JPH08300655A - Ink jet recording head and ink jet recording apparatus - Google Patents

Abstract

PURPOSE: To provide an inexpensive ink jet recording head capable of performing stable refilling by early returning the meniscus formed in the vicinity of each of emitting orifices at a time of the emission of ink and enabling high speed recording and an ink jet recording apparatus using the same. CONSTITUTION: An ink jet recording head has a large number of ink emitting orifices 201, liquid passages 202 individually having energy generation means (heat acting parts 203) and arranged side by side to communicate with the ink emitting orifices 201, a common liquid chamber 204 and air holding chambers 4 having orifice parts 3 at the positions opposed to the individual liquid passages of the common liquid chamber and gas-liquid interfaces capable of absorbing pressure fluctuations generated in the common liquid chamber 204 at a time of the emission of ink.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a recording head for forming recording liquid droplets (ink) by ejecting recording liquid (ink) from an ink discharge port and landing the droplets on a recording material for recording. In particular, the present invention relates to an inkjet recording head and an inkjet recording device that eject ink by using thermal energy.

[0002]

2. Description of the Related Art In the ink jet recording system, ink is ejected from an ink ejection port provided in a recording head to form an ink droplet, which is then landed on a recording material such as paper (hereinafter referred to as a recording sheet) for recording. It has many advantages such as extremely low noise generation, high-speed recording, and no need to use a special paper-quality recording sheet. The head is being developed.

Among them, a recording head of the type in which thermal energy is applied to ink to eject it from an ink ejection port has good responsiveness to a recording signal, and it is easy to arrange a large number of ink ejection ports at high density. There are advantages such as being present.

By the way, the so-called bubble jet recording head having such an advantage has various problems to be solved in response to the recent demand for higher speed recording.

FIG. 5 shows an example of such a conventional bubble jet recording head (hereinafter simply referred to as a recording head). The recording head 200 according to this example includes an ink ejection port 201 provided for ejecting ink to form flying droplets,
A liquid path 202 that communicates with each ink ejection port 201 to supply ink, and a thermal action unit 203 that generates thermal energy for ejecting ink to form flying droplets,
It has a common liquid chamber 204 which communicates with each liquid passage 202, and an ink supply port 205 which supplies ink to the common liquid chamber 204. In addition, 206 is a substrate on which the heat-acting portion 203 is formed, 207 is a barrier portion that partitions the liquid paths 202, 208 is a top plate on which the ink supply port 205 is formed, and 209 is each heat-acting portion. An electrical connection for connecting 203 to the drive circuit.

Next, the recording principle of the recording head 200 will be described with reference to FIG.

Now, in the liquid passage 202, the heat acting portion 20
When the ink is rapidly heated by 3, the heat acting portion 203
When the ink in the vicinity exceeds the vapor-liquid phase limit, the ink is vaporized as shown in (B), and bubbles 210 are generated.
Due to the pressure increase at that time, the ink is pushed out toward the ink ejection port 201 side and the common liquid chamber 204 side. The ink pushed out from the ink ejection port 201 forms an ink column 211 in a columnar shape, and then the ink column 211 is (C),
As shown in (D), the droplets fly away from the ink ejection port 201 and become flying droplets 212, which fly toward a recording sheet (not shown). Thus, the meniscus 21 is attached to the ink ejection port 201.
3 is formed, and the retracting amount of the meniscus 213 gradually returns due to the capillary force as shown in (E) and (F). Then, when this one cycle is completed, the next cycle is started.

In the recording head 200 having such a recording principle, in order to achieve high-speed recording, the number of ink ejection openings 201 and liquid paths 202 has been increased so far, and the response frequency of the head 200 has been increased. Raising
Alternatively, methods such as adopting both have been taken.

That is, in order to increase the response frequency of the head 200, the retreat amount of the meniscus 213 after the ink is ejected is reduced, and the meniscus 2 is reduced.
It is necessary to increase the speed at which 13 returns by capillary force. Then, in order to reduce the amount of retreat of the meniscus 213, an improvement is made by disposing a fluid diode that regulates the direction of fluid pressure behind the liquid passage 202. Further, as a means for increasing the speed at which the meniscus 213 after ejecting ink is restored by the capillary force, the liquid path 202
Although the length of the recording medium itself has been shortened, in many cases, in actuality, high-speed recording can be obtained by using the two means described above together.

