JPH084584Y2 - 表面弾性波真空計 - Google Patents

表面弾性波真空計

Info

Publication number
JPH084584Y2
JPH084584Y2 JP1988036995U JP3699588U JPH084584Y2 JP H084584 Y2 JPH084584 Y2 JP H084584Y2 JP 1988036995 U JP1988036995 U JP 1988036995U JP 3699588 U JP3699588 U JP 3699588U JP H084584 Y2 JPH084584 Y2 JP H084584Y2
Authority
JP
Japan
Prior art keywords
acoustic wave
surface acoustic
vacuum
degree
wave resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988036995U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01140147U (el
Inventor
修 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Casio Computer Co Ltd
Original Assignee
Casio Computer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Casio Computer Co Ltd filed Critical Casio Computer Co Ltd
Priority to JP1988036995U priority Critical patent/JPH084584Y2/ja
Publication of JPH01140147U publication Critical patent/JPH01140147U/ja
Application granted granted Critical
Publication of JPH084584Y2 publication Critical patent/JPH084584Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP1988036995U 1988-03-19 1988-03-19 表面弾性波真空計 Expired - Lifetime JPH084584Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988036995U JPH084584Y2 (ja) 1988-03-19 1988-03-19 表面弾性波真空計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988036995U JPH084584Y2 (ja) 1988-03-19 1988-03-19 表面弾性波真空計

Publications (2)

Publication Number Publication Date
JPH01140147U JPH01140147U (el) 1989-09-26
JPH084584Y2 true JPH084584Y2 (ja) 1996-02-07

Family

ID=31263582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988036995U Expired - Lifetime JPH084584Y2 (ja) 1988-03-19 1988-03-19 表面弾性波真空計

Country Status (1)

Country Link
JP (1) JPH084584Y2 (el)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54138480A (en) * 1978-04-20 1979-10-26 Toshiba Corp Temperature detector
JPS61240135A (ja) * 1985-04-17 1986-10-25 Yamatake Honeywell Co Ltd 真空計

Also Published As

Publication number Publication date
JPH01140147U (el) 1989-09-26

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