JPH0834402B2 - Piezoelectric resonator - Google Patents
Piezoelectric resonatorInfo
- Publication number
- JPH0834402B2 JPH0834402B2 JP1186778A JP18677889A JPH0834402B2 JP H0834402 B2 JPH0834402 B2 JP H0834402B2 JP 1186778 A JP1186778 A JP 1186778A JP 18677889 A JP18677889 A JP 18677889A JP H0834402 B2 JPH0834402 B2 JP H0834402B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- piezoelectric resonator
- external
- piezoelectric
- internal electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は、厚み縦振動の２倍波を用いた圧電共振子に
関する。TECHNICAL FIELD The present invention relates to a piezoelectric resonator using a second harmonic of thickness longitudinal vibration.
［背景技術］ 第５図に厚み縦振動を利用した２倍波の圧電共振子
（例えば２倍波圧電発振子）を示す。従来の２倍波圧電
共振子Ｃは、一対のグリーンシート51,52を積層して形
成される圧電基板53の内部に一方向に延びたストライプ
状の内部電極54を設け、圧電基板53の両外面に内部電極
54と対向させて円形の外部電極55,56（外部電極56は、
グリーンシート52の下面を投影した破線の枠内に示して
ある。）を設けていた。即ち、従来の２倍波圧電共振子
Ｃにあっては、圧電基板53の両面に設けられた外部電極
55,56はいずれも、内部電極の長さ方向と幅方向に対応
する寸法が等しくなっていた。BACKGROUND ART FIG. 5 shows a second-harmonic piezoelectric resonator (for example, second-harmonic piezoelectric oscillator) that utilizes thickness longitudinal vibration. In the conventional second harmonic piezoelectric resonator C, a striped internal electrode 54 extending in one direction is provided inside a piezoelectric substrate 53 formed by laminating a pair of green sheets 51, 52, and both piezoelectric substrates 53 are provided. Internal electrodes on the outer surface
Circular external electrodes 55, 56 facing the 54 (external electrode 56 is
The lower surface of the green sheet 52 is shown in a frame surrounded by a broken line. ) Was provided. That is, in the conventional second harmonic piezoelectric resonator C, the external electrodes provided on both surfaces of the piezoelectric substrate 53.
In both 55 and 56, the dimensions corresponding to the lengthwise and widthwise directions of the internal electrodes were the same.
［発明が解決しようとする課題］ 上記のような従来構造の２倍波圧電共振子の周波数−
インピーダンス特性を第６図に示す。第６図において、
縦軸はインピーダンスＺ、横軸は周波数ｆである。[Problems to be Solved by the Invention] The frequency of the second harmonic piezoelectric resonator having the conventional structure as described above-
The impedance characteristic is shown in FIG. In FIG.
The vertical axis represents impedance Z and the horizontal axis represents frequency f.
このインピーダンス特性から明らかなように、従来の
２倍波共振子にあっては、反共振点Ａよりも少し高周波
側にスプリアスＳが発生しており、共振子の特性を損ね
るという問題がある。As is apparent from this impedance characteristic, in the conventional second-harmonic resonator, spurious S occurs slightly on the higher frequency side than the anti-resonance point A, and there is a problem that the characteristics of the resonator are impaired.
しかして、本発明は叙上の従来例の欠点に鑑みてなさ
れたものであり、その目的とするところはインピーダン
ス特性において、反共振点よりも少し高周波側に発生し
ていたスプリアスを抑圧することのできる２倍波圧電共
振子を提供することにある。Therefore, the present invention has been made in view of the drawbacks of the above conventional examples, and an object thereof is to suppress spurious that has occurred in the impedance characteristic at a slightly higher frequency side than the anti-resonance point. Another object of the present invention is to provide a double wave piezoelectric resonator that can be manufactured.
［課題を解決するための手段］ このため本発明の圧電共振子は、圧電基板内部の厚み
方向ほぼ中央に、圧電基板の外面と平行で、かつ一方向
に延びた内部電極を設け、内部電極と対向させて圧電基
板の両外面にそれぞれ外部電極を設けた厚み縦振動の２
倍波を用いたエネルギー閉じ込め型圧電共振子におい
て、前記外部電極のうちいずれか一方の外部電極を円形
又は正多角形とし、前記外部電極のうちいずれか他方の
外部電極について、その内部電極長さ方向の寸法を内部
電極幅方向の寸法よりも短くしたことを特徴としてい
る。[Means for Solving the Problem] For this reason, the piezoelectric resonator of the present invention is provided with an internal electrode that is parallel to the outer surface of the piezoelectric substrate and extends in one direction approximately at the center in the thickness direction inside the piezoelectric substrate. 2 of thickness longitudinal vibration in which external electrodes are provided on both outer surfaces of the piezoelectric substrate so as to face each other.
