JPH0850999A - Beam duct - Google Patents
Beam ductInfo
- Publication number
- JPH0850999A JPH0850999A JP18487194A JP18487194A JPH0850999A JP H0850999 A JPH0850999 A JP H0850999A JP 18487194 A JP18487194 A JP 18487194A JP 18487194 A JP18487194 A JP 18487194A JP H0850999 A JPH0850999 A JP H0850999A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum container
- duct
- bellows
- attached
- bellows duct
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Particle Accelerators (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、電子やイオンを加速す
るシンクロトロン等の加速器において、特に偏向電磁石
の立ち上げ速度の早い部分に使用されるビームダクトに
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a beam duct used in an accelerator such as a synchrotron for accelerating electrons and ions, particularly in a portion where a deflection electromagnet has a high start-up speed.
【0002】[0002]
【従来の技術】電子やイオンを加速するシンクロトロン
等の加速器においては、低い入射エネルギーを高エネル
ギーで利用する場合、偏向電磁石の立ち上げ速度の速い
部分にビームダクトが設けられている。2. Description of the Related Art In an accelerator such as a synchrotron for accelerating electrons or ions, a beam duct is provided at a portion where a rising speed of a deflection electromagnet is high when low incident energy is used with high energy.
【0003】このため、ビームダクトは偏向電磁石から
の磁束により大きな渦電流が発生し、この渦電流によっ
て形成される磁場によりビームが曲げられ、目的の軌道
から外れてしまう。Therefore, in the beam duct, a large eddy current is generated due to the magnetic flux from the deflection electromagnet, and the beam is bent by the magnetic field formed by this eddy current and deviates from the target trajectory.
【0004】そこで、従来のビームダクトとしては、渦
電流を抑える上から、高抵抗で薄肉構造に成形されたベ
ローズや、溶接構成で成形された接続ベローズを成形し
ている。Therefore, as a conventional beam duct, in order to suppress eddy current, a bellows having a high resistance and a thin wall structure or a connection bellows having a welded structure are formed.
【0005】図4は成形ベローズ6の構成を示すもの
で、その両端には接続フランジ1が取付けられている。
また、図5は溶接ベローズ10の構成を示すもので、そ
の両端には接続フランジ1が取付けられている。FIG. 4 shows the structure of the molded bellows 6, and the connection flanges 1 are attached to both ends thereof.
Further, FIG. 5 shows a structure of the welded bellows 10, and connection flanges 1 are attached to both ends thereof.
【0006】しかし、上記のような成形ベーローズや溶
接ベローズによるビームダクトでは、長い距離を必要と
する場合には製作することが困難である。そこで、従来
では図6に示すように外周面に適宜の間隔を存して補強
リブ8をロー付により取付けた肉厚の薄い真空容器7の
一端部に接続フランジ1を溶接等により取付け、また真
空容器7の他端部に調整用として押え板5を介してベロ
ーズダクト6の一端を溶接により接合し、その他端を接
続フランジ1に溶接により取付けている。However, it is difficult to manufacture the above-described beam duct using the molded bellows or the welded bellows when a long distance is required. Therefore, conventionally, as shown in FIG. 6, a connecting flange 1 is attached by welding or the like to one end of a thin vacuum container 7 having brazing ribs 8 provided at appropriate intervals on the outer peripheral surface thereof. One end of the bellows duct 6 is joined by welding to the other end of the vacuum container 7 via a holding plate 5 for adjustment, and the other end is attached to the connecting flange 1 by welding.
【0007】[0007]
【発明が解決しようとする課題】一般にビームダクトは
厚肉であれ薄肉であれ、全体組立時にビーム軸方向の伸
縮が行われる。また、真空度を高めるためにベーキング
が行われるが、このときダクトに発生する熱による伸縮
がある。Generally, whether the beam duct is thick or thin, the beam duct is expanded and contracted in the beam axial direction during the entire assembly. In addition, baking is performed to increase the degree of vacuum, but at this time there is expansion and contraction due to the heat generated in the duct.
