JPH0829284B2 - Film forming equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film forming apparatus, for example, an apparatus for coating a photosensitive layer of an electrophotographic photosensitive member.

B. Prior art In the electrophotographic copying machine of the Carlson method, after uniformly charging the surface of the photoconductor, the charge is erased imagewise by exposure to form an electrostatic latent image, and the electrostatic latent image is formed by toner. After development, the toner image is transferred and fixed on paper or the like.

On the other hand, the photoreceptor is subjected to removal of adhered toner, charge removal, and surface cleaning, and is repeatedly used for a long period of time.

Therefore, as an electrophotographic photosensitive member, of course, the electrophotographic characteristics such as good charging characteristics and sensitivity and small dark decay, as well as physical properties such as printing durability, abrasion resistance, and moisture resistance upon repeated use. Also, it is required to have good resistance (environmental resistance) to ozone generated during corona discharge and ultraviolet rays during exposure.

In forming the layers of such a photoreceptor, each layer must be formed as a thin film and uniformly. As such a coating method, for example, spray coating, dip coating, blade coating, roll coating and the like have been studied. Above all,
Dip coating is often used to form a uniform coating film on a cylindrical conductive substrate or the like.

However, such a dip coating method has the following problems.

(1). The coating solution is contained in the coating tank, the conductive substrate is dipped in the coating solution and pulled up to form a coating film on the conductive substrate. Since the rate of effective use for forming a coating film is low, the coating liquid is wasted a lot.

(2). When the conductive substrate is immersed in the coating tank, the liquid level of the coating liquid rises, and when the conductive substrate is pulled out of the coating tank, the liquid level of the coating liquid drops, so that the coating liquid adheres to the wall surface of the coating tank. Then, the applied coating liquid is dried to form a dry solid. Therefore, inconveniences such as coating defects occur.

(3). In the Iwayu overflow dip coating device, the coating liquid is circulated between the coating tank and the tank by the power of the pump, so the coating force is applied by the shearing force applied to the coating liquid when passing through the pump. The liquid deteriorates.

As another method, for example, a drum applicator including a mounting frame member on which a conductive base drum is mounted and an elevating frame member including a coating means for applying a quick-drying photosensitive liquid to the conductive base drum. There is a method of applying the photosensitive liquid to the outer peripheral surface of the drum by lowering this elevating frame member. However, this coating means causes the inner peripheral edge of a flexible annular plate-shaped blade to be brought into close contact with the outer peripheral surface of the drum and slid in the axial direction of the drum, and the photosensitive solution stored with this blade as the bottom surface Since it is applied on the outer peripheral surface of the drum, the work must be interrupted every time one drum is applied, a new drum must be placed and the blade must be cleaned, and continuous drum application is impossible. Met. For this reason, the work efficiency is lowered, and the physical properties of the coating liquid are changed or dry solids are generated during the interruption of the work, which causes unevenness of the coating film and coating defects. . Furthermore, the film thickness of the outer peripheral edge of the upper end of the drum, which is the starting point of the coating operation, becomes thin due to the working condition, that is, the rising speed of the blade, and unevenness in the film thickness occurs, so that the photosensitive solution can be applied uniformly as a whole. However, there is a problem that a drum having a stable film thickness cannot be provided.

C. OBJECT OF THE INVENTION The object of the invention is to prevent the film forming material from being wasted and to increase the film forming efficiency, and to continuously perform the film forming treatment of a plurality of objects to be processed. It is an object of the present invention to provide a film forming apparatus capable of forming a film which is uniform and prevented from defects by preventing the deterioration and the like, can supply a product of stable quality, and has extremely excellent productivity.

D. Configuration of the Invention The present invention relates to a coating film forming apparatus for performing a coating film forming treatment on an object to be processed by moving the object to be processed relative to a film forming means, (a). A first spacing member and a second spacing member are attached to the first object to be processed, the first spacing member is held by a first holding means, and the second spacing member is While being held by the second holding means, the first holding means and the second holding means are moved at the same speed to move the first object to the film forming means. Relatively moving and subjecting the object to film-forming treatment to (b). Thereafter, mounting the second spacing member on the second object while the second spacing member is held, (c). And discharging the first spacing member and the first object to be processed after the film forming process.

E. Examples Hereinafter, examples of the present invention will be described.

 FIG. 1 is a schematic front view showing a coating device.

Ball screws 22 facing up and down are provided inside the pair of coating device main bodies 20 facing each other.
A lifting member 23 is attached to each ball screw 22. Spacer grippers 28A and 28B are respectively fixed to the ball screw 22, and by driving the drive motor 21, the elevating member 23 and the spacer grippers 28A and 28B are raised.
It can be lowered. Spacer grip 28
A and 28B each have a configuration in which handle grips 30 are provided at both ends of a U-shaped gripper body 34, and the upper and lower hand grips 30 are both spacer gripping hands.
29 is fixed.

An elevating device 24 is installed between each coating device body 20, and a drum elevating hand 33 is attached to the elevating device 24. On the upper side of the hand 33, a spacer 26C, a conductive substrate drum (drum) 27B, a spacer 26B, a drum 27A, in order.
The spacer 26A is connected, and the drum discharge hand 25 is arranged above the spacer 26A. A protrusion 40 is provided on the spacer 26A, and the protrusion 40 is fitted in the hollow portion 27a of the drum 27A. Similarly, drum 2
7A and the spacer 26B, the spacer 26B and the drum 27B, and the drum 27B and the spacer 26C are also fitted and fixed, respectively.

The coating means 31 is mounted on a coating means mounting base 32, and the coating means mounting base 32 is held by holding means (not shown). The coating means 31 and the coating means mounting table 32 are for coating the coating liquid on the drums 27A and 27B like a coating device (see FIGS. 7 and 8) described later, and in the example of FIG. As the drums 27A and 27B rise, coating films are sequentially formed on the drums 27A and 27B.

2A is an enlarged plan view showing the spacer gripping hand and the hand gripping portion, and FIG. 2B is a right side view of FIG. 2A.

The hand grip 30 is provided with a piston 30a and a cylinder 30b, the spacer gripping hand main body 29c is attached to the piston 30a or the cylinder 30b with a screw 30e, and is attached to the main body of the hand grip 30 with a screw 30d. Two adjustment units 29b are fixed to each body 29c, and four adjustment units have spacers 26 facing each other.
It is supposed to be held between 29b. Each adjustment unit 2
9b is a position adjustment so that the center position of the drum 27A27B6 does not shift in the radial direction. A bearing 29a is provided at the tip of each adjustment unit 29b, and the spacer 26 is pressed and held by the four bearings 29a.

In FIG. 2 (a), the cylinder 30 is indicated by the solid line.
By operating b (this operation is performed by a known means such as air pressure), the spacer 26 is gripped. Note that 30c is an adjusting screw.

Next, when the cylinder 30b is operated as indicated by the alternate long and short dash line, the main body 29c rotates about the screw 30b as the fulcrum as indicated by the alternate long and short dash line, the bearing 29a and the spacer 26 are separated, and the gripping of the spacer 26 is released. To be done.

FIGS. 3 (a) to 3 (h) are schematic front views of main parts showing a process of forming a coating film on the outer peripheral surface of the drum when the coating device as described above is used.

In the state shown in FIG. 3 (a), the spacers 26A and 26B are gripped by the spacer gripping hand (hereinafter also referred to as a hand) 29 provided on the spacer gripping tool 28A, and the spacers 26A and 26B. The drum 27A for which application has been completed is fitted and held between and. In FIGS. 3 to 6, an arrow G indicates a state in which the spacer is held by the spacer gripping hand (hereinafter referred to as a holding state). The hand 29 on the side of the spacer gripping tool 28B is in a state of being released from the holding of the spacer (hereinafter, referred to as a released state). The drum 27B is held by the drum lifting hand 33 via the spacer 26C.

Next, as shown in FIG. 3 (b), the drum discharging hand 25 is fitted to the spacer 26A, and the drum lifting hand 33 is raised to mount the drum 27B on the lower end surface of the spacer 26B.

Next, as shown in FIG. 3C, the hand 29 on the side of the spacer gripping tool 28A is set to the released state, and the spacer gripping tool 2
The hand 29 on the 8B side is held. Then, the drum discharge hand 25 is raised to pull up the spacer 26A and the drum 27A for which coating has been completed, and the drum 27A is discharged from the coating device. After that, the discharged drum 27A is subjected to other processing as necessary. Further, the gripping of the spacer 26C by the drum lifting hand 33 is released, and the drum lifting hand 33 is lowered.

Next, as shown in FIG. 3 (d), the spacer gripping tool 28B moves upward while gripping the spacers 26B and 26C,
As a result, the drum 27B passes through the inside of the coating means 31, and the drum 2
The coating liquid will be applied to the outer peripheral surface of 7B. On the other hand, the spacer gripping tool 28A descends to the height at which the spacer gripping tool 28B was disposed in FIG. 3 (c).

Then, as shown in FIG. 3 (e), the spacer gripping tool 28B is raised to a predetermined height (the same height as the spacer gripping tool 28A in FIG. 3 (a)), and also for raising and lowering the drum. Spacer on the hand 33 by known means
26D and drum 27C are fitted and mounted. In this state, the coating on the outer peripheral surface of the drum 27B is completed, and the state becomes exactly the same as that in FIG. 3 (a) (that is, the relationship between FIG. 3 (a) and FIG. 3 (b) is a mirror image, That is, the left and right are swapped.)

Next, as shown in FIG. 3 (f), the drum discharge hand 25 is fitted to the spacer 26B, and the drum lifting hand 33 is raised to mount the drum 27C on the lower end surface of the spacer 26C.

Next, as shown in FIG. 3 (g), the hand 29 on the side of the spacer gripping tool 28B is released, and the spacer gripping tool 2
The hand 29 on the 8A side is held. Then, the drum discharge hand 25 is raised to pull up the spacer 26B and the drum 27B for which coating has been completed, and the drum 27B is discharged from the coating device. In addition, the spacer 26D drum lifting hand 33
The grip by is released, and the drum lifting hand 33 is lowered.

Next, as shown in FIG. 3 (h), the spacer gripper 28A moves upward while gripping the spacers 26C and 26D,
As a result, the drum 27C passes through the inside of the coating means 31, and the drum 2C
The coating liquid will be applied to the outer peripheral surface of 7C. On the other hand, the spacer gripping tool 28B descends to a predetermined height.

After that, the spacer gripping tool 28A is raised to a predetermined height, the spacer and the drum are fitted and mounted on the drum lifting hand 33, and the state shown in FIG. 3 (a) is restored. As a result, one cycle of the coating process is completed and the two drums are coated.

According to such a coating device, the spacers fitted and fixed to the upper and lower ends of the drum are gripped together, and the drum is raised by raising these spacers at the same speed to coat the outer peripheral surface of the drum. The drum is fixed in the vertical direction during coating, and in particular, there is no horizontal swaying in FIG. 3, and the positional accuracy can be sufficiently improved. Therefore, the coating can be stably performed, and the uniform coating layer can be formed.

Further, since the spacer is gripped, the gripping tool does not come into contact with the drum surface, and it is possible to prevent the coating layer from being affected in particular.
Moreover, as shown in FIG. 3 (b), when the drum lifting hand 33 is raised and the drum 27B is mounted on the lower end surface of the spacer 26B, the distance between the drum 27A and the raised drum 27B is increased by the spacer 26B. Since the spacer 26B is held by the hand 29, the impact when the drum 27b comes into contact with the spacer 26B is absorbed, and the adverse effect on the coating film provided on the outer peripheral surface of the drum 27A can be prevented.

More importantly, according to the coating apparatus of this example, the drum can be continuously supplied to the coating apparatus and the coating layer can be continuously coated on the outer peripheral surface of the drum by alternately operating the two spacer gripping tools. Can be formed. As a result, the coating device can be operated continuously, so that productivity is significantly improved, and the deterioration of physical properties of the coating liquid and the production of dry solids due to the interruption of work can be prevented, resulting in a uniform and high-quality coating. Can be stably supplied.

FIGS. 4 (a) to 4 (e) are schematic front views showing a process of applying the coating liquid onto the conductive substrate drum by using another coating device.

The structure of the entire apparatus and the structure of the spacer gripping tool hand are the same as those in FIGS. 1 and 2.

In the state shown in FIG. 4 (a), the drum 27A is held by the spacer gripping tool 38A via the spacers 26A and 26B, which is almost the same as the state shown in FIG. 3 (a).

Next, as shown in FIG. 4 (b), the drum discharging hand 25 is fitted to the spacer 26A, and the drum lifting hand 33 is raised to mount the drum 27B on the lower end surface of the spacer 26B.

Then, as shown in FIG. 4 (c), the hand 29 on the side of the spacer gripping tool 38A is released, and the spacer gripping tool 3 is released.
The hand 29 on the 8B side is held. Then, the drum discharge hand 25 is raised to pull up the spacer 26A and the drum 27A for which coating has been completed, and the drum 27A is discharged from the coating device. Further, the gripping of the spacer 26C by the lifting hand 33 is released, and the drum lifting hand 33 is lowered.

Next, as shown in FIG. 4 (d), the spacer gripper 38B moves upward while gripping the spacers 26B and 26C,
As a result, the drum 27B passes through the inside of the coating means 31, and the drum 2
The coating liquid will be applied to the outer peripheral surface of 7B.

Next, as shown in FIG. 4 (e), the spacer gripper 38B is raised to a predetermined height, and the spacer 26D and the drum 27C are fitted and mounted on the drum lifting hand 33. At this point, the coating of the outer peripheral surface of the drum 27B is completed.

After that, the hand 29 on the side of the spacer gripping tool 38A is in the holding state, and holds the spacers 26B and 26C. On the other hand, the hand 29 on the side of the spacer grip 38B is released, and the spacer grip 38B descends to a predetermined position, as shown in FIG. 4 (a).
Return to the state shown in. This completes one cycle of the drum coating process.

According to this example, since it is not necessary to drive the spacer gripping tool 38A in the vertical direction in FIG. 4, a driving means such as a ball screw (see FIG. 1) is not necessarily required, and the device is simplified accordingly. it can.

FIGS. 5 (a) to 5 (e) are schematic front views showing a process of applying the coating liquid onto the conductive substrate drum using another coating device.

The structure of the entire apparatus and the structure of the spacer gripping hand are the same as those in FIGS. 1 and 2.

However, in this example, the spacer gripping tool 48 is provided with only one hand 29.

In the state shown in FIG. 5 (a), the drum 27A is held by the spacer gripping tool 38A via the spacers 26A and 26B, and the spacer gripping tool 48 is in the released state.

Next, as shown in FIG. 5 (b), the drum discharging hand 25 is fitted to the spacer 26A, and the drum lifting hand 33 is raised to mount the drum 27B on the lower end surface of the spacer 26B.

Next, as shown in FIG. 5 (c), the hand 29 on the side of the spacer gripping tool 38A is released, and the spacer gripping tool 4 is released.
The hand 29 on the 8 side is held. Then, the spacer gripping tool 38A is lowered to a predetermined position.

Next, as shown in FIG. 5 (d), the drum discharge hand 25 is raised to pull up the spacer 26A and the drum 27A after coating, and the drum 27A is discharged from the coating device. Further, the hand 29 on the side of the spacer gripping tool 38A is in the held state, while the hand 29 on the side of the spacer gripping tool 48 is in the released state. Further, the gripping of the spacer 26C by the lifting hand 33 is released, and the drum lifting hand 33 is lowered.

Next, as shown in FIG. 5 (e), the spacer gripper 38A moves upward while gripping the spacers 26B and 26C,
As a result, the drum 27B passes through the inside of the coating means 31, and the drum 2
The coating liquid will be applied to the outer peripheral surface of 7B. On the other hand, a spacer 26D and a drum 27C are placed on the drum lifting hand 33.
Are fitted and mounted.

After this, the spacer gripping tool 38A rises to a predetermined position and returns to the state shown in FIG. 5 (a). This completes one cycle of the drum coating process.

Also in this example, it is not necessary to drive the spacer gripping tool 48 in the vertical direction in FIG. 5, and the structure of the spacer gripping tool itself can be simplified.

FIGS. 6 (a) to 6 (d) are schematic front views showing the process of applying the coating liquid onto the conductive substrate drum by using the same coating device as that shown in FIG.

First, from the state shown in FIG. 5 (a), FIG. 6 (a)
As shown in, the hand 29 on the side of the spacer gripping tool 38A is set to the released state, and the hand 29 on the side of the spacer gripping tool 48 is set to the holding state. Further, the drum discharge hand 25 is lowered and fitted and fixed to the spacer 26A.

Next, as shown in FIG. 6 (b), the drum discharge hand 25 is raised to pull up the spacer 26A and the drum 27A after coating, and the drum 27A is discharged from the coating device.

Next, as shown in FIG. 6 (c), the drum lifting hand 33 rises and the drum 27B is mounted on the lower end surface of the spacer 26B. Further, the spacer gripper 37A is lowered to a predetermined position.

Next, as shown in FIG. 6 (d), the hand 29 on the side of the spacer gripping tool 48 is released, and the spacer gripping tool 38 is released.
The hand 29 on the A side is held. Also, spacer 26C
The gripping by the lifting / lowering hand 33 is released, and the drum lifting / lowering hand 33 descends.

After this, the spacer gripping tool 38A is replaced by the spacers 26B and 26C.
As a result, the drum 27B passes through the inside of the coating means 31, and the outer peripheral surface of the drum 27B is coated with the coating liquid. Then, the spacer gripping tool 38A rises to a predetermined position and returns to the state shown in FIG. 5 (a).
This completes one cycle of the drum coating process.

In this example, as shown in FIGS. 6 (b) and 6 (c), it is characteristic that the uncoated drum 27B is mounted on the spacer 26B after the drum on which the coating is completed is raised.

FIG. 7 is a schematic plan view showing another spacer holding hand.

The spacer 26 is sandwiched by a pair of spacer holding hands 39A and 39B that are provided to face each other.
26 are held. Here, 39a is a bearing, 39b is an adjusting unit, and 39c is a hand main body. And another set of hands 39, which is also provided with the spacer 26 in between.
C and 39D are separated from the spacer 26, and the holding is released.

Spacer gripping hands 39A, 39B, 39C, 39D are all cylinders that operate pneumatically in the direction indicated by the arrow,
It can be operated by a known actuator such as a spring, and like the spacer gripping hand 29 in FIG. 2, it is possible to select a holding state in which the spacer is held or a released state in which the spacer is released. There is.

In this example, unlike the hand 29 of FIG. 2, a pair of separate hands 39B, 39A or 39 facing each other are provided.
The spacer 26 is held by C and 39D, and the pair of hands 39A and 39B or 39C and 39D perform the same function as the hand 29 of FIG.

When the hands 39A, 39B and the like of this example are used, the hands 39A, 39B, 39C, 3
It is necessary to raise and lower 9D respectively. Therefore, as shown in FIG. 7, ball screws 22 are installed on the back surfaces of the hands 39A, 39B, 39C and 39D, respectively, so that the handles can be raised and lowered.

FIG. 8 exemplifies a coating means that can be used in the present invention. FIG. 8A is a sectional view showing a state in which the coating liquid is coated on the conductive substrate drum 27 using a slide hopper device. FIG. 1B is a perspective view showing the slide hopper device.

The coating liquid S supplied to the coating liquid supply pipe 14 by a pump (not shown) in an amount necessary for coating is supplied to the coating liquid distribution chamber 12
Are evenly distributed in the circumferential direction by the distribution slit 13
And flows down the slide surface 17 uniformly in the circumferential direction.
Thereafter, the coating liquid S forms a bead between the hopper edge 16 and the outer peripheral surface of the drum 27. When the conductive substrate 27 is driven in the direction of arrow A with the bead and the outer peripheral surface of the drum 27 in contact with each other, the coating layer 3 is applied onto the outer peripheral surface of the drum 27. In FIG. 8, 15 is a liquid receiver.

According to such a coating device, when the coating liquid S is coated on the conductive substrate drum, the solvent is quickly evaporated from the coating layer 3 which has been once coated. Further, since the coating liquid S is supplied in an amount necessary for coating, waste of the coating liquid is small and the cost of the material can be reduced.

Further, in the apparatus of this example, since the distribution slits are arranged seamlessly in the circumferential direction of the object to be coated, a uniform coating film having no seam is obtained, and the film thickness is the coating liquid supply amount,
Since it is determined by the viscosity and the moving speed of the conductive substrate, it is controllable, rapid coating is possible, and productivity is high.

Also, since the amount of coating liquid required for coating is supplied,
In particular, even when a coating liquid whose liquid properties are easily changed, such as a coating liquid for forming a carrier generating layer, is used, it is possible to suppress the change in physical properties of the coating liquid, which is advantageous.

FIG. 9 is a cross-sectional view showing a state in which the coating liquid is applied on the conductive substrate drum by the extrusion hopper device.

The coating liquid S, which is supplied to the coating liquid supply pipe 14 by a pump (not shown) in an amount necessary for coating, is evenly distributed in the circumferential direction by the coating liquid distribution chamber 12, and is pushed out through the distribution slit 13 to form a hopper. It uniformly and continuously flows out from the edge 16 to form a coating liquid bead with the outer peripheral surface of the drum 27, whereby the coating layer 3 is coated.

Hopper edge 16 length is 0.1-10mm, preferably 0.5
~ 4mm is good. Inclination angle of hopper edge is 3 from below vertically
The range is preferably up to 0 °, more preferably up to 20 ° from below. When the inclination angle of the hopper edge exceeds 30 degrees, the cross-linking of the coating solution becomes short and it becomes difficult to obtain a good coating film.

If the object to be coated having an endless continuous surface is cylindrical, the coating liquid distribution slit is circular, and the diameter is slightly larger than this cylindrical substrate diameter (0.05 to 1 mm larger diameter). The coating can be suitably performed by using a coating device having a conical surface having a terminal end portion.

A pipe is preferably used as the coating liquid supply means for supplying the coating liquid to the coating liquid distribution chamber, and two or more pipes may be used. 2 for safety and uniformity of coating liquid
One or more pipes may be used.

The gap between the diameter of the end of the slide surface and the outer diameter of the body to be coated (cylindrical) is preferably 0.05 to 1 mm, more preferably 0.1 to 0.6 mm. The inclination angle of the slide surface is preferably 10 ° to 70 ° with respect to the horizontal, and more preferably 20 ° to 45 °.

The viscosity of the coating solution should be in the range of 0.5 to 700 Cp, 1 to 500 C
p is even better.

In order to make the coating liquid flow out uniformly from the coating liquid distribution slit in the circumferential direction, in the slide hopper device, the distribution chamber resistance (Pc) and the slit resistance when flowing through the coating liquid distribution slit. (Ps) is Ps / Pc ≧ 80,
It is more preferably in the range of 100 to 100,000, and in the extrusion hopper device, the distribution chamber resistance (Pc) and the slit resistance (Ps) when flowing through the coating liquid distribution slit are Ps / Pc.
By maintaining the relationship of ≧ 40, more preferably within the range of 40 to 100,000, it is possible to apply the coating solution stably and uniformly.