That is, when the recording head is driven, the heat pulse supplied to the heat acting section 203 is usually several μs to several tens μs, and the maximum instantaneous current flowing at that time is several tens of milliamps to several hundreds. There is a millimeter A. In addition, the number of discharge ports is usually several tens to several thousands, and all the heat acting parts 2 at a time.
When 03 is driven, the current that flows becomes too large. Therefore, a method is adopted in which the entire thermal action section 203 and the ink ejection ports 201 are divided into some blocks and are staggered in time (time division drive). Came.

FIG. 7 shows (A1) to (C1) of the state of the output pulse by such time division driving as an example, and usually belongs to the same block so that the currents simultaneously flowing become about several amperes. The numbers of the thermal action portion 203, the ink ejection ports 201, and the liquid passages 202 are determined (in this example, 2 for each block as shown in (A2) to (C2)).
set).

[0012]

However, in the case of the high-speed recording head as described above, even if the time-division driving is performed so far, the expected effect is not always obtained. FIG. 8 shows an example of meniscus recovery time in the conventional high speed recording head when driven in this manner. In FIG. 8, the horizontal axis represents the arrangement position of the ink ejection ports 21 (block NO), and the vertical axis represents the time from the application of a pulse voltage for heating to the heat acting portion 203 until the retracted meniscus is restored. Show. in this way,
There was a tendency that the slower the order of driving, the longer the time required for the meniscus to return to its original state.

The reason why this tendency occurs is as follows.

Now, as shown in FIG. 6, when the thermal action section 203 of the first block is driven, the ink is rapidly heated and vaporized, and the pressure increase at that time causes the ink to be in common liquid with the ink ejection port 201 side. The droplets 212 are pushed out toward the chamber 204 side, then the flying droplets 212 are formed, and the meniscus 213 retreats as shown in (D). Then, the meniscus 213 tries to return by the capillary force. After that, (B1,
As shown in B2), when the second block is driven and the ink is rapidly heated, the pressure rises due to the vaporization of the ink, and the ink is ejected from the ink ejection port 201 side and the common liquid chamber 204.
Extruded to the side as well. At this time, as described above, the first
At the ink discharge port 201 of the block, the meniscus 213
The ink pushed out to the common liquid chamber 204 side of the second block helps the meniscus of the first block to return, but the pressure of the common liquid chamber 204 decreases near the second block. As a result, the time required to restore the meniscus 213 becomes longer than that in the first block. Similarly, the third block and the fourth block are successively driven in sequence, but at this time, the meniscus 2 is driven.
The number of the returning ink ejection ports 201 of the reference numeral 13 is increasing. Therefore, the ink ejected to the common liquid chamber 204 side is the ink ejection port 2 of which the meniscus 213 is returning.
01 and the liquid path 202. Therefore, the receding of the meniscus of the block driven later becomes larger than that of the block driven first. Further, at this time, ink flows from the common liquid chamber 204 toward the ink ejection port 201 and the liquid passage 202 where the meniscus 213 is returning, and therefore the pressure of the common liquid chamber 204 decreases.

In this way, the meniscus recovery time is longer in the later driven block for two reasons, that is, the pressure drop in the common liquid chamber and the increase in the meniscus receding amount.
Further, it is known that such a pressure fluctuation in the common liquid chamber is absorbed by the air layer.
No. 56 discloses a technique that solves the above problem by providing a common liquid chamber 204 with a place where air is retained and setting the air chamber. However, even in this case, the desired performance may not be exhibited depending on the position of the air chamber.

Further, an attempt has been made to prevent the pressure from instantaneously decreasing in the common liquid chamber 204 at the ink ejection port by making air stay in the upper portion of the common liquid chamber 204.
However, depending on the size of the common liquid chamber 204, the size of the heat-generating resistor of the heat-acting portion 203 that heats the ink, and the like, it is not always possible to obtain a perfect effect.

In order to solve the above problems, an object of the present invention is to provide an ink jet recording head and an ink jet recording apparatus which can obtain stable refill by early restoration of the meniscus and can realize high speed recording with an inexpensive structure. Especially.

[0018]

In order to achieve the above object, an ink jet recording head of the present invention forms a plurality of ink ejection ports for ejecting a recording liquid to form flying droplets and the flying droplets. Liquid channels arranged in parallel and each having discharge energy generating means for communicating with the ink discharge port, a common liquid chamber for supplying the recording liquid to the liquid channels arranged in parallel, and the common liquid chamber. Of the gas-liquid interface that has an opening at a position facing each of the liquid paths arranged in parallel and is capable of absorbing the pressure fluctuation generated in the common liquid chamber at the time of discharging the recording liquid through the opening. And an air holding chamber having the same.

That is, the present inventor has confirmed by experiments that the degree of the meniscus restoring effect differs depending on the position of the air layer held in the portion related to the common liquid chamber. And
The most effective place is behind each liquid path, and if there is an air layer here, regardless of the size of the heating resistor of the heat acting part or the size of the common liquid chamber, it can be used for time-division drive as well. It was confirmed that high-speed driving was possible.

[0020]

According to the present invention, each time the recording liquid is ejected through the opening portion which is opened at a position facing the individual liquid passages arranged in parallel in the common liquid chamber, the liquid passages involved in the ejection from the common liquid chamber to the common liquid chamber. The transmitted pressure fluctuation is guided to the air holding chamber closest to the liquid path and is absorbed via the gas-liquid interface, whereby the meniscus return formed at the ink ejection port can be accelerated. High-speed recording has become possible.

[0021]

Embodiments of the present invention will be described in detail and specifically below with reference to the drawings.

1 and 2A show the structure of an ink jet recording head according to the first embodiment of the present invention. In this example, except that the throttle portion 1 is provided at the inlet of each liquid passage 202 that communicates with the common liquid chamber 204, each liquid passage 202 of the front wall 2 and the throttle portion 1 that are orthogonal to each liquid passage 202 of the common liquid chamber 204 are provided. The air holding chambers 4 each having a thin opening 3 at a position facing each other are arranged so as to be separated and independent from each other. In addition,
The description of other configurations is the same as that of the conventional example shown in FIG.

In the ink jet recording head 10 thus constructed, ink is ejected from the individual ink ejecting portions 201 by the openings 3 provided in the front wall 2 of the common liquid chamber 204 and the respective air holding chambers 4. Each time the pressure fluctuation is transmitted, the pressure fluctuation transmitted from the liquid passage 202 to the common liquid chamber 204 side can be absorbed. Therefore, it is possible to make the ink ejection port 201 for each block driven later eliminate the tendency that the return of the meniscus is delayed. Each of the air holding chambers 4 has a gas-liquid interface so that pressure fluctuations can be absorbed together with the openings 3 by holding an air layer therein.

Next, examples relating to the production will be described.

[0025] By thermal oxidation (Example 1) First Si wafer was a substrate 206 to form an SiO ₂ film of 3μm thick. HfB ₂ as a heating resistor was formed on the substrate 206 by sputtering to have a thickness of 1500 Å, and subsequently, Ti was deposited at 50 Å and Al was continuously deposited at a thickness of 6000 Å by electron beam evaporation.

Next, a pattern was formed by a photolithography process, and the heat acting portion 203 was formed at a pitch of 400 DPI. The size of the heating resistor at this time is 19μ
It is a rectangle of m × 110 μm, and 512 heating resistors are formed in parallel.

Then, SiO ₂ and Ta ₂₀ are sputtered.
5 and Ta layers are successively deposited to a thickness of 1.5 μm, 500 Å and 5000 Å, respectively, and patterned again by a photolithography process and a dry etching process,
It was used as a protective film.

Next, a negative type dry film (photosensitive resin) having a thickness of 25 μm is laminated, and a photolithography process is used to form an ink ejection unit consisting of the ink ejection port 201, the liquid passage 202, and the diaphragm portion 1, and the common liquid chamber 204. And an air holding chamber 4 that serves as a gas-liquid interface were prepared. The air holding chambers 4 are disposed behind the respective liquid passages 202 and at the corresponding positions on the front wall 2 of the common liquid chamber 204, and as shown in FIG. The side opening 3 was set to 20 μm.

Next, a negative type dry film (photosensitive resin) is laminated on the glass having a carved part (40 mm × 4 mm) which is a part of the common liquid chamber 204 and a through hole which is an ink supply port 205, and then a photo film is formed. Patterning was performed by a lithographic process, and the top plate 208 was attached to the above-described substrate 206. Separately from the above, a driver IC die-bonded on a printed circuit board was prepared, and this was electrically connected to the substrate 206 by wire bonding to obtain the inkjet recording head 10.

