JPH0832287A - Parts carrier - Google Patents
Parts carrierInfo
- Publication number
- JPH0832287A JPH0832287A JP6168395A JP16839594A JPH0832287A JP H0832287 A JPH0832287 A JP H0832287A JP 6168395 A JP6168395 A JP 6168395A JP 16839594 A JP16839594 A JP 16839594A JP H0832287 A JPH0832287 A JP H0832287A
- Authority
- JP
- Japan
- Prior art keywords
- component
- pad
- suction
- vacuum
- transfer device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Specific Conveyance Elements (AREA)
- Supply And Installment Of Electrical Components (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、部品を吸着した状態で
搬送する部品搬送装置に係り、特に、吸着面が凹凸形状
とされた部品を搬送する部品搬送装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a component transporting device for transporting a component in a sucked state, and more particularly to a component transporting device for transporting a component having an uneven suction surface.
【0002】[0002]
【従来の技術】電子部品を取扱う装置として、例えば部
品供給装置があり、この部品供給装置は、トレイ上に設
けられた部品を吸着ノズルで吸着し、これを、部品搬送
装置に載置させて実装装置へ供給するように構成されて
いる。そして、上記部品搬送装置は、吸着ノズルで押し
付けられた部品をその下面側から、真空発生源に連通す
る真空吸引通路が内側に設けられたパッドで吸着し、こ
の吸着状態を維持して搬送を行なうようになっている。2. Description of the Related Art As a device for handling electronic parts, there is, for example, a parts supply device. This parts supply device sucks parts provided on a tray with suction nozzles and places them on a parts conveyor device. It is configured to supply the mounting device. Then, the above-mentioned component transfer device sucks the component pressed by the suction nozzle from the lower surface side thereof with a pad provided inside a vacuum suction passage communicating with the vacuum generation source, and transports while maintaining this suction state. I am supposed to do it.
【0003】ところで、従来、図7に示すように、QF
P(Quad Flat Package)等のように、矩形状をなすパ
ッケージ50の側辺部に多数本のリード51を備えたI
Cが主として用いられてきたが、小型・薄型化を図るこ
とができ、また、取扱いが容易で、実装装置に汎用性を
持たせることができ等の理由から、矩形状をなすパッケ
ージの下面に格子状に配設された半田ボールを有するB
GA(Ball Grid Array)と呼ばれるICが部品の多ピ
ン化に合せて採用されてきている。By the way, conventionally, as shown in FIG.
Like a P (Quad Flat Package) or the like, a package 50 having a rectangular shape is provided with a large number of leads 51 on a side portion thereof.
Although C has been mainly used, it is possible to reduce the size and thickness of the package, and because it is easy to handle and allows the mounting device to have general versatility, it can be mounted on the bottom surface of a rectangular package. B having solder balls arranged in a grid pattern
An IC called GA (Ball Grid Array) has been adopted in accordance with the increase in the number of pins of parts.
【0004】[0004]
【発明が解決しようとする課題】ところで、図7に示す
ように、従来のQFP等、パッケージ50の下面がフラ
ットな部品用の部品搬送装置においては、パッドとして
フラットなゴムパッド53を用いれば、真空吸引通路5
3aの真空圧により確実に吸着を行なうことができる。
しかしながら、このようなゴムパッド53をBGA用の
部品搬送装置に適用した場合には、図8に示すように、
ゴムパッド53とBGA55の下面55aの半田ボール
との間に隙間が形成される。そして、この隙間から、内
側の真空吸引通路53aにエアリークを生じてしまい、
十分な真空圧すなわち吸着力が得られないため、正確な
搬送ができないという問題があった。By the way, as shown in FIG. 7, in the conventional QFP or the like, in a parts conveying device for parts having a flat lower surface of the package 50, if a flat rubber pad 53 is used as a pad, a vacuum is generated. Suction passage 5
The vacuum pressure of 3a ensures reliable adsorption.
However, when such a rubber pad 53 is applied to a component transfer device for BGA, as shown in FIG.
