JPH0832107B2 - Piezoelectric vibrator - Google Patents
Piezoelectric vibratorInfo
- Publication number
- JPH0832107B2 JPH0832107B2 JP61019381A JP1938186A JPH0832107B2 JP H0832107 B2 JPH0832107 B2 JP H0832107B2 JP 61019381 A JP61019381 A JP 61019381A JP 1938186 A JP1938186 A JP 1938186A JP H0832107 B2 JPH0832107 B2 JP H0832107B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- piezoelectric vibrator
- insulating layer
- piezoelectric
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
Description
【発明の詳細な説明】 〔概要〕 本発明は、超音波トランスデューサなどの圧電振動子
において、外来電磁雑音をシールドするための電極を、
本来の電極の上に絶縁層を介して形成することを特徴と
する。DETAILED DESCRIPTION OF THE INVENTION [Outline] In a piezoelectric vibrator such as an ultrasonic transducer, the present invention provides an electrode for shielding external electromagnetic noise,
It is characterized in that it is formed on the original electrode via an insulating layer.
本発明は超音波診断装置や超音波探傷装置などのプロ
ーブに使用される圧電振動子の改良にかかわり、外来の
電磁的雑音を除去して高い精度の測定を可能とするもの
である。The present invention relates to an improvement of a piezoelectric vibrator used for a probe of an ultrasonic diagnostic apparatus, an ultrasonic flaw detector, etc., and removes external electromagnetic noise to enable highly accurate measurement.
従来の圧電振動子は一般に、第４図に示す如くバッキ
ング材41、圧電体40、整合層42から成り、圧電体40は圧
電セラミック40−１、背面電極40−２、前面電極40−３
から成る。本図において観測用超音波は前面電極側から
整合層を介して測定対象に送出され、対象からの反射波
はその逆の径路で受信され、信号処理されて表示等され
る。A conventional piezoelectric vibrator generally includes a backing material 41, a piezoelectric body 40, and a matching layer 42 as shown in FIG. 4, and the piezoelectric body 40 includes a piezoelectric ceramic 40-1, a back electrode 40-2, and a front electrode 40-3.
Consists of. In the figure, the ultrasonic waves for observation are transmitted from the front electrode side to the measurement target through the matching layer, and the reflected wave from the target is received on the path opposite to that, processed and displayed.
受信される信号は一般に極めて微弱であり、信号ケー
ブルなどで拾われる外来の電磁雑音の影響は無視できな
い。そのため、信号ケーブルやコネクタにシールドを施
すことが行われているが、圧電振動子の開口面について
のシールドが問題となっている。これに対して第５図に
示す如く、整合層42の上にシールド電極を設ける例が提
案されている（実開昭58−48221、特開昭59−207138
等）。尚、43は音響レンズである。The received signal is generally extremely weak, and the effect of extraneous electromagnetic noise picked up by a signal cable or the like cannot be ignored. Therefore, the signal cable and the connector are shielded, but the shield of the opening surface of the piezoelectric vibrator is a problem. On the other hand, as shown in FIG. 5, an example in which a shield electrode is provided on the matching layer 42 has been proposed (Japanese Utility Model Application Laid-Open No. 58-48221, Japanese Patent Application Laid-Open No. 59-207138).
etc). Incidentally, 43 is an acoustic lens.
しかし第５図の例においては、シールド電極が整合層
42の上に設けられるため、超音波の音響特性に悪影響を
及ぼさないようにその厚みを極端に薄くする必用があ
り、またこのシールド電極からリード線を引出すのが難
しい、などの問題点があった。However, in the example of FIG. 5, the shield electrode is the matching layer.
Since it is provided on top of 42, it is necessary to make the thickness extremely thin so as not to adversely affect the acoustic characteristics of ultrasonic waves, and it is difficult to pull out the lead wire from this shield electrode. It was
本発明では第１図に原理図を示す如く、一方の電極11
の上にこの電極と略同じ音響インピーダンスを有する絶
縁層13を介してシールド電極14を形成することを特徴と
する。In the present invention, as shown in the principle diagram of FIG.
It is characterized in that a shield electrode 14 is formed on top of this via an insulating layer 13 having substantially the same acoustic impedance as this electrode.
このような構成をとることにより、電極11,12,圧電体
10、絶縁層13及びシールド電極14の音響インピーダンス
を略同じとすることは容易にできるため、基本周波数は
全体の厚さの平均音速で計算されるλ/2共振周波数とし
て扱うことができ、音響特性を損なうことはない。また
絶縁層13としては、電極材と音響インピーダンスの近い
アルミナ（Al2O3）や酸化珪素（SiO2）などの金属酸化
膜を蒸着、または焼付などで形成すればよい。By adopting such a configuration, the electrodes 11 and 12, the piezoelectric body
Since it is easy to make the acoustic impedance of 10, the insulating layer 13 and the shield electrode 14 approximately the same, the fundamental frequency can be treated as a λ / 2 resonance frequency calculated by the average sound velocity of the entire thickness, and the acoustic It does not spoil the characteristics. As the insulating layer 13, a metal oxide film such as alumina (Al 2 O 3 ) or silicon oxide (SiO 2 ) having an acoustic impedance close to that of the electrode material may be formed by vapor deposition or baking.
又、リード線の引出しについても、本来の電極11、12
のリード線と同様に行え、従来のように整合層や音響レ
ンズの形成工程における特別の配慮は不要となる。Also, regarding the lead wires, the original electrodes 11, 12
This can be performed in the same manner as the lead wire of No. 1 and does not require special consideration in the process of forming the matching layer and the acoustic lens as in the conventional case.