【0008】従って、このダクトの伸縮はダクトの端部
に接合されたベローズ6により吸収させることで、接続
フランジ側へ作用する外力が小さくなるようにしてい
る。しかし、このような構成のビームダクトでは、ベロ
ーズ部に伸縮調整のための調整用押え板5、真空容器
7、接続フランジ等をそれぞれ接続するための溶接部が
多いため、溶接欠陥が生じ易い部分が数多く存在する。Therefore, the expansion and contraction of the duct is absorbed by the bellows 6 joined to the end of the duct, so that the external force acting on the connecting flange side is reduced. However, in the beam duct having such a structure, there are many welded portions for connecting the adjusting presser plate 5 for adjusting the expansion and contraction, the vacuum container 7, the connecting flange and the like to the bellows portion, so that a welding defect is likely to occur. There are many.
【0009】また、ビームエネルギーが大きく、ビーム
ダクトに発生する渦電流が大きい場合には、真空容器7
の片端あるいは両端に調整用押え板5が取付けられる
が、渦電流の発生を押えるという観点から見ると、調整
用押え板の取付方法と補強方法に問題がある。When the beam energy is large and the eddy current generated in the beam duct is large, the vacuum container 7
Although the adjusting presser plate 5 is attached to one end or both ends, from the viewpoint of suppressing the generation of the eddy current, there is a problem in the method of attaching and reinforcing the adjusting presser plate.
【0010】このように溶接点数が多かったり、調整用
押え板が設けられるということは、ビームダクトの品質
向上を図る上で種々の問題がある。本発明は上記のよう
な問題点を解消するためになされたもので、その目的は
真空容器の組込みや、ベーキングがし易く信頼性の向上
を図り得るビームダクトを提供することにある。As described above, the large number of welding points and the provision of the adjusting pressing plate pose various problems in improving the quality of the beam duct. The present invention has been made to solve the above problems, and an object of the present invention is to provide a beam duct in which a vacuum container can be easily incorporated and baking can be easily performed to improve reliability.
【0011】[0011]
【課題を解決するための手段】本発明は、上記のような
目的を達成するため次のような手段によりビームダクト
を構成するものである。請求項1に対応する発明は、内
部に電子やイオンのビームを通す薄肉の筒状の真空容器
の外表面に補強リブを取付けてなるビームダクトにおい
て、前記真空容器の少なくとも一端部に長さ調整用のベ
ローズダクトを設け、このベローズダクトを真空容器と
一体に成形する。In order to achieve the above object, the present invention constitutes a beam duct by the following means. The invention corresponding to claim 1 is a beam duct in which reinforcing ribs are attached to the outer surface of a thin-walled cylindrical vacuum container through which an electron or ion beam is passed, and at least one end of the vacuum container is adjusted in length. A bellows duct for use is provided, and this bellows duct is formed integrally with the vacuum container.
【0012】請求項2に対応する発明は、前記真空容器
とベローズダクトの境界面に長さ調整用押え板を銀ロー
付により取付ける。請求項3に対応する発明は、内部に
電子やイオンのビームを通す薄肉の筒状の真空容器の外
表面に補強リブを取付けてなるビームダクトにおいて、
前記真空容器の少なくとも一端部に長さ調整用のベロー
ズダクトを設け、このベローズダクトを真空容器と一体
に成形し、且つこのベローズダクトの端部にリング状の
絶縁物を接続接続フランジの内部に設けて取付ける。According to a second aspect of the present invention, a length adjusting holding plate is attached to the boundary surface between the vacuum container and the bellows duct with a silver braze. The invention corresponding to claim 3 is a beam duct in which reinforcing ribs are attached to an outer surface of a thin-walled cylindrical vacuum container through which an electron or ion beam is passed.
A bellows duct for length adjustment is provided at at least one end of the vacuum container, the bellows duct is formed integrally with the vacuum container, and a ring-shaped insulator is connected to the end of the bellows duct inside the connection flange. Install and install.
【0013】[0013]
【作用】上記請求項1および請求項2に対応する発明の
ビームダクトにあっては、外周面に補強リブを適宜の間
隔を存してロー付された肉厚の薄い真空容器とベローズ
とを同時に加工して一体的に成形されているので、従来
の同じ機能を保って接合のための溶接部が少なくなり、
溶接欠陥による不具合を減少させることが可能となり、
信頼性を高めることができる。In the beam duct of the invention corresponding to the above claims 1 and 2, the thin walled vacuum container and the bellows are brazed with reinforcing ribs on the outer peripheral surface at appropriate intervals. Since it is processed at the same time and integrally molded, the same function as in the past is maintained and the number of welds for joining is reduced,
It is possible to reduce defects due to welding defects,
The reliability can be increased.