A gap is formed between the rubber pad 53 and the solder ball on the lower surface 55a of the BGA 55. Then, an air leak occurs in the vacuum suction passage 53a inside from this gap,
Since a sufficient vacuum pressure, that is, a suction force cannot be obtained, there is a problem in that accurate conveyance cannot be performed.
【0005】したがって、本発明は、吸着面がフラット
でなく凹凸形状をなす部品を確実に吸着し正確に搬送す
ることができる部品搬送装置を提供することを目的とし
ている。Therefore, it is an object of the present invention to provide a component transporting device capable of reliably sucking and accurately transporting a component whose suction surface is not flat but has an uneven shape.
【0006】[0006]
【課題を解決するための手段】上記目的を達成するた
め、本発明の請求項1記載の部品搬送装置は、押し付け
られた部品の吸着面を、真空発生源に連通する真空吸引
通路が内側に設けられたパッドに吸着させて搬送するも
のであって、前記パッドは、部品押し付け時に、部品の
吸着面の凹凸形状に合せて変形し隙間を埋める弾性体で
あることを特徴としている。In order to achieve the above object, in the component carrying apparatus according to claim 1 of the present invention, a vacuum suction passage communicating the suction surface of the pressed component with the vacuum source is provided inside. The pad is sucked and conveyed by a provided pad, and the pad is an elastic body that deforms in accordance with the uneven shape of the suction surface of the component and fills the gap when the component is pressed.
【0007】また、本発明の請求項2記載の部品搬送装
置は、請求項1記載のものに加えて、前記パッドが多孔
質材料からなることを特徴としている。In addition to the apparatus according to claim 1, the component transfer apparatus according to claim 2 of the present invention is characterized in that the pad is made of a porous material.
【0008】さらに、本発明の請求項3記載の部品搬送
装置は、請求項1又は2に記載のものに加えて、前記パ
ッドは、外筒部とその内側の内筒部とを有しており、こ
れら外筒部と内筒部とは、いずれか一方が他方に対し突
出・引込可能とされていることを特徴としている。Further, in the component carrying device according to claim 3 of the present invention, in addition to the device according to claim 1 or 2, the pad has an outer cylinder part and an inner cylinder part inside thereof. The outer cylinder portion and the inner cylinder portion are characterized in that either one of them can be projected and retracted with respect to the other.
【0009】[0009]
【作用】請求項1記載の部品搬送装置によれば、部品押
し付け時に、パッドが部品の吸着面の凹凸形状に合せて
変形し隙間を埋める。よって、真空吸引通路へのエアリ
ークを生じない。According to the component carrying device of the first aspect, when the component is pressed, the pad is deformed according to the irregular shape of the suction surface of the component to fill the gap. Therefore, no air leak occurs in the vacuum suction passage.
【0010】請求項2記載の部品搬送装置によれば、パ
ッドが多孔質材料からなるため、容易に変形可能で、し
かも変形時には孔がつぶれてパッド自体を介しての真空
吸引通路へのエアリークを防止する。According to the component transfer device of the second aspect, since the pad is made of a porous material, it can be easily deformed, and the hole is crushed at the time of deformation so that air leaks to the vacuum suction passage through the pad itself. To prevent.
【0011】請求項3記載の部品搬送装置によれば、吸
着面の大きな部品を吸着する場合には、外筒部を内筒部
に対し相対的に突出させ、また吸着面の小さな部品を吸
着する場合には、内筒部を外筒部に対し相対的に突出さ
せる。これにより、吸着面の大きさの違う部品を取扱う
場合にも、パッドを交換する必要がなくなる。According to the third aspect of the present invention, in the case of picking up a component having a large suction surface, the outer cylinder portion is relatively projected with respect to the inner cylinder portion, and the component having a small suction surface is suctioned. In this case, the inner tubular portion is made to project relatively to the outer tubular portion. This eliminates the need to replace the pad even when handling a component having a different suction surface.
