JPH08269694A - Formation of thin film of end face of cabled optical fiber - Google Patents
Formation of thin film of end face of cabled optical fiberInfo
- Publication number
- JPH08269694A JPH08269694A JP7094415A JP9441595A JPH08269694A JP H08269694 A JPH08269694 A JP H08269694A JP 7094415 A JP7094415 A JP 7094415A JP 9441595 A JP9441595 A JP 9441595A JP H08269694 A JPH08269694 A JP H08269694A
- Authority
- JP
- Japan
- Prior art keywords
- optical fiber
- thin film
- hole
- face
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Mechanical Coupling Of Light Guides (AREA)
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明はケーブル化された光ファ
イバの、光ファイバ端面に薄膜を形成する方法に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming a thin film on an end face of an optical fiber of a cabled optical fiber.
【０００２】[0002]
【従来の技術】光ファイバは、それのみでは取扱いにく
く、また光通信部品として不完全である。そこで図１に
ケーブル化光ファイバ１１を示すように、光ファイバを
ナイロンやポリエチレンで被覆して光ファイバ心線１５
としている。さらに、光ファイバ端面１３での結合を容
易にするなどの目的で光コネクタ１９を設けてケーブル
化する。なお、図１の左側では、光コネクタ１９からフ
ェルール１７を分解した状態を示している（フェルール
１７を取り外した光コネクタ１９を、１９′として示し
てある）。2. Description of the Related Art An optical fiber is difficult to handle by itself and is incomplete as an optical communication component. Therefore, as shown in the cabled optical fiber 11 in FIG. 1, the optical fiber is coated with nylon or polyethylene and the optical fiber 15
And Further, an optical connector 19 is provided to make a cable for the purpose of facilitating the coupling at the end face 13 of the optical fiber. The left side of FIG. 1 shows a state in which the ferrule 17 is disassembled from the optical connector 19 (the optical connector 19 with the ferrule 17 removed is shown as 19 ').
【０００３】一方、光ファイバで両端面を露出してお
り、光ファイバ端面１３同士を突き合わせて結合する必
要がある。そこで、この結合面での光損失を少なくする
ために、光ファイバの端面１３に反射防止膜を形成する
ことが要求される。ところが、工程上の都合で、反射防
止膜の形成をケーブル化の後に行なう必要があるため、
面倒な問題が生じる。On the other hand, both end faces of the optical fiber are exposed, and it is necessary to abut and join the end faces 13 of the optical fibers. Therefore, in order to reduce the light loss at this coupling surface, it is required to form an antireflection film on the end surface 13 of the optical fiber. However, because of the process, it is necessary to form the antireflection film after forming the cable,
A troublesome problem occurs.
【０００４】すなわち、フェルール１７側の光ファイバ
端面１３に真空蒸着するには、ケーブル化光ファイバ全
体を真空蒸着槽内に収納しなければらない。しかし、ケ
ーブル化光ファイバ１１は長尺化しているためバルキー
であり、非常に非効率的であった。また、ケーブル化光
ファイバ１１からの放出ガスによって、目的とする真空
度まで排気するのに時間を要したり、真空槽の汚染も懸
念された。That is, to vacuum-deposit the optical fiber end face 13 on the ferrule 17 side, the entire cabled optical fiber must be housed in a vacuum vapor deposition tank. However, the cabled optical fiber 11 is bulky because it is elongated, and is very inefficient. In addition, it was feared that the gas emitted from the cabled optical fiber 11 required a long time to exhaust to a desired degree of vacuum and that the vacuum chamber was contaminated.
【０００５】[0005]
【発明が解決しようとする課題】本発明は、上記不都合
に対する解決策を鋭意検討した結果なされたものであ
り、薄膜形成に際して真空槽内に持込むケーブル化光フ
ァイバ部分を極力少なくすることを目的とする。DISCLOSURE OF THE INVENTION The present invention has been made as a result of earnestly studying a solution to the above inconvenience, and an object thereof is to minimize the cabled optical fiber portion brought into a vacuum chamber when forming a thin film. And
【０００６】[0006]
【課題を解決するための手段】本発明の第１のケーブル
化された光ファイバ端面の薄膜形成方法は、ケーブル化
された光ファイバの端面に薄膜を形成する方法であっ
て、薄膜形成装置の真空度を維持するためのパッキン
に、パッキンの幅方向を貫く、光ファイバ心線の直径に
見合った孔径の貫通孔を穿設し、貫通孔に至る切込みを
パッキン上面または下面から設け、切込みを通して光フ
ァイバ心線を貫通孔内に嵌装し、薄膜を形成すべき端面
側のケーブル化光ファイバの一部を薄膜形成装置内部に
収納して所定位置にセットするとともに、残余のケーブ
ル化光ファイバ部分は薄膜形成装置の外部に置き留め、
薄膜形成装置内を真空排気して光ファイバ端面に薄膜を
形成することを特徴とする。A first method for forming a thin film on an end surface of a cabled optical fiber according to the present invention is a method for forming a thin film on an end surface of a cabled optical fiber, which is a thin film forming apparatus. The packing for maintaining the degree of vacuum has a through hole that penetrates the width direction of the packing and has a hole diameter corresponding to the diameter of the optical fiber core wire, and a cut to reach the through hole is made from the packing upper surface or the lower surface. The optical fiber core wire is fitted into the through hole, and a part of the cabled optical fiber on the end face side where the thin film is to be formed is housed inside the thin film forming device and set at a predetermined position, while the remaining cabled optical fiber is set. The part is left outside the thin film forming device,
The inside of the thin film forming apparatus is evacuated to form a thin film on the end face of the optical fiber.
【０００７】本発明の第２のケーブル化された光ファイ
バー端面の薄膜形成方法は、ケーブル化された光ファイ
バの端面に薄膜を形成する方法であって、真空槽に開口
部を設けるとともに、該開口部を可撓性を有する導入用
シール部材で真空シールし、導入用シール部材に、真空
槽内部側から大気側に貫く、光ファイバーの心線に見合
った孔径の貫通孔を穿設し、貫通穴に至る切込みを導入
用シール部材の外周面から設け、切込みを通して光ファ
イバ心線を貫通孔内に嵌装し、薄膜を形成すべき端面側
のケーブル化光ファイバーの一部を薄膜形成装置内部に
収納して所定位置にセットするとともに、残余のケーブ
ル化光ファイバ部分は薄膜形成装置の外部に置き留め、
薄膜形成装置内を真空排気して光ファイバ端面に薄膜を
形成することを特徴とする。A second method of forming a thin film on the end surface of a cabled optical fiber according to the present invention is a method of forming a thin film on the end surface of a cabled optical fiber, wherein an opening is provided in the vacuum chamber and the opening is formed. The portion is vacuum-sealed with a flexible introducing seal member, and the introducing seal member is provided with a through hole having a hole diameter corresponding to the core of the optical fiber, which penetrates from the inside of the vacuum chamber to the atmosphere side. Is provided from the outer peripheral surface of the introduction seal member, the optical fiber core wire is fitted into the through hole through the notch, and a part of the cabled optical fiber on the end face side where the thin film is to be formed is stored inside the thin film forming apparatus. And set it in place, and leave the remaining cabled optical fiber part outside the thin film forming device.
The inside of the thin film forming apparatus is evacuated to form a thin film on the end face of the optical fiber.
【０００８】[0008]
【実施例】図２は本発明の実施例を説明するための一部
断面図であり、真空蒸着装置の天板の近傍を示してい
る。蒸着装置本体２１は、天板に開口を有しており、こ
こにケーブル化光ファイバ１１をセットした本発明の蒸
着治具３１を固定し、装置本体２１を真空シールする。FIG. 2 is a partial cross-sectional view for explaining an embodiment of the present invention, showing the vicinity of a top plate of a vacuum vapor deposition apparatus. The vapor deposition apparatus main body 21 has an opening in the top plate, and the vapor deposition jig 31 of the present invention in which the cabled optical fiber 11 is set is fixed thereto, and the apparatus main body 21 is vacuum-sealed.
【０００９】蒸着治具３１は、蓋板３３と、蓋板３３に
固定されたセット板３５と、ケーブル化光ファイバ１１
のセット板３５へのセット後に蓋板３３に固定される中
間リング３７と、蓋板３３と中間リング３７をシールす
る部材であって本発明の骨子である導入パッキン４１と
からなる。なお、図２ではただ１つのケーブル化光ファ
イバ１１のフェルール１７を、セット板３５のセット穴
に挿入した状態を示したが、実際には多数設けられ、１
ロットで多くの蒸着処理が為される。The vapor deposition jig 31 includes a cover plate 33, a set plate 35 fixed to the cover plate 33, and a cabled optical fiber 11.
The intermediate ring 37 is fixed to the lid plate 33 after being set on the setting plate 35, and the introduction packing 41 is a member for sealing the lid plate 33 and the intermediate ring 37 and is the essence of the present invention. Although FIG. 2 shows a state in which the ferrule 17 of only one cabled optical fiber 11 is inserted into the set hole of the set plate 35, a large number of ferrules 17 are actually provided.
Many evaporation processes are performed in lots.
【００１０】図３に示すように、ゴム製の導入パッキン
４１には、幅方向を貫く貫通孔４３が多数穿設されてお
り、さらに導入パッキン４１の上面から貫通孔４３に至
る斜めの切込み４５が設けられている。なお、この切込
み４５は、導入パッキン４１の下面側から設けてもよ
い。貫通孔４３の孔径は光ファイバ心線１５の直径に見
合った径であり、具体的には光ファイバ心線１５の直径
とほぼ同等とする。As shown in FIG. 3, the rubber introduction packing 41 is provided with a large number of through holes 43 penetrating in the width direction, and further, an oblique cut 45 extending from the upper surface of the introduction packing 41 to the through hole 43. Is provided. The cut 45 may be provided from the lower surface side of the introduction packing 41. The hole diameter of the through hole 43 is a diameter corresponding to the diameter of the optical fiber core wire 15, and specifically, is substantially the same as the diameter of the optical fiber core wire 15.
【００１１】また、導入パッキン４１は、装置本体２１
に対して直接的に当接するものではないが、導入パッキ
ン４１の真空シールが保てなければ装置本体２１内部の
真空雰囲気が達成されないので、導入パッキン４１は本
願発明に言う「薄膜形成装置の真空度を維持するための
パッキン」の１つである。The introduction packing 41 is provided in the main body 21 of the apparatus.
Although it does not directly contact with, the introduction packing 41 is referred to in the present invention as "vacuum of thin film forming apparatus" because a vacuum atmosphere inside the apparatus main body 21 cannot be achieved unless the vacuum seal of the introduction packing 41 can be maintained. It is one of the "packings for maintaining the degree."
【００１２】次に、図２、図３に沿って本願発明におけ
る薄膜形成の手順について説明する。まず、図２におい
て装置本体２１から中間リング３７を外し、さらに中間
リング３７から蓋板３３を取り外す。そして、蒸着済み
のケーブル化光ファイバ１１を回収する。次に中間リン
グ３７のシール溝に嵌装された導入パッキン４１の切込
み４５に光ファイバ心線１５を通して、貫通孔４３に光
ファイバ心線１５を嵌装する。Next, the procedure for forming a thin film in the present invention will be described with reference to FIGS. First, in FIG. 2, the intermediate ring 37 is removed from the apparatus main body 21, and the cover plate 33 is removed from the intermediate ring 37. Then, the vaporized cabled optical fiber 11 is collected. Next, the optical fiber core wire 15 is inserted into the notch 45 of the introduction packing 41 fitted into the seal groove of the intermediate ring 37, and the optical fiber core wire 15 is fitted into the through hole 43.
【００１３】なお、予じめ、光コネクタ１９からフェル
ール１７を分解して、フェルール１７を導入パッキン４
１の内側とし、残余の光コネクタ１９′は、真空槽外に
配置せしめるようにする。ついで、中間リング３７に導
入パッキン４１を介して蓋板を当接し、ネジ５１により
固定する。これにより、導入パッキン４１は真空シール
可能な状態となる。ついで、光ファイバ端面１３が下方
を向くように、セット板３５のセット穴にフェルール１
７を挿入して取り付ける。ついで、パッキン５５を介し
てネジ５３により、中間リング３７を装置本体２１真空
シール可能に固定する。Incidentally, in advance, the ferrule 17 is disassembled from the optical connector 19 and the ferrule 17 is introduced.
1, and the remaining optical connector 19 'is arranged outside the vacuum chamber. Then, the cover plate is brought into contact with the intermediate ring 37 via the introduction packing 41, and is fixed by the screw 51. As a result, the introduction packing 41 is brought into a vacuum sealable state. Then, the ferrule 1 is inserted into the set hole of the set plate 35 so that the optical fiber end face 13 faces downward.
Insert and install 7. Then, the intermediate ring 37 is fixed by a screw 53 via the packing 55 so that the apparatus main body 21 can be vacuum-sealed.
【００１４】これで準備は完了であり、装置本体２１の
内部を真空排気したのち、下方から真空蒸着を行ない、
光ファイバ端面１３に反射防止膜を真空蒸着する。図４
は、本発明の他の実施例を説明するための一部断面図で
あり、真空蒸着装置の天板の近傍を示している。This completes the preparation. The inside of the apparatus main body 21 is evacuated and then vacuum deposition is performed from below.
An antireflection film is vacuum-deposited on the end face 13 of the optical fiber. FIG.
[FIG. 8] is a partial cross-sectional view for explaining another embodiment of the present invention, showing the vicinity of the top plate of the vacuum vapor deposition apparatus.
【００１５】蒸着装置本体２１は、天板に開口を有して
おり、ここにケーブル化光ファイバ１１をセットした本
発明の蒸着治具６１を、パッキン５５を介してネジ５３
に固定し、装置本体２１を真空シールする。The main body 21 of the vapor deposition apparatus has an opening in the top plate, and the vapor deposition jig 61 of the present invention in which the cabled optical fiber 11 is set therein is provided with a screw 53 via a packing 55.
Then, the apparatus main body 21 is vacuum-sealed.
【００１６】蒸着治具６１は、透孔６３ａを有する蓋板
６３と、筒状受け部材６７と、ゴム栓８１（導入用シー
ル部材）と、押え部材７３と、固定環７５と、蓋体６３
に固定され真空槽側に延設されたセット板６５とからな
る。なお、図４ではただ１つのケーブル化光ファイバ１
１のフェルール１７を、セット板６５のセット穴に挿入
した状態を示したが、実際には蓋板６３に多数のゴム栓
８１が設けられ、各々のゴム栓８１からフェルール１７
が真空槽内に導かれ、セット板６７のセット穴に挿入さ
れて、１ロットで多くの蒸着処理が為される。The vapor deposition jig 61 includes a cover plate 63 having a through hole 63a, a cylindrical receiving member 67, a rubber plug 81 (introducing seal member), a holding member 73, a fixing ring 75, and a cover 63.
And a set plate 65 fixed to the vacuum chamber and extended to the vacuum chamber side. In Fig. 4, only one cabled optical fiber 1
Although the ferrule 17 of No. 1 is shown inserted into the set hole of the set plate 65, a large number of rubber stoppers 81 are actually provided on the cover plate 63, and each of the rubber stoppers 81 allows the ferrule 17 to be inserted.
Is introduced into the vacuum chamber, inserted into the set holes of the set plate 67, and many vapor deposition processes are performed in one lot.
【００１７】筒状受け部材６７は、中空部６７ａ（開口
部）を透孔６３ａに整合して、ネジ７１によりパッキン
６９を介して蓋板６３に固定され、真空シールを実現し
ている。中空部６７ａの上部は、真空槽側に向かって縮
径するテーパ部６７ｂを形成しており、このテーパ６７
ｂにゴム栓８１が押し込まれるようにして固定されてい
る。The cylindrical receiving member 67 has a hollow portion 67a (opening portion) aligned with the through hole 63a and is fixed to the cover plate 63 through a packing 69 with a screw 71 to realize a vacuum seal. The upper portion of the hollow portion 67a is formed with a taper portion 67b whose diameter decreases toward the vacuum chamber side.
The rubber plug 81 is fixed so as to be pushed into b.
【００１８】ゴム栓８１の上部には、押え部材７３が載
置され、筒状受け部材６７の外周側に形成された雄ネジ
に螺合している固定環７５を、真空槽側に向かって螺進
させることにより、押さえ部材７３を介してゴム栓８１
が下方に押え付けられて、真空シールが実現する。図５
に斜視図を示すように、ゴム栓８１の外径は、下方に向
かって徐々に縮径しており、また、ゴム栓８１の上下方
向を貫く貫通孔８３が穿設されており、さらにゴム栓８
１の外周面から貫通孔８３に至る切込み８５が設けられ
ている。貫通孔８３の孔径は光ファイバー心線１５の直
径に見合った径であり、具体的には光ファイバ心線１５
の直径とほぼ同等とする。A pressing member 73 is placed on the upper portion of the rubber plug 81, and a fixed ring 75 screwed to a male screw formed on the outer peripheral side of the cylindrical receiving member 67 is moved toward the vacuum chamber side. The rubber stopper 81 is pushed through the pressing member 73 by being screwed.
Is pressed down to realize a vacuum seal. Figure 5
As shown in the perspective view, the outer diameter of the rubber plug 81 is gradually reduced downward, and a through hole 83 penetrating in the vertical direction of the rubber plug 81 is formed. Stopper 8
A notch 85 extending from the outer peripheral surface of No. 1 to the through hole 83 is provided. The hole diameter of the through hole 83 is a diameter corresponding to the diameter of the optical fiber core wire 15, and specifically, the optical fiber core wire 15 is provided.
And the diameter is almost the same.
【００１９】次に、図４、図５に沿って、光ファイバの
端面に薄膜を形成する方法について説明する。まず、図
４において装置本体２１から蓋板６３を取り外し、固定
環７５を緩めて筒状受け部材６７から外し、押え部材７
３を取り除く、この状態で、透孔６３ａ側からゴム栓８
１を突き上げるようにして、ゴム栓８１を取り外し、蒸
着済みのケーブル化光ファイバ１１を回収する。Next, a method for forming a thin film on the end face of the optical fiber will be described with reference to FIGS. First, in FIG. 4, the cover plate 63 is removed from the apparatus main body 21, the fixing ring 75 is loosened and removed from the cylindrical receiving member 67, and the pressing member 7 is removed.
3 is removed, and in this state, the rubber plug 8 is inserted from the side of the through hole 63a.
1 is pushed up, the rubber plug 81 is removed, and the vaporized cabled optical fiber 11 is collected.
【００２０】次に、図５に示したように、ゴム栓８１の
切込み８５を通して、光ファイバ心線１５を貫通孔８３
内に嵌装する。なお、予じめ光コネクタ１９からフェル
ール１７を分解して、フェルール１７をゴム栓８１の下
側（真空槽内）とし、残余の光コネクタ１９′はゴム栓
８１の上側（大気側）に配置せしめるようにする。つい
で、ゴム栓８１を筒状受け部材６７の中空部６７ａに挿
入し、真空槽側の光ファイバ心線１５の長さを調整し
て、フェルール１７をセット板６５のセット穴に挿入し
てセットする。次に、押え部材７３をゴム栓８１上に載
置し、固定環７５を筒状受け部材６７に対して螺合・螺
進させ、筒状受け部材６７の中空部６７ａのテーパ部６
７ｂとゴム栓８１との間にシール構造を形成する。つい
で、蓋板６３を装置本体２１に対して固定することによ
り、真空槽のシール構造が完成し、蒸着準備が終了す
る。Next, as shown in FIG. 5, the optical fiber core wire 15 is passed through the notch 85 of the rubber plug 81 and the through hole 83.
Fit inside. In addition, the ferrule 17 is disassembled from the predecessor optical connector 19 so that the ferrule 17 