JPH08316553A - Laser resonator - Google Patents

Laser resonator

Info

Publication number
JPH08316553A
JPH08316553A JP11738295A JP11738295A JPH08316553A JP H08316553 A JPH08316553 A JP H08316553A JP 11738295 A JP11738295 A JP 11738295A JP 11738295 A JP11738295 A JP 11738295A JP H08316553 A JPH08316553 A JP H08316553A
Authority
JP
Japan
Prior art keywords
resonator
mirror
laser
force
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11738295A
Other languages
Japanese (ja)
Inventor
Masaki Kondo
昌樹 近藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP11738295A priority Critical patent/JPH08316553A/en
Publication of JPH08316553A publication Critical patent/JPH08316553A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To lessen a laser resonator in size by a method wherein a resonance mirror is so set as to be moved in a vertical direction with a small force. CONSTITUTION: When a resonator mirror 4 is moved up in a vertical direction (direction of Z), the total sum of the own weight of the mirror 4 and a frictional force is applied to the mirror 4 as a working force, and a force of nearly the same size with the weight of the resonance mirror 4 is developed in a vertical direction by a leaf spring, whereby a driving body 10 is smoothly and lightly operated to develop a force just enough to counterbalance a friction force so as to move up the resonator mirror 4 in a vertical direction, so that the related members including the driving body 10 can be made compact in constitution and lessened in size.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、レーザ媒質の誘導放出
による光を、対向する共振器ミラーを用いて増幅するこ
とによって、レーザ光を発するレーザ共振器に係り、特
に、共振器ミラーの光軸調整構造に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser resonator that emits laser light by amplifying light generated by stimulated emission of a laser medium by using a resonator mirror facing the laser resonator. Axis adjustment structure.

【0002】[0002]

【従来の技術】レーザ発振の原理は、まず、励起により
レーザ媒質中で2準位間に反転分布が形成されると自然
放射光が発生する。自然放射光のなかで極く僅かである
が、共振器の光軸に平行なものだけが共振器ミラーによ
って反射されて何回も往復する。この場合、対向する共
振器ミラーは、ミラー位置,ミラー角度を調整して光が
往復するようにする。光は、反転分布したレーザ媒質の
中を何回も往復する間に、誘導放出を繰り返し、大きな
強度まで増幅される。この場合、対向する2枚の共振器
ミラーのうち片方が部分透過のものであれば、増幅した
光の一部を外部に取り出すことができる。このようにし
て取り出されたものがレーザ光であり、波長,位相,方
向,偏向のよくそろったコヒーレント光である。
2. Description of the Related Art The principle of laser oscillation is as follows. First, when a population inversion is formed between two levels in a laser medium by excitation, spontaneous emission light is generated. Only a small amount of the spontaneous emission light, which is parallel to the optical axis of the resonator, is reflected by the resonator mirror and reciprocates many times. In this case, the opposing resonator mirrors adjust the mirror position and mirror angle so that the light travels back and forth. The light is repeatedly stimulated and emitted while being reciprocated in the inversely distributed laser medium many times, and is amplified to a large intensity. In this case, if one of the two resonator mirrors facing each other is partially transmissive, a part of the amplified light can be extracted to the outside. The laser light extracted in this manner is coherent light with well-matched wavelength, phase, direction, and polarization.

【0003】レーザ共振器は、共振器ミラーの光軸が適
正に合うように、手動あるいは自動化された手段により
調整される。この調整は、レーザ媒質を発振させながら
レーザ光の出力が最大になる位置を最適調整位置とす
る。
Laser resonators are adjusted by manual or automated means to properly align the optical axes of the resonator mirrors. In this adjustment, the position where the output of the laser light is maximized while oscillating the laser medium is the optimum adjustment position.

【0004】しかし、前記調整は、レーザ媒質を発振さ
せながら行うため、乱反射による失明あるいは火傷等を
生じさせるおそれがある。また自由電子レーザの発振等
により放射能が発生するため、作業者がその場所で直接
調整できないため、共振器ミラーの遠隔操作による光軸
調整が行われている。そのため、共振器ミラーは、直交
する3軸方向に移動可能であって、しかも光軸に互いに
直交する2軸を回転中心として回動できる構成になって
いる。
However, since the adjustment is performed while oscillating the laser medium, there is a risk of blindness or burns due to irregular reflection. Further, since radioactivity is generated due to oscillation of the free electron laser or the like, an operator cannot directly adjust the location, and thus the optical axis is adjusted by remote operation of the resonator mirror. Therefore, the resonator mirror is configured to be movable in the directions of three axes that are orthogonal to each other, and can be rotated about two axes that are orthogonal to the optical axis.

【0005】以下、図面を参照して従来のレーザ共振器
の構成を説明する。
The structure of a conventional laser resonator will be described below with reference to the drawings.

【0006】図5は従来のレーザ共振器の概略構成を示
す斜視図、図6は図5の一方の共振器ミラー部分を拡大
して示した斜視図であり、1はレーザ媒質、2はレーザ
媒質1を励起する励起体、4,5はレーザ媒質1から発
する光の光軸1aとミラー光軸とが一致するように対向
して設置された一対の共振器ミラーであり、一方の共振
器ミラー5が光の部分透過構造になっている。
FIG. 5 is a perspective view showing a schematic structure of a conventional laser resonator, and FIG. 6 is an enlarged perspective view showing one resonator mirror portion of FIG. 5, where 1 is a laser medium and 2 is a laser. Exciters that excite the medium 1, and reference numerals 4 and 5 denote a pair of resonator mirrors that are installed to face each other so that the optical axis 1a of the light emitted from the laser medium 1 and the mirror optical axis coincide with each other. The mirror 5 has a partially transmitting structure of light.

【0007】各共振器ミラー4,5は支持枠6,7に支
持され、各支持枠6,7には、支持枠6,7をX,Y,
Zの3軸方向へ移動させる第1駆動体8と第2駆動体9
と第3駆動体10とが設けられ、さらに支持枠6,7の
X,Y,Zの3軸方向への平行移動を案内するための第
1案内体11と第2案内体12と第3案内体13とが設けられ
ている。各駆動体8,9,10は、それぞれ中空筒状体で
あって、ガイドレールからなる各案内体11,12,13を摺
動する移動体14,15,16に固定され、中央孔にガイド軸
17,18,19を移動可能に遊嵌している。さらに、各支持
枠6,7には、光の光軸1aに対して互いに直交する2
軸(X,Z軸)を回転中心にして各共振器ミラー4,5を
回動させる第1回動体23と第2回動体24とが設けられて
いる。
The resonator mirrors 4 and 5 are supported by support frames 6 and 7, and the support frames 6 and 7 are provided with X, Y and
A first drive body 8 and a second drive body 9 that are moved in the three Z directions.
And a third driving body 10, and further includes a first guiding body 11, a second guiding body 12 and a third guiding body 12 for guiding the parallel movement of the support frames 6 and 7 in the X, Y and Z directions. A guide body 13 is provided. Each of the driving bodies 8, 9 and 10 is a hollow cylindrical body and is fixed to a moving body 14, 15 or 16 which slides on each of the guiding bodies 11, 12 and 13 formed of a guide rail, and is guided in the central hole. axis
17, 18, 19 are movably fitted. Further, each of the support frames 6 and 7 has a position 2 which is orthogonal to the optical axis 1a of the light.
A first rotating body 23 and a second rotating body 24 for rotating the resonator mirrors 4 and 5 about the axes (X and Z axes) are provided.

【0008】前記従来のレーザ共振器において、光軸調
整は、調整が必要な方向の各駆動体8,9,10によって
共振器ミラー4,5を平行移動させて位置調整し、さら
に回動体23,24によって角度調整をしている。これらの
調整後に各駆動体8,9,10と回動体23,24をネジ固定
等によって固定して動かないようにする。
In the conventional laser resonator, the optical axes are adjusted by moving the resonator mirrors 4 and 5 in parallel by the respective driving bodies 8, 9 and 10 in the directions in which the adjustment is required, and further rotating the rotating body 23. , 24 adjusts the angle. After these adjustments, the driving bodies 8, 9 and 10 and the rotating bodies 23 and 24 are fixed by screws or the like so as not to move.

【0009】光軸調整して完成したレーザ共振器におい
て、レーザ媒質1を励起体2により励起すると、レーザ
媒質1において発生した光は対向する共振器ミラー4,
5の間を往復して増幅し、部分透過構造である共振器ミ
ラー5側からレーザ光として外部に出る。
In the laser resonator completed by adjusting the optical axis, when the laser medium 1 is excited by the exciter 2, the light generated in the laser medium 1 is opposed to the resonator mirrors 4, 4.
The laser beam is reciprocated between 5 to be amplified, and emitted from the side of the resonator mirror 5 having a partially transmissive structure as laser light to the outside.

【0010】[0010]

【発明が解決しようとする課題】しかしながら、前記従
来のレーザ共振器では、共振器ミラー4,5の鉛直方向
(Z方向)の下方向への移動では共振器ミラー4,5の重
量,案内部分における摩擦力等が鉛直下方向にかかり、
大きな移動力を要する。このため、駆動体10を動作させ
るために大出力が必要となり、それに伴って駆動体10自
体を含む関連部材が大型化し、共振器全体を大型化する
1つの原因となっていた。
However, in the conventional laser resonator described above, the vertical direction of the resonator mirrors 4 and 5 is increased.
In the downward movement (Z direction), the weight of the resonator mirrors 4 and 5 and the frictional force in the guide portion are applied in the vertical downward direction,
Requires a large amount of movement. Therefore, a large output is required to operate the driving body 10, and accordingly, the related members including the driving body 10 are increased in size, which is one of the causes for increasing the size of the entire resonator.

【0011】本発明の目的は、前記問題を解決し、共振
器ミラーを鉛直方向に小さな力で移動できるようにし、
小型化が図れるようにしたレーザ共振器を提供すること
にある。
An object of the present invention is to solve the above problems and to move a resonator mirror in the vertical direction with a small force,
An object is to provide a laser resonator that can be downsized.

【0012】[0012]

【課題を解決するための手段】前記目的を達成するた
め、本発明は、レーザ媒質から発生した光を、一方が部
分透過構造である相対向する一対の共振器ミラー間を複
数回往復させ、増幅した光を発するレーザ共振器におい
て、前記共振器ミラーのそれぞれに、共振器ミラーを互
いに直交する3軸方向に移動させる3つの駆動手段と、
前記直交する3軸方向に平行に設置されて共振器ミラー
の移動案内をする3つの案内手段と、前記光の光軸に対
して互いに直交する2軸を回転中心として共振器ミラー
を回動する2つの回動手段と、前記直交する3軸方向の
うちの鉛直方向において共振器ミラーを上方へ引く力を
発生させる弾性体とを備えたことを特徴とする。
In order to achieve the above-mentioned object, the present invention reciprocates light generated from a laser medium a plurality of times between a pair of opposed cavity mirrors, one of which is a partially transmissive structure, In a laser resonator that emits amplified light, each of the resonator mirrors is provided with three driving means for moving the resonator mirrors in three axial directions orthogonal to each other.
Three guide means installed parallel to the directions of the three orthogonal axes to guide the movement of the resonator mirror, and the resonator mirror are rotated about two axes orthogonal to the optical axis of the light as rotation centers. It is characterized in that it is provided with two rotating means and an elastic body that generates a force to pull the resonator mirror upward in the vertical direction of the three orthogonal axis directions.

【0013】[0013]

【作用】前記構成の本発明に係るレーザ共振器では、共
振器ミラーを鉛直方向に移動させる場合、共振器ミラー
の自重に加えて、移動方向と逆方向に摩擦力が作用し、
特に、共振器ミラーを鉛直上方向に移動させるときに
は、自重と摩擦力とが合算された作用力が加わるが、弾
性体により自重と略同じ力を鉛直上方向に発生させるこ
とによって、摩擦力のみに打ち勝つ力を発生させればよ
くなり、操作が軽く、円滑に行え、駆動手段を動作させ
るために低出力でよくなるため、それに伴って駆動手段
自体を含む関連部材の構成の簡素化,小型化が図れる。
In the laser resonator according to the present invention having the above structure, when the resonator mirror is moved in the vertical direction, in addition to the own weight of the resonator mirror, a frictional force acts in the direction opposite to the moving direction,
In particular, when the resonator mirror is moved vertically upward, an acting force that is the sum of its own weight and frictional force is applied, but only the frictional force is generated by the elastic body generating approximately the same force as its own weight vertically. It is only necessary to generate a force that overcomes the problem, the operation is light, the operation can be performed smoothly, and it is possible to operate the driving means with a low output. Therefore, the structure of the related members including the driving means itself can be simplified and downsized. Can be achieved.