第２図は本発明の一実施例による超音波トランスデュ
ーサを示し、20は圧電振動子、20−１は圧電セラミッ
ク、20−２は背面電極、20−３は前面電極、20−４は絶
縁層、20−５はシールド電極、21は整合層、22はバッキ
ング材、23は駆動／受信回路を示す。シールド電極20−
５は接地されており、矢印方向からの電磁波はこの電極
によって反射、吸収されて前面電極20−３の到達エネル
ギーは減衰したものとなる。FIG. 2 shows an ultrasonic transducer according to an embodiment of the present invention, in which 20 is a piezoelectric vibrator, 20-1 is a piezoelectric ceramic, 20-2 is a back electrode, 20-3 is a front electrode, and 20-4 is an insulating layer. , 20-5 is a shield electrode, 21 is a matching layer, 22 is a backing material, and 23 is a driving / receiving circuit. Shield electrode 20-
5 is grounded, and electromagnetic waves from the direction of the arrow are reflected and absorbed by this electrode, and the energy reached by the front electrode 20-3 is attenuated.
第３図は本発明の他の実施例によるアレイ型超音波ト
ランスデューサを示し、第２図と同じ符合は同じものを
意味し、又24は音響レンズである。第２図と異なるの
は、圧電セラミックが複数に分割されており、前面電極
は互いに共通接続されていること、及び前面電極20−３
とシールド電極20−５はリード線引出しのためにその一
部が露出していることである。FIG. 3 shows an array type ultrasonic transducer according to another embodiment of the present invention, the same reference numerals as those in FIG. 2 mean the same things, and 24 is an acoustic lens. The difference from FIG. 2 is that the piezoelectric ceramic is divided into a plurality of parts, and the front electrodes are commonly connected to each other.
That is, the shield electrode 20-5 is partially exposed for leading the lead wire.
以上の如く本発明によれば、シールド電極が前面電極
の上に絶縁層を介して形成されるので、音響特性を損な
うことがなく、またリード線の引出しも容易に行うこと
ができる。As described above, according to the present invention, since the shield electrode is formed on the front electrode via the insulating layer, the acoustic characteristics are not impaired and the lead wire can be easily drawn out.
尚、シールド電極は前面側のみでなく、背面側にも設
けることができる。The shield electrode can be provided not only on the front side but also on the back side.
第１図は本発明の原理を示す断面図、第２図は本発明の
一実施例を示す斜視図、第３図は本発明の他の実施例を
示す斜視図、第４図は従来例を示す断面図、第５図は他
の従来例を示す断面図である。 第１図において、10は圧電セラミック、11は前面電極、
12は背面電極、13は絶縁層、14はシールド電極である。1 is a sectional view showing the principle of the present invention, FIG. 2 is a perspective view showing an embodiment of the present invention, FIG. 3 is a perspective view showing another embodiment of the present invention, and FIG. 4 is a conventional example. FIG. 5 is a sectional view showing another conventional example. In FIG. 1, 10 is a piezoelectric ceramic, 11 is a front electrode,
Reference numeral 12 is a back electrode, 13 is an insulating layer, and 14 is a shield electrode.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 早川 健一 神奈川県川崎市中原区上小田中1015番地 富士通株式会社内 (56)参考文献 特開 昭59−99900（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Kenichi Hayakawa Kenichi Hayakawa 1015 Kamiodanaka, Nakahara-ku, Kawasaki-shi, Kanagawa Within Fujitsu Limited (56) References JP-A-59-99900 (JP, A)
Claims (3)
子において、少なくともその片面の電極上に該電極と音
響インピーダンスを略同じとした電気的絶縁層を介して
第２層目の電極を形成したことを特徴とする圧電振動
子。1. A piezoelectric vibrator having electrodes on both sides of a piezoelectric body, wherein a second-layer electrode is provided on at least one electrode of the piezoelectric body via an electrically insulating layer having substantially the same acoustic impedance as the electrode. A piezoelectric vibrator characterized by being formed.
いに独立のリード線が引き出されていること特徴とする
特許請求の範囲第１項記載の圧電振動子。2. The piezoelectric vibrator according to claim 1, wherein lead wires independent from each other are drawn from the two-layer electrodes formed on the one surface.
ことを特徴とする特許請求の範囲第１項または第２項記
載の圧電振動子。3. The piezoelectric vibrator according to claim 1 or 2, wherein a metal oxide film is used as the insulating layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61019381A JPH0832107B2 (en) | 1986-01-31 | 1986-01-31 | Piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61019381A JPH0832107B2 (en) | 1986-01-31 | 1986-01-31 | Piezoelectric vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62178100A JPS62178100A (en) | 1987-08-05 |
| JPH0832107B2 true JPH0832107B2 (en) | 1996-03-27 |
Family
ID=11997733
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61019381A Expired - Lifetime JPH0832107B2 (en) | 1986-01-31 | 1986-01-31 | Piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0832107B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070046149A1 (en) * | 2005-08-23 | 2007-03-01 | Zipparo Michael J | Ultrasound probe transducer assembly and production method |
| JP2008302098A (en) * | 2007-06-11 | 2008-12-18 | Fujifilm Corp | Ultrasonic probe, backing for ultrasonic probe, and method for producing the backing |
| CN102159334A (en) * | 2008-09-16 | 2011-08-17 | 皇家飞利浦电子股份有限公司 | Capacitive micromachined ultrasound transducer |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5999900A (en) * | 1982-11-29 | 1984-06-08 | Toshiba Corp | Ultrasonic wave probe |
-
1986
- 1986-01-31 JP JP61019381A patent/JPH0832107B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62178100A (en) | 1987-08-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |