JPH0832107B2 - Piezoelectric vibrator - Google Patents

Piezoelectric vibrator

Info

Publication number
JPH0832107B2
JPH0832107B2 JP61019381A JP1938186A JPH0832107B2 JP H0832107 B2 JPH0832107 B2 JP H0832107B2 JP 61019381 A JP61019381 A JP 61019381A JP 1938186 A JP1938186 A JP 1938186A JP H0832107 B2 JPH0832107 B2 JP H0832107B2
Authority
JP
Japan
Prior art keywords
electrode
piezoelectric vibrator
insulating layer
piezoelectric
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61019381A
Other languages
Japanese (ja)
Other versions
JPS62178100A (en
Inventor
信志 岩下
成隆 中尾
憲二 川辺
健一 早川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP61019381A priority Critical patent/JPH0832107B2/en
Publication of JPS62178100A publication Critical patent/JPS62178100A/en
Publication of JPH0832107B2 publication Critical patent/JPH0832107B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Description

【発明の詳細な説明】 〔概要〕 本発明は、超音波トランスデューサなどの圧電振動子
において、外来電磁雑音をシールドするための電極を、
本来の電極の上に絶縁層を介して形成することを特徴と
する。
DETAILED DESCRIPTION OF THE INVENTION [Outline] In a piezoelectric vibrator such as an ultrasonic transducer, the present invention provides an electrode for shielding external electromagnetic noise,
It is characterized in that it is formed on the original electrode via an insulating layer.

〔産業上の利用分野〕[Industrial applications]

本発明は超音波診断装置や超音波探傷装置などのプロ
ーブに使用される圧電振動子の改良にかかわり、外来の
電磁的雑音を除去して高い精度の測定を可能とするもの
である。
The present invention relates to an improvement of a piezoelectric vibrator used for a probe of an ultrasonic diagnostic apparatus, an ultrasonic flaw detector, etc., and removes external electromagnetic noise to enable highly accurate measurement.

〔従来の技術〕[Conventional technology]

従来の圧電振動子は一般に、第4図に示す如くバッキ
ング材41、圧電体40、整合層42から成り、圧電体40は圧
電セラミック40−1、背面電極40−2、前面電極40−3
から成る。本図において観測用超音波は前面電極側から
整合層を介して測定対象に送出され、対象からの反射波
はその逆の径路で受信され、信号処理されて表示等され
る。
A conventional piezoelectric vibrator generally includes a backing material 41, a piezoelectric body 40, and a matching layer 42 as shown in FIG. 4, and the piezoelectric body 40 includes a piezoelectric ceramic 40-1, a back electrode 40-2, and a front electrode 40-3.
Consists of. In the figure, the ultrasonic waves for observation are transmitted from the front electrode side to the measurement target through the matching layer, and the reflected wave from the target is received on the path opposite to that, processed and displayed.

受信される信号は一般に極めて微弱であり、信号ケー
ブルなどで拾われる外来の電磁雑音の影響は無視できな
い。そのため、信号ケーブルやコネクタにシールドを施
すことが行われているが、圧電振動子の開口面について
のシールドが問題となっている。これに対して第5図に
示す如く、整合層42の上にシールド電極を設ける例が提
案されている(実開昭58−48221、特開昭59−207138
等)。尚、43は音響レンズである。
The received signal is generally extremely weak, and the effect of extraneous electromagnetic noise picked up by a signal cable or the like cannot be ignored. Therefore, the signal cable and the connector are shielded, but the shield of the opening surface of the piezoelectric vibrator is a problem. On the other hand, as shown in FIG. 5, an example in which a shield electrode is provided on the matching layer 42 has been proposed (Japanese Utility Model Application Laid-Open No. 58-48221, Japanese Patent Application Laid-Open No. 59-207138).
etc). Incidentally, 43 is an acoustic lens.