【0014】[0014]

【実施例】以下、本発明の実施例を図面に基づいて説明
する。
Embodiments of the present invention will be described below with reference to the drawings.

【0015】図1は本発明の一実施例の概略構成を示す
斜視図、図2は図1の一方の共振器ミラーを拡大して示
した斜視図であり、図5,図6の従来例にて説明した部
材と対応する部材には同一符号を付して詳しい説明は省
略する。
FIG. 1 is a perspective view showing a schematic structure of an embodiment of the present invention, and FIG. 2 is an enlarged perspective view showing one resonator mirror of FIG. 1 and a conventional example of FIGS. The members corresponding to the members described in 1 are assigned the same reference numerals and detailed description thereof will be omitted.

【0016】本実施例が前記従来例と異なる点は、各共
振器ミラー4,5の各支持枠6,7をZ軸方向へ移動さ
せるための第3駆動体10上方であって、かつ各支持枠
6,7のZ軸方向への平行移動を案内するための第3案
内体13の上部分に、それぞれ定荷重バネ部30を設けた構
成にある。
The present embodiment is different from the conventional example above the third driving body 10 for moving the support frames 6, 7 of the resonator mirrors 4, 5 in the Z-axis direction, and A constant load spring portion 30 is provided on the upper portion of the third guide body 13 for guiding the parallel movement of the support frames 6 and 7 in the Z-axis direction.

【0017】図3は定荷重バネ部部分の概略構成を示す
側面図、図4は定荷重バネ部の要部の斜視図であり、定
荷重バネ部30は、下端31aが前記支持枠6,7に固定さ
れた弾性体としての板バネ31と、板バネ31の上端31bを
巻回固定する支軸32を有し、かつ前記第3案内体13の上
端に固定された保持枠体33とからなり、本実施例では板
バネ31が、共振器ミラー4,5と支持枠6,7とを合算
した重量にほぼ一定荷重の相当する弾性力によって常に
鉛直方向(Z方向)に引き上げるような力を支持枠6,7
に加えている。
FIG. 3 is a side view showing a schematic structure of the constant load spring portion, and FIG. 4 is a perspective view of an essential part of the constant load spring portion. A leaf spring 31 as an elastic body fixed to 7 and a holding frame body 33 having a spindle 32 around which the upper end 31b of the leaf spring 31 is wound and fixed, and fixed to the upper end of the third guide body 13. In this embodiment, the leaf spring 31 always pulls up in the vertical direction (Z direction) by an elastic force corresponding to a total weight of the resonator mirrors 4 and 5 and the support frames 6 and 7 with a substantially constant load. Support frame 6,7
In addition to.

【0018】このため、第3駆動体10は、第3案内体13
にて生じる摩擦力に打ち勝つ力を作用させれば、共振器
ミラー4,5と共に支持枠6,7を鉛直方向に上下動さ
せることができることになる。したがって、第3駆動体
10を動作させるには従来例に比べて低出力でよくなり、
第3駆動体10自体および関連部材が構造的に簡単にで
き、小型のものを使用することが可能になるため、レー
ザ共振器全体としても構成が簡単になり、小型化が可能
になる。
Therefore, the third driving body 10 is provided with the third guiding body 13
By applying a force that overcomes the frictional force generated in 1 above, it is possible to vertically move the support frames 6 and 7 together with the resonator mirrors 4 and 5 in the vertical direction. Therefore, the third driver
Compared with the conventional example, the low output is enough to operate 10,
Since the third driving body 10 itself and related members can be structurally simple and a small size can be used, the structure of the laser resonator as a whole can be simplified and the size can be reduced.

【0019】[0019]

【発明の効果】以上説明したように、本発明は、弾性体
により共振器ミラーの自重と同じ力を鉛直上方向に発生
させることによって、共振器ミラーの鉛直方向の移動時
に、摩擦力のみに打ち勝つ力を発生させればよくなり、
操作が軽く、かつ円滑に行え、低出力にて駆動手段を動
作させることができることから、それに伴って駆動手段
自体および関連部材の構成を簡単かつ小型にでき、共振
器全体としても小型化が図れるレーザ共振器を提供する
ことができる。
As described above, according to the present invention, the elastic body generates the same force as the own weight of the resonator mirror in the vertically upward direction, so that only the frictional force is generated when the resonator mirror moves in the vertical direction. You just need to generate the power to overcome,
Since the operation is light and smooth, and the driving means can be operated at a low output, the structure of the driving means itself and related members can be simplified and downsized accordingly, and the resonator as a whole can be downsized. A laser resonator can be provided.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の概略構成を示す斜視図であ
る。
FIG. 1 is a perspective view showing a schematic configuration of an embodiment of the present invention.