【0014】また、調整用押え板はベローズの長さ調整
だけを目的としてロー付されているので、軸方向に対す
る肉厚を薄くでき、偏向電磁石の磁場の影響による渦電
流の発生を押えることが可能となる。Further, since the adjusting pressing plate is brazed only for the purpose of adjusting the length of the bellows, the thickness in the axial direction can be reduced and the generation of eddy current due to the influence of the magnetic field of the deflection electromagnet can be suppressed. It will be possible.
【0015】上記請求項3に対応する発明のビームダク
トにあっては、上記と同様の作用効果が得られることは
勿論、ベローズダクトの端部に接合されるリング状の絶
縁物が接続接続フランジの内部に設けられるので、偏向
電磁石の磁場の影響による渦電流やビームによって発生
するイメージ電流等を有効にしゃ断することができる。In the beam duct of the invention corresponding to the third aspect, the same operational effect as described above can be obtained, and the ring-shaped insulator joined to the end of the bellows duct is connected and connected to the flange. Since it is provided inside, the eddy current due to the influence of the magnetic field of the deflection electromagnet, the image current generated by the beam, and the like can be effectively cut off.
【0016】この他、請求項1乃至請求項3に対応する
発明のビームダクトにあっては、真空容器としての内表
面積が小さくなるので、真空排気もし易くなる等の利点
が得られる。In addition, in the beam duct of the invention according to claims 1 to 3, since the inner surface area of the vacuum container is small, it is possible to obtain advantages such as easy vacuum evacuation.
【0017】[0017]
【実施例】以下本発明の実施例を図面を参照して説明す
る。図1は本発明によるビームダクトの第1の実施例を
示す断面図である。図1において、7は電気抵抗が高く
しかも非磁性材からなる薄肉(例えば0.2〜0.5mm
の肉厚)の筒状の真空容器で、この真空容器7の外周面
には適宜の間隔を存して内外の圧力差に耐え得るように
補強リブ8がロー付により取付けられている。この場
合、真空容器7の外周面には補強リブ8を固定するため
のリング状の膨出部が形成されている。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a sectional view showing a first embodiment of a beam duct according to the present invention. In FIG. 1, 7 is a thin wall (for example, 0.2 to 0.5 mm) having a high electric resistance and made of a non-magnetic material.
A cylindrical vacuum container having a wall thickness), and reinforcing ribs 8 are attached by brazing to the outer peripheral surface of the vacuum container 7 at appropriate intervals so as to withstand the pressure difference between the inside and the outside. In this case, a ring-shaped bulging portion for fixing the reinforcing rib 8 is formed on the outer peripheral surface of the vacuum container 7.
【0018】この真空容器7の一端部には接続フランジ
1が溶接により取付けられ、また他端部にはベーキング
による軸方向の伸びを吸収するためのベローズダクト6
が一体的に成形され、真空容器7とベローズダクト6と
の境界面に調整用押え板5が取付けられる。A connecting flange 1 is attached to one end of the vacuum container 7 by welding, and a bellows duct 6 for absorbing axial extension due to baking is attached to the other end.
Is integrally molded, and the adjusting holding plate 5 is attached to the boundary surface between the vacuum container 7 and the bellows duct 6.
【0019】この場合、真空容器7の端部に設けられる
ベローズダクト6は真空容器7の成形時に同時に加工す
ることによって成形される。また、ベローズダクト6の
伸縮調整用の押え板5も真空容器7の成形のときに同時
に銀ロー付により取付けられる。In this case, the bellows duct 6 provided at the end of the vacuum container 7 is formed by simultaneously processing the vacuum container 7 when forming the vacuum container 7. Further, the pressing plate 5 for adjusting the expansion and contraction of the bellows duct 6 is also attached at the same time when the vacuum container 7 is formed by using silver brazing.
【0020】他方、ベローズダクト6の端部に取付けら
れる接続フランジ1は、図2に示すように中心部に有す
る穴のベローズダクト側に環状溝1aが形成され、この
環状溝1aにリング状のセラミック3を挿入し、このセ
ラミック3の軸方向両端面から穴部の内周面にかけて封
着金属2を介挿すると共に、環状溝1aの開口側にセラ
ミック押え11を設け、さらに封着金属2の環状溝1a
よりベローズダクト側に延出する封着金属2を中心軸と
して円板状の絶縁材4を挿入する。そして、この絶縁材
4に金属性の継手9を介してベローズダクト6の端部を
取付ける。On the other hand, the connection flange 1 attached to the end of the bellows duct 6 has an annular groove 1a formed on the bellows duct side of the hole at the center as shown in FIG. 2, and the annular groove 1a has a ring shape. The ceramic 3 is inserted, the sealing metal 2 is inserted from both axial ends of the ceramic 3 to the inner peripheral surface of the hole, and the ceramic retainer 11 is provided on the opening side of the annular groove 1a. Annular groove 1a
A disk-shaped insulating material 4 is inserted with the sealing metal 2 extending toward the bellows duct side as a central axis. Then, the end portion of the bellows duct 6 is attached to the insulating material 4 via the metallic joint 9.
