JPH08300720A - Ion flow electrostatic recording head apparatus and its preparation - Google Patents

Abstract

PURPOSE: To form a durable electric connection on a connecting part where soldering and wire bonding can not be applied. CONSTITUTION: On an insulating base 11 of an ion flow electrostatic recording head with the first electrode prepd. by forming a titanium nitride film on an aluminum film formed on the insulating base 11, the second electrode made of titanium and the third electrode made of titanium, connecting parts 12M, 14M and 16M drawing each electrode are formed. Then, the ion flow electrostatic recording head is mounted on a driving circuit base 18 provided with connecting parts 12N, 14N and 16N corresponding to the connecting parts 12M, 14M and 16M of the head side and the connecting parts 12M, 14M and 16M and the connecting parts 12N, 14N and 16N are connected with each other with an electrically conductive adhesive 19 made of a silver powder-contg. epoxy resin under semi-cured condition to perform electric connection by curing it.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ion flow electrostatic recording head device used for electrostatic printing and copying and a method for manufacturing the same.

[0002]

2. Description of the Related Art Generally, for example, in electrostatic printing,
There is known an electrostatic recording apparatus in which ions having a high current density are generated, and the ions are extracted and selectively applied to a member to be charged so that the member to be charged is imagewise charged.

As an ion flow electrostatic recording head used in this electrostatic recording apparatus, one having a structure as shown in FIGS. 5A and 5B is known. In the figure, reference numeral 1 denotes an insulating substrate, and a plurality of first electrodes 2 are provided on the insulating substrate 1 so as to extend in a substantially straight line in the same direction and arranged in parallel in a substantially parallel manner. These first electrodes 2 are fixed to one surface of the dielectric layer 3. Further, a plurality of second electrodes 4 extending in a direction different from the extending direction of the first electrodes 2 are fixed to the other surface of the dielectric layer 3 with an adhesive 8. A plurality of first electrodes 2 ... And a plurality of second electrodes 4 ... Form a matrix. Further, an opening 4a for ion generation is formed in a portion corresponding to the matrix of the second electrode 4. A third electrode 6 is arranged on the opposite side of the second electrode 4 from the first electrode 2 with an insulator layer 5 interposed therebetween. Openings 5a and 6a corresponding to the openings 4a of the second electrode 4 are formed in the insulator layer 5 and the third electrode 6, and the ion flow passage opening 7 is formed by these openings 5a and 6a. It is configured.

In the ion flow electrostatic recording head thus constructed, the first electrode 2 and the second electrode 4 corresponding to the selected portion of the matrix between the first electrode 2 and the second electrode 4 are formed. By alternately applying a high voltage between and, positive and negative ions are generated in the vicinity of the opening 4a of the second electrode 4 facing the portion. In addition, a bias voltage is applied between the second electrode 4 and the third electrode 6, and only ions determined by the polarity thereof are selectively extracted from the generated ions, pass through the ion flow passage port 7, and pass through the third electrode. The member to be charged, which is arranged so as to face the electrode 6, can be partially charged. Therefore, by selectively driving the first and second electrodes having a matrix structure, electrostatic recording by dots can be performed.

Then, in general, at the side end portion on the insulating substrate 1, as shown in FIG. 5C, the first electrode 2, ..., The second electrode 4 ,. Electrode conductors are respectively drawn out, and connection portions 2M, 4M, 6M with circuits for driving the ion flow electrostatic recording head are formed. Normally, copper, copper alloys, tin, tin alloys, aluminum, aluminum alloys, gold, gold alloys, silver, silver alloys, etc. are used as the material of the surface of this connection part so that solder and bonding wires can easily adhere. Has been.

[0006] Generally, as an electrical connecting means for electronic parts and circuit boards, for example, Japanese Patent Laid-Open No. 6-6027 is used.
Japanese Patent Laid-Open No. 6-69624 discloses a method of connecting by soldering by applying solder plating or applying cream solder to the connecting part, and Japanese Patent Laid-Open No. 6-69624 discloses connecting the connecting parts by soldering. A method of soldering and connecting is disclosed.

