JPH08334639A - Mach-zehnder optical circuit - Google Patents

Mach-zehnder optical circuit

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Publication number
JPH08334639A
JPH08334639A JP14064895A JP14064895A JPH08334639A JP H08334639 A JPH08334639 A JP H08334639A JP 14064895 A JP14064895 A JP 14064895A JP 14064895 A JP14064895 A JP 14064895A JP H08334639 A JPH08334639 A JP H08334639A
Authority
JP
Japan
Prior art keywords
refractive index
mach
optical circuit
zehnder optical
negative refractive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14064895A
Other languages
Japanese (ja)
Other versions
JP3209042B2 (en
Inventor
Naoto Uetsuka
尚登 上塚
Hideaki Arai
英明 荒井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to JP14064895A priority Critical patent/JP3209042B2/en
Publication of JPH08334639A publication Critical patent/JPH08334639A/en
Application granted granted Critical
Publication of JP3209042B2 publication Critical patent/JP3209042B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PURPOSE: To provide a Mach-Zehnder optical circuit with which the stable execution of wavelength multiplexing and demultiplexing to temp. is possible and there is no need for heating with heaters. CONSTITUTION: The Mach-Zehnder optical circuit of a waveguide type is constituted by connecting the phase shift part 14b consisting two pieces of waveguides 15, 16 which are formed on a substrate 21 and the composed of signal mode channel waveguides consisting of cores 23a having a rectangular shape in section and the structure obtained by embedding the circumferences of these cores 23a with clads 24 having the refractive index smaller than the refractive index of the cores 23a and vary in the length from two directional couplers 13a, 13b consisting of two pieces of parallel channel waveguides between these directional couplers 13a, 13b. Negative refractive index material 25 consisting of materials having the negative coefft. of temp. of the refractive index are disposed on the waveguides at least the phase shift part 14b.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、導波路型光部品に関
し、特にマッハツェンダ光回路に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a waveguide type optical component, and more particularly to a Mach-Zehnder optical circuit.

【0002】[0002]

【従来の技術】波長多重伝送(Wavelength Division Mu
lti/demultiplexing:WDM)は、光通信容量を大幅に増加
することができ、柔軟性のあるシステムを構築できるた
め、今後の通信システムとして有望視されている。さら
に容量を上げるため、チャネル間隔の狭い波長を多重す
る狭帯域WDM (Dense WDM or FDM(Frequency Divisio
nMulti/demultiplexing)) が注目されている。このシス
テムは異なる2波長(周波数)の光を合分波する光合分
波器が不可欠であり、石英系ガラス導波路を用いたマッ
ハツェンダ光回路が有望視されている。
2. Description of the Related Art Wavelength Division Mu
Lti / demultiplexing (WDM) is a promising future communication system because it can significantly increase the optical communication capacity and build a flexible system. In order to further increase the capacity, a narrow band WDM (Frequency Divisio) that multiplexes wavelengths with narrow channel spacing is used.
nMulti / demultiplexing)) is attracting attention. This system requires an optical multiplexer / demultiplexer that multiplexes and demultiplexes light of two different wavelengths (frequency), and a Mach-Zehnder optical circuit using a silica glass waveguide is considered promising.

【0003】図5は従来のマッハツェンダ光回路の平面
図を示す図であり、図6はそのA−A線断面図である。
FIG. 5 is a plan view of a conventional Mach-Zehnder optical circuit, and FIG. 6 is a sectional view taken along the line AA.

【0004】図5及び図6に示すように、基板21上に
はバッファ層22が形成され、バッファ層22の上には
コア23a,23b及びクラッド24からなる2本の入
力導波路11a,11bが形成されている。両入力導波
路11a,11bは入力側方向性結合器(3dB方向性
結合器)13aの入力端にそれぞれ接続されており、入
力側方向性結合器13aの出力端にはΔLだけ長さが異
なった2本の導波路(以下「アーム」という。)15,
16が接続されている。
As shown in FIGS. 5 and 6, a buffer layer 22 is formed on a substrate 21, and two input waveguides 11a and 11b composed of cores 23a and 23b and a clad 24 are formed on the buffer layer 22. Are formed. Both input waveguides 11a and 11b are respectively connected to the input ends of the input side directional coupler (3 dB directional coupler) 13a, and the output ends of the input side directional coupler 13a differ in length by ΔL. Two waveguides (hereinafter referred to as "arms") 15,
16 are connected.

