JPH08333171A - Mold release sheet and sintering of ceramic with the same - Google Patents

Mold release sheet and sintering of ceramic with the same

Info

Publication number
JPH08333171A
JPH08333171A JP7170103A JP17010395A JPH08333171A JP H08333171 A JPH08333171 A JP H08333171A JP 7170103 A JP7170103 A JP 7170103A JP 17010395 A JP17010395 A JP 17010395A JP H08333171 A JPH08333171 A JP H08333171A
Authority
JP
Japan
Prior art keywords
ceramic
sheet
ceramic powder
sintering
release sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7170103A
Other languages
Japanese (ja)
Inventor
Noriyuki Tanaka
則之 田中
Yasuhiro Takenaka
康博 竹中
Hidenori Imoto
秀紀 井元
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Tanso Co Ltd
Original Assignee
Toyo Tanso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Tanso Co Ltd filed Critical Toyo Tanso Co Ltd
Priority to JP7170103A priority Critical patent/JPH08333171A/en
Publication of JPH08333171A publication Critical patent/JPH08333171A/en
Pending legal-status Critical Current

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  • Powder Metallurgy (AREA)

Abstract

PURPOSE: To prepare a mold release sheet simple in handling, high in smoothness, using ceramic powder having an arbitrary material quality and an arbitrary particle diameter, high in the content of the ceramic powder and used for sintering ceramics, and further to provide a method for sintering the ceramic with the same. CONSTITUTION: This mold release sheet is produced by adhering ceramic powder to at least one side of a sheet-like article with an adhesive. The method for sintering the ceramic comprises spreading the sheet produced by adhering the ceramic powder to at least one side of the sheet-like article with the adhesive on the lower side of a ceramic molded product to be sintered.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、タングステンカーバイ
ドやチタンカーバイドなどの超硬部品や、IC用パッケ
ージやセラミックコンデンサーなどのセラミックスの焼
結に使用する、変形や溶着を防止するための離型シー
ト、及びセラミックスの焼結法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a release sheet for preventing deformation and welding, which is used for sintering cemented carbide parts such as tungsten carbide and titanium carbide and ceramics such as IC packages and ceramic capacitors. , And a method of sintering ceramics.

【0002】[0002]

【従来の技術】セラミックス等の焼結時には、温度の上
昇とともにセラミックス成形体の寸法が収縮するので、
セラミックス成形体とこれを設置する棚板などとの摩擦
係数が大きいと、セラミックス成形体が焼結中に歪んだ
り割れたりする。また、セラミックス成形体と棚板との
材質の組み合わせによっては、焼結中にセラミックス成
形体と棚板と溶着する。これらの現象を防止するため
に、セラミックス成形体と棚板との間にセラミックス粉
末を敷くことが行なわれている。
2. Description of the Related Art When a ceramic or the like is sintered, the dimension of the ceramic compact shrinks as the temperature rises.
If the coefficient of friction between the ceramic compact and the shelf plate or the like on which it is installed is large, the ceramic compact will be distorted or cracked during sintering. Further, depending on the combination of the materials of the ceramic molded body and the shelf board, the ceramic molded body and the shelf board are welded during sintering. In order to prevent these phenomena, ceramic powder is spread between the ceramic molded body and the shelf plate.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、棚板の
上にセラミックス粉末を敷くことは手間がかかるだけで
はなく、表面の平滑度が良くないためにセラミックス成
形体の一部に力が集中して焼結歪みが発生するので、根
本的な解決法ではなかった。
However, laying the ceramic powder on the shelf plate is not only time-consuming, but also because the smoothness of the surface is not good, the force is concentrated on a part of the ceramic molded body. It was not a fundamental solution because sintering strains would occur.

【0004】これらの問題を解決するために、セラミッ
クス粉末を紙の中に抄き込んだ離型紙が開発された。こ
の離型紙は、焼結中に燃焼してセラミックス粉末のみを
残すことにより、離型性を発現させるものである。しか
し、この離型紙は抄造法の制約により、高密度で大粒径
のセラミックス粉末を抄き込むことができないばかりで
なく、小粒径のセラミックス粉末であっても、約60重
量%程度しか含まれていないので、離型性が充分に発揮
されない。
In order to solve these problems, a release paper has been developed in which ceramic powder is incorporated into paper. The release paper exhibits releasability by burning during sintering and leaving only the ceramic powder. However, due to the limitation of the papermaking method, this release paper is not only able to incorporate high-density and large-diameter ceramic powder, but even small-diameter ceramic powder contains only about 60% by weight. The mold releasability is not fully exerted.

【0005】本発明はこの問題を克服するために、取り
扱いが簡便で、平滑度が高く、任意の材質と粒径のセラ
ミックス粉末を使用し、かつ、セラミックス粉末の含有
量が高いセラミックス焼結用離型シート、及びこれを用
いたセラミックスの焼結法を提供するものである。
In order to overcome this problem, the present invention uses a ceramic powder having an easy handling, a high smoothness, an arbitrary material and a particle size, and a ceramic powder having a high ceramic powder content. Provided is a release sheet and a ceramics sintering method using the release sheet.

【0006】[0006]

【課題を解決するための手段】本発明者等は、シート状
物体の表面に、接着剤を用いてセラミックス粉末を接着
したシートを見いだした。
The present inventors have found a sheet in which a ceramic powder is adhered to the surface of a sheet-like object using an adhesive.

【0007】本発明によれば、セラミックス粉末の粒径
や密度だけでなく任意の材質のセラミックスが利用でき
る。例えばPZTの焼結時の鉛の蒸気圧の調節には、酸
化鉛の粉末をシート状物体に接着すれば良いし、磁器の
焼結には溶着しにくいジルコニアをシート状物体に接着
すれば良い。また、酸化雰囲気には酸化物系のセラミッ
クス、還元雰囲気には炭化物系、ホウ化物系、窒化物系
のセラミックスなどと、耐熱性、反応性などの観点から
セラミックス成形体や棚板の形状や材質に最も適した離
型用セラミックス粉末を選択することができる。
According to the present invention, not only the particle size and density of the ceramic powder but also ceramics of any material can be used. For example, to adjust the vapor pressure of lead during sintering of PZT, lead oxide powder may be adhered to the sheet-like object, and zirconia, which is difficult to weld for porcelain sintering, may be adhered to the sheet-like object. . From the viewpoint of heat resistance, reactivity, etc., the shape and material of the ceramic molded body and shelf board, such as oxide-based ceramics in the oxidizing atmosphere and carbide-based, boride-based, and nitride-based ceramics in the reducing atmosphere. The most suitable release ceramic powder can be selected.

【0008】このセラミックス粉末の粒径が8メッシュ
より大きくなれば、セラミックス成形体との接触面の凹
凸が粗くなるため、セラミックス焼結品の表面の平滑度
が悪くなる。また、セラミックス粉末の粒径が1000
メッシュより小さくなれば、接着できるセラミックス粉
末の量が少なすぎて、離型性の問題が発生する。それ
故、セラミックス粉末の粒度は、8メッシュから100
0メッシュが好ましく使用できるが、50メッシュから
240メッシュがより好ましく使用できる。
If the particle size of the ceramic powder is larger than 8 mesh, the unevenness of the contact surface with the ceramic compact becomes rough, and the smoothness of the surface of the ceramic sintered product deteriorates. Also, the particle size of the ceramic powder is 1000
If it is smaller than the mesh, the amount of the ceramic powder that can be bonded is too small, which causes a problem of releasability. Therefore, the particle size of the ceramic powder is from 8 mesh to 100.
0 mesh can be preferably used, but 50 mesh to 240 mesh can be more preferably used.

【0009】シート状物体としては、温度の上昇中に変
形の生じない物質、例えば、膨張黒鉛シートなどのカー
ボンシート、紙、シート状熱硬化性樹脂等が好ましく利
用できる。ここでいう膨張黒鉛シートとしては、鱗片状
天然黒鉛の硫酸層間化合物を約1000℃に急熱して約
100倍以上に膨張させた後、圧縮成形によりシート状
に賦形したものを例示できる。膨張黒鉛シートは柔軟で
あるので、セラミックス粉末の接着後ロール圧延を行な
えば、表面の平滑性はさらに向上する。
As the sheet-like object, a substance which does not deform during the temperature rise, for example, a carbon sheet such as an expanded graphite sheet, paper, a sheet-like thermosetting resin or the like can be preferably used. Examples of the expanded graphite sheet used here include those obtained by rapidly heating a sulfuric acid intercalation compound of scaly natural graphite to about 1000 ° C. to expand it about 100 times or more, and then shaping it into a sheet by compression molding. Since the expanded graphite sheet is flexible, the surface smoothness can be further improved by performing roll rolling after bonding the ceramic powder.

【0010】また、熱硬化性樹脂としてはフェノール樹
脂、フラン樹脂、エポキシ樹脂等、あるいはこれらを熱
処理して硬化させたものを例示できるが、本発明はこれ
らに限定されるものではない。これらの樹脂は、使用温
度によっては分解炭化する場合もあり、本発明はこれら
の使用形態をも実施形態として包含する。
Examples of the thermosetting resin include phenol resin, furan resin, epoxy resin and the like, or those obtained by heat-curing these, but the present invention is not limited to these. These resins may be decomposed and carbonized depending on the use temperature, and the present invention includes these use forms as embodiments.

【0011】このシート状物体の厚さは薄いほど好まし
いが、本発明による離型シートのセラミックス含有量
は、従来の離型シートより高くできるので、単位面積当
たりの重量が重たくなり、引張り強度の制約が発生す
る。このため、厚さ40μm以下のシート状物体では実
用に耐えない。
Although it is preferable that the thickness of the sheet-like object is smaller, the ceramic content of the release sheet according to the present invention can be higher than that of the conventional release sheet, so that the weight per unit area becomes heavier and the tensile strength becomes smaller. Constraints occur. Therefore, a sheet-like object having a thickness of 40 μm or less cannot be used practically.

【0012】シート状物体とセラミックス粉末を接着す
るための接着剤については、灰分の少ない有機物系の接
着剤が好ましく利用でき、中でもアクリル系粘着剤が特
に好ましく利用できる。
As an adhesive for adhering the sheet-like object and the ceramic powder, an organic adhesive having a low ash content can be preferably used, and an acrylic pressure-sensitive adhesive can be particularly preferably used.

【0013】接着剤の量はセラミックス粉末の粒径の1
/5から4/5の厚さに塗れば好ましく使用できる。接
着剤の量がセラミックス粉末の粒径の1/5より少ない
と、離型シートのハンドリング中にセラミックス粉末が
脱落して、離型性が低下するので好ましくない。また接
着剤の量がセラミックス粉末の粒径の4/5以上の厚さ
になれば、離型シートの保存中に隣接する離型シートと
接着するので好ましくない。
The amount of adhesive is 1 of the particle size of the ceramic powder.
It is preferably used when it is applied to a thickness of / 5 to 4/5. If the amount of the adhesive is less than ⅕ of the particle size of the ceramic powder, the ceramic powder falls off during handling of the release sheet, and the releasability is deteriorated, which is not preferable. Further, if the amount of the adhesive agent is 4/5 or more of the particle diameter of the ceramic powder, it is not preferable because it adheres to the adjacent release sheet during storage of the release sheet.

【0014】シート状物体の片面にセラミックス粉末を
接着すれば、セラミックス粉末の含有率は、通常60〜
90重量%程度となるが、不足する場合には両面に接着
して含有率を高めることができる。また、片面ずつに異
なる種類のセラミックス粉末を接着して、セラミックス
成形体および棚板と離型用セラミックス粉末との反応性
を個別に制御することも可能である。
If the ceramic powder is adhered to one surface of the sheet-like object, the content of the ceramic powder is usually 60-.
Although it is about 90% by weight, if it is insufficient, the content can be increased by adhering to both surfaces. Further, it is also possible to bond different types of ceramic powder to each one surface and individually control the reactivity between the ceramic molded body and the shelf plate and the releasing ceramic powder.

【0015】[0015]

【実施例】本発明の実施例を以下に記述するが、本発明
はこれに限定されるものではない。
EXAMPLES Examples of the present invention will be described below, but the present invention is not limited thereto.

【0016】実施例1 厚さ0.2mm、密度1.0g/cmの膨張黒鉛シー
ト(東洋炭素株式会社製PF−20)の片面に、アクリ
ル系粘着剤(住友スリーエム株式会社製55スプレーの
り)を1mg/cmの割合で塗布した後、約120メ
ッシュのアルミナ粉末(昭和電工株式会社製ホワイトア
ランダムWA120番)を40mg/cmの割合で接
着して離型シートを構成したところ、アルミナ含有率は
約67%であった。かかる離型シートを、平均粒径2μ
mの酸化チタンと炭酸バリウムの等モル混合物の成形体
(直径50×厚み10mm)の下に敷き、1350℃で
焼結したところ割れも歪みもなく、平滑に焼結できた。
Example 1 An acrylic adhesive (55 spray glue manufactured by Sumitomo 3M Co., Ltd.) was coated on one surface of an expanded graphite sheet (PF-20 manufactured by Toyo Tanso Co., Ltd.) having a thickness of 0.2 mm and a density of 1.0 g / cm 3. ) Was applied at a rate of 1 mg / cm 2 , and alumina powder of about 120 mesh (White Alundum WA120 No., Showa Denko KK) was adhered at a rate of 40 mg / cm 2 to form a release sheet. The alumina content was about 67%. This release sheet has an average particle size of 2μ
When it was laid under a molded product (diameter 50 × thickness 10 mm) of an equimolar mixture of titanium oxide and barium carbonate of m, and sintered at 1350 ° C., it could be sintered smoothly without cracking or distortion.

【0017】実施例2 厚さ0.1mm、密度0.7g/cmのコピー用紙
(キャノン販売株式会社製SS−5)の片面に、酢酸ビ
ニル系接着剤(コニシ株式会社製木工用ボンド)を10
mg/cmの割合で塗布し、ジルコニア粉末(和光純
薬工業株式会社製約400メッシュ)を30mg/cm
の割合で接着した後乾燥させて離型シートを構成した
ところ、ジルコニア含有率は約80%であった。かかる
離型シートを、平均粒径2μmの滑石と酸化ケイ素(モ
ル比は3:4)の混合物の成形体(直径50×厚み10
mm)の下に敷き、1400℃で焼結したところ割れも
歪みもなく焼結でき、溶着も発生しなかった。
Example 2 Vinyl acetate adhesive (Konishi Co., Ltd. woodworking bond) was applied to one side of a copy paper (SS-5 manufactured by Canon Sales Co., Ltd.) having a thickness of 0.1 mm and a density of 0.7 g / cm 3. 10
30 mg / cm of zirconia powder (about 400 mesh manufactured by Wako Pure Chemical Industries, Ltd.) applied at a rate of mg / cm 2.
When the release sheet was formed by bonding at a ratio of 2 and then drying it, the zirconia content was about 80%. Such a release sheet was formed into a molded product (diameter 50 × thickness 10 × 10) of a mixture of talc having an average particle diameter of 2 μm and silicon oxide (molar ratio 3: 4).
mm) and sintered at 1400 ° C., sintering was possible without cracks or distortion, and welding did not occur.

【0018】なお、上記実施例1及び実施例2に記載さ
れている各セラミック成形体を、従来法に従って焼結し
たところ、いずれも表面の平滑度が良くなく、焼結歪み
も発生した。
When each of the ceramic compacts described in Examples 1 and 2 was sintered according to the conventional method, the smoothness of the surface was not good and sintering strain occurred.

【0019】[0019]

【発明の効果】本発明により、セラミックス成形体の焼
結前の炉詰め作業の軽減化、および時間の短縮が計れる
と共に、焼結時の歪みや割れなどの不良が減少する。
EFFECTS OF THE INVENTION According to the present invention, it is possible to reduce the furnace filling work before the sintering of the ceramic compact and shorten the time, and to reduce defects such as distortion and cracks during the sintering.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 シート状物体の少なくとも片面に、接着
剤を用いてセラミックス粉末を接着させた離型シート。
1. A release sheet in which a ceramic powder is adhered to at least one surface of a sheet-like object using an adhesive.
【請求項2】 シート状物体の少なくとも片面に、接着
剤を用いてセラミックス粉末を接着させたシートを、焼
結させるセラミックス成形体の下側に敷くことを特徴と
する、セラミックスの焼結法。
2. A method of sintering ceramics, comprising laying a sheet having ceramic powder adhered to at least one surface of a sheet-like object with an adhesive on the lower side of a ceramic compact to be sintered.
JP7170103A 1995-05-31 1995-05-31 Mold release sheet and sintering of ceramic with the same Pending JPH08333171A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7170103A JPH08333171A (en) 1995-05-31 1995-05-31 Mold release sheet and sintering of ceramic with the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7170103A JPH08333171A (en) 1995-05-31 1995-05-31 Mold release sheet and sintering of ceramic with the same

Publications (1)

Publication Number Publication Date
JPH08333171A true JPH08333171A (en) 1996-12-17

Family

ID=15898700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7170103A Pending JPH08333171A (en) 1995-05-31 1995-05-31 Mold release sheet and sintering of ceramic with the same

Country Status (1)

Country Link
JP (1) JPH08333171A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8097331B2 (en) 2006-07-31 2012-01-17 Toyo Tanso Co., Ltd. Mold release sheet
US8864908B2 (en) 2006-07-14 2014-10-21 Toyo Tanso Co., Ltd. Crucible protection sheet and crucible apparatus using the crucible protection sheet

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8864908B2 (en) 2006-07-14 2014-10-21 Toyo Tanso Co., Ltd. Crucible protection sheet and crucible apparatus using the crucible protection sheet
US8097331B2 (en) 2006-07-31 2012-01-17 Toyo Tanso Co., Ltd. Mold release sheet

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