JPH08297276A - Production of plasma cell - Google Patents

Abstract

PURPOSE: To prevent the failure and deformation of a thin sheet, such as dielectric sheet by placing the thin sheet on a surface plate dispersed with glass beads, further placing a plasma substrate formed with plasma electrodes and partition walls and supported by a frit material thereon and firing the frit material, thereby adhering the dielectric sheet and the plasma substrate. CONSTITUTION: The dielectric sheet 1 which is the thin sheet is placed on the surface plate 3 dispersed with the glass beads 2 and the plasma substrate 4 formed with the plasma electrodes 5 and the partition walls 7 and supported by the frit material 5 is placed thereon. The dielectric sheet 1 and the plasma substrate 4 are adhered by firing the frit material 5. The glass beads 2 are eventually held between the surface plate 3 and the dielectric sheet 1 and the layer of air is assured and, therefore, the attraction by static electricity does not arise. The dielectric sheet 1 is supported at many points by the glass beads 2 and, therefore, the slip of the dielectric sheet 1 with the surface plate 3 improves. Since the softening point of the glass beads 2 is high, the deformation does not arise.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a plasma cell in which a pixel is selected by using plasma to drive an electro-optical material layer.

[0002]

2. Description of the Related Art A liquid crystal image display device for displaying an image using liquid crystal as an electrochemical material has a thinner structure than a liquid crystal image display device using a cathode ray tube, and is therefore a wristwatch, a calculator or a portable personal computer. Widely used as a display device for computers.

Recently, as one type of the liquid crystal image display device, a plasma addressed liquid crystal display device has been proposed which drives the liquid crystal by utilizing discharge plasma.

This plasma addressed liquid crystal display device is formed by laminating an electro-optical display cell and a plasma cell via a thin dielectric sheet. That is, this plasma addressed liquid crystal display device has a flat panel structure in which an electro-optical display cell, a plasma cell and a dielectric sheet interposed therebetween are laminated.

The plasma cell is formed by hermetically bonding a plasma substrate having plasma electrodes and partition walls and a dielectric sheet with a frit material made of, for example, low melting point glass. This step is called a frit firing step in the plasma cell manufacturing method. In this frit firing step, the frit material has a temperature of, for example, 450 ° C. (frit firing temperature).
Is fired to bond the plasma substrate and the dielectric sheet.

[0006]

By the way, in the frit firing step, the plasma substrate and the dielectric sheet are bonded by the frit material as described above, but until now, the dielectric sheet has been damaged or deformed. There was something that happened.

Conventionally, in the frit firing step, as shown in FIG. 6, the partition wall 60 and the anode electrode 59 not shown are already formed on the dielectric sheet 53 placed on the metal surface plate 70.
Plasma substrate 58 on which A and the cathode electrode 59K are formed
Was placed in a state of being supported by the frit material 61, and a weight 71 was placed on the plasma substrate 58, and then the frit material 61 was baked. Here, the weight 71 includes a partition wall 6 between the dielectric sheet 53 and the plasma substrate 58.
A chip tube 72 connected to the lower substrate 58 in order to exhaust gas from the inside of the discharge channel 62 formed by being divided by 0.
A hole 73 is formed for the passage.

Since the dielectric sheet 53 is in direct contact with the metal surface plate 70, static electricity is generated between them. Therefore, even if both ends of the dielectric sheet 53 are fused to the lower substrate 58 by the frit material 61, the dielectric sheet 53 is adsorbed to the metal surface plate 70 and may be damaged when removed after firing. It was In addition, as shown in FIG. 7A, due to the static electricity, between the dielectric sheet 53 and the lower substrate 58,
For example, the dielectric sheet 53 sometimes sags such that a gap having a height equal to or greater than the height of the frit material 61 or the partition wall 60 of about 200 μm is generated. Since the ionizable gas is sealed in the discharge channel 62 as described above, it is necessary to exhaust gas through the tip tube 72 as a pretreatment. Therefore, when exhausting is performed, as shown in FIG. 7B, the dielectric sheet 53 is bent and bonded to the tops of the partition walls 60.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a method of manufacturing a plasma cell capable of preventing damage and deformation of a thin plate such as a dielectric sheet.