【0005】一方(図の上方)のアーム15の上にはヒ
ータ17が設けられている。これらアーム15,16及
びヒータ17で位相シフト部14aが形成されている。
両アーム15,16は出力側方向性結合器(3dB方向
性結合器)13bの入力端に接続され、出力側方向性結
合器13bの出力端は2本の出力導波路12a,12b
にそれぞれ接続されている。
A heater 17 is provided on one arm 15 (upper side in the drawing). The arms 15 and 16 and the heater 17 form a phase shifter 14a.
Both arms 15 and 16 are connected to the input end of the output side directional coupler (3 dB directional coupler) 13b, and the output end of the output side directional coupler 13b is two output waveguides 12a and 12b.
Respectively connected to.

【0006】このようなマッハツェンダ光回路におい
て、入力ポートの一つであるポート1に波長λ1 、λ2
の光が入力した場合を考える。
In such a Mach-Zehnder optical circuit, the wavelengths λ 1 and λ 2 are input to the port 1 which is one of the input ports.
Consider the case where light is input.

【0007】光は入力側方向性結合器13aにより、
1:1に分岐されそれぞれアーム15、アーム16を伝
搬する。アーム15はアーム16と比較してΔLだけ長
いため位相ずれが生じる。両アーム15,16を伝搬し
た光が再び出力側方向性結合器13bに結合されると光
干渉により、波長λ1 の光はポート3より、波長λ2
光はポート4より出力する。このときの分波条件は数1
式によって与えられる。
Light is radiated by the directional coupler 13a on the input side.
It branches into 1: 1 and propagates through the arms 15 and 16, respectively. Since the arm 15 is longer than the arm 16 by ΔL, a phase shift occurs. When the lights propagating through both arms 15 and 16 are again coupled to the output side directional coupler 13b, light of wavelength λ 1 is output from port 3 and light of wavelength λ 2 is output from port 4 due to optical interference. The demultiplexing condition at this time is Equation 1
Given by the formula.

【0008】[0008]

【数1】Δλ=λ1 −λ2 =λ1 ・λ2 /(2・neff
・ΔL) (但し、neff :アームの等価屈折率、ΔL:両アーム
の導波路長差) 通常、狭帯域WDMにおいては、Δλは0.01nm〜
1nmである。
[Formula 1] Δλ = λ 1 −λ 2 = λ 1 · λ 2 / (2 · n eff
ΔL) (where n eff is the equivalent refractive index of the arm, ΔL is the waveguide length difference between both arms) Normally, in a narrow band WDM, Δλ is 0.01 nm to
It is 1 nm.

【0009】neff は約1.47(石英ガラス製のアー
ムの場合) 波長λ1 、λ2 は約1.55μmとすると、数1式より
ΔLは0.8mm〜82mmとなる。このようにΔLが
比較的大きな値となるため、アームを構成する石英ガラ
スの温度による屈折率変化(dN/dTが約1×1
-6:Nは屈折率、Tは温度)及び線膨張係数(約0.
35×10-6/℃)の影響を受けやすく、分波される光
の波長λ1 、λ2 が温度によって変化する。
N eff is about 1.47 (in the case of an arm made of quartz glass) When the wavelengths λ 1 and λ 2 are about 1.55 μm, ΔL is 0.8 mm to 82 mm from the equation ( 1 ). Since ΔL has a relatively large value in this way, the change in the refractive index of the quartz glass forming the arm due to the temperature (dN / dT is about 1 × 1)
0 -6 : N is the refractive index, T is the temperature, and the linear expansion coefficient (about 0.
35 × 10 −6 / ° C.) and the wavelengths λ 1 and λ 2 of the demultiplexed light change depending on the temperature.

【0010】一例として、マッハツェンダ光回路の温度
に対する波長損失特性の変化を図7に示す。同図におい
て、横軸は波長を示し、縦軸は損失を示している。分波
間隔Δλは0.1nmである。例えば周囲温度が10℃
上昇すると、波長損失特性は、長波長側に0.02nm
シフトする。
As an example, FIG. 7 shows changes in wavelength loss characteristics with respect to temperature of a Mach-Zehnder optical circuit. In the figure, the horizontal axis represents wavelength and the vertical axis represents loss. The demultiplexing interval Δλ is 0.1 nm. For example, the ambient temperature is 10 ℃
As it rises, the wavelength loss characteristic becomes 0.02 nm on the long wavelength side.
shift.

【0011】このため、図5に示したような従来のマッ
ハツェンダ光回路においては、Cr等からなる金属膜を
一方のアーム上に形成したヒータに電流を流し、このと
きに生じる熱により合分波波長を制御する必要があっ
た。
Therefore, in the conventional Mach-Zehnder optical circuit as shown in FIG. 5, a current is caused to flow through a heater having a metal film made of Cr or the like formed on one arm, and the heat generated at this time causes the multiplexing / demultiplexing. It was necessary to control the wavelength.

【0012】[0012]

【発明が解決しようとする課題】しかしながら、上述し
た従来のマッハツェンダ光回路は、合分波波長を制御す
るのにヒータを加熱するため電力供給が必要であり経済
的ではない。特に、マッハツェンダ光回路を多数集積化
した場合、その消費電力は数十ワットにもなり、実用的
なシステムでは使用が困難となってしまう。
However, the above-described conventional Mach-Zehnder optical circuit is not economical because it requires power supply to heat the heater to control the wavelength of the multiplexed / demultiplexed light. In particular, when a large number of Mach-Zehnder optical circuits are integrated, the power consumption becomes tens of watts, which makes it difficult to use in a practical system.

【0013】そこで、本発明の目的は、上記課題を解決
し、温度に対して安定に波長合分波でき、しかもヒータ
加熱が不要なマッハツェンダ光回路を提供することにあ
る。
SUMMARY OF THE INVENTION It is an object of the present invention to solve the above problems and to provide a Mach-Zehnder optical circuit which can stably perform wavelength multiplexing / demultiplexing with respect to temperature and which does not require heater heating.

【0014】[0014]

【課題を解決するための手段】上記目的を達成するため
に本発明は、基板上に形成され、断面矩形状のコアとこ
のコアの周囲をコアよりも屈折率の小さいクラッドで埋
め込んだ構造の単一モードチャネル導波路より構成さ
れ、2本の平行なチャネル導波路からなる2つの方向性
結合器と長さの異なった2本の導波路からなる位相シフ
ト部を方向性結合器の間に接続した導波路型のマッハツ
ェンダ光回路において、少なくとも位相シフト部の導波
路上に屈折率の温度係数が負の材料からなる負屈折率材
を設けたものである。
In order to achieve the above object, the present invention has a structure in which a core having a rectangular cross section and a clad having a refractive index smaller than that of the core are embedded around the core formed on a substrate. Between the directional couplers, a directional coupler composed of two parallel channel waveguides and a phase shift part consisting of two waveguides of different lengths is formed between the directional couplers. In the connected waveguide type Mach-Zehnder optical circuit, a negative refractive index material made of a material having a negative temperature coefficient of refractive index is provided at least on the waveguide of the phase shift section.

【0015】上記構成に加え本発明は、コアと負屈折率
材との間のクラッドの厚さが0μmから20μmの間の
大きさとしたものである。
In addition to the above structure, the present invention is such that the thickness of the clad between the core and the negative refractive index material is between 0 μm and 20 μm.

【0016】上記構成に加え本発明は、負屈折率材とし
てTiO2 等の酸化物を用いてもよい。
In addition to the above structure, in the present invention, an oxide such as TiO 2 may be used as the negative refractive index material.

【0017】上記構成に加え本発明は、負屈折率材とし
てフォトポリマを用いてもよい。
In addition to the above structure, the present invention may use a photopolymer as the negative refractive index material.

【0018】上記構成に加え本発明は、負屈折率材とし
て多成分ガラスを用いてもよい。
In the present invention, in addition to the above constitution, multi-component glass may be used as the negative refractive index material.

【0019】[0019]

【作用】上記構成によれば、位相シフト部の導波路の屈
折率の温度係数は正であり、導波路上に設けられた負屈
折率材の温度係数が負であるため、温度が上昇しても降
下しても温度係数が互いにキャンセルされて全体として
は温度係数が非常に小さくなり光回路の動作が温度変化
に対して安定になる。このためヒータで導波路を加熱す
る必要がなくなる。
According to the above structure, since the temperature coefficient of the refractive index of the waveguide of the phase shift portion is positive and the temperature coefficient of the negative refractive index material provided on the waveguide is negative, the temperature rises. Even if the temperature drops, the temperature coefficients cancel each other and the temperature coefficient becomes very small as a whole, and the operation of the optical circuit becomes stable against temperature changes. Therefore, it is not necessary to heat the waveguide with the heater.

【0020】[0020]

【実施例】以下、本発明の一実施例を添付図面に基づい
て詳述する。
An embodiment of the present invention will be described in detail below with reference to the accompanying drawings.

【0021】図1は本発明のマッハツェンダ光回路の一
実施例の平面図であり、図2はそのB−B線断面図であ
る。尚、従来例と同様の部材には共通の符号を用いた。
FIG. 1 is a plan view of an embodiment of a Mach-Zehnder optical circuit of the present invention, and FIG. 2 is a sectional view taken along line BB thereof. The same reference numerals are used for the same members as in the conventional example.

【0022】図1及び図2に示すように、石英(あるい
はSi)からなる基板21上にはバッファ層22が形成
され、バッファ層22の上にはコア23a,23b及び
クラッド24からなる2本の入力導波路11a,11b
が形成されている。両入力導波路11a,11bは入力
側方向性結合器13aの入力端にそれぞれ接続されてお
り、入力側方向性結合器13aの出力端にはΔLだけ長
さが異なった2本のアーム15,16が接続されてい
る。
As shown in FIGS. 1 and 2, a buffer layer 22 is formed on a substrate 21 made of quartz (or Si), and two buffer layers 22 are made up of cores 23a and 23b and a clad 24. Input waveguides 11a, 11b of
Are formed. Both the input waveguides 11a and 11b are respectively connected to the input ends of the input-side directional coupler 13a, and the output ends of the input-side directional coupler 13a have two arms 15 whose lengths differ by ΔL, 16 are connected.

【0023】一方のアーム15の上にはフォトポリマか
らなる負屈折率材25が設けられている。この負屈折率
材25はクラッド24の一部をエッチングして得られた
溝に挿入されている。エッチング方法としては反応性エ
ッチングを用いた。これらアーム15,16及び負屈折
率材25で位相シフト部14bが形成されている。
A negative refractive index material 25 made of photopolymer is provided on one arm 15. The negative refractive index material 25 is inserted into a groove obtained by etching a part of the clad 24. Reactive etching was used as the etching method. The phase shifter 14b is formed by the arms 15 and 16 and the negative refractive index material 25.

【0024】負屈折率材25の屈折率の温度係数(dN
/dT:Nは屈折率、Tは温度)は−1×10-4と石英
ガラス製の導波路23a(11a)の温度係数(dN/
dT)1×10-6と比べて二桁大きい値となっている。
The temperature coefficient of the refractive index of the negative refractive index material 25 (dN
/ DT: N is the refractive index, T is the temperature) is -1 × 10 -4, and the temperature coefficient of the waveguide 23a (11a) made of quartz glass (dN /
The value is two orders of magnitude larger than dT) 1 × 10 −6 .

【0025】両アーム15,16は出力側方向性結合器
13bの入力端に接続され、出力側方向性結合器13b
の出力端は2本の出力導波路12a,12bにそれぞれ
接続されている。
Both arms 15 and 16 are connected to the input ends of the output side directional coupler 13b, and are connected to the output side directional coupler 13b.
The output ends of are connected to the two output waveguides 12a and 12b, respectively.

【0026】次に実施例の作用を述べる。Next, the operation of the embodiment will be described.

【0027】マッハツェンダ光回路の温度に対する波長
損失特性の変化は、アーム15,16を構成する石英ガ
ラスの温度による屈折率変化(dN/dTが約1×10
-6:Nは屈折率、Tは温度)及び線膨張係数(約0.3
5×10-6/℃)により、位相シフト部14bにおける
2つのアーム15,16間の位相差Φが変化することに
起因する。この変化は数2式によって与えられる。
The change of the wavelength loss characteristic with respect to the temperature of the Mach-Zehnder optical circuit is caused by the change of the refractive index of the silica glass forming the arms 15 and 16 (dN / dT is about 1 × 10 5).
-6 : N is refractive index, T is temperature) and linear expansion coefficient (about 0.3)
5 × 10 −6 / ° C.), the phase difference Φ between the two arms 15 and 16 in the phase shift unit 14b changes. This change is given by the equation (2).

【0028】[0028]

【数2】 ここで、neff :アームの等価屈折率 ΔL :両アームの導波路長差 λ :波長 T :温度 数2式の括弧内の第1項は石英ガラスの線膨張係数(約
0.35×10-6/℃)による変化を表わし、第2項は
石英ガラスの温度による屈折率変化(熱光学効果)を表
わす。従来例では第1項の符号と第2項の符号とが同符
号であるため、温度に対して変化することになる。従来
の場合の波長損失特性のシフト量を数2式を用いて求め
ると、分波間隔Δλが0.1nm(ΔLが約8300μ
m)、温度が10℃変化した場合は、0.02nmとな
り、図7に示した実験結果と一致する。
[Equation 2] Here, n eff : Equivalent refractive index of the arm ΔL: Waveguide length difference between both arms λ: Wavelength T: Temperature The first term in the parentheses of the equation 2 is the coefficient of linear expansion of silica glass (about 0.35 × 10 -6 / ° C.), and the second term represents the change in the refractive index (thermo-optical effect) of quartz glass with temperature. In the conventional example, the sign of the first term and the sign of the second term are the same sign, and therefore change with temperature. When the shift amount of the wavelength loss characteristic in the conventional case is obtained by using Formula 2, the demultiplexing interval Δλ is 0.1 nm (ΔL is about 8300 μm).
m), when the temperature changes by 10 ° C., it becomes 0.02 nm, which is in agreement with the experimental result shown in FIG. 7.

【0029】本実施例の場合は、屈折率の温度係数(d
N/dT)が負である材料からなる負屈折率材25をア
ーム15上に設けることにより、数2式の第1項と第2
項とをキャンセルすることができるため、温度に対して
安定な動作が可能となる。
In the case of this embodiment, the temperature coefficient of the refractive index (d
By providing the negative refractive index material 25 made of a material having a negative N / dT) on the arm 15, the first term and the second
Since the terms and can be canceled, stable operation with respect to temperature becomes possible.

【0030】すなわち、位相シフト部14bの導波路の
屈折率の温度係数は正であり、アーム15上に設けられ
た負屈折率材25の温度係数が負であるため、温度が上
昇しても降下しても温度係数が互いにキャンセルされて
全体としては温度係数が非常に小さくなりマッハツェン
ダ光回路の動作が温度変化に対して安定になる。このた
め従来のようにヒータ17でアーム15を加熱して屈折
率を制御する必要がなくなる。
That is, since the temperature coefficient of the refractive index of the waveguide of the phase shift section 14b is positive and the temperature coefficient of the negative refractive index material 25 provided on the arm 15 is negative, even if the temperature rises. Even if the temperature drops, the temperature coefficients cancel each other and the temperature coefficient becomes very small as a whole, and the operation of the Mach-Zehnder optical circuit becomes stable with respect to the temperature change. Therefore, there is no need to control the refractive index by heating the arm 15 with the heater 17 as in the conventional case.

【0031】ここで、一例としてフォトポリマからなる
負屈折率材をアーム15上に設けたときの温度に対する
波長損失特性を図3に示す。同図において横軸は波長を
示し、縦軸は損失を示している。この場合、コア23a
の上端から負屈折率材25の下端までのクラッド厚tを
10μmとした。従来のものと異なり、温度が10℃変
化しても波長損失特性はほとんどシフトせず安定な動作
を確認することができた。
Here, as an example, FIG. 3 shows wavelength loss characteristics with respect to temperature when a negative index material made of photopolymer is provided on the arm 15. In the figure, the horizontal axis represents wavelength and the vertical axis represents loss. In this case, the core 23a
The clad thickness t from the upper end to the lower end of the negative refractive index material 25 was 10 μm. Unlike the conventional one, the wavelength loss characteristic was hardly shifted even when the temperature was changed by 10 ° C., and stable operation could be confirmed.

【0032】次に最適条件について説明する。Next, the optimum conditions will be described.

【0033】図4に温度が10℃変化したときのクラッ
ド厚と波長損失のシフト量との関係を示す。同図におい
て横軸がクラッド厚を示し、縦軸がシフト量を示してい
る。
FIG. 4 shows the relationship between the cladding thickness and the wavelength loss shift amount when the temperature changes by 10 ° C. In the figure, the horizontal axis represents the cladding thickness, and the vertical axis represents the shift amount.

【0034】同図よりクラッド厚が20μm以上では負
屈折率材25の長さLを増しても、ほとんど効果がない
ことがわかる。また負屈折率材25を設ける部分の長さ
とクラッド24の厚さを適正化することにより、温度に
対するシフト量を略「0」にすることができることを確
認した。
From the figure, it can be seen that when the cladding thickness is 20 μm or more, there is almost no effect even if the length L of the negative refractive index material 25 is increased. Further, it was confirmed that the amount of shift with respect to temperature can be made substantially "0" by optimizing the length of the portion where the negative refractive index material 25 is provided and the thickness of the cladding 24.

【0035】尚、本実施例では負屈折率材25としてフ
ォトポリマを用いたが、これに限定されるものではな
く、TiO2 等の酸化物や多成分ガラス等温度係数が負
であれば他の材料を用いてもよい。また、負屈折率材を
導波路上に設ける代わりに導波路を形成する基板21自
体が負屈折率材で構成されていてもよい。
In this embodiment, a photopolymer is used as the negative refractive index material 25, but the material is not limited to this, and other materials such as oxides of TiO 2 and multi-component glass having a negative temperature coefficient can be used. You may use the material of. Further, instead of providing the negative refractive index material on the waveguide, the substrate 21 itself forming the waveguide may be made of the negative refractive index material.

【0036】[0036]

【発明の効果】以上要するに本発明によれば、次のよう
な優れた効果を発揮する。
In summary, according to the present invention, the following excellent effects are exhibited.

【0037】少なくとも位相シフト部の導波路上に屈折
率の温度係数が負の材料からなる負屈折率材を設けたの
で、温度に対して安定に波長合分波でき、しかもヒータ
加熱が不要なマッハツェンダ光回路を実現することがで
きる。
Since a negative refractive index material made of a material having a negative temperature coefficient of refractive index is provided at least on the waveguide of the phase shift portion, wavelength multiplexing / demultiplexing can be stably performed with respect to temperature, and heating by a heater is unnecessary. A Mach-Zehnder optical circuit can be realized.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明のマッハツェンダ光回路の一実施例の平
面図である。
FIG. 1 is a plan view of an embodiment of a Mach-Zehnder optical circuit of the present invention.

【図2】図1のB−B線断面図である。FIG. 2 is a sectional view taken along line BB of FIG.

【図3】フォトポリマからなる負屈折率材をアーム上に
設けたときの温度に対する波長損失特性を示す図であ
る。
FIG. 3 is a diagram showing wavelength loss characteristics with respect to temperature when a negative refractive index material made of photopolymer is provided on an arm.

【図4】温度が10℃変化したときのクラッド厚と波長
損失のシフト量との関係を示す図である。
FIG. 4 is a diagram showing the relationship between the cladding thickness and the wavelength loss shift amount when the temperature changes by 10 ° C.

【図5】従来のマッハツェンダ光回路の平面図を示す図
である。
FIG. 5 is a diagram showing a plan view of a conventional Mach-Zehnder optical circuit.

【図6】図5のA−A線断面図である。FIG. 6 is a sectional view taken along line AA of FIG. 5;

【図7】マッハツェンダ光回路の温度に対する波長損失
特性の変化を示す図である。
FIG. 7 is a diagram showing changes in wavelength loss characteristics with respect to temperature of a Mach-Zehnder optical circuit.

【符号の説明】[Explanation of symbols]

21 基板 13a 方向性結合器(入力側方向性結合器) 13b 方向性結合器(出力側方向性結合器) 14b 位相シフト部 15,16 導波路(アーム) 23a,23b コア(導波路) 24 クラッド 25 負屈折率材 21 substrate 13a directional coupler (input side directional coupler) 13b directional coupler (output side directional coupler) 14b phase shift section 15, 16 waveguide (arm) 23a, 23b core (waveguide) 24 clad 25 Negative refractive index material

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 基板上に形成され、断面矩形状のコアと
このコアの周囲をコアよりも屈折率の小さいクラッドで
埋め込んだ構造の単一モードチャネル導波路より構成さ
れ、2本の平行なチャネル導波路からなる2つの方向性
結合器と長さの異なった2本の導波路からなる位相シフ
ト部を上記方向性結合器の間に接続した導波路型のマッ
ハツェンダ光回路において、少なくとも上記位相シフト
部の導波路上に屈折率の温度係数が負の材料からなる負
屈折率材を設けたことを特徴とするマッハツェンダ光回
路。
1. A single mode channel waveguide having a structure in which a core having a rectangular cross section and a periphery of the core are buried on a substrate with a clad having a refractive index smaller than that of the core. In a waveguide type Mach-Zehnder optical circuit in which two directional couplers made of channel waveguides and a phase shift part made of two waveguides having different lengths are connected between the directional couplers, at least the phase A Mach-Zehnder optical circuit, wherein a negative refractive index material made of a material having a negative temperature coefficient of refractive index is provided on the waveguide of the shift portion.
【請求項2】 上記コアと上記負屈折率材との間のクラ
ッドの厚さが0μmから20μmの間の大きさである請
求項1記載のマッハツェンダ光回路。
2. The Mach-Zehnder optical circuit according to claim 1, wherein the thickness of the clad between the core and the negative refractive index material is between 0 μm and 20 μm.
【請求項3】 上記負屈折率材として導波路のコアより
屈折率の小さい材料を用いた請求項1又は2記載のマッ
ハツェンダ光回路。
3. The Mach-Zehnder optical circuit according to claim 1, wherein a material having a refractive index smaller than that of the core of the waveguide is used as the negative refractive index material.
【請求項4】 上記負屈折率材としてTiO2 等の酸化
物を用いた請求項1から3のいずれか一項記載のマッハ
ツェンダ光回路。
4. The Mach-Zehnder optical circuit according to claim 1, wherein an oxide such as TiO 2 is used as the negative refractive index material.
【請求項5】 上記負屈折率材としてフォトポリマを用
いた請求項1から3のいずれか一項記載のマッハツェン
ダ光回路。
5. The Mach-Zehnder optical circuit according to claim 1, wherein a photopolymer is used as the negative refractive index material.
【請求項6】 上記負屈折率材として多成分ガラスを用
いた請求項1から3のいずれか一項記載のマッハツェン
ダ光回路。
6. The Mach-Zehnder optical circuit according to claim 1, wherein a multi-component glass is used as the negative refractive index material.
JP14064895A 1995-06-07 1995-06-07 Mach-Zehnder optical circuit Expired - Fee Related JP3209042B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14064895A JP3209042B2 (en) 1995-06-07 1995-06-07 Mach-Zehnder optical circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14064895A JP3209042B2 (en) 1995-06-07 1995-06-07 Mach-Zehnder optical circuit

Publications (2)

Publication Number Publication Date
JPH08334639A true JPH08334639A (en) 1996-12-17
JP3209042B2 JP3209042B2 (en) 2001-09-17

Family

ID=15273548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14064895A Expired - Fee Related JP3209042B2 (en) 1995-06-07 1995-06-07 Mach-Zehnder optical circuit

Country Status (1)

Country Link
JP (1) JP3209042B2 (en)

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Publication number Priority date Publication date Assignee Title
WO1998036299A1 (en) * 1997-02-14 1998-08-20 Nippon Telegraph And Telephone Corporation Optical waveguide circuit, its manufacturing method and optical waveguide module having the optical waveguide circuit
JPH11125733A (en) * 1997-07-11 1999-05-11 Instruments Sa Optical wavelength dispersion system
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Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998036299A1 (en) * 1997-02-14 1998-08-20 Nippon Telegraph And Telephone Corporation Optical waveguide circuit, its manufacturing method and optical waveguide module having the optical waveguide circuit
US6304687B1 (en) 1997-02-14 2001-10-16 Nippon Telegraph And Telephone Corporation Optical waveguide circuit, its manufacturing method and optical waveguide module having the optical waveguide circuit
JPH11125733A (en) * 1997-07-11 1999-05-11 Instruments Sa Optical wavelength dispersion system
JP4633206B2 (en) * 1997-07-11 2011-02-16 イェニスタ オプティクス Optical chromatic dispersion system
JP2002014306A (en) * 2000-04-26 2002-01-18 Sumitomo Electric Ind Ltd Optical filter
KR100386778B1 (en) * 2000-12-19 2003-06-02 (주)에스엘테크놀로지 optical fiber interferometer type wavelength multi/demultiplexor
US6694102B2 (en) 2001-09-14 2004-02-17 Infineon Technologies Ag Optical configuration, in particular for bidirectional WDM systems, and a transceiving module for bidirectional optical data transmission
WO2003027735A1 (en) * 2001-09-14 2003-04-03 Infineon Technologies Ag Optical arrangement and transceiver module for bi-directional optical wdm systems and optical data transmissions
US7397986B2 (en) 2005-03-04 2008-07-08 Gemfire Corporation Optical device with reduced temperature dependence
US7689072B2 (en) 2005-03-04 2010-03-30 Gemfire Corporation Optical device with reduced temperature dependence
KR100687742B1 (en) * 2005-06-03 2007-02-27 한국전자통신연구원 Temperature-insensitive polymeric optical AWG device and manufacturing method therefor
JP2007163886A (en) * 2005-12-14 2007-06-28 Sumitomo Electric Ind Ltd Optical waveguide type device, temperature measuring instrument, and thermometric method
JP4654901B2 (en) * 2005-12-14 2011-03-23 住友電気工業株式会社 Optical waveguide device, temperature measuring device, and temperature measuring method
US8873910B2 (en) 2010-03-19 2014-10-28 Gemfire Corporation Optical device with athermal slots for temperature dependence curvature reduction

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