In an energy trap type piezoelectric resonator using a harmonic wave, one of the external electrodes has a circular or regular polygonal shape, and the internal electrode length of the other external electrode of the external electrodes is the same. It is characterized in that the dimension in the direction is made shorter than the dimension in the width direction of the internal electrodes.
［作用］ 本発明にあっては、圧電基板の内部に内部電極を設
け、両外面に内部電極と対向させて、それぞれ外部電極
を設けた２倍波圧電共振子において、いずれか一方の外
部電極を円形又は正多角形とし、他方の外部電極の内部
電極長さ方向の寸法を内部電極幅方向の寸法よりも短く
したところ、従来の圧電共振子の周波数−インピーダン
ス特性に表れていた反共振点の近くのスプリアスを消失
させることができた。[Operation] In the present invention, in the second harmonic piezoelectric resonator in which the internal electrodes are provided inside the piezoelectric substrate, and the external electrodes are provided on both outer surfaces of the piezoelectric substrate so as to face the internal electrodes, one of the external electrodes is provided. Is a circle or a regular polygon, and the dimension of the other external electrode in the lengthwise direction of the inner electrode is shorter than the dimension in the widthwise direction of the inner electrode, the anti-resonance point that appears in the frequency-impedance characteristics of the conventional piezoelectric resonator. I was able to eliminate the spurious near.
［実施例］ 以下、本発明の実施例を添付図に基づいて詳述する。[Example] Hereinafter, an example of the present invention will be described in detail with reference to the accompanying drawings.
第１図に示すように、圧電基板１は圧電セラミックス
の一対のグリーンシート5,6を積層することによって形
成されている。一対のグリーンシート5,6のうち、一方
のグリーンシート５の上面には導電ペースト７を印刷す
ることにより、外部電極３と引き出し電極８が形成され
ている。また、他方のグリーンシート６の上面には導電
ペースト７を印刷することにより、端から端まで延びた
ストライプ状の内部電極２が形成されており、その下面
には導電ペースト７を印刷することにより外部電極４と
引き出し電極９（第１図では、グリーンシート６の下面
を投影した破線の枠内に示してある。）が形成されてい
る。しかして、各電極の位置を合わせて上記グリーンシ
ート5,6を積層し、圧着させて圧電基板１を形成し、こ
の後全体を焼成し、さらに圧電基板１の厚み方向に分極
処理を施して圧電共振子Ｂが製作される。As shown in FIG. 1, the piezoelectric substrate 1 is formed by laminating a pair of green sheets 5 and 6 of piezoelectric ceramics. The external electrode 3 and the extraction electrode 8 are formed by printing the conductive paste 7 on the upper surface of one of the pair of green sheets 5 and 6. Further, by printing the conductive paste 7 on the upper surface of the other green sheet 6, the stripe-shaped internal electrodes 2 extending from one end to the other are formed, and by printing the conductive paste 7 on the lower surface thereof. The external electrode 4 and the extraction electrode 9 (in FIG. 1, shown in the frame of the broken line which projected the lower surface of the green sheet 6) are formed. Then, the green sheets 5 and 6 are laminated by aligning the positions of the respective electrodes and pressure-bonded to each other to form the piezoelectric substrate 1, after which the whole is fired and further subjected to polarization treatment in the thickness direction of the piezoelectric substrate 1. The piezoelectric resonator B is manufactured.
