JPH08287416A - Magnetic recording and reproducing device - Google Patents
Magnetic recording and reproducing deviceInfo
- Publication number
- JPH08287416A JPH08287416A JP8363895A JP8363895A JPH08287416A JP H08287416 A JPH08287416 A JP H08287416A JP 8363895 A JP8363895 A JP 8363895A JP 8363895 A JP8363895 A JP 8363895A JP H08287416 A JPH08287416 A JP H08287416A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic
- ferromagnetic
- magnetoresistive effect
- giant magnetoresistive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、いわゆる巨大磁気抵抗
効果膜を用いた磁気記録再生装置に係り、特に高い記録
密度を有する磁気記録再生装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording / reproducing apparatus using a so-called giant magnetoresistive film, and more particularly to a magnetic recording / reproducing apparatus having a high recording density.
【0002】特に、本発明は、反強磁性膜,第一強磁性
膜,非磁性導電膜及び第二強磁性膜からなる巨大磁気抵
抗効果膜の感磁部となる第二強磁性膜が摺動面まで形成
され、摺動面側から磁気抵抗効果素子,巨大磁気抵抗効
果素子を配置し、感磁部が同一の強磁性膜で磁気的に連
続であり、二つの素子から同時に出力を得ることが可能
な磁気ヘッドを有する磁気記録装置に関するものであ
る。In particular, according to the present invention, the second ferromagnetic film serving as the magnetic sensitive portion of the giant magnetoresistive film composed of the antiferromagnetic film, the first ferromagnetic film, the nonmagnetic conductive film and the second ferromagnetic film is slid. The magneto-resistive effect element and the giant magneto-resistive effect element are arranged from the sliding surface side to the moving surface, and the magnetic sensitive section is magnetically continuous with the same ferromagnetic film, and outputs can be obtained simultaneously from the two elements. The present invention relates to a magnetic recording device having a magnetic head capable of recording.
【0003】[0003]
【従来の技術】ヨーロッパ特許0 490 608 A
2 には巨大磁気抵抗効果膜を用いたセンサーが記載さ
れており、セラミックスや半導体等の基板上に第一強磁
性膜,非磁性金属膜,第二強磁性膜の順に蒸着され、第
一強磁性膜と第二強磁性膜の磁化の角度が磁界0の時9
0度であることが説明されている。またフラックスガイ
ドを用いた記録再生ヘッドが米国特許5,255,141 に記載
されており、上部磁性膜が磁気抵抗効果膜のフラックス
ガイド用膜と兼用されている。PRIOR ART European Patent 0 490 608 A
2 describes a sensor using a giant magnetoresistive effect film, in which a first ferromagnetic film, a nonmagnetic metal film, and a second ferromagnetic film are deposited in this order on a substrate such as ceramics or a semiconductor, When the magnetization angle between the magnetic film and the second ferromagnetic film is 0
It is explained that it is 0 degree. A recording / reproducing head using a flux guide is described in US Pat. No. 5,255,141, and the upper magnetic film is also used as a flux guide film of a magnetoresistive effect film.
【0004】[0004]
【発明が解決しようとする課題】巨大磁気抵抗効果膜を
用いた従来の磁気記録用ヘッドは摺動面に反強磁性膜,
第一強磁性膜,非磁性導電膜及び第二強磁性膜が積層さ
れている。第一強磁性膜は、反強磁性膜と磁気的に結合
しているが、媒体から磁気ヘッド浮上面に加わる磁界は
200Oe以上となり、この磁界が増加し、第一強磁性
膜と反強磁性膜間の結合磁界近傍の磁界の場合には、反
強磁性膜によって第一強磁性膜の磁化を固定することが
困難となり、部分的に第一強磁性膜の磁化が動くことに
より、ヘッド出力の低下やノイズの発現につながる。A conventional magnetic recording head using a giant magnetoresistive film has an antiferromagnetic film on the sliding surface.
A first ferromagnetic film, a non-magnetic conductive film and a second ferromagnetic film are laminated. The first ferromagnetic film is magnetically coupled to the antiferromagnetic film, but the magnetic field applied from the medium to the air bearing surface of the magnetic head is 200 Oe or more, and this magnetic field increases, and the first ferromagnetic film and the antiferromagnetic film increase. In the case of a magnetic field in the vicinity of the coupling magnetic field between the films, it is difficult to fix the magnetization of the first ferromagnetic film by the antiferromagnetic film, and the magnetization of the first ferromagnetic film partially moves, which causes head output. Of noise and noise.
【0005】また、Mnを含む反強磁性膜はNiFe系
合金膜に比べ耐食性が低いため、従来のように摺動面に
反強磁性膜,第一強磁性膜,非磁性導電膜及び第二強磁
性膜が積層されている場合には、ヘッド先端部の加工時
に反強磁性膜の摺動面近傍が腐食する可能性がある。同
時にヘッド加工時には反強磁性膜以外にも、第一強磁性
膜,非磁性導電膜、及び第二強磁性膜の膜厚がそれぞれ
20nm以下であるために、摺動面側の膜断面部を清浄
に保つことが困難である。Further, since the antiferromagnetic film containing Mn has lower corrosion resistance than the NiFe alloy film, the antiferromagnetic film, the first ferromagnetic film, the nonmagnetic conductive film and the second conductive film are formed on the sliding surface as in the conventional case. When the ferromagnetic films are laminated, the vicinity of the sliding surface of the antiferromagnetic film may be corroded when the head tip portion is processed. At the same time, at the time of head processing, since the film thicknesses of the first ferromagnetic film, the nonmagnetic conductive film, and the second ferromagnetic film are 20 nm or less, in addition to the antiferromagnetic film, Difficult to keep clean.
【0006】さらに、巨大磁気抵抗効果膜を用いた従来
の磁気記録用ヘッドを用いた場合、媒体と磁気ヘッド間
の浮上量を高出力化のために小さくしようとする時、ヘ
ッド摺動面側に反強磁性膜,第一強磁性膜,非磁性導電
膜及び第二強磁性膜が積層されているので、媒体表面と
摩耗した場合、これらの巨大磁気抵抗効果膜の層構造が
みだれ、出力が低下する可能性がある。Further, when the conventional magnetic recording head using the giant magnetoresistive film is used, when the flying height between the medium and the magnetic head is reduced in order to increase the output, the head sliding surface side Since the antiferromagnetic film, the first ferromagnetic film, the non-magnetic conductive film, and the second ferromagnetic film are stacked on top of each other, the layer structure of these giant magnetoresistive films will be detected and output when worn on the medium surface. May decrease.
【0007】本発明の目的は高出力を有する磁気ヘッド
を備えた磁気記録再生装置を提供するにある。An object of the present invention is to provide a magnetic recording / reproducing device equipped with a magnetic head having a high output.
【0008】[0008]
【課題を解決するための手段】本発明は上記従来の欠点
を解消するために、巨大磁気抵抗効果膜を構成している
それぞれの膜のうち、一つの強磁性膜のみヘッド摺動面
側に近づけ、他の膜をヘッド摺動面から遠ざけることに
より、高保磁力媒体への適用,低浮上量化及び高耐摩耗
性,耐食性磁気ヘッドが実現できる。従来このような磁
気抵抗効果膜を摺動面から遠ざけ、フラックスガイドを
用いている例として米国特許5,255,141があり、フラッ
クスガイドに用いる膜は磁気抵抗効果膜とは別の強磁性
膜(上記米国特許では上部磁性膜)が用いられ、巨大磁
気抵抗効果膜に上記米国特許の手法を採用している。し
かし、フラックスガイドを用いると巨大磁気抵抗効果膜
の感磁部に加わる磁界が弱くなり、出力が低下する。そ
こで本発明では、巨大磁気抵抗効果膜よりも摺動面(媒
体対向面)側に磁気抵抗効果膜を配置し、巨大磁気抵抗
効果膜の感磁部と磁気抵抗効果膜の感磁部となる磁性膜
が同一(兼用)とした。本発明では、フラックスガイド
による巨大磁気抵抗効果膜の出力低下を防ぐために、巨
大磁気抵抗効果膜よりも摺動面側に感磁部となる磁性膜
を共通として、磁気抵抗効果膜を配置する。従って、出
力は巨大磁気抵抗効果膜及び磁気抵抗効果膜の二つの膜
から発生し、全体のヘッド出力は単独膜よりも高くな
る。本発明では巨大磁気抵抗効果膜の中の感磁部となる
第二強磁性膜とこの第二強磁性膜の磁区を制御する膜が
摺動面に面し、他の巨大磁気抵抗効果膜を構成している
非磁性導電膜,第一強磁性膜が摺動面から磁気抵抗効果
膜の素子高さ以上離れて形成されており、基板あるいは
シールド膜上に第二強磁性膜,非磁性導電膜,第一強磁
性膜の順に蒸着後,感磁部となる第二強磁性膜以外の非
磁性導電膜及び第一強磁性膜をイオンミリング法,スパ
ッタリング法等により除去することで実現することがで
きる。これらの膜を除去後、電極膜を蒸着する。このよ
うに作成した磁気ヘッドは、第二強磁性膜がヘッド摺動
面に残るため、巨大磁気抵抗効果が発現する部分は第二
強磁性膜の先端部よりもヘッド摺動面から遠くなる。媒
体からの磁界は、ヘッド摺動面側に残っている第二強磁
性膜の巨大磁気抵抗に寄与しない部分を通して、巨大磁
気抵抗効果に寄与する部分に加わる。第二強磁性膜の膜
厚は20nm以下と薄く、巨大磁気抵抗効果寄与部分に
流れる電流の分流比は極端に低下しない。本発明の巨大
磁気抵抗効果を用いた磁気ヘッドは、第二強磁性膜が巨
大磁気抵抗効果膜の感磁部と磁気抵抗効果膜の感磁部を
兼用しているため、作成プロセスは複雑とはならず、巨
大磁気抵抗効果に寄与する部分が摺動面から離れている
ために、以下のような長所が生じる。最初に、反強磁性
膜と磁気的に結合している第一強磁性膜がヘッド摺動面
から離れているため、媒体からの強い磁界によってこれ
らの膜の磁気的結合が見かけ上小さくなることが避けら
れる。即ち上記反強磁性膜と第一強磁性膜間の交換結合
磁界弱い場合でも本発明のようにヘッドを作成すること
により、磁気ディスク装置に適用可能となる。次に、反
強磁性膜がMnを含むNiMn,FeMn等の材料は耐
食性がNiFe系やCoNiFe系膜よりも低いため
に、これらの反強磁性膜がヘッド摺動面にその端部が面
していると、磁気ディスク装置にヘッドを搭載した場
合、摺動面側から反強磁性膜が酸化し、反強磁性膜と第
一強磁性膜間の交換結合磁界が低下し、出力低下につな
がることがある。これに対し、本発明の巨大磁気抵抗効
果を用いた磁気ディスク装置の場合には、反強磁性膜が
摺動面側から素子高さ以上離れており、Al2O3等の絶
縁膜で保護されているため、耐食性が低い反強磁性膜も
適用可能となる。また、出力に寄与する感磁部がそれぞ
れの単独膜である場合よりも大きくなるため、高感度高
出力磁気ヘッドが実現できる。According to the present invention, in order to solve the above-mentioned conventional drawbacks, only one ferromagnetic film among the respective films constituting the giant magnetoresistive film is provided on the head sliding surface side. By bringing them closer to each other and moving the other film away from the head sliding surface, it is possible to realize a magnetic head with high coercive force, low flying height, high wear resistance, and corrosion resistance. Conventionally, there is U.S. Pat. No. 5,255,141 as an example of using a flux guide by keeping such a magnetoresistive film away from the sliding surface, and the film used for the flux guide is a ferromagnetic film different from the magnetoresistive film (the above-mentioned U.S. Pat. Uses an upper magnetic film) and adopts the method of the above-mentioned US patent for a giant magnetoresistive film. However, when the flux guide is used, the magnetic field applied to the magnetic sensitive portion of the giant magnetoresistive film becomes weak and the output is reduced. Therefore, in the present invention, the magnetoresistive effect film is arranged on the sliding surface (medium facing surface) side of the giant magnetoresistive effect film to form a magnetic sensitive portion of the giant magnetoresistive effect film and a magnetic sensitive portion of the magnetoresistive effect film. The magnetic films were the same (combined). In the present invention, in order to prevent the output reduction of the giant magnetoresistive effect film due to the flux guide, the magnetoresistive effect film is arranged on the sliding surface side of the giant magnetoresistive effect film in common with the magnetic film serving as the magnetic sensing portion. Therefore, the output is generated from the two films of the giant magnetoresistive film and the magnetoresistive film, and the total head output is higher than that of the single film. In the present invention, the second ferromagnetic film that serves as the magnetically sensitive portion in the giant magnetoresistive film and the film that controls the magnetic domain of this second ferromagnetic film face the sliding surface, and another giant magnetoresistive film is provided. The constituent non-magnetic conductive film and the first ferromagnetic film are formed apart from the sliding surface by the height of the magnetoresistive film or more, and the second ferromagnetic film and the non-magnetic conductive film are formed on the substrate or the shield film. After depositing the film and the first ferromagnetic film in this order, remove the non-magnetic conductive film and the first ferromagnetic film other than the second ferromagnetic film that will be the magnetically sensitive portion by ion milling, sputtering, etc. You can After removing these films, an electrode film is deposited. In the magnetic head manufactured in this way, the second ferromagnetic film remains on the head sliding surface, so that the portion where the giant magnetoresistive effect appears is farther from the head sliding surface than the tip of the second ferromagnetic film. The magnetic field from the medium is added to the portion contributing to the giant magnetoresistive effect through the portion of the second ferromagnetic film remaining on the head sliding surface side that does not contribute to the giant magnetoresistive effect. The film thickness of the second ferromagnetic film is as thin as 20 nm or less, and the shunt ratio of the current flowing in the portion contributing to the giant magnetoresistive effect does not extremely decrease. In the magnetic head using the giant magnetoresistive effect of the present invention, since the second ferromagnetic film serves as both the magnetic sensitive portion of the giant magnetoresistive effect film and the magnetic sensitive portion of the magnetoresistive effect film, the manufacturing process is complicated. However, since the portion that contributes to the giant magnetoresistive effect is separated from the sliding surface, the following advantages occur. First, since the first ferromagnetic film, which is magnetically coupled to the antiferromagnetic film, is far from the head sliding surface, the magnetic coupling between these films is apparently reduced by the strong magnetic field from the medium. Can be avoided. That is, even if the exchange coupling magnetic field between the antiferromagnetic film and the first ferromagnetic film is weak, it can be applied to the magnetic disk device by forming the head as in the present invention. Next, since materials such as NiMn and FeMn containing Mn in the antiferromagnetic film have lower corrosion resistance than NiFe-based or CoNiFe-based films, these antiferromagnetic films face the head sliding surface at their ends. When the head is mounted on the magnetic disk device, the antiferromagnetic film is oxidized from the sliding surface side, the exchange coupling magnetic field between the antiferromagnetic film and the first ferromagnetic film is reduced, and the output is reduced. Sometimes. On the other hand, in the case of the magnetic disk device using the giant magnetoresistive effect of the present invention, the antiferromagnetic film is separated from the sliding surface side by the element height or more and is protected by an insulating film such as Al 2 O 3. Therefore, an antiferromagnetic film having low corrosion resistance can be applied. In addition, since the magnetic sensitive portion that contributes to the output is larger than in the case where each of them is a single film, a high-sensitivity and high-output magnetic head can be realized.
【0009】[0009]
【作用】本発明によれば感磁部で出力発生源である巨大
磁気抵抗効果膜がヘッド摺動面から素子高さ以上離れて
おり、感磁部となる第二強磁性膜が磁気抵抗効果膜の感
磁部と兼用となるために、ヘッド摺動面から離れたこと
による出力低下が抑制されるため、低浮上量,高耐食性
の巨大磁気抵抗効果磁気ヘッドに適用可能である。巨大
磁気抵抗効果は固定層である第一強磁性膜と自由層であ
る第二強磁性膜間の磁化の相対角度により生じる。第一
強磁性膜の磁化の向きは反強磁性膜との交換結合により
固定されているが、交換結合磁界が充分に高くない場合
には、媒体からの磁界により第一強磁性膜の磁化の向き
も固定されずに動いてしまい、出力の低下やノイズの原
因となる。このような出力低下やノイズはヘッドと媒体
間の浮上量が狭まるにつれて顕著になる。本発明構成の
巨大磁気抵抗効果を用いたヘッドの場合には、反強磁性
膜と固定層である第一強磁性膜の端部が摺動面から素子
高さ以上離れているため、第一強磁性膜における媒体か
らの磁界が小さくなり、上記出力低下やノイズの発生は
低減される。また本発明の構成による巨大磁気抵抗効果
ヘッドの場合には、耐食性が低いMn系の反強磁性膜を
適用することが可能であり、適用材料の種類を増やせ
る。さらに浮上量を小さくした磁気ディスク装置の場合
でも、第一強磁性膜や反強磁性膜が摺動面から離れてい
るため、耐摩耗性が高く、コンタクト型の磁気抵抗効果
型ヘッドに適用することが可能である。According to the present invention, the giant magnetoresistive film, which is an output generation source, is separated from the head sliding surface by the height of the element or more in the magnetic sensing part, and the second ferromagnetic film, which is the magnetic sensing part, has the magnetoresistive effect. Since it also serves as the magnetically sensitive portion of the film, output reduction due to separation from the head sliding surface is suppressed, and therefore it can be applied to a giant magnetoresistive effect magnetic head having a low flying height and high corrosion resistance. The giant magnetoresistive effect is caused by the relative angle of magnetization between the first ferromagnetic film, which is the fixed layer, and the second ferromagnetic film, which is the free layer. The direction of magnetization of the first ferromagnetic film is fixed by exchange coupling with the antiferromagnetic film, but if the exchange coupling magnetic field is not sufficiently high, the magnetization of the first ferromagnetic film is changed by the magnetic field from the medium. The orientation also moves without being fixed, resulting in reduced output and noise. Such output reduction and noise become more remarkable as the flying height between the head and the medium becomes narrower. In the case of the head using the giant magnetoresistive effect of the configuration of the present invention, since the end portions of the antiferromagnetic film and the first ferromagnetic film that is the fixed layer are separated from the sliding surface by the element height or more, The magnetic field from the medium in the ferromagnetic film is reduced, so that the above-mentioned output reduction and noise generation are reduced. Further, in the case of the giant magnetoresistive head according to the configuration of the present invention, it is possible to apply a Mn-based antiferromagnetic film having low corrosion resistance, and the types of applicable materials can be increased. Even in the case of a magnetic disk device with a smaller flying height, since the first ferromagnetic film and the antiferromagnetic film are separated from the sliding surface, they have high wear resistance and are applied to a contact type magnetoresistive head. It is possible.
【0010】[0010]
【実施例】図2は本発明に係る巨大磁気抵抗効果を用い
た磁気ヘッドを適用した磁気ディスク装置200の全体
構成である。磁気ディスク装置200は、当間隔で一軸
(スピンドル202)上に積層された複数の磁気ディス
ク204a,204b,204c,204d,204e
と、スピンドル202を駆動するモータ203と、リニ
アアクチュエータを構成する移動可能なキャリッジ20
6と、これを駆動するボイスコイルモータ213と、こ
れらを支持するベース201とを備えて構成される。ボ
イスコイルモータ213は、マグネット208及びボイ
スコイル207で構成される。また、磁気ディスク制御
装置等の上位装置212から送出される信号に従ってボ
イスコイルモータ213を制御するボイスコイルモータ
制御回路209を備えている。また、上位装置212か
ら送られてきたデータを、書き込み方式に対応して、磁
気ヘッドに流すべき電流に変換する機能と、磁気ディス
ク204a等から送られてきたデータを増幅し、ディジ
タル信号に変換する機能とを持つライト/リード回路2
10と、このライト/リード回路210のリード回路に
接続され、巨大磁気抵抗効果膜及び磁気抵抗効果膜に流
れる電流を制御する電流制御回路214、及び上位装置
212を接続するためのインターフェイス211とを備
えている。FIG. 2 shows the overall structure of a magnetic disk device 200 to which a magnetic head using the giant magnetoresistive effect according to the present invention is applied. The magnetic disk device 200 includes a plurality of magnetic disks 204a, 204b, 204c, 204d, and 204e stacked on one axis (spindle 202) at equal intervals.
And a motor 203 that drives a spindle 202 and a movable carriage 20 that constitutes a linear actuator.
6, a voice coil motor 213 that drives this, and a base 201 that supports these. The voice coil motor 213 includes a magnet 208 and a voice coil 207. Further, a voice coil motor control circuit 209 for controlling the voice coil motor 213 in accordance with a signal sent from a higher-level device 212 such as a magnetic disk control device is provided. Further, it has a function of converting the data sent from the host device 212 into a current to be passed through the magnetic head in accordance with the writing method, and amplifies the data sent from the magnetic disk 204a and converts it into a digital signal. Write / read circuit 2 with the function to
10 and a current control circuit 214 which is connected to the read circuit of the write / read circuit 210 and controls the giant magnetoresistive film and the current flowing through the magnetoresistive film, and an interface 211 for connecting the host device 212. I have it.
【0011】次に、この磁気ディスク装置200の動作
を、読み出しの場合を例として説明する。上位装置21
2から、インターフェイス211を介して、ボイスコイ
ルモータ制御回路209に読み出し支持があると、ボイ
スコイルモータ制御回路209からの制御電流によって、
ボイスコイルモータ213がキャリッジ206を動作さ
せ、指示されたデータが記憶されているトラックの位置
に、磁気ヘッド群205a,205b等を高速で移動さ
せ、正確に位置付けする。この位置付けは、ボイスコイ
ルモータ制御回路209と接続されている位置決め用磁
気ヘッド205bが、磁気ディスク204c上の位置を
検出して提供し、データ用磁気ヘッド205aの位置制
御を行うことによって行われる。また、ベース201に
支持されたモータ203は、スピンドル202に取付け
た直径3.5インチ の複数の磁気ディスク204a,2
04b,204c,204eを回転させる。Next, the operation of the magnetic disk device 200 will be described by taking the case of reading as an example. Upper device 21
When the voice coil motor control circuit 209 has a read support from the interface 2 via the interface 211, the control current from the voice coil motor control circuit 209 causes
The voice coil motor 213 operates the carriage 206 to move the magnetic head groups 205a, 205b, etc. at high speed to the position of the track where the instructed data is stored, and position them accurately. This positioning is performed by the positioning magnetic head 205b connected to the voice coil motor control circuit 209 detecting and providing the position on the magnetic disk 204c and controlling the position of the data magnetic head 205a. Further, the motor 203 supported by the base 201 includes a plurality of magnetic disks 204a, 2 having a diameter of 3.5 inches mounted on the spindle 202.
04b, 204c, 204e are rotated.
【0012】次に、ライト/リード回路210からの信
号からに従って、指示された所定の磁気ヘッドを選択
し、指示された領域の先頭位置を検出後、磁気ディスク
上のデータ信号を読み出す。この読み出しは、ライト/
リード回路210に接続されているデータ用磁気ヘッド
205aが、磁気ディスク204dとの間で信号の授受
を行うことにより行われる。Next, according to the signal from the write / read circuit 210, a specified predetermined magnetic head is selected, the head position of the specified area is detected, and then the data signal on the magnetic disk is read. This read is a write /
This is performed by the data magnetic head 205a connected to the read circuit 210 exchanging signals with the magnetic disk 204d.
【0013】本発明では、磁気ヘッド205a等を磁気
抵抗効果膜の感磁部を兼ねた自由層である第二強磁性
膜,非磁性導電膜,固定層である第一強磁性膜、及び第
一強磁性膜を固定する反強磁性膜により構成される巨大
磁気抵抗効果膜によって構成している。高性能磁気ディ
スク装置としては、磁気ディスク上の面記録密度は1平
方インチ当たり50メガビット以上、線記録密度は1イ
ンチ当たり25キロビット以上、トラック密度は1イン
チ当たり2000トラック以上であることが望ましい。
下記の本発明に係る巨大磁気抵抗効果膜を用いた磁気ヘ
ッドは、感磁部に磁壁を生じない結果、バルクハウゼン
ノイズが無く、強磁性単層の磁気抵抗効果膜に比べて高
感度であるので、このヘッドを使用して磁気ディスク装
置を作成することによって、記録密度が1平方センチ当
たり600メガビット以上である磁気ディスク装置を作
成することが出来る。In the present invention, the magnetic head 205a and the like are the second ferromagnetic film which is a free layer which also serves as the magnetically sensitive portion of the magnetoresistive film, the nonmagnetic conductive film, the first ferromagnetic film which is the fixed layer, and the first ferromagnetic film. It is composed of a giant magnetoresistive film composed of an antiferromagnetic film that fixes one ferromagnetic film. As a high-performance magnetic disk device, it is desirable that the areal recording density on the magnetic disk is 50 megabits or more per square inch, the linear recording density is 25 kilobits or more per inch, and the track density is 2000 tracks or more per inch.
The magnetic head using the giant magnetoresistive film according to the present invention described below has no Barkhausen noise as a result of no magnetic domain wall being formed in the magnetically sensitive portion, and has higher sensitivity than the magnetoresistive film of a ferromagnetic single layer. Therefore, by using this head to create a magnetic disk device, a magnetic disk device having a recording density of 600 megabits per square centimeter or more can be created.
【0014】図1は、本発明の磁気ディスク装置200
の磁気ヘッド205aから205dとして用いる巨大磁
気抵抗効果膜を用いた磁気ヘッドの斜視図である。FIG. 1 shows a magnetic disk device 200 of the present invention.
3 is a perspective view of a magnetic head using a giant magnetoresistive effect film used as the magnetic heads 205a to 205d of FIG.
【0015】1は異方性磁気抵抗効果素子、2は巨大磁
気抵抗効果素子である。図1は磁気ディスクに対向する
摺動面側から見た斜視図を示している。図1の磁気ヘッ
ド100は、ジルコニアなどのセラミックス基板50上
に下部シールド膜82,自由層である第二強磁性膜1
0,非磁性導電膜11,固定層である第一強磁性膜12
及び第一強磁性膜の磁化を固定する反強磁性膜13から
なる巨大磁気抵抗効果膜と電極40,上部シールド膜8
1,下部磁気コア84,コイル41,上部磁気コア83
から構成してある。即ち、同一スライダー上に再生部及
び記録用コアを形成し、同一ヘッドで記録及び再生を行
うことができる。本実施例では磁気ディスク面側が磁気
抵抗効果膜で、その奥の積層膜が巨大磁気抵抗効果膜と
なるものである。Reference numeral 1 is an anisotropic magnetoresistive effect element, and 2 is a giant magnetoresistive effect element. FIG. 1 shows a perspective view seen from the sliding surface side facing the magnetic disk. The magnetic head 100 of FIG. 1 includes a lower shield film 82 and a second ferromagnetic film 1 as a free layer on a ceramic substrate 50 such as zirconia.
0, non-magnetic conductive film 11, first ferromagnetic film 12 which is a fixed layer
And a giant magnetoresistive film composed of an antiferromagnetic film 13 for fixing the magnetization of the first ferromagnetic film, an electrode 40, and an upper shield film 8.
1, lower magnetic core 84, coil 41, upper magnetic core 83
It consists of That is, the reproducing section and the recording core can be formed on the same slider, and recording and reproducing can be performed by the same head. In this embodiment, the magnetic disk surface side is the magnetoresistive effect film, and the laminated film behind it is the giant magnetoresistive effect film.
【0016】次に上述の各膜,各層の作用,材料などを
説明する。上部シールド膜81,下部シールド膜82
は、第二強磁性膜10に信号以外の磁界が影響するのを
防止し、磁気ヘッド100の信号分解能を高める作用を
する。その材料はNiFe合金,NiCo合金,Co系
の非晶質合金等の軟磁性膜であり、その膜厚は約0.5
〜3μmである。上部シールド膜81,下部シールド膜
82に隣接する上部ギャップ膜及び下部ギャップ膜は巨
大磁気抵抗効果膜と、上部及び下部シールド膜81,8
2を電気的,磁気的に隔離する作用をし、ガラス,アル
ミナなどの非磁性絶縁物などで構成される。上部,下部
ギャップ膜の膜厚は、磁気ヘッドの再生分解能に影響す
るため、磁気ディスク装置に望まれる記録密度に依存
し、通常0.4〜0.1μmの範囲にある。第一及び第
二強磁性膜12,10はNiFe合金,NiCo合金,
NiFeCo合金,Co合金のような軟磁性膜で形成さ
れる。その膜厚は1〜10nmである。また、第二強磁
性膜10の中で電極40で挾まれた非磁性導電膜11及
び反強磁性膜13と第一強磁性膜12の真下となる部分
は、感磁部と称され、この部分で磁気ディスクからの磁
気的信号の読み取りを行う。磁気ヘッド100では第二
強磁性膜10の感磁部はヘッド摺動面から0.001μ
m 以上離れており、第二強磁性膜10の感磁部と連続
した同一膜がヘッド摺動面まで形成されており、第二強
磁性膜10の感磁部から摺動面側の部分は巨大磁気抵抗
効果膜のフラックスガイド及び磁気抵抗効果膜となり、
媒体からの漏洩磁界を第二強磁性膜10の感磁部へ導入
する役目をすると同時に抵抗変化により出力も発生す
る。第二強磁性膜10,非磁性導電膜11,第一強磁性
膜12及び反強磁性膜13の形成法を以下に説明する。
これらの膜はスパッタリング法,真空蒸着法等の蒸着法
を用いて作成し、第二強磁性膜を形成した後に非磁性導
電膜11から上の膜をマスク等により摺動面となる位置
から素子高さ以上移動させて形成する方法及び第二強磁
性膜10から反強磁性膜13まで連続蒸着後、イオンミ
リング法やスパッタエッチング法等により第二強磁性膜
10の感磁部より摺動面側の部分にある反強磁性膜から
非磁性導電膜の部分を除去する方法がある。後者の場合
にはあらかじめ感磁部となる膜厚よりも厚い第二強磁性
膜を形成し、イオンミリング法等で感磁部のみスパッタ
することにより感磁部となる第二強磁性膜を形成でき、
巨大磁気抵抗効果膜の感磁部に加わる磁界を増加させる
と同時に、巨大磁気抵抗効果素子及び磁気抵抗効果素子
により出力を増加させることができる。Next, the functions and materials of the above-mentioned films and layers will be described. Upper shield film 81, lower shield film 82
Serves to prevent the magnetic field other than the signal from affecting the second ferromagnetic film 10 and enhance the signal resolution of the magnetic head 100. The material is a soft magnetic film such as a NiFe alloy, a NiCo alloy, or a Co-based amorphous alloy, and its film thickness is about 0.5.
Is about 3 μm. The upper gap film and the lower gap film adjacent to the upper shield film 81 and the lower shield film 82 are a giant magnetoresistive film, and the upper and lower shield films 81, 8
It acts to electrically and magnetically isolate 2 from each other, and is made of a non-magnetic insulator such as glass or alumina. The film thicknesses of the upper and lower gap films affect the reproducing resolution of the magnetic head, and therefore depend on the recording density desired for the magnetic disk device and are usually in the range of 0.4 to 0.1 μm. The first and second ferromagnetic films 12 and 10 are made of NiFe alloy, NiCo alloy,
It is formed of a soft magnetic film such as NiFeCo alloy or Co alloy. The film thickness is 1 to 10 nm. A portion of the second ferromagnetic film 10 which is directly below the non-magnetic conductive film 11 and the anti-ferromagnetic film 13 sandwiched by the electrodes 40 is called a magnetically sensitive portion. The part reads magnetic signals from the magnetic disk. In the magnetic head 100, the magnetic sensitive portion of the second ferromagnetic film 10 is 0.001 μm from the head sliding surface.
The same film continuous with the magnetic sensitive portion of the second ferromagnetic film 10 is formed up to the head sliding surface at a distance of m or more, and the portion of the second ferromagnetic film 10 on the sliding surface side from the magnetic sensitive portion is Becomes a giant magnetoresistive film flux guide and magnetoresistive film,
The leakage magnetic field from the medium is introduced into the magnetic sensitive portion of the second ferromagnetic film 10, and at the same time, an output is generated due to the resistance change. A method of forming the second ferromagnetic film 10, the nonmagnetic conductive film 11, the first ferromagnetic film 12 and the antiferromagnetic film 13 will be described below.
These films are formed by a vapor deposition method such as a sputtering method or a vacuum vapor deposition method, and after the second ferromagnetic film is formed, the film above the non-magnetic conductive film 11 is used as a sliding surface by a mask or the like from the element. A method in which the second ferromagnetic film 10 is moved by a height or more and a continuous surface from the second ferromagnetic film 10 to the antiferromagnetic film 13 is deposited, and then a sliding surface is formed from the magnetic sensitive portion of the second ferromagnetic film 10 by an ion milling method or a sputter etching method. There is a method of removing the portion of the non-magnetic conductive film from the antiferromagnetic film on the side portion. In the latter case, a second ferromagnetic film, which is thicker than the film thickness to be the magnetic field sensitive area, is formed in advance, and only the magnetic field sensitive area is sputtered by ion milling or the like to form the second ferromagnetic film which will become the magnetic field sensitive area. You can
It is possible to increase the magnetic field applied to the magnetically sensitive portion of the giant magnetoresistive film and simultaneously increase the output by the giant magnetoresistive element and the magnetoresistive element.
【0017】図3は本発明による異方性磁気抵抗効果素
子1を有する磁気ヘッドを用いた場合の再生出力と媒体
から加わる磁界との関係を示す線図である。比較のため
磁気ヘッド100のような巨大磁気抵抗効果素子の摺動
面側に磁気抵抗効果素子を持たない従来の巨大磁気抵抗
効果膜を用いた磁気ヘッドの再生出力を示す。低磁界領
域では従来の磁気ヘッドの法が再生出力が高いが、高磁
界側では磁気ヘッド100の方が高い再生出力を示すよ
うになる。これは媒体からの磁界により、高磁界側で従
来の磁気ヘッドの場合固定層である第一強磁性膜の磁化
が揺らぎだし、再生出力が飽和するためと考えられる。
これに対し、本発明による磁気ヘッドの場合、固定層で
ある第一強磁性膜と反強磁性膜は摺動面から0素子高さ
以上離れて形成されているため、摺動面に強い媒体磁界
が加わる場合でも第一強磁性膜の磁化は反強磁性膜によ
り固定され、巨大磁気抵抗効果膜と磁気抵抗効果膜の二
つの出力が重なるため高出力となる。FIG. 3 is a diagram showing the relationship between the reproduction output and the magnetic field applied from the medium when the magnetic head having the anisotropic magnetoresistive effect element 1 according to the present invention is used. For comparison, a reproduction output of a magnetic head using a conventional giant magnetoresistive film having no magnetoresistive element on the sliding surface side of the giant magnetoresistive element such as the magnetic head 100 is shown. In the low magnetic field region, the reproducing output of the conventional magnetic head is high, but in the high magnetic field side, the magnetic head 100 shows higher reproducing output. It is considered that this is because the magnetic field from the medium causes the magnetization of the first ferromagnetic film, which is the fixed layer in the case of the conventional magnetic head, to fluctuate on the high magnetic field side, and the reproduction output is saturated.
On the other hand, in the case of the magnetic head according to the present invention, since the first ferromagnetic film and the antiferromagnetic film, which are the fixed layers, are formed apart from the sliding surface by 0 element height or more, the medium strong against the sliding surface is obtained. Even when a magnetic field is applied, the magnetization of the first ferromagnetic film is fixed by the antiferromagnetic film, and the two outputs of the giant magnetoresistive film and the magnetoresistive film overlap, resulting in high output.
【0018】図4は本発明の磁気ヘッド100の磁気抵
抗効果膜の素子高さを変えて作製した場合の再生出力を
示す線図である。感磁部を兼ねる第二強磁性膜の摺動面
側にある磁気抵抗効果膜部分は、摺動面の加工位置ある
いは巨大磁気抵抗効果膜形成時のミリング位置を変える
ことによりその長さを決定することが可能である。摺動
面に直角方向の磁気抵抗効果膜の幅(素子高さ)は0.0
1μm以上の長さで上記ミリング法を用いて変えること
ができ、再生出力は、素子高さ以外に浮上量にも依存す
る。浮上量が20nm(0.02μm)の場合には、再生
出力は素子高さが0.01〜0.02μmの範囲で高出力
となり(再生出力が素子高さ0に外挿した場合よりも高
い)、0.02μmを超えると再生出力の低下がみられ
る。FIG. 4 is a diagram showing the reproduction output when the magnetic head 100 of the present invention is manufactured by changing the element height of the magnetoresistive effect film. The length of the magnetoresistive effect film part on the sliding surface side of the second ferromagnetic film which also functions as a magnetic sensitive part is determined by changing the processing position of the sliding surface or the milling position when forming the giant magnetoresistive effect film. It is possible to The width (element height) of the magnetoresistive film perpendicular to the sliding surface is 0.0
The length of 1 μm or more can be changed by using the milling method, and the reproduction output depends on the flying height as well as the element height. When the flying height is 20 nm (0.02 μm), the reproduction output is high when the element height is in the range of 0.01 to 0.02 μm (the reproduction output is higher than when the element height is extrapolated to 0). ), And if it exceeds 0.02 μm, the reproduction output decreases.
【0019】また、浮上量100nmの場合には、0.
01〜0.1μmの素子高さで再生出力が高い。このよ
うに磁気抵抗効果膜の素子高さを変えた場合、本発明の
磁気ヘッド100では素子高さが約1μmまで出力を検
出することができた。図5からわかるように素子高さが
ほぼ浮上量以下の範囲で高出力が得られている。When the flying height is 100 nm,
The reproduction output is high with a device height of 01 to 0.1 μm. When the element height of the magnetoresistive film was changed in this way, the magnetic head 100 of the present invention could detect the output up to an element height of about 1 μm. As can be seen from FIG. 5, a high output is obtained in the range where the element height is substantially below the flying height.
【0020】図5は磁気ヘッド100では摺動面側にあ
る磁気抵抗効果膜ではノイズが容易に発生するので、膜
構成の磁気抵抗効果及び巨大磁気抵抗効果素子を用いた
ものである。21は巨大磁気抵抗効果膜の感磁部と連続
した磁気抵抗効果膜22の感磁部以外を固定する反強磁
性膜であり、磁気抵抗効果膜の感磁部と反強磁性膜21
の間にはスペーサ23があり、磁気抵抗効果膜22の上
には下地膜24を介して高抵抗軟磁性膜25が形成され
る。このような素子構成を用いることにより、オフトラ
ック特性及びバイアスが適正な高出力磁気抵抗効果素子
が実現される。本実施例は図1と同じ方向に向いたもの
で、手前が異方性磁気抵抗効果膜、その奥が巨大磁気抵
抗効果膜からなるものである。図6は、巨大磁気抵抗効
果膜と磁気抵抗効果膜からなる素子に電極31を設けた
ものである。図より、磁気抵抗効果膜及び巨大磁気抵抗
効果膜のそれぞれに流れる電流,バイアス値を適正にす
ることができる。巨大磁気抵抗効果膜の中の感磁部(摺
動面側の磁気抵抗効果膜と連続している)32,非磁性
導電膜33,強磁性膜(固定層)34及び反強磁性膜3
5が摺動面から見て磁気抵抗効果膜の後に配置されてお
り、浮上量,出力,バイアスに応じてそれぞれ独立に電
流を変えることができる。本実施例も図5と同じ向きを
有し、同様の2つの磁気抵抗効果膜を有している。In the magnetic head 100 shown in FIG. 5, noise is easily generated in the magnetoresistive effect film on the sliding surface side, so that the magnetoresistive effect and the giant magnetoresistive effect element of the film structure are used. Reference numeral 21 denotes an antiferromagnetic film for fixing the magnetic sensitive portion of the giant magnetoresistive film other than the magnetic sensitive portion of the magnetoresistive film 22 continuous with the magnetic sensitive portion.
A spacer 23 is provided between them, and a high resistance soft magnetic film 25 is formed on the magnetoresistive effect film 22 with a base film 24 interposed therebetween. By using such an element structure, a high output magnetoresistive effect element having an appropriate off-track characteristic and bias can be realized. This embodiment is oriented in the same direction as in FIG. 1, and is composed of an anisotropic magnetoresistive effect film on the front side and a giant magnetoresistive effect film on the back side. In FIG. 6, an electrode 31 is provided on an element composed of a giant magnetoresistive effect film and a magnetoresistive effect film. From the figure, it is possible to make the currents and bias values flowing through the magnetoresistive effect film and the giant magnetoresistive effect film appropriate. Magnetosensitive portion (continuous with the magnetoresistive effect film on the sliding surface side) 32 in the giant magnetoresistive effect film, non-magnetic conductive film 33, ferromagnetic film (fixed layer) 34 and antiferromagnetic film 3
5 is arranged after the magnetoresistive film as seen from the sliding surface, and the current can be changed independently depending on the flying height, output, and bias. This embodiment also has the same orientation as in FIG. 5 and has two similar magnetoresistive films.
【0021】[0021]
【発明の効果】本発明は巨大磁気抵抗効果膜の感磁部と
なる自由層と磁気抵抗効果膜を同時に形成し、磁気抵抗
効果膜を摺動面側に配置し、巨大磁気抵抗効果膜をヘッ
ド摺動面から遠ざけることにより、高保磁力媒体への適
用,低浮上量化及び高耐摩耗性,耐食性磁気ヘッドが実
現できる。本発明の巨大磁気抵抗効果を用いた磁気ヘッ
ドは、以下のような長所が生じる。最初に、反強磁性膜
と磁気的に結合している第一強磁性膜がヘッド摺動面か
ら離れているため、媒体からの強い磁界によってこれら
の膜の磁気的結合が見かけ上小さくなることが避けられ
る。即ち上記反強磁性膜と第一強磁性膜間の交換結合磁
界弱い場合でも本発明のようにヘッドを作成することに
より、磁気ディスク装置に適用可能となる。本発明の巨
大磁気抵抗効果を用いた磁気ディスク装置の場合には、
反強磁性膜が摺動面側から磁気抵抗効果膜を介して離れ
ており、Al2O3等の絶縁膜で保護されているため、耐
食性が低い反強磁性膜も適用可能であり、出力が磁気抵
抗効果と巨大磁気抵抗効果膜の両膜から得られ高出力と
なる。The present invention forms a giant magnetoresistive effect film by simultaneously forming a free layer and a magnetoresistive effect film, which are magnetically sensitive parts of the giant magnetoresistive effect film, and disposing the magnetoresistive effect film on the sliding surface side. By moving away from the head sliding surface, application to high coercive force medium, low flying height, high wear resistance, and corrosion resistant magnetic head can be realized. The magnetic head using the giant magnetoresistive effect of the present invention has the following advantages. First, since the first ferromagnetic film that is magnetically coupled to the antiferromagnetic film is far from the head sliding surface, the magnetic coupling between these films is apparently reduced by the strong magnetic field from the medium. Can be avoided. That is, even if the exchange coupling magnetic field between the antiferromagnetic film and the first ferromagnetic film is weak, it can be applied to the magnetic disk device by forming the head as in the present invention. In the case of a magnetic disk device using the giant magnetoresistive effect of the present invention,
Since the antiferromagnetic film is separated from the sliding surface side through the magnetoresistive film and is protected by an insulating film such as Al 2 O 3, an antiferromagnetic film with low corrosion resistance can also be applied. Is obtained from both the magnetoresistive effect and giant magnetoresistive effect films, resulting in high output.
【図1】記録再生磁気ヘッドの斜視図。FIG. 1 is a perspective view of a recording / reproducing magnetic head.
【図2】磁気ディスク装置全体の構成を示すブロック
図。FIG. 2 is a block diagram showing the overall configuration of a magnetic disk device.
【図3】本発明の磁気ヘッドを用いた時の規格化出力。FIG. 3 is a normalized output when the magnetic head of the present invention is used.
【図4】磁気抵抗効果膜の素子高さによる出力の変化。FIG. 4 shows a change in output depending on the element height of the magnetoresistive film.
【図5】低ノイズ磁気ヘッドの摺動面側からみた膜構成
(感磁部付近のみ)。FIG. 5 is a film configuration as seen from the sliding surface side of the low noise magnetic head (only in the vicinity of the magnetic sensing part).
【図6】独立電流制御磁気ヘッドの膜構成。FIG. 6 is a film structure of an independent current control magnetic head.
1…異方性磁気抵抗効果素子、2…巨大磁気抵抗効果素
子、10…第二強磁性膜(感磁部となる強磁性自由
層)、11,33…非磁性導電膜、12…第一強磁性膜
(固定層)、13,21,35…反強磁性膜、22…磁
気抵抗効果膜、23…スペーサ、24…下地膜、25…
高抵抗軟磁性膜、31,40…電極、41…コイル、5
0…基板、81…上部シールド膜、82…下部シールド
膜、83…上部磁気コア、84…下部磁気コア。DESCRIPTION OF SYMBOLS 1 ... Anisotropic magnetoresistive effect element, 2 ... Giant magnetoresistive effect element, 10 ... 2nd ferromagnetic film (ferromagnetic free layer used as a magnetic-sensing part), 11, 33 ... Nonmagnetic conductive film, 12 ... 1st Ferromagnetic film (fixed layer), 13, 21, 35 ... Antiferromagnetic film, 22 ... Magnetoresistive film, 23 ... Spacer, 24 ... Underlayer film, 25 ...
High resistance soft magnetic film, 31, 40 ... Electrodes, 41 ... Coil, 5
0 ... Substrate, 81 ... Upper shield film, 82 ... Lower shield film, 83 ... Upper magnetic core, 84 ... Lower magnetic core.
Claims (8)
有する磁気ディスクと、前記磁気ディスクに接近して、
前記記録媒体から発生する磁界を検出する磁気ヘッドと
を有する磁気記録再生装置において、前記磁気ヘッドは
反強磁性膜,第一の強磁性膜,非磁性導電膜及び第二の
強磁性膜が順次積層され、前記強磁性膜の互いの磁化の
なす角度によって電気抵抗が変化する巨大磁気抵抗効果
膜と、前記巨大磁気抵抗効果膜と磁気的に結合した磁気
抵抗効果膜とを有していることを特徴とする磁気記録再
生装置。1. A magnetic disk having a ferromagnetic recording medium on which a signal is magnetically recorded, and a magnetic disk close to the magnetic disk,
In a magnetic recording / reproducing apparatus having a magnetic head for detecting a magnetic field generated from the recording medium, the magnetic head includes an antiferromagnetic film, a first ferromagnetic film, a nonmagnetic conductive film, and a second ferromagnetic film sequentially. It has a giant magnetoresistive film that is laminated and has an electric resistance that changes depending on the angle formed by the mutual magnetizations of the ferromagnetic films, and a magnetoresistive film that is magnetically coupled to the giant magnetoresistive film. And a magnetic recording / reproducing apparatus.
有する磁気ディスクと、前記磁気ディスクに接近して、
前記記録媒体から漏洩する磁界を検出する磁気ヘッドと
を有する磁気記録再生装置において、前記磁気ヘッドは
巨大磁気抵抗効果膜と磁気抵抗効果膜とを有し、該巨大
磁気抵抗効果膜の感磁部となる層が前記磁気抵抗効果膜
と連続しており、前記巨大磁気抵抗効果膜及び磁気抵抗
効果膜から出力が得られるようにしたことを特徴とする
磁気記録再生装置。2. A magnetic disk having a ferromagnetic recording medium on which a signal is magnetically recorded, and a magnetic disk close to the magnetic disk,
In a magnetic recording / reproducing apparatus having a magnetic head for detecting a magnetic field leaking from the recording medium, the magnetic head has a giant magnetoresistive effect film and a magnetoresistive effect film, and the magnetic sensing section of the giant magnetoresistive effect film. A magnetic recording / reproducing apparatus, wherein a layer to be formed is continuous with the magnetoresistive effect film, and an output can be obtained from the giant magnetoresistive effect film and the magnetoresistive effect film.
有する磁気ディスクと、前記磁気ディスクに接近して、
前記記録媒体から漏洩する磁界を検出する磁気ヘッドと
を有する磁気記録再生装置において、前記磁気ヘッドは
反強磁性膜,第一の強磁性膜,非磁性導電膜及び第二の
強磁性膜が順次積層され、前記強磁性膜の互いの磁化の
なす角度によって電気抵抗の変化する巨大磁気抵抗効果
膜と、これに電流を印加する電気端子とを有し、前記反
強磁性膜が積層した第一の強磁性膜と交換結合を有し、
磁気ヘッド摺動面側端部側から磁気抵抗効果膜及び巨大
磁気抵抗効果の順に配置されていることを特徴とする磁
気記録再生装置。3. A magnetic disk having a ferromagnetic recording medium for magnetically recording a signal, and a magnetic disk close to the magnetic disk,
In a magnetic recording / reproducing apparatus having a magnetic head for detecting a magnetic field leaking from the recording medium, the magnetic head comprises an antiferromagnetic film, a first ferromagnetic film, a nonmagnetic conductive film, and a second ferromagnetic film in that order. A first laminated magnetoresistive film having a giant magnetoresistive film whose electric resistance changes depending on an angle formed by the mutual magnetizations of the ferromagnetic films and an electric terminal for applying a current to the film. Has exchange coupling with the ferromagnetic film of
A magnetic recording / reproducing apparatus characterized in that a magnetoresistive film and a giant magnetoresistive effect are arranged in this order from the end of the sliding surface side of the magnetic head.
有し、前記巨大磁気抵抗効果膜の感磁部となる強磁性膜
と前記磁気抵抗効果膜の感磁部となる強磁性膜が同一の
膜からなる磁気ヘッドを有することを特徴とする磁気記
録装置。4. A ferromagnetic film having a giant magnetoresistive effect film and a magnetoresistive effect film, which serves as a magnetic sensitive portion of the giant magnetoresistive effect film, and a ferromagnetic film which serves as a magnetic sensitive portion of the magnetoresistive effect film. A magnetic recording device having a magnetic head made of the same film.
を加え、出力が得られることを特徴とする請求項4に記
載の磁気記録装置。5. The magnetic recording apparatus according to claim 4, wherein an electric current is simultaneously applied to the ferromagnetic film through a conductive film to obtain an output.
有する磁気ディスクと、前記磁気ディスクに接近して、
前記記録媒体から漏洩する磁界を検出する磁気ヘッドと
を有する磁気記録再生装置において、前記磁気ヘッドが
反強磁性膜,第一の強磁性膜,非磁性導電膜及び第二の
強磁性膜が順次積層され、前記強磁性膜の互いの磁化の
なす角度によって電気抵抗の変化する巨大磁気抵抗効果
膜と、該巨大磁気抵抗効果膜と磁気的に結合した磁気抵
抗効果膜を有し、前記巨大磁気抵抗効果膜と磁気抵抗効
果膜の感磁部が同時に磁化回転することを特徴とする磁
気記録再生装置。6. A magnetic disk having a ferromagnetic recording medium for magnetically recording a signal, and a magnetic disk close to the magnetic disk,
In a magnetic recording / reproducing apparatus having a magnetic head for detecting a magnetic field leaking from the recording medium, the magnetic head comprises an antiferromagnetic film, a first ferromagnetic film, a nonmagnetic conductive film, and a second ferromagnetic film sequentially. A giant magnetoresistive effect film, which is laminated and whose electric resistance changes depending on an angle formed by mutual magnetizations of the ferromagnetic films, and a magnetoresistive effect film magnetically coupled to the giant magnetoresistive effect film, A magnetic recording / reproducing apparatus, wherein the magneto-sensitive part of the resistance effect film and the magneto-sensitive part of the magneto-resistive effect film rotate simultaneously.
有する磁気ヘッドを備え、前記巨大磁気抵抗効果膜の感
磁部となる強磁性膜と前記磁気抵抗効果膜の感磁部とな
る強磁性膜が同一の膜からなり、該強磁性膜の感磁部が
磁化回転し、導電膜を通して同時に電流を加え、出力が
得られることを特徴とする磁気記録装置。7. A magnetic head having a giant magnetoresistive effect film and a magnetoresistive effect film, comprising: a ferromagnetic film serving as a magnetic sensitive portion of the giant magnetoresistive effect film and a magnetic sensitive portion of the magnetoresistive effect film. A magnetic recording device characterized in that the ferromagnetic films are made of the same film, the magnetically sensitive portions of the ferromagnetic films are magnetized and rotated, and current is simultaneously applied through the conductive film to obtain an output.
有する磁気ヘッドを備え、前記巨大磁気抵抗効果膜の感
磁部となる強磁性膜と前記磁気抵抗効果膜の感磁部とな
る強磁性膜が同一の膜であり、該強磁性膜の感磁部が同
時に磁化回転し、4個の電極を用いて電流を制御し、出
力を得ることを特徴とする磁気記録装置。8. A magnetic head having a giant magnetoresistive effect film and a magnetoresistive effect film, comprising: a ferromagnetic film serving as a magnetic sensitive portion of the giant magnetoresistive effect film and a magnetic sensitive portion of the magnetoresistive effect film. A magnetic recording device characterized in that the ferromagnetic films are the same film, and the magnetically sensitive portions of the ferromagnetic films are simultaneously magnetized and rotated, and current is controlled by using four electrodes to obtain an output.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8363895A JPH08287416A (en) | 1995-04-10 | 1995-04-10 | Magnetic recording and reproducing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8363895A JPH08287416A (en) | 1995-04-10 | 1995-04-10 | Magnetic recording and reproducing device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH08287416A true JPH08287416A (en) | 1996-11-01 |
Family
ID=13808008
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8363895A Pending JPH08287416A (en) | 1995-04-10 | 1995-04-10 | Magnetic recording and reproducing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH08287416A (en) |
-
1995
- 1995-04-10 JP JP8363895A patent/JPH08287416A/en active Pending
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