【0021】この場合、ベローズダクト6と継手5とを
溶接し、セラミック3およびセラミック押え11と封着
金属2との接合も同時に成形しロー付が可能である。従
って、このようにベローズダクト6を接続フランジ1に
取付けることにより、軸方向に絶縁された状態で接続フ
ランジ1に結合されることになる。In this case, it is possible to weld the bellows duct 6 and the joint 5 and simultaneously form the joint between the ceramic 3 and the ceramic retainer 11 and the sealing metal 2 and braze them. Therefore, by mounting the bellows duct 6 on the connecting flange 1 in this manner, the bellows duct 6 is coupled to the connecting flange 1 in an axially insulated state.
【0022】このような構成のビームダクトにおいて
は、外周面に補強リブ8を適宜の間隔を存してロー付さ
れた肉厚の薄い真空容器7とベローズダクト6とを同時
に加工して一体的に成形するようにしたので、従来のよ
うに真空容器7とベローズダクト6とを溶接により接合
する場合に生じる不具合を防止することができる。In the beam duct having such a structure, the thin-walled vacuum container 7 and the bellows duct 6 which are brazed with reinforcing ribs 8 at appropriate intervals on the outer peripheral surface are simultaneously processed to be integrated. Since it is formed in the above-described manner, it is possible to prevent problems that would occur when the vacuum container 7 and the bellows duct 6 are joined by welding as in the conventional case.
【0023】従って、真空容器を用いた大型あるいは小
型の粒子加速用リングに対しても適用することができ
る。特に小形化の場合には偏向電磁石の極率が小さくな
るため、真空容器7の曲率にあった設計が必要となる
が、真空容器7に取付けられた補強リブ8を固定するた
めの小さなリング状の膨出部が存在しているので、自在
に湾曲が行い得る。Therefore, it can be applied to a large or small particle accelerating ring using a vacuum container. In particular, in the case of downsizing, since the polarities of the bending electromagnets are reduced, a design matching the curvature of the vacuum container 7 is required. However, a small ring shape for fixing the reinforcing rib 8 attached to the vacuum container 7 is required. Since there is a bulge, the bending can be performed freely.
【0024】また、真空容器7の成形時にベローズダク
ト6の伸縮調整用の押え板5も同時に銀ロー付ができる
ほか、ベローズダクト6を接続フランジ1に絶縁材4を
介して取付ける際、接続フランジ1内に形成された環状
溝1aにセラミック押え11により軸方向に押えられた
セラミック3の軸方向両端面に封着金属2を挿入してロ
ー付により接合して軸方向の絶縁を施すようにしたの
で、偏向電磁石による磁場立ち上げ時にベローズダクト
6と接続フランジ1との接続部に生ずる渦電流やビーム
によって生じる電流をしゃ断することができる。Further, the pressing plate 5 for adjusting the expansion and contraction of the bellows duct 6 at the time of forming the vacuum container 7 can be simultaneously silver brazed, and when the bellows duct 6 is attached to the connection flange 1 via the insulating material 4, the connection flange The sealing metal 2 is inserted into both end faces of the ceramic 3 axially pressed by the ceramic presser 11 in the annular groove 1a formed in the axial direction 1 and joined by brazing to provide axial insulation. Therefore, it is possible to cut off the eddy current generated in the connection portion between the bellows duct 6 and the connection flange 1 and the current generated by the beam when the magnetic field is raised by the deflection electromagnet.
【0025】さらに、接続フランジ1の内部にセラミッ
ク3を設けているので、真空封着等の溶接もし易くな
る。図3は本発明によるビームダクトの第2の実施例を
示す断面図で、ここでは図1と異なる点について述べ
る。Furthermore, since the ceramic 3 is provided inside the connection flange 1, welding such as vacuum sealing is facilitated. FIG. 3 is a sectional view showing a second embodiment of the beam duct according to the present invention. Here, the points different from FIG. 1 will be described.
【0026】第2の実施例では、図3に示すように真空
容器7と一体的に加工して成形されたベローズダクト6
の端部を接続フランジ1に溶接により接合し、且つ接続
フランジ1の中心穴の外周に設けられた環状穴1bに軸
方向両端が封着金属2によりロー付されて保持されたリ
ング状のセラミック3を設ける構成として、半径方向に
対する絶縁を施したものである。In the second embodiment, as shown in FIG. 3, the bellows duct 6 formed integrally with the vacuum container 7 is formed.
Of the ring-shaped ceramic, the ends of which are joined to the connection flange 1 by welding, and both ends in the axial direction of the annular hole 1b provided in the outer periphery of the central hole of the connection flange 1 are brazed and held by the sealing metal 2. 3 is provided with insulation in the radial direction.
【0027】このような構成としても、前述した第1の
実施例と同様の作用効果を得ることができる。なお、上
記第1の実施例および第2の実施例では、真空容器7の
一端側にベローズダクトを一体に成形する場合について
述べたが、真空容器の両端側にベローズダクトを一体的
に成形するようにしてもよい。Even with such a structure, the same operational effect as that of the first embodiment described above can be obtained. In addition, in the said 1st Example and 2nd Example, although the case where the bellows duct was integrally molded at one end side of the vacuum container 7 was described, the bellows duct is integrally molded at both end sides of the vacuum container. You may do it.
【0028】[0028]
【発明の効果】以上述べたように本発明によれば、真空
容器の組込みや、ベーキングがし易く信頼性の向上を図
り得るビームダクトを提供することができる。As described above, according to the present invention, it is possible to provide a beam duct in which a vacuum container can be easily incorporated and baking can be easily performed and reliability can be improved.
【図1】本発明によるビームダクトの第1の実施例を示
す断面図。FIG. 1 is a sectional view showing a first embodiment of a beam duct according to the present invention.
【図2】同実施例における接続フランジ部とビームダク
トの接合部を示す拡大断面図。FIG. 2 is an enlarged cross-sectional view showing a joint portion between a connection flange portion and a beam duct in the embodiment.
【図3】本発明の第2の実施例を示すビームダクトの断
面図。FIG. 3 is a cross-sectional view of a beam duct showing a second embodiment of the present invention.
【図4】従来のベローズダクトによるビームダクトを示
す断面図。FIG. 4 is a cross-sectional view showing a beam duct using a conventional bellows duct.
【図5】従来の溶接ベローズダクトによるビームダクト
を示す断面図。FIG. 5 is a cross-sectional view showing a beam duct using a conventional welded bellows duct.
【図6】従来の真空容器とベローズダクトとを接合した
ビームダクトを示す断面図。FIG. 6 is a sectional view showing a beam duct in which a conventional vacuum container and a bellows duct are joined.
1……接続フランジ、2……封着金属、3……セラミッ
ク、4……絶縁材、5……調整用押え板、6……ベロー
ズダクト、7……真空容器、8……補強リブ、9……継
手。1 ... Connection flange, 2 ... Sealing metal, 3 ... Ceramic, 4 ... Insulation material, 5 ... Adjusting holding plate, 6 ... Bellows duct, 7 ... Vacuum container, 8 ... Reinforcing rib, 9: Joint.
Claims (3)
の筒状の真空容器の外周面に補強リブを取付けてなるビ
ームダクトにおいて、前記真空容器の少なくとも一端部
に長さ調整用のベローズダクトを設け、このベローズダ
クトを真空容器と一体に成形したことを特徴とするビー
ムダクト。1. A beam duct in which reinforcing ribs are attached to an outer peripheral surface of a thin-walled tubular vacuum container through which an electron or ion beam is passed, and a bellows duct for length adjustment is provided at least at one end of the vacuum container. The beam duct is characterized in that the bellows duct is formed integrally with a vacuum container.
前記真空容器とベローズダクトの境界面に長さ調整用押
え板を銀ロー付により取付けたことを特徴とするビーム
ダクト。2. The beam duct according to claim 1, wherein
A beam duct characterized in that a pressing plate for length adjustment is attached to the boundary surface between the vacuum container and the bellows duct by means of silver brazing.
の筒状の真空容器の外表面に補強リブを取付けてなるビ
ームダクトにおいて、前記真空容器の少なくとも一端部
に長さ調整用のベローズダクトを設け、このベローズダ
クトを真空容器と一体に成形し、且つこのベローズダク
トの端部にリング状の絶縁物を接続フランジの内部に設
けて取付けたことを特徴とするビームダクト。3. A beam duct in which reinforcing ribs are attached to the outer surface of a thin-walled tubular vacuum container through which an electron or ion beam is passed, a bellows duct for length adjustment being provided at least at one end of the vacuum container. A beam duct, wherein the bellows duct is formed integrally with the vacuum container, and a ring-shaped insulator is provided inside the connection flange at the end of the bellows duct.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18487194A JP3335773B2 (en) | 1994-08-05 | 1994-08-05 | Beam duct |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18487194A JP3335773B2 (en) | 1994-08-05 | 1994-08-05 | Beam duct |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0850999A true JPH0850999A (en) | 1996-02-20 |
JP3335773B2 JP3335773B2 (en) | 2002-10-21 |
Family
ID=16160777
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18487194A Expired - Lifetime JP3335773B2 (en) | 1994-08-05 | 1994-08-05 | Beam duct |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3335773B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2665082A1 (en) * | 2012-05-16 | 2013-11-20 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Element for fast magnetic beam deflection |
CN108831812A (en) * | 2018-06-12 | 2018-11-16 | 中国科学院近代物理研究所 | Vacuum tube for accelerator |
WO2020213552A1 (en) * | 2019-04-15 | 2020-10-22 | 東芝エネルギーシステムズ株式会社 | Charged particle accelerator and method for building same |
-
1994
- 1994-08-05 JP JP18487194A patent/JP3335773B2/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2665082A1 (en) * | 2012-05-16 | 2013-11-20 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Element for fast magnetic beam deflection |
CN108831812A (en) * | 2018-06-12 | 2018-11-16 | 中国科学院近代物理研究所 | Vacuum tube for accelerator |
WO2020213552A1 (en) * | 2019-04-15 | 2020-10-22 | 東芝エネルギーシステムズ株式会社 | Charged particle accelerator and method for building same |
JP2020177738A (en) * | 2019-04-15 | 2020-10-29 | 東芝エネルギーシステムズ株式会社 | Charged particle accelerator and construction method thereof |
Also Published As
Publication number | Publication date |
---|---|
JP3335773B2 (en) | 2002-10-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS6213778B2 (en) | ||
JP3361932B2 (en) | Vacuum valve | |
KR100443325B1 (en) | Clad end seal for vacuum interrupter | |
JPH0850999A (en) | Beam duct | |
US4410777A (en) | Vacuum circuit interrupter | |
JPS633067Y2 (en) | ||
JPS59671Y2 (en) | Vacuum cutter | |
JPH0311526A (en) | Magnetron | |
US5821693A (en) | Electron beam tubes having a unitary envelope having stepped inner surface | |
JP2003317583A (en) | Vacuum valve | |
JP5255416B2 (en) | Vacuum valve | |
JPH06290712A (en) | Magnetron for microwave oven | |
JP2000182800A (en) | Vacuum container | |
JP2758286B2 (en) | Microwave tube electron gun assembly | |
JPH09223440A (en) | Vacuum valve | |
JPH03289099A (en) | Beam duct | |
JPH03269923A (en) | Vacuum interrupter | |
JPH05275019A (en) | Magnetron | |
JP2612111B2 (en) | Grid type electron gun and manufacturing method thereof | |
JPH076701A (en) | Magnetron cathode structure | |
JPH0414840Y2 (en) | ||
JPH0210631A (en) | Electron gun body structure for microwave tube | |
JP2519285Y2 (en) | Color picture tube | |
JP2713187B2 (en) | Method of assembling electron gun for traveling wave tube | |
JPH10125269A (en) | Ultra-high vacuum electron microscope |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 5 Free format text: PAYMENT UNTIL: 20070802 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080802 Year of fee payment: 6 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 7 Free format text: PAYMENT UNTIL: 20090802 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090802 Year of fee payment: 7 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100802 Year of fee payment: 8 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100802 Year of fee payment: 8 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 9 Free format text: PAYMENT UNTIL: 20110802 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 9 Free format text: PAYMENT UNTIL: 20110802 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120802 Year of fee payment: 10 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120802 Year of fee payment: 10 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130802 Year of fee payment: 11 |
|
EXPY | Cancellation because of completion of term |