【0012】[0012]
(1)実施例の構成 本発明の一実施例による部品搬送装置について図1ない
し図5を参照して説明する。図1は、本発明の部品搬送
装置が適用された部品供給装置を示すものである。この
部品供給装置は、特にBGAのように下面に半田ボール
を有する部品を実装装置へ供給するものである。図1に
おいて、符号1は、部品が整列状態で載置されたトレー
(図示略)に係合するフック、符号2は、フック1をこ
れと係合状態にあるトレーとともに移動させるロッドレ
スエアシリンダ、符号3は、移動されたトレーから部品
を上面側から真空圧により吸着するピックアンドプレイ
スヘッド(以下、「P&Pヘッド」と略称する。)をそ
れぞれ示している。なお、トレーは、部品供給装置に上
下方向へ並べて配置され、空になると交換されるように
なっている。(1) Configuration of Embodiments A component carrying device according to an embodiment of the present invention will be described with reference to FIGS. 1 to 5. FIG. 1 shows a component supply device to which the component transfer device of the present invention is applied. This component supply device supplies a component having solder balls on its lower surface, such as a BGA, to a mounting device. In FIG. 1, reference numeral 1 is a hook that engages with a tray (not shown) on which components are placed in an aligned state, and reference numeral 2 is a rodless air cylinder that moves the hook 1 together with the tray in an engaged state with the tray. , Reference numeral 3 denotes a pick-and-place head (hereinafter, abbreviated as “P & P head”) that sucks components from the moved tray from the upper surface side by vacuum pressure. The trays are arranged side by side in the vertical direction on the component supply device, and are replaced when empty.
【0013】ここで、P&Pヘッド3は、鉛直配置され
たZ軸エアシリンダ4により上下動可能とされ、また相
互に直交して水平配置されたX軸移動機構5およびY軸
移動機構6により水平移動可能とされており、下降時に
部品の吸着および吸着解除を行ない、上昇状態で水平移
動されて、吸着状態にある部品を所定位置へ移載させる
ようになっている。そして、図1中符号10で示される
ものが、P&Pヘッド3により移載された部品を図示し
ない実装装置側に水平搬送する本実施例の部品搬送装置
である。Here, the P & P head 3 is vertically movable by a Z-axis air cylinder 4 vertically arranged, and horizontally by an X-axis moving mechanism 5 and a Y-axis moving mechanism 6 which are horizontally arranged orthogonal to each other. It is movable, and when it descends, it picks up and releases parts, and when it is in a raised state, it is horizontally moved to move the part in a picked state to a predetermined position. The reference numeral 10 in FIG. 1 denotes the component transfer device of this embodiment for horizontally transferring the components transferred by the P & P head 3 to the mounting device (not shown).
【0014】部品搬送装置10は、水平配置されたロッ
ドレスエアシリンダ11と、このロッドレスエアシリン
ダ11によって、上記P&Pヘッド3から部品を受け取
る受取位置と図示しない実装装置の吸着ヘッドによる吸
着位置へ部品を供給する供給位置との間を移動されるト
ラバーサ12とを具備している。The component transfer device 10 has a rodless air cylinder 11 arranged horizontally, and by this rodless air cylinder 11, a receiving position for receiving a component from the P & P head 3 and a suction position by a suction head of a mounting device (not shown). And a traverser 12 which is moved to and from a supply position for supplying components.
【0015】図2(a),(b)に示すように、トラバ
ーサ12は、ロッドレスエアシリンダ11で移動される
移動台部13と、この移動台部13の上側に固定された
載置台部14とを有している。そして、移動台部13に
は、二つの真空発生器(真空発生源)16と、これら真
空発生器16にそれぞれ個別に連結された吸着ノズル1
7とが取り付けられている。吸着ノズル17は、図3に
示すように、略段付円筒状をなすとともに移動台部13
に固定される支持部18と、この支持部18に上下に所
定寸法摺動自在に取り付けられた略段付円筒状のノズル
ヘッド部19と、このノズルヘッド部19を上方に付勢
するスプリング20とを備えている。As shown in FIGS. 2 (a) and 2 (b), the traverser 12 includes a movable base 13 which is moved by the rodless air cylinder 11, and a mounting base fixed above the movable base 13. 14 and. The moving base 13 includes two vacuum generators (vacuum generation sources) 16 and the suction nozzles 1 individually connected to the vacuum generators 16.
7 and are attached. As shown in FIG. 3, the suction nozzle 17 has a substantially stepped cylindrical shape and also has a moving base portion 13.
A support portion 18 fixed to the support portion 18, a substantially stepped cylindrical nozzle head portion 19 mounted on the support portion 18 slidably up and down by a predetermined size, and a spring 20 for biasing the nozzle head portion 19 upward. It has and.
【0016】ノズルヘッド部19は、その中心の中空部
分が真空発生器16に連通されている。そして、その中
間所定位置にはフランジ部21が形成されており、この
フランジ部21より上側の外周部に、円筒状のパッド2
3が嵌合固定されている。このパッド23は、ノズルヘ
ッド部19の上端面よりさらに上方に突出させられた突
出部23aを有しており、その上端面が水平方向に沿う
平面状とされている。そして、パッド23の突出部23
aの内側が真空発生器16に連通される真空吸引通路2
3bとなっている。The hollow portion at the center of the nozzle head portion 19 communicates with the vacuum generator 16. A flange portion 21 is formed at a predetermined intermediate position thereof, and the cylindrical pad 2 is provided on the outer peripheral portion above the flange portion 21.
3 is fitted and fixed. The pad 23 has a protruding portion 23a that is protruded further upward from the upper end surface of the nozzle head portion 19, and the upper end surface is a flat surface extending in the horizontal direction. Then, the protruding portion 23 of the pad 23
Vacuum suction passage 2 whose inside is communicated with the vacuum generator 16
It is 3b.
【0017】ここで、吸着ノズル17は、支持部18を
移動台部13の所定位置に固定した状態において、載置
台部14に形成された貫通孔24に、パッド23が装着
されたノズルヘッド部19を隙間をもって挿通させてい
る。しかも、スプリング20の付勢力によってノズルヘ
ッド部19が上方位置に位置しているときに、パッド2
3が載置台部14より上方に所定量突出した状態とされ
ている。なお、図2において右側の吸着ノズル17は、
トレーから受け取った部品を実装装置へ搬送する際に用
いられるもので、左側の吸着ノズル17は、実装装置側
でエラーが出た部品をP&Pヘッド3側へ戻す際に用い
られるものである。Here, in the suction nozzle 17, the nozzle head portion in which the pad 23 is attached to the through hole 24 formed in the mounting table portion 14 in a state where the support portion 18 is fixed at a predetermined position of the moving table portion 13. 19 is inserted with a gap. Moreover, when the nozzle head portion 19 is located at the upper position by the urging force of the spring 20, the pad 2
3 is in a state of projecting above the mounting table portion 14 by a predetermined amount. The suction nozzle 17 on the right side in FIG.
The suction nozzle 17 on the left side is used when the component received from the tray is conveyed to the mounting apparatus, and is used when returning the component having an error on the mounting apparatus side to the P & P head 3 side.
【0018】本実施例においては、パッド23は、変形
容易な多孔質材料、例えばスポンジで形成されている。
そして、P&Pヘッド3で吸着された部品27の下面2
7aがパッド23に押し付けられると、図4に示すよう
に、突出部23aが下面27aに格子状に配置形成され
た半田ボール28による凹凸形状に合せて変形し、半田
ボール28間の隙間に入り込む。よって、突出部23a
の端面と部品27の下面におけるエアリークが防止され
る。しかも、突出部23aが圧縮されることにより、そ
れ自体が有する多数の孔をつぶして突出部23a自体の
空気流路を塞ぐようになっている。In this embodiment, the pad 23 is made of a porous material that is easily deformable, such as sponge.
Then, the lower surface 2 of the component 27 attracted by the P & P head 3
When 7a is pressed against the pad 23, as shown in FIG. 4, the projecting portion 23a is deformed according to the uneven shape of the solder balls 28 arranged and formed in a grid pattern on the lower surface 27a, and enters the gaps between the solder balls 28. . Therefore, the protrusion 23a
Air leaks at the end surface of and the lower surface of the component 27 are prevented. Moreover, by compressing the protrusion 23a, many holes of the protrusion 23a are crushed to close the air flow path of the protrusion 23a itself.
【0019】(2)実施例の動作 次に、図5のフローチャートを参照しながら上記構成の
部品供給装置の動作について説明する。まず、P&Pヘ
ッド3が下降してトレーからBGA26を吸着し(ステ
ップSP1)、その後上昇して受取位置にあるトラバー
サ12上へ移動する(ステップSP2)。続いて、P&
Pヘッド3が下降して、部品27をトラバーサ12の吸
着ノズル17のパッド23にその下面27aを押し付け
る(ステップSP3)。その際、P&Pヘッド3の押付
け力によってスプリング20が圧縮され、ノズルヘッド
部19が下降するとともに、パッド23が下方へ向けて
圧縮されるので、部品27はパッド23によって弾性的
に受けとめられる。(2) Operation of the Embodiment Next, the operation of the component supplying apparatus having the above-mentioned configuration will be described with reference to the flowchart of FIG. First, the P & P head 3 moves down to adsorb the BGA 26 from the tray (step SP1), and then moves up and moves onto the traverser 12 at the receiving position (step SP2). Then P &
The P head 3 descends and presses the lower surface 27a of the component 27 against the pad 23 of the suction nozzle 17 of the traverser 12 (step SP3). At that time, the spring 20 is compressed by the pressing force of the P & P head 3, the nozzle head portion 19 is lowered, and the pad 23 is compressed downward, so that the component 27 is elastically received by the pad 23.
【0020】また、パッド23が圧縮されることによ
り、その突出部23aが部品27の下面27aの半田ボ
ール28による凹凸形状に合せて変形し、半田ボール2
8間の隙間を埋める。しかもこの状態においてパッド2
3は突出部23a自体の孔をつぶして突出部23a自体
の空気流路を塞いでいるため、突出部23aの内側すな
わち真空吸引通路23bへのエアリークの流路を遮断す
る。よって、部品27の下面27aに良好に真空圧が作
用し、部品27が確実に吸着ノズル17のパッド23に
吸着される(ステップSP4)。そして、この状態でト
ラバーサ12がロッドレスエアシリンダ11の駆動力で
図示しない実装装置側へ移動する(ステップSP5)。Further, when the pad 23 is compressed, the projecting portion 23a is deformed according to the uneven shape of the solder ball 28 on the lower surface 27a of the component 27, and the solder ball 2
Fill the gap between 8. Moreover, in this state, the pad 2
Reference numeral 3 blocks the air passage of the protrusion 23a itself by collapsing the hole of the protrusion 23a itself, so that the air leak passage to the inside of the protrusion 23a, that is, the vacuum suction passage 23b is blocked. Therefore, the vacuum pressure is satisfactorily applied to the lower surface 27a of the component 27, and the component 27 is reliably attracted to the pad 23 of the suction nozzle 17 (step SP4). Then, in this state, the traverser 12 is moved to the mounting device side (not shown) by the driving force of the rodless air cylinder 11 (step SP5).
【0021】上記構成の部品搬送装置によれば、部品押
し付け時にパッド23の突出部23aが、BGA26の
パッケージ27の下面27aのリード28による凹凸形
状に合せて変形し、リード28間の隙間を埋めるから、
真空吸引通路23bへのエアリークの発生が防止され
る。よって、BGA26を確実にパッド23で吸着する
ことができ、この吸着状態で正確に搬送を行なうことが
できる。According to the component transporting apparatus having the above-described structure, when the component is pressed, the projecting portion 23a of the pad 23 is deformed according to the uneven shape of the lead 28 on the lower surface 27a of the package 27 of the BGA 26 and the gap between the leads 28 is filled. From
The occurrence of air leak to the vacuum suction passage 23b is prevented. Therefore, the BGA 26 can be surely adsorbed by the pad 23, and the conveyance can be performed accurately in this adsorbed state.
【0022】特に、上記実施例では、パッド23がスポ
ンジで構成されているから、BGA26へ押し付けられ
ることにより圧縮されて内部の孔をつぶす。これによ
り、突出部23aの内側すなわち真空吸引通路23bへ
のエアリークの流路を遮断する。このように、真空吸引
通路23bへのエアリークの発生が防止されるため、部
品27をパッド23でより一層確実に吸着することがで
きる。Particularly, in the above embodiment, since the pad 23 is made of sponge, the pad 23 is compressed by being pressed against the BGA 26 to crush the internal hole. Thereby, the flow path of the air leak to the inside of the protruding portion 23a, that is, the vacuum suction passage 23b is blocked. In this way, since the occurrence of air leak to the vacuum suction passage 23b is prevented, the component 27 can be more surely adsorbed to the pad 23.
【0023】(3)変更例 本発明は上記実施例に限定されるものではなく、種々の
変更が可能である。たとえば、上記実施例においては、
パッド23が円筒状をなすもの、すなわち一つの真空吸
引通路23bを有するものを例にとり説明したが、内側
に真空吸引通路が形成されるものであれば、例えば複数
の真空吸引通路を形成することも可能であり、また、パ
ッド23を角柱状のものとすることも可能である。さら
に、パッド23の外周面に、エアリーク防止のための樹
脂をコーティングすることも可能である。加えて、上記
実施例では、パッドをスポンジ等の多孔質材料で構成し
ているが、容易に変形するものであればその材質は任意
である。(3) Modifications The present invention is not limited to the above embodiments, but various modifications are possible. For example, in the above embodiment,
The pad 23 has a cylindrical shape, that is, the one having one vacuum suction passage 23b has been described as an example, but if the vacuum suction passage is formed inside, for example, a plurality of vacuum suction passages should be formed. It is also possible to make the pad 23 into a prismatic shape. Further, the outer peripheral surface of the pad 23 can be coated with a resin for preventing air leak. In addition, although the pad is made of a porous material such as sponge in the above embodiment, any material may be used as long as it can be easily deformed.
【0024】また、図6に示すように、パッドを円筒状
の外円筒部29と、この外円筒部29の内側に同心状に
隙間をもって配置された内円筒部30とを有する二重構
造とし、内円筒部30と外円筒部29とを、いずれか一
方が他方に対し上側に突出した位置と下側に引込んだ位
置とにアクチュエータ等で切換自在の構成とすることも
可能である。Further, as shown in FIG. 6, the pad has a double structure having a cylindrical outer cylindrical portion 29 and an inner cylindrical portion 30 concentrically arranged inside the outer cylindrical portion 29 with a gap. The inner cylindrical portion 30 and the outer cylindrical portion 29 can be configured to be switchable by an actuator or the like between a position where one of them projects upward with respect to the other and a position where they retract downward.
【0025】例えば、内円筒部30を外円筒部29に対
し突出する位置と引込む位置とにアクチュエータで切り
換え、しかも内円筒部30の突出時には内円筒部30の
内側のみ真空発生器16に連通状態とし、他方内円筒部
30引込時には外円筒部29と内円筒部30との隙間を
真空発生器16に連通状態とするようソレノイドバルブ
等で流路を切り換える。For example, the inner cylindrical portion 30 is switched between a protruding position and a retracting position with respect to the outer cylindrical portion 29 by an actuator, and when the inner cylindrical portion 30 projects, only the inside of the inner cylindrical portion 30 communicates with the vacuum generator 16. On the other hand, when the inner cylindrical portion 30 is pulled in, the flow path is switched by a solenoid valve or the like so that the gap between the outer cylindrical portion 29 and the inner cylindrical portion 30 is in communication with the vacuum generator 16.
【0026】このように構成することにより、吸着面の
大きな部品を吸着する場合には、内円筒部30を引込ま
せて外円筒部29で吸着を行なわせ、また吸着面の小さ
な部品を吸着する場合には、内円筒部30を突出させこ
の内円筒部30で吸着を行なわせれば、吸着面の大きさ
の違う部品を取扱う場合にも、パッドを交換する必要が
なくなる。よって、吸着面の大きさの異なる部品に対応
するための段取替え時間を短縮することができる。勿
論、これらは円筒状に限定されることなく、角筒状とす
ることも可能である。With this structure, when a component having a large suction surface is sucked, the inner cylindrical portion 30 is retracted so that the outer cylindrical portion 29 performs suction, and a component having a small suction surface is sucked. In this case, if the inner cylindrical portion 30 is projected and suction is performed by the inner cylindrical portion 30, it is not necessary to replace the pad even when handling a component having a different suction surface. Therefore, it is possible to shorten the setup change time for dealing with components having different suction surface sizes. Of course, these are not limited to the cylindrical shape, and may be a rectangular tube shape.
【0027】[0027]
【発明の効果】以上詳述したように、本発明によれば、
部品押し付け時に、パッドが部品の吸着面の凹凸形状に
合せて変形し隙間を埋める。したがって、この状態で吸
着を行なうことにより、真空吸引通路にエアリークを生
じることなく確実に部品を吸着することができ、よっ
て、部品を正確に搬送することができる等の効果が得ら
れる。As described in detail above, according to the present invention,
When the component is pressed, the pad deforms according to the uneven shape of the suction surface of the component and fills the gap. Therefore, by performing suction in this state, it is possible to securely suck the component without causing air leak in the vacuum suction passage, and thus it is possible to accurately transport the component.
【図1】本発明の一実施例による部品搬送装置が適用さ
れた部品供給装置の全体構成を示す正面図である。FIG. 1 is a front view showing the overall configuration of a component supply device to which a component transfer device according to an embodiment of the present invention is applied.
【図2】本発明の一実施例による部品搬送装置を示すも
ので、(a)は平面図、(b)は正面図である。2A and 2B show a parts conveying device according to an embodiment of the present invention, wherein FIG. 2A is a plan view and FIG. 2B is a front view.
【図3】本発明の一実施例による部品搬送装置の吸着ノ
ズルの要部を示す縦断面図である。FIG. 3 is a vertical cross-sectional view showing a main part of a suction nozzle of a component carrying device according to an embodiment of the present invention.
【図4】本発明の一実施例による部品搬送装置のパッド
によるBGA(部品)吸着時の状態を示す正面図であ
る。FIG. 4 is a front view showing a state when a BGA (component) is picked up by a pad of the component transfer device according to the embodiment of the present invention.
【図5】本発明の一実施例による部品搬送装置が適用さ
れた部品供給装置の部品供給の流れを説明するフローチ
ャートである。FIG. 5 is a flowchart illustrating a flow of component supply of a component supply device to which a component transfer device according to an embodiment of the present invention is applied.
【図6】本発明の別の実施例による部品搬送装置のパッ
ドを示す斜視図である。FIG. 6 is a perspective view showing a pad of a component carrying device according to another embodiment of the present invention.
【図7】従来の部品搬送装置のパッドでQFPを吸着し
た状態を示す正面図である。FIG. 7 is a front view showing a state in which QFP is adsorbed by a pad of a conventional component transfer device.
【図8】従来の部品搬送装置のパッドでBGAを吸着し
た状態を示す正面図である。FIG. 8 is a front view showing a state in which a BGA is sucked by a pad of a conventional component transfer device.
10…部品搬送装置、16…真空発生器(真空発生
源)、23…パッド、23b…真空吸引通路、27…部
品、27a…下面(吸着面)、29…外円筒部(外筒
部)、30…内円筒部(内筒部)。DESCRIPTION OF SYMBOLS 10 ... Parts conveying device, 16 ... Vacuum generator (vacuum generation source), 23 ... Pad, 23b ... Vacuum suction passage, 27 ... Parts, 27a ... Lower surface (suction surface), 29 ... Outer cylinder part (outer cylinder part), 30 ... Inner cylindrical part (inner cylindrical part).
Claims (3)
生源に連通する真空吸引通路が内側に設けられたパッド
に吸着させて搬送する部品搬送装置において、 前記パッドは、部品押し付け時に、部品の吸着面の凹凸
形状に合せて変形し隙間を埋める弾性体であることを特
徴とする部品搬送装置。1. A component transfer device for transferring a suction surface of a pressed component to a pad provided inside a vacuum suction passage communicating with a vacuum generation source, wherein the pad is used when pressing the component. The component transfer device, which is an elastic body that deforms according to the uneven shape of the suction surface of the above and fills the gap.
を特徴とする請求項1記載の部品搬送装置。2. The component transfer device according to claim 1, wherein the pad is made of a porous material.
部とを有しており、これら外筒部と内筒部とは、いずれ
か一方が他方に対し突出・引込可能とされていることを
特徴とする請求項1又は2に記載の部品搬送装置。3. The pad has an outer tubular portion and an inner tubular portion inside thereof, and one of the outer tubular portion and the inner tubular portion can be projected / retracted with respect to the other. The component transfer device according to claim 1 or 2, wherein
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16839594A JP3397453B2 (en) | 1994-07-20 | 1994-07-20 | Parts transfer device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16839594A JP3397453B2 (en) | 1994-07-20 | 1994-07-20 | Parts transfer device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0832287A true JPH0832287A (en) | 1996-02-02 |
JP3397453B2 JP3397453B2 (en) | 2003-04-14 |
Family
ID=15867328
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16839594A Expired - Lifetime JP3397453B2 (en) | 1994-07-20 | 1994-07-20 | Parts transfer device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3397453B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002043353A (en) * | 2000-07-28 | 2002-02-08 | Tesetsuku:Kk | Suction tool for bga element and suction method |
-
1994
- 1994-07-20 JP JP16839594A patent/JP3397453B2/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002043353A (en) * | 2000-07-28 | 2002-02-08 | Tesetsuku:Kk | Suction tool for bga element and suction method |
Also Published As
Publication number | Publication date |
---|---|
JP3397453B2 (en) | 2003-04-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN108400096B (en) | Semiconductor manufacturing apparatus and method for manufacturing semiconductor device | |
JP2008087151A (en) | Electronic part picker, and head assembly for handler having it | |
JP2018120938A (en) | Semiconductor manufacturing apparatus and method for manufacturing semiconductor device | |
TW201913772A (en) | Cutting device and method for transporting semiconductor package | |
TWI696225B (en) | Suction hand, conveying mechanism, resin molding device, conveying method, and method for manufacturing resin molded product | |
JP2000077438A (en) | Chip chucking diecollet, chip chucking, chip bonding device and bonding of chip | |
JP3397453B2 (en) | Parts transfer device | |
JP3548857B2 (en) | Compliance device | |
TW201742231A (en) | Semiconductor device carrier and device handler having the same | |
JPH10100026A (en) | Carrying device of electronic parts, and electronic parts mounting machine using it | |
JPH1117397A (en) | Lower reception device of workpiece | |
KR20050001049A (en) | Semiconductor device vacuum block for solder ball attaching device | |
JP3552574B2 (en) | Apparatus and method for mounting conductive ball | |
JP3497545B2 (en) | Parts holding device | |
JPH09309085A (en) | Conveying device and semiconductor manufacturing device using the conveying device | |
JP2004098448A (en) | Circuit substrate support device | |
JP3654114B2 (en) | Work receiving device and method | |
JP2011044462A (en) | Conveying device and conveying means | |
JPH0714860A (en) | Semiconductor device mounting device and mounting method thereof | |
JP4644385B2 (en) | Work supply device and dicing device | |
KR100333143B1 (en) | Semiconductor Package Manufacturing Method | |
JPH09254068A (en) | Sucking pad | |
JP2024043062A (en) | Suction nozzle and component mounting machine | |
JP3147790B2 (en) | Die bonding equipment | |
KR100373873B1 (en) | Semiconductor Package Manufacturing Equipment |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090214 Year of fee payment: 6 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100214 Year of fee payment: 7 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100214 Year of fee payment: 7 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110214 Year of fee payment: 8 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110214 Year of fee payment: 8 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120214 Year of fee payment: 9 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130214 Year of fee payment: 10 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140214 Year of fee payment: 11 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |