JPH083033Y2 - Magnetic shield pit - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a magnetic shield pit for preventing magnetic noise generated from a magnetic source from being diffused to the surroundings.

[Prior Art] Currently, not only production equipment for various products but also home appliances
The number of semiconductor elements used in these ICs is increasing. Then, these semiconductor elements have advanced extremely highly, and due to the progress of this semiconductor element, ultrahigh-performance ultraprecision equipment such as an electron microscope, an electron beam exposure apparatus, or a biomagnetism measuring instrument which has never been considered. Have been developed and put into practical use.

By the way, as the performance of such ultra-precision equipment increases,
Magnetism, which has not been a problem in the past, has come to have a great influence on the performance of various devices. That is, the magnetism becomes noise, and the distortion of the electron microscope and the malfunction of the CRT such as the electron beam exposure apparatus or the computer terminal have come to occur. Sources of such magnetic nozzles inside buildings include transformers, main cables, ELVs, etc., and magnetic nozzles particularly susceptible to AC magnetic noise of 50Hz or 60Hz. Areas that are easily affected by the magnetic nozzles are, for example, around the electric room in the transformer and the upper and lower floors thereof, in the electric room and EPS for the main cable, and around the ELV machine room and shaft in the ELV.

When magnetic noise occurs, even if the ultra-precision equipment itself is made to have ultra-high performance, due to the influence of such magnetic noise, the ultra-precision equipment will not be able to fully demonstrate its performance, and its reliability There is a problem that the sex is deteriorated.

Therefore, a main body that is formed in a U shape from both side wall portions having the magnetic shielding member and a bottom portion having the magnetic shielding member, and that houses the magnetic source, and a lid that has the magnetic shielding member and covers the upper opening of the main body. And the magnetic noise generated by the magnetic source leaks out of the main body.
Alternatively, magnetic shield means for preventing magnetic noise from entering from the outside of the main body have been proposed, for example, in Japanese Utility Model Publication No. 62-74445 and Japanese Utility Model Publication No. 61-55395. These magnetic shield means can prevent the influence of magnetic noise on the ultra-precision equipment.

[Problems to be Solved by the Invention] However, in these magnetic shield means, since the size of the main body formed in a U shape is constant, depending on the size of the magnetic source or the number of magnetic sources, It is possible that the magnetic source cannot be accommodated. Therefore, in order to accommodate the size of the magnetic sources or the number of the magnetic sources, a U-shaped body having a size corresponding to the size of the magnetic sources or the number of magnetic sources is formed. Not only has the cost increased,
The number of types of magnetic shield means increases, and production management and storage management become complicated. As described above, the magnetic shield means has a problem that it cannot easily and flexibly cope with the size of the magnetic field generation source or the number of magnetic field generation sources.

The present invention has been made in view of such a problem, and its purpose is to reliably shield the magnetic noise generated from the magnetic generation source and prevent the influence of the magnetic noise on the ultra-precision equipment. However, it is still another object of the present invention to provide a magnetic shield pit which can be easily and flexibly dealt with according to the size of the magnetic source or the number of magnetic sources.

[Means for Solving the Problems] In order to solve the above-mentioned problems, the invention of claim 1 provides a first magnetic shielding material having an L-shaped cross section and a first magnetic shielding material separate from the first magnetic shielding material and having the same shape. A magnetic shield pit having a U-shaped cross section formed of two magnetic shields and having a housing for housing a magnetic source, the housing comprising one side of the first magnetic shield and the second magnetic shield. A bottom portion formed of one side of the shielding material, on which the magnetic generation source is placed and which blocks downward leakage of magnetic noise generated from the magnetic generation source; and the bottom portion by the other side of the first magnetic shielding material. A pair of side wall portions that are formed at one end of the second magnetic shield member and that are formed at the other end of the bottom portion by the other side of the second magnetic shield, and that prevent the magnetic noise from leaking to the side. It is characterized by that.

The invention of claim 2 is characterized in that a magnetic shielding plate made of a material having a high magnetic permeability is further mounted on the bottom portion.

Further, in the invention of claim 3, the bottom portion is formed by overlapping one side of the first magnetic shielding material and one side of the second magnetic shielding material with each other. A ridge in the width direction is formed on one side of the one side, and a groove into which the ridge is fitted is formed on the other side of either the first or second magnetic shielding material. It is characterized in that it is fitted in the groove so as to be slidable in the width direction.