〔発明が解決しようとする問題点〕[Problems to be solved by the invention]

しかし第5図の例においては、シールド電極が整合層
42の上に設けられるため、超音波の音響特性に悪影響を
及ぼさないようにその厚みを極端に薄くする必用があ
り、またこのシールド電極からリード線を引出すのが難
しい、などの問題点があった。
However, in the example of FIG. 5, the shield electrode is the matching layer.
Since it is provided on top of 42, it is necessary to make the thickness extremely thin so as not to adversely affect the acoustic characteristics of ultrasonic waves, and it is difficult to pull out the lead wire from this shield electrode. It was

〔問題点を解決するための手段〕[Means for solving problems]

本発明では第1図に原理図を示す如く、一方の電極11
の上にこの電極と略同じ音響インピーダンスを有する絶
縁層13を介してシールド電極14を形成することを特徴と
する。
In the present invention, as shown in the principle diagram of FIG.
It is characterized in that a shield electrode 14 is formed on top of this via an insulating layer 13 having substantially the same acoustic impedance as this electrode.

〔作用〕[Action]

このような構成をとることにより、電極11,12,圧電体
10、絶縁層13及びシールド電極14の音響インピーダンス
を略同じとすることは容易にできるため、基本周波数は
全体の厚さの平均音速で計算されるλ/2共振周波数とし
て扱うことができ、音響特性を損なうことはない。また
絶縁層13としては、電極材と音響インピーダンスの近い
アルミナ(Al2O3)や酸化珪素(SiO2)などの金属酸化
膜を蒸着、または焼付などで形成すればよい。
By adopting such a configuration, the electrodes 11 and 12, the piezoelectric body
Since it is easy to make the acoustic impedance of 10, the insulating layer 13 and the shield electrode 14 approximately the same, the fundamental frequency can be treated as a λ / 2 resonance frequency calculated by the average sound velocity of the entire thickness, and the acoustic It does not spoil the characteristics. As the insulating layer 13, a metal oxide film such as alumina (Al 2 O 3 ) or silicon oxide (SiO 2 ) having an acoustic impedance close to that of the electrode material may be formed by vapor deposition or baking.

又、リード線の引出しについても、本来の電極11、12
のリード線と同様に行え、従来のように整合層や音響レ
ンズの形成工程における特別の配慮は不要となる。
Also, regarding the lead wires, the original electrodes 11, 12
This can be performed in the same manner as the lead wire of No. 1 and does not require special consideration in the process of forming the matching layer and the acoustic lens as in the conventional case.

〔実施例〕〔Example〕

第2図は本発明の一実施例による超音波トランスデュ
ーサを示し、20は圧電振動子、20−1は圧電セラミッ
ク、20−2は背面電極、20−3は前面電極、20−4は絶
縁層、20−5はシールド電極、21は整合層、22はバッキ
ング材、23は駆動/受信回路を示す。シールド電極20−
5は接地されており、矢印方向からの電磁波はこの電極
によって反射、吸収されて前面電極20−3の到達エネル
ギーは減衰したものとなる。
FIG. 2 shows an ultrasonic transducer according to an embodiment of the present invention, in which 20 is a piezoelectric vibrator, 20-1 is a piezoelectric ceramic, 20-2 is a back electrode, 20-3 is a front electrode, and 20-4 is an insulating layer. , 20-5 is a shield electrode, 21 is a matching layer, 22 is a backing material, and 23 is a driving / receiving circuit. Shield electrode 20-
5 is grounded, and electromagnetic waves from the direction of the arrow are reflected and absorbed by this electrode, and the energy reached by the front electrode 20-3 is attenuated.

第3図は本発明の他の実施例によるアレイ型超音波ト
ランスデューサを示し、第2図と同じ符合は同じものを
意味し、又24は音響レンズである。第2図と異なるの
は、圧電セラミックが複数に分割されており、前面電極
は互いに共通接続されていること、及び前面電極20−3
とシールド電極20−5はリード線引出しのためにその一
部が露出していることである。
FIG. 3 shows an array type ultrasonic transducer according to another embodiment of the present invention, the same reference numerals as those in FIG. 2 mean the same things, and 24 is an acoustic lens. The difference from FIG. 2 is that the piezoelectric ceramic is divided into a plurality of parts, and the front electrodes are commonly connected to each other.
That is, the shield electrode 20-5 is partially exposed for leading the lead wire.

