JPH08309684A - Vacuum sucker with exhaust flow adjusting mechanism - Google Patents

Vacuum sucker with exhaust flow adjusting mechanism

Info

Publication number
JPH08309684A
JPH08309684A JP11686095A JP11686095A JPH08309684A JP H08309684 A JPH08309684 A JP H08309684A JP 11686095 A JP11686095 A JP 11686095A JP 11686095 A JP11686095 A JP 11686095A JP H08309684 A JPH08309684 A JP H08309684A
Authority
JP
Japan
Prior art keywords
vacuum
circuit
exhaust flow
switching device
pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11686095A
Other languages
Japanese (ja)
Inventor
Yoji Ise
養治 伊勢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Convum Ltd
Original Assignee
Myotoku Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Myotoku Ltd filed Critical Myotoku Ltd
Priority to JP11686095A priority Critical patent/JPH08309684A/en
Publication of JPH08309684A publication Critical patent/JPH08309684A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To provide a vacuum sucker, which is used in transfer feeding, etc., of a workpiece by a vacuum pad to easily correspond to a vacuum pump, workpiece size, etc., and which can be adjusted so that the vacuum pad can hold its suction force balanced even in simultaneously processing a plurality of the workpieces by a single set of the vacuum pump. CONSTITUTION: A vacuum path and a pressure air path connected to a vacuum pump and a compressor are provided, to supply pressure air by pilot operation with a vacuum flow switching solenoid valve 20, to drive an internally provided piston 7, to perform suction holding a workpiece (b) with a vacuum pad (a) by opening/closing the vacuum path, to supply pressure air to the vacuum pad (a) by operating a vacuum breaking solenoid valve, so as to perform mounting/ demounting the workpiece (b). A vacuum switching device A, made capable of adjusting an exhaust flow by interposing a vacuum exhaust flow adjusting needle 18 externally adjustably in a vacuum circuit 4, is used and to use a compound device by a plurality of the vacuum switching devices A.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、真空回路と空圧回路を
備え、例えば、真空パッドによるワークの真空吸着保持
とその解除操作を繰り返す真空切換装置を用いた真空吸
着装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum suction device provided with a vacuum circuit and a pneumatic circuit, for example, a vacuum switching device which repeats vacuum suction holding of a work by a vacuum pad and its releasing operation.

【0002】[0002]

【従来の技術】例えば、加工機と搬送設備間の所定コー
スをワーク即ち加工部品をロボット等によって自動移送
させる場合、そのワークの保持手段として、ワークを真
空吸着して持ち上げ、また、その真空を破壊してワーク
を脱着させる真空パッド吸着方式が利用されることが多
い。
2. Description of the Related Art For example, when a work, that is, a work part is automatically transferred to a predetermined course between a processing machine and a transfer facility by a robot or the like, the work is held by vacuum suction and lifted. A vacuum pad suction method of breaking and desorbing a work is often used.

【0003】その真空パッド吸着方式は、例えば、真空
切換装置に真空回路と空圧回路を備えてそれぞれに真空
ポンプとコンプレッサを接続し、真空回路を介して、該
真空回路先端に吸着具として備えるゴム製の真空パッド
によりワークを真空吸着させるようにすると共に、前記
空圧回路にパイロット弁を介設してコンプレッサからの
加圧空気により作動するピストン機構により前記真空回
路を開閉できるようにし、且つ、真空回路の遮断時に、
前記空圧回路と並行して設けた空圧回路に介設した真空
破壊弁の作動により加圧空気を供給して真空パッドの真
空雰囲気を破壊してワークを脱着させるようにするもの
である。
In the vacuum pad suction method, for example, a vacuum switching device is provided with a vacuum circuit and a pneumatic circuit, a vacuum pump and a compressor are connected to each, and the vacuum circuit is equipped with a suction tool at the tip of the vacuum circuit. A vacuum pad made of rubber is used to suck the workpiece in a vacuum, and a pilot valve is provided in the pneumatic circuit to open and close the vacuum circuit by a piston mechanism operated by pressurized air from a compressor, and , When the vacuum circuit is cut off,
By operating a vacuum breaking valve provided in an air pressure circuit provided in parallel with the air pressure circuit, pressurized air is supplied to break the vacuum atmosphere of the vacuum pad to detach the work.

【0004】このような真空切換装置は、それぞれ1個
の真空パッドを接続しているので、通常、各1台の真空
ポンプとコンプレッサに複数の真空切換装置を並列的に
接続し真空パッドの同時操作により作業の効率化を図る
ものが多く、また一般に、真空ポンプとしては、その容
量が、経済性や効率性あるいはまたワークの取扱性の点
などから、同時操作する複数の真空パッドの吸着能力に
対して過大にならない程度にバランスするように選択さ
れている。
In such a vacuum switching device, one vacuum pad is connected to each of the vacuum switching devices. Therefore, usually, a plurality of vacuum switching devices are connected in parallel to one vacuum pump and one compressor, and the vacuum pads are simultaneously connected. Many of them aim to improve work efficiency by operation, and generally, as a vacuum pump, its capacity is such that the suction capacity of multiple vacuum pads to be operated at the same time is economical, efficient, and easy to handle. It has been selected to be balanced to the extent that it does not become excessive.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、従来の
真空切換装置においては、真空パッドの吸着力に見合っ
た真空ポンプを選択する必要がある等、比較的少量のワ
ーク処理には利便性に欠ける面があった。また、複数の
真空切換装置を用いて、それぞれの真空パッドによる真
空吸着を行わせる場合、ワークとの接触状況や真空ポン
プとの離間度等による吸着力の弱さからワークと外れる
真空パッドが生じたりすると、その外れた真空パッドか
ら外気が流れ込み、真空回路の真空度の低下を招き、真
空ポンプに過剰な負担をかけるのみならず、他の真空パ
ッドによる吸着作業に支障を来すことがあった。また、
対象ワークを変更する場合あるいは異なるワークを並行
して扱おうとする場合等において各真空パッドの吸着力
の調整が難しいという問題があり、作業の態様に応じて
適当容量の真空ポンプを選定している状況にある。
However, in the conventional vacuum switching device, it is necessary to select a vacuum pump suitable for the suction force of the vacuum pad, which is not convenient for processing a relatively small amount of work. was there. Also, when using a plurality of vacuum switching devices to perform vacuum suction with each vacuum pad, a vacuum pad that separates from the work is generated due to the weak suction force due to the contact condition with the work and the degree of separation from the vacuum pump. If this happens, the outside air will flow from the detached vacuum pad, which will lower the degree of vacuum in the vacuum circuit, not only placing an excessive burden on the vacuum pump, but also interfering with suction work by other vacuum pads. It was Also,
There is a problem that it is difficult to adjust the suction force of each vacuum pad when changing the target work or trying to handle different works in parallel, and a vacuum pump of appropriate capacity is selected according to the mode of work. There is a situation.

【0006】このような問題に鑑み、本発明は、真空ポ
ンプ等吸着具やワーク等処理品の大小等に応じて吸着力
を調整できる真空切換装置が使用でき、また、複数の真
空切換装置を組み合わせて使用する場合において、真空
切換装置によって操作される各吸着具がバランスよくそ
の吸着力を保持できるように調整でき、処理品の変更や
異なる処理品の並行取扱いに対して容易に順応でき、従
って、真空ポンプの大小にも対応しやすい真空吸着装置
の提供を目的とするものである。
In view of such a problem, the present invention can use a vacuum switching device that can adjust the suction force according to the size of a suction tool such as a vacuum pump or a processed product such as a work, and a plurality of vacuum switching devices can be used. When used in combination, each suction tool operated by the vacuum switching device can be adjusted so as to maintain its suction force in a well-balanced manner, and it is easy to adapt to changes in processed products and parallel handling of different processed products. Therefore, it is an object of the present invention to provide a vacuum suction device which can easily accommodate the size of a vacuum pump.

【0007】[0007]

【課題を解決するための手段】以上の目的を達成するた
め、本発明は、排気ポートと吸気ポートを両端に備える
真空回路を設け、該真空回路を開閉するピストン機構を
内設し、真空切換電磁弁を介して前記ピストン機構を操
作する空圧回路を設け、且つ、真空破壊電磁弁を介して
前記空圧回路から前記吸気ポートに近接した真空回路に
加圧空気を供給可能にした真空切換装置であって、前記
真空回路に排気流量を調整する真空排気流量調整機構を
外部調整可能に介設してなる真空切換装置を用いる排気
流量調整機構付き真空吸着装置、また、複数の前記真空
切換装置を並設してマニホールドを取り付けて一体化し
てなる排気流量調整機構付き真空吸着装置を提供するも
のである。
To achieve the above object, the present invention provides a vacuum circuit having an exhaust port and an intake port at both ends, a piston mechanism for opening and closing the vacuum circuit, and a vacuum switching. A vacuum switching system in which a pneumatic circuit for operating the piston mechanism is provided via a solenoid valve, and pressurized air can be supplied from the pneumatic circuit to a vacuum circuit close to the intake port via a vacuum breaking solenoid valve. A vacuum adsorption device with an exhaust flow rate adjusting mechanism, which uses a vacuum switching device in which a vacuum exhaust flow rate adjusting mechanism for adjusting the exhaust flow rate is provided externally in the vacuum circuit, and a plurality of the vacuum switching devices. It is intended to provide a vacuum adsorption device with an exhaust flow rate adjusting mechanism, in which devices are installed in parallel and a manifold is attached to be integrated.

【0008】[0008]

【作用】真空ポンプとコンプレッサを作動させ、真空切
換電磁弁により、コンプレッサからの加圧空気を空圧回
路を経由させてピストン機構に供給することにより、回
路閉鎖状態にあるピストンを駆動させて真空回路を全通
させることができ、真空排気を継続することにより、例
えば、吸気ポートに接続した真空パッド等吸着具により
ワーク等処理品を吸着させることができる。真空切換電
磁弁による空圧回路の切換えにより、ピストンを逆方向
駆動させることにより、真空回路の中間部分を閉鎖し、
吸気ポート側の真空回路を密閉状態とし、所定真空度の
真空雰囲気状態に保持することができる。また、真空破
壊電磁弁により、前記吸気ポート側の真空回路に加圧空
気を供給することにより、前記ピストン機構によって密
閉状態にある真空回路の真空雰囲気を破壊し、例えば、
前記した吸着具により吸着保持されている処理品を脱着
させることができる。その後、真空破壊電磁弁により、
前記の加圧空気の供給を停止すれば、再び、前記の真空
切換電磁弁の切換操作により真空回路の真空排気を行う
ことができる。
[Function] The vacuum pump and the compressor are operated, and the compressed air from the compressor is supplied to the piston mechanism through the pneumatic circuit by the vacuum switching solenoid valve, thereby driving the piston in the circuit closed state to generate the vacuum. By allowing the entire circuit to pass through and continuing vacuum evacuation, for example, a processed product such as a work can be adsorbed by an adsorbing tool such as a vacuum pad connected to the intake port. By switching the pneumatic circuit by the vacuum switching solenoid valve, the piston is driven in the reverse direction, closing the intermediate part of the vacuum circuit,
The vacuum circuit on the intake port side can be kept in a closed state, and can be maintained in a vacuum atmosphere state of a predetermined vacuum degree. Further, by supplying pressurized air to the vacuum circuit on the side of the intake port by the vacuum breaking solenoid valve, the vacuum atmosphere of the vacuum circuit in the sealed state by the piston mechanism is broken, for example,
It is possible to desorb the processed product that is adsorbed and held by the adsorbing tool. Then, by the vacuum breaking solenoid valve,
If the supply of the pressurized air is stopped, the vacuum circuit can be evacuated again by the switching operation of the vacuum switching solenoid valve.

【0009】前記真空排気流量調整機構を操作すること
により、真空回路を狭めて排気流量を少なくし、真空パ
ッド等吸着具の吸着力を抑制することができる。複数の
真空切換装置を一体化してマニホールドを取り付けた複
合真空切換装置は、複数の吸着具の吸着操作を各1台の
真空ポンプとコンプレッサによって行うことができ、各
真空切換装置の真空排気流量調整機構について排気流量
の調整を行うことにより、付設真空ポンプの大小に応じ
られ、且つ、各吸着具の吸着力を均一に且つ必要程度ま
で抑制することができ、例えば、処理品を外した吸着具
があっても該吸着具による外気吸引の影響を最小度に抑
えることができる。
By operating the vacuum exhaust flow rate adjusting mechanism, the vacuum circuit can be narrowed to reduce the exhaust flow rate, and the suction force of the suction tool such as a vacuum pad can be suppressed. A composite vacuum switching device that integrates a plurality of vacuum switching devices and attaches a manifold can perform suction operation of a plurality of suction tools by one vacuum pump and one compressor, and adjust the vacuum exhaust flow rate of each vacuum switching device. By adjusting the exhaust flow rate of the mechanism, it is possible to respond to the size of the attached vacuum pump and evenly suppress the suction force of each suction tool to the required extent. Even if there is, it is possible to minimize the influence of the suction of the outside air by the suction tool.

【0010】[0010]

【実施例】以下、実施例による図面により本発明を説明
する。図1は本発明の真空吸着装置における真空切換装
置の側面断面図、図2は図1の真空切換装置における真
空回路開通時のピストン状態を示す要部拡大側面断面
図、図3は真空回路閉鎖時のピストン状態を示す図2相
当側面断面図、図4は図1の真空切換装置による複合真
空切換装置の平面図、図5は図4の複合真空切換装置の
側面図である。
The present invention will be described below with reference to the drawings according to the embodiments. 1 is a side sectional view of a vacuum switching device in the vacuum suction device of the present invention, FIG. 2 is an enlarged side sectional view of a main part showing a piston state when the vacuum circuit is opened in the vacuum switching device of FIG. 1, and FIG. 2 is a side sectional view corresponding to FIG. 2 showing a piston state at the time, FIG. 4 is a plan view of a compound vacuum switching device by the vacuum switching device of FIG. 1, and FIG. 5 is a side view of the compound vacuum switching device of FIG.

【0011】図1において、装置ボディ1は後部側(図
示左方側)壁面に耐圧ホースを介して図示しない真空ポ
ンプに連結する排気ポート2と、同様に耐圧ホースを介
して図示しないコンプレッサに連結する給気ポート3と
を開口させてあり、排気ポート2は装置ボディ1内の真
空路4を経由して装置ボディ1の中央部に内設したシリ
ンダ室5の側部に連通させてある。シリンダ室5の後部
側にはシリンダ6を固定的に収裝し、シリンダ6内には
ピストン7を摺動自在に収裝してある。ピストン7は前
端部に係合させた戻しバネ8により後方側に付勢され、
ピストン7に取り付けた環状ゴム9により、内部シリン
ダ室5aと前部シリンダ室5b間の連通孔6cを閉鎖で
きるようにしてある。
In FIG. 1, an apparatus body 1 is connected to an exhaust port 2 connected to a vacuum pump (not shown) via a pressure-resistant hose on the rear (left side in the figure) wall, and is similarly connected to a compressor (not shown) via a pressure-resistant hose. The air supply port 3 is opened, and the exhaust port 2 is connected to a side portion of a cylinder chamber 5 provided in the center of the apparatus body 1 via a vacuum passage 4 in the apparatus body 1. A cylinder 6 is fixedly housed on the rear side of the cylinder chamber 5, and a piston 7 is slidably housed in the cylinder 6. The piston 7 is biased rearward by a return spring 8 engaged with the front end,
An annular rubber 9 attached to the piston 7 can close the communication hole 6c between the inner cylinder chamber 5a and the front cylinder chamber 5b.

【0012】即ち、図2と図3に拡大して示すように、
シリンダ6は外周部に環状溝6aを形設して前記真空路
4の端部に接続させると共に環状溝6aの底部に複数の
周壁孔6bを穿設し、この周壁孔6bを介して前記真空
路4とピストン7の前部側(図示右方側)に形設された
内部シリンダ室5aとを連通させるようにしてある。ま
た、ピストン7はそのロッド部7aをシリンダ6の前部
に穿設した連通孔6cを貫通する形にシリンダ室5の前
部シリンダ室5b内に突出させてある。このロッド部7
aは前端部を大径のヘッド部7bに形成し装置ボディ1
との間に係合的に戻しバネ8を介設すると共にヘッド部
7b後部に環状ゴム9を嵌裝してあり、ピストン7が戻
しバネ8の付勢力で後退した時、図3のように、環状ゴ
ム9部分で前記連通孔6cが閉鎖され、内部シリンダ室
5aと前部シリンダ室5b間が遮断されるようにしてあ
る。
That is, as shown enlarged in FIG. 2 and FIG.
The cylinder 6 has an annular groove 6a formed on the outer periphery thereof to be connected to the end of the vacuum passage 4 and a plurality of peripheral wall holes 6b formed at the bottom of the annular groove 6a. The passage 4 and the internal cylinder chamber 5a formed on the front side (right side in the drawing) of the piston 7 are made to communicate with each other. Further, the piston 7 has its rod portion 7a projected into the front cylinder chamber 5b of the cylinder chamber 5 so as to penetrate through a communication hole 6c formed in the front portion of the cylinder 6. This rod part 7
a is a device body 1 in which the front end portion is formed into a large-diameter head portion 7b.
A return spring 8 is engagedly provided between and the annular rubber 9 is fitted to the rear portion of the head portion 7b. When the piston 7 is retracted by the urging force of the return spring 8, as shown in FIG. The communication hole 6c is closed by the annular rubber portion 9 so that the internal cylinder chamber 5a and the front cylinder chamber 5b are shut off from each other.

【0013】前部シリンダ室5bは、さらに真空路10
を経由し、図1に示すように、角状のフィルタ室11に
接続させてある。フィルタ室11は装置ボディ1上に取
り付けられ、上部に蓋体12を有し、内部に交換可能に
フィルターエレメント13を収裝してあり、前部シリン
ダ室5bからの前記真空路10は角筒状フィルタ13a
内に連通し、さらに、そのフィルタを通して、装置ボデ
ィ1の吸気側の真空路14,15を経由して吸気ポート
16に連通するようにしてある。この吸気ポート16に
は、図示しない耐圧ホースを介して吸着具として真空パ
ッドaを接続してある。なお、吸気ポート16の近傍の
真空路15には、この真空路15における真空度を検出
してワーク吸着の有無についての信号を発する真空セン
サ装置17の連通路17aを介在させてある。即ち、こ
の真空センサ装置17は、真空パッドaのワーク吸着に
よって上昇する真空度を検出し、所定の真空度で付設し
た真空スイッチを作動させ、連係的に、次の動作即ち後
記する真空切換電磁弁装置20の作動による真空回路の
遮断が行われるようにしてある。
The front cylinder chamber 5b is further provided with a vacuum passage 10.
As shown in FIG. 1, it is connected to the rectangular filter chamber 11 via the. The filter chamber 11 is mounted on the apparatus body 1, has a lid 12 on the upper part thereof, and has a filter element 13 housed therein in a replaceable manner, and the vacuum passage 10 from the front cylinder chamber 5b is a rectangular tube. Filter 13a
The inside of the apparatus body 1 is further communicated with the intake port 16 via the vacuum passages 14 and 15 on the intake side of the apparatus body 1 through the filter. A vacuum pad a is connected to the intake port 16 as a suction tool via a pressure resistant hose (not shown). A communication passage 17a of a vacuum sensor device 17 that detects the degree of vacuum in the vacuum passage 15 and outputs a signal indicating whether or not a work is adsorbed is provided in the vacuum passage 15 near the intake port 16. That is, the vacuum sensor device 17 detects the degree of vacuum raised by the suction of the work piece on the vacuum pad a and operates the vacuum switch attached at a predetermined degree of vacuum to cooperate with the next operation, that is, the vacuum switching electromagnetic wave described below. The vacuum circuit is cut off by the operation of the valve device 20.

【0014】そして、シリンダ室5に近接して該シリン
ダ室5と真空路4との間に、排気流量調整のための機構
として真空排気流量調整ニードル18を介在させてあ
る。即ち、この真空排気流量調整ニードル18は垂直方
向に装置ボディ1の上面部分にネジ込み式に取り付けて
あり、そのニードル先端部18aが前記真空路4に臨む
ように配置され、ドライバによる頭部のネジ回し操作に
より上下動し、真空路4とシリンダ室5間を全開状態か
ら全閉状態まで開閉できるようにしてある。
A vacuum exhaust flow rate adjusting needle 18 is interposed between the cylinder chamber 5 and the vacuum passage 4 in the vicinity of the cylinder chamber 5 as a mechanism for adjusting the exhaust flow rate. That is, the vacuum evacuation flow rate adjusting needle 18 is vertically mounted on the upper surface portion of the apparatus body 1 in a screwed manner, and the needle tip portion 18a thereof is arranged so as to face the vacuum passage 4, and the head portion of the driver is It can be moved up and down by a screwdriver operation to open and close between the vacuum passage 4 and the cylinder chamber 5 from a fully open state to a fully closed state.

【0015】一方、前記したコンプレッサに接続する給
気ポート3からの空圧路19は装置ボディ1上に取り付
けた真空切換電磁弁装置20を経由して再び装置ボディ
1内の空圧路21に接続され、この空圧回路21は前記
ピストン7の後部側に形設された背部シリンダ室5cに
接続されるようにしてあり、コンプレッサからの加圧空
気を、図2のように、この背部シリンダ室5cに供給す
ることにより、前記ピストン7を戻しバネ8の付勢力に
抗して前進させ、連通孔6cを開放して内部シリンダ室
5aと前部シリンダ室5bとを連通させ、図示矢印のよ
うに、真空排気することができる。真空切換電磁弁装置
20は三方切換弁によるパイロット弁を内装してあり、
空圧路19と空圧路21間、空圧路21と排気路22
間、空圧路19と排気路22間の接続を切換えできるよ
うにしてある。排気路22は大気に連通する排気孔23
に接続されている。
On the other hand, the air pressure passage 19 from the air supply port 3 connected to the above-mentioned compressor is returned to the air pressure passage 21 in the device body 1 via the vacuum switching electromagnetic valve device 20 mounted on the device body 1. This pneumatic circuit 21 is connected to a back cylinder chamber 5c formed on the rear side of the piston 7, and pressurized air from the compressor is connected to the back cylinder chamber 5c as shown in FIG. By supplying to the chamber 5c, the piston 7 is moved forward against the urging force of the return spring 8, the communication hole 6c is opened, and the internal cylinder chamber 5a and the front cylinder chamber 5b are communicated with each other. As such, it can be evacuated. The vacuum switching solenoid valve device 20 is internally equipped with a pilot valve by a three-way switching valve,
Between the pneumatic passage 19 and the pneumatic passage 21, the pneumatic passage 21 and the exhaust passage 22
Meanwhile, the connection between the pneumatic passage 19 and the exhaust passage 22 can be switched. The exhaust passage 22 has an exhaust hole 23 communicating with the atmosphere.
It is connected to the.

【0016】また、この真空切換装置Aには、前記真空
回路の真空を破壊して真空パッドaが保持するワークb
を脱着するための空圧回路を設けてある。即ち、直動切
換式式の真空破壊電磁弁装置27を前記真空切換電磁弁
装置20と並置状態に装置ボディ1上に取り付け(図
4)、空圧路19から分岐する図示しない分岐空圧路を
設けて真空破壊電磁弁装置27を経由し、装置ボディ1
内の空圧路24,25を経由してフィルタ室11に連通
できるようにしてあり、真空破壊電磁弁装置27の弁操
作により、真空路14のフィルタ室11入口直前部分に
加圧空気を供給して真空回路の真空雰囲気を破壊即ち解
除できるようにしてある。また、この空圧路24と空圧
路25間には、前記真空排気流量調整ニードル18に並
設する形に垂直方向の真空破壊流量調整ニードル26を
取り付けてあり、真空破壊による真空パッドからのワー
クの離脱がソフトに行われるように、供給加圧空気の供
給量を調整できるようにしてある。
Further, in the vacuum switching device A, the work b held by the vacuum pad a by breaking the vacuum of the vacuum circuit.
An air pressure circuit is provided to remove and attach the. That is, a direct-action switching type vacuum breaking electromagnetic valve device 27 is mounted on the device body 1 in parallel with the vacuum switching electromagnetic valve device 20 (FIG. 4), and a branch pneumatic passage (not shown) branched from the pneumatic passage 19 is provided. Through the vacuum breaking solenoid valve device 27, and the device body 1
The compressed air is supplied to the portion immediately before the inlet of the filter chamber 11 of the vacuum passage 14 by the valve operation of the vacuum breaking electromagnetic valve device 27 so as to be able to communicate with the filter chamber 11 via the pneumatic passages 24 and 25 inside. The vacuum atmosphere of the vacuum circuit can be destroyed or released. Further, between the air pressure passage 24 and the air pressure passage 25, a vertical vacuum breaking flow rate adjusting needle 26 is attached in parallel with the vacuum evacuation flow rate adjusting needle 18, and the vacuum breaking flow rate adjusting needle 26 from the vacuum pad by vacuum breaking is attached. The supply amount of the supply pressurized air can be adjusted so that the work can be detached softly.

【0017】この真空切換装置Aにおいては、以上のよ
うに構成され、先ず、真空排気流量調整ニードル18の
ネジ込み位置を調整して真空路4とシリンダ室5を真空
排気のための適当な連通状態としておき、真空ポンプと
コンプレッサとを作動させる。真空切換電磁弁装置20
の電磁弁操作により空圧路19と空圧路21を連通させ
ると、コンプレッサからの加圧空気は空圧路21から背
部シリンダ室5cに入り、戻しバネ8の付勢力に抗して
ピストン7を前進させるので、連通孔6cが開いて内部
シリンダ室5aと前部シリンダ室5bとを連通させる。
これにより、排気ポート2から吸気ポート16までの真
空回路を連通でき、吸気ポート16に耐圧ホースを介し
て接続した真空パッドaにおけるワークbの吸着が行わ
れる。
The vacuum switching device A is constructed as described above. First, the screwing position of the vacuum exhaust flow rate adjusting needle 18 is adjusted so that the vacuum passage 4 and the cylinder chamber 5 are properly communicated for vacuum exhaust. Then, the vacuum pump and the compressor are operated. Vacuum switching solenoid valve device 20
When the pneumatic passage 19 and the pneumatic passage 21 are communicated with each other by operating the solenoid valve, the compressed air from the compressor enters the back cylinder chamber 5c from the pneumatic passage 21 and resists the urging force of the return spring 8 to cause the piston 7 to move. Is moved forward, the communication hole 6c is opened to connect the internal cylinder chamber 5a and the front cylinder chamber 5b.
As a result, the vacuum circuit from the exhaust port 2 to the intake port 16 can be communicated, and the work b is adsorbed on the vacuum pad a connected to the intake port 16 via the pressure resistant hose.

【0018】この吸着により所定の真空度に達したこと
を検知した真空センサ装置からの検知信号に基づく真空
スイッチの作動に連係して、真空切換電磁弁装置20の
電磁弁操作で真空路21を排気路22側に接続を切り換
えると、排気孔23からの排気により空圧路21内は大
気圧になり、戻しバネ8の付勢力によりピストン7が後
退し、ヘッド部7bの環状ゴム9が連通孔6cを閉鎖す
る。前部シリンダ室5bから吸気ポート16側の真空回
路は所定の真空度を保持しており、また、この間におい
てワークbを真空パッドaに吸着保持させた状態で所定
コースを移動させることができる。
The vacuum passage 21 is operated by operating the solenoid valve of the vacuum switching solenoid valve device 20 in association with the operation of the vacuum switch based on the detection signal from the vacuum sensor device that has detected that a predetermined vacuum degree has been reached by this adsorption. When the connection is switched to the exhaust passage 22 side, the air inside the pneumatic passage 21 becomes atmospheric pressure due to the exhaust from the exhaust hole 23, the piston 7 retracts due to the urging force of the return spring 8, and the annular rubber 9 of the head portion 7b communicates. The hole 6c is closed. The vacuum circuit from the front cylinder chamber 5b to the intake port 16 side maintains a predetermined degree of vacuum, and during this period, the work b can be moved along a predetermined course while being suction-held on the vacuum pad a.

【0019】次に、真空破壊電磁弁装置27の電磁弁操
作をすることにより、空圧路19からの加圧空気が空圧
路24,25に流れ、真空路14に供給されて真空雰囲
気を破壊するので、ワークbは真空パッドaから解放さ
れることになる。この解放直後、電磁真空破壊弁装置2
7の復帰作動により真空路14への加圧空気の供給が停
止され、真空パッドaを次のワーク吸着体勢に戻すと共
に、真空切換電磁弁装置20の電磁弁操作により、空圧
路19を空圧路21側に接続を切り換え、真空回路を連
通状態とする。
Next, by operating the solenoid valve of the vacuum breaking solenoid valve device 27, the pressurized air from the pneumatic passage 19 flows to the pneumatic passages 24 and 25 and is supplied to the vacuum passage 14 to create a vacuum atmosphere. Since it is destroyed, the work b is released from the vacuum pad a. Immediately after this release, the electromagnetic vacuum break valve device 2
The supply of the pressurized air to the vacuum passage 14 is stopped by the return operation of 7, and the vacuum pad a is returned to the next workpiece suction body, and the pneumatic valve 19 is emptied by operating the solenoid valve of the vacuum switching solenoid valve device 20. The connection is switched to the pressure path 21 side to bring the vacuum circuit into a communication state.

【0020】このように、この真空切換装置Aは、真空
切換電磁弁装置20と真空破壊電磁弁装置27と真空パ
ッドa等外部メカニズムの操作を真空センサ装置17の
信号を介してシーケンス操作させることができる。
As described above, the vacuum switching device A operates the vacuum switching electromagnetic valve device 20, the vacuum breaking electromagnetic valve device 27, the vacuum pad a, and other external mechanisms in sequence through the signals of the vacuum sensor device 17. You can

【0021】このような真空切換装置Aは、作業性の点
から、好ましくは、複数個を並列的にまとめてマルチ方
式の複合真空切換装置として使用される。図4はこの例
を示すもので、この複合真空切換装置Bは真空切換装置
1 ,A 2 ,A3 ,A4 を並置し、その後部に4連のマ
ニホールド29を取り付け一体に接続してある。各真空
切換装置A1 ,A2 ,A3 ,A4 は、それぞれ、上部に
真空切換用電磁弁20と真空破壊用電磁弁27を備え、
真空排気流量調整ニードル18と真空破壊流量調整ニー
ドル26の頭部を外部に臨ませてドライバによる流量調
整ができるようにし、また、フィルタ室の蓋体12を露
呈し適宜フィルターエレメントの交換を可能としてあ
る。なお、図示の28は真空スイッチ表示部で、真空セ
ンサ装置17による検出真空度を表示し、所定真空度で
真空スイッチを作動させるようにしてある。
Such a vacuum switching device A has a workability point.
Therefore, it is preferable that a plurality of parallel
Used as a compound vacuum switching device. Figure 4 shows this example
This composite vacuum switching device B is a vacuum switching device.
A1, A 2, A3, AFourSide-by-side and place four
Nihold 29 is attached and connected integrally. Each vacuum
Switching device A1, A2, A3, AFourRespectively at the top
A vacuum switching solenoid valve 20 and a vacuum breaking solenoid valve 27 are provided.
Vacuum exhaust flow rate adjusting needle 18 and vacuum breaking flow rate adjusting knee
Adjust the flow rate by the driver with the head of the dollar 26 exposed to the outside.
And the lid 12 of the filter chamber is exposed.
The filter element can be replaced as needed.
It Reference numeral 28 in the figure denotes a vacuum switch display portion, which is a vacuum switch.
The detected vacuum degree by the sensor device 17 is displayed, and the predetermined vacuum degree is displayed.
The vacuum switch is activated.

【0022】そして、前記マニホールド29は、図5に
示したように、側面の上下にコンプレッサに接続する正
圧供給口30と真空ポンプに接続する負圧供給口31を
備えており、内設した空圧路32と真空路33はそれぞ
れ各真空切換装置A1 ,A2,A3 ,A4 の吸気ポート
と排気ポートに接続してある。
As shown in FIG. 5, the manifold 29 is provided internally with a positive pressure supply port 30 connected to the compressor and a negative pressure supply port 31 connected to the vacuum pump on the upper and lower sides. The air pressure passage 32 and the vacuum passage 33 are connected to the intake port and the exhaust port of each vacuum switching device A 1 , A 2 , A 3 , A 4 .

【0023】従って、この複合真空切換装置Bは各1台
の真空ポンプとコンプレッサとで4個の真空パッドの吸
着操作を行わせることができる。この場合、真空ポンプ
に接続する負圧供給口31に近接した真空切換装置A1
においては吸着力が比較的高く、離れるに従って吸着力
は順次低下する傾向にあり、真空ポンプの容量が比較的
小さい場合や真空切換装置の数が多くなった場合等にお
いて、吸着性の問題を生じることになる。
Therefore, the composite vacuum switching device B can perform suction operation of four vacuum pads by one vacuum pump and one compressor. In this case, the vacuum switching device A 1 close to the negative pressure supply port 31 connected to the vacuum pump
In this case, the suction force is relatively high, and the suction force tends to gradually decrease as the distance increases, causing a problem of suction ability when the capacity of the vacuum pump is relatively small or the number of vacuum switching devices increases. It will be.

【0024】所定の能力の真空ポンプの場合、各真空切
換装置A1 ,A2 ,A3 ,A4 の真空排気流量調整ニー
ドル18のネジ込み度を変えることにより容易にその真
空パッドaにおける吸着力を均一になるように調整する
ことができ、また、この真空排気流量調整ニードル18
を必要最小限度まで絞り込むことにより、いずれかの真
空パッドに吸着もれがあっても、その真空パッド部から
の外気の吸入量が少なく、他の真空パッドの吸着性に及
ぼす影響を抑えることができる。また、取扱うワークの
種類が変わった場合、あるいは、種類の異なるワークを
同時に取扱う場合においても、個々のワーク毎に対応真
空切換装置の真空排気流量調整ニードル18を調整する
ことによりワークに応じた吸着力に調整することがで
き、従ってまた、容量が異なる真空ポンプを使用する場
合においても、ワークに応じた吸着力調整により容易に
対応可能となるものである。
In the case of a vacuum pump having a predetermined capacity, the suction on the vacuum pad a can be easily performed by changing the screwing degree of the vacuum exhaust flow rate adjusting needle 18 of each vacuum switching device A 1 , A 2 , A 3 , A 4. The force can be adjusted to be uniform, and the vacuum exhaust flow rate adjusting needle 18
Even if there is suction leakage in any of the vacuum pads, the amount of outside air sucked from that vacuum pad is small and the influence on the suction of other vacuum pads can be suppressed it can. Further, even when the type of work to be handled changes, or when different types of work are handled at the same time, the vacuum exhaust flow rate adjusting needle 18 of the corresponding vacuum switching device is adjusted for each work to attract the suction according to the work. The force can be adjusted. Therefore, even when vacuum pumps having different capacities are used, the suction force can be easily adjusted according to the work.

【0025】[0025]

【発明の効果】以上の説明から明らかなように、本発明
によれば、次の効果を奏する。 (1) 真空ポンプ容量の大小またはワーク等処理品の大小
や形状に応じて真空排気流量を調整することにより、真
空パッド等吸着具が適切な吸着力を保持できるようにす
ることができ、従ってまた、処理品が比較的少量の場合
にも対応できる。 (2) 複合真空切換装置において、大小や形状の異なる処
理品を同時に取り扱うことができる。 (3) 複合真空切換装置において、選択的に不必要な吸着
具の作動を停止できる。 (4) 複合真空切換装置において、いずれかの吸着具がワ
ーク等処理品を吸着しない場合があっても、他の吸着具
の吸着力が保てるように各真空切換装置の排気流量を必
要最小限まで絞ることができる。 (5) 複合真空切換装置において、複数の吸着具に均一な
吸着力をもたせることができる。
As is apparent from the above description, the present invention has the following effects. (1) By adjusting the vacuum exhaust flow rate according to the size of the vacuum pump or the size and shape of the processed product such as workpiece, it is possible to make the suction tool such as a vacuum pad hold an appropriate suction force. In addition, it is possible to deal with the case where the amount of processed products is relatively small. (2) In the combined vacuum switching device, it is possible to handle simultaneously processed products of different sizes and shapes. (3) In the combined vacuum switching device, the unnecessary operation of the suction tool can be selectively stopped. (4) In the combined vacuum switching device, the exhaust flow rate of each vacuum switching device must be set to the minimum required so that the suction force of the other suction device can be maintained even if one of the suction devices does not adsorb processed products such as workpieces. You can narrow down to. (5) In the combined vacuum switching device, it is possible to impart a uniform suction force to a plurality of suction tools.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の真空吸着装置における真空切換装置の
側面断面図である。
FIG. 1 is a side sectional view of a vacuum switching device in a vacuum suction device of the present invention.

【図2】図1の真空切換装置における真空回路開通時の
ピストン状態を示す要部拡大側面断面図である。
FIG. 2 is an enlarged side cross-sectional view of a main part showing a piston state when the vacuum circuit is opened in the vacuum switching device of FIG.

【図3】真空回路閉鎖時のピストン状態を示す図2相当
側面断面図である。
FIG. 3 is a side cross-sectional view corresponding to FIG. 2 showing a piston state when the vacuum circuit is closed.

【図4】図1の真空切換装置による複合真空切換装置の
平面図である。
4 is a plan view of a composite vacuum switching device including the vacuum switching device of FIG. 1. FIG.

【図5】図4の複合真空切換装置の側面図である。5 is a side view of the composite vacuum switching device of FIG.

【符号の説明】[Explanation of symbols]

A 真空切換装置 B 複合真空切換装置 a 真空パッド b ワーク 1 装置ボディ 2 排気ポート 3 給気ポート 4 真空路 5 シリンダ室 5a 内部シリンダ室 5b 前部シリンダ室 5c 背部シリンダ室 6 シリンダ 6a 環状溝 6b 周壁孔 6c 連通孔 7 ピストン 7a ロッド部 7b ヘッド部 8 戻しバネ 9 環状ゴム 10 真空路 11 フィルタ室 12 蓋体 13 フィルターエレメント 14 真空路 15 真空路 16 吸気ポート 17 真空センサ装置 17a 連通路 18 真空排気流量調整ニードル 18a ニードル先端部 19 空圧路 20 真空切換電磁弁装置 21 空圧路 22 排気路 23 排気孔 24 空圧路 25 空圧路 26 真空破壊流量調整ニードル 27 真空破壊電磁弁装置 28 真空スイッチ表示部 29 マニホールド 30 正圧供給口 31 負圧供給口 32 空圧路 33 真空路 A vacuum switching device B composite vacuum switching device a vacuum pad b work 1 device body 2 exhaust port 3 air supply port 4 vacuum passage 5 cylinder chamber 5a internal cylinder chamber 5b front cylinder chamber 5c back cylinder chamber 6 cylinder 6a annular groove 6b peripheral wall Hole 6c Communication hole 7 Piston 7a Rod part 7b Head part 8 Return spring 9 Annular rubber 10 Vacuum path 11 Filter chamber 12 Lid 13 Filter element 14 Vacuum path 15 Vacuum path 16 Intake port 17 Vacuum sensor device 17a Communication path 18 Vacuum exhaust flow rate Adjustment needle 18a Needle tip portion 19 Air pressure passage 20 Vacuum switching solenoid valve device 21 Air pressure passage 22 Exhaust passage 23 Exhaust hole 24 Air pressure passage 25 Air pressure passage 26 Vacuum breaking flow rate adjusting needle 27 Vacuum breaking solenoid valve device 28 Vacuum switch display Part 29 manifold 30 positive pressure supply port 31 Negative pressure supply port 32 Air pressure path 33 Vacuum path

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 排気ポートと吸気ポートを両端に備える
真空回路を設け、該真空回路を開閉するピストン機構を
内設し、真空切換電磁弁を介して前記ピストン機構を操
作する空圧回路を設け、且つ、真空破壊電磁弁を介して
前記空圧回路から前記吸気ポートに近接した前記真空回
路に加圧空気を供給可能にした真空切換装置であって、
前記真空回路に排気流量を調整する真空排気流量調整機
構を外部調整可能に介設してなる真空切換装置を用いる
ことを特徴とする排気流量調整機構付き真空吸着装置。
1. A vacuum circuit provided with an exhaust port and an intake port at both ends, a piston mechanism for opening and closing the vacuum circuit is internally provided, and a pneumatic circuit for operating the piston mechanism via a vacuum switching solenoid valve is provided. A vacuum switching device capable of supplying pressurized air from the pneumatic circuit to the vacuum circuit near the intake port via a vacuum breaking electromagnetic valve,
A vacuum adsorption device with an exhaust flow rate adjusting mechanism, characterized in that a vacuum switching device is used, in which a vacuum exhaust flow rate adjusting mechanism for adjusting the exhaust flow rate is provided in the vacuum circuit so as to be adjustable externally.
【請求項2】 複数の前記真空切換装置を並設してマニ
ホールドを取り付けて一体化した複合真空切換装置を用
いることを特徴とする請求項1記載の排気流量調整機構
付き真空吸着装置。
2. A vacuum adsorption device with an exhaust flow rate adjusting mechanism according to claim 1, wherein a composite vacuum switching device in which a plurality of the vacuum switching devices are arranged in parallel and a manifold is attached is used.
JP11686095A 1995-05-16 1995-05-16 Vacuum sucker with exhaust flow adjusting mechanism Pending JPH08309684A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11686095A JPH08309684A (en) 1995-05-16 1995-05-16 Vacuum sucker with exhaust flow adjusting mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11686095A JPH08309684A (en) 1995-05-16 1995-05-16 Vacuum sucker with exhaust flow adjusting mechanism

Publications (1)

Publication Number Publication Date
JPH08309684A true JPH08309684A (en) 1996-11-26

Family

ID=14697426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11686095A Pending JPH08309684A (en) 1995-05-16 1995-05-16 Vacuum sucker with exhaust flow adjusting mechanism

Country Status (1)

Country Link
JP (1) JPH08309684A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002079483A (en) 2000-09-06 2002-03-19 Koganei Corp Suction conveyance device
JP2004324500A (en) * 2003-04-24 2004-11-18 Myotoku Ltd Vacuum generating mechanism device
US7607454B2 (en) 2005-04-26 2009-10-27 Smc Corporation Vacuum and vacuum-breaking composite valve
KR200460938Y1 (en) * 2010-08-20 2012-06-15 신영제어기 주식회사 vacuum generating device.
CN102556108A (en) * 2012-01-20 2012-07-11 北京世纪东方国铁科技股份有限公司 Electromagnetic valve for train tail device
ITMO20110237A1 (en) * 2011-09-19 2013-03-20 Enzo Landi ECONOMIZER DEVICE FOR LINEAR PNEUMATIC ACTUATOR AND METHOD TO CONTROL THE LINEAR PNEUMATIC ACTUATOR
CN103231164A (en) * 2013-04-27 2013-08-07 浙江金鹰食品机械有限公司 Vacuum switch used for resistance welding machine

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002079483A (en) 2000-09-06 2002-03-19 Koganei Corp Suction conveyance device
JP2004324500A (en) * 2003-04-24 2004-11-18 Myotoku Ltd Vacuum generating mechanism device
US7607454B2 (en) 2005-04-26 2009-10-27 Smc Corporation Vacuum and vacuum-breaking composite valve
DE102006019997B4 (en) * 2005-04-26 2016-01-14 Smc Corp. Suction and suction shut-off valve
KR200460938Y1 (en) * 2010-08-20 2012-06-15 신영제어기 주식회사 vacuum generating device.
ITMO20110237A1 (en) * 2011-09-19 2013-03-20 Enzo Landi ECONOMIZER DEVICE FOR LINEAR PNEUMATIC ACTUATOR AND METHOD TO CONTROL THE LINEAR PNEUMATIC ACTUATOR
WO2013042044A2 (en) * 2011-09-19 2013-03-28 Enzo Landi Economizer device for linear pneumatic actuator
WO2013042044A3 (en) * 2011-09-19 2014-01-16 Enzo Landi Economizer device for linear pneumatic actuator
CN102556108A (en) * 2012-01-20 2012-07-11 北京世纪东方国铁科技股份有限公司 Electromagnetic valve for train tail device
CN103231164A (en) * 2013-04-27 2013-08-07 浙江金鹰食品机械有限公司 Vacuum switch used for resistance welding machine
CN103231164B (en) * 2013-04-27 2015-06-10 浙江金鹰食品机械有限公司 Vacuum switch used for resistance welding machine

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