[0007]

By the way, since the recent ion flow electrostatic recording head is required to have higher density and higher definition, it is difficult to deal with the conventional printed circuit board technology and fine processing is possible. Semiconductor technology is being used. Aluminum or an aluminum alloy is generally used as a conductor wiring material in the semiconductor technology. However, if these materials are used as the conductor material of the ion flow electrostatic recording head, the etching process in various laminating processes or When a high voltage is applied during driving, it dissolves or oxidatively deteriorates and rapidly disappears over time. Therefore, in the ion flow electrostatic recording head, as a conductor material, titanium nitride, which is a conductive ceramic, is laminated as a surface layer on aluminum, or the conductor itself is made of a high melting point metal such as molybdenum, titanium, or platinum. The method is adopted.

However, solder and various bonding wires are not fixed to the surface layer material and high melting point metal as described above, and soldering or wire bonding cannot be performed. In addition, even if the bonding wire is initially fixed, it often lacks durability and reliability. Therefore,
The above-mentioned JP-A-6-6027 and JP-A-6-6962.
As disclosed in Japanese Patent No. 4 publication, when solder or cream solder is used, the durability and reliability of the connection portion cannot be obtained due to the above-mentioned defective fixing.

Further, the mounting of the ion flow electrostatic recording head and the driving circuit thereof is not always arranged on the same plane in terms of mounting, and a considerable level difference of several hundred μm to several mm is provided. Often held and connected. In such a case, it is general to connect by wire bonding, but it cannot be adopted due to the above-mentioned problems.

The present invention has been made in order to solve the above problems in the conventional ion flow electrostatic recording head device. In each of the inventions described in claims 1 to 3, soldering or wire bonding is impossible. It is an object of the present invention to provide an ion flow electrostatic recording head device having a durable connecting member in a flexible connecting portion. The invention according to claim 4 provides a method for manufacturing an ion flow electrostatic recording head device, in which soldering or wire bonding is not possible, and moreover, a durable connection can be made to a connection portion having a step. To aim. It is an object of the inventions according to claims 5 to 6 to provide an ion flow electrostatic recording head device including a connection member having good workability and durability in a connection portion where soldering or wire bonding is impossible. To do. According to a seventh aspect of the present invention, there is provided an ion flow electrostatic recording head device including a durable connection member having good workability and good electrical characteristics in a connection portion where soldering or wire bonding is impossible. With the goal.

[0011]

In order to solve the above problems, the invention according to claim 1 provides a plurality of first electrodes extending in one direction and in parallel on an insulating substrate, and a plurality of the first electrodes. A plurality of second electrodes extending in a direction intersecting with one electrode, forming a matrix with the first electrode, and having an opening formed in a portion corresponding to the matrix; and the second electrode with respect to the second electrode. A third electrode disposed on the opposite side of the first electrode and having an opening formed in a portion corresponding to the matrix; and a dielectric layer provided between the first electrode and the second electrode,
An ion flow electrostatic recording head comprising: an insulator layer provided between the second electrode and the third electrode and having an opening formed in a portion corresponding to the matrix; In an ion flow electrostatic recording head device mounted on a drive circuit board having a head drive circuit and a connecting portion, the first electrode, a first electrode, and a second electrode are provided at an end portion of the insulating substrate of the ion flow electrostatic recording head. At least one of the connection parts of the 2nd electrode and the 3rd electrode to the drive circuit board has a melting point of 1500 ° C.
The above-mentioned refractory metal is used, and the space between the connection formed of the refractory metal and the connection of the drive circuit board is electrically connected by a connecting member containing a conductive resin. .

As a result, the space between the connection portion on the head side and the connection portion on the drive circuit board side, which is formed of a high melting point metal having a melting point of 1500 ° C. or more, which cannot be soldered or wire bonded, is durable. Electrical connection can be formed.

