JPH08294852A - Glass plate polishing device - Google Patents

Abstract

PURPOSE: To provide a glass plate polishing device which can yield high quality glass plates polished precisely and uniformly. CONSTITUTION: In a glass plate polishing device, a glass plate 40 is supported fast on a turntable 31 by means of vacuum suction and polished, wherein a ring-shaped groove 31a for vacuum suction and a ring-shaped atmosphere releasing groove 31b having a smaller radius than the vacuum suction groove 31a are formed on the oversurface of the turntable 31. When vacuum sucked in this polishing device, glass plate is not deformed substantially, and there is less turn-around of the polish etc., to the rear of the glass plate, so that it is possible to yield high quality glass plates which are polished precisely and uniformly.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass master polishing apparatus. Specifically, by using a turntable in which an annular vacuum suction groove and an atmosphere release groove are formed,
This makes it possible to polish a glass master disc with high precision.

[0002]

2. Description of the Related Art A glass master disk polishing apparatus is an apparatus for polishing a glass master disk used for an optical disk or the like, and has a disk-shaped turntable for supporting and fixing the glass master disk by vacuum suction when polishing the glass master disk. . On the upper surface of this turntable, that is, on the main surface in contact with the glass master, for example, as shown in FIG.
00 and two concentric grooves, that is, the first annular groove 101.
And a second annular groove 102 having a radius smaller than that of the first annular groove 101, and a plurality of radial grooves 103 extending from the center of the turntable 100 to the first annular groove 101. Are formed. The center of the radial grooves 103, that is, the turntable 10
An opening 104 communicating with the vacuum device is formed at the center of 0.

Then, such a turntable 100
When the glass master disk is polished by the glass master disk polishing apparatus equipped with, the glass master disk 110 is arranged on the turntable 100 as shown in FIG. 6, and the vacuum master is used as shown by an arrow B in FIG. Opening 1 of turntable 100
Exhaust from 04. This makes the turntable 100
And the glass master disk 110, that is, the turntable 1
The annular grooves 101 and 102 of 00 and the radial grooves 103 are in a vacuum state, and the glass master 110 is vacuum-adsorbed and fixed on the turntable 100. Then, the glass master 110 is supported and fixed on the turntable 100 by vacuum suction, and the surface 110a of the glass master 110 is rotated while rotating the turntable 100 together with the glass master 110 as shown by an arrow M1 in FIG.
The glass master 110 is polished by spraying an abrasive on the glass.

[0004]

However, in the conventional glass master disk polishing apparatus as described above, when the glass master disk is vacuum-adsorbed on the turntable, it is affected by the circular groove and the radial groove of the turntable. , The glass master was deformed. Therefore, in the conventional glass master disk polishing apparatus, there is a problem that the surface of the glass master disk cannot be highly accurately and uniformly polished due to the deformation of the glass master disk due to the influence of the shape of the turntable.

Further, in the conventional glass master polishing apparatus, when the vacuum suction is performed, the air is exhausted from the opening in the center of the turntable. Therefore, the abrasive or the like scattered on the surface of the glass master for polishing the glass master is not It was easy to get around the back of the master. Then, the polishing agent thus sneaking around on the back surface of the glass master disk contaminates the back surface of the glass master disk and the top surface of the turntable, which adversely affects the quality and accuracy of the glass master disk.

As described above, in the conventional glass master disk polishing apparatus, it is difficult to polish the glass master disk with high precision because of problems such as deformation of the glass master disk and sneaking of an abrasive or the like to the back surface of the glass master disk. It was

Therefore, the present invention has been proposed in view of such a conventional situation, and the deformation of the glass master disk caused when the glass master disk is vacuum-sucked is small, and the back surface of the glass master disk such as an abrasive is reduced. It is an object of the present invention to provide a glass master disk polishing device capable of preventing the glass master disk from wrapping around and polishing the glass master disk with high accuracy.

[0008]

The glass master polishing apparatus according to the present invention, which has been completed to achieve the above object, polishes the glass master by supporting and fixing the glass master on a turntable by vacuum suction. A glass master polishing apparatus, wherein an annular vacuum suction groove and an annular atmosphere release groove having a smaller radius than the vacuum suction groove are formed on the main surface of the turntable on the side in contact with the glass master. It is characterized by being.

[0009]

In the glass master polishing apparatus according to the present invention, vacuum suction is performed only by one annular groove, that is, the vacuum suction groove. Therefore, even if the glass master disk is vacuum-sucked to the turntable when the glass master disk is polished, the glass master disk is hardly deformed.

In the glass master polishing apparatus according to the present invention, there is no groove near the center of the turntable, and the grooves formed on the turntable are only the annular vacuum suction groove and the atmosphere release groove. When vacuum sucking the glass master, the inside of the annular vacuum suction groove is evacuated. Therefore, when the glass master disk is vacuum-sucked, the abrasive or the like is not sucked into the vicinity of the center of the turntable.

Further, in the glass master disk polishing apparatus according to the present invention, since the annular vacuum suction groove and the atmosphere release groove are formed on the turntable, if the polishing compound or the like is present between the glass master disk and the turntable. Even if it gets in, the abrasive or the like does not go into the inside of the vacuum suction groove and the atmosphere release groove.

As described above, in the glass master polishing apparatus according to the present invention, the abrasive or the like is not sucked into the vicinity of the center of the turntable, and if the abrasive or the like is present between the glass master and the turntable. Even if it gets in, the abrasive or the like does not go inward from the vacuum suction groove and the atmosphere releasing groove, so that the back surface of the glass master is hardly contaminated by the abrasive or the like.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments to which the present invention is applied will be described in detail below with reference to the drawings. However, the examples described below have various technically preferable limitations because they are preferable specific examples of the present invention, but unless otherwise stated in the following description, the present invention is particularly limited. The scope of the invention is not limited to the examples below.

The glass master polishing apparatus of the present embodiment has a polishing section 20 attached to a base plate 10 and a base plate 10 as shown in FIG. 1 which is a side view of the glass master polishing apparatus and FIG. 2 which is a top view thereof. And a turntable unit 30 attached to the unit 10. Here, the polishing unit 20
Is equipped with a polishing head 21 as will be described later, and the glass master 40 is polished by the polishing head 21. On the other hand, the turntable section 30 includes a turntable 31 as described later, and the glass master 40
When polishing, the glass master disk 40 is supported and fixed on the turntable 31 by vacuum suction, and the glass master disk 40 is rotated together with the turntable 31. In addition, the polishing head 21 and the turntable 31 are provided on the base plate 10 in order to prevent the abrasive from splashing during polishing.
A cup 50 is arranged so as to cover the above.

The polishing portion 20 is attached to the base plate 10 so as to be vertically movable and rotatable, and is attached to the polishing arm 22 whose tip reaches the upper part of the turntable 31 and the tip of the polishing arm 22. Polishing head 21, a polishing agent nozzle 23 arranged so as to reach the vicinity of the polishing head 21 along a polishing arm 22 from a polishing agent supply source (not shown), and a polishing agent is supplied from a pure water supply source (not shown). A pure water nozzle 24 is provided so as to reach the vicinity of the polishing head 21 along the arm 22.

In the polishing head 21, a polishing pad 21a made of a special polishing cloth is bonded so as to face the turntable 31, and the glass master 40 is polished by the polishing pad 21a. Further, the polishing arm 22 is movable up and down as shown by an arrow m1 in FIG. 1 and is rotatable left and right as shown by an arrow m2 in FIG. 2 to polish the glass master 40. In doing so, the polishing head 21 and the like are moved to a predetermined position on the glass master 40. The polishing agent nozzle 23 is for supplying the polishing agent onto the glass master disk 40 from the polishing agent supply source when polishing the glass master disk 40, and the pure water nozzle 24 is for finishing the polishing of the glass master disk 40. After that, pure water is supplied onto the glass master 40 from a pure water supply source.

On the other hand, the turntable section 30 has a disk-shaped turntable 31 which is supported and fixed by vacuum suction to rotate the glass master 40 when the glass master 40 is polished, and the turntable 31 and the fixing bolt. A spindle 33 fastened by 32, and a motor 3 connected by the spindle 33 and a coupling 34
5 and. Here, the spindle 33 is provided with a rotation shaft for transmitting the rotation of the motor 35 to the turntable 31 as indicated by an arrow m3 in FIG. 1, and vacuum sucks the glass master disk 40 arranged on the turntable 31. Vacuum passage 33a for reaching a vacuum device (not shown)
It has.

On the upper surface of the turntable 31, that is, on the main surface in contact with the glass master 40, as shown in FIG. 3, an annular vacuum suction groove 31a and a vacuum suction groove 3 are formed.
An annular air release groove 31b, which is concentric with 1a and has a radius slightly smaller than that of the vacuum suction groove 31a, is formed. The portion 31c other than the vacuum suction groove 31a and the air release groove 31b has a planar shape. Has become. Here, three openings 31d are provided at equal intervals inside the vacuum suction groove 31a, and one opening 31e is provided inside the atmosphere release groove 31b. Then, as shown in FIG. 4, a vacuum flow path 31f reaching the vacuum flow path 33a of the spindle 33 is formed from each opening 31d formed in the vacuum suction groove 31a, and the glass master disk 40 is formed. 4 is vacuum-sucked, the inside of the vacuum suction groove 31a is evacuated through the opening 31d as shown by an arrow b in FIG. On the other hand, the opening 3 formed in the air release groove 31b
From 1e, as shown in FIG. 5, the atmosphere release channel 31 extending from the atmosphere release groove 31b to the lower surface of the turntable 31.
g is formed, and the inside of the atmosphere release groove 31b is always open to the atmosphere.

Next, the operation of polishing the glass master 40 by the above-described glass master polishing apparatus will be described.

When polishing the glass master 40, first,
The glass master 40 is placed on the turntable 31. Then, the gap between the glass master 40 and the turntable 31, that is, the vacuum suction groove 31a is evacuated by the vacuum device, and the glass master 40 is vacuum-sucked to the turntable 31. At this time, what is attracted to the turntable 31 is the vacuum attraction groove 31a on the back surface 40b of the glass master 40.
Since there is only a portion corresponding to, that is, only the peripheral portion of the glass master 40, the glass master 40 is hardly deformed.

Next, the turntable 31 is rotated by the motor 35 via the coupling 34 and the spindle 33. At this time, since the glass master 40 is vacuum-adsorbed to the turntable 31, the turntable 3
Rotate with 1.

Then, the polishing arm 22 is moved to move the polishing pad 21a of the polishing head 21.
Is pressed against the surface of the glass master 40, and an abrasive is supplied from the abrasive nozzle 23 onto the surface 40a of the glass master 40 to polish the surface 40a of the glass master 40. At this time, if the polishing agent or the like is on the back surface 40b of the glass master 40,
Even if it goes around and enters between the glass master 40 and the turntable 31, since it is vacuum-adsorbed by the annular vacuum adsorbing groove 31a, the abrasive etc. may be sucked toward the center of the turntable 31. There is no such thing. Moreover, the atmosphere release groove 31b is provided inside the vacuum suction groove 31a.
Therefore, even if the abrasive or the like enters inside the vacuum suction groove 31a, the abrasive or the like hardly enters the inside of the atmosphere releasing groove 31b.

Next, when the polishing of the glass master disk 40 is completed, pure water is supplied from the pure water nozzle 24 onto the surface 40a of the glass master disk 40 to wash off the polishing agent and the like. Spindle 33
The turntable 31 is rotated together with the glass master disk 40 at a high speed through the, to shake off water and the like adhering to the glass master disk 40.

Then, as described above, the glass master 40
After the polishing, the vacuum of the vacuum suction groove 31a is released, and the vacuum suction of the glass master disc 40 is stopped.
Is removed from the turntable 31. At this time, the vacuum suction of the glass master disc 40 is immediately released because the air suction groove 31b that is open to the atmosphere is provided inside the vacuum suction trench 31a, and the glass master disc 40 is turned to the turntable 31.
Can be easily removed from.

[0025]

As is clear from the above description, in the glass master disk polishing apparatus of the present invention, since the glass master disk is less deformed when the glass master disk is vacuum-sucked, the glass master disk is highly accurately and uniformly polished. can do.

In the glass master polishing apparatus of the present invention,
Since the polishing agent or the like rarely wraps around the back surface of the glass master, the back surface of the glass master and the upper surface of the turntable are hardly contaminated by the polishing agent or the like. Therefore, it is possible to prevent the quality of the glass master disk from being deteriorated by the polishing agent or the like that has flown around the back surface of the glass master disk.

As described above, by using the glass master disk polishing apparatus of the present invention, it is possible to supply a high-quality glass master disk that is highly accurately and uniformly polished.

[Brief description of drawings]

FIG. 1 is a side view showing a configuration example of a glass master polishing apparatus to which the present invention is applied.

FIG. 2 is a plan view of the glass master polishing apparatus shown in FIG. 1 viewed from the direction of arrow A.

3 is a plan view of the turntable of the glass master polishing apparatus shown in FIG. 1 as seen from the direction of arrow A. FIG.

FIG. 4 is an enlarged cross-sectional view showing the vicinity of a turntable of the glass master disk polishing apparatus shown in FIG.

FIG. 5 is a plan view of a turntable of a conventional glass master polishing apparatus as viewed from above.

FIG. 6 is an enlarged sectional view showing the vicinity of a turntable of a conventional glass master polishing apparatus.

[Explanation of symbols]

 10 Base Plate 20 Polishing Part 21 Polishing Head 22 Polishing Arm 23 Abrasive Nozzle 24 Pure Water Nozzle 30 Turntable Part 31 Turntable 31a Vacuum Adsorption Groove 31b Air Release Groove 32 Fixing Bolt 33 Spindle 34 Coupling 35 Motor 40 Glass Master

Claims (1)

[Claims] 1. A glass master disk polishing apparatus for polishing and fixing the glass master disk by supporting and fixing the glass master disk on a turntable by vacuum suction, wherein an annular vacuum suction is provided on a main surface of the turntable which is in contact with the glass master disk. A glass master disk polishing apparatus, wherein a working groove and an annular atmosphere releasing groove having a smaller radius than the vacuum suction groove are formed.