JPH08304044A - Image-pickup-region positioning and image-picking-up apparatus, inspection device, shape measuring device and manufacture of product - Google Patents

Abstract

PURPOSE: To provide an image-pickup-region positioning and image-picking-up apparatus by which an image-pickup region is positioned without moving an object and an image pickup device and at high speed. CONSTITUTION: The image-pickup-region positioning and image-picking-up apparatus is provided with a plane mirror Mϕwhich receives a luminous flux coming from an object P and deflects it, a plane mirror Mθ whose axis of rotation is perpendicular, in terms of projection, to that of the plane mirror Mϕ and which deflects a luminous flux from the plane mirror Mϕ , and an optical-system lens L which receives a luminous flux from the plane mirror Mθ , which decides an imaging magnification and by which the image P' of the object is formed on an image pickup element I. The plane mirrors Mϕ , Mθ are moved independently of each other in mechanism around their axis of rotation by means of a stepping motor, the luminous fluxes are deflected, and the object P in a selected object region and positioned is image-picked up by the image-picking up element I.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an image pickup device for monitoring security and the like, an image pickup target region positioning image pickup device such as a moving body tracking image pickup device, or a positioning image pickup technique in a shape measuring device or an inspection device at a manufacturing site. . First, in the case of an image pickup device for monitoring security, etc., it is a technology that provides a convenient image pickup device for installation in an environment where it is not desirable to move or rotate the image pickup device, and it also positions the image pickup target area at high speed. It is related to the technology.
On the other hand, the moving body tracking image pickup device relates to the realization of a technique for tracking an object whose distance and direction change at high speed by the positioning technique according to the present invention. Furthermore, in the measurement process and inspection process at the manufacturing site, considering safety,
The present invention relates to a technique for positioning and imaging an arbitrary observation target region at high speed at an arbitrary magnification without moving the target or the imaging device, and performing measurement or inspection.

[0002]

2. Description of the Related Art Conventionally, there are roughly two types of methods for positioning and imaging an area to be imaged. The first is
This is a method of mechanically moving and positioning a target object by a mechanical positioning device, and the second is a method of mechanically moving and positioning an imaging device by the same mechanical positioning device.

For example, in the case of a security surveillance camera, it becomes an active camera by mounting it on an electric swivel, which is a kind of robot having a rotation (pan) and tilt (tilt) function. I was satisfied. Further, for example, in the case of inspecting a printed wiring board, the camera itself, which is an imaging device, is positioned by the XY stage, or the printed wiring board, which is the target object, is chucked and moved to the XY stage. By doing so, it was positioned.

[0004]

However, such a conventional technique has the following disadvantages. That is, a) large kinetic energy is required for positioning using a TV camera having a relatively large mass,
Further, in order to position an object having a relatively small mass as quickly as possible, it is necessary to increase the kinetic energy of the carrier, and the required driving energy (electric power etc.) is also large.

(B) Since the mechanical positioning system has a low limit speed, it is not suitable for the purpose of high-speed image capturing and high-speed automatic tracking. C) Movable objects with a large mass are dangerous, and it is often necessary to take measures in consideration of safety such as isolation or shielding from the human body. D) Since the volume is not small and it is a moving body, its appearance is conspicuous, and it is often unsuitable depending on the usage environment.

The present invention has an object to solve the following technical problems in view of the disadvantages of the prior art in the above-mentioned imaging target area positioning technology. 1) The solution of the positioning imaging technology problem, in which it is not necessary to move the TV camera having a large mass and the object is positioned without moving. 2) Solution of positioning imaging technology problems for high-speed positioning.

3) A solution to the problem of positioning and imaging technology that is sufficiently safe for the human body. 4) The solution of the positioning imaging technology problem that has a small volume and can have an inconspicuous appearance.

[0008]

Means and Actions for Solving the Problems In order to solve the above-mentioned problems related to the imaging target area positioning imaging technique,
The present invention forms an optical path system on the optical axis between an object and an image pickup device by interposing a means for determining an image pickup viewing angle and an image forming means, and optically selects an image pickup target area to form an image thereof. By providing a technique in which the image capturing unit captures the formed target area image, the above technical problems 1) to 4) are solved. Here, the imaging viewing angle determining means is an optical device having a light deflecting / reflecting function, and includes an optical deflecting mirror device for receiving a light beam incident from an object and selecting a light receiving angle, and the image forming means is It is an imaging optical system for forming an object image selected by the deflection of the mirror on the light receiving surface of the image pickup means, and the image pickup means has an overall structure for picking up the formed object image. It is a means to solve the problem. In particular, the light deflection mirror device of the imaging viewing angle determining means determines the imaging viewing angle by two-dimensionally selecting the incident light beam reception angle from the target by the deflection of the mirror.
The imaging optical means is a variable magnification optical system capable of receiving a magnification designating signal or magnification designating data or changing the imaging magnification by command input. In order to solve the above-mentioned problems, the imaging target area is positioned by operating in a coordinated manner.

When an image is picked up by an image pickup device, since there are a plurality of image pickup targets, the images are divided into several image pickup target regions, or the image pickup target covers a wide range (large). In the case where the image is divided into several image-capturing target regions and imaged, it is necessary to position and image each image-capturing target region. In order to position and image the imaging target area, the present invention
It proposes a new technique of capturing an image of an object by optically locating an area to be imaged, rather than positioning by moving a mechanical position as in the conventional technology. Hereinafter, means and actions for solving the problems of the present invention will be described according to the claims.

According to a first aspect of the present invention, there is provided an image pickup target area positioning image pickup device, and an image pickup view angle determining means for selecting a light receiving angle to an angle at which a light flux arriving from the target is received, and a target image. An image pickup means for picking up the image, and an image pickup means for forming a target image on the image pickup means and for determining an image pickup magnification, and optically positioning the image pickup target area to pick up the target image, The imaging viewing angle determining means,
An optical device including a mirror device that deflects and reflects a light beam, and a mirror deflection angle determination that determines a mirror deflection angle to an angle at which the light beam from the imaging region is reflected toward the image forming device according to a viewing angle designation signal from the viewing angle control device. The image forming means is a lens optical device having a function of determining an image pickup magnification according to a magnification specifying signal from the image forming control means.

The imaging target area positioning imaging device optically positions the imaging target area when the imaging target area is positioned and imaged. Here, the optical positioning means that the imaging viewing angle determining means directs the imaging viewing angle in the direction of the imaging target area, and the imaging means determines the imaging magnification of the image of the target area captured in the viewing angle direction. It means the action that is established from both actions of forming an image in the image pickup means. The target image optically positioned in this way is formed on the image pickup surface of the image pickup unit, so that the image pickup unit picks up the image. Then, the imaging viewing angle determining means is
It is an optical device including a light deflection reflection mirror device, and deflects a mirror to an angle at which a light flux coming from an image pickup target area is reflected toward an image forming means by a viewing angle designation signal. Further, the image forming means is a lens optical device, and determines an image pickup magnification by a magnification designation signal.

According to a second aspect of the present invention, there is provided an image pickup object region positioning image pickup device according to the first aspect, wherein the image pickup viewing angle determining means is an optical device including one optical deflection mirror device. Is an omnidirectional light receiving type deflection mirror device. Since it is an omnidirectional light receiving type deflection mirror device, the viewing angle of the target scene is two-dimensionally determined. The image pickup target area positioning image pickup device according to claim 3 is the image pickup device according to claim 1, wherein the image pickup viewing angle determining means is an optical device including two light deflection mirror devices. The device is arranged such that the mirror rotation axes are orthogonal to each other in a projection manner, and the two optical deflection mirror devices are driven in cooperation with each other by a viewing angle designating signal to deflect the light receiving angle to a designated viewing angle. Since the optical device including the two light deflection mirror devices is used, the mirror rotation axes are mounted orthogonally to each other and are driven in association with each other by the viewing angle designating signal, so that the light receiving angle is selected to the designated viewing angle. Therefore, the view angle of the object is two-dimensionally determined.

According to a fourth aspect of the present invention, there is provided an image pickup object region positioning image pickup device, wherein in order to determine a view angle for picking up an image of an object, an image pickup viewing angle determining means for selecting a light receiving angle to an angle for receiving a light flux arriving from the object, and an image pickup means. An image forming means for forming an image of an object on the object and determining an imaging magnification, and an illuminating means capable of changing an illumination angle by illuminating the object and deflecting a light beam from a light source at a fixed position. Illuminating means that can change the illumination angle by moving the position, and illuminates the object at an angle corresponding to the imaging viewing angle according to the input value that is input accompanying the position data of the imaging target area or the value calculated by the computing means. The lighting control means for controlling the lighting means so as to do so, and the imaging means for imaging the positioned object.

This image pickup object region positioning image pickup device illuminates and picks up an image of an object at an illumination angle corresponding to the image pickup viewing angle, so that the image pickup device is controlled to always illuminate at the same illumination angle even if the viewing angle changes. To do. An inspection apparatus according to claim 5, wherein in order to determine a viewing angle for imaging an object, an imaging viewing angle determining unit that selects a light-receiving angle to an angle at which a light flux arriving from the object is received, and an inspection object image is reduced and image-formed. 1 optical system,
An image forming means including a second optical system for changing the magnification of the inspection object image and a viewing angle designating signal are used to control the selection of the light receiving angle of the imaging viewing angle determining means, and the image is picked up according to the rectangular grid of the inspection object plane orthogonal coordinates. A visual angle control means for selecting a visual angle and a focal length adjustment signal move the image forming means along the optical axis to eliminate the deviation of the focal length which occurs according to the light receiving angle of the visual angle determining means, and also the magnification. Positioning control means for adjusting the second optical system in response to a designation signal to eliminate a magnification error generated according to the light receiving angle of the imaging viewing angle determining means, and forming a target image at a predetermined magnification, and positioning. The imaging device includes an image capturing unit that captures the captured inspection target and a display unit that displays the captured inspection target image.

The inspection device displays an image of an imaged inspection object and enables visual inspection of a printed wiring board or the like by the image. Therefore, the image forming means is composed of the first optical system and the second optical system, and the first optical system reduces and forms the inspection target image, so that the target image at a long distance of several tens of centimeters is enlarged and captured. The second optical system has a variable power effect that changes the magnification of the image to be inspected. On the other hand, in the technique according to the present invention, if a planar object is imaged as it is and an image is displayed, three types of distortion errors occur. These are the region division distortion on the target plane, the deviation of the focal length from the target according to the size of the viewing angle, and the target image size variation according to the size of the viewing angle. Therefore, this inspection device eliminates each of the distortions and displays an image in accordance with the actual size value of the target plane.

According to a sixth aspect of the present invention, there is provided an inspection device for illuminating an inspection object, which comprises an image pickup viewing angle determining means for selecting a light receiving angle to an angle at which a light flux arriving from the object is received in order to determine a viewing angle for imaging the object. Illuminating means capable of changing the illumination angle by deflecting the light flux from the light source at a fixed position, or illuminating means capable of changing the illumination angle by moving the position of the light source, and position data of the imaging target area. Illumination control means for controlling the illumination means so as to illuminate the object at an angle corresponding to the imaging viewing angle according to an input value incidentally input or a value calculated by the computing means, and a reduction image forming an inspection object image. By an image forming unit including one optical system and a second optical system that magnifies the image to be inspected, and a viewing angle designating signal,
A visual angle control means for controlling the light receiving angle selection of the imaging visual angle determining means so as to select the imaging visual angle so as to conform to the rectangular grid of the plane coordinate to be inspected, and the focal length adjusting signal to move the imaging means along the optical axis. To eliminate the deviation of the focal length that occurs according to the light receiving angle of the viewing angle determining means,
And the second optical system is adjusted by a magnification designation signal,
An imaging control unit that eliminates a magnification error that occurs depending on the light-receiving angle of the imaging viewing angle determining unit and forms a target image at a predetermined magnification, an imaging unit that images a positioned inspection target, and an imaging target. Display means for displaying an image to be inspected.

In this inspection apparatus, even if the viewing angle changes, the relative angle is always illuminated at the same illumination angle, the captured image is displayed, and the visual inspection can be performed.
The inspection apparatus according to claim 7 includes an imaging viewing angle determining unit that selects a light-receiving angle to an angle at which a light flux arriving from the target is received in order to determine a viewing angle at which the target is imaged, and an inspection target image is reduced. An image forming means including a first optical system for forming an image and a second optical system for changing the magnification of an image to be inspected, and a viewing angle designating signal are used to control the light receiving angle selection of the imaging viewing angle determining means.
Viewing angle control means for selecting the imaging viewing angle so as to conform to the rectangular grid of the plane coordinate to be inspected, and the focal length adjusting signal to move the image forming means along the optical axis, depending on the light receiving angle of the viewing angle determining means. The deviation of the focal length that occurs is eliminated, and the second optical system is adjusted by the magnification designation signal to eliminate the magnification error that occurs according to the light receiving angle of the imaging viewing angle determining means, and the target image is predetermined. A pair of image pickup target area positioning image pickup devices, which includes a pair of image pickup target area positioning image pickup devices including image forming control means for forming an image at a magnification and image pickup means for picking up a positioned inspection object, and a pair of the image pickup target area positioning image pickup devices. The imaging means performs binocular vision imaging on the inspection target, and the display means displays the binocular vision image so as to be provided for the visual inspection.

This inspection apparatus is provided with a pair of image pickup object area positioning image pickup apparatus and display means, and takes a binocular image of an object and displays the binocular image on the display means so that a visual inspection can be performed. ing. An inspection apparatus according to claim 8, wherein in order to determine a viewing angle for imaging an object, an imaging viewing angle determining means for selecting a light-receiving angle to an angle at which a light flux arriving from the object is received, and an inspection object image is reduced and image-formed. 1. An image forming unit including one optical system and a second optical system for changing the magnification of an image to be inspected, and a viewing angle designating signal to control the selection of the light receiving angle of the imaging and viewing angle determining unit to obtain an inspection object plane orthogonal coordinate rectangular grid. The visual angle control means for selecting the imaging visual angle so as to conform to, and the focal length adjustment signal to move the image forming means along the optical axis,
Magnification generated according to the light-receiving angle of the imaging visual-angle determining unit is eliminated by eliminating the deviation of the focal length that occurs according to the light-receiving angle of the viewing-angle determining unit, and adjusting the second optical system by a magnification designation signal. An image forming control means for eliminating an error and forming an object image at a predetermined magnification, an image pickup means for picking up an image of a positioned inspection object and outputting an image signal, and an image signal output from the image pickup means. A quality determining parameter calculating unit that corrects the distortion of the position data and converts it into rectangular coordinate data, and calculates a quality determining parameter, and a quality determining unit that automatically determines the quality of the inspection target from the quality determining parameter. And automatic determination means.