The distribution chamber resistance (Pc) and the slit resistance (Ps) may be determined according to the coating liquid supply speed, viscosity, and supply pressure.

In the extrusion hopper device, the hopper edge is 0.05 to 1 mm larger than the outer diameter of the object to be coated, more preferably in the range of 2 ho mm to 4 ho mm when the coating film thickness is ho mm, and the coating direction length is 0.1 to 10 mm. Preferably 0.5-4m
It is desirable to have m. Further, the hopper edge is inclined vertically downward from the upper end and within a range of up to 30 degrees to the opposite side of the base material, more preferably vertically downward and within a range of up to 20 degrees. The one that extends is good. If the inclination of the hopper edge exceeds 30 degrees, the cross-linking of the coating solution becomes short, the bead becomes unstable, and it becomes difficult to obtain a good coating film.

Each coating liquid supplied to the coating device is temporarily stored in each coating liquid distribution chamber, and the coating liquid is evenly distributed to each coating liquid distribution slit connected thereto. The pressure loss ratio of each coating liquid distribution chamber to each coating liquid distribution slit is set so that each coating liquid evenly distributed to each slit and each coating liquid distributed to each slit can be uniformly coated on the substrate surface. Is a slide type
It is 80 or more, preferably in the range of 80 to 100,000, and in the extrusion type, the pressure loss ratio is -40 or more and preferably in the range of 40 to 100,000. If the pressure loss is less than 80 (slide type) and 40 (extrusion type), it will be difficult to evenly distribute and apply the coating liquid. If both exceed 100,000, the coating liquid distribution chamber will be enlarged or slits will be created. It is necessary to increase the length, which causes a problem in the structure of the device.

The coating film formed on the object to be coated using the coating device is based on the coating liquid bead. That is, the layer of the coating liquid leaving the coating device is not directly applied to the object to be coated with a layer having the same thickness as when the coating device is leaving, but once a liquid pool (coating liquid bead) is formed, and from this bead The object to be coated draws off the coating liquid. Therefore, the coating film formed by this coating liquid bead is not actually formed directly from the coating device to the coating object, but the coating device simply maintains the coating liquid bead and the coating target is coated from the bead. To be done. The coating liquid bead is maintained by the coating liquid extruded from the coating liquid distribution slit or the coating liquid flowing down on the liquid slide portion.
It is formed by bridging between the object to be coated and the hopper edge. In coating with this bead, the thickness of the coating film that is applied across the bead and intersects with the bead is determined by the action of the bead, and the speed at which the subject moves and the supply of the coating liquid. It varies depending on the speed and supply pressure, the efficiency of the hopper structure, etc.

The coating liquid discharged from the discharge pipe may be circulated so that the coating liquid is supplied to the supply pipe again as a coating liquid after being subjected to treatment such as stirring by a stirrer.

A valve for regulating the discharge amount of the coating liquid is provided at the coating liquid discharge port or the discharge pipe for discharging the coating liquid in the coating liquid distribution chamber, and the liquid amount is adjusted not only on the supply side but also on the discharge side. May be.

The supply of the coating liquid is supplied from the supply pipe, part of which flows out to the coating surface through the coating liquid distribution slit, and the other part of which is discharged by the discharge pipe. The coating liquid may be supplied intermittently, for example, by supplying the coating liquid at regular intervals in consideration of the aggregation time of the liquid.

The coating apparatus of FIGS. 1 to 9 can be applied to the coating of the coating liquid for the organic electrophotographic photosensitive member.

At this time, the carrier generation layer, the carrier transport layer, and the like in the so-called function-separated type photoreceptor are
Alternatively, the carrier-transporting substance may be dissolved or distributed in a suitable solvent or solvent solution of a binder resin, and a suspension may be applied and dried.

Examples of the solvent include N, N-dimethylformamide, benzene, toluene, xylene, monochlorobenzene, 1,2-dichloroethane, dichloromethane, 1,1,2-trichloroethane, tetrahydrofuran, methyl ethyl ketone, ethyl acetate, butyl acetate and the like. be able to.

In the case of forming a carrier generating layer and a carrier transporting layer by applying and drying a coating material in which a carrier generating substance and a carrier transporting substance are dispersed and suspended in a solvent or a binder resin solution, it is preferably provided by the following method. That is, a dispersion liquid obtained by making a carrier generating substance and a carrier transporting substance into fine particles in a dispersion medium by a ball mill, a homomixer or the like, adding a binder resin and mixing and dispersing the fine particles is used. In this method, it is preferable to uniformly disperse the particles under the action of ultrasonic waves.

As the carrier generating substance, either an inorganic pigment or an organic pigment can be used as long as it absorbs an electromagnetic wave and generates a free carrier.

 The following are exemplified.

(1) Amorphous selenium, trigonal selenium, selenium-arsenic alloy, selenium-tellurium alloy, cadmium sulfide, cadmium selenide, cadmium sulfide selenide, mercury sulfide, lead sulfide, zinc oxide, titanium oxide, amorphous silicon, etc. (2) Monoazo pigments, polyazo pigments, metal complex salt azo pigments, pyrazolone azo pigments, azo pigments such as stilbene azo and thiazole azo pigments (3) Anthraquinone derivatives, anthanthrone derivatives, dibenzpyrenequinone derivatives, pyranthrone derivatives , Anthraquinone-based or polycyclic quinone-based pigments such as violanthrone derivatives and isoviolanthrone derivatives (4) Indigoid pigments such as indigo derivatives and thioindigo derivatives (5) Various metal phthalocyanines such as titanyl phthalocyanine and vanadyl phthalocyanine, and α-type β-type, γ
Type, τ type, τ ′ type, η type, η ′ type and other phthalocyanine pigments such as metal-free phthalocyanines (6) Carbonyl pigments such as diphenylmethane pigments, triphenylmethane pigments, xanthene pigments and acridine pigments (7) Quinoneimine pigments such as azine pigments, oxazine pigments and thiazine pigments (8) Methine pigments such as cyanine pigments and azomethine pigments (9) Quinoline pigments (10) Nitro pigments (11) Nitroso pigments (12) Besozoquinone and naphthoquinone Pigments (13) Naphthalimide pigments (14) Perinone pigments such as bisbenzimidazole derivatives (15) Fluorenone pigments (16) Squarylium pigments (17) Azulenium compounds (18) Perlenenoic acid anhydrides and perlenenoic acid imides Perylene pigments Carrier transport substances are carbazole derivatives, Kisazoru derivatives, oxadiazole derivatives, thiazole derivatives, thiadiazole derivatives, triazole derived Falls, imidazole derivatives, imidazolone derivatives, imidazolidine derivatives, bis imidazolidine derivatives, styryl compounds,
Hydrazone compounds, pyrazoline derivatives, oxazolone derivatives, benzothiazole derivatives, benzimidazole derivatives, quinazoline derivatives, benzofuran derivatives, acridine derivatives, phenazine derivatives, aminostilbene derivatives, triarylamine derivatives, phenylenediamine derivatives, stilbene derivatives, poly-N-vinyl It may be one or more selected from carbazole, poly-1-vinylpyrene, poly-9-vinylanthracene and the like.

At least one electron-accepting substance is contained in any one of a carrier generation layer, a carrier transport layer, a protective layer, or a plurality of layers for the purpose of improving sensitivity, reducing residual potential or reducing fatigue during repeated use. be able to.

Further, silicone oil may be present as a surface modifier. Further, an ammonium compound may be contained as a durability improver.

 Further, an ultraviolet absorber, an antioxidant or the like may be used.

Examples of the antioxidant include hindered phenols, hindered amines, paraphenylenediamines, arylalkanes, hydroquinones, spirochromans, spiroindanones and their derivatives, organic sulfur compounds, organic phosphorus compounds and the like.

Examples of the binder resin that can be used to manufacture the photoconductor include polyethylene, polypropylene, acrylic resin, methacrylic resin, vinyl chloride resin, vinyl acetate resin, epoxy resin, polyurethane resin, phenol resin, polyester resin, alkyd resin, polycarbonate resin,
Addition polymerization resins such as silicone resins and melamine resins, polyaddition resins, polycondensation resins and copolymer resins containing two or more of the repeating units of these resins, for example vinyl chloride-vinyl acetate copolymer resins. Insulating resin such as vinyl chloride-vinyl acetate-maleic anhydride copolymer resin,
Examples include polymer organic semiconductors such as poly-N-vinylcarbazole.

As the conductive substrate used for manufacturing the electrophotographic photosensitive member, the following are mainly used, but not limited thereto.

1) Metal plate such as aluminum plate and stainless plate.

2) A thin metal layer of aluminum, palladium, gold or the like provided on a support such as paper or plastic film by laminating or vapor deposition.

3) A support provided with a conductive compound such as a conductive polymer, indium oxide or tin oxide on a support such as paper or a plastic film by coating or vapor deposition.

Although the present invention has been illustrated above, the embodiments of the present invention are not limited to the above-described embodiments, and various modifications can be made.

For example, the coating means is not limited to those shown in FIGS.

Further, in FIGS. 1 to 6, the structure, number, size, shape, etc. of the spacer gripping hand can be variously changed, and the same applies to the spacer gripping tool. Further, the means for raising and lowering the spacer gripping tool is not limited to the ball screw. Further, as seen in the spacer gripping tool 28A in FIG. 1, it is not necessary to connect the upper hand 29 and the lower hand 29 by the gripping tool main body 34, and both may be formed separately.

In each of the processes shown in FIGS. 3, 4, 5, and 6, it is possible to change the operating procedure of the coating apparatus within the scope of the present invention.

Further, by using a coating device having a spacer gripping hand as shown in FIG. 7, the coating device shown in FIG. 3, FIG. 4, FIG.
It is also possible to execute each process in the figure.

The coating film forming apparatus of the present invention can be applied as various coating apparatuses, and can also be applied to other coating film forming means, for example, an apparatus for forming a vapor deposition film on a conductive substrate by vacuum vapor deposition.

F. Advantageous Effects of Invention According to the film forming apparatus of the present invention, the first spacing member and the second spacing member are mounted on the first object to be processed, and the first spacing member is held by the first holding member. Means for holding and said second spacing member is second
By moving the first holding means and the second holding means at the same speed in a state of being held by the holding means of FIG. Since the object to be processed is subjected to the film forming process, the object to be processed is held by the first and second holding means via the first and second spacing members during the film forming process, and It is possible to improve the positional accuracy, prevent the displacement of the object to be processed, and realize a uniform film forming process.

Further, after the above-mentioned film forming process, the second spacing member is attached to the second object while the second spacing member is held, so that the impact of this device is It is possible to prevent the adverse effect on the first processed object that has been absorbed by the spacing member 2 and has undergone the film formation process.

Further, the first object is coated with the first spacing member and the second spacing member attached to the first object, and then the second object is subjected to the film forming treatment. Two
Since the spacing member is attached and the first spacing member and the first object to be processed for which the film formation processing has been completed are discharged, a plurality of objects to be processed are successively subjected to the film formation processing. be able to. Therefore, since the film forming apparatus can be continuously operated, the productivity is remarkably improved, and
It is possible to prevent changes in processing conditions due to interruption of film formation processing,
The coating can be homogeneous.

[Brief description of drawings]

1 to 9 show an embodiment, in which FIG. 1 is a schematic front view showing a coating device, and FIG. 2 (a) is a plan view showing an enlarged periphery of a spacer gripping hand. FIG. 3 (b) is a right side view of FIG. 3 (a), and FIGS. 3 (a), (b), (c), (d), (e),
(F), (g), (h) are schematic front views of main parts showing a process for forming a coating film on the outer peripheral surface of the drum, and FIGS. 4 (a), (b), (c), (d), (E) is a schematic front view of essential parts showing another process of applying the coating liquid to the outer peripheral surface of the drum by another coating device, and FIGS. 5 (a), (b), (c), (d), (e). ) Is a schematic front view of a main part showing still another process of applying the coating liquid to the outer peripheral surface of the drum, and FIGS. 6A, 6B, 6C, and 6D show applying the coating liquid to the outer peripheral surface of the drum FIG. 7 is a schematic plan view showing another spacer gripping hand, and FIG. 8 (a) is a schematic diagram showing another process for applying a coating liquid to a substrate drum using a slide hopper device. FIG. 9 (b) is a perspective view showing the slide hopper device with a part thereof cut away, and FIG. 9 is an extrusion hopper device. The is a sectional view showing a state of applying a coating solution on the substrate drum. In the reference numerals shown in the drawings, 16 ... Hopper edge 17 ... Sliding surface 20 ... Coating device main body 22 ... Ball screw 23 ... Lifting member 25 ... Drum discharging hand 26, 26A, 26B, 26C, 26D ... ... Spacer 27, 27A, 27B, 27C ... Conductive substrate drum 28A, 28B, 38A, 38B, 48 ... Spacer gripping tool 29, 39A, 39B, 39C, 39D ... Spacer gripping hand 29a, 39a ... Bearing 30: Hand gripping part 30a: Piston 30b: Cylinder 33: Drum raising / lowering hand 34: Spacer gripping tool body G: Holding state S: Coating liquid.

Claims (1)

[Claims] 1. A film forming apparatus for forming a film on an object to be processed by moving the object to be processed relative to the film forming means, comprising: (a). A first spacing member and a second spacing member are attached to the first object to be processed, the first spacing member is held by a first holding means, and the second spacing member is While being held by the second holding means, the first holding means and the second holding means are moved at the same speed to move the first object to the film forming means. Relatively moving and subjecting the object to film-forming treatment to (b). Thereafter, mounting the second spacing member on the second object while the second spacing member is held, (c). And discharging the first spacing member and the first object to be processed that has completed the film forming process, respectively.