〔発明の効果〕〔The invention's effect〕

以上の如く本発明によれば、シールド電極が前面電極
の上に絶縁層を介して形成されるので、音響特性を損な
うことがなく、またリード線の引出しも容易に行うこと
ができる。
As described above, according to the present invention, since the shield electrode is formed on the front electrode via the insulating layer, the acoustic characteristics are not impaired and the lead wire can be easily drawn out.

尚、シールド電極は前面側のみでなく、背面側にも設
けることができる。
The shield electrode can be provided not only on the front side but also on the back side.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の原理を示す断面図、第2図は本発明の
一実施例を示す斜視図、第3図は本発明の他の実施例を
示す斜視図、第4図は従来例を示す断面図、第5図は他
の従来例を示す断面図である。 第1図において、10は圧電セラミック、11は前面電極、
12は背面電極、13は絶縁層、14はシールド電極である。
1 is a sectional view showing the principle of the present invention, FIG. 2 is a perspective view showing an embodiment of the present invention, FIG. 3 is a perspective view showing another embodiment of the present invention, and FIG. 4 is a conventional example. FIG. 5 is a sectional view showing another conventional example. In FIG. 1, 10 is a piezoelectric ceramic, 11 is a front electrode,
Reference numeral 12 is a back electrode, 13 is an insulating layer, and 14 is a shield electrode.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 早川 健一 神奈川県川崎市中原区上小田中1015番地 富士通株式会社内 (56)参考文献 特開 昭59−99900(JP,A) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Kenichi Hayakawa Kenichi Hayakawa 1015 Kamiodanaka, Nakahara-ku, Kawasaki-shi, Kanagawa Within Fujitsu Limited (56) References JP-A-59-99900 (JP, A)

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】圧電体の両面に夫々電極を有する圧電振動
子において、少なくともその片面の電極上に該電極と音
響インピーダンスを略同じとした電気的絶縁層を介して
第2層目の電極を形成したことを特徴とする圧電振動
子。
1. A piezoelectric vibrator having electrodes on both sides of a piezoelectric body, wherein a second-layer electrode is provided on at least one electrode of the piezoelectric body via an electrically insulating layer having substantially the same acoustic impedance as the electrode. A piezoelectric vibrator characterized by being formed.
【請求項2】上記片面に形成された2層の電極から、互
いに独立のリード線が引き出されていること特徴とする
特許請求の範囲第1項記載の圧電振動子。
2. The piezoelectric vibrator according to claim 1, wherein lead wires independent from each other are drawn from the two-layer electrodes formed on the one surface.
【請求項3】上記絶縁層として、金属酸化膜を使用する
ことを特徴とする特許請求の範囲第1項または第2項記
載の圧電振動子。
3. The piezoelectric vibrator according to claim 1 or 2, wherein a metal oxide film is used as the insulating layer.
JP61019381A 1986-01-31 1986-01-31 Piezoelectric vibrator Expired - Lifetime JPH0832107B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61019381A JPH0832107B2 (en) 1986-01-31 1986-01-31 Piezoelectric vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61019381A JPH0832107B2 (en) 1986-01-31 1986-01-31 Piezoelectric vibrator

Publications (2)

Publication Number Publication Date
JPS62178100A JPS62178100A (en) 1987-08-05
JPH0832107B2 true JPH0832107B2 (en) 1996-03-27

Family

ID=11997733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61019381A Expired - Lifetime JPH0832107B2 (en) 1986-01-31 1986-01-31 Piezoelectric vibrator

Country Status (1)

Country Link
JP (1) JPH0832107B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070046149A1 (en) * 2005-08-23 2007-03-01 Zipparo Michael J Ultrasound probe transducer assembly and production method
JP2008302098A (en) * 2007-06-11 2008-12-18 Fujifilm Corp Ultrasonic probe, backing for ultrasonic probe, and method for producing the backing
CN102159334A (en) * 2008-09-16 2011-08-17 皇家飞利浦电子股份有限公司 Capacitive micromachined ultrasound transducer

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5999900A (en) * 1982-11-29 1984-06-08 Toshiba Corp Ultrasonic wave probe

Also Published As

Publication number Publication date
JPS62178100A (en) 1987-08-05

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