JPH08296010A - Production of aluminum foil for high voltage of electrolytic capacitor - Google Patents

Production of aluminum foil for high voltage of electrolytic capacitor

Info

Publication number
JPH08296010A
JPH08296010A JP10632695A JP10632695A JPH08296010A JP H08296010 A JPH08296010 A JP H08296010A JP 10632695 A JP10632695 A JP 10632695A JP 10632695 A JP10632695 A JP 10632695A JP H08296010 A JPH08296010 A JP H08296010A
Authority
JP
Japan
Prior art keywords
aluminum foil
aluminum
subjected
hours
high voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10632695A
Other languages
Japanese (ja)
Inventor
Tsuyoshi Sakurai
強 櫻井
Kozo Hoshino
晃三 星野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority to JP10632695A priority Critical patent/JPH08296010A/en
Publication of JPH08296010A publication Critical patent/JPH08296010A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To provide a method for producing aluminum foil for high voltage of an aluminum foil having etch pits of high density and capable of remarkably increasing capacitance by improving its electrolytic etching properties. CONSTITUTION: The slab of pure aluminum having >=99.90wt.%. purity is subjected to homogenizing treatment at 450 to 620 deg.C for 1 to 20hr and is successively subjected to hot rolling and cold rolling. After that, it is heated at 180 to 260 deg.C for 1 to 20hr, is subjected to process annealing treatment and is next subjected to final cold rolling at 5 to 25% draft. Then, the obtd. aluminum foil is immersed in pure water of 75 to 95 deg.C having <=10μS electric conductivity for 30 to 250sec to form a hydroxide film, which is furthermore heated at 480 to 620 deg.C for 1 to 5hr and is subjected to final annealing. On the surface of the obtd. aluminum foil, γ-Al2 O3 crystals are present by 25 to 1000 pieces/mm<2> . Furthermore, by its immersion into the same pure water, the hydroxide film of 0.010 to 0.200g/m<2> is formed on the surface.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、エッチング時に均一且
つ適度に溶解し、静電容量が高い電解コンデンサを製造
することができる電解コンデンサ高圧用アルミニウム箔
の製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing an aluminum foil for electrolytic capacitor high voltage, which is capable of producing an electrolytic capacitor which is uniformly and moderately dissolved during etching and has a high capacitance.

【0002】[0002]

【従来の技術】一般に電解コンデンサ用アルミニウム箔
は、その静電容量を増大させることを目的として、電気
化学的又は化学的に表面拡大が行われている。即ち、コ
ンデンサの特性上、静電容量は電極表面の表面積に比例
することから、エッチピットを高密度に発生させること
と同時に、使用する電圧に耐えうる酸化皮膜を付けた後
もピットが潰れず、ピットが高密度である必要がある。
従って、使用する電圧により、通常塩酸ベースのエッチ
ング液中で直流電解を行って箔表面に垂直な方向のエッ
チピットを高密度に発生させる電解コンデンサ高圧用ア
ルミニウム箔と、交流電解を行って海綿状のエッチピッ
トを発生させる電解コンデンサ中低圧陽極用・陰極用ア
ルミニウム箔に分けられる。この両者は材料特性及び表
面特性が極めて異なる。従って、高圧用に作製された箔
を中低圧陽極・陰極用途に使用しても十分な特性は得ら
れない。また、中低圧陽極用・陰極用アルミニウム箔を
高圧用途に使用しても十分な特性は得られない。
2. Description of the Related Art In general, aluminum foil for electrolytic capacitors is electrochemically or chemically surface-expanded for the purpose of increasing its capacitance. That is, since the capacitance is proportional to the surface area of the electrode surface due to the characteristics of the capacitor, high density of etch pits is generated and at the same time the pits do not collapse even after an oxide film that can withstand the voltage used is applied. , The pits should be dense.
Therefore, depending on the voltage used, an electrolytic capacitor high-voltage aluminum foil that normally performs direct current electrolysis in a hydrochloric acid-based etching solution to generate high-density etch pits in the direction perpendicular to the foil surface, and an alternating current electrolysis that causes spongy It is divided into aluminum foil for low voltage anode and cathode for electrolytic capacitors that generate etch pits. The two have very different material properties and surface properties. Therefore, even if a foil manufactured for high pressure is used for medium / low voltage anode / cathode, sufficient characteristics cannot be obtained. Further, even if the aluminum foil for medium / low voltage anode / cathode is used for high pressure, sufficient characteristics cannot be obtained.

【0003】高圧用アルミニウム箔は上述のように直流
エッチング特性の向上を目的として、アルミニウムより
貴な金属、例えばPb,Bi,B等をアルミニウム箔に
添加したり、又はこのアルミニウムより貴な金属を箔表
面に付着させたりして、強制的にエッチング核を形成す
るような処理が実施されている。また、アルミニウム箔
の結晶方位を制御して(100)面の占有率を高めるた
めに、アルミニウム箔を真空中又はアルゴンガス等の不
活性ガス中にて500℃以上の高温に加熱処理すること
も行われている。
As described above, the high-voltage aluminum foil is added with a metal nobler than aluminum, such as Pb, Bi, or B, for the purpose of improving the DC etching characteristics, or a metal nobler than this aluminum is added. A treatment for forcibly forming etching nuclei by adhering to the foil surface is carried out. Further, in order to control the crystal orientation of the aluminum foil and increase the occupation rate of the (100) plane, the aluminum foil may be heat-treated at a high temperature of 500 ° C. or higher in a vacuum or an inert gas such as argon gas. Has been done.

【0004】しかし、従来のエッチング核形成用の金属
をアルミニウム箔に添加したり、箔表面に付着せしめた
りする方法では、当該金属を箔表面に均一分散状態に存
在させることが困難で、エッチング核の数が少ないもの
となったり、逆にエッチング核の数が一部に集中してエ
ッチング時に局部的な溶解が生じたりする結果、良好な
エッチング性能が得られず、ひいては十分な静電容量が
得られないという欠点があった。
However, it is difficult to allow the metal to be present in a uniform dispersed state on the foil surface by the conventional method of adding a metal for forming an etching nucleus to the aluminum foil or adhering it to the foil surface, and thus the etching nucleus is formed. As a result, the number of etching nuclei becomes small, or conversely, the number of etching nuclei concentrates in a part and local dissolution occurs at the time of etching.As a result, good etching performance cannot be obtained and, in turn, sufficient capacitance is not obtained. There was a drawback that it could not be obtained.

【0005】また、アルミニウム箔の結晶方位を(10
0)面の占有率を揃えるために、真空中又はアルゴンガ
ス等の不活性ガス中にて高温加熱処理する方法によって
も、同じく満足できるエッチング性能及び静電容量を得
られないのが実情であった。
The crystal orientation of the aluminum foil is (10
0) Even if a method of heating at high temperature in vacuum or in an inert gas such as argon gas in order to make the occupying ratio of the surface uniform, the same satisfactory etching performance and electrostatic capacity cannot be obtained. It was

【0006】そこで、これらの問題点を解決することを
目的として種々の検討がなされ、その結果、次のような
アルミニウム箔が開発されて提案されている。
Therefore, various studies have been made for the purpose of solving these problems, and as a result, the following aluminum foils have been developed and proposed.

【0007】特開昭63−116417公報には、エッ
チング前のアルミニウム箔表面に、多数のγ−Al23
結晶を均一に分散させた非晶質の酸化皮膜を形成するこ
とによりエッチング特性を向上させた電解コンデンサ用
アルミニウム材料が開示されている。
Japanese Unexamined Patent Publication No. 63-116417 discloses a large number of γ-Al 2 O 3 on the surface of an aluminum foil before etching.
There is disclosed an aluminum material for electrolytic capacitors in which etching characteristics are improved by forming an amorphous oxide film in which crystals are uniformly dispersed.

【0008】[0008]

【発明が解決しようとする課題】しかしながら、上述の
従来のアルミニウム箔には次のような問題がある。即
ち、この特開昭63−116417公報に開示された電
解コンデンサ用アルミニウム材料は、エッチング前のア
ルミニウム箔表面に、多教のγ−Al23結晶を均一に
分散させた非晶質の酸化皮膜を形成することにより、こ
の多数の均一分散するγ−Al23結晶をエッチング核
として、均一なエッチング表面を形成し、高い静電容量
を得ようとしている。
However, the above-mentioned conventional aluminum foil has the following problems. That is, the aluminum material for electrolytic capacitors disclosed in Japanese Patent Laid-Open No. 63-116417 is an amorphous oxide in which polymorphic γ-Al 2 O 3 crystals are uniformly dispersed on the surface of the aluminum foil before etching. By forming a film, a large number of uniformly dispersed γ-Al 2 O 3 crystals are used as etching nuclei to form a uniform etching surface, and a high electrostatic capacity is obtained.

【0009】しかし、このように多数のγ−Al23
晶を均一に分散させた非晶質の酸化皮膜を形成したアル
ミニウム箔は、必ずしも望ましい高密度のエッチピット
を有するものとはいえない。従って、この従来の電解コ
ンデンサ用アルミニウム箔は、静電容量が十分に高いも
のとはいえない。なお、本願発明者等は、種々の実験と
研究を繰り返した結果、この従来技術に開示された方法
で製造したアルミニウム箔は、γ−Al23結晶を10
個/μm2程度存在するものであることが判明した。こ
のように、γ−Al23結晶を10個/μm2程度存在
する箔では、エッチングの起点になるものが少ないた
め、未エッチング部を形成し易く、静電容量の増大効果
を得ることができない。
[0009] However, aluminum foil to form an oxide film having such a large number of γ-Al 2 O 3 crystal was uniformly dispersed amorphous can not be said to have a necessarily desirable high density etch pit . Therefore, the conventional aluminum foil for electrolytic capacitors cannot be said to have a sufficiently high electrostatic capacity. The inventors of the present application repeated various experiments and studies, and as a result, the aluminum foil manufactured by the method disclosed in the prior art has 10 gamma-Al 2 O 3 crystals.
It was found that the number of particles / μm 2 exists. As described above, in a foil having about 10 γ-Al 2 O 3 crystals / μm 2 , there are few starting points for etching, so that it is easy to form an unetched portion and an effect of increasing the capacitance can be obtained. I can't.

【0010】本発明はかかる問題点に鑑みてなされたも
のであって、高密度のエッチピットを有し、電解エッチ
ング性を向上させて静電容量を著しく増大させることが
できる電解コンデンサ高圧用アルミニウム箔の製造方法
を提供することを目的とする。
The present invention has been made in view of the above problems, and has a high density of etch pits and is capable of improving electrolytic etching property and significantly increasing electrostatic capacity, and thus aluminum for high voltage of an electrolytic capacitor. It is an object to provide a method for manufacturing a foil.

【0011】[0011]

【課題を解決するための手段】本発明に係る電解コンデ
ンサ高圧用アルミニウム箔の製造方法は、純度が99.
90重量%以上の純アルミニウムのスラブを、450〜
620℃で1〜20時間均質化処理し、引き続き熱間圧
延及び冷間圧延を行い、180〜260℃で1〜20時
間加熱して中間焼鈍処理し、次いで、5〜25%の圧下
率で最終冷間圧延を行い、その後、得られたアルミニウ
ム箔を75〜95℃で導電率10μS以下の純水に30
〜250秒浸漬し、更に真空中又は不活性ガス雰囲気中
で480〜620℃に1〜5時間加熱して最終焼鈍処理
することを特徴とする。なお、不活性ガスとしては、ア
ルゴンガスなどの外に、窒素ガスを含むものとする。
The method for producing a high voltage aluminum foil for electrolytic capacitors according to the present invention has a purity of 99.
90% by weight or more of pure aluminum slab
Homogenization treatment at 620 ° C for 1 to 20 hours, hot rolling and cold rolling subsequently, heating at 180 to 260 ° C for 1 to 20 hours to perform intermediate annealing treatment, and then at a rolling reduction of 5 to 25%. Final cold rolling is performed, and then the obtained aluminum foil is immersed in pure water having an electric conductivity of 10 μS or less at 75 to 95 ° C.
It is characterized in that it is immersed for ˜250 seconds and further heated at 480 to 620 ° C. for 1 to 5 hours in vacuum or in an inert gas atmosphere for final annealing treatment. The inert gas includes nitrogen gas in addition to argon gas.

【0012】この場合に、得られたアルミニウム箔の表
面に存在するγ−Al23結晶が25〜1000個/m
2であることが好ましい。また、前記純水への浸漬に
より、表面に0.010〜0.200g/m2の水酸化
皮膜を形成することが好ましい。
In this case, 25 to 1000 γ-Al 2 O 3 crystals existing on the surface of the obtained aluminum foil / m.
It is preferably m 2 . Further, it is preferable to form a hydroxide film of 0.010 to 0.200 g / m 2 on the surface by immersion in the pure water.

【0013】[0013]

【作用】本発明においては、上記の課題を解決するた
め、アルミニウム箔の表面に存在するγ−Al23結晶
を好ましくは25〜1000個/μm2とする。従来の
電解コンデンサ用アルミニウム箔の静電容量が不十分で
ある理由としては、前述の如く、γ−Al23結晶の個
数が、従来は10個/μm2程度であったことによる。
そこで、本発明においては、このγ−Al23結晶の個
数を、10個/μm2を超えるものにする。特に、本願
発明者等は、適度に全面がγ−Al23結晶に覆われて
おり、アルミニウム箔表面に25〜1000個/μm2
のγ−Al23結晶が存在する場合に、高密度のエッチ
ピットを有することを見いだした。そして、このような
状態を得るためには、箔表面に0.010〜0.200
g/m2の水酸化皮膜を形成し、真空中又はアルゴンガ
ス等の不活性ガス雰囲気中で480〜620℃の温度で
1〜5時間最終焼鈍すればよい。これにより、箔表面に
25〜1000個/μm2のγ−Al23結晶を形成す
ることができる。
In the present invention, in order to solve the above problems, the number of γ-Al 2 O 3 crystals existing on the surface of the aluminum foil is preferably 25 to 1000 crystals / μm 2 . The reason why the conventional aluminum foil for electrolytic capacitors has an insufficient capacitance is that the number of γ-Al 2 O 3 crystals has been about 10 / μm 2 in the past, as described above.
Therefore, in the present invention, the number of γ-Al 2 O 3 crystals is set to exceed 10 / μm 2 . In particular, the inventors of the present invention have reasonably covered the entire surface with γ-Al 2 O 3 crystals, and the aluminum foil surface has 25 to 1000 pieces / μm 2.
If the the γ-Al 2 O 3 crystals are present, it has been found to have a high density of etch pits. And, in order to obtain such a state, the surface of the foil should have a thickness of 0.010 to 0.200.
A g / m 2 hydroxide film may be formed and finally annealed at a temperature of 480 to 620 ° C. for 1 to 5 hours in vacuum or in an inert gas atmosphere such as argon gas. As a result, 25 to 1000 pieces / μm 2 of γ-Al 2 O 3 crystals can be formed on the foil surface.

【0014】また、このような表面状態を有するアルミ
ニウム箔を得るために、アルミニウムの純度が99.9
0重量%以上の純アルミニウムからなるスラブを、45
0〜620℃の温度に1〜20時間連続的に加熱して均
質化処理し、引き続き熱間圧延及び冷間圧延を行った
後、中間焼鈍時する。この中間焼鈍を180〜260℃
の温度で1〜20時間加熱することにより行った後、圧
下率5〜25%で最終冷間圧延して、所定の製品厚の箔
を得る。その後、表面に0.010〜0.200g/m
2の水酸化皮膜を形成し、真空中又はアルゴンガス等の
不活性ガス雰囲気中で480〜620℃の温度に1〜5
時間加熱して最終焼鈍する。以下、この製造条件につい
て説明する。
In order to obtain an aluminum foil having such a surface condition, the purity of aluminum is 99.9.
A slab consisting of 0% by weight or more of pure aluminum is
It is continuously heated to a temperature of 0 to 620 ° C. for 1 to 20 hours for homogenization treatment, followed by hot rolling and cold rolling, and then at an intermediate annealing. This intermediate annealing is performed at 180 to 260 ° C.
After heating at a temperature of 1 to 20 hours, final cold rolling is performed at a reduction rate of 5 to 25% to obtain a foil having a predetermined product thickness. Then, 0.010 to 0.200 g / m on the surface
2 ) Form a hydroxide film, and in vacuum or in an inert gas atmosphere such as argon gas at a temperature of 480-620 ° C for 1-5
Heat for an hour and finally anneal. The manufacturing conditions will be described below.

【0015】アルミニウムスラブの純度:99.90重
量%以上 アルミニウムスラブの純度は99.90重量%以上であ
ることが必要である。これより低い純度では、不純物の
量が多くなり、(100)面の占有率が90%以上とな
り難く、静電容量の低下が生じる。より好ましくは、9
9.98%以上の純度のアルミニウムスラブを使用す
る。
Purity of aluminum slab: 99.90 weight
The amount of aluminum slab must have a purity of 99.90% by weight or more. If the purity is lower than this, the amount of impurities increases, the occupancy of the (100) plane is less than 90%, and the capacitance decreases. More preferably, 9
Use an aluminum slab with a purity of 9.98% or higher.

【0016】アルミニウム箔の表面状態:γ−Al23
結晶を25〜1000個/μm2 箔表面にγ−Al23結晶を25〜1000個/μm2
存在させる。25個/μm2未満のγ−Al23結晶で
は、エッチピットの起点になる部分が少ないため、未エ
ッチング部を形成し易く、静電容量の低下が生じるので
好ましくない。また、1000個/μm2を超える密度
のγ−Al23結晶では、その密度に差が生じて、局部
溶解が起き易く、静電容量の低下が生じるので好ましく
ない。
Surface condition of aluminum foil: γ-Al 2 O 3
The crystals 25-1000 pieces / [mu] m 2 foil surface γ-Al 2 O 3 crystal 25 to 1000 pieces / [mu] m 2
To exist. A γ-Al 2 O 3 crystal of less than 25 pieces / μm 2 is not preferable because there are few starting points of the etch pits, unetched portions are easily formed, and the capacitance is lowered. Further, a γ-Al 2 O 3 crystal having a density of more than 1000 pieces / μm 2 is not preferable because there is a difference in the density, local dissolution is likely to occur, and the capacitance is lowered.

【0017】均質化処理条件:480〜620℃、1〜
20時間 均質化処理温度は480〜620℃で行う。480℃未
満では不純物がアルミニウム中に十分均一に固溶しにく
くなり、後の工程で不純物が析出しやすくなり、(10
0)面の占有率が90%以上となり、静電容量の低下が
生じるので好ましくない。また、均質化処理温度が62
0℃を超えると、粗大な結晶粒が生じやすくなり、その
後の圧延処理によっても(100)面に回転しにくくな
り、(100)面の占有率が90%以上となり難く、静
電容量の低下が生じるので好ましくない。より好ましく
は、均質化処理温度を500〜600℃とする。
Homogenization treatment conditions: 480-620 ° C., 1-
The homogenization treatment temperature for 20 hours is 480 to 620 ° C. If the temperature is lower than 480 ° C., it becomes difficult for the impurities to form a solid solution in aluminum sufficiently uniformly, and the impurities are likely to precipitate in a later step,
The occupancy rate of the 0) plane becomes 90% or more, and the electrostatic capacity is reduced, which is not preferable. In addition, the homogenization treatment temperature is 62
If the temperature exceeds 0 ° C., coarse crystal grains are likely to be generated, it is difficult to rotate to the (100) plane even in the subsequent rolling treatment, the occupancy of the (100) plane is less than 90%, and the capacitance is lowered. Is generated, which is not preferable. More preferably, the homogenization treatment temperature is 500 to 600 ° C.