In this inspection apparatus, the inspection apparatus according to claim 5 further comprises an arithmetic means and a determination means, and the arithmetic means corrects the distortion error of the image signal position data from the inspection object image signal from the image pickup means. The quality determination parameter is calculated by using the determination means, and the quality determination is automatically performed by the determination means. An inspection apparatus according to claim 9, wherein in order to determine a viewing angle for imaging an object, an imaging viewing angle determining unit that selects a light-receiving angle to an angle at which a light flux arriving from the object is received; It is an illuminating means capable of changing the illuminating angle by deflecting the light flux from the light source, or an illuminating means capable of changing the illuminating angle by moving the position of the light source, and the position data of the imaging target area. Illumination control means for controlling the illumination means so as to illuminate the object at an angle corresponding to the imaging viewing angle according to the input value input or the value calculated by the arithmetic means, and the first optical system for reducing and forming the inspection object image. And an image forming means including a second optical system for changing the magnification of the image to be inspected, and a light receiving angle selection of the image capturing and viewing angle determining means is controlled by a view angle designating signal to conform to a rectangular grid of the plane to be inspected rectangular coordinate. As described above, the visual angle control means for selecting the imaging visual angle and the focal length adjustment signal move the image forming means along the optical axis to eliminate the deviation of the focal length generated according to the light receiving angle of the visual angle determining means. And an image forming control means for adjusting the second optical system by a magnification specifying signal to eliminate a magnification error generated according to a light receiving angle of the image pickup viewing angle determining means and form a target image at a predetermined magnification. An image pickup means for picking up an image of the positioned inspection object and outputting an image signal, and distortion of position data of the image signal output from the image pickup means is corrected and converted into rectangular coordinate data, and a quality pass / fail parameter is set. It is provided with a quality quality determination parameter calculation means for calculating, and a quality quality automatic determination means for automatically determining quality quality of an inspection target from the quality quality determination parameter.

In this inspection device, the inspection device according to claim 6 is
The calculation means and the determination means are provided, and the object is illuminated with the visual angle-coordinated angle illumination, and the calculation means corrects the distortion error of the image signal position data from the image signal to calculate the quality judgment parameter, and the determination means automatically. Therefore, the quality is judged. An inspection apparatus according to claim 10 mechanically targets an object.
Positioning means for dimensionally, two-dimensionally or three-dimensionally positioning, and imaging viewing angle determining means for selecting a light receiving angle for receiving a light flux arriving from the object in order to determine a viewing angle for imaging the object. Illuminating an inspection object and deflecting a light beam from a light source at a fixed position to change the illumination angle, or an illumination means capable of changing the illumination angle by moving the light source position, Illumination control means for controlling the illuminating means so as to illuminate the object at an angle corresponding to the imaging viewing angle according to an input value input accompanying the position data of the imaging target area or a value calculated by the computing means, and an inspection target. First to reduce the image
An image forming unit including an optical system and a second optical system for changing the magnification of the inspection target, and a viewing angle designating signal are used to control the selection of the light receiving angle of the imaging viewing angle determining unit to conform to the inspection target plane orthogonal coordinate rectangular grid. As described above, the visual angle control means for selecting the imaging visual angle and the focal length adjustment signal move the image forming means along the optical axis to eliminate the deviation of the focal length generated according to the light receiving angle of the visual angle determining means. And an image forming control means for adjusting the second optical system by a magnification specifying signal to eliminate a magnification error generated according to a light receiving angle of the image pickup viewing angle determining means and form a target image at a predetermined magnification. An image pickup means for picking up an image of the positioned inspection object and outputting an image signal; and a quality pass / fail judgment for calculating a quality pass / fail parameter from the image signal of the inspection object mechanically positioned by the positioning means. A parameter calculating means includes a automatically determining the quality good automatic judging means quality quality of the inspection target from the quality determining parameter, a.

In this inspection apparatus, the positioning means mechanically positions the object, and the quality is automatically judged from the image signal. An inspection apparatus according to claim 11, wherein in order to determine a viewing angle for imaging an object, an imaging viewing angle determining unit that selects a light-receiving angle to an angle at which a light flux reaching from the object is received, and an inspection-target image is reduced. An image forming unit composed of a first optical system for forming an image and a second optical system for changing the magnification of an image to be inspected, and a light receiving angle selection of the image pickup viewing angle determining unit are controlled by a view angle designating signal to orthogonalize the plane to be inspected. A visual angle control means for selecting an imaging visual angle so as to conform to a coordinate rectangular grid, and a focal length adjustment signal for moving the image forming means along the optical axis to generate a focal length according to a light receiving angle of the visual angle determining means. Of the target image by adjusting the second optical system according to the magnification designation signal to eliminate the magnification error that occurs depending on the light receiving angle of the imaging viewing angle determining means, and form the target image at a predetermined magnification. Image forming control means A pair of image pickup target area positioning image pickup devices for inputting binocular vision image signals, the image pickup means picking up images of the positioned inspection object, each image pickup means picking up an image of the inspection object. A quality quality determination parameter calculation means for calculating a quality quality determination parameter from the binocular visual image signal, and an automatic determination means for automatically determining quality quality of an inspection target from the quality quality determination parameter, There is.

This inspection apparatus is provided with a pair of image pickup object region positioning image pickup devices, and 3 images are obtained from the binocular image signal of the inspection object.
Dimensional shape measurement calculation is performed to automatically determine quality.
An inspection apparatus according to claim 12, wherein in order to determine a viewing angle for imaging an object, an imaging viewing angle determining means for selecting a light-receiving angle to an angle at which a light flux arriving from the object is received, and an inspection object image is reduced and image-formed. 1. An image forming unit including one optical system and a second optical system for changing the magnification of an image to be inspected, and a light receiving angle selection of the image pickup viewing angle determining unit is controlled by a viewing angle designating signal to inspect a plane orthogonal coordinate rectangular grid. In accordance with the visual angle control means for selecting the imaging visual angle and the focal length adjustment signal, the image forming means is moved along the optical axis to shift the focal length generated according to the light receiving angle of the visual angle determining means. Imaging for eliminating the magnification error by adjusting the second optical system in response to the magnification designating signal to eliminate the magnification error generated according to the light receiving angle of the imaging viewing angle determining means, and forming the target image at a predetermined magnification. Control means and positioning Imaging means for imaging a subject was,
A quality judgment parameter calculating means for calculating a quality judgment parameter by performing an arithmetic operation from an image signal given by the image pickup of the image pickup means, and automatically judging the quality of the inspection object from the quality judgment parameter An automatic determination means, a display means for displaying the imaged image, and a phase selection means for selecting an automatic inspection phase and a visual re-inspection phase are provided. When the quality judgment of is made, the address data of the judgment defective inspection target is memorized, and in the visual re-inspection phase, according to the memorized address data,
The automatic inspection determination failure inspection target is imaged and displayed as an image.

In this inspection apparatus, first, the address data of the inspection object which is determined to be defective in the automatic inspection is memorized, the image is positioned and imaged, the image is displayed, and the visual re-inspection is performed. Further, the address data to be inspected, which is determined to be defective by another inspection device, may be used for visual inspection. An inspection apparatus according to a thirteenth aspect of the present invention transmits the stored data, a positioning unit that positions the inspection target, an image capturing unit that captures the inspection target, a storage unit that stores the captured image data and related attribute data. An image including an image pickup unit including a transmission unit, a reception unit that receives data transmitted from the transmission unit, and a display unit that displays a plurality of received image data as an image or a collective image. And a display section.

In this inspection apparatus, an image of the inspection object is picked up by the image pickup means of the image pickup section, stored in the storage section, and this data is transmitted to the image display section side by the transmission section. The image display unit side receives this and displays it on the display means. Claim 14
The shape measuring apparatus according to (1) is configured to position the object mechanically one-dimensionally, two-dimensionally, or three-dimensionally, and deflect and reflect the light flux to determine the viewing angle for imaging the object. , An optical device including a mirror device for selecting a light-receiving angle for receiving a light beam arriving from an object, and an angle for reflecting a light beam from an imaging region toward a lens optical device by a viewing-angle designating signal from a viewing-angle control means. , A mirror deflection angle determining means for determining a mirror deflection angle, an imaging means for capturing an image of an object positioned at a plurality of positions by the positioning means, an object image formed on the image capturing means, and a magnification designation from the imaging control means. A lens optical device having a function of determining an image pickup magnification according to a signal, and a storage unit for storing a plurality of image data of a target obtained by image pickup by the image pickup unit. Calculating means for a plurality image data stored in the storage means the three-dimensional shape measurement operation of the target, and a.

In this shape measuring apparatus, the positioning means mechanically positions the object at a plurality of positions, and a plurality of image data obtained there is stored in memory to perform a three-dimensional shape measuring operation to determine the three-dimensional shape of the object. measure. The shape measuring device according to claim 15 is configured to position a target mechanically in one-dimensional, two-dimensional, or three-dimensional manner, and to determine a viewing angle for imaging the target, respectively. An optical device including a mirror device for deflecting and reflecting a light beam for selecting a light-receiving angle for receiving a light beam arriving from, and a viewing angle designating signal from a viewing angle control means,
A mirror deflection angle determining means for determining a mirror deflection angle, an image capturing means for capturing an object positioned by the positioning means, and a target image on the image capturing means. Image
A pair of image pickup target area positioning devices including a lens optical device having a function of determining an image pickup magnification according to a magnification designation signal from the image formation control means, and a left and right view of an object obtained by left and right image pickup by the image pickup means. It comprises a storage means for storing image data, and a calculation means for performing a three-dimensional shape measurement calculation operation of a target from left and right viewing image data stored in the storage means.

This shape measuring device is provided with a pair of the image pickup object region positioning device according to claim 1, picks up an image of the object mechanically positioned by the positioning means in left and right views, and stores left and right image data in a three-dimensional shape. Perform the measurement calculation and target 3
I am trying to measure the dimensional shape. The product manufacturing method according to claim 16 is a product manufacturing method for manufacturing a finished product from a semi-finished product by inspecting the quality of the semi-finished product and repairing and correcting the semi-finished product that has been determined to be defective. In order to determine the viewing angle, an imaging viewing angle determining unit that selects a light-receiving angle to an angle at which a light flux arriving from the target is received, a first optical system that reduces and forms the inspection target image, and a first optical system that scales the inspection target image. An image forming means composed of two optical systems; and a viewing angle control means for controlling the light receiving angle selection of the imaging viewing angle determining means by the viewing angle designating signal so as to select the imaging viewing angle so as to conform to the rectangular grid of the inspection target plane orthogonal coordinates. , The focal length adjustment signal is used to move the image forming means along the optical axis to eliminate the deviation of the focal length generated according to the light receiving angle of the viewing angle determining means, and the magnification designating signal is used to output the second optical signal. Adjust the system An imaging control means for eliminating a magnification error generated according to the light receiving angle of the imaging viewing angle determining means, and forming an object image at a predetermined magnification, an imaging means for imaging a positioned inspection object, and the imaging means. A quality pass / fail determination parameter calculation means for calculating a quality pass / fail determination parameter by performing an arithmetic operation from an image signal obtained by capturing an image, and an automatic determination of the quality pass / fail of an inspection target from the quality pass / fail determination parameter A determination means, a display means for displaying the imaged image, and a phase selection means for selecting an automatic inspection phase and a visual re-inspection phase are provided. When a quality judgment is made, the address data of the judgment defective inspection target is memorized, and in the visual re-inspection phase, it is automatically detected according to the memorized address data. The inspection device that images the inspection-defective defect inspection object and displays the image is installed in the manufacturing line, and the automatic inspection of the semi-finished product flowing in the manufacturing line is performed. The true defective object extracted by the re-inspection is repaired and corrected, and the semi-finished product becomes a finished product.

[0027]

The present invention will be described below with reference to the drawings showing the embodiments. FIG. 1 shows a first embodiment in which the imaging target area positioning imaging device according to the present invention is embodied as a monitoring device for image observation.
FIG. 3 is a layout diagram of an optical system of an embodiment, FIG. 3 is an explanatory view of a light deflecting mirror device in the layout of the optical system, and FIG. 4 shows an overall configuration of the first embodiment. Further, FIG. 2 is a layout view of the other optical system of the first embodiment as in FIG. 1, and one light deflection mirror is used for incident light from all directions by a tilt angle light receiving motor and an azimuth angle light receiving motor. The point is structurally different. However, if the target reflection image is returned to the normal position through another one fixed mirror or electrically, it is functionally similar to the optical system arrangement of FIG. 1 using two light deflection mirrors. The following description will basically be made with the arrangement of the optical system shown in FIG.

The present embodiment is an embodiment in which an object including a plurality of monitoring regions having different distances is positioned and imaged, an image is displayed, and the image is observed. For example, as a simplification example, in a certain factory, with respect to the time when the worker 1 in FIG. 4 is on the bench 2b at a short distance and the time to work on the workbench 2a at a long distance,
When the stay time is measured by imaging and work analysis is to be performed, it is necessary to position the monitoring point on the bench and the workbench, and form a monitoring area image at an appropriate imaging magnification to capture the image. P in FIG. 1 is an object as an optical sample. M
[theta] and M [phi] are plane mirrors, each of which is configured to be mechanically independently deflected about a rotation axis by driving a stepping motor (not shown).
However, as will be described later, the actual light receiving angle selection operation is performed by the linked deflection control. In the present embodiment, the light deflection mirror Mθ of FIG. 1 is an axis Aθ in the Z-axis direction in the XYZ three-dimensional orthogonal axes of the space where the object to be imaged and the apparatus of this embodiment exist.
The light deflection mirror Mφ rotates around the
Since it rotates around, the scene in which the object exists can be two-dimensionally scanned by a combination of the two. Therefore, when the deflection angle of each mirror is selected, the angle at which the incident light beam from the target is received is selected. Therefore, a specific location in the scene is selectively positioned and double reflection of the image at that location is performed. By passage, it can be delivered to the rear imaging optics. The selection of the light receiving angle by the light deflection mirror is combined with the image formation by the rear image forming optical system,
Positioning of the imaging target area is realized. That is, mirror M
Positioning in the X direction is performed by changing the angle of θ,
Positioning in the Y direction is performed by changing the angle of the mirror Mφ (in FIG. 1, the mirror Mθ and the mirror M).
In principle, there is no problem even if the φ arrangement is reversed).

The configuration of the optical deflecting mirror device will be described in more detail with reference to FIG. A feature of the light deflecting mirror device according to the present invention is that the mirror Mφ that is the first device that receives the light flux from the target scene must have a significantly different shape from the mirror Mθ that is the second device. This is a form necessary for receiving an imaging region having a wide field of view over a wide field of view. In FIG. 3, the mirror M, which is the first device,
φ shows a significantly long shape as compared with the mirror Mθ which is the second device, but this is none other than the fact that the second device covers a wide imaging region in the X direction. In this case, the long shape is not necessarily an absolute shape, but X
It goes without saying that another form may be used as long as it can receive light in a wide range of directions. As an example, a mirror having the same width as the second device is used, which is equipped with an X-direction moving device so that the second device can be moved to a required position according to the deflection angle of the second device. The same purpose is achieved.

Next, the image forming optical system will be described. Assuming that all mirrors are removed, for the imaging optics represented by lens L, sample P will be at P'in FIG. The lens L also has a function as a variable power optical system, and forms a target image on the light receiving surface of the image sensor I in a predetermined size. In the first embodiment, since the lens L is a zoom lens, if the zoom magnification is designated by the image forming optical system control signal from the image forming optical system control unit 7 in FIG. 4, an image of a predetermined size can be obtained. In FIG. 1, L'is the zoom position of L. However, the lens L is not a zoom lens, and the objective can be achieved by exchanging the lens. The optical arrangement for positioning and imaging in the first embodiment is as described above. If the size of the target area to be imaged is set by the imaging optical system and the mirror deflection angle is set in the direction of the area to be imaged, An area of a size desired to be imaged is positioned in the area of the object P to be imaged, and the area can be imaged. For example, if the target example is the above-mentioned in-factory scene, the image pickup position and the image pickup area are previously stored in the memory 11 of FIG. 4 by teaching, and if the observation instruction data is input by the input unit 12, the zoom lens The L and the mirrors Mθ and Mφ operate as taught to achieve predetermined positioning imaging.

In FIG. 4, 1 is a worker, 2a is a workbench, 2b is a bench, 3a is an image pickup device, 3b is an image forming optical system, 4 is a light deflecting / reflecting device, 5 is a control / arithmetic unit, 6 Is a mirror deflection control unit for controlling the selection of the light receiving angle of the light deflecting / reflecting device 4, 7 is an imaging optical system control unit for controlling the imaging conditions of the imaging optical system 3b, and 8 is for controlling the imaging conditions of the imaging device 3a. Imaging control unit, 9 is a system control unit for controlling the operation of the entire system of this embodiment, 10 is an automatic focusing unit, 11 is a memory, 12 is an input unit, 13 is an output unit, 14 is a display unit, and 15 is a bus. Is.

Next, the operation teaching flow of the first embodiment will be described with reference to the flowchart of FIG. First, the operator sets the apparatus to the teaching mode using the input unit 12 shown in FIG. 4 (step ST [hereinafter abbreviated as ST] 1).
Next, the image pickup device 3a is set at a fixed position (ST2), and the ID of the target scene is input (ST3). Next, the light deflection mirrors 4a and 4b are operated from the input unit 12 via the mirror deflection control unit 6 to be positioned in the first scene area (ST4), and the image pickup apparatus 3a is set via the image pickup control unit 8. The first operation is imaged to display the image on the display unit 14 (ST5), and the operator operates the imaging optical system 3b via the imaging optical system control unit 7 while watching the image, The imaging magnification of this scene is determined while utilizing the automatic focusing function (ST6), and the determined imaging condition data (position data and magnification data) is stored in the memory 11 (ST7). While setting the magnification for each sight area, the entire observation area is sequentially imaged and displayed on the display unit 14 as an image (ST8). Whenever an image of the observation sight area of interest is displayed, the operator issues an imaging area designation signal. When input, the imaging condition data is stored in the memory 11 (ST9). In this way, when the memory of the imaging condition data of the entire scene area is completed, YES is obtained in ST10, the file is closed (ST11), and the teaching is completed. The teaching data completed according to the above-described operation flow includes the imaging condition data of the entire view area of the target to be observed, and is stored in the memory 11 of FIG.

Next, the observation flow of the first embodiment will be described with reference to the flowchart of FIG. First, the operator sets the apparatus to the observation mode (ST21). Next, when the ID of the target scene is input from the input unit 12 of FIG. 4 (ST22), the system control unit 9 instructs to position in the first observation area according to the position data taught in the above-mentioned teaching mode. The mirror deflection control unit 6 drives the stepping motors (not shown) of the light deflection mirrors 4a and 4b to deflect the mirrors to the instructed light-receiving angle and perform optical positioning (ST23). Then, upon receipt of the taught magnification data, the imaging optical control unit 7 gives an instruction to control the zoom lens of the imaging optical system 3b to match the desired magnification (ST24). At this timing, the automatic focusing function operates (ST25). The image pickup device 3a picks up the scene area image formed on the light-receiving surface of the image pickup device 3a in this way according to an image pickup command from the image pickup control unit 8, and displays the image on the display unit 14 (ST26). The operator performs necessary work by visually observing the displayed image (ST27),
According to the teaching data, if ST28 is NO, the flow enters the circulation cycle (route A), moves to the next scene area, and the same positioning, image display, and scene observation flows are repeated, and all the taught scene areas are taught. When the image display and the work are completed, YES is determined in ST8 (route B), the file is closed (ST29), and all the work by observation is completed.

Next, a second embodiment will be described. Like the first embodiment, this embodiment belongs to a monitoring device which is a specific example of the imaging target area positioning imaging device according to the present invention. It is a monitoring device that has an automatic tracking function and is suitable for cases and the like. This is a case where it is not possible to predict at which position in the large three-dimensional space the intruder appears because the field of view of the surveillance area is wide and the depth is deep. Therefore, the following three elements are listed as elements different from the first embodiment.

(A) Intruder detection function: The intruder can be detected at any position in a vast space. (B) Automatic positioning function, automatic focus position adjustment function, automatic magnification adjustment function: The imaging direction should be set on the detected object, the optical system should be focused, and images should be taken at an appropriate magnification.

The overall optical arrangement and function are the same as in the case of the first embodiment shown in FIG. Figure 7
The overall configuration and function of the second embodiment will be described using. Second
In the embodiment, for example, when a person 1 enters a scene of a panoramic view 2 surrounded by a long fence on both sides, the person 1 is detected (above-mentioned), the imaging viewing angle is positioned in the direction of the person, and the focus is adjusted. It is a monitoring device that images a person by adjusting the positions and the image pickup magnifications (b). When the device is in the operating state, a command from the system control unit 9 of FIG.
The entire view 2 of the passage shown in FIG. 7 is divided into, for example, vertical 7 frames × horizontal 6 frames = total 42 frames by the imaging optical system control unit 7 controlling the imaging optical system 3b, and two mirror deflection control units 6 are provided. The deflection angles of the light deflection mirrors 4a and 4b are controlled to constantly perform scanning positioning from the upper left to the lower right, and the imaging control unit 8 controls the imaging device 3a to sequentially capture images. The image signal of each frame is sequentially sent to the image processing arithmetic unit 10 and compared with each frame image data stored in the memory 12 by the CPU 11 in terms of image processing technology. Unless a difference in the image data is detected, it is a normal situation. And the operation of the device shows no change.

However, if a difference is detected in the image data of any one of the 42 frames, the apparatus stops the scanning positioning, and the system control unit 9 controls the mirror deflection control unit 6 to control the light deflection mirror. 4a and 4b
The deflection angle of the image is deflected to the frame in which the difference in the image data occurs, and the imaging optical control unit 7 controls the imaging optical system 3b to automatically zoom up the frame to the taught magnification and focus. After adjusting the distance, display unit 16
The image can be displayed on the screen, or can be transmitted to a monitor station (not shown) at another place through the communication unit 15, and the image can be stored in the memory 12 and later displayed on the display unit 16 if necessary. Can be replayed and displayed on the monitor station, or can be replayed and displayed on the monitor station through the communication unit 16.

Next, an inspection apparatus using the image pickup target area positioning image pickup apparatus according to the present invention will be referred to as a third embodiment. Third
The embodiment will be described by taking a printed wiring board mounting inspection device as an example, which inspects a mounting state of components mounted on the printed wiring board. FIG. 8 is a diagram showing the optical arrangement of the optical path system of this embodiment, and FIG. 9 is a diagram showing the overall configuration of the inspection apparatus.
The optical deflecting mirror Mθ of FIG. 8 rotates about an axis Aθ in the Z-axis direction in the XYZ three-dimensional orthogonal axes of the space where the object to be imaged and the apparatus of this embodiment exist, and the optical deflecting mirror Mφ is the axis in the X-axis direction. Since it rotates around Aφ, it is possible to two-dimensionally scan a plane (hereinafter abbreviated as “target plane”) on which an object exists by combining the two. By doing so, the angle at which the incident light flux from the target is received is selected, so that it is possible to selectively position a specific location on the target plane and transmit the image at that location rearward. By changing the angle in the X direction, and by changing the angle of the mirror Mφ in the Y direction by changing the angle of the mirror M.phi .. The optical deflecting mirror device of the present embodiment is as described in the first embodiment. Ah So, it will not be restated.

Next, the image forming system of the third embodiment will be described with reference to FIG. Assuming that all the mirrors are removed in FIG. 8, the sample P exists at P ′ in FIG. 8 with respect to the imaging optical system including the lens groups L _{1 to} L ₃ . Of the image forming optical system, the lens L _1Z is the first image forming optical system arranged on the target side, and an achromatic lens is used, such as a solder joint inspection of an electronic component mounted on a printed wiring board. To
It has a function as an effective image reduction optical system when it is necessary to enlarge an object at a relatively long distance (for example, a pixel size is 15 nm × 15 nm) to form an image. The second imaging optical system arranged on the image pickup device side is composed of a lens L ₂ and a lens L ₃ in this embodiment, and has a function as a variable power optical system. Is In the second imaging optical system, the lens L ₂ receives the reduced image of a subject sample lens L ₁ is imaged, the role of the relay lens for transmitting to the lens L ₃ as an image of the lens L ₃ can capture The lens L ₃ forms this image on the light receiving surface of the image pickup element I in a predetermined size. The lenses L ₂ and L ₃ of the second image forming optical system are of course also effective as an integrated lens having a function as a variable power optical system. In the third embodiment, since the lens L ₃ is a zoom lens, if the zoom magnification is designated by the image forming optical system control signal from the image forming optical system control unit 7 in FIG.
An image of the above-mentioned predetermined size is obtained. In FIG. 8, L
₃ 'is the zoom position of L _3. However, even if the lens L ₃ is not a zoom lens, the objective can be achieved by replacing the lens. The optical arrangement for selecting the light-receiving angle in the third embodiment is as described above, and by the imaging optical system,
If the size of the target area to be imaged is set and the mirror deflection angle is set in the direction of the area to be imaged, the area of the size to be imaged is positioned in the area of the target P to be imaged.
The area can be imaged.

Here, if the magnification of the reduction optical system is m ₁ and the magnification of the variable magnification optical system is m ₂ , the total magnification of the imaging optical system is
m = m ₁ × m ₂ . The operation of the inspection apparatus of this embodiment will be briefly described. If the image pickup position and the image pickup area on the printed wiring board are previously stored in the memory 12 of FIG. 9 by teaching, the zoom lens L ₃ and the mirrors Mθ, Mφ are taught. As described above, predetermined positioning imaging is achieved (detailed description will be given later).

In FIG. 9, 1 is an inspection object, 2 is a stage on which the inspection object 1 is set, 3a is an image pickup device, 3b is an image forming optical system, 4 is a light deflecting / reflecting device, and 5 is control / calculation. Reference numeral 6 denotes a mirror deflection control unit for controlling selection of a light receiving angle of the light deflection / reflecting device 4, 7 denotes an imaging optical system control unit for controlling imaging conditions of the imaging optical system 3b, and 8 denotes imaging conditions of the imaging device 3a. An image pickup control unit for controlling the above, a system control unit 9 for controlling the operation of the entire system according to the present embodiment, an image processing arithmetic unit, a CPU 11, a memory 12, and a memory unit 13.
Is an input unit, 14 is an output unit, 15 is a communication unit, 16 is a display unit, and 17 is a bus.

The basic configuration and the general operation for the positioning and imaging function of the third embodiment are as described above, and the observation and the purpose of observation by general positioning and imaging are achieved. However, when the technique according to the present invention is applied to measurement, inspection based on measurement, or the like, the involvement of distortion derived from oblique view cannot be ignored. When the deflection angle of the light deflection mirror becomes large, the optical path length expands in a trigonometric function, and the following factors may become a problem depending on the purpose of imaging.
In particular, when the target is a flat surface such as a printed wiring board or a wafer, the presence of this distortion becomes more apparent.

Item (1) Focal length deviation: Since the focal length of the imaging optical system is constant, as the deflection angle of the light deflecting mirror increases, the focal spherical surface on the three-dimensional polar coordinates with the focal length as the radius and the target plane. The gap between the two becomes large. That is, in proportion to the deflection angle, the "focal deviation line segment length" becomes severe. Item (2) Positioning distortion: Divide the deflection angle equally, that is,
If the mirrors are deflected equiangularly, the positioning in the plane of interest will not be on the square grid (note: the term "square" is used to mean not only square but also rectangle) It exists on a distorted grid corresponding to the value of the angle.

Item (3) Difference in image pickup area size: The difference in image pickup object area size occurs corresponding to the value of the deflection angle of the light deflection mirror. If the imaging regions exist at positions where the deflection angles of the light deflection mirrors are different, the sizes of the imaging target regions are different. Item (4) Pixel distortion: Since a focal sphere on a three-dimensional polar coordinate system having a focal length as a radius is projected on a target plane, pixel data (position and size) in one imaging target area is a light deflection mirror of pixels. It differs according to the distance from, and also differs from the Cartesian coordinate data on the target plane.

First, the solution technique according to the present invention regarding the focal length deviation of item (1) will be described. In FIG. 10, if the image pickup area at the O ′ position is first imaged by the mirror at the M ′ position, then positioned at the O position, and the next image pickup target area is imaged. The optical path length to the mirror was initially M'O '= h', but then extends to M'O. Therefore, when the mirror is brought closer to the target from M'so that M'O becomes h '(translator function), the imaging target region O becomes the focus position of the imaging optical system at the position of M, and the focus becomes The deviation disappears. At this time, the mirror has moved by MM '= a. The moving distance a is calculated by the calculating means from the arithmetic expressions (1) to (3). This change in optical path length is shown in FIG.
This means moving the entire system after the mirror, but this method changes the relative position of the optical system with respect to the target. Therefore, in practice, the mirror position is left unchanged and only the imaging optical system is moved back and forth as a unit. As a further advanced method in the present embodiment, as shown in FIG. 8, by moving only the lens L _1Z back and forth by driving a motor (not shown), the lens moving distance is shortened and the structure is simplified. are doing. This lens movement is realized by driving a motor (not shown) according to a command from the system control unit 9 in FIG. 9 and a lens movement control signal sent from the imaging optical system control unit 7 to the imaging optical system 3b. It
Here, the imaging optical system control unit 7 operates according to the information calculated and transmitted in the following procedure. That is, CPU1
0 calculates the a value using the h ′ value of FIG. 10 input from the input unit 13 by the arithmetic expressions (1) to (3) stored in advance in the memory 12 of FIG. Imaging optical system control unit 7 converted to the moving distance of L _1Z
Then, the imaging optical system control unit 7 drives the motor according to the value to move the lens L _1Z . In this method, since the reduction optical system magnification m ₁ is changed by moving the lens L _1Z back and forth, the magnification changing optical system magnification m
By matching the zoom ratio of ₂ , the total magnification m =
It is so set that m ₁ × m ₂ does not change.

Next, the solution technique of the present invention regarding the distortion of the positioning position of item (2) will be described. When the light receiving angle is selected by the equal angle division deflection of the mirror,
Since the focal position forms a spherical surface in three-dimensional polar coordinates with the focal length as the radius, a distorted grid pattern as shown in FIG. 11 is drawn on the target plane instead of a rectangular grid on orthogonal coordinates (pin cushion). ·error). This is because the central projection of the focal sphere, that is, the electrocardiogram is drawn on the target plane. In order to prevent the generation of the lattice distortion shown in FIG. 11, the light-receiving angle is not selected by the polar coordinate equiangular division method, but by the projection projection calculation of the focal spherical surface shown by the calculation formula (4) in FIG. The values of X and Y may be set in advance as rectangular grid coordinate values, and then the deflection values of the light deflecting mirror, θ and φ may be inversely calculated as an inverse problem solution. In this embodiment, this operator is shown in FIG.
The memory 12 stores the data, and the CPU 11 performs the inverse calculation by using the positioning coordinate value according to the actual size of the target to generate the rectangular lattice on the target plane.

Next, the solution technique according to the present invention regarding the difference in the size of the image pickup target area of the item (3) will be described. First, a method of calculating the size difference will be described. This is a difference in the area size of the imaging target area in the same object. For example, when imaging multiple areas of one printed wiring board, the imaging target area at the shortest distance and the longest distance from the mirror. A difference in area occurs between the image pickup target area and the image pickup target area corresponding to the value of the deflection angle of the mirror. FIG.
In the above, the length of Δd ′ when the imaging target area at the shortest distance is viewed from the mirror position M ′ of the object with the viewing angle α for viewing the imaging target area is the longest separated by the distance l. In the imaging target area of the distance, the length is Δd. At this time, when the above-mentioned focal length adjustment is not performed, Δd is calculated by the calculation formula (6) and Δd ′ is calculated by the calculation formula (5). Further, when the above focal length adjustment is performed, Δd becomes a value calculated by the arithmetic expression (7). The ratio of the sizes is Δd / Δd ′. The method of eliminating this difference is an optical method, and an image is formed on the light receiving surface of the image pickup means in accordance with the dip angle of the angle range in which the light deflection mirror looks at the object (greater than α and smaller than β or β ′). This is a method in which the magnification of the image of the imaging target area is changed by the zoom function of the variable power optical system and the area is always imaged at the same magnification. The relationship between the dip angle and the magnification correction amount is stored in the memory of FIG. 9 as a lookup table and calculated by the CPU 11 from the actual value. With respect to this magnification correction, the same effect can be obtained by moving the lens L _1Z in FIG.

Next, a method for solving the difference in pixel data in the same image pickup target region of item (4) will be described. The reason why this distortion occurs is basically the same as in item (2). If the light receiving angle is selected by the equiangular division deflection of the mirror, the focal position is spherical with a three-dimensional polar coordinate whose radius is the focal length. The relationship between the X and Y values of the pixel data on the target plane and the deflection angles θ and φ of the light deflection mirror is expressed by the equation (4) in FIG. It can be obtained from the projection projection calculation. Therefore, in the present embodiment, this operator is stored in the memory 12 of FIG. 9, and the CPU 11 executes this calculation using the positioning coordinate value according to the actual size of the target, and after correcting this pixel data distortion, the quality is improved. The pass / fail judgment parameter is calculated.

Next, according to the flow chart of FIG.
The operation teaching flow of the third embodiment will be described. First, the operator uses the input unit 13 shown in FIG.
(ST31). Next, the target ID is input (ST32), and the target is set at a fixed position on the stage of FIG. 9 (ST33). Next, the light deflection mirrors 4a and 4b are operated from the input unit 13 via the mirror deflection control unit 6 to position the first observation region (ST3).
4), the imaging optical system 3 via the imaging optical system control unit 7
While operating b, the focal length is adjusted (ST35), the imaging device 3a is operated via the imaging control unit 8 to image the first observation region and display the image (ST36), and the operator views the image. While operating the imaging optical system 3b via the imaging optical system control unit 7, the imaging magnification of this target is determined, and the determined magnification is stored in the memory 12 (ST
37). Next, the device is set to teaching mode II (ST
38). In the teaching mode II, the focal length adjustment and the magnification adjustment according to the set magnification are all automatically performed. These automatic adjustments are performed by the light deflection mirror 4 from the stage 2 in FIG.
When the height of a is preset (ST39), the above-mentioned arithmetic expressions (1) to (3) for the focal length adjustment (FIG. 10).
Therefore, regarding the magnification adjustment, the above-mentioned equation (5) is used.
(6) (FIG. 13), the calculation is automatically performed. Of course, the same effect can be obtained even if the height of the light deflecting mirror is preset by a height sensor (not shown) provided separately. By operating the light deflection mirrors 4a and 4b at the set magnification, the entire area of the target is changed to 2
Dimensionally scanned, sequentially picked up images and displayed images (ST4
0), every time an image of an area necessary for inspection is displayed for this object, when the operator inputs a signal designating that area as an imaging area, the position data is stored in the memory 12. (ST41). In this way, when the memory of the position data of all the inspection areas is completed, ST42 becomes YES, the target is excluded from the fixed position of the stage 2 (ST43), and the teaching is completed. The teaching data completed in accordance with the operation flow described above includes the position data and the imaging magnification data of the entire area of the target to be inspected, and is stored in the memory 12 of FIG.
This inspection data is taught by computer design data, that is, C
It is also possible to use the position data of the AD data. In that case, the actual product is unnecessary, but it is necessary to separately input the magnification data for imaging and the height data of the light deflection mirror.

Next, regarding the inspection flow of the third embodiment,
Description will be given according to the flowchart of FIG. First, the operator sets the apparatus to the inspection mode (ST51).
Next, the inspection target ID is input from the input unit 13 of FIG. 9 (ST52), and the inspection target is set at a fixed position of the stage 2 (ST53). According to the position data taught in the above teaching mode, The system control unit 9 instructs to position in the first inspection area, and the mirror deflection control unit 6 drives the stepping motors (not shown) of the light deflecting mirrors 4a and 4b to move the mirrors to the designated light receiving angle. Deflection is performed and optical positioning is performed (ST54).
Therefore, the CPU 11 receives the focal length deviation data calculated by the arithmetic expressions (1) to (3) (FIG. 10) from the deflection data of the mirror and the taught height data, and the imaging optical system control unit 7 gives an instruction. And the imaging optical system 3b is moved (translated) to perform automatic focal length adjustment (ST5
5). Then, the CPU 11 calculates formulas (5) to (7) (FIG. 13) from the deflection angle data of the mirror and the taught height data.
Upon receiving the magnification data calculated by, the imaging optical system control unit 7 instructs to control the zoom lens of the imaging optical system 3b to match the desired magnification (ST56). The inspection area image thus formed on the light receiving surface of the image pickup device 3a is picked up by the image pickup device 3a according to an image pickup command from the image pickup control unit 8, and the image processing operation unit 10 obtains image data (ST57). The pixel data distortion is corrected to calculate a quality pass / fail judgment parameter (ST58). Using the quality judgment algorithm stored in the memory 12, C
The PU 11 automatically determines the quality of the inspection target from this parameter (ST59). The judgment result data is stored in the memory 12 or the display unit 16 if necessary.
Or output to the output unit 14 such as a printer. If ST61 is NO according to the teaching data, the flow chart enters the circulation cycle (route A), moves to the next inspection area, repeats the same inspection flow, and if the automatic inspection of all the taught inspection areas is completed, ST61 is Y
It becomes ES (route B), the inspection target is excluded from the fixed position (ST62), and the inspection is ended. Further, the inspection results stored in the memory 12 can be collectively sent for each lot to the other station through the communication unit 15 and used for quality control or the like (steps are not shown).

Next, the fourth embodiment will be described by taking as an example a printed wiring board mounting inspection device for visually inspecting the mounting status of the components mounted on the printed wiring board. FIG. 16 is a diagram showing the overall configuration of the inspection apparatus, and FIG. 17 is a flowchart showing the operation steps of the inspection. In this embodiment,
This is an inspection device that picks up an image of an inspection object, displays the image, and visually observes the image to determine whether the electronic component mounting quality is good or bad. Therefore, the image recognition process using the image data is not necessary, and the overall configuration (FIG. 16) is the configuration in which the image processing operation unit is omitted from the overall configuration of the third embodiment. The operation teaching flow of this embodiment is essentially the same as that of the third embodiment. This is because the steps other than the automatic recognition determination are the same. Therefore, the inspection flow of the fourth embodiment will be described with reference to FIG.
First, the operator sets the device to the inspection mode (S
T71). Next, when the inspection target ID is input from the input unit 12 of FIG. 16 (ST72) and the inspection target is set at a fixed position of the stage 2 (ST73), the system control is performed according to the position data taught in the teaching mode. The unit 9 instructs to position in the first inspection area, and the mirror deflection control unit 6 drives the stepping motors (not shown) of the light deflection mirrors 4a and 4b to deflect the mirror to the instructed light receiving angle. , Optical positioning (ST7
4). Therefore, the CPU 10 calculates the equations (1) to (3) (FIG. 1) from the deflection angle data of the mirror and the taught height data.
Upon receiving the focal length deviation data calculated in 0), the imaging optical system control unit 7 instructs and moves (translates) the imaging optical system 3b to perform automatic focal length adjustment (ST75). Then, the CPU 10 calculates the equations (5) to (7) from the deflection angle data of the mirror and the taught height data.
Upon receiving the magnification data calculated by (FIG. 13), the imaging optical system control unit 7 instructs to control the zoom lens of the imaging optical system 3b to match the desired magnification (ST7).
6). The image pickup device 3a picks up the inspection area image formed on the light-receiving surface of the image pickup device 3a in this way according to an image pickup command from the image pickup control unit 8, and the image is displayed.
No. 5 is displayed (ST77).

The operator visually judges the image to judge the quality of the mounting quality (ST78), and inputs the judgment result from the input unit 12 (ST79). The determination result data is stored in the memory 11, displayed on the display unit 16, or output to the output unit 13 such as a printer, if necessary. ST according to teaching data
If 80 is NO, the flow enters the circulation cycle (route A), moves to the next inspection area, repeats the same inspection flow, and if visual inspection of all the inspected inspection areas is completed, ST80 returns YES. Then (route B), the inspection target is excluded from the fixed position (ST81), and the inspection ends. Further, the inspection results stored in the memory 11 can be collectively sent for each lot to the other station through the communication unit 14 and used for quality control or the like (steps are not shown).

Next, an inspection apparatus according to the fifth embodiment of the present invention will be described. The configuration of the fifth embodiment is as shown in FIG. 9 and is the same as that of the third embodiment, but the elements different from the third embodiment are the image of only the defective portion after the automatic inspection of the inspection object. It is a point to display and perform a visual re-inspection. The operation of the fifth embodiment will be described with reference to the flowcharts of FIGS.

Since the basic principle of the automatic inspection of the fifth embodiment is exactly the same as that of the third embodiment described with reference to FIG. 9, the description thereof will be omitted. Since it is different from 1) FIG. 18 illustrates an inspection flow when a plurality of inspection regions are included in one inspection target. For example, the case of soldering inspection of electronic components mounted on a printed wiring board corresponds to this. Therefore, the whole inspection area is automatically scanned within one sample (A cycle),
The quality is determined for each inspection area. These sequence controls are performed by control signals from the system control unit 9 in FIG.

2) If it is automatically determined that the quality is poor in those inspection areas, the position data and the teaching data of the position are stored (FIG. 18, ST101). 3) When the automatic inspection phase is completed when the automatic determination of all the inspection areas of one sample is completed, the visual re-inspection phase of the sample is started (FIG. 19, ST103). In the visual re-inspection step of FIG. 19, the re-inspection sequence is performed according to the defective portion position data stored in the memory 11 of FIG. 9 and the teaching data of the defective portion (ST11
0), via the control signal of the system control unit 9, the light receiving angle is selected in the imaging direction of the re-inspection area (ST10).
3) The focal length is automatically adjusted (ST104), the magnification is automatically adjusted (ST105), the captured image is displayed on the screen of the display unit 16 (ST).
106). Therefore, the operator observes this image to perform a visual inspection to make a pass / fail judgment (ST10).
7), input the judgment result to the input unit 13 (ST1
08).

If ST109 is NO when the input of the result is completed, the re-inspection sequence follows the defective portion position data and the teaching data stored in the memory 11 (ST1
10) The light receiving angle is selected again toward the next re-inspection position of the inspection object 1 in FIG. 9 via the control signal of the system control unit 9 (ST103), and the above-described operation is repeated (C cycle). . When the re-inspection of all the re-inspection positions is completed in this way, ST109 becomes YES, the inspection object 1 is excluded from the fixed position (ST111), and the whole inspection process is completed. As described above, in the present embodiment, the quality judgment is automatically performed and only the defective area is displayed as an image, so that the operator only needs to perform a very small number of visual inspections, and a great labor saving is realized. Not only is it possible to avoid the risk of non-extraction of defective parts by setting a gentle automatic inspection judgment standard, allowing a small number of over-detection of good parts to make a defect judgment, and performing visual re-inspection only for defect judgment. The display image is used. Here, in the description of the fifth embodiment, although it is explained that the operator manually sets the inspection target at the fixed position of the inspection, the operation is not an essential element for the function of the present invention. Needless to say, for example, the inspection target is carried in to a fixed position for inspection by a belt conveyor, and the signal from the sensor or the like is used, as shown in FIG.
It is also possible to easily perform the series of automatic inspection and visual re-inspection shown in the flowchart of FIG. In addition, this visual re-inspection is also possible in the present embodiment for a defective portion determined by another automatic inspection device. That is, the step of selectively capturing an image of a defective portion and displaying an image by setting the inspection target that has been automatically inspected and receiving the defective portion data by communication is different from the case of the own device data. It is the same.

Next, with respect to the sixth embodiment, binocular visual inspection is performed on the mounting condition of the components mounted on the printed wiring board.
A printed wiring board mounting inspection device will be described as an example. The present embodiment is an inspection apparatus that determines the quality of electronic component mounting quality by visually and laterally displaying the left and right images of an inspection target by an operator and visually observing the images. FIG. 20 is a diagram showing the overall configuration of the inspection apparatus.
1 is a flowchart showing the teaching steps of the inspection,
FIG. 22 is a flow chart showing the operation steps of the inspection. As shown in FIG. 20, the sixth embodiment includes a pair of left and right light deflection mirrors 4a, 4b and 4a ', 4b', imaging optical systems 3b and 3b ', and image pickup devices 3a and 3a', respectively. For the inspection target 1 set on the stage 2,
This is an example of simultaneously obtaining left and right binocular images. The need to obtain left and right binocular images requires, for example, omnidirectional observation of the same component when performing visual inspection by observing the attitude and soldering state of electronic components mounted on the printed wiring board. . Since the imaging method according to the present invention is in principle a monocular method, it is necessary to rotate the object or to perform binocular vision to the left and right in order to perform image inspection from both directions.

Next, according to the flow chart of FIG.
The operation teaching flow of the sixth embodiment will be described. First, the operator sets the apparatus to the teaching mode I using the input unit 12 of FIG. 20 (ST121). Next, the ID of the inspection target is input (ST122), and the inspection target is set at a fixed position of the stage 2 (ST123). Next, the light deflection mirrors 4a, 4b and 4a ′, 4b ′ are operated from the input unit 12 via the left and right mirror deflection control units 6 to position them in the first observation region (ST124), and the imaging optics is formed. The imaging optical system 3b is operated via the system control unit 7 to adjust the left and right focal lengths (ST125), and the imaging devices 3a and 3a 'are operated via the left and right imaging control units 8 to thereby perform the first operation.
The left and right image forming optical systems 3b and 3b ′ are displayed via the left and right image forming optical system control unit 7 while the operator observes the left and right images by displaying the left and right images by left and right binocular imaging of the th observation region (ST126). Is operated to determine the left-right imaging magnification of the inspection target, and the determined left-right magnification is stored in the memory 12 (ST127). In a normal inspection without any special intention, the lateral magnification is set to be the same.

Next, the apparatus is set to the teaching mode II (ST128). In the teaching mode II, the focal length adjustment and the magnification adjustment according to the set magnification are automatically performed on both the left and right sides. For these automatic adjustments, if the heights of the light deflection mirrors 4a and 4a 'from the stage 2 in FIG. 10), and the magnification adjustment is automatically performed on the left and right sides by the above-described arithmetic expressions (5) to (6) (FIG. 13). Of course, the same effect can be obtained even if the height of the light deflecting mirror is preset by a height sensor (not shown) provided separately. The left and right light deflecting mirrors 4a, 4b and 4a ', 4b' are operated at the set magnification to two-dimensionally scan the entire area of the object, and sequentially pick up images to display the left and right images (ST130). Whenever the operator inputs a signal designating that the area is an imaging area every time an image of the area required for inspection is displayed, the position data is stored in the memory 11 (ST
131). In this way, when the memory of the position data of all the inspection areas is completed, ST132 becomes YES, the target is excluded from the fixed position of the stage 2 (ST133), and the teaching is completed.

The teaching data completed according to the above-described operation flow includes the position data and the imaging magnification data of the entire area of the object to be inspected, and is stored in the memory 11 of FIG. In addition to the method of using the inspection object itself described above, the teaching of the inspection data can be performed using computer design data, that is, position data of CAD data. In that case, the actual product is unnecessary, but it is necessary to separately input the left and right magnification data for imaging and the height data of the left and right light deflection mirrors.

Next, the inspection flow of the sixth embodiment will be described with reference to FIG. First, the operator sets the apparatus to the inspection mode (ST141). Next, the inspection target ID is input from the input unit 12 of FIG. 20 (ST142),
When the inspection target is set at a fixed position on the stage 2 (ST14
3) According to the position data taught in the above-mentioned teaching mode, the system control unit 9 indicates the first inspection area, and the left and right mirror deflection control unit 6 causes the left and right light deflection mirrors 4a, 4b and 4a ', The stepping motor 4b '(not shown) is driven to deflect the left and right mirrors to the designated light-receiving angle for optical positioning (ST14).
4). Therefore, the CPU 10 uses the deflection angle data of the left and right mirrors and the taught left and right height data to calculate equations (1) to (3).
In response to the focal length deviation data calculated by (FIG. 10), the left and right imaging optical system control unit 7 instructs and moves (translates) the left and right imaging optical systems 3b and 3b ′ to obtain the left and right automatic focusing. Distance matching is performed (ST145).
Then, the CPU 10 uses the deflection angle data of the left and right mirrors and the taught left and right height data to calculate equations (5) to (7) (see FIG. 1).
In response to the horizontal magnification data calculated in 3), the left and right imaging optical system control unit 7 directs the left and right imaging optical system 3
The zoom lenses b, 3b 'are controlled to match the desired magnification (ST146). In this way, the left and right image pickup devices 3
The inspection area image formed on the light receiving surface of a, 3a ′ is imaged by the image pickup device 3a by the image pickup command from the left and right image pickup control unit 8.
3a ′ captures an image and displays each image on the display unit 15 (ST147).

The operator visually observes the image to determine the quality of the mounting quality of the electronic component in the inspection area (ST148), and inputs the determination result from the input unit 12 (ST149). The judgment result data is stored in the memory 11 or the display unit 16 if necessary.
Or output to the output unit 13 such as a printer. According to the teaching data, if ST150 becomes NO, the flow enters the circulation cycle (route A), moves to the next inspection area, and the same inspection flow is repeated. If the automatic inspection of all the taught inspection areas is completed, ST150 returns YE.
When it becomes S (route B), the inspection target is excluded from the fixed position (ST151), and the inspection is ended. Further, the inspection results stored in the memory 11 can be collectively sent for each lot to the other station through the communication unit 14 and used for quality control or the like (steps are not shown).

Next, a binocular visual inspection apparatus for automatically determining the mounting quality of electronic components mounted on a printed wiring board from left and right binocular vision image data will be described as a seventh embodiment of the present invention. To do. FIG. 2 shows the entire configuration of the seventh embodiment inspection apparatus.
3 shows. In the present embodiment, the mounting state of electronic components in the inspection area is shape-measured by using the left and right binocular triangulation method.
It is an automatic inspection device that calculates a mounting quality judgment parameter from dimension data and judges quality by an automatic quality judgment algorithm. However, the triangulation method using the imaging area positioning imaging device according to the present invention has a measurement environment different from that of the conventional normal triangulation method, and makes a special correspondence to the condition. Since the positioning method of the present invention is an optical method, the measurement environment is that the position of the measurement target in the triangulation method moves with the movement of the position data of the inspection area. That is, in FIG. 24, the positions of the inspection area O, which is the measurement target, are two-dimensionally different positions on the target plane.
The angles α and β formed by are also different. Therefore, in the present embodiment, the position data is used for each inspection area, as shown in FIG.
Three-dimensional shape measurement is performed by the triangulation calculation of the calculation formula (8), the mounting quality determination parameter of the electronic component is calculated, and the quality determination is performed by the automatic determination algorithm.

Next, regarding the inspection flow of the seventh embodiment,
It will be described with reference to the flowchart of FIG. 26 (note that the inspection teaching step of this embodiment is the same as the teaching step of the sixth embodiment, so repetitive description will be omitted). First, the operator sets the apparatus to the inspection mode (ST161). Next, when the ID of the inspection target is input from the input unit 13 of FIG. 23 (ST162) and the inspection target is set at the fixed position of the stage 2 (ST163), the system control is performed according to the position data taught in the teaching mode. The unit 9 instructs to position in the first inspection area, and the left and right mirror deflection control unit 6 causes the left and right light deflection mirrors 4a, 4b and 4 to move.
The stepping motors (not shown) of a ′ and 4b ′ are driven to deflect the mirror to the instructed light receiving angle, and optical positioning is performed (ST164). Therefore, the CPU 11 receives the left and right focal length deviation data calculated by the arithmetic expressions (1) to (3) (FIG. 10) from the left and right deflection angle data of the mirror and the taught left and right height data, and the left and right imaging optics are received. The system control unit 7 instructs and moves (translates) the left and right imaging optical systems 3b and 3b 'to perform left and right automatic focal length adjustment (ST165). Then, the CPU 11 receives the horizontal magnification data calculated by the arithmetic expressions (5) to (7) (FIG. 13) from the left and right deflection angle data of the mirror and the taught left and right height data, and the left and right imaging optical system control unit 7 To control the zoom lenses of the left and right imaging optical systems 3b and 3b ′ to match the desired left and right magnification (ST166). The inspection area image formed on the light receiving surfaces of the image pickup devices 3a and 3a 'in this way is picked up by the image pickup devices 3a and 3a' according to an image pickup command from the left and right image pickup control unit 8, and the image processing arithmetic unit 10 makes an image. Data is obtained (ST167), pixel data distortion is corrected, and three-dimensional shape measurement calculation is performed (ST16).
8) Calculate quality determination parameters (ST16)
9).

Using the quality judgment algorithm stored in the memory 12, the CPU 11 automatically judges the quality of the inspection object from this parameter (ST170).
If necessary, the judgment result data is stored in the memory 12,
Alternatively, it is displayed on the display unit 16 or is output to the output unit 14 such as a printer (ST171). If ST172 becomes NO according to the teaching data, the flow enters the circulation cycle (route A), moves to the next inspection area and repeats the same inspection flow, and if the automatic inspection of all the taught inspection areas is completed, ST172 becomes YES (route B), and the inspection target is excluded from the fixed position (ST17).
3), the inspection is completed. Further, the inspection results stored in the memory 12 can be collectively sent for each lot to the other station through the communication unit 15 and used for quality control or the like (steps are not shown).

Next, an illumination / imaging / display device according to an eighth embodiment of the present invention will be described. In the eighth embodiment, when the observation area of the object is optically positioned and imaged by the deflection of the imaging viewing angle, the observation area is illuminated with a light beam having an angle corresponding to the imaging viewing angle, that is, the light receiving angle, and the illumination is performed as such. It is an illumination / imaging / display device that images a target observation region and displays the image. If the light source is in place, it will illuminate the observation area at a constant angle. Therefore, when the observation area is positioned by deflecting the imaging viewing angle, the angle formed by the illumination angle and the viewing angle is inevitably set in order to optically position the area at different positions with the viewing angle corresponding thereto. It depends on the position of the observation area. If the position of the same object changes, the areas, shapes, and brightness of the bright and dark parts change, so that the scenes look different, and therefore different images, that is, images are captured. In that case, a faithful display image cannot be obtained due to the visual inspection, and accurate image measurement cannot be performed for many shape measurement methods. In the case of shape measurement, especially when the surface is specular or semi-specular, the incident light beam on the object is specularly reflected by the surface, and the reflected light beam mainly advances only in the specular direction, so the viewing angle is specular. The object will be a significantly low-brightness image unless it matches the direction,
Observation or image measurement becomes almost impossible.

Therefore, the present embodiment is an illumination / imaging / display device having an illumination function for illuminating an object at an angle that follows the viewing angle, thereby realizing illumination in which the viewing angle and the illumination angle are always kept at desired angles. When illuminating an object with a light flux having an angle that follows the viewing angle, there are roughly the following methods for giving the illumination angle. (1) Specular reflection direction imaging method: The incident angle of the illumination light flux is the same as the viewing angle in the azimuth angle, the 180 ° rotation direction, and the zenith angle is the direction in which the viewing angle is the regular reflection angle. It is expressed by the angle seen from: The same applies below).

(2) Frontal reflection direction imaging method: The incident angle of the illumination light flux is the same as the viewing angle for both the azimuth angle and the zenith angle. (3) Declination incidence imaging method: The incident angle of the illumination light flux is a direction having a certain angular difference from the viewing angle for both the azimuth angle and the zenith angle. (4) Multiple specular reflection direction imaging method: The azimuth angle is the same direction as the viewing angle, or the azimuth angle is the 180 ° rotation direction, and the zenith angle is each direction in which the viewing angle is the specular reflection angle.

The above four methods provide different scene images of different objects depending on the illumination, and therefore have essentially different meanings in terms of image acquisition technology and image measurement technology. Of these, (1) to (3) mainly assume a white single light source, and (4) assumes multiple illumination due to time difference or light wavelength difference. White illumination is used for image observation or image measurement, and multiple illumination is often used for image measurement. In the present embodiment, since the arithmetic expressions according to these methods are stored in advance, the optimum method is selected according to the attribute and purpose of the object when observing or measuring the object.

The configuration and function of the eighth embodiment will be described below with reference to FIG. FIG. 27 shows the overall configuration of the object 1, which is set at a fixed position on the stage 2, and the mirror deflection control unit 7 controls the light deflecting / reflecting devices 4a and 4b to select a light receiving angle. The imaging optical system control unit 8 controls the imaging optical system 3b to form an image of the observation region of interest on the imaging device 3a, and the imaging control unit 9 controls the imaging device 3a to form the observation region image. Image. These optical path systems, their control systems, and their control methods are shown in FIG. 8 (optical path system diagram) and FIG.
It is basically the same as the third embodiment of the present invention shown in (Overall configuration). The eighth embodiment further includes a light source control unit 11 and a lighting device 5, and the observation region is 1, 1'on the stage,
When the light source control unit 11 is located at a position different from 1 ", the light source control unit 11 controls the illumination device 5 to project the respective illumination light fluxes by the light sources 5a, 5a ', 5a" corresponding to the area position. Here, the control function of the light source control unit 11 is
The CPU 12 calculates the illumination angle of each address from the target address data stored in the memory 13, and the light source control unit 11 changes the light source position of the illumination device 5 via the system control unit 10. This illumination device 5 uses a two-dimensional image display device, which is a cathode ray tube (CR
T).

In this embodiment, the CPU 12 or the illumination angle of each address is calculated from the target address data, and the light source control units 11 to N are operated via the system control unit 10.
The white pattern as shown in, for example, FIG. 28 or 29 is displayed on the screen of the CRT which is the illumination device 5 on the TSC line with a black background, and this is used as a moving light source. The function of this CRT is that a liquid crystal display (LCD) also has a two-dimensionally arranged light emitting diode (LED).
Alternatively, a so-called miniature ball or other single light source collective lighting device can achieve the purpose.

Further, as shown in FIG. 30, the illuminating device 5 inserts a half mirror H in the optical path system of the third embodiment of FIG. 8 to guide the luminous flux emitted from the illuminating device S (5) in the reverse direction,
The observation area of interest may be illuminated. In this method, since the illumination light flux passes through the viewing angle deflection optical path, it is inevitably subjected to the same deflection as the viewing angle, and it is not necessary to move the pattern light source like the illumination device 5 in FIG. The lighting device H may be a point light source. However, it goes without saying that a pattern light source may be used, but although the angle selection becomes narrower due to its movement, the illumination angle can be deflected, and depending on the purpose of observation and the nature of the target, the angle range can be changed. Sometimes it's enough.

The operation steps of this embodiment will be described below with reference to FIG.
It will be described according to the flowchart of First, I of the observation target
D is input from the input unit 14 (ST181). Next, the observation target is set at a fixed position (ST182), the relationship to be used now is selected from among a plurality of illumination methods (described above) stored in advance, and the code is input (ST18).
3). Then, the apparatus automatically selects the imaging viewing angle, that is, the light-receiving angle from the position data of the observation region which is already stored in the memory 13 by the teaching (ST184).

Similarly, from the position data, the CPU 12 calculates the illumination angle based on the above-mentioned selected correspondence (ST185), and the light source control unit 11 controls the illumination device 5 via the system control unit 10. The light source image is displayed on the screen, the imaging control unit 9 controls the imaging device 3a to image the observation region of interest, and the image is displayed on the screen of the display unit 16 (ST18).
6). Therefore, the observer observes the image (ST18
7) The visual observation result is input from the input unit 14 (ST188). When the visual observation of all the taught observation regions is completed, ST189 becomes YES and the target is excluded from the fixed position (ST190), and the entire observation work is completed. If the result is necessary, the output unit 15 outputs data such as printout.

Next, as a ninth embodiment of the present invention, description will be given of an inspection apparatus which illuminates an inspection object with a light flux having an angle corresponding to the imaging visual angle and uses the imaged and displayed image for visual inspection.
A mounting quality inspection device that inspects the mounting posture and soldering of electronic components mounted on a printed wiring board will be described as an example. FIG. 32 is an overall configuration diagram thereof, and FIG. 33 is a chart diagram showing an inspection flow. The overall configuration of the device is basically the same as that of the illumination / imaging / display device of FIG. 27, but since the communication unit 16 is provided, teaching data of an inspection step is received from another computer or the like, Further, the difference is that the inspection result data can be transmitted to another computer or the like. The operation steps of the inspection are as shown in FIG. 33. First, the apparatus is set to the inspection mode (ST191), the ID of the inspection target is input from the input unit 14 (ST192), and the inspection target is set to the fixed position (ST193). ). Next, the relationship to be used now is selected from the plurality of illumination methods stored in the memory (described above), and the code is input (ST194). Then, the apparatus automatically selects the imaging viewing angle, that is, the light-receiving angle from the position data of the inspection area already stored in the memory 13 by the teaching (ST195).

Next, similarly, from the position data, the CPU 12 calculates the illumination angle based on the above selected correspondence (ST196), and the light source control unit 11 controls the illumination device 5 via the system control unit 10. The light source image is displayed on the screen, the imaging control unit 9 controls the imaging device 3a to image the observation region of interest, and the image is displayed on the screen of the display unit 17 (ST19).
7). Then the operator observes the image (ST
198), and inputs the inspection result from the input unit 14 (ST199). Upon completion of visual inspection of all the inspected inspection areas, ST200 becomes YES and the target is excluded from the fixed position (ST201), and the entire observation work is completed. If necessary, the output unit 15 can output data such as printout, and the communication unit 16 can transmit the result to another computer or the like.

Next, as a tenth embodiment of the present embodiment, the inspection object is illuminated with a light flux having an angle corresponding to the imaging viewing angle, imaged and image data is output, and the quality of the object is judged by a quality judgment algorithm. The automatic inspection device will be described. A mounting quality inspection device that automatically inspects the mounting posture and soldering of electronic components mounted on a printed wiring board will be described as an example. FIG. 34 is a diagram showing the overall construction of this embodiment, and FIG. 35 is a flow chart showing the steps of the inspection. The illumination device 5 of FIG. 34 uses a two-dimensional image display device, which is a cathode ray tube (CRT).

In this embodiment, the CPU 13 calculates the illumination angle of each address from the target address data, and the light source control units 11 to N are operated via the system control unit 10.
An annular color pattern as shown in, for example, FIG. 36 is displayed on the screen of the CRT which is the lighting device 5 on the TSC line, and this is used as a moving light source. This pattern corresponds to the above-mentioned method (4), and is a method of converting a three-dimensional shape of an unknown free-form surface into a color image and measuring the image. That is, it can also be applied to three-dimensional shape measurement of a solder joint portion of an electronic component. In response to this color illumination, the image pickup device 3a uses a color image pickup element, and the image processing arithmetic unit uses a color image processing arithmetic unit. However, the pattern in FIG. 36 is not necessarily a color pattern, and each annular pattern is displayed in white in a black background, and this is displayed staggered so that the monochrome imaging device 3a captures an image at each timing. The image data obtained by the above may be stored in the monochrome image arithmetic processing unit 12 as a memory and combined. Further, while the color pattern of FIG. 36 is for measuring the inclination vector of the target curved surface, FIG. 37 is the same as the color pattern, but is a radial pattern and is for measuring the azimuth vector of the target curved surface. These patterns can be selected according to the purpose of image measurement.

The function of this apparatus will be described below in the order of the inspection steps. First, set the device in inspection mode (S
(T211), the ID of the inspection target printed wiring board is input from the input unit 14 (ST212), and the printed wiring board is set at a fixed position (ST213). Next, the relationship to be used now is selected from the plurality of illumination methods stored in the memory (described above), and the code is input (ST214). Then, the apparatus automatically selects the imaging viewing angle, that is, the light-receiving angle from the position data of the inspection area already stored in the memory 13 by the teaching (ST215).

Next, similarly, from the position data, the CPU 13 calculates the illumination angle based on the above selected correspondence (ST216), and the light source control unit 11 controls the illumination device 5 via the system control unit 10. , The color pattern of FIG. 36 is displayed on the screen, the imaging control unit 9 controls the color imaging device 3a to image the inspection area of the target printed wiring board, and outputs the color image signal to the image processing arithmetic unit 12. To obtain image data (ST
217). The CPU 13 uses the quality determination algorithm stored in the memory 14 to automatically determine the soldering quality in the inspection area from the image data (ST219),
The judgment result data is displayed on the display unit 18, or is output from the output unit 16 in the form of printout or the like, or is stored in the memory 14 and transmitted from the communication unit 17 to another production monitoring station or the like in a lot unit. It is possible (ST220). When the inspection of all the inspection areas of the target printed wiring board is completed, ST221 becomes YES and the target printed wiring board is excluded from the fixed position (ST2
22), all inspection work is completed.

In the following eleventh embodiment, the image pickup object region positioning image pickup device according to claim 1 is provided with a positioning device for mechanically positioning the object, and images the object at different positions,
It is a shape measuring device that measures a three-dimensional shape of a target from those image data. Normally, the principle of triangulation is used for three-dimensional shape measurement, but for that purpose, binocular vision method is adopted, or in the case of monocular vision method, surface shading measurement (Shape from Shading) method and object rotation. Laws have been advocated. The eleventh embodiment employs a method of positioning an object at a minimum of two positions and capturing an image (the number of positions may be two or more depending on the purpose). The three-dimensional shape measuring principle of this method is also called a monocular multiple position imaging method, and is a method in which the imaging target region positioning imaging device according to claim 1 images at different viewing angles at different positions. Therefore, if the image data at different positions are used comprehensively, it follows that the triangulation method principle, which belongs to the monocular method, is complied with. FIG. 25 shows the positional relationship of the triangulation method calculation of FIG. 24 simply replaced. That is, if the deflection mirror is in a fixed position and the object O is at the position i, the first imaging is performed, and when the object O ′ is moved to the position i ′, the second imaging is performed. , The angles formed by the mirror and the target O and the target O ′ are α and β, and the triangulation calculation of the calculation formula (8) is established as in FIG. Therefore, three-dimensional shape measurement is realized.

FIG. 38 shows the overall configuration of the eleventh embodiment.
The measurement steps are shown in the flowchart of FIG. 39. The function of this embodiment will be described following the measurement steps. First, the device is set to the measurement mode (ST23
1) When the target ID is input from the input unit 13 of FIG. 38 (ST232) and the target is set in the apparatus, the stage 2 positions the target at position 1 (ST233).

The device, according to the teaching contents stored in memory,
In response to a control signal from the system control unit 9, the mirror deflection control unit 6 controls the deflection mirror devices 4a and 4b to automatically select the light receiving angle (ST234), and the imaging optical system control unit controls the imaging optical system 3b. Automatic focusing (ST235) and automatic magnification (ST236) are performed, the imaging control unit 8 controls the imaging device 3a to capture an image of the object, and the image processing arithmetic unit 10 processes the image signal to obtain the image signal. The stored image data is stored in the memory 12 (ST237).

Next, the stage 2 positions the object at the position 1 ', and the object at this position is moved to S through the route (A).
The flow from T234 to ST237 is repeated. Recall the image data at positions 1 and 1'from memory,
2 using the arithmetic expression (8) in FIG.
The CPU 11 performs triangulation method calculation to calculate three-dimensional shape data (ST241).

The measurement data can be displayed on the display unit 16 or printed by the output unit 14.
It can be output, or can be stored in the memory and transmitted from the communication unit 15 to another computer or the like (ST2).
42). Then remove the target from the stage (ST
243), and ends the measurement. In the present embodiment, the stage for mechanically positioning the object may be one-dimensional, two-dimensional, or three-dimensional with Z-axis, depending on the purpose of measurement, in terms of triangulation. In principle, the image pickup device 3a may be a monochrome camera or a color camera according to the purpose. In this description, the position where the object is positioned is described as two positions. However, in order to further improve the reliability of the image information, it is theoretically possible to position the target at two or more positions and collect the image data. Needless to say, the meanings of are completely equivalent.

The following twelfth embodiment is a measuring device provided with a pair of left and right imaging target area positioning imaging devices according to claim 1 in the eleventh embodiment. Figure 4 shows the overall configuration.
0 and the measuring steps are shown in the flowchart of FIG. In this embodiment, the stage 2 in FIG. 40 positions the target at position 1 and position 1 ′ and collects the target image data at each position, but the measurement is performed in exactly the same procedure as in the eleventh embodiment. The image pickup target area positioning image pickup device according to claim 1 obtains image data simultaneously on the left and right at each position, and stores the image data in the memory 12 to use for triangulation calculation operation.
The point that dimensional shape measurement is performed is a different point from the previous embodiment.

This left-right viewing imaging method is for measuring the shape of an object having a three-dimensional shape at the same time on the front and back sides without rotating. For example, as shown in FIG.
The omnidirectional surface of the target can be observed simply by moving to the position 1'dimensionally, and as a result, the three-dimensional shape information of the target can be obtained. Since the other elements are the same as those in the eleventh embodiment, the description thereof will be omitted.

Next, as a thirteenth embodiment, an inspection apparatus will be described in which the mechanical object positioning device is applied to the automatic inspection apparatus having the viewing angle corresponding angle illumination function described in the tenth embodiment.
One example of this embodiment is an automatic inspection device for detecting cracks, chips, cracks, or the like of a beer bottle or one bottle, or a printing error in a juice can, a milk pack, or the like. Taking a bottle as an example, the inspection needs to sense the mouth, neck, abdomen, and bottom of the bottle in all directions. Therefore, the conventional inspection apparatus has to be equipped with a large number of cameras around the bottle so that the blind direction does not exist. It meant a high-cost device without rectification.

In addition, since these production lines generally carry conveyors at a very high speed, their inspections are required to have a considerably high speed. In this embodiment, as shown in the overall configuration diagram of FIG. 42 and the inspection flowchart of FIG. 43, omnidirectional sensing is realized by simply moving the inspection object on a straight line, and the conveyor is one-dimensionally The function is suitable for moving subjects. Further, if necessary, if a vertical positioning mechanism for moving in the Z-axis direction is prepared, sensing in the zenith angle direction is also possible.

Further, in this embodiment, since the galvanometer mirror is adopted in the deflection mirror device 4 of FIG. 42, 100
A vector speed of 0 degrees / second or more is obtained, and automatic inspection can be performed without disturbing the line flow of a high-speed moving object. For such omnidirectional image sensing, it is particularly important to illuminate with a light flux having an angle corresponding to a change in the viewing angle, and the viewing angle and the illumination angle must always be fixed to a fixed geometrical optical positional relationship. It is essential to illuminate at an angle that follows the viewing angle.

In FIG. 42, position 1 of the inspection object,
The light source positions of the illuminating device 5 with respect to 1 ′ and 1 ″ are 5a,
5a ′, 5a ″, each illumination is performed, and as shown in FIG. 43, defect detection is performed at each position and the result is stored in memory,
After the inspection of all positions is completed, the result stored in memory is integrated to determine the quality of the subject. Next first
The fourth embodiment is an inspection apparatus including an imaging station for imaging an inspection target and transmitting the image data thereof, and an image display station for receiving the image data and collectively reproducing and displaying the images. , An inspection device that enables an inspector who is located in a place different from the production line and has a high degree of specialized inspection skill to inspect using a professional judgment based on an image.

The overall block diagram of the image display station is
This is similar to the overall configuration diagram of the third embodiment shown in FIG. The function different from that of the automatic inspection apparatus of the third embodiment is that, in this imaging station, the image data obtained by imaging the inspection object is stored in the memory 12 of FIG. 9 and transmitted to the image display station by the communication unit 15. That is the point.
In this transmission method, the analog image signal may be transmitted as it is, or may be transmitted after being converted into digital image data in the image processing arithmetic unit 10.

Further, instead of transmitting the image data each time the image is picked up, a method of storing a large number of image data to be inspected and storing them all at once may be adopted. The transmission medium may be a network such as a LAN, a telephone line, a radio, or any of them. In addition, since the amount of information to be transmitted and the required time are enormous when image data is transmitted to all the inspection objects one by one, only the image data of the inspection object that has been determined to be defective in the automatic inspection phase as in the fifth embodiment. May be stored in the memory 12 and transmitted.

In this case, if 90% of the inspection objects are judged to be non-defective, the load on the professional inspector at the image display station becomes 1/10. Needless to say, the related attribute data such as the ID data is transmitted together with the image data. The image display station receives the transmitted image data and related attribute data, and collectively displays the image. The overall block diagram is as shown in FIG.

The image and other data transmitted from the image pickup station are stored in the memory 3, and the image is displayed on the screen of the display unit 8 by the demand input from the input unit 5. At this time, what type of batch display is input from the input unit 5 and is instructed by the teaching data stored in the memory 3. An example of collective display is shown in FIG.