In the ink jet recording head 10 manufactured as described above, 64 ink ejection units adjacent to each other were formed as one block, and a total of eight blocks were driven. FIG. 3A shows the meniscus recovery time between the conventional ink jet recording head having no air holding chamber and the ink jet recording head according to the present invention. As is clear from this figure, the ink jet recording head 10 according to the present invention, which is provided with the air holding chamber 4 for each ink ejection unit, can be driven at high speed, and is excellent even at an ejection frequency of 6 kHz without degrading the quality. I got the record.

(Embodiment 2) Similar to Embodiment 1, the size of the engraved portion of the common liquid chamber 204 on the top plate 208 side is 40 mm.
As a result of producing an ink jet recording head having a size of × 2 mm and driving the same under the same conditions as in Example 1, even in the ink jet recording head having such a small common liquid chamber, 6
It was confirmed that kHz drive was sufficiently possible.

Example 3 A substrate 206 was obtained by forming a 3 μm SiO ₂ film by thermal oxidation of a Si wafer. Hf as a heating resistor is sputtered on the substrate 206.
B ₂ is formed to a thickness of 1500 Å, and then Ti is deposited to 50 Å by electron beam evaporation.
Al was continuously deposited in a thickness of 6000 angstroms.

Then, a pattern was formed by a photolithography process, and the heat acting portion 203 was formed at a pitch of 2000 DPI. The size of the heating resistor at this time is 30
It was a rectangle of μm × 150 μm, and 512 heating resistors were formed in parallel.

Then, by sputtering, SiO ₂ , Ta2
05 and Ta layers of 1.0 μm and 500, respectively.
Å and 3500 Å of thickness are continuously deposited, and patterning is performed again by a photolithography process and a dry etching process.
It was used as a protective film.

Next, a negative type dry film (photosensitive resin) having a thickness of 50 μm is laminated, and each ink discharge unit, a part of the common liquid chamber 204 and the air holding chamber 14 serving as a gas-liquid interface are laminated by a photolithography process. It was made. As shown in FIG. 2B, the air holding chamber 14 is arranged behind each liquid passage 202 and at a corresponding position on the front wall 2 of the common liquid chamber 204. Opening 13
Is formed to have a width of 45 μm, and one air holding chamber 14 common to the four openings 13 is formed.

Next, the engraved part (80 mm × 4 mm) of the top plate, which is a part of the common liquid chamber 204, and the ink supply port 205.
A negative type dry film (photosensitive resin) was laminated on glass having through holes to be formed, and then patterned by a photolithography process, and laminated on the above-mentioned substrate 206 as a top plate 208. Separately from the above, a driver 10 die-bonded to a printed circuit board was prepared, and this was electrically connected to the substrate 206 by wire bonding to manufacture the inkjet recording head 10.

In the ink jet recording head 10 manufactured as described above, 32 adjacent ink discharge units were formed as one block, and a total of 16 blocks were driven. The meniscus recovery time between the conventional inkjet recording head having no air holding chamber and the inkjet recording head 10 of the present embodiment configured as described above is shown in FIG. As is clear from this figure, the ink jet recording head 10 provided with the air holding chamber 14 according to the present embodiment can be driven at high speed, and good recording can be obtained without deterioration in quality even at the ejection frequency of 4 kHz. I was able to.

FIG. 4 shows an example of the construction of an ink jet recording apparatus to which the present invention can be applied. Here, 10 is an inkjet recording head according to the present invention, and the thermal action part 20 of the recording head 10 is provided in the inkjet recording head 10 via a printed board 52 and a flexible wiring board 53.
Drive signals are supplied to the electrothermal conversion elements forming the block 3 for each block. 54 is a carriage that carries an inkjet recording head and moves along a guide shaft 55; 56 is a shift motor that moves the carriage 54 at a predetermined timing; 57 is a motor that feeds a recording sheet 58, which is a recording medium; Reference numeral 59 is a platen roller that holds the recording sheet 58 so that the sheet can be fed, and reference numeral 60 is a recovery unit that is capped on the ink ejection surface 10A of the inkjet recording head 10 to perform a recovery operation.

The recording operation by such an ink jet recording apparatus is the same as the known one, and the description thereof is omitted. Further, in this example, an ink tank 61 that is detachably attached to the recording apparatus is provided, and ink is supplied from the ink tank 61 to the sub ink tank 63 mounted on the carriage 54 via the ink tube 62, and the sub ink tank 63 ejects ink. Although the ink is guided to the recording head 10, it goes without saying that the ink jet recording head according to the present invention is not limited to the recording device in which the ink tank 61 is detachably attached to the device. Absent.

(Others) In particular, the present invention includes means (for example, an electrothermal conversion element, a laser beam, etc.) for generating thermal energy as energy used for ejecting ink, especially in the ink jet recording system. The present invention brings about excellent effects in a recording head and a recording apparatus of the type in which the state of ink is changed by the heat energy. This is because such a system can achieve high density recording and high definition recording.

Regarding the typical structure and principle thereof, see, for example, US Pat. No. 4,723,129 and US Pat. No. 4,740.
What is done using the basic principles disclosed in 796 is preferred. This method is a so-called on-demand type,
It can be applied to any of the continuous type, but especially in the case of the on-demand type, it can be applied to the electrothermal conversion element arranged corresponding to the sheet holding the liquid (ink) or the liquid path. By applying at least one drive signal corresponding to the recording information and giving a rapid temperature rise exceeding nucleate boiling, heat energy is generated in the electrothermal converting element, and film boiling is caused on the heat acting surface of the recording head. This is effective because bubbles can be generated in the liquid (ink) corresponding to this drive signal one-to-one as a result. Liquid (ink) flows through the ejection openings due to the growth and contraction of these bubbles
To form at least one drop. When this drive signal is pulsed, the growth and contraction of the bubbles are performed immediately and appropriately, so the liquid (ink) with excellent responsiveness is used.
It is more preferable that the discharge can be achieved. This pulse-shaped drive signal is described in US Pat. No. 4,463,359,
Those described in US Pat. No. 4,345,262 are suitable. If the conditions described in US Pat. No. 4,313,124 of the invention relating to the rate of temperature rise on the heat acting surface are adopted, more excellent recording can be performed.

As the constitution of the recording head, in addition to the combination constitution of the discharge port, the liquid passage, and the electrothermal converting element (the linear liquid passage or the right-angled liquid passage) as disclosed in the above-mentioned respective specifications. U.S. Pat. No. 4,558,333, US Pat. No. 4,558,333, which discloses a configuration in which a heat acting portion is arranged in a bending region.
A configuration using the specification of No. 459600 is also included in the present invention. In addition, for multiple electrothermal conversion elements,
Japanese Unexamined Patent Publication No. 59-123670, which discloses a configuration in which a common slit is used as a discharge portion of an electrothermal conversion element, and Japanese Patent Laid-Open No. 59-59, which discloses a configuration in which an opening for absorbing a pressure wave of thermal energy is associated with the discharge portion. The effects of the present invention are effective even with a configuration based on Japanese Patent Laid-Open No. 138461. That is, according to the present invention, recording can be surely and efficiently performed regardless of the form of the recording head.

Further, the present invention can be effectively applied to a full line type recording head having a length corresponding to the maximum width of a recording medium material that can be recorded by the recording apparatus. Such a recording head may have a configuration that satisfies the length by a combination of a plurality of recording heads or a configuration as one recording head integrally formed.

In addition, even in the case of the serial type as in the above example, the recording head fixed to the main body of the apparatus, or the electrical connection to the main body of the apparatus or the ink from the main body of the apparatus by being attached to the main body of the apparatus. The present invention is also effective when a replaceable chip-type recording head that can be supplied or a cartridge-type recording head in which an ink tank is integrally provided in the recording head itself is used.

Further, as the constitution of the recording apparatus of the present invention, it is preferable to add ejection recovery means of the recording head, preliminary auxiliary means and the like because the effects of the present invention can be further stabilized. Specifically, heating is performed by using a capping unit, a cleaning unit, a pressure or suction unit for the recording head, an electrothermal conversion element or a heating element other than this, or a combination thereof. Examples thereof include a preliminary heating unit for performing the discharge and a preliminary discharge unit for performing discharge different from the recording.

Regarding the type and number of recording heads to be mounted, for example, only one is provided corresponding to a single color ink, or a plurality of inks having different recording colors and densities are supported. A plurality of pieces may be provided. That is, for example, the recording mode of the recording apparatus is not limited to the recording mode of only the mainstream color such as black, but it may be either the recording head is integrally formed or a plurality of combinations may be used. The present invention is also extremely effective for an apparatus provided with at least one of full-color recording modes by color mixing.

In addition, as the form of the ink jet recording apparatus of the present invention, other than the one used as an image output terminal of information processing equipment such as a computer, a copying apparatus combined with a reader or the like, and a facsimile apparatus having a transmitting / receiving function can be used. It may be a form or the like.

[0048]

As described above, according to the present invention, a plurality of ink ejection openings for ejecting recording liquid to form flying droplets, and ejection energy generating means for forming the flying droplets. Liquid channels arranged in parallel and each communicating with the ink discharge port, a common liquid chamber for supplying the recording liquid to the liquid channels arranged in parallel, and the common liquid chambers arranged in parallel. An air holding chamber having an opening at a position facing each liquid passage and having a gas-liquid interface capable of absorbing the pressure fluctuation generated in the common liquid chamber at the time of discharging the recording liquid through the opening. Since it is provided, it becomes possible to provide an inkjet recording head and an inkjet recording device that can be driven at high speed, and since air can be stably held by the air holding chamber, problems such as non-ejection due to movement of air can be suppressed. thing It can be. Further, according to the recording head of the present invention, the substrate size can be reduced, and the high-speed drive head can be provided at a lower cost.

[Brief description of drawings]

FIG. 1 is a perspective view schematically showing the configuration of an inkjet recording head of the present invention.

FIG. 2 is a cross-sectional view showing each embodiment of the present invention by two structural examples (A) and (B).

3A and 3B are graphs shown as (A) and (B) in which the ink ejection opening meniscus recovery period according to the embodiment shown as (A) and (B) in FIG. 2 of the present invention is compared with that of the conventional example. is there.

FIG. 4 is a perspective view showing a configuration example of an inkjet recording apparatus to which the present invention can be applied.

FIG. 5 is a perspective view showing a configuration of a conventional inkjet recording head.

FIG. 6 is an explanatory diagram showing an ink ejection operation in the inkjet recording head in steps (A) to (F).

FIG. 7 shows the driving operation of the ink jet recording head, the timing [(A1) to (C1)] of the driving signal, and the state [(A2) to (C) in which ejection is performed at each timing.
2)] and FIG.

FIG. 8 is a graph showing the ink ejection opening meniscus recovery period according to a conventional example for each ejection unit.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Restriction part 2 Front wall 3,13 Opening part 4,14 Air holding chamber 10 Ink jet recording head 54 Carriage 61 Ink tank 201 Ink ejection port 202 Liquid passage 203 Thermal action part 204 Common liquid chamber 205 Ink supply port 206 Substrate 207 Barrier part (Partition wall) 208 Top plate

Claims (3)

[Claims] 1. A plurality of ink ejection ports for ejecting a recording liquid to form flying droplets, and ejection energy generating means for forming the flying droplets are individually provided and communicated with the ink ejection ports. A liquid passage arranged in parallel, a common liquid chamber for supplying the recording liquid to the liquid passage arranged in parallel, and an opening portion at a position facing the individual liquid passages arranged in parallel in the common liquid chamber. And an air holding chamber having an air-liquid interface capable of absorbing the pressure fluctuation generated in the common liquid chamber when the recording liquid is ejected through the opening. 2. The ink jet recording head according to claim 1, wherein the ejection energy generating means is an electrothermal conversion element that generates thermal energy that causes film boiling in the recording liquid in the liquid passage. . 3. A plurality of ink ejection ports for ejecting a recording liquid to form flying droplets, and ejection energy generating means for forming the flying droplets are individually provided and communicated with the ink ejection ports. A liquid passage arranged in parallel, a common liquid chamber for supplying the recording liquid to the liquid passage arranged in parallel, and an opening portion at a position facing the individual liquid passages arranged in parallel in the common liquid chamber. The energy generating means of the inkjet recording head having an air holding chamber having a gas-liquid interface capable of absorbing the pressure fluctuation generated in the common liquid chamber at the time of discharging the recording liquid through the opening is selectively used. The ink is ejected toward the recording material from an ink ejection port of a liquid path having the driven energy generating means, and recording is performed on the recording material by the flying droplets. Inkjet recording device.