According to a second aspect of the present invention, a plurality of first electrodes extending in one direction and parallel to each other on the insulating substrate, and a plurality of first electrodes extending in a direction intersecting with the first electrodes are provided together with the first electrodes. A plurality of second electrodes forming a matrix and having openings formed in the portions corresponding to the matrix; and portions corresponding to the matrix arranged on the side opposite to the first electrodes with respect to the second electrodes. A third electrode having an opening formed therein, a dielectric layer provided between the first electrode and the second electrode,
An ion flow electrostatic recording head comprising: an insulator layer provided between the second electrode and the third electrode and having an opening formed in a portion corresponding to the matrix; In an ion flow electrostatic recording head device mounted on a drive circuit board having a head drive circuit and a connecting portion, the first electrode, a first electrode, and a second electrode are provided at an end portion of the insulating substrate of the ion flow electrostatic recording head. At least one of the connecting portions of the second electrode and the third electrode to the drive circuit board is formed of conductive ceramic, and a space between the connecting portion formed of the conductive ceramic and the connection portion of the drive circuit board is formed. , Is electrically connected by a connecting member containing a conductive resin.

As a result, in the space between the connection portion on the head side and the connection portion on the drive circuit board side, which is formed of a conductive ceramic that cannot be soldered or wire-bonded, a durable electrical connection is formed. Connections can be made.

According to a third aspect of the present invention, in the ion flow electrostatic recording head device according to the first or second aspect, the connecting member containing the conductive resin is a liquid containing conductive powder or a filler having a metal surface. It is composed of a cured resin. The connecting member configured in this way has good wettability with respect to the connecting portion, and therefore, is durable in the space between the connecting portion on the head side and the connecting portion on the drive circuit board side where soldering or wire bonding is impossible. Electrical connection can be formed.

According to a fourth aspect of the present invention, in the method of manufacturing an ion flow electrostatic recording head device according to the third aspect, the head is in a state where the liquid resin containing the conductor powder or the filler having a metal surface is semi-cured. After the connection portion on the side and the connection portion of the drive circuit board are connected, the semi-cured liquid resin is fully cured. This makes it easy to form a durable electrical connection even if the head-side connection cannot be soldered or wire-bonded and there is a step between it and the drive circuit board-side connection. be able to.

According to a fifth aspect of the present invention, in the ion flow electrostatic recording head device according to the first or second aspect, the connecting member containing the conductive resin is a liquid containing conductive powder or a filler having a metal surface. To the sheet which hardened the resin,
It is composed of a conductive powder or a pressure-sensitive adhesive containing a filler whose surface is a metal. This allows
It is possible to form a durable and workable electrical connection in the space between the head-side connecting portion where soldering or wire bonding is impossible and the drive circuit board-side connecting portion.

According to a sixth aspect of the present invention, in the ion flow electrostatic recording head device according to the first or second aspect, the connecting member containing the conductive resin is connected to a core material made of a wire-shaped conductive resin and a conductor. It is configured by adhering an adhesive containing powder or a filler having a metal surface. As a result, a durable and workable electrical connection can be formed in the space between the head-side connection portion where soldering or wire bonding is not possible and the drive circuit board-side connection portion. .

According to a seventh aspect of the present invention, in the ion flow electrostatic recording head device according to the first or second aspect, the connecting member containing the conductive resin is a conductive polymer material having conductivity performance in the polymer itself. It is what constitutes. Since the conductive polymer material has stable electrical characteristics near room temperature, it has good workability in the space between the head-side connection and the drive circuit board-side connection where soldering or wire bonding is not possible. Moreover, it is possible to form a durable electrical connection having good electrical characteristics.

[0020]

【Example】

[First Embodiment] Next, a first embodiment of the ion flow electrostatic recording head device according to the present invention will be described. Figure 1
A schematic configuration of the ion flow electrostatic recording head portion will be described based on FIG. Reference numeral 11 is an insulating substrate of an ion flow electrostatic recording head made of quartz. On this insulating substrate 11, a plurality of first electrodes 12 ... Are provided as dielectric electrodes for ion generation. The plurality of first electrodes 12 ... Are formed by depositing titanium nitride on an aluminum film, and are arranged substantially parallel to each other in one direction. And insulating substrate 11
A dielectric layer 13 formed by laminating silicon nitride on silicon oxide is provided on the first electrodes 12 ... On the surface of this dielectric layer 13, a plurality of second electrodes made of titanium, which are discharge electrodes, are provided.
Electrodes 14 ... Are provided. This plurality of second electrodes 14
Are arranged on the surface of the dielectric layer 13 opposite to the insulating substrate 11, and are arranged side by side in a direction intersecting with the first electrodes 12 ,. A matrix is composed of two electrodes 14 ... And the second electrode 14
Are formed with ion-generating openings 14a, respectively, at portions corresponding to this matrix.

The second electrode 14 in the dielectric layer 13 ...
In the state where the second electrodes 14 ...
An insulating layer 15 made of polyimide is provided. Further, a belt-shaped third electrode 16 made of titanium is adhered to the surface of the insulator layer 15. In this third electrode 16, openings 16a ... Are formed in portions corresponding to the matrix of the first electrodes 12 ... And the second electrodes 14 ... Further, in the insulating layer 15, the openings 14a ... Of the second electrodes 14 ... And the third electrodes 16 ...
15a ... which communicate with the respective openings 16a ...
・ Is formed. Then, the opening 16a of the third electrode 16
Are communicated with the openings 14a of the second electrode 14 through the openings 15a of the insulator layer 15 to form the ion flow passage opening 17 of the ion flow electrostatic recording head. .. is configured. The ion flow electrostatic recording head configured as described above is manufactured by forming a film by a semiconductor technique, photoetching, laminating and patterning.

During operation of the ion flow electrostatic recording head thus constructed, the matrix between the first electrodes 12 ... And the second electrodes 14 ... Is appropriately selected based on the print signal. , An alternating voltage is applied between the first electrode 12 ... And the second electrode 14 ... Corresponding to the selected matrix portion. As a result, the ions are extracted from the ions generated in the vicinity of the openings 14a ... Of the second electrodes 14 ... Corresponding to the selected matrix portion. Then, the extracted ions are transferred to the openings 15a of the insulator layer 15 and the third
By passing through the openings 16a ... Of the electrode 16, a dielectric drum (not shown) is locally charged. As a result, the first electrode 12
... and the second electrodes 14 ... Can be selectively driven to form a dot latent image on the dielectric drum.

The ion flow electrostatic recording head thus constructed is mounted on a drive circuit board made of alumina having a drive circuit for the head to form an ion flow electrostatic recording head device. Therefore, on the insulating substrate 11,
As shown in FIG. 2 (A), the drive circuit board 18 made of alumina, in which the electrode conductor portions are respectively drawn out from the first electrode 12, ..., The second electrode 14 ,. Connection portions 12M, 14M, 16M for electrically connecting with are respectively formed. Further, on the drive circuit board 18, as shown in FIG. 2B, the head side connecting portions 12M, 14M, 16
Corresponding to M, connecting portions 12N, 14N, 16N each having a surface made of gold are provided. In FIG. 2A, these connecting portions 12N, 14N, 16N are not shown.

Next, the connecting portions 12M (14M, 16M) of the respective electrodes on the insulating substrate 11 of the ion flow electrostatic recording head,
Corresponding connection part 12N (14N, 16N) on the drive circuit board 18
The connection mode with and will be specifically described with reference to FIG. In this embodiment, the insulating substrate 11 has a thickness of 0.
At 6 mm, the drive circuit board 18 is 1 mm thick. Connection part 12M
The total thickness of (14M, 16M) and 12N (14N, 16N) is about 1 μm. These connecting parts 12M (14M,
16M) and 12N (14N, 16N) are electrically connected with a commercially available conductive adhesive 19 made of epoxy resin containing silver powder. More specifically, for example, "410E" (trade name, manufactured by Epoxy Technology Co., Ltd.) and a curing agent are mixed in a predetermined ratio, and stored in a desiccator at room temperature until just before the pot life, and the fluidity is improved. Make sure xylene is gone
Suck up a mixture of about 20 wt% into a dispenser,
Connection part 12M (14M, 16M)
M) Apply on top. While pushing the conductive adhesive as it is so as not to tear it, connect the needle to the connecting portion 12N (14N,
16N), drop it on the connecting portion 12N (14N, 16N) and apply it to tear off the adhesive. In this way the connection 12
When a bridge-shaped conductive adhesive is formed between the M (14N, 16N) and the connecting portion 12N (14N, 16N), the solvent is volatilized and the mixture is placed in a desiccator at room temperature for about half a day, and then 80
2C by curing in an oven at ℃ for 2 hours.
The conductive adhesive 19 cured as shown in
The M (14M, 16M) and 12N (14N, 16N) are connected.

Solder or bonding wire is formed on the surface of the connecting portion 12M made of a conductive ceramic such as titanium nitride, or on the surface of the connecting portions 14M and 16M made of a refractory metal having a melting point of 1500 ° C. or more such as titanium. Although it does not adhere to each other and electrical connection is difficult, in the present embodiment, since a conductive adhesive before curing which has wettability to each connection portion can be used, it is possible to easily and durablely connect the electrically conductive adhesive. A physical connection can be formed. Further, as in the present embodiment, even if there is a step between the insulating substrate 11 and the drive circuit substrate 18, since it is possible to connect by using a semi-cured conductive adhesive without fluidity, It is possible to maintain the shape applied in the semi-cured state in the space between the steps and to cure the shape as it is to make a reliable electrical connection. Therefore, it is possible to realize an ion flow electrostatic recording head device that forms a durable and high-definition image.

In this embodiment, the case where the material of the connection portion on the head side is titanium nitride or titanium is shown, but other conductive ceramics such as ITO and refractory metals such as titanium are used. , Molybdenum, tungsten, rhodium, chromium, platinum, palladium, etc. can be similarly implemented. Further, in this embodiment, the one using the two-liquid mixed type conductive adhesive is shown.
The one-liquid type may be used, and as the conductive filler, other than silver powder, for example, nickel powder, carbon black, copper powder, or a filler having electric conductivity such as plastic powder whose surface is plated with nickel. If present, it can be used in the same manner.

[Second Embodiment] Next, a second embodiment will be described. This embodiment is the same as the first embodiment except that the connecting portion on the head side is
12M, 14M, 16M and the connecting portion 12N, 14 on the drive circuit board side
Instead of curing and connecting N and 16N with a semi-cured non-fluid conductive adhesive, a large amount of flaky nickel fibers are dispersed in the plastic to form a conductive plastic sheet. Conductive adhesive sheet 20 coated with conductive adhesive filled with carbon black on one side 20
Is used to connect the connection parts as shown in FIG. Since the conductive pressure-sensitive adhesive sheet used in this example is preliminarily formed into a sheet shape, it can be punched into a required width and length and connected using tweezers or the like. If the number of connecting portions is large and the pitch is constant, it is better to work by arranging punched adhesive sheets on the single-sided adhesive insulating sheet in advance and then connecting them.

According to this embodiment, as in the first embodiment,
Ions that can form durable high-definition images that can form durable electrical connections even for connections made of materials that are difficult to fix solder, bonding wires, etc. or connections with steps A flow electrostatic recording head device is obtained. Further, since the connection work can be performed without handling the liquid and semi-liquid resins as in the first embodiment, the work efficiency is improved.

In this embodiment, a conductive adhesive sheet based on a conductive plastic molded into a sheet is used as a connecting member. However, a wire-like linear material is used as a core material, and its surface is It is also possible to make electrical connection by using a conductive adhesive coated with carbon black similar to that of this embodiment. The wire-shaped core material may be preliminarily provided with a bend corresponding to the step between the connecting portions, and the material is preferably the same conductive plastic as in the present embodiment, but it may be a non-conductive plastic. There is no problem because the adhesive applied to the surface has conductivity. Further, as in the present embodiment, the base material to be formed into a sheet is not a conductive plastic, but is provided with conductivity itself, and a conductive polymer material such as polyacetylene or polypyrrole is formed into a sheet. You may use.

[Third Embodiment] Next, a third embodiment will be described. This embodiment is the same as the first embodiment except that the connecting portion on the head side is
12M, 14M, 16M and the connecting portion 12N, 14 on the drive circuit board side
Instead of curing and connecting N and 16N with a semi-curing non-fluid state conductive adhesive, a conductive polymer material 21 such as polyaniline having conductivity in the polymer itself is used. As shown in FIG. 4, the connection parts are electrically connected. The conductive polymer material used in this example is formed into a sheet-like shape in advance, and is punched into a required width and length to form a punched conductive polymer sheet. Then, a conductive polymer material dissolved in a solvent is applied to the connection portion, and both ends of the punched conductive polymer sheet are placed on it with tweezers or the like to volatilize and remove the solvent, as shown in FIG. Connecting. If the number of connecting portions is large and the pitch thereof is constant, it is better to work by arranging the punched-out conductive polymer sheet on the single-sided adhesive insulating sheet in advance and then connecting.

In this embodiment, polyaniline is used as the conductive polymer material, but other soluble polythiophene-based, soluble polyacetylene-, poly (paraphenylene)-, poly (arylene vinylene) -based, Soluble polypyrrole, poly (arylenemethide) -based, etc. may be used alone or may be subjected to a doping treatment. As the those doped, dopant may be covalently the self-doping type are introduced in a polymer skeleton of polyaniline -SO ₃ H and the like. Further, a polymer obtained by graft-polymerizing or block-copolymerizing the conjugated polymer chain with a saturated polymer and a complex obtained by polymerizing the conjugated polymer in a saturated polymer can also be used.

According to this embodiment, as in the first embodiment,
Ions that can form durable high-definition images that can form durable electrical connections even for connections made of materials that are difficult to fix solder, bonding wires, etc. or connections with steps A flow electrostatic recording head device is obtained. Further, similarly to the second embodiment, since the connecting work can be performed without handling the liquid and semi-liquid resins as in the first embodiment, the work efficiency is improved. In addition, some adhesives and pressure-sensitive adhesives containing conductive fillers have variations in their electrical characteristics for types that can be operated near room temperature, but conductive polymer materials stabilize the characteristics during the film manufacturing process. Therefore, stable electrical characteristics can be obtained as a product that can be operated at room temperature.

[0033]

As described above on the basis of the embodiments,
According to the first and second aspects of the present invention, since the connecting members containing the conductive resin are used to electrically connect the connecting portions, the melting point at which soldering or wire bonding is impossible is 1500. Realizes an ion flow electrostatic recording head device capable of forming a high-definition image by enabling durable electrical connection to a connection part using a refractory metal or a conductive ceramic whose temperature is ℃ or higher. be able to. According to the invention described in claim 3, the connection member including the conductive resin in the ion flow electrostatic recording head device according to claim 1 or 2 is cured with a liquid resin containing conductor powder or a filler having a metal surface. Since it is made of a material that has been made possible, it has good wettability to the connection part and easily adheres even to the connection part where soldering or wire bonding is not possible, resulting in a durable electrical connection. To be

According to a fourth aspect of the invention, in the method of manufacturing an ion flow electrostatic recording head device according to the third aspect, a liquid resin containing conductor powder or a filler having a metal surface is in a semi-cured state. Since the main curing is performed after connecting the connecting portions, it is possible to easily form the electrical connection even when there is a step between the connecting portions. According to the invention of claim 5, a pressure-sensitive adhesive containing conductor powder or a filler having a metal surface is adhered to a sheet obtained by curing a liquid resin containing a conductor powder or a filler having a metal surface. Since the connection member is made of a material, a durable electrical connection between the connection portions can be formed with good workability. Further, according to the invention of claim 6, the connecting member is formed by adhering an adhesive containing a conductive powder or a filler having a metal surface to a wire-shaped core material made of a conductive resin. Therefore, a durable electrical connection between the connection portions can be formed with good workability. Further, according to the invention of claim 7, since the connecting member is made of the conductive polymer material having conductivity in the polymer itself, the electrical connection between the connecting portions has good electrical characteristics and is durable. Can be formed with good workability.

[Brief description of drawings]

FIG. 1 is a sectional view showing a part of a head in a first embodiment of an ion flow electrostatic recording head device according to the present invention.

FIG. 2 is a plan view, a perspective view and a sectional view showing a connecting portion of the first embodiment.

FIG. 3 is a sectional view showing a connection portion of a second embodiment.

FIG. 4 is a sectional view showing a connection portion of a third embodiment.

FIG. 5 is a cross-sectional view showing a part of a head portion of a conventional ion flow electrostatic recording head device, a cutaway perspective view of the head portion, and a schematic plan view of the whole.

[Explanation of symbols] 11 Insulating substrate 12 First electrode 13 Dielectric layer 14 Second electrode 14a Opening 15 Insulating layer 15a Opening 16 Third electrode 16a Opening 17 Ion flow passage 18 Driving circuit board 19 Conductive adhesion Agent 20 Conductive adhesive sheet 21 Conductive polymer material 12M, 14M, 16M Head side connecting part 12N, 14N, 16N Drive circuit board side connecting part

Claims (7)

[Claims] 1. A plurality of first electrodes extending in one direction and in parallel on an insulating substrate, and a plurality of first electrodes extending in a direction intersecting with the first electrodes to form a matrix together with the first electrodes. A plurality of second electrodes each having an opening formed in a portion corresponding to the matrix, and a plurality of second electrodes arranged on the opposite side of the second electrode from the first electrode, and having an opening formed in the portion corresponding to the matrix. The third electrode, the dielectric layer provided between the first electrode and the second electrode, and the second electrode provided between the second electrode and the third electrode, and an opening is formed in a portion corresponding to the matrix. Flow electrostatic recording head having an insulating layer on which parts are formed is mounted on a drive circuit board having a drive circuit of the ion flow electrostatic recording head and a connecting portion. In the recording head device, the ion flow electrostatic recording At least one of the connection portions of the first electrode, the second electrode, and the third electrode to the drive circuit board is formed of a refractory metal having a melting point of 1500 ° C. or higher at the end of the insulating substrate of the battery. An ion flow electrostatic recording head device characterized in that a space between a connecting portion formed of a melting point metal and the connecting portion of the drive circuit board is electrically connected by a connecting member containing a conductive resin. 2. A plurality of first electrodes extending in one direction and in parallel on an insulating substrate, and a plurality of first electrodes extending in a direction intersecting with the first electrodes to form a matrix together with the first electrodes, A plurality of second electrodes each having an opening formed in a portion corresponding to the matrix, and a plurality of second electrodes arranged on the opposite side of the second electrode from the first electrode, and having an opening formed in the portion corresponding to the matrix. The third electrode, the dielectric layer provided between the first electrode and the second electrode, and the second electrode provided between the second electrode and the third electrode, and an opening is formed in a portion corresponding to the matrix. Flow electrostatic recording head having an insulating layer on which parts are formed is mounted on a drive circuit board having a drive circuit of the ion flow electrostatic recording head and a connecting portion. In the recording head device, the ion flow electrostatic recording At least one of the connecting portions of the first electrode, the second electrode, and the third electrode to the drive circuit board is formed of a conductive ceramic at an end portion of the insulating substrate of the battery, and is formed of the conductive ceramic. An ion flow electrostatic recording head device, wherein a space between the connecting portion and the connecting portion of the drive circuit board is electrically connected by a connecting member containing a conductive resin. 3. The connection member containing the conductive resin is formed by curing a liquid resin containing conductor powder or a filler whose surface is a metal. Ion flow electrostatic recording head device. 4. The method for manufacturing an ion flow electrostatic recording head device according to claim 3, wherein a liquid resin containing conductor powder or a filler having a metal surface is semi-cured and driven with a connecting portion on the head side. A method for manufacturing an ion flow electrostatic recording head device, comprising: connecting the connecting portions of a circuit board and then main-curing the semi-cured liquid resin. 5. A pressure-sensitive adhesive comprising a conductive resin or a sheet obtained by curing a liquid resin containing a filler whose surface is a metal, and a conductive powder or a filler whose surface is a metal. 3. The ion flow electrostatic recording head device according to claim 1, wherein the ion flow electrostatic recording head device is configured by adhering the. 6. The connection member containing the conductive resin is composed of a core material made of a wire-shaped conductive resin, to which a conductive powder or an adhesive containing a filler having a metal surface is adhered. The ion flow electrostatic recording head device according to claim 1 or 2, characterized in that: 7. The ion flow electrostatic recording head according to claim 1, wherein the connecting member containing the conductive resin is made of a conductive polymer material having a conductive property in the polymer itself. apparatus.