[0010]

In order to solve the above-mentioned problems, a method of manufacturing a plasma cell according to the present invention comprises placing a thin plate on a platen in which glass beads are dispersed, and further forming a plasma electrode and The plasma substrate on which the partition walls are formed is supported by a frit material and placed, and the frit material is fired to bond the dielectric sheet and the plasma substrate.

[0011]

[Function] When the frit material is fired to bond the thin plate and the plasma substrate to each other, glass beads having a softening point higher than that of the frit material and ensuring hardness are interposed between the surface plate and the thin plate. Since an air layer is secured, the occurrence of adsorption due to static electricity can be suppressed.

[0012]

EXAMPLES Examples of the plasma cell manufacturing method according to the present invention will be described below.

In this embodiment, a plasma addressed liquid crystal (Pl
When manufacturing a plasma cell used for an asma Addressed Liquid Crystal (LCD) display device, a thin dielectric sheet 1 is placed on a surface plate 3 in which glass beads 2 are dispersed as shown in FIG. A method of manufacturing a plasma address cell in which a plasma substrate 4 on which a plasma electrode 6 and a partition wall 7 are formed is supported by a frit material 5 and the frit material 5 is baked to bond the dielectric sheet 1 and the plasma substrate 4 together. Is.

The dielectric sheet 1 is required to be thin in order to drive the electro-optical display cell which constitutes the plasma addressed liquid crystal display device together with the plasma cell, for example, 50 μm.
It is a thin plate of about m.

The frit material 5 is made of, for example, low melting point glass or the like, and is fired at 450 ° C. to bond the dielectric sheet 1 and the plasma substrate 4 together.

The glass beads 2 have a particle diameter of 6 μm, a particle size distribution of about 1% and a softening point of 1260 ° C.
A silica spacer manufactured by Tokuyama Soda Co., Ltd. is suitable. The glass beads 2 are mixed with a solvent composed of isopropyl alcohol and water, and as shown in FIG.
It is preferable to spray from the above and disperse on the surface plate 3.

Therefore, according to the method of manufacturing the plasma cell of this embodiment, the glass beads 2 are sandwiched between the surface plate 3 and the dielectric sheet 1, and a layer of air is secured, so that static electricity is generated. No adsorption occurs. Moreover, since the dielectric sheet 1 is supported by the glass beads 2 at many points, the sliding of the dielectric sheet 1 with respect to the surface plate 3 is improved. Also,
Since the softening point of the glass beads 2 is higher than the baking temperature of 450 ° C. of the frit material 5 such as 1260 ° C., the glass beads 2 are not deformed until after the frit baking. The overall hardness of the dispersed glass beads 2 can be controlled by the dispersion density. For example, in the case of this embodiment, 100 / mm ² or more is sufficient.

Therefore, according to the method of manufacturing the plasma cell of the present embodiment, damage and deformation of the dielectric sheet can be prevented.

A plasma addressed liquid crystal display device having a plasma cell manufactured by such a plasma cell manufacturing method will be described below with reference to FIGS.

The electro-optical display cell 11 is constructed by using an upper glass substrate (hereinafter referred to as an upper substrate) 14. On the inner main surface of the upper substrate 14, a plurality of data electrodes 15 made of a transparent conductive film material and extending in the row direction are formed in parallel in the column direction at predetermined intervals. The upper substrate 14 is bonded to the dielectric sheet 1 with a spacer 16 keeping a predetermined space. A liquid crystal layer 17 is formed by filling the gap between the upper substrate 14 and the dielectric sheet 1 with liquid crystal as an electro-optical material. Here, the size of the gap between the upper substrate 1 and the dielectric sheet 1 is, for example, 4 to 10 μm.
m, which is kept uniform over the entire display surface. Note that other than liquid crystal can be used as the electro-optical material.

On the other hand, the plasma cell 12 is constructed by using the plasma substrate 4 which is the lower glass substrate. On the inner main surface of the plasma substrate 4, a plurality of anode electrodes 6A and cathode electrodes 6K that form plasma electrodes and extend in the column direction are formed.
Are alternately formed at predetermined intervals and are formed in parallel in the row direction. In addition, a partition wall 7 having a predetermined width is formed so as to extend along the electrodes at substantially the center of each upper surface of the anode electrode 6A and the cathode electrode 6K. Then, the top of each partition wall 7 is brought into contact with the lower surface of the dielectric sheet 1, and the size of the gap between the plasma substrate 4 and the dielectric sheet 1 is kept constant.

Further, a frit material 5 made of low melting point glass or the like is arranged along the peripheral portion of the plasma substrate 4 to hermetically bond the plasma substrate 4 and the dielectric sheet 1. An ionizable gas is filled in the gap between the plasma substrate 4 and the dielectric sheet 1. As the gas to be sealed, for example, helium, neon, argon, or a mixed gas thereof is used.

In the gap between the plasma substrate 4 and the dielectric sheet 1, a plurality of discharge channels (spaces) 22 which are separated by each partition wall 7 and extend in the column direction are formed in parallel in the row direction. That is, the discharge channel 2 is formed so as to be orthogonal to the data electrode 15. Each data electrode 15 serves as a column drive unit, each discharge channel 22 serves as a row drive unit, and a pixel 23 is defined at the intersection of both as shown in FIG.

In the above structure, when a predetermined voltage is applied between the anode electrode 6A and the cathode electrode 6K corresponding to the predetermined discharge channel 22, the discharge channel 22 is discharged.
The gas in the area is selectively ionized to generate plasma discharge, and the inside thereof is maintained at substantially the anode potential. When a data voltage is applied to the data electrode 15 in this state,
A data potential is written to the liquid crystal layer 17 of the plurality of pixels 23 arranged in the column direction corresponding to the discharge channel 22 through the dielectric sheet 1. When the plasma discharge ends, the data potential is written to the liquid crystal layer 17 of the plurality of pixels 23 arranged in the column direction corresponding to the discharge channel 22 via the dielectric sheet 1. When the plasma discharge ends, the discharge channel 22 becomes a floating potential, and the data voltage written in the liquid crystal layer 17 of each pixel 23 is held until the next writing period (for example, one field or one frame later). in this case,
The discharge channel 22 functions as a sampling switch, and the liquid crystal layer 17 of each pixel 23 functions as a sampling capacitor.

Since the liquid crystal is operated by the data voltage written in the liquid crystal layer 17 of each pixel 23, display is performed in pixel units. Therefore, as described above, the liquid crystal layer 1 of the plurality of pixels 23 arranged in the column direction by generating the plasma discharge.
It is possible to display a two-dimensional image by sequentially scanning the discharge channel 22 for writing the data voltage to 7 in the row direction.

[0026]

The method of manufacturing a plasma cell according to the present invention comprises placing a thin plate on a surface plate in which glass beads are dispersed,
Further, a plasma substrate on which a plasma electrode and partition walls are formed is supported by a frit material, and the frit material is fired to bond the thin plate and the plasma substrate, so that an air layer is secured. The occurrence of adsorption due to static electricity can be suppressed, and damage and deformation of the thin plate can be prevented.

[Brief description of drawings]

FIG. 1 is a schematic view for explaining an embodiment of a plasma cell manufacturing method according to the present invention.

FIG. 2 is a diagram for explaining dispersion of glass beads on a surface plate.

FIG. 3 is a perspective view of a plasma addressed liquid crystal display device.

FIG. 4 is a cross-sectional view of a plasma addressed liquid crystal display device.

FIG. 5 is a data electrode of a plasma addressed liquid crystal display device,
It is a schematic diagram which shows the arrangement of a plasma electrode and a discharge channel.

FIG. 6 is a schematic diagram for explaining a conventional plasma cell manufacturing method.

FIG. 7 is a schematic diagram for explaining a problem caused by a conventional plasma cell manufacturing method.

[Explanation of symbols]

 1 Dielectric sheet 2 Glass beads 3 Surface plate 4 Plasma electrode 5 Frit material 6 Plasma electrode 7 Partition wall 8 Weight 9 Chip tube

Claims (1)

[Claims] 1. A method of manufacturing a plasma cell used in a plasma address liquid crystal display device, wherein a thin plate is placed on a surface plate in which glass beads are dispersed, and a plasma substrate having a plasma electrode and partition walls formed thereon. A method of manufacturing a plasma cell, which comprises supporting and placing a frit material, and baking the frit material to bond the thin plate and the plasma substrate.