こうして製作された２倍波圧電共振子Ｂは、第２図
（ａ）（ｂ）に示すように圧電基板１の内部にストライ
プ状の内部電極２を有し、圧電基板１の両外面に内部電
極２と対向するようにして外部電極3,4が形成されてい
る。一方の外部電極３は、第２図（ａ）に示すように内
部電極２の幅よりも若干大きな直径ｄの円形をしてい
る。もう一方の外部電極４は、第２図（ｂ）に示すよう
に、内部電極２の幅よりも若干大きな直径の円形から想
像線で囲んだ部分10を除去した形状となっており、この
ため内部電極長さ方向の寸法ｃが内部電極幅方向の寸法
ｄよりも短くなっている。ここで外部電極４の面積は、
元の円形の面積（除去部分10の面積を含めたもの）の50
％ないし90％程度となっている。The second-harmonic piezoelectric resonator B manufactured in this way has stripe-shaped internal electrodes 2 inside the piezoelectric substrate 1 as shown in FIGS. External electrodes 3 and 4 are formed so as to face the electrode 2. One of the external electrodes 3 has a circular shape with a diameter d which is slightly larger than the width of the internal electrode 2, as shown in FIG. As shown in FIG. 2 (b), the other external electrode 4 has a shape in which a portion 10 surrounded by an imaginary line is removed from a circle having a diameter slightly larger than the width of the internal electrode 2. The dimension c in the internal electrode length direction is shorter than the dimension d in the internal electrode width direction. Here, the area of the external electrode 4 is
50 of the original circular area (including the area of the removed portion 10)
% To about 90%.
第３図に示すものは、両側の部分10を削除された外部
電極４の電極面積（元の円形の面積に対する百分率で表
してある。）と主振動のレスポンスα及びスプリアスの
レスポンスβとの関係を示すグラフである。このグラフ
から明らかなように、外部電極４を削除する面積が10％
程度以下（電極面積90％程度以上）の場合にはスプリア
スのレスポンスβが十分に小さくならず、スプリアスの
抑圧効果が小さい。また、外部電極４を50％程度以上削
った場合（電極面積が50％以下の場合）には、主振動が
分割する。従って、外部電極の面積としては、元の円形
の面積に対して50％〜90％程度が好適である。FIG. 3 shows the relationship between the electrode area (expressed as a percentage of the original circular area) of the external electrode 4 in which the portions 10 on both sides are deleted, and the response α of the main vibration and the response β of the spurious. It is a graph which shows. As is clear from this graph, the area where the external electrode 4 is removed is 10%.
In the case of less than about (about 90% or more of the electrode area), the spurious response β does not become sufficiently small, and the spurious suppressing effect is small. When the external electrode 4 is scraped by 50% or more (the electrode area is 50% or less), the main vibration is divided. Therefore, the area of the external electrode is preferably about 50% to 90% of the original circular area.
こうして、一方の外部電極４を元の円形の面積から10
％ないし50％程度削除したところ、第４図に示すよう
に、従来の圧電共振子のインピーダンス特性において反
共振点Ａの少し高周波側に表れていたスプリアスＳが抑
圧され、第４図のように共振点Ｒと反共振点Ａの近くに
スプリアスの発生しない良好なインピーダンス特性が得
られた。In this way, one external electrode 4 is
% To 50%, as shown in FIG. 4, as shown in FIG. 4, the spurious S, which appears on the high frequency side of the antiresonance point A in the impedance characteristic of the conventional piezoelectric resonator, is suppressed, and as shown in FIG. Good impedance characteristics were obtained in the vicinity of the resonance point R and the antiresonance point A without spurious emission.
なお、本発明は上記実施例以外にも種々設計変更可能
であり、たとえば削除される側の外部電極の元の形状
は、円形でなく正多角形となっていても良い。この場合
も一方の外部電極について、内部電極長さ方向の寸法と
内部電極幅方向の寸法が等しくなっており、他方の外部
電極については、内部電極長さ方向の寸法が内部電極幅
方向の寸法よりも短くなっている。The present invention can be modified in various ways other than the above-described embodiments, and the original shape of the external electrode on the side to be deleted may be a regular polygon instead of a circle. In this case as well, the dimension in the internal electrode length direction and the dimension in the internal electrode width direction are the same for one external electrode, and the dimension in the internal electrode length direction for the other external electrode is the dimension in the internal electrode width direction. Is shorter than.
また、内部電極長さ方向で短くなった外部電極を形成
する場合には、上記説明のように圧電基板の外面に円形
等の電極を設けた後、この円形等の電極の縁部を部分的
に削除することによって形成してもよく、あるいは初め
から内部電極長さ方向に短縮された形状の電極となるよ
うに形成してもよい。また、各電極は、真空蒸着やスパ
ッタリング等の方法によって設けてもよい。Further, in the case of forming an external electrode that is shortened in the length direction of the internal electrode, after providing a circular electrode or the like on the outer surface of the piezoelectric substrate as described above, the edge portion of the circular electrode is partially removed. The electrode may be formed by removing the first electrode or the electrode may be formed so as to have a shape shortened in the lengthwise direction of the internal electrode from the beginning. Further, each electrode may be provided by a method such as vacuum deposition or sputtering.