The inspector visually observes these display images to make a pass / fail judgment, inputs the result from the input unit 5, and prints out the obtained inspection data from the output unit 6 or the display unit 8. , Or stored in the memory 3 and transmitted from the communication unit 7 to another station. Furthermore, C
It is also possible to perform image data calculation by the PU 2 to form a computer graphics image of the sample into an image whose quality can be determined at a glance, and then display the image on the display unit 8 and provide it to the inspector for observation.

The final fifteenth embodiment relates to a manufacturing process in which a semi-finished product is completed by repairing and correcting a portion which is finally determined to be defective while performing visual image re-inspection by the inspection device of the fifth embodiment. explain. FIG. 46 shows a manufacturing line in which an object solders an electronic component to a printed wiring board. When the printed wiring board is carried into the solder printing machine 21 at the left end, the cream solder is applied by screen printing there, carried into the chip mounting machine 22 by the belt conveyor, the chip parts are mounted, and then the odd-shaped part mounting machine 23. Deformed parts are mounted by being transported to.

When all the scheduled parts have been mounted, they are carried into the reflow furnace 24, the cream solder is melted, and the soldering is completed. Soldering printed wiring board
It is sent to the automatic inspection device 25 according to the present invention to inspect the presence or absence of electronic components and the quality of soldering. The printed wiring board which has undergone the automatic inspection step in the automatic inspection device 25 enters the visual reinspection step next in the image display device and the visual reinspection processing unit 26. At the same time, the position data of the automatic inspection failure determination portion stored in the memory is called as the reinspection position data, the positioning according to the present invention is performed again, and the image is displayed as the reinspection required portion.

Therefore, the operator visually re-inspects the displayed image and confirms that it is a true defective portion (verification), and repairs and corrects the defective portion of this semi-finished printed wiring board on the spot. Execute immediately. FIG. 47
In the case where the inspection apparatus includes the repair table 19, and the image visual re-inspection is determined to be defective, the inspection target 1 is the repair table 19
To be repaired or corrected as the repair target 18.

The operation steps in that case are as shown in the flow chart of FIG. 48. Every time the operator judges a defect by visual inspection of the image (ST296), repair and correction of the portion is carried out (ST297), and the printed wiring board is mounted again. When it is returned to the fixed position 2 on the platform, the next re-inspection location is optically positioned and imaged / displayed. In this way, the mounted printed wiring board that has undergone the re-inspection and the repair and correction so that the component mounting states of all parts are perfect is finished as a product and shipped as a finished product. Inspection and repair and correction are thus inextricably linked, and are incorporated into the manufacturing process as an essential step.

[0101]

According to the present invention, an optical positioning technique is realized when an object is selected and imaged. Therefore, it is not necessary to mechanically position the object or the image pickup device as in the prior art, and high speed is achieved. We were able to provide technology that is advantageous not only for precise positioning but also for safety. Furthermore, we have proposed a technology to control and prevent the occurrence of coordinate distortion errors due to this technology, and a method to correct it by calculation, so we have applied technology to inspection of printed wiring boards, etc., and three-dimensional shapes. The application technology to the measuring device becomes possible, and it becomes easier to realize the inspection device and the measuring device which are simpler and have a smaller volume than the conventional technology, and thus the possibility of cost reduction is opened.

The effects of the present invention will be specifically described below with reference to the claims. According to the invention of claim 1, the imaging viewing angle determining means directs the imaging viewing angle in the direction of the object, the imaging means forms an image of the object at a necessary magnification, and the imaging means takes an image, thereby performing optical imaging. Target area positioning imaging technology has been realized. The imaging viewing angle determining means is an optical device including a mirror device that deflects and reflects a light flux coming from an object, and the image forming means is a lens optical device that forms an image by controlling a target image to a necessary magnification. Since the image pickup means picks up the image to be formed, the basic technique of the present invention has been realized.

According to the invention of claim 2 and the invention of claim 3,
Since the optical deflecting mirror device, which is the central technology of the image pickup viewing angle determining means, is adopted, the effect of realizing a specific configuration can be obtained. According to the invention of claim 4, the technology is described so as to illuminate the object at an angle that follows the imaging viewing angle. Therefore, even if the viewing angle changes, the object illuminated under the same illumination condition is always imaged and its image is displayed. Can be displayed.

According to the invention of claim 5, the occurrence of the coordinate distortion error is controlled and prevented beforehand, and is corrected by calculation. Therefore, the imaged object image is displayed for visual inspection. We have realized an inspection device that has the functions to provide. According to the invention of claim 6, since the lighting method is provided,
Even if the viewing angle is changed, the inspection object illuminated under the same illumination condition is always imaged, and the image can be displayed for visual inspection.

According to the seventh aspect of the present invention, since the pair of imaging target area positioning imaging devices is provided, it is possible to perform binocular imaging of the inspection object, display the image, and provide the binocular image for visual inspection. . According to the invention of claim 8, since the calculation means and the determination means are provided, a quality pass / fail determination parameter of the inspection target is calculated using the image signal of the inspection target output from the imaging means, and the parameter is used. The quality can be judged.

According to the invention of claim 9, since the inspection device according to claim 6 comprises the calculating means and the judging means, the inspection object is illuminated with the illumination of the viewing angle following angle, and The quality of the inspection object can be automatically inspected from the image data. According to the invention of claim 10, it is possible to automatically inspect the inspection target mechanically positioned by the positioning means by illuminating it at an angle following the viewing angle.

According to the eleventh aspect of the present invention, a pair of image pickup object region positioning image pickup devices are provided, and the inspection object can be binocularly picked up and image quality can be automatically judged from the binocular image signal.
According to the invention of claim 12, the address data of the object determined to be defective by the automatic inspection is stored in memory, the defective determination object is repositioned and imaged at the time of the reinspection, and the image is displayed as an image for visual reinspection. Can be provided for.

According to the thirteenth aspect of the present invention, an image pickup section for picking up an image of an inspection object and storing the image data and then transmitting the image data is displayed. Since the inspection device is composed of the display unit, the collective image visual inspection can be realized at a different timing in a place different from the manufacturing line or the like. According to the invention of claim 14, the mechanical positioning means positions the same target at a plurality of positions, picks up an image by the image pickup target area positioning image pickup device, and measures the three-dimensional shape of the target using the plural image data. A shape measuring device is realized.

According to the fifteenth aspect of the present invention, the mechanical positioning means positions the same target object, the pair of image pickup target area positioning image pickup devices picks up images in the left and right directions, and uses the left and right image data to make a three-dimensional image of the object. A shape measuring device that measures a shape is realized. This technique has the effect of eliminating the need for complicated procedures such as rotation of the object in three-dimensional shape measurement.

Finally, according to the sixteenth aspect of the invention, the semi-finished product flowing through the manufacturing line is automatically inspected by the inspection apparatus of the twelfth aspect, and the inspection target for which the quality defect determination has been made is imaged again. A product manufacturing method has been realized in which the operator displays it and visually inspects it again to confirm a true defective object, repairs and corrects it, and then ships it from the line as a finished product.

[Brief description of drawings]

FIG. 1 is a diagram showing an example of an optical device including a light deflecting mirror device of an image pickup target region positioning image pickup device and an imaging lens optical device for determining a magnification according to the present invention.

FIG. 2 is a diagram showing an example of a light deflection mirror device of an image pickup target region positioning image pickup device according to the present invention.

FIG. 3 is a diagram showing a catoptric function of a light deflecting mirror device according to the present invention.

FIG. 4 is a diagram showing an overall configuration of a monitoring device according to a first embodiment of the present invention.

FIG. 5 is a flowchart showing steps in a teaching mode of the monitoring apparatus according to the first embodiment.

FIG. 6 is a flowchart showing steps in an observation mode of the monitoring device according to the first embodiment.

FIG. 7 is a diagram showing an overall configuration of a second embodiment monitoring apparatus of the present invention.

FIG. 8 is an optical device including a light deflection mirror device of an image pickup target area positioning image pickup device of an inspection device according to a third embodiment of the present invention;
It is a figure which shows the imaging lens optical device which determines magnification.

FIG. 9 is a diagram showing an overall configuration of the inspection apparatus of the third embodiment.

FIG. 10 shows the height and deflection angle of a light deflection mirror device.
It is a figure which shows the change of a focal length, and a calculation formula.

FIG. 11 is a diagram showing a plane projection distortion error due to mirror deflection of the light deflecting mirror device.

FIG. 12 is a view for controlling the mirror deflection of the light deflecting mirror device so as to control the deflection angle so as to draw Cartesian coordinates on a target plane.
It is a figure explaining the arithmetic expression which carries out a back calculation, and its relationship.

FIG. 13 is a view showing the height and deflection angle of a light deflection mirror device,
It is a figure which shows the change of an image size and an arithmetic expression.

FIG. 14 is a flowchart showing steps in a teaching mode of the inspection apparatus according to the third embodiment.

FIG. 15 is a flowchart showing steps in an inspection mode of the inspection apparatus of the third embodiment.

FIG. 16 is a diagram showing an overall configuration of an inspection device according to a fourth embodiment of the present invention.

FIG. 17 is a flowchart showing steps in an inspection mode of the inspection apparatus of the fourth embodiment.

FIG. 18 is a flow chart showing steps in the automatic inspection mode of the inspection device according to the fifth embodiment of the present invention.

FIG. 19 is a flowchart showing steps in a visual re-inspection mode of the inspection apparatus of the fifth embodiment.

FIG. 20 is a diagram showing an overall configuration of an inspection device according to a sixth embodiment of the present invention.

FIG. 21 is a flowchart showing steps in a teaching mode of the inspection apparatus according to the sixth embodiment.

FIG. 22 is a flowchart showing the steps of the inspection mode of the inspection apparatus of the sixth embodiment.

FIG. 23 is a diagram showing an overall configuration of a seventh embodiment inspection apparatus of the present invention.

FIG. 24 is a diagram showing the principle of triangulation by binocular vision in the inspection apparatus according to the seventh embodiment.

FIG. 25 is a diagram showing the principle of triangulation by the target double position of the inspection apparatus of the twelfth embodiment of the present invention.

FIG. 26 is a flowchart showing the steps of the inspection mode of the inspection device of the seventh embodiment.

FIG. 27 is a diagram showing an overall structure of an illumination / imaging / display device according to an eighth embodiment of the present invention.

FIG. 28 is a diagram showing an example of a moving light source pattern of a variable illumination angle light source of the illumination / imaging / display device according to the eighth embodiment.

FIG. 29 is a diagram showing another example of the moving light source pattern of the illumination angle variable light source of the illumination / imaging / display device of the eighth embodiment.

FIG. 30 is a diagram showing an example of an optical path of a variable illumination angle light source of the illumination / imaging / display device of the eighth embodiment.

FIG. 31 is a flowchart showing the observation steps of the illumination / imaging / display device according to the eighth embodiment.

FIG. 32 is a diagram showing an overall configuration of an inspection device according to a ninth embodiment of the present invention.

FIG. 33 is a flowchart showing the steps of an inspection mode of the inspection apparatus of the ninth embodiment.

FIG. 34 is a diagram showing an overall configuration of an inspection device according to a tenth embodiment of the present invention.

FIG. 35 is a flow chart showing the steps of an inspection mode of the inspection apparatus of the 10th embodiment.

FIG. 36 is a diagram showing an example of a moving light source pattern of a variable illumination angle light source of the inspection apparatus of the tenth embodiment.

FIG. 37 is a view showing another example of the moving light source pattern of the illumination angle variable type light source of the inspection apparatus for the tenth embodiment.

FIG. 38 is a diagram showing an overall configuration of a shape measuring apparatus according to an eleventh embodiment of the present invention.

FIG. 39 is a flowchart showing steps in the measurement mode of the shape measuring apparatus according to the eleventh embodiment.

FIG. 40 is a diagram showing an overall configuration of a shape measuring apparatus according to a twelfth embodiment of the present invention.

FIG. 41 is a flowchart showing steps in a measurement mode of the shape measuring apparatus according to the 12th embodiment.

FIG. 42 is a diagram showing the overall structure of a thirteenth embodiment inspection apparatus of the present invention.

FIG. 43 is a flowchart showing steps in an inspection mode of the inspection apparatus of the thirteenth embodiment.

FIG. 44 is a diagram showing the overall configuration of an image display station of a fourteenth embodiment inspection apparatus of the present invention.

FIG. 45 is a view showing a batch reproduction display screen of the image display station of the inspection apparatus of the fourteenth embodiment.

FIG. 46 is a diagram showing a production line in which electronic components are mounted on a printed wiring board and reflow soldering is performed.

FIG. 47 is a diagram showing an overall structure of a fifteenth embodiment of the present invention.

FIG. 48 is a flowchart showing the operation of the fifteenth embodiment.

[Explanation of symbols]

 P sample target Mφ plane mirror Mθ plane mirror L imaging optical system lens I image sensor

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Internal reference number FI Technical display location H04N 7/18 G06F 15/62 400 H05K 13/04 15/64 C (72) Inventor Hideki Kiji 261, No. 705, Nagara, Hayama-cho, Miura-gun, Kanagawa 261 (72) Inventor Atsushi Hayashi Tanaka-cho, Joshipuku-dori, Kamigyo-ku, Kyoto 475

Claims (16)

[Claims] 1. An imaging viewing angle determining means for selecting a light-receiving angle to an angle for receiving a light flux arriving from the object, an imaging means for imaging a target image, and an imaging means for determining the viewing angle for imaging the object. An image forming means for forming an object image and for determining an image pickup magnification is provided, and an image pickup target area is optically positioned,
An image pickup target area positioning image pickup apparatus for picking up a target image, wherein the image pickup viewing angle determining means includes an optical device including a mirror device for deflecting and reflecting the light flux, and a light flux from the imaging area by a viewing angle designating signal from the viewing angle control means. And a mirror deflection angle determining means for determining a mirror deflection angle at an angle for reflecting the light toward the image forming means, and the image forming means determines an image pickup magnification according to a magnification designation signal from the image forming control means. An image pickup target region positioning image pickup device, which is a lens optical device having a. 2. The image pickup target area positioning according to claim 1, wherein the image pickup viewing angle determining means is an optical device including one optical deflection mirror device, and the optical deflection mirror device is an omnidirectional light receiving deflection mirror device. Imaging device. 3. The image pickup viewing angle determining means is an optical device including two optical deflection mirror devices, and the two optical deflection mirror devices are arranged such that mirror rotation axes are orthogonal to each other in a projection manner. 2. The image pickup target area positioning image pickup device according to claim 1, wherein the two light deflection mirror devices are driven in association with each other by a view angle designation signal to deflect the light receiving angle to a designated viewing angle. 4. An imaging viewing angle determining means for selecting a light receiving angle to an angle for receiving a light flux arriving from the object to determine a viewing angle for imaging the object, and an imaging magnification for forming a target image on the imaging means. The image forming means that determines the illumination angle and the illumination means that can change the illumination angle by illuminating the object and deflecting the light flux from the light source at a fixed position, or by changing the light source position. Illuminating means for obtaining and illuminating control for controlling the illuminating means so as to illuminate the object at an angle corresponding to the imaging viewing angle according to the input value input accompanying the position data of the imaging target area or the value calculated by the computing means. An imaging target area positioning imaging device comprising: a means and an imaging means for imaging the positioned object. 5. An imaging viewing angle determining means for selecting a light-receiving angle to an angle for receiving a light flux arriving from the object in order to determine a viewing angle for imaging the object, and a first optical system for reducing and forming an inspection object image. An image forming means including a second optical system for changing the magnification of the image to be inspected, and a light receiving angle selection of the image pickup viewing angle determining means is controlled by a viewing angle designating signal so as to conform to a rectangular grid of the plane orthogonal coordinate to be inspected. A visual angle control means for selecting an imaging visual angle, and a focal length adjustment signal to move the image forming means along the optical axis to eliminate a shift in the focal length generated according to the light receiving angle of the visual angle determining means, and By the magnification designation signal,
An imaging control unit that adjusts the second optical system to eliminate a magnification error that occurs depending on a light receiving angle of the imaging viewing angle determining unit and forms a target image at a predetermined magnification, and a positioned inspection target. An inspection apparatus comprising: an image pickup unit that picks up an image of the image and a display unit that displays the picked-up image of the inspection target. 6. An imaging viewing angle determining means for selecting a light-receiving angle to an angle for receiving a light flux arriving from the object to determine a viewing angle for imaging the object, and a light flux from a light source at a fixed position for illuminating the inspection object. Is an illumination means capable of changing the illumination angle by deflecting the light source, or an illumination means capable of changing the illumination angle by moving the position of the light source, and an input input accompanying the position data of the imaging target area. Illumination control means for controlling the illumination means so as to illuminate the object at an angle corresponding to the imaging viewing angle according to the value or the value calculated by the computing means; a first optical system for reducing and forming an inspection object image; and an inspection object An image forming means including a second optical system for changing the magnification of the image, and a light receiving angle selection of the image pickup viewing angle determining means are controlled by a view angle designating signal, and an image is picked up according to a rectangular grid of a plane orthogonal coordinate to be inspected. A visual angle control means for selecting a visual angle, and a focal length adjustment signal to move the image forming means along the optical axis to eliminate a shift in the focal length generated according to the light receiving angle of the visual angle determining means, and a magnification. Depending on the specified signal,
An imaging control unit that adjusts the second optical system to eliminate a magnification error that occurs depending on a light receiving angle of the imaging viewing angle determining unit and forms a target image at a predetermined magnification, and a positioned inspection target. An inspection apparatus comprising: an image pickup unit that picks up an image of the image and a display unit that displays the picked-up image of the inspection target. 7. An image pickup viewing angle determining means for selecting a light receiving angle to an angle for receiving a light flux arriving from the object and a first image forming apparatus for reducing an inspection object image in order to determine a viewing angle for imaging the object. An image forming unit including an optical system and a second optical system for changing the magnification of an image to be inspected, and a viewing angle designation signal are used to control the light receiving angle selection of the imaging / viewing angle determining unit to form a rectangular grid of inspected plane orthogonal coordinates. A visual angle control means for selecting the imaging visual angle so as to conform, and a focal length adjustment signal move the image forming means along the optical axis to eliminate the shift of the focal length generated according to the light receiving angle of the visual angle determining means. And a magnification designation signal to adjust the second optical system to eliminate a magnification error that occurs according to the light receiving angle of the imaging viewing angle determining means, and form a target image at a predetermined magnification. Positioned and positioned An image pickup means for picking up an image of an inspection object, and a pair of image pickup object area positioning image pickup devices, and a display means. The display device is capable of displaying a binocular vision image and providing the image for visual inspection. 8. An imaging viewing angle determining means for selecting a light-receiving angle to an angle for receiving a light flux arriving from the object in order to determine a viewing angle for imaging the object, and a first optical system for reducing and forming an inspection object image. An image forming means including a second optical system for changing the magnification of the image to be inspected, and a light receiving angle selection of the image pickup viewing angle determining means is controlled by a view angle designating signal so as to conform to a rectangular grid of the plane to be inspected rectangular coordinates. A viewing angle control unit for selecting an imaging viewing angle, and a focal length adjustment signal to move the image forming unit along an optical axis to eliminate a shift in the focal length generated according to the light receiving angle of the imaging viewing angle determining unit, And an image forming control means for adjusting the second optical system by a magnification specifying signal to eliminate a magnification error generated according to a light receiving angle of the image pickup viewing angle determining means, and forming a target image at a predetermined magnification. , Positioned inspection pair Image pickup means for picking up an image of an elephant and outputting an image signal, and distortion correction of position data of the image signal output from the image pickup means for conversion into Cartesian coordinate data to calculate a quality judgment parameter An inspection apparatus comprising: a quality parameter calculation means; and a quality quality automatic determination means for automatically determining quality quality of an inspection target from quality quality determination parameters. 9. An imaging viewing angle determining means for selecting a light-receiving angle to an angle for receiving a light flux arriving from the object to determine a viewing angle for imaging the object, and a light flux from a light source at a fixed position for illuminating the inspection object. Is an illumination means capable of changing the illumination angle by deflecting the light source, or an illumination means capable of changing the illumination angle by moving the position of the light source, and an input input accompanying the position data of the imaging target area. Illumination control means for controlling the illumination means so as to illuminate the object at an angle corresponding to the imaging viewing angle according to the value or the value calculated by the computing means; a first optical system for reducing and forming an inspection object image; and an inspection object An image forming means including a second optical system for changing the magnification of the image, and a light receiving angle selection of the image pickup viewing angle determining means are controlled by a view angle designating signal, and an image is picked up according to a rectangular grid of a plane orthogonal coordinate to be inspected. A visual angle control means for selecting a visual angle, and a focal length adjustment signal to move the image forming means along the optical axis to eliminate a shift in the focal length generated according to the light receiving angle of the visual angle determining means, and a magnification. Depending on the specified signal,
An imaging control unit that adjusts the second optical system to eliminate a magnification error that occurs depending on a light receiving angle of the imaging viewing angle determining unit and forms a target image at a predetermined magnification, and a positioned inspection target. An image pickup means for picking up an image signal and outputting an image signal, and a quality pass / fail judgment parameter for correcting the distortion of the position data of the image signal output from the image pickup means and converting it to Cartesian coordinate data to calculate a quality pass / fail parameter. An inspection apparatus comprising: a calculation unit; and a quality quality automatic determination unit that automatically determines the quality of the inspection target from the quality determination parameter. 10. Positioning means for mechanically one-dimensionally, two-dimensionally or three-dimensionally positioning an object, and an angle for receiving a light beam arriving from the object to determine a viewing angle for imaging the object. An imaging viewing angle determining means for selecting the light receiving angle, and an illuminating means capable of changing the illumination angle by illuminating the inspection object and deflecting the light flux from the light source at a fixed position, or moving the light source position. And an illumination unit capable of changing the illumination angle, and the illumination unit configured to illuminate the target at an angle corresponding to the imaging viewing angle according to an input value input accompanying the position data of the imaging target region or a value calculated by the computing unit. An illumination control means for controlling the means, an image forming means including a first optical system for reducing the inspection object image, and a second optical system for changing the inspection object, and A viewing angle control means for controlling the selection of the light receiving angle of the image viewing angle determining means so as to select the imaging viewing angle so as to conform to the rectangular grid of the plane coordinate to be inspected, and the focusing means along the optical axis by the focal length adjustment signal. By moving, eliminating the deviation of the focal length generated according to the light receiving angle of the viewing angle determining means, and by the magnification designation signal,
An imaging control unit that adjusts the second optical system to eliminate a magnification error that occurs depending on a light receiving angle of the imaging viewing angle determining unit and forms a target image at a predetermined magnification, and a positioned inspection target. An image pickup means for picking up an image signal and outputting an image signal; a quality pass / fail judgment parameter calculation means for calculating a quality pass / fail parameter from the image signal of the inspection object mechanically positioned by the positioning means; An inspection apparatus comprising: a quality / goods automatic determination means for automatically determining the quality of the inspection target from the parameters for inspection. 11. An imaging viewing angle determining means for selecting a light-receiving angle to an angle for receiving a light flux arriving from the object and a first image-forming method for reducing an inspection object image in order to determine the viewing angle for imaging the object. An image forming unit including an optical system and a second optical system for changing the magnification of an image to be inspected, and a viewing angle designation signal are used to control the light receiving angle selection of the imaging / viewing angle determining unit to form a rectangular grid of inspected plane orthogonal coordinates. A visual angle control means for selecting the imaging visual angle so as to conform, and a focal length adjustment signal move the image forming means along the optical axis to eliminate the shift of the focal length generated according to the light receiving angle of the visual angle determining means. And a magnification designation signal to adjust the second optical system to eliminate a magnification error that occurs according to the light receiving angle of the imaging viewing angle determining means, and form a target image at a predetermined magnification. Positioned, by means A pair of imaging target area positioning imaging devices for imaging the inspection object, each imaging means for imaging the inspection object, and inputting a binocular vision image signal; A quality determination parameter calculating means for calculating a quality determination parameter from the visual image signal, and an automatic determination means for automatically determining the quality of the inspection target from the quality determination parameter, characterized in that Inspection device. 12. To determine a viewing angle for imaging an object,
Consists of an imaging viewing angle determining means for selecting a light receiving angle for receiving a light flux arriving from an object, a first optical system for reducing and forming an inspection object image, and a second optical system for changing the magnification of the inspection object image. Image means, viewing angle control means for controlling the light receiving angle selection of the imaging viewing angle determining means by the viewing angle designating signal, and for selecting the imaging viewing angle so as to conform to the inspection plane orthogonal rectangular coordinate grid, and the focal length adjustment signal, By moving the image forming means along the optical axis, eliminating the deviation of the focal length generated according to the light receiving angle of the viewing angle determining means, and by the magnification designation signal,
An imaging control unit that adjusts the second optical system to eliminate a magnification error that occurs depending on a light receiving angle of the imaging viewing angle determining unit and forms a target image at a predetermined magnification, and a positioned inspection target. An image pickup means for picking up the image, a quality pass / fail judgment parameter calculating means for calculating a quality pass / fail judgment parameter by performing an arithmetic operation from an image signal given by the image pick-up by the image pickup means, and a quality of the inspection target from the quality pass / fail judgment parameter. The automatic judgment means for automatically judging the quality is provided, the display means for displaying the imaged image, and the phase selection means for selecting the automatic inspection phase and the visual re-inspection phase. When the quality of the inspection object is judged by the automatic judging means, the address data of the judgment defective inspection object is memorized, and the stored address is stored in the visual re-inspection phase. According to the data, images the automatic inspection defective judgment inspected, the inspection device characterized in that is for displaying images. 13. Positioning means for positioning the inspection object, imaging means for imaging the inspection object, storage means for storing the captured image data and related attribute data, and transmission means for transmitting the stored data. An image pickup section provided, a receiving means for receiving the data transmitted from the transmitting means, an image display of a plurality of received image data,
Alternatively, an inspection device comprising: an image display unit having a display means for displaying a batch image. 14. Positioning means for mechanically positioning the object one-dimensionally, two-dimensionally or three-dimensionally, and deflecting and reflecting the light beam to determine the viewing angle for imaging the object. An optical device including a mirror device that selects a light-receiving angle for receiving a light flux that arrives at, and an angle at which the light flux from the imaging region is reflected toward the lens optical device by a viewing-angle designating signal from the viewing-angle control means.
A mirror deflection angle determining means for determining a mirror deflection angle; an image capturing means for capturing an image of an object positioned at a plurality of positions by the positioning means; and a target image formed on the image capturing means.
A lens optical device having a function of determining an image pickup magnification according to a magnification designation signal from the image formation control means, a storage means for storing a plurality of image data of an object obtained by image pickup by the image pickup means, and a storage means A shape measuring device comprising: a calculation unit that performs a three-dimensional shape measurement calculation operation of a target from the acquired plural image data. 15. Positioning means for mechanically positioning the object one-dimensionally, two-dimensionally, or three-dimensionally, and a light flux reaching from the object to determine a viewing angle for imaging the object. An optical device including a mirror device for deflecting and reflecting a light beam for selecting a light receiving angle for the light receiving angle, and an angle for reflecting the light beam from the imaging region toward the lens optical device by a viewing angle designation signal from the viewing angle control means. The mirror deflection angle determining means for determining the mirror deflection angle, the image capturing means for capturing an image of the object positioned by the positioning means, the object image formed on the image capturing means, and the magnification specifying signal from the image forming control means. A pair of imaging target area positioning devices including a lens optical device having a function of determining the imaging magnification, and a pair of imaging target area positioning devices Shape measurement device comprising a storage means for storing a right view image data, calculating means for the left and right view image data stored in the storage means the three-dimensional shape measurement operation of the target, in that it consists of. 16. A product manufacturing method for manufacturing a finished product from a semi-finished product by inspecting the quality of the semi-finished product and repairing and correcting the semi-finished product determined to be defective, for determining a viewing angle for imaging an object. In addition, an imaging viewing angle determining means for selecting a light receiving angle for receiving a light flux arriving from an object, a first optical system for reducing and forming an inspection object image, and a second optical system for varying the inspection object image. The image forming means, the visual angle control means for controlling the light receiving angle selection of the imaging visual angle determining means by the visual angle designating signal, and the visual angle control means for selecting the imaging visual angle so as to conform to the rectangular coordinate of the plane to be inspected. The image forming means is moved along the optical axis to eliminate the deviation of the focal length generated according to the light receiving angle of the viewing angle determining means, and the second optical system is adjusted by the magnification designating signal. , The imaging viewing angle determination An image forming control means for forming a target image at a predetermined magnification by eliminating a magnification error generated according to a light receiving angle of the means, an image pickup means for picking up a positioned inspection object, and an image pickup means for picking up the image. By the calculation from the image signal obtained by calculating the quality pass / fail determination parameter calculating unit for quality pass / fail determination parameters, automatic determination unit for automatically determining the quality pass / fail of the inspection target from the quality pass / fail determination parameters, Display means for displaying the imaged image, and a phase selection means for selecting the automatic inspection phase and the visual re-inspection phase, in the automatic inspection phase, quality quality automatic determination means, the quality of the inspection target quality determination When it is done, the address data of the judgment failure inspection target is stored in the memory, and in the visual re-inspection phase, the automatic inspection judgment failure inspection pair is performed according to the stored address data. An inspection device that captures images and displays images is installed in the manufacturing line to automatically inspect semi-finished products flowing in the manufacturing line. A method of manufacturing products in which semi-finished products are finished products by repairing and correcting the true defects.