【図2】本発明の一実施例における一方の共振器ミラー
を拡大して示した斜視図である。
FIG. 2 is an enlarged perspective view showing one resonator mirror in one embodiment of the present invention.

【図3】本発明の一実施例における定荷重バネ部部分の
概略構成を示す側面図である。
FIG. 3 is a side view showing a schematic configuration of a constant load spring portion according to an embodiment of the present invention.

【図4】定荷重バネ部の要部の斜視図である。FIG. 4 is a perspective view of a main part of a constant load spring part.

【図5】従来のレーザ共振器の斜視図である。FIG. 5 is a perspective view of a conventional laser resonator.

【図6】図5のレーザ共振器における一方の共振器ミラ
ーを拡大して示した斜視図である。
FIG. 6 is an enlarged perspective view showing one resonator mirror in the laser resonator of FIG.

【符号の説明】[Explanation of symbols]

1…レーザ媒質、 2…励起体、 4,5…共振器ミラ
ー、 6,7…支持枠、8,9,10…駆動体、 11,1
2,13…案内体、 14,15,16…移動体、 17,18,19
…ガイド軸、 23,24…回動体、 30…定荷重バネ部、
31…板バネ、33…保持枠体。
1 ... Laser medium, 2 ... Exciter, 4, 5 ... Resonator mirror, 6, 7 ... Support frame, 8, 9, 10 ... Driving body, 11, 1
2, 13 ... Guiding body, 14, 15, 16 ... Moving body, 17, 18, 19
… Guide shaft, 23, 24… Rotating body, 30… Constant load spring part,
31 ... Leaf spring, 33 ... Holding frame.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 レーザ媒質から発生した光を、一方が部
分透過構造である相対向する一対の共振器ミラー間を複
数回往復させ、増幅した光を発するレーザ共振器におい
て、前記共振器ミラーのそれぞれに、共振器ミラーを互
いに直交する3軸方向に移動させる3つの駆動手段と、
前記直交する3軸方向に平行に設置されて共振器ミラー
の移動案内をする3つの案内手段と、前記光の光軸に対
して互いに直交する2軸を回転中心として共振器ミラー
を回動する2つの回動手段と、前記直交する3軸方向の
うちの鉛直方向において共振器ミラーを上方へ引く力を
発生させる弾性体とを備えたことを特徴とするレーザ共
振器。
1. A laser resonator that emits amplified light by causing light generated from a laser medium to reciprocate between a pair of opposed resonator mirrors, one of which is a partially transmissive structure, to emit amplified light. Three driving means for moving the resonator mirrors in the three axial directions orthogonal to each other, respectively,
Three guide means installed parallel to the directions of the three orthogonal axes to guide the movement of the resonator mirror, and the resonator mirror are rotated about two axes orthogonal to the optical axis of the light as rotation centers. A laser resonator comprising: two rotating means; and an elastic body that generates a force that pulls the resonator mirror upward in the vertical direction of the three orthogonal axis directions.
JP11738295A 1995-05-16 1995-05-16 Laser resonator Pending JPH08316553A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11738295A JPH08316553A (en) 1995-05-16 1995-05-16 Laser resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11738295A JPH08316553A (en) 1995-05-16 1995-05-16 Laser resonator

Publications (1)

Publication Number Publication Date
JPH08316553A true JPH08316553A (en) 1996-11-29

Family

ID=14710273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11738295A Pending JPH08316553A (en) 1995-05-16 1995-05-16 Laser resonator

Country Status (1)

Country Link
JP (1) JPH08316553A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021531662A (en) * 2018-07-23 2021-11-18 ユニバーシティ オブ メリーランド, カレッジ パーク Laser cavity repeat rate adjustment and high bandwidth stabilization

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021531662A (en) * 2018-07-23 2021-11-18 ユニバーシティ オブ メリーランド, カレッジ パーク Laser cavity repeat rate adjustment and high bandwidth stabilization

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