JPH08277470A - Production of surface coated cutting tool - Google Patents
Production of surface coated cutting toolInfo
- Publication number
- JPH08277470A JPH08277470A JP10696795A JP10696795A JPH08277470A JP H08277470 A JPH08277470 A JP H08277470A JP 10696795 A JP10696795 A JP 10696795A JP 10696795 A JP10696795 A JP 10696795A JP H08277470 A JPH08277470 A JP H08277470A
- Authority
- JP
- Japan
- Prior art keywords
- cutting tool
- layer
- coated cutting
- vapor deposition
- chemical vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、ＷＣ基超硬合金基体
またはサーメット基体（以下、基体という）の表面に、
少なくとも１層のチタンの炭窒化物層を含む単一硬質層
または複合硬質層を化学蒸着法により形成する表面被覆
切削工具の製造方法に関するものであり、この方法で作
製された表面被覆切削工具は、従来よりも一段と過酷な
条件の鋼の高能率切削加工を可能にするものである。This invention relates to a surface of a WC-based cemented carbide substrate or a cermet substrate (hereinafter referred to as a substrate),
The present invention relates to a method for producing a surface-coated cutting tool, which comprises forming a single hard layer or a composite hard layer containing at least one titanium carbonitride layer by a chemical vapor deposition method, and the surface-coated cutting tool produced by this method is It enables high-efficiency cutting of steel under more severe conditions than before.
【０００２】[0002]
【従来の技術】従来、市販されているチタンの炭窒化物
層表面被覆切削工具は、基体の表面に、化学蒸着法によ
り、チタン炭窒化物からなる単一硬質層、またはチタン
の炭窒化物層を含みさらにチタンの炭化物、窒化物、炭
窒酸化物および炭酸化物並びに酸化アルミニウム層のう
ちの１種もしくは２種以上の層からなる複合硬質層を形
成し製造することはよく知られているところである。2. Description of the Related Art Conventionally, a commercially available titanium carbonitride layer surface-coated cutting tool has a single hard layer of titanium carbonitride or a titanium carbonitride layer formed on a surface of a substrate by a chemical vapor deposition method. It is well known to form and manufacture a composite hard layer including layers and further comprising one or more layers of titanium carbides, nitrides, carbonitride oxides and carbonates and aluminum oxide layers. By the way.
【０００３】しかし、従来のチタン炭窒化物からなる硬
質層を形成する化学蒸着法は、１０００℃以上の高温で
行われるため、基体と被覆層の境界に脱炭層が形成さ
れ、基体の強度は低下し、被覆層は基体から剥離しやす
い。したがって、従来の化学蒸着法により作製したチタ
ンの炭窒化物硬質層を表面被覆した切削工具を用いて鋼
などを高速および高送り切削加工など過酷な条件下での
切削を行った場合には、切刃の折損や被覆層の剥離が生
じ、十分な切削工具寿命が得られなかった。However, since the conventional chemical vapor deposition method for forming a hard layer made of titanium carbonitride is carried out at a high temperature of 1000 ° C. or higher, a decarburized layer is formed at the boundary between the substrate and the coating layer, and the strength of the substrate is high. And the coating layer is easy to peel from the substrate. Therefore, when performing cutting under severe conditions such as high-speed and high-feed cutting of steel using a cutting tool coated with a carbonitride hard layer of titanium produced by conventional chemical vapor deposition, The cutting edge was broken and the coating layer was peeled off, and a sufficient cutting tool life could not be obtained.
【０００４】そのため、近年、反応ガスとして有機ＣＮ
化合物を含む混合ガスを使用し、７００〜９００℃の温
度で化学蒸着を行う中温化学蒸着法が提案されている
（特開昭６３−１０３０７２号公報、特開平３−８７３
６９号公報など参照）。Therefore, in recent years, organic CN has been used as a reaction gas.
A medium-temperature chemical vapor deposition method has been proposed in which chemical vapor deposition is performed at a temperature of 700 to 900 ° C. using a mixed gas containing a compound (Japanese Patent Laid-Open No. 63-103072, Japanese Patent Laid-Open No. 3-873).
69, etc.).
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、中温化
学蒸着法により形成された被覆層は、基体とチタンの炭
窒化物硬質層との境界に脱炭層が形成されることはない
が、反応性の高い有機ＣＮ化合物を使用するために、被
覆層が異常粒成長しやすく、鋼などを高速、高送り切削
など苛酷な条件下で切削を行うと、切削中に刃先が短時
間で欠損し、比較的短時間で使用寿命に至り、依然とし
て工具寿命を延ばすことができなかった。However, in the coating layer formed by the medium temperature chemical vapor deposition method, the decarburized layer is not formed at the boundary between the substrate and the carbonitride hard layer of titanium, but the reactive layer has a high reactivity. Due to the use of a high organic CN compound, the coating layer is prone to abnormal grain growth, and when cutting steel, etc. under severe conditions such as high speed, high feed cutting, the cutting edge will be chipped in a short time during cutting The service life was reached in an extremely short time, and the tool life could not be extended.
【０００６】[0006]
【課題を解決するための手段】そこで本発明者らは、か
かる観点から、中温化学蒸着法により形成された被覆層
の異常粒成長を抑制し、従来よりも一層工具寿命の長い
表面被覆切削工具の製造方法を開発すべく研究を行って
いたところ、基体を化学蒸着装置内に装入し、反応温
度：８００〜９５０℃に設定し、反応ガスとして、四塩
化チタン、アセトニトリルおよび水素を含む混合ガスに
アルミニウムの塩化物を０．０１〜５．０容量％添加し
た混合ガスを使用することにより基体表面にチタンの炭
窒化物層からなる単一硬質層または少なくとも一層のチ
タンの炭窒化物層を含む複合硬質層を形成して得られた
表面被覆切削工具は、従来の中温化学蒸着法により形成
されたチタンの炭窒化物からなる硬質層よりも結晶粒が
微細化し、この微細な結晶粒を有するチタンの炭窒化物
層を被覆した切削工具は従来の中温化学蒸着法により得
られたチタンの炭窒化物層被覆切削工具に比べて、工具
寿命が大幅に向上するという研究結果が得られたのであ
る。From this point of view, the inventors of the present invention have suppressed the abnormal grain growth of the coating layer formed by the medium temperature chemical vapor deposition method and have a longer tool life than before. In the course of conducting research to develop a manufacturing method of, a substrate was placed in a chemical vapor deposition apparatus, a reaction temperature was set to 800 to 950 ° C., and a mixture containing titanium tetrachloride, acetonitrile and hydrogen as a reaction gas. A single hard layer consisting of a titanium carbonitride layer or at least one titanium carbonitride layer on the surface of a substrate by using a mixed gas in which 0.01 to 5.0% by volume of aluminum chloride is added to the gas. The surface-coated cutting tool obtained by forming the composite hard layer containing is finer in crystal grains than the hard layer made of titanium carbonitride formed by the conventional medium temperature chemical vapor deposition method. Research results show that cutting tools coated with a titanium carbonitride layer having crystal grains have a significantly improved tool life compared to titanium carbonitride layer-coated cutting tools obtained by the conventional medium temperature chemical vapor deposition method. It was obtained.
【０００７】この発明は、かかる研究結果にもとずいて
なされたものであって、（１） 反応ガスとして、四塩
化チタン、有機ＣＮ化合物および水素を必須成分とする
混合ガスを使用し、化学蒸着法により基体表面に少なく
とも一層のチタンの炭窒化物層を含む単一硬質層または
複合硬質層を形成してなる表面被覆切削工具の製造方法
において、前記反応ガスは、アルミニウムの塩化物を含
む混合ガスである表面被覆切削工具の製造方法、（２）
反応ガスは、前記アルミニウムの塩化物を０．０１〜
５．０容量％含む前記（１）記載の表面被覆切削工具の
製造方法、（３） 前記表面被覆切削工具の製造方法に
おける反応温度は、８００〜９５０℃の範囲内にある前
記（１）または（２）記載の表面被覆切削工具の製造方
法、に特徴を有するものである。The present invention has been made based on the results of such research. (1) The reaction gas used is a mixed gas containing titanium tetrachloride, an organic CN compound and hydrogen as essential components. In the method for producing a surface-coated cutting tool, wherein a single hard layer or a composite hard layer containing at least one titanium carbonitride layer is formed on the surface of a substrate by a vapor deposition method, the reaction gas contains aluminum chloride. Method for manufacturing surface-coated cutting tool which is mixed gas, (2)
As the reaction gas, the aluminum chloride is 0.01 to
The method for producing a surface-coated cutting tool according to (1), which comprises 5.0% by volume, (3) the reaction temperature in the method for producing a surface-coated cutting tool is within the range of 800 to 950 ° C. (1) or (2) The method for producing a surface-coated cutting tool according to (2), which is characterized.
【０００８】この発明のチタンの炭窒化物層を形成する
一層具体的な方法は、まず基体を化学蒸着装置内に装入
し、反応温度：８００〜９５０℃に設定し、反応ガスと
して、ＴｉＣｌ4 ：０．５〜１０容量％、ＣＨ3 ＣＮ：
０．０１〜５．０容量％、Ｎ2 ：０〜５０容量％（Ｎ2
は必要に応じて添加されるもので含まれなくても良
い）、残りＨ2 からなる混合ガスに、さらにＡｌＣ
ｌ3 ：０．０１〜５．０容量％含む混合ガスを流しなが
ら圧力：２００Ｔｏｒｒ以下の真空にて反応させるもの
である。In a more specific method of forming the titanium carbonitride layer of the present invention, the substrate is first placed in a chemical vapor deposition apparatus, the reaction temperature is set to 800 to 950 ° C., and the reaction gas is TiCl 2. 4: 0.5 to 10 volume%, CH 3 CN:
0.01 to 5.0% by volume, N 2 : 0 to 50% by volume (N 2
In may not be included in what is added if necessary), a mixed gas consisting of the remaining H 2, further AlC
l 3: 0.01 to 5.0 the pressure while flowing a volume% comprising mixed gas: 200 Torr in which reaction is effected under the following vacuum.
【０００９】この発明の方法で形成されたＴｉＣＮ硬質
層の厚さは、耐摩耗性と耐欠損性のバランスを考える
と、層厚：１〜２０μｍの範囲内にあることが好まし
い。また、アルミニウムの塩化物を反応ガス中に０．０
１〜５．０容量％添加した理由は、０．０１容量％未満
ではチタンの炭窒化物層の結晶粒が十分に微細化せず、
一方、５．０容量％を越えて添加すると、チタンの炭窒
化物層に含まれる添加物量の増加によりチタンの炭窒化
物層の特性が低下し、切削性能が低下するので好ましく
ないことによるものである。アルミニウムの塩化物の添
加量の一層好ましい範囲は、０．０５〜１．０容量％で
ある。The thickness of the TiCN hard layer formed by the method of the present invention is preferably in the range of 1 to 20 μm in terms of wear resistance and fracture resistance. Also, aluminum chloride is added to the reaction gas at 0.0
The reason for adding 1 to 5.0% by volume is that if the content is less than 0.01% by volume, the crystal grains of the titanium carbonitride layer are not sufficiently refined.
On the other hand, if the addition amount exceeds 5.0% by volume, the characteristics of the titanium carbonitride layer deteriorate due to the increase in the amount of the additive contained in the titanium carbonitride layer, and the cutting performance deteriorates. Is. A more preferable range of the addition amount of aluminum chloride is 0.05 to 1.0% by volume.
【００１０】また、反応温度を８００〜９５０℃に設定
した理由は、８００℃未満では蒸着速度が極端に遅く、
生産性の点で好ましくなく、一方、９５０℃を越えると
ＴｉＣＮ硬質層の結晶粒が粗大化して好ましくないこと
によるものである。反応温度の一層好ましい範囲は、８
５０〜９００℃である。The reason why the reaction temperature is set to 800 to 950 ° C. is that the vapor deposition rate is extremely slow below 800 ° C.
This is because it is not preferable from the viewpoint of productivity, and on the other hand, when it exceeds 950 ° C., the crystal grains of the TiCN hard layer become coarse, which is not preferable. A more preferable range of the reaction temperature is 8
It is 50 to 900 ° C.
【００１１】さらに、反応ガスとして、ＴｉＣｌ4 ：
１．０〜５．０容量％、ＣＨ3 ＣＮ：０．１〜２．０容
量％、Ｎ2 ：０〜５０容量％、アルミニウムの塩化物：
０．０５〜１．０容量％を含有し、残りＨ2 からなる混
合ガスを使用することが一層好ましい。Further, TiCl 4 as a reaction gas:
1.0 to 5.0 volume%, CH 3 CN: 0.1 to 2.0% by volume, N 2: 0 to 50% by volume of aluminum chloride:
It is more preferable to use a mixed gas containing 0.05 to 1.0% by volume and the balance H 2 .
【００１２】[0012]
実施例１ 通常の粉末冶金法により製造したＷＣ−６％ＴｉＣ−６
％ＴａＣ−６％Ｃｏからなる成分組成を有し、ＩＳＯ規
格ＣＮＭＧ１２０４０８に定める形状の切削工具を用意
した。Example 1 WC-6% TiC-6 produced by conventional powder metallurgy
A cutting tool having a component composition of% TaC-6% Co and having a shape defined in ISO standard CNMG120408 was prepared.
【００１３】この切削工具を通常の化学蒸着装置に装入
し、 反応ガス組成：２％ＴｉＣｌ4 −３０％Ｎ2 −０．６％
ＣＨ3 ＣＮ−０．８％ＡｌＣｌ3 −残りＨ2 反応温度：９００℃ 反応圧力：５０Ｔｏｒｒ の条件で６時間反応ガスを流し、切削工具の表面に厚
さ：７μｍのＴｉＣＮ層を被覆する本発明表面被覆切削
工具の製造方法（以下、本発明法という）１を実施し
た。This cutting tool was loaded into a normal chemical vapor deposition apparatus, and the reaction gas composition: 2% TiCl 4 -30% N 2 -0.6%
CH 3 CN-0.8% AlCl 3 -remaining H 2 Reaction temperature: 900 ° C. Reaction pressure: Flowing reaction gas for 6 hours under the condition of 50 Torr to coat the surface of the cutting tool with a TiCN layer having a thickness of 7 μm. A method 1 for manufacturing a surface-coated cutting tool (hereinafter referred to as the method of the present invention) 1 was carried out.
【００１４】従来例１ 実施例１で用意した切削工具を通常の化学蒸着装置に装
入し、 反応ガス組成：２％ＴｉＣｌ4 −３０％Ｎ2 −０．６％
ＣＨ3 ＣＮ−残りＨ2 反応温度：９００℃ 反応圧力：５０Ｔｏｒｒ の条件で６時間反応ガスを流し、切削工具の表面に厚
さ：７μｍのＴｉＣＮ層を被覆する従来法１を実施し
た。Conventional Example 1 The cutting tool prepared in Example 1 was loaded into a normal chemical vapor deposition apparatus, and the reaction gas composition: 2% TiCl 4 -30% N 2 -0.6%
CH 3 CN-remaining H 2 reaction temperature: 900 ° C. Reaction pressure: 50 Torr was used for 6 hours to flow a reaction gas, and a conventional method 1 was performed in which the surface of the cutting tool was coated with a TiCN layer having a thickness of 7 μm.
【００１５】本発明法１および従来法１により切削工具
の表面に形成された被覆層の断面を走査型電子顕微鏡に
より観察し、観察した被覆層の電子顕微鏡組織写真をそ
れぞれ図１および図２に示した。図１および図２に示さ
れるように、本発明法１により形成された被覆層は、従
来法１により形成された被覆層に比べて、被覆層の粒成
長が少ないことが分かる。The cross section of the coating layer formed on the surface of the cutting tool by the method 1 of the present invention and the method 1 of the prior art was observed with a scanning electron microscope, and electron micrographs of the observed coating layer are shown in FIGS. 1 and 2, respectively. Indicated. As shown in FIGS. 1 and 2, it can be seen that the coating layer formed by the method 1 of the present invention has less grain growth than the coating layer formed by the conventional method 1.
【００１６】本発明法１および従来法１により得られた
表面被覆切削工具について、それぞれ、 被削材 ：ＳＣＭ４４０（硬さ：ＨＢ２２０）の丸棒 切削速度：３００ｍ／min 送り：０．３５mm／rev 切込み ：２mm 切削時間：１０min の条件の乾式連続切削試験を行い、本発明法１および従
来法１により得られた表面被覆切削工具の逃げ面摩耗幅
をそれぞれ測定した結果、本発明法１により得られた表
面被覆切削工具の逃げ面摩耗幅は０．１８ｍｍであるに
対し、従来法１により得られた表面被覆切削工具の逃げ
面摩耗幅は０．５４ｍｍであり、本発明法１により得ら
れた表面被覆切削工具の逃げ面摩耗幅は従来法１により
得られた表面被覆切削工具に比べて極めて小さく、耐摩
耗性が大幅に向上している。With respect to the surface-coated cutting tools obtained by the method 1 of the present invention and the conventional method 1, a work material: a round bar of SCM440 (hardness: HB220), a cutting speed: 300 m / min, a feed: 0.35 mm / rev A dry continuous cutting test was conducted under the conditions of depth of cut: 2 mm and cutting time: 10 min, and the flank wear widths of the surface-coated cutting tools obtained by the present method 1 and the conventional method 1 were measured. The flank wear width of the obtained surface-coated cutting tool is 0.18 mm, while the flank wear width of the surface-coated cutting tool obtained by Conventional Method 1 is 0.54 mm, which is obtained by Method 1 of the present invention. The flank wear width of the surface-coated cutting tool is extremely smaller than that of the surface-coated cutting tool obtained by the conventional method 1, and the wear resistance is greatly improved.
【００１７】実施例２ 通常の粉末冶金法により製造したＷＣ−１．５％ＴｉＣ
−１．０％ＴｉＮ−３％ＴａＣ−６％Ｃｏからなる成分
組成を有し、ＩＳＯ規格ＣＮＭＧ１２０４０８に定める
形状の切削工具を用意した。Example 2 WC-1.5% TiC produced by conventional powder metallurgy
A cutting tool having a component composition of -1.0% TiN-3% TaC-6% Co and having a shape defined in ISO standard CNMG120408 was prepared.
【００１８】この切削工具を通常の化学蒸着装置に装入
し、 反応ガス組成：４％ＴｉＣｌ4 −７０％Ｎ2 −残りＨ2 反応温度：９００℃ 反応圧力：２００Ｔｏｒｒ の条件で２時間反応ガスを流し、厚さ：１μｍのＴｉＮ
層を形成した。This cutting tool was placed in a normal chemical vapor deposition apparatus, and the reaction gas composition: 4% TiCl 4 -70% N 2 -remaining H 2 reaction temperature: 900 ° C. reaction pressure: 200 Torr for 2 hours Flow, thickness: 1 μm TiN
A layer was formed.
【００１９】つぎに、 反応ガス組成：２％ＴｉＣｌ4 −３０％Ｎ2 −０．８％
ＣＨ3 ＣＮ−０．４％ＡｌＣｌ3 −残りＨ2 反応温度：８５０℃ 反応圧力：５０Ｔｏｒｒ の条件で８時間反応ガスを流し、厚さ：８μｍのＴｉＣ
Ｎ層を形成し、さらにその後、 反応ガス組成：４％ＡｌＣｌ3 −１０％ＣＯ2 −０．２
％Ｈ2 Ｓ−残りＨ2 反応温度：１０００℃ 反応圧力：５０Ｔｏｒｒ の条件で２時間反応ガスを流し、厚さ：２μｍのＡｌ2
Ｏ3 層を形成し、さらに、 反応ガス組成：４％ＴｉＣ
ｌ4 −７０％Ｎ2 −残りＨ2 反応温度：１０００℃ 反応圧力：２００Ｔｏｒｒ の条件で１時間反応ガスを流し、厚さ：０．５μｍのＴ
ｉＮ層を形成することにより、ＴｉＮ層−ＴｉＣＮ層−
Ａｌ2 Ｏ3 層−ＴｉＮ層からなる複層を被覆することに
より本発明法２を実施した。Next, the reaction gas composition: 2% TiCl 4 -30% N 2 -0.8%
CH 3 CN-0.4% AlCl 3 -Remaining H 2 Reaction temperature: 850 ° C. Reaction pressure: 50 Torr, reaction gas was allowed to flow for 8 hours, and thickness: 8 μm of TiC
After forming an N layer, the reaction gas composition: 4% AlCl 3 -10% CO 2 -0.2
% H 2 S-remaining H 2 Reaction temperature: 1000 ° C. Reaction pressure: 50 Torr of reaction gas flow for 2 hours, thickness: 2 μm of Al 2
O 3 layer is formed, and further reaction gas composition: 4% TiC
l 4 -70% N 2 -remaining H 2 Reaction temperature: 1000 ° C. Reaction pressure: 200 Torr of reaction gas flow for 1 hour, thickness: 0.5 μm of T
By forming the iN layer, the TiN layer-TiCN layer-
Method 2 of the invention was carried out by coating a multilayer consisting of Al 2 O 3 layer-TiN layer.
【００２０】従来例２ 比較のために、実施例２で用意した切削工具を通常の化
学蒸着装置に装入し、 反応ガス組成：２％ＴｉＣｌ4 −３０％Ｎ2 −０．６％
ＣＨ3 ＣＮ−残りＨ2 反応温度：９００℃ 反応圧力：５０Ｔｏｒｒ の条件で８時間反応ガスを流し、厚さ：８μｍのＴｉＣ
Ｎ層を被覆する以外は前記本発明製造法２と同じ条件で
ＴｉＮ層−ＴｉＣＮ層−Ａｌ2 Ｏ3 層−ＴｉＮ層からな
る複層を被覆することにより従来法２を実施した。Conventional Example 2 For comparison, the cutting tool prepared in Example 2 was loaded into a normal chemical vapor deposition apparatus, and the reaction gas composition: 2% TiCl 4 -30% N 2 -0.6%
CH 3 CN-remaining H 2 Reaction temperature: 900 ° C. Reaction pressure: 50 Torr, reaction gas was allowed to flow for 8 hours, and thickness: 8 μm of TiC
Conventional method 2 was carried out by coating a multi-layer consisting of TiN layer-TiCN layer-Al 2 O 3 layer-TiN layer under the same conditions as in the production method 2 of the present invention except that the N layer was coated.
【００２１】本発明法２および従来法２により得られた
表面被覆切削工具について、 被削材 ：ＳＣＭ４３９（硬さ：ＨＢ２６０）の丸棒 切削速度：２５０ｍ／min 送り：０．３８mm／rev 切込み ：１．５mm 切削時間：１０min の条件の乾式連続切削試験を行い、本発明法２および従
来法２により得られた表面被覆切削工具の逃げ面摩耗幅
をそれぞれ測定したところ、本発明法２により得られた
表面被覆切削工具の逃げ面摩耗幅は０．２１ｍｍである
に対し、従来法２により得られた表面被覆切削工具の逃
げ面摩耗幅は０．５９ｍｍであり、耐摩耗性が大幅に向
上していることが分かった。Regarding the surface-coated cutting tools obtained by the method 2 of the present invention and the conventional method 2, the work material is a round bar of SCM439 (hardness: HB260) Cutting speed: 250 m / min Feed: 0.38 mm / rev Depth of cut: A dry continuous cutting test was conducted under the conditions of 1.5 mm cutting time: 10 min, and flank wear widths of the surface-coated cutting tools obtained by the present invention method 2 and the conventional method 2 were measured. The flank wear width of the obtained surface-coated cutting tool is 0.21 mm, whereas the flank wear width of the surface-coated cutting tool obtained by the conventional method 2 is 0.59 mm, and the wear resistance is significantly improved. I found out that
【００２２】実施例３ 通常の粉末冶金法により製造したＷＣ−２．０％ＴａＣ
−１０％Ｃｏからなる成分組成を有し、ＩＳＯ規格ＳＥ
ＥＮ１２０４ＡＦＴＮ１に定める形状の切削工具を用意
した。Example 3 WC-2.0% TaC produced by a conventional powder metallurgy method
It has a composition of 10% Co and is ISO standard SE.
A cutting tool having a shape defined in EN1204AFTN1 was prepared.
【００２３】この切削工具を通常の化学蒸着装置に装入
し、 反応ガス組成：４％ＴｉＣｌ4 −７０％Ｎ2 −残りＨ2 反応温度：８５０℃ 反応圧力：４００Ｔｏｒｒ の条件で１時間反応ガスを流し、厚さ：０．５μｍのＴ
ｉＮ層を形成した。This cutting tool was loaded into a normal chemical vapor deposition apparatus, and the reaction gas composition: 4% TiCl 4 -70% N 2 -remaining H 2 reaction temperature: 850 ° C. reaction pressure: 400 Torr reaction gas for 1 hour Flow, thickness: T of 0.5 μm
An iN layer was formed.
【００２４】つぎに、 反応ガス組成：２％ＴｉＣｌ4 −３０％Ｎ2 −０．６％
ＣＨ3 ＣＮ−０．０５％ＡｌＣｌ3 −残りＨ2 反応温度：８５０℃ 反応圧力：１００Ｔｏｒｒ の条件で４時間反応ガスを流し、厚さ：４μｍのＴｉＣ
Ｎ層を形成し、さらにその後、 反応ガス組成：４％ＴｉＣｌ4 −７０％Ｎ2 −残りＨ2 反応温度：１０００℃ 反応圧力：２００Ｔｏｒｒ の条件で１時間反応ガスを流し、厚さ：０．５μｍのＴ
ｉＮ層を形成し、ＴｉＮ層−ＴｉＣＮ層−ＴｉＮ層から
なる複層を被覆することにより本発明法３を実施した。Next, the reaction gas composition: 2% TiCl 4 -30% N 2 -0.6%
CH 3 CN-0.05% AlCl 3 -remaining H 2 Reaction temperature: 850 ° C. Reaction pressure: 100 Torr, reaction gas was allowed to flow for 4 hours, and thickness: 4 μm of TiC
After forming the N layer, the reaction gas composition: 4% TiCl 4 -70% N 2 -remaining H 2 reaction temperature: 1000 ° C. reaction pressure: 200 Torr, the reaction gas was flowed for 1 hour, and the thickness: 0. 5 μm T
The method 3 of the present invention was carried out by forming an iN layer and coating a multi-layer composed of TiN layer-TiCN layer-TiN layer.
【００２５】従来例３ 比較のために、実施例３で用意した前記切削工具を通常
の化学蒸着装置に装入し、 反応ガス組成：２％ＴｉＣｌ4 −３０％Ｎ2 −０．６％
ＣＨ3 ＣＮ−残りＨ2 反応温度：８５０℃ 反応圧力：１００Ｔｏｒｒ の条件で４時間反応ガスを流し、厚さ：４μｍのＴｉＣ
Ｎ層を被覆する以外は前記本発明製造法３と同じ条件で
ＴｉＮ層−ＴｉＣＮ層−ＴｉＮ層からなる複層を被覆す
ることにより従来法３を実施した。Conventional Example 3 For comparison, the cutting tool prepared in Example 3 was loaded into a normal chemical vapor deposition apparatus, and the reaction gas composition: 2% TiCl 4 -30% N 2 -0.6%
CH 3 CN-remaining H 2 Reaction temperature: 850 ° C. Reaction pressure: 100 Torr, reaction gas was flowed for 4 hours, thickness: 4 μm of TiC
Conventional method 3 was carried out by coating a multiple layer of TiN layer-TiCN layer-TiN layer under the same conditions as in the production method 3 of the present invention except that the N layer was coated.
【００２６】本発明法３および従来法３により得られた
表面被覆切削工具について、 被削材 ：ＳＣＭ４４０（硬さ：ＨＢ２２０）の角材 切削速度：２５０ｍ／min 送り：０．３５mm／rev 切込み ：２．５mm 切削時間：３０min の条件の乾式フライス切削試験を行い、本発明法３およ
び従来法３により得られた表面被覆切削工具の逃げ面摩
耗幅をそれぞれ測定したところ、本発明法３により得ら
れた表面被覆切削工具の切刃の状態は正常摩耗で逃げ面
摩耗量は０．１６ｍｍであるに対し、従来法３により得
られた表面被覆切削工具は４．５分切削時において切刃
に被覆層の剥離およびピッチングが多く生じたために切
削不能となった。Regarding the surface-coated cutting tools obtained by the method 3 of the present invention and the conventional method 3, a work material: a square material of SCM440 (hardness: HB220) cutting speed: 250 m / min feed: 0.35 mm / rev depth of cut: 2 A dry milling cutting test was conducted under conditions of 0.5 mm cutting time: 30 min, and flank wear widths of the surface-coated cutting tools obtained by the present invention method 3 and the conventional method 3 were measured. The state of the cutting edge of the surface-coated cutting tool is normal wear and the flank wear amount is 0.16 mm, whereas the surface-coated cutting tool obtained by the conventional method 3 covers the cutting edge at the time of cutting for 4.5 minutes. It became impossible to cut due to many layer peeling and pitting.
【００２７】[0027]
【発明の効果】この発明の表面被覆切削工具の製造方法
により得られた表面被覆切削工具は、いずれも工具寿命
が大幅に向上しており、この発明の表面被覆切削工具の
製造方法は、従来の表面被覆切削工具の製造方法に比べ
て寿命の長い表面被覆切削工具を提供することができ、
切削工具交換回数などを減らしてコストを下げることが
できるなど、産業の発展に大いに貢献しうるものであ
る。The surface-coated cutting tools obtained by the method for manufacturing a surface-coated cutting tool according to the present invention all have significantly improved tool life. It is possible to provide a surface-coated cutting tool having a long life compared to the surface-coated cutting tool manufacturing method of
It can greatly contribute to the development of industry by reducing the number of cutting tool replacements and reducing costs.
【図１】この発明の表面被覆切削工具の製造方法により
得られた被覆層の電子顕微鏡による表面組織写真であ
る。FIG. 1 is an electron micrograph of a surface structure of a coating layer obtained by the method for producing a surface-coated cutting tool according to the present invention.
【図２】従来の表面被覆切削工具の製造方法により得ら
れた被覆層の電子顕微鏡による表面組織写真である。FIG. 2 is an electron micrograph of a surface structure of a coating layer obtained by a conventional method for producing a surface-coated cutting tool.
Claims (3)
Ｎ化合物および水素を含む混合ガスを使用し、化学蒸着
法によりＷＣ基超硬合金またはサーメットからなる基体
表面に少なくとも一層のチタンの炭窒化物層を含む単一
硬質層または複合硬質層を形成してなる表面被覆切削工
具の製造方法において、 前記反応ガスは、アルミニウムの塩化物を含む混合ガス
であることを特徴とする表面被覆切削工具の製造方法。1. Titanium tetrachloride, organic C as a reaction gas
A mixed gas containing an N compound and hydrogen is used to form a single hard layer or a composite hard layer containing at least one carbonitride layer of titanium on the surface of a WC-based cemented carbide or cermet substrate by chemical vapor deposition. The method for producing a surface-coated cutting tool as defined above, wherein the reaction gas is a mixed gas containing a chloride of aluminum.
を０．０１〜５．０容量％含む混合ガスであることを特
徴とする請求項１記載の表面被覆切削工具の製造方法。2. The method for producing a surface-coated cutting tool according to claim 1, wherein the reaction gas is a mixed gas containing 0.01 to 5.0% by volume of aluminum chloride.
る反応温度は、８００〜９５０℃の範囲内であることを
特徴とする請求項１または２記載の表面被覆切削工具の
製造方法。3. The method for producing a surface-coated cutting tool according to claim 1, wherein the reaction temperature in the method for producing a surface-coated cutting tool is in the range of 800 to 950 ° C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10696795A JP3265910B2 (en) | 1995-04-06 | 1995-04-06 | Manufacturing method of surface coated cutting tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10696795A JP3265910B2 (en) | 1995-04-06 | 1995-04-06 | Manufacturing method of surface coated cutting tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08277470A true JPH08277470A (en) | 1996-10-22 |
| JP3265910B2 JP3265910B2 (en) | 2002-03-18 |
Family
ID=14447093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10696795A Expired - Lifetime JP3265910B2 (en) | 1995-04-06 | 1995-04-06 | Manufacturing method of surface coated cutting tool |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3265910B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114952211A (en) * | 2022-05-30 | 2022-08-30 | 无锡亚博特精密工具有限公司 | Cutting tool with high-hardness wear-resistant structure and preparation method thereof |
-
1995
- 1995-04-06 JP JP10696795A patent/JP3265910B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114952211A (en) * | 2022-05-30 | 2022-08-30 | 无锡亚博特精密工具有限公司 | Cutting tool with high-hardness wear-resistant structure and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3265910B2 (en) | 2002-03-18 |
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