[Operation] In the magnetic shield pit according to the present invention having such a configuration, the magnetic source is housed in the housing portion.
And, of the magnetic noise generated from the magnetic source,
The magnetic noise that tends to radiate laterally is shielded by the pair of side wall portions and prevented from leaking to the surroundings. Also,
The magnetic noise that is about to leak downward is blocked by the bottom. In that case, since the bottom of the housing is formed by one side of each of the first and second magnetic shields formed separately from each other, the width of the bottom, that is, the distance between the pair of side walls can be adjusted. Becomes Therefore,
By adjusting the distance between the pair of side wall portions according to the size of the magnetic source to be accommodated or the number of magnetic sources, the size of these magnetic sources or the number of magnetic sources can be adjusted. Can be easily and flexibly dealt with.

Particularly, in the invention of claim 2, since the magnetic shielding plate made of a material having a high magnetic permeability is mounted on the bottom portion, the synergistic action of the magnetic shielding function of the bottom portion of the accommodating portion and the magnetic shielding function of the magnetic shielding plate. As a result, the magnetism is more effectively shielded.

Further, according to the invention of claim 3, the distance between the pair of side wall portions, that is, the width of the magnetic shield pit can be easily and surely adjusted by the groove and the projections fitted in the groove.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

 FIG. 1 is a partial perspective view showing an embodiment of the present invention.

As shown in FIG. 1, for example, a predetermined number of trunk cables c, c, ... Are often arranged on the ceiling (inside the double ceiling), floor (under the free access floor), etc. The magnetism is generated by the current flowing through these main cable c. That is, the main cable c is a magnetic source. The magnetism generated from this trunk cable c
Intrudes into the interior of a building and affects ultra-precision equipment, etc. installed in that interior. Therefore, the magnetic shield pit 1 of the present embodiment is arranged at the place where the main cable c is arranged.

As is clear from this figure, this magnetic shield pit 1
Is composed of a pair of mold members 2, 3 having an L-shaped cross section and made of a magnetic shielding material such as a silicon steel plate. In that case, one side 2a, 3a of these mold members 2, 3 is horizontally and overlapped with each other, and the other sides 2b, 3b are arranged so as to be vertical, and the magnetic shield pit 1 has a cross section. Is almost U-shaped. Therefore, the vertical side 2 of the profiles 2,3
The b and 3b form the side wall portions 4 and 5, the horizontal sides 2a and 3a form the bottom portion 6, and the side wall portions 4,5 and the bottom portion 6 form the accommodation portion 7 in which the main cable c is accommodated. .

In addition, the horizontal sides 2a and 3a are slidable in the left-right direction in the figure, which allows the distance between the left and right side walls 4 and 5,
That is, the pit width w can be adjusted. Therefore, by adjusting the pit width w according to the size and the number of the main cable c, it is possible to flexibly and surely correspond to the size and the number of the main cable c.

A magnetic shield plate 8 made of a material having a high magnetic permeability such as permalloy is placed on the bottom portion 6, and a main cable c is placed on the magnetic shield plate 8. In this way, by disposing the high-permeability magnetic shield plate 8 in a place close to the main cable c that is a magnetic source, magnetic noise from the main cable c is shielded intensively and the shielding effect is further enhanced. I am trying to improve.

In the magnetic shield pit 1 configured as described above and arranged for the main cable c, the magnetism α generated from the main cable 1 tends to dissipate to the side. It is shielded by and is prevented from leaking outside from the side wall portions 4 and 5. Further, the magnetism β generated from the main cable 1 tries to dissipate downward, but this magnetism β is surely shielded by the bottom portion 6 and the magnetic shield plate 8 and does not leak below the bottom portion 6 and the magnetic shield plate 8.

Therefore, in the case where the ultra-precision equipment is installed in a room where such a main cable c is installed on the ceiling (in the double ceiling), the floor (under the free access floor), etc. By disposing the magnetic shield pit 1 of the example, the magnetic noise generated from the main cable c hardly leaks into the room. As a result, the ultra-precision equipment is not affected by magnetic noise and can reliably exhibit its high performance.

Then, the horizontal sides 2a and 3a forming the bottom portion 6 are slid in the width direction so that the distance between the pair of side wall portions 4 and 5, that is, the width w of the magnetic shield pit 1 is equal to the size of the main cable c or the main cable c. By adjusting according to the number, it is possible to easily and flexibly cope with the size of the trunk cables c or the number of trunk cables c.

Further, when magnetic noise leaks above the magnetic shield pit 1 and the leaked magnetic noise affects the ultra-precision equipment, the upper opening of the magnetic shield pit 1 is opened as shown in FIG. The main cable c is closed by closing the cover member 9 formed of a magnetic shielding member. As a result, the magnetic noise generated in the main cable c is completely shielded, so that the equipment arranged above the magnetic shield pit 1 is not affected by the magnetic noise and its high performance is ensured. And can be fully exerted. Further, the lid member 9 can be adjusted in its width according to the width w of the magnetic shield pit 1.

The magnetic shield pit 1 of the present embodiment has a simple structure including a pair of mold members and one magnetic shield plate, so that the magnetic shield pit 1 can be easily installed and can be manufactured and installed at low cost.

The present invention is not limited to the above-mentioned embodiment, and various design changes can be made.

For example, as a structure for adjusting the width w of the magnetic shield pit 1, by forming a ridge in the width direction on one horizontal side and forming a groove into which this ridge fits on the other horizontal side. It is also possible to move the pair of mold members by guiding the ridges and grooves. In this way, the width w of the magnetic shield pit 1 can be adjusted easily and reliably.

Further, in the above-described embodiment, the magnetic shield plate 8 is provided, but the magnetic shield plate 8 can be omitted if the shielding effect is sufficient with the mold members 2 and 3.

Further, in the above-mentioned embodiment, the case where the present invention is applied to the main cable c which is the magnetic source is explained.
It goes without saying that the present invention can be applied to other magnetic sources such as transformers and ELVs.

[Effect of the Invention] As is clear from the above description, according to the magnetic shield pit of the present invention, the pair of side wall portions and the bottom portion made of the magnetic shielding material form the storage portion for storing the magnetic source. Therefore, the magnetic noise generated from the magnetic source can be reliably shielded by the simple structure of the side wall portion and the bottom portion. Moreover, since the pair of side wall portions and the bottom portion can be formed by the mold material made of the magnetic shielding material, the magnetic shield pits can be manufactured and installed at low cost.

Further, by making it possible to adjust the distance between the pair of side wall portions, that is, the width of the magnetic shield pit, it is possible to easily and flexibly cope with the size and number of the magnetic sources.

Since it is not necessary to manufacture magnetic shield pits for each size and number of magnetic generation sources, the types of magnetic shield pits can be reduced. As a result, the cost of the magnetic shield pits can be reduced, and the production control and storage control of the magnetic shield pits can be simplified.

Further, since the magnetic source can be contained by providing the lid member that closes the housing portion, magnetic noise can be shielded more reliably.

Thus, according to the magnetic shield pit of the present invention, it is possible to reliably support even higher-performance ultra-precision equipment that is expected to be developed and put to practical use in the future according to its size or number. You will be able to.

[Brief description of drawings]

FIG. 1 is a partial perspective view showing an embodiment of a magnetic shield pit according to the present invention, FIG. 2 is a partial perspective view showing another embodiment of the present invention, and FIG. 3 is a further embodiment of the present invention. It is a partial perspective view showing. 1 ... Magnetic shield pit, 2, 3 ... Mold material, 4,5 ... Side wall part, 6 ... Bottom part, 7 ... Housing part, 8 ... Magnetic shield plate, 9
... Lid member, c ... Main cable (magnetic source)

Claims (3)

[Scope of utility model registration request] 1. A first magnetic shield having an L-shaped cross section and a second magnetic shield having the same shape as a body separate from the first magnetic shield and having a substantially U-shaped cross section and containing a magnetic source. A magnetic shield pit having a housing portion for storing the magnetic field, the housing portion being formed of one side of the first magnetic shielding material and one side of the second magnetic shielding material. A bottom portion for preventing downward leakage of magnetic noise generated from a generation source, and the other side of the first magnetic shielding material are formed at one end of the bottom portion, and the other side of the second magnetic shielding material serves as the other side. A magnetic shield pit, comprising: a pair of side wall portions formed at the other end of the bottom portion to prevent the magnetic noise from leaking to the side. 2. The magnetic shield pit according to claim 1, further comprising a magnetic shield plate made of a material having a high magnetic permeability, which is mounted on the bottom portion. 3. The bottom portion is formed by superimposing one side of the first magnetic shield material and one side of the second magnetic shield material on each other, and one of the first and second magnetic shield materials is formed. A ridge in the width direction is formed on one side, and a groove into which the ridge fits is formed on one of the other sides of the first and second magnetic shielding materials, and the ridge is formed on the groove. The magnetic shield pit according to claim 1, wherein the magnetic shield pit is fitted so as to be slidable in the width direction.