflected light from the surface of the measured object is received by the light receiving section, and the clearance between the measured objects is detected by the range in which the signal output of the light receiving section is zero. Are offered.

[0006]

The present invention is configured as described above, and the contact measurement surface of the optical measuring device is brought into close contact with the surface of the object to be measured whose gap is to be measured, and light is emitted from the light emitting element of the light emitting unit. The reflected light from the surface of the measurement point of the object to be measured is received by the light receiving element of the light receiving section. If there is a gap, the amount of light received at that measurement point is zero, and no signal is output. Further, since this measuring device has a linear light emitting unit and a learning unit and can have linear measuring points, it is possible to measure multiple points at the same time.

Therefore, if the measurement results of these multiple points are output and displayed by arranging the adjacent measurement points side by side, the position of the gap and its width are displayed.

Further, if there is a step on the surface, the signal output becomes small or becomes zero, so that the width and the position thereof are also displayed.

Since the measuring surface of the measuring device is in close contact with the object to be measured, it is possible to prevent the influence of external light from entering and the relative position of the measuring points does not shift, so that highly accurate measurement is possible. It is possible and easy to operate.

[0010]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view showing an example of a close contact type optical measuring device used in the gap measuring method according to the present invention. The main body 1 is provided with a V-shaped groove 2 on a measuring surface 7 which is a close contact surface. That V
A light receiving portion 4 having a plurality of linearly arranged light receiving elements 4a is attached to a bottom portion 3 of the character-shaped groove 2 parallel to the measurement surface 7, and an inclined surface 5 of the groove 2 is linearly arranged. A light emitting unit 6 having a plurality of light emitting elements 6a is attached.

Further, FIG. 2 shows a cross section taken along the line AA of FIG. 1, and a symbol P indicates a measurement point P on the measurement surface 7.

The projected light projected from the light emitting section 6 is reflected at the measurement point P, and the light receiving section is arranged at a position where the measurement point P is viewed, and the reflected light at the measurement point P is received. When the light receiving element 4a there receives light, a signal is output according to the change in the amount of received light.

Hereinafter, a gap measuring method using the contact type optical measuring device will be described with reference to FIGS.

FIG. 3 shows a state in which the main body 1 of the measuring device is brought into close contact with the measurement surfaces of the objects to be measured 11a and 11b, and between the objects to be measured 11a and 11b. Gap part G
The measured object 11b has a stepped portion S on its upper surface.

FIG. 4 shows a vertical cross section of FIG. 3 (a cross section in the front-rear direction of FIG. 3), and FIG. 5 shows a portion having no gap or step (B-
The mode at the time of measurement in the B section) is shown.

At this time, since there are no gaps or steps on the surface of the object to be measured 11a, the projection light L projected from the light emitting element 6a of the light emitting section 6 is reflected at the measurement point P of the object to be measured 11a,
The reflected light R is received and detected by the light receiving element 4a of the light receiving unit 4.

Next, FIG. 6 shows a case where there is a gap. In the gap portion G between the measured objects 11a and 11b, the projection light L from the light emitting portion is reflected because the measured objects 11a and 11b do not exist. Therefore, the light receiving unit 4 does not detect the reflected light.

Further, when there is a step S on the object to be measured, FIG.
Referring to, the projection light L from the light emitting section 6 is reflected by the object to be measured, but in this case, the measurement point deviates from the normal position (in the figure, it is separated), and thus the reflected light R is received by the light receiving section 4. Since it is not detected or the reflected light amount is small, the detection level is low.

Therefore, when the signal level of the detection output from the measuring devices which is sequentially combined over the measuring line of the measuring device 1 is plotted on the vertical axis and the light receiving element permutation of the measuring instrument is plotted on the horizontal axis, it is plotted as shown in FIG. Then, in FIG.
When the light receiving elements of the learning unit 4 corresponding to the points are numbered in ascending order as the first element, the difference between the light receiving element numbers corresponding to points b and c in FIG. 8 corresponds to the gap G in FIG. . At this time, if the distance between the light receiving elements is known, it is possible to easily convert the size of the space of the gap portion G.

Similarly, the distance between the points d and e becomes the groove width of the step S in FIG.

In this case, the arrangement interval of the light receiving elements of the light receiving unit 4 corresponds to the resolution of this measuring method, and the arrangement interval of which is small enables highly accurate measurement.

Therefore, it is possible to easily measure the size of the gap with high accuracy.

[0024]

Since the present invention is constructed as described above, it has the following excellent effects. (1) Since it is detected in a fixed measurement space provided in the measuring device, the operation is simple, stable, and highly accurate. (2) Since the measuring device is brought into close contact with the object to be measured, the influence of disturbance such as external light is small. (3) Therefore, it is possible to easily and accurately measure the gap.

[Brief description of drawings]

FIG. 1 is a perspective view of a contact-type optical measuring device used in an embodiment of the present invention.

FIG. 2 is a sectional view taken along line AA of FIG.

FIG. 3 is a perspective view showing an aspect in which measurement is performed by the measuring device of FIG.

FIG. 4 is a vertical sectional view of FIG.

5A and 5B are views for explaining the operation in the BB cross section of FIG.

6A and 6B are views for explaining the action in the CC cross section of FIG. 4;

7A and 7B are views for explaining the action in the DD cross section of FIG. 4;

FIG. 8 is a diagram showing an example of detection output indicating a gap.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Main body 2 ... Groove 3 ... Bottom part 4 ... Light receiving part 5 ... Inclined part 6 ... Light emitting part 7 ... Adhesion measuring part 11 ... Measured object

Claims (1)

[Claims] 1. A gap measuring method for measuring a gap generated between objects by a contact type optical measuring device which has a light emitting part and a light receiving part and detects the amount of reflected light from a measurement surface where the light receiving part is in close contact, The contact-type optical measuring device is brought into close contact with the surface of the object to be measured, and the projection light from the light-emitting portion having the light-emitting elements arranged linearly of the optical measuring device is projected onto the surface of the object to be measured. A gap measuring method characterized in that reflected light from the surface is received by a light receiving section, and the gap between the measured objects is detected by a range in which the signal output of the light receiving section is zero.