JPH08320233A - Sensitivity temperature characteristic adjusting method for vibrating gyroscope - Google Patents

Sensitivity temperature characteristic adjusting method for vibrating gyroscope

Info

Publication number
JPH08320233A
JPH08320233A JP7152595A JP15259595A JPH08320233A JP H08320233 A JPH08320233 A JP H08320233A JP 7152595 A JP7152595 A JP 7152595A JP 15259595 A JP15259595 A JP 15259595A JP H08320233 A JPH08320233 A JP H08320233A
Authority
JP
Japan
Prior art keywords
frequency
temperature characteristic
vibration
vibrating body
sensitivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7152595A
Other languages
Japanese (ja)
Inventor
Kazuhiro Ebara
原 和 博 江
Katsumi Fujimoto
本 克 己 藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP7152595A priority Critical patent/JPH08320233A/en
Publication of JPH08320233A publication Critical patent/JPH08320233A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To provide a adjusting method that can adjust the sensitivity temperature characteristic of a vibrating gyroscope easily at a low cost. CONSTITUTION: A vibrating gyroscope 10 includes a vibrator of equilateral triangle pole shape, for instance. Piezoelectric elements 14a, 14b, 14c are formed at the side face of a vibrator 12. An oscillating circuit 24 is connected between the piezoelectric elements 14a, 14b and the piezoelectric element 14c, and the vibrator 12 is bendingly vibrated in an orthogonal direction to the face with the piezoelectric element 14c formed. A ridgeline part of the vibrator 12 opposed to the piezoelectric element 14c is chipped to adjust resonance frequency, oscillating frequency, anti-resonance frequency or anti-resonance frequency in the bending vibrating direction at the non-rotating time.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は振動ジャイロの感度温
度特性の調整方法に関し、特に、回転角速度の検出感度
と温度との関係を調整するための、振動ジャイロの感度
温度特性の調整方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of adjusting the sensitivity temperature characteristic of a vibration gyro, and more particularly to a method of adjusting the sensitivity temperature characteristic of a vibration gyro for adjusting the relationship between the detection sensitivity of rotational angular velocity and temperature.

【0002】[0002]

【従来の技術】図1は振動ジャイロの一例を示す斜視図
であり、図2はその断面図である。振動ジャイロ10
は、たとえば正3角柱状の振動体12を含む。振動体1
2は、たとえばエリンバ,鉄−ニッケル合金,石英,ガ
ラス,水晶,セラミックなど、一般的に機械的な振動を
生じる材料で形成される。
2. Description of the Related Art FIG. 1 is a perspective view showing an example of a vibrating gyro, and FIG. 2 is a sectional view thereof. Vibrating gyro 10
Includes a vibrating body 12 having, for example, a regular triangular prism shape. Vibrating body 1
The material 2 is generally made of a material that causes mechanical vibration, such as elinvar, iron-nickel alloy, quartz, glass, crystal, and ceramic.

【0003】振動体12の3つの側面には、それぞれ圧
電素子14a,14b,14cが形成される。圧電素子
14aは、たとえば圧電セラミックなどからなる圧電層
16aを含み、圧電層16aの両面に電極18a,20
aが形成される。そして、一方の電極20aが、振動体
12に接着される。同様に、圧電素子14b,14cは
圧電層16b,16cを含み、その両面に電極18b,
20bおよび電極18c,20cが形成される。そし
て、これらの圧電素子14b,14cの一方の電極20
b,20cが、振動体12に接着される。
Piezoelectric elements 14a, 14b and 14c are formed on three side surfaces of the vibrating body 12, respectively. The piezoelectric element 14a includes a piezoelectric layer 16a made of, for example, piezoelectric ceramic, and electrodes 18a, 20 are provided on both surfaces of the piezoelectric layer 16a.
a is formed. Then, one electrode 20a is bonded to the vibrating body 12. Similarly, the piezoelectric elements 14b and 14c include piezoelectric layers 16b and 16c, and electrodes 18b and
20b and electrodes 18c and 20c are formed. Then, one electrode 20 of these piezoelectric elements 14b, 14c
b and 20c are bonded to the vibrating body 12.

【0004】この振動ジャイロ10を使用する場合、図
3に示すように、圧電素子14a,14bに抵抗22
a,22bが接続される。これらの抵抗22a,22b
と圧電素子14cとの間に、発振回路24が接続され
る。この発振回路24の出力信号が、振動体12を屈曲
振動させるための駆動信号として、圧電素子14a,1
4bに与えられる。そして、振動体12の屈曲振動によ
って圧電素子14cから出力される信号が、発振回路2
4に帰還される。さらに、圧電素子14a,14bは、
差動回路26に接続される。また、差動回路26は検波
回路28に接続され、検波回路28は平滑回路30に接
続される。平滑回路30の出力信号は、必要に応じて、
増幅回路で増幅される。
When using the vibrating gyroscope 10, as shown in FIG. 3, resistors 22 are provided on the piezoelectric elements 14a and 14b.
a and 22b are connected. These resistors 22a, 22b
The oscillation circuit 24 is connected between the piezoelectric element 14c and the piezoelectric element 14c. The output signal of the oscillation circuit 24 is used as a drive signal for causing the vibrating body 12 to flexurally vibrate.
4b. Then, the signal output from the piezoelectric element 14c due to the bending vibration of the vibrating body 12 is transmitted to the oscillation circuit 2
Returned to 4. Further, the piezoelectric elements 14a and 14b are
It is connected to the differential circuit 26. The differential circuit 26 is connected to the detection circuit 28, and the detection circuit 28 is connected to the smoothing circuit 30. The output signal of the smoothing circuit 30 is, if necessary,
It is amplified by the amplifier circuit.

【0005】無回転時においては、振動体12は、圧電
素子14c形成面に直交する方向に屈曲振動する。この
状態では、圧電素子14a,14bの屈曲状態は同じで
あり、この屈曲によって圧電素子14a,14bから出
力される信号は同じである。したがって、無回転時に
は、差動回路26から信号が出力されない。振動ジャイ
ロ10が、振動体12の軸を中心として回転すると、無
回転時の振動方向に対して直交する方向にコリオリ力が
働く。このコリオリ力によって、振動体12の屈曲振動
の方向が変わる。圧電素子14a,14bは、無回転時
の振動体12の屈曲振動の方向に対して対称となるよう
に配置されているため、コリオリ力による圧電素子14
a,14bの屈曲状態の変化は互いに逆となる。そのた
め、圧電素子14a,14bから、コリオリ力に対応し
た逆極性の信号が出力される。したがって、差動回路2
6から、コリオリ力に対応した大きい出力信号が得られ
る。この差動回路26の出力信号が検波回路28で検波
され、さらに平滑回路30で平滑される。この平滑回路
30の出力信号はコリオリ力に対応した信号であり、平
滑回路30の出力信号を測定することにより、振動ジャ
イロ10に加わった回転角速度を検出することができ
る。
When not rotating, the vibrating body 12 flexurally vibrates in the direction orthogonal to the surface on which the piezoelectric element 14c is formed. In this state, the bending states of the piezoelectric elements 14a and 14b are the same, and the signals output from the piezoelectric elements 14a and 14b by this bending are the same. Therefore, no signal is output from the differential circuit 26 during non-rotation. When the vibrating gyro 10 rotates about the axis of the vibrating body 12, a Coriolis force acts in a direction orthogonal to the vibrating direction when it is not rotating. This Coriolis force changes the direction of flexural vibration of the vibrating body 12. Since the piezoelectric elements 14a and 14b are arranged so as to be symmetrical with respect to the bending vibration direction of the vibrating body 12 when there is no rotation, the piezoelectric elements 14 due to the Coriolis force.
The changes in the bent states of a and 14b are opposite to each other. Therefore, the piezoelectric elements 14a and 14b output signals of opposite polarities corresponding to the Coriolis force. Therefore, the differential circuit 2
From 6, a large output signal corresponding to the Coriolis force is obtained. The output signal of the differential circuit 26 is detected by the detection circuit 28 and further smoothed by the smoothing circuit 30. The output signal of the smoothing circuit 30 is a signal corresponding to the Coriolis force, and by measuring the output signal of the smoothing circuit 30, the rotational angular velocity applied to the vibration gyro 10 can be detected.

【0006】[0006]

【発明が解決しようとする課題】このような振動ジャイ
ロでは、雰囲気温度の変化によって、検出感度が変動す
る。検出感度の変動のしかたとしては、たとえば温度が
上がるにつれて検出感度が大きくなったり、逆に温度が
上がるにつれて検出感度が小さくなったり、または温度
が上がっても下がっても検出感度が小さくなったりす
る。振動ジャイロの感度温度特性を調整するためには、
たとえば増幅回路のゲイン決定抵抗としてサーミスタな
どの感温素子を使用したり、2つの検出用の圧電素子間
にサーミスタを入れ、これらのサーミスタの抵抗変化に
よって振動ジャイロの感度温度特性を調整する方法があ
る。
In such a vibration gyro, the detection sensitivity varies depending on the change in ambient temperature. The variation of the detection sensitivity is, for example, that the detection sensitivity becomes larger as the temperature rises, conversely the detection sensitivity becomes smaller as the temperature rises, or the detection sensitivity becomes smaller even if the temperature rises or falls. . To adjust the sensitivity temperature characteristic of the vibration gyro,
For example, a temperature sensitive element such as a thermistor is used as a gain determining resistance of an amplifier circuit, or a thermistor is inserted between two piezoelectric elements for detection, and the sensitivity temperature characteristic of a vibration gyro is adjusted by changing the resistance of these thermistors. is there.

【0007】しかしながら、このような方法では、サー
ミスタのような高価な素子を使用しなければならず、コ
ストが高くなってしまう。また、振動ジャイロの感度温
度特性を所望の状態に調整するために、適切なサーミス
タを選択する必要があり、特性の調整が困難であった。
However, in such a method, an expensive element such as a thermistor must be used, which results in high cost. Further, in order to adjust the sensitivity temperature characteristic of the vibration gyro to a desired state, it is necessary to select an appropriate thermistor, and it is difficult to adjust the characteristic.

【0008】それゆえに、この発明の主たる目的は、簡
単に、しかも安価に振動ジャイロの感度温度特性を調整
することができる調整方法を提供することである。
Therefore, a main object of the present invention is to provide an adjusting method capable of easily and inexpensively adjusting the sensitivity temperature characteristic of the vibration gyro.

【0009】[0009]

【課題を解決するための手段】この発明は、屈曲振動す
るための柱状の振動体を含む振動ジャイロの感度温度特
性の調整方法であって、無回転時における振動体の屈曲
振動方向の共振周波数,発振周波数,反共振周波数ある
いは離調周波数が調整される、振動ジャイロの感度温度
特性の調整方法である。この振動ジャイロの感度温度特
性の調整方法において、無回転時における振動体の屈曲
振動方向の共振周波数,発振周波数,反共振周波数ある
いは離調周波数は、振動体の切削量を変えることによっ
て調整される。
SUMMARY OF THE INVENTION The present invention is a method for adjusting the sensitivity temperature characteristic of a vibrating gyroscope including a columnar vibrating body for flexural vibration, wherein the resonance frequency in the flexural vibration direction of the vibrating body when not rotating. It is a method of adjusting the sensitivity temperature characteristic of the vibration gyro, in which the oscillation frequency, anti-resonance frequency or detuning frequency is adjusted. In this method of adjusting the sensitivity temperature characteristic of the vibrating gyroscope, the resonance frequency, the oscillation frequency, the anti-resonance frequency or the detuning frequency in the bending vibration direction of the vibrating body during no rotation is adjusted by changing the cutting amount of the vibrating body. .

【0010】[0010]

【作用】無回転時における振動体の屈曲振動方向の共振
周波数,発振周波数,反共振周波数あるいは離調周波数
を調整することにより、振動ジャイロの検出感度の最大
となる点が、高温側あるいは低温側に移動する。検出感
度の最大となる点を高温側に移動させると、温度を横軸
とし検出感度を縦軸としたグラフでみると、検出感度は
右肩上がりの傾向を示す。また、検出感度の最大となる
点を低温側に移動させると、検出感度は右肩下がりの傾
向を示す。このような調整は、振動体の切削量を調整す
ることによって可能である。
[Function] By adjusting the resonance frequency, the oscillation frequency, the anti-resonance frequency or the detuning frequency in the bending vibration direction of the vibrating body at the time of no rotation, the point where the detection sensitivity of the vibration gyro becomes maximum is the high temperature side or the low temperature side. Move to. When the point at which the maximum detection sensitivity is moved to the high temperature side, the graph shows the temperature on the horizontal axis and the detection sensitivity on the vertical axis, the detection sensitivity shows an upward trend. When the point at which the maximum detection sensitivity is moved to the low temperature side, the detection sensitivity shows a downward sloping tendency. Such adjustment is possible by adjusting the cutting amount of the vibrating body.

【0011】[0011]

【発明の効果】この発明によれば、振動体の切削量を変
えるだけで、所望の特性を有する振動ジャイロを得るこ
とができる。そのため、サーミスタなどの高価な素子を
使用する必要がない。また、振動ジャイロの特性を測定
しながら、振動体の切削量を調整すればよく、簡単に振
動ジャイロの感度温度特性を調整することができる。
According to the present invention, a vibrating gyro having desired characteristics can be obtained only by changing the cutting amount of the vibrating body. Therefore, it is not necessary to use an expensive element such as a thermistor. Further, it is only necessary to adjust the cutting amount of the vibrating body while measuring the characteristics of the vibration gyro, and it is possible to easily adjust the sensitivity temperature characteristics of the vibration gyro.

【0012】この発明の上述の目的,その他の目的,特
徴および利点は、図面を参照して行う以下の実施例の詳
細な説明から一層明らかとなろう。
The above-mentioned objects, other objects, features and advantages of the present invention will become more apparent from the detailed description of the embodiments below with reference to the drawings.

【0013】[0013]

【実施例】図1および図2に示す振動ジャイロ10にお
いて、その感度温度特性を調整するために、無回転時に
おける振動体12の屈曲振動の共振周波数,発振周波
数,反共振周波数あるいは離調周波数が調整される。調
整方法としては、圧電素子14c形成面に対向する振動
体12の稜線部が、やすりなどによって削られる。この
振動体12の切削量を調整することにより、上述の周波
数が調整される。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In the vibration gyroscope 10 shown in FIGS. 1 and 2, in order to adjust its sensitivity temperature characteristic, the resonance frequency, the oscillation frequency, the anti-resonance frequency or the detuning frequency of the flexural vibration of the vibrating body 12 at the time of no rotation Is adjusted. As an adjusting method, the ridgeline portion of the vibrating body 12 facing the surface on which the piezoelectric element 14c is formed is scraped with a file or the like. The frequency is adjusted by adjusting the cutting amount of the vibrating body 12.

【0014】振動ジャイロ10において、圧電素子14
a形成面に直交する方向の周波数をfL ,圧電素子14
b形成面に直交する方向の周波数をfR ,圧電素子14
c形成面に直交する方向の周波数をfC としたとき、全
ての方向の周波数が同じであれば、(fL ,fC
R )=(0,0,0)と表す。ここで、fC を変数と
して、(fL ,fC ,fR )=(0,x,0)としたと
き、x>0すなわち圧電素子14c形成面に直交する方
向の周波数が他の2方向の周波数より大きいとき、図4
に示すように、検出感度が最大となる点は高温側に移動
する。また、x<0すなわち圧電素子14c形成面に直
交する方向の周波数が他の2方向の周波数より小さいと
き、図5に示すように、検出感度が最大となる点は低温
側に移動する。したがって、一定の温度を中心としてみ
たとき、x>0のとき、振動ジャイロの感度温度特性は
右肩上がりの傾向を示し、x<0のとき、右肩下がりの
傾向を示す。また、x=0のとき、ほとんど平坦な特性
を示す。
In the vibration gyro 10, the piezoelectric element 14
The frequency in the direction orthogonal to the a-forming surface is f L , and the piezoelectric element 14
b, the frequency in the direction orthogonal to the formation surface is f R , and the piezoelectric element 14
If the frequency in the direction orthogonal to the c-forming surface is f C and the frequencies in all directions are the same, (f L , f C ,
f R ) = (0,0,0). Here, assuming that f C is a variable and (f L , f C , f R ) = (0, x, 0), x> 0, that is, the frequency in the direction orthogonal to the surface on which the piezoelectric element 14c is formed is 2 When the frequency is greater than the frequency in the direction,
As shown in, the point where the detection sensitivity is maximized moves to the high temperature side. Further, when x <0, that is, when the frequency in the direction orthogonal to the surface on which the piezoelectric element 14c is formed is smaller than the frequencies in the other two directions, the point at which the detection sensitivity becomes maximum moves to the low temperature side. Therefore, when centering on a constant temperature, when x> 0, the sensitivity temperature characteristic of the vibrating gyroscope shows an upward tendency, and when x <0, it shows a downward tendency. Further, when x = 0, almost flat characteristics are exhibited.

【0015】実験例として、離調周波数について、(f
L ,fC ,fR )=(0,0,0),(fL ,fC ,f
R )=(0,20,0),(fL ,fC ,fR )=
(0,−20,0)のときの感度温度特性を測定し、そ
の結果を図6に示した。図6では、常温である25℃の
ときの感度を基準とし、温度変化に対して検出感度がど
のように変動するかを示してある。図6からわかるよう
に、fC がfL およびfRより20Hz高いとき、振動
ジャイロの検出感度は、高温側で大きくなり、低温側で
小さくなった。また、fC がfL およびfR より20H
z低いとき、振動ジャイロの検出感度は、高温側で小さ
くなり、低温側で大きくなった。さらに、fL ,fC
R が同じである場合、感度が最大になる点が25℃付
近にあり、振動ジャイロの使用温度範囲内で、ほとんど
平坦な特性を示した。
As an experimental example, for the detuning frequency, (f
L , f C , f R ) = (0, 0, 0), (f L , f C , f
R ) = (0, 20, 0), (f L , f C , f R ) =
The sensitivity temperature characteristic at (0, -20, 0) was measured, and the result is shown in FIG. FIG. 6 shows how the detection sensitivity fluctuates with respect to temperature changes, with reference to the sensitivity at room temperature, 25 ° C. As can be seen from FIG. 6, when f C is higher than f L and f R by 20 Hz, the detection sensitivity of the vibration gyro is high on the high temperature side and low on the low temperature side. Also, f C is 20 H from f L and f R
When z was low, the detection sensitivity of the vibration gyro was low on the high temperature side and high on the low temperature side. Furthermore, f L , f C ,
When f R was the same, the point at which the sensitivity became maximum was around 25 ° C., and almost flat characteristics were exhibited within the operating temperature range of the vibration gyro.

【0016】このように、振動体12の稜線部を削り、
無回転時における振動方向の周波数を調整することによ
り、振動ジャイロ10の検出感度を所望の傾向に設定す
ることができる。したがって、従来の方法のように、サ
ーミスタなどの高価な素子を使用する必要がなく、安価
に振動ジャイロの検出感度を調整することができる。さ
らに、振動ジャイロ10の特性をみながら切削量を調整
できるため、簡単に所望の特性を得ることができる。
In this way, the ridgeline portion of the vibrating body 12 is shaved,
The detection sensitivity of the vibration gyro 10 can be set to a desired tendency by adjusting the frequency in the vibration direction during non-rotation. Therefore, unlike the conventional method, it is not necessary to use an expensive element such as a thermistor, and the detection sensitivity of the vibration gyro can be adjusted at low cost. Furthermore, since the cutting amount can be adjusted while observing the characteristics of the vibration gyro 10, desired characteristics can be easily obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】感度温度特性が調整される振動ジャイロの一例
を示す斜視図である。
FIG. 1 is a perspective view showing an example of a vibration gyro whose sensitivity temperature characteristic is adjusted.

【図2】図1に示す振動ジャイロの断面図である。FIG. 2 is a cross-sectional view of the vibrating gyro shown in FIG.

【図3】図1に示す振動ジャイロを使用するための回路
を示す図解図である。
3 is an illustrative view showing a circuit for using the vibrating gyro shown in FIG. 1. FIG.

【図4】無回転時の振動方向の周波数が他の振動方向の
周波数より大きくなったときの感度の変化を示すグラフ
である。
FIG. 4 is a graph showing a change in sensitivity when a frequency in a vibration direction during non-rotation becomes higher than frequencies in other vibration directions.

【図5】無回転時の振動方向の周波数が他の振動方向の
周波数より小さくなったときの感度の変化を示すグラフ
である。
FIG. 5 is a graph showing a change in sensitivity when a frequency in a vibration direction during non-rotation becomes smaller than a frequency in another vibration direction.

【図6】図1に示す振動ジャイロの離調周波数を変えた
ときの感度を示すグラフである。
6 is a graph showing sensitivity when the detuning frequency of the vibration gyro shown in FIG. 1 is changed.

【符号の説明】[Explanation of symbols]

10 振動ジャイロ 12 振動体 14a,14b,14c 圧電素子 24 発振回路 26 差動回路 28 検波回路 30 平滑回路 DESCRIPTION OF SYMBOLS 10 Vibration gyro 12 Vibration body 14a, 14b, 14c Piezoelectric element 24 Oscillation circuit 26 Differential circuit 28 Detection circuit 30 Smoothing circuit

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 屈曲振動するための柱状の振動体を含む
振動ジャイロの感度温度特性の調整方法であって、 無回転時における前記振動体の屈曲振動方向の共振周波
数,発振周波数,反共振周波数あるいは離調周波数が調
整される、振動ジャイロの感度温度特性の調整方法。
1. A method of adjusting the sensitivity temperature characteristic of a vibration gyro including a columnar vibrating body for flexural vibration, comprising: a resonance frequency, an oscillation frequency, and an anti-resonance frequency in a flexural vibration direction of the vibrating body when not rotating. Alternatively, the detuning frequency is adjusted to adjust the sensitivity temperature characteristic of the vibration gyro.
【請求項2】 無回転時における前記振動体の屈曲振動
方向の共振周波数,発振周波数,反共振周波数あるいは
離調周波数は、前記振動体の切削量を変えることによっ
て調整される、請求項1に記載の振動ジャイロの感度温
度特性の調整方法。
2. The resonance frequency, the oscillation frequency, the anti-resonance frequency or the detuning frequency in the bending vibration direction of the vibrating body during non-rotation is adjusted by changing the cutting amount of the vibrating body. A method for adjusting the sensitivity temperature characteristic of the vibration gyro described.
JP7152595A 1995-05-25 1995-05-25 Sensitivity temperature characteristic adjusting method for vibrating gyroscope Pending JPH08320233A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7152595A JPH08320233A (en) 1995-05-25 1995-05-25 Sensitivity temperature characteristic adjusting method for vibrating gyroscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7152595A JPH08320233A (en) 1995-05-25 1995-05-25 Sensitivity temperature characteristic adjusting method for vibrating gyroscope

Publications (1)

Publication Number Publication Date
JPH08320233A true JPH08320233A (en) 1996-12-03

Family

ID=15543874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7152595A Pending JPH08320233A (en) 1995-05-25 1995-05-25 Sensitivity temperature characteristic adjusting method for vibrating gyroscope

Country Status (1)

Country Link
JP (1) JPH08320233A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7134335B2 (en) 2003-10-06 2006-11-14 Murata Manufacturing Co., Ltd. Vibratory gyro piezoelectric vibrator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7134335B2 (en) 2003-10-06 2006-11-14 Murata Manufacturing Co., Ltd. Vibratory gyro piezoelectric vibrator

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