JPH0845853A - Controller for semiconductor manufacturing apparatus - Google Patents

Abstract

PURPOSE:To make it possible to access error or productive information directly from an outer memory means, by writing the error or productive information directly into the outer memory means. CONSTITUTION:A main processing unit 4 is connected with an outer memory means 12, and error information or productive information on a recipe is written directly to the outer memory means 12 through an interface unit 11 for the outer memory means 12. In addition, a RAM 6 has a memory region and a buffer region with a minimum area to write the error and productive information for fear that the outer memory means 12 is not connected. An IC memory card, a floppy disk a hard disk or an erasable CD-ROM can be used as an outer memory means 12. Since the error or productive information is written directly in the outer memory means 12, the information can be accessed directly from the outer memory means 12.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a control device for a semiconductor manufacturing apparatus such as a film forming process on a wafer.

[0002]

2. Description of the Related Art FIG. 3 is a block diagram showing a configuration of an example of a conventional device, and FIG. 4 is an internal configuration diagram of a conventional memory. In FIG. 3, reference numeral 1 is an external input interface of a semiconductor manufacturing apparatus that performs a process such as film formation on a wafer.
Is a gas flow rate control unit for controlling the flow rate of the reaction gas introduced into the reaction chamber, 3 is a temperature control unit for controlling the temperature in the reaction chamber,
Reference numeral 4 is a main processing unit of the main controller 7 connected to the external interface 1, gas flow rate control unit 2 and temperature control unit 3, 5 and 6 are system ROM and RAM connected to the main processing unit 4, respectively, and 8 is a processing unit. 4 is a display unit connected to.

Conventionally, as shown in FIG. 4, when the error occurs or the device operating state in the production by the recipe is written by allocating the memory area 9 of the RAM 6 inside the controller 7 and the buffer area 9A disappears, the old log 10 ₁ ~ 10 _n
It is configured to overwrite in order. The recipe referred to in the present invention is a device-specific process relating to the process sequence and control parameters (temperature, pressure, gas type and gas flow rate, control target values such as time) for each process device in order to control the wafer process. This refers to the program, the log is recipe ID, error name, date and time, event I
D, interlock information, temperature information, mechanical information, variation information such as gas flow rate is stored in time series.

[0004]

However, in the above-mentioned conventional example, there is a limit to the memory expansion because the number of log contents increases with the automation of the device, and many errors occur at one time. However, there was a problem in that it was not possible to keep a history of all of the production information.

[0005]

In order to solve the above-mentioned problems, the device of the present invention directly writes production information such as information at the time of error occurrence and recipe by an external storage medium, and directly writes the error information and the production information. It is characterized by being accessed from an external storage medium.

[0006]

[Operation] Due to the above-mentioned configuration, the error information and the production information are directly written in the external storage medium 12, and the written information is directly accessed from this.

[0007]

1 is a block diagram showing the configuration of an embodiment of the device of the present invention, and FIG. 2 is an internal configuration diagram of a memory in the present invention. In FIG. 1, parts given the same reference numerals as those in FIG. In this embodiment,
The main processing unit 4 is directly connected to an external storage medium 12 for inputting information on occurrence of an error or production information such as a recipe via the external storage interface 11, and the external storage medium 12 is not connected by any chance. RA in case
A minimum memory space 9 for writing error information and production information in M6 and a buffer area 9A are provided. As the external storage medium 12 in the present invention, an IC memory card, a floppy disk memory, a hard disk memory, a rewritable CD-ROM, or the like can be used.

In the above structure, the error information and the production information are directly written in the external storage medium 12, and the written information is directly accessed from this.
In addition, in the present embodiment, the load of the processing unit 4 is lightened by accessing the log reading directly from the display unit 8 without passing through the main processing unit 4. Thereby, the RAM 6 of the main controller 7 can be expanded as a system parameter, and the function can be improved.

[0009]

As is apparent from the above description, according to the present invention, the error information and the production information are written in the external storage medium. Therefore, the history of the error information when a large number of errors occur at one time It is possible to stock the history of all production information and a large number of production information, the error information memory area and the production information memory area can be expanded, and the function can be improved by expanding the system parameters and the history of error information and production information By using a medium that can be easily exchanged and carried, data analysis can be used outside the clean room.

[Brief description of drawings]

FIG. 1 is a block diagram showing a configuration of an embodiment of a device of the present invention.

FIG. 2 is an internal configuration diagram of a memory according to the present invention.

FIG. 3 is a block diagram showing a configuration of an example of a conventional device.

FIG. 4 is an internal configuration diagram of a conventional memory.

[Explanation of symbols]

1 External Input Interface 2 Gas Flow Control Section 3 Temperature Control Section 4 Main Processing Section 5 System ROM 6 RAM 7 Main Controller 8 Display Section 9 Error / Production Information Storage Area 9A Buffer Storage Area 10 _{1-10 n} Log 11 External Storage Interface 12 External storage medium

Claims (1)

[Claims] 1. Control of a semiconductor manufacturing apparatus, characterized in that information when an error occurs, production information such as a recipe, etc. is directly written in an external storage medium and the error information and production information are directly accessed from the external storage medium. apparatus.