【0018】均質化処理時間は1〜20時間である。均
質化処理の加熱時間が1時間未満では、不純物がアルミ
ニウム中に十分均一に固溶することできず、後の工程で
不純物が析出しやすくなり、(100)面の占有率が9
0%以上となり難く、静電容量の低下が生じるので好ま
しくない。均質化処理時間が20時間を超えると、粗大
な結晶粒が生じやすくなり、その後の圧延処理によって
も(100)面に回転しにくくなり、(100)面の占
有率が90%以上となり難く、静電容量の低下が生じる
ので好ましくない。より好ましくは、均質化処理時間は
5〜15時間である。
The homogenization treatment time is 1 to 20 hours. If the heating time of the homogenization treatment is less than 1 hour, the impurities cannot be sufficiently and solid-dissolved in aluminum, and the impurities are likely to precipitate in the subsequent step, and the occupancy of the (100) plane is 9%.
It is not preferable because it is hard to be 0% or more and the capacitance is lowered. When the homogenization treatment time exceeds 20 hours, coarse crystal grains are likely to be generated, and it is difficult to rotate to the (100) plane even by the subsequent rolling treatment, and the occupancy of the (100) plane is less than 90%, It is not preferable because the capacitance is lowered. More preferably, the homogenization treatment time is 5 to 15 hours.

【0019】中間焼鈍条件:180〜260℃、1〜2
0時間 均質化処理した後、熱間圧延し、その後冷間圧延する。
そして、この冷間圧延後、中間焼鈍する。中間焼鈍温度
は180〜260℃で行う。中間焼鈍温度が180℃未
満では(100)面の結晶粒がほとんど成長せず、(1
00)面の占有率が90%以上となり難く、静電容量の
低下が生じるので好ましくない。中間処理温度が260
℃を超えると、(100)面以外の結晶粒が成長して、
(100)面の占有率が90%以上となり難く、静電容
量の低下が生じるため好ましくない。より好ましくは、
中間焼鈍温度を200〜240℃とする。
Intermediate annealing conditions: 180 to 260 ° C., 1-2
After homogenizing for 0 hours , hot rolling is performed, and then cold rolling is performed.
Then, after this cold rolling, intermediate annealing is performed. The intermediate annealing temperature is 180 to 260 ° C. When the intermediate annealing temperature is less than 180 ° C., the crystal grains on the (100) plane hardly grow,
It is not preferable because the occupation ratio of the (00) plane is less than 90% and the electrostatic capacity is lowered. Intermediate processing temperature is 260
When it exceeds ℃, crystal grains other than (100) plane grow,
The occupancy of the (100) plane is unlikely to be 90% or more, and the capacitance is lowered, which is not preferable. More preferably,
The intermediate annealing temperature is 200 to 240 ° C.

【0020】中間焼鈍時間は1〜20時間である。中間
焼鈍時間が1時間未満では、(100)面の結晶粒がほ
とんど成長せず、(100)面の占有率が90%以上と
なり難く、静電容量の低下が生じるので好ましくない。
中間焼鈍時間が20時間を超えると、(100)面以外
の結晶粒が成長して(100)面の占有率が90%以上
となり難く、静電容量の低下が生じる。より好ましく
は、中間焼鈍時間を5〜15時間とする。
The intermediate annealing time is 1 to 20 hours. If the intermediate annealing time is less than 1 hour, the crystal grains of the (100) plane hardly grow, the occupancy of the (100) plane is less than 90%, and the capacitance is lowered, which is not preferable.
When the intermediate annealing time exceeds 20 hours, crystal grains other than the (100) plane grow and the occupancy of the (100) plane does not easily reach 90% or more, and the capacitance decreases. More preferably, the intermediate annealing time is 5 to 15 hours.

【0021】最終冷間圧延条件:圧下率5〜25% 中間焼鈍後、最終冷間圧延する。最終冷間圧延における
圧下率は5〜25%とする。圧下率が5%未満では歪み
量が少なく、(100)面に回転しにくくなり、(10
0)面の占有率が90%以上となり難く、静電容量の低
下が生じるので好ましくない。圧下率が25%を超える
と、歪み量が多く、(100)面以外の面の成長が進
み、(100)面の占有率が90%以上となり難く、静
電容量の低下が生じる。従って、最終冷間圧延時の圧下
率は5〜25%とするが、より好ましくは10〜20%
である。
Final cold rolling condition: Final cold rolling after intermediate annealing of 5 to 25% reduction . The rolling reduction in the final cold rolling is 5 to 25%. If the rolling reduction is less than 5%, the amount of strain is small, and it becomes difficult to rotate on the (100) plane.
The occupancy of the (0) plane is less than 90%, and the electrostatic capacity is lowered, which is not preferable. When the rolling reduction exceeds 25%, the amount of strain is large, the growth of the planes other than the (100) plane proceeds, the occupation rate of the (100) plane does not easily reach 90% or more, and the capacitance decreases. Therefore, the rolling reduction at the final cold rolling is 5 to 25%, more preferably 10 to 20%.
Is.

【0022】水酸化皮膜:0.010〜0.200g/
2 最終冷間圧延後、アルミニウム箔の表面に0.010〜
0.200g/m2のAl水酸化皮膜を形成する。水酸
化皮膜が0.010g/m2未満では、箔表面に25個
/μm2未満のγ−Al23結晶しか存在せず、エッチ
ピットの起点になる部分が少ないため、未エッチング部
が形成され易く、静電容量の低下が生じるので好ましく
ない。また、水酸化皮膜が0.200g/m2を超える
と、γ−Al23結晶の密度に差が生じやすく、局部溶
解が起きて静電容量の低下が生じるので好ましくない。
Hydroxide film: 0.010 to 0.200 g /
m 2 After the final cold rolling, 0.010 to 10
An Al hydroxide film of 0.200 g / m 2 is formed. If the hydroxide film is less than 0.010 g / m 2, there are only 25 γ-Al 2 O 3 crystals on the foil surface and less than 25 μm 2 μ3 of γ-Al 2 O 3 crystals are present, and the starting point of the etch pit is small. It is not preferable because it is easily formed and the electrostatic capacity is reduced. On the other hand, if the hydroxide film exceeds 0.200 g / m 2 , the density of γ-Al 2 O 3 crystals is likely to be different, and local dissolution occurs to lower the capacitance, which is not preferable.

【0023】なお、このようにアルミニウム箔の表面
に、0.010〜0.200g/m2の水酸化皮膜を形
成させる方法としては、75〜95℃の導電率10μS
以下の純水に、アルミニウム箔を30〜250秒間浸漬
させればよい。
As a method of forming a hydroxide film of 0.010 to 0.200 g / m 2 on the surface of the aluminum foil in this way, the conductivity at 75 to 95 ° C. is 10 μS.
The aluminum foil may be immersed in the following pure water for 30 to 250 seconds.

【0024】最終焼鈍処理条件:真空中又は不活性ガス
雰囲気中、480〜620℃、1〜5時間 最終焼鈍処理を、真空中又は窒素ガス若しくはアルゴン
ガス等の不活性ガス中(酸素濃度20ppm以下)で行
う。大気中で480〜620℃の温度の焼鈍を行うと、
酸化皮膜厚が極めて高くなり、静電容量の低下が生じる
ので好ましくない。また、炉内における圧力を、真空下
では1×10-2Torr程度とし、不活性ガス雰囲気下
では600〜760Torr程度にするのが望ましい。
Final annealing treatment conditions: vacuum or inert gas
The final annealing treatment is performed in an atmosphere at 480 to 620 ° C. for 1 to 5 hours in vacuum or in an inert gas such as nitrogen gas or argon gas (oxygen concentration is 20 ppm or less). When annealing at a temperature of 480 to 620 ° C. in the atmosphere,
This is not preferable because the thickness of the oxide film becomes extremely high and the capacitance decreases. The pressure in the furnace is preferably about 1 × 10 -2 Torr under vacuum, and about 600 to 760 Torr under an inert gas atmosphere.

【0025】焼鈍温度は480〜620℃である。焼鈍
温度が480℃未満では、(100)面の占有率が90
%以上となり難く、静電容量の低下が生じるので好まし
くない。一方、焼鈍温度が620℃を超えると、箔同士
の拡散結合(ブロッキング)が発生するので好ましくな
い。より好ましくは、最終焼鈍温度は500〜590℃
とする。
The annealing temperature is 480 to 620 ° C. When the annealing temperature is lower than 480 ° C, the occupation ratio of the (100) plane is 90
% Or more and it is difficult to reduce the capacitance, which is not preferable. On the other hand, if the annealing temperature exceeds 620 ° C., diffusion bonding (blocking) between foils occurs, which is not preferable. More preferably, the final annealing temperature is 500-590 ° C.
And

【0026】焼鈍時間を1〜5時間で行う。焼鈍時間が
1時間未満では(100)面の占有率が90%以上とな
り難く、静電容量の低下が生じるので好ましくない。焼
鈍時間が5時間を超えると、箔同士の拡散結合(ブロッ
キング)が発生するので好ましくない。より好ましく
は、最終焼鈍時間を2〜4時間とする。
The annealing time is 1 to 5 hours. If the annealing time is less than 1 hour, the occupancy of the (100) plane is unlikely to be 90% or more, and the capacitance is lowered, which is not preferable. If the annealing time exceeds 5 hours, diffusion bonding (blocking) between the foils occurs, which is not preferable. More preferably, the final annealing time is 2 to 4 hours.

【0027】[0027]

【実施例】以下、本発明の実施例についてその比較例と
比較して説明する。下記表1に示す純度のスラブを半連
続鋳造法により作製し、このスラブに表1に示す製造工
程で均一化処理を施し、熱間圧延を実施し、中間焼鈍を
挟みながらの冷間圧延により100μmの厚さの箔を得
た。そして、80℃で導電率が10μSの純水に箔(1
000mm幅のコイル)を浸漬して水酸化皮膜を形成し
た後、コイル幅を500mmにし、最終焼鈍して調質を
O材とした。得られたアルミニウム箔をサンプルとし、
箔表面のγ−Al23結晶の密度、静電容量、純水浸漬
前後の重量変化値及び(100)面の占有率を調査し
た。
EXAMPLES Examples of the present invention will be described below in comparison with comparative examples. A slab having the purity shown in Table 1 below was produced by a semi-continuous casting method, the slab was subjected to a homogenization treatment in the production process shown in Table 1, hot rolling was performed, and cold rolling was performed while sandwiching intermediate annealing. A foil with a thickness of 100 μm was obtained. Then, the foil (1
000 mm width coil) was dipped to form a hydroxide film, the coil width was adjusted to 500 mm, and the final annealing was performed to obtain an O material. Using the obtained aluminum foil as a sample,
The density of γ-Al 2 O 3 crystals on the foil surface, the electrostatic capacity, the weight change value before and after immersion in pure water, and the occupancy of the (100) plane were investigated.

【0028】純水浸漬前後の重量変化測定 純水浸漬前後の箔を150mm角にて採取し、その重量
を測定し、(純水浸漬後の重量)−(純水浸漬前の重
量)を算出し、これをg/m2に換算した。
Measurement of weight change before and after immersion in pure water The foil before and after immersion in pure water was sampled in a 150 mm square, and the weight was measured to calculate (weight after immersion in pure water)-(weight before immersion in pure water). Then, this was converted to g / m 2 .

【0029】電解エッチング条件 85℃で、濃度5重量%の塩酸中に浸漬し、100mA
/cm2の電流密度で直流エッチングを1000秒間行
う。
Electrolytic etching conditions: Dipped in hydrochloric acid having a concentration of 5% by weight at 85 ° C. to obtain 100 mA.
Direct current etching is performed for 1000 seconds at a current density of / cm 2 .

【0030】化成処理条件 純水1リットル中に、リン酸:0.25ml、リン酸ア
ンモニウム:1.4gを添加し、液温85±2.5℃、
化成時間25分、化成電圧375Vで化成処理した。
Chemical conversion treatment conditions Phosphoric acid: 0.25 ml and ammonium phosphate: 1.4 g were added to 1 liter of pure water, and the liquid temperature was 85 ± 2.5 ° C.
The formation time was 25 minutes, and the formation treatment was performed at a formation voltage of 375V.

【0031】静電容量測定 純水1リットル中に、ホウ酸:50g、クエン酸:50
g及びアンモニア:50mlを添加し、液温30±5
℃、周波数:120Hzの条件で、万能ブリッジにより
測定した。測定部位はコイルの中央部分である。
Capacitance measurement In 1 liter of pure water, boric acid: 50 g, citric acid: 50
g and ammonia: 50 ml was added, and the liquid temperature was 30 ± 5.
The measurement was performed using a universal bridge under the conditions of ° C and frequency: 120 Hz. The measurement site is the central part of the coil.

【0032】(100)面の占有率測定 塩酸、硝酸及びフッ酸によりマクロエッチングを行い、
予め用意した標準サンプルとの比較によって、画像解析
装置によりその面積率を測定した。測定部位はコイルの
中央部分である。
Occupancy rate measurement of (100) plane Macro etching was carried out with hydrochloric acid, nitric acid and hydrofluoric acid,
The area ratio was measured by an image analyzer by comparison with a standard sample prepared in advance. The measurement site is the central part of the coil.

【0033】箔表面のγ−Al23結晶の密度測定 箔表面をSEMにて観察し、3ヶ所にて写真撮影した。
この写真をもとに、γ−Al23結晶の密度を求めた。
倍率は10000倍、密度は3ヶ所の平均値により求め
た。観察部位はコイルの中央部分である。
Density measurement of γ-Al 2 O 3 crystal on foil surface The foil surface was observed by SEM and photographed at three places.
The density of the γ-Al 2 O 3 crystal was determined based on this photograph.
The magnification was 10,000 times, and the density was obtained from the average value at three points. The observation site is the central part of the coil.

【0034】[0034]

【表1】 [Table 1]

【0035】[0035]

【表2】 [Table 2]

【0036】得られたアルミニウム箔の表面のγ−Al
23結晶密度、静電容量、純水浸漬前後の重量変化値及
び(100)面の占有率の夫々測定結果を前記表2に示
す。この表2から明らかなように、本発明の実施例に係
るNo.1〜のアルミニウム箔は静電容量が高い。これ
に対し、本発明の範囲から外れる比較例のアルミニウム
箔は静電容量が低い。
Γ-Al on the surface of the obtained aluminum foil
Table 2 shows the measurement results of the 2 O 3 crystal density, capacitance, weight change value before and after immersion in pure water, and (100) plane occupancy. As is clear from Table 2, No. 1 according to the embodiment of the present invention. The aluminum foils 1 to 1 have high capacitance. On the other hand, the aluminum foil of the comparative example outside the scope of the present invention has a low capacitance.

【0037】[0037]

【発明の効果】以上説明したように、本発明に係るアル
ミニウム箔は、電解エッチング性が優れているので、高
い静電容量を示す電解コンデンサ高圧用アルミニウム箔
を製造することができ、本発明の適用により、高性能な
電解コンデンサを得ることができるという工業上顕著な
効果を奏するものである。
As described above, since the aluminum foil according to the present invention is excellent in electrolytic etching property, it is possible to manufacture an aluminum foil for high voltage of an electrolytic capacitor having a high capacitance. When applied, it has an industrially remarkable effect that a high-performance electrolytic capacitor can be obtained.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 純度が99.90重量%以上の純アルミ
ニウムのスラブを、450〜620℃で1〜20時間均
質化処理し、引き続き熱間圧延及び冷間圧延を行い、1
80〜260℃で1〜20時間加熱して中間焼鈍処理
し、次いで、5〜25%の圧下率で最終冷間圧延を行
い、その後、得られたアルミニウム箔を75〜95℃で
導電率10μS以下の純水に30〜250秒浸漬し、更
に真空中又は不活性ガス雰囲気中で480〜620℃に
1〜5時間加熱して最終焼鈍処理することを特徴とする
電解コンデンサ高圧用アルミニウム箔の製造方法。
1. A slab of pure aluminum having a purity of 99.90% by weight or more is homogenized at 450 to 620 ° C. for 1 to 20 hours, followed by hot rolling and cold rolling.
Intermediate annealing treatment is performed by heating at 80 to 260 ° C. for 1 to 20 hours, and then final cold rolling is performed at a reduction rate of 5 to 25%, and then the obtained aluminum foil is subjected to an electrical conductivity of 10 μS at 75 to 95 ° C. An aluminum foil for electrolytic capacitor high voltage, which is characterized in that it is immersed in the following pure water for 30 to 250 seconds and further heated at 480 to 620 ° C. for 1 to 5 hours in a vacuum or an inert gas atmosphere for final annealing treatment. Production method.
【請求項2】 得られたアルミニウム箔の表面に存在す
るγ−Al23結晶が25〜1000個/mm2である
ことを特徴とする請求項1に記載の電解コンデンサ高圧
用アルミニウム箔の製造方法。
2. The aluminum foil for electrolytic capacitor high voltage according to claim 1, wherein the aluminum foil obtained has 25 to 1000 crystals / mm 2 of γ-Al 2 O 3 on the surface thereof. Production method.
【請求項3】 前記純水への浸漬により、表面に0.0
10〜0.200g/m2の水酸化皮膜を形成すること
を特徴とする請求項1又は2に記載の電解コンデンサ高
圧用アルミニウム箔の製造方法。
3. The surface is exposed to 0.0 by immersion in the pure water.
The method for producing an aluminum foil for high voltage of an electrolytic capacitor according to claim 1 or 2, wherein a hydroxide film of 10 to 0.200 g / m 2 is formed.
JP10632695A 1995-04-28 1995-04-28 Production of aluminum foil for high voltage of electrolytic capacitor Pending JPH08296010A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10632695A JPH08296010A (en) 1995-04-28 1995-04-28 Production of aluminum foil for high voltage of electrolytic capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10632695A JPH08296010A (en) 1995-04-28 1995-04-28 Production of aluminum foil for high voltage of electrolytic capacitor

Publications (1)

Publication Number Publication Date
JPH08296010A true JPH08296010A (en) 1996-11-12

Family

ID=14430798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10632695A Pending JPH08296010A (en) 1995-04-28 1995-04-28 Production of aluminum foil for high voltage of electrolytic capacitor

Country Status (1)

Country Link
JP (1) JPH08296010A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002226930A (en) * 2001-02-02 2002-08-14 Nippon Foil Mfg Co Ltd Hard aluminum foil for electrode of electrolytic capacitor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002226930A (en) * 2001-02-02 2002-08-14 Nippon Foil Mfg Co Ltd Hard aluminum foil for electrode of electrolytic capacitor

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