［発明の効果］ 本発明によれば、従来の２倍波共振子のインピーダン
ス特性において反共振点の高周波側に生じていたスプリ
アスを抑圧することができ、良好な特性を有する厚み縦
振動２倍波圧電共振子を得ることができた。[Advantages of the Invention] According to the present invention, in the impedance characteristic of the conventional second harmonic resonator, spurious which is generated on the high frequency side of the anti-resonance point can be suppressed, and the thickness longitudinal vibration doubled with good characteristics. The wave piezoelectric resonator could be obtained.
第１図は本発明の一実施例における圧電共振子の製造過
程を示す斜視図、第２図（ａ）（ｂ）は同上の圧電共振
子の上面図及び下面図、第３図は一方の外部電極の電極
面積と主振動及びスプリアスのレスポンスとの関係を示
すグラフ、第４図は同上の周波数−インピーダンス特性
を示すグラフ、第５図は従来例の製造過程における斜視
図、第６図は同上の周波数−インピーダンス特性を示す
グラフである。 １……圧電基板、２……内部電極 3,4……外部電極FIG. 1 is a perspective view showing a process of manufacturing a piezoelectric resonator according to an embodiment of the present invention, FIGS. 2 (a) and 2 (b) are a top view and a bottom view of the same piezoelectric resonator, and FIG. A graph showing the relationship between the electrode area of the external electrode and the response of the main vibration and spurious, FIG. 4 is a graph showing the frequency-impedance characteristic of the same, FIG. 5 is a perspective view in the manufacturing process of the conventional example, and FIG. It is a graph which shows the frequency-impedance characteristic same as the above. 1 ... Piezoelectric substrate, 2 ... Internal electrode 3,4 ... External electrode
Claims (1)
基板の外面と平行で、かつ一方向に延びた内部電極を設
け、内部電極と対向させて圧電基板の両外面にそれぞれ
外部電極を設けた厚み縦振動の２倍波を用いたエネルギ
ー閉じ込め型圧電共振子において、 前記外部電極のうちいずれか一方の外部電極を円形又は
正多角形とし、 前記外部電極のうちいずれか他方の外部電極について、
その内部電極長さ方向の寸法を内部電極幅方向の寸法よ
りも短くしたことを特徴とする圧電共振子。1. An internal electrode extending in one direction in parallel with the outer surface of the piezoelectric substrate is provided substantially in the center in the thickness direction inside the piezoelectric substrate, and the external electrode is provided on both outer surfaces of the piezoelectric substrate so as to face the internal electrode. In an energy trap type piezoelectric resonator using a second harmonic of thickness longitudinal vibration provided, one of the external electrodes has a circular or regular polygonal shape, and the other external electrode of the external electrodes has a circular shape or a regular polygonal shape. about,
A piezoelectric resonator having a dimension in the lengthwise direction of the internal electrode smaller than that in the widthwise direction of the internal electrode.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1186778A JPH0834402B2 (en) | 1989-07-19 | 1989-07-19 | Piezoelectric resonator |
| US07/554,783 US5065066A (en) | 1989-07-19 | 1990-07-18 | Piezoelectric resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1186778A JPH0834402B2 (en) | 1989-07-19 | 1989-07-19 | Piezoelectric resonator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0352314A JPH0352314A (en) | 1991-03-06 |
| JPH0834402B2 true JPH0834402B2 (en) | 1996-03-29 |
Family
ID=16194441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1186778A Expired - Fee Related JPH0834402B2 (en) | 1989-07-19 | 1989-07-19 | Piezoelectric resonator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0834402B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04365213A (en) * | 1991-06-13 | 1992-12-17 | Murata Mfg Co Ltd | Piezoelectric resonator |
| JP5223687B2 (en) | 2009-01-09 | 2013-06-26 | ソニー株式会社 | Stereoscopic glasses |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57147315A (en) * | 1981-03-06 | 1982-09-11 | Nec Corp | Thickness oscillation piezoelectric ceramic oscillator |
| JP2790178B2 (en) * | 1987-06-26 | 1998-08-27 | 株式会社村田製作所 | Electrostrictive resonance device |
-
1989
- 1989-07-19 JP JP1186778A patent/JPH0834402B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0352314A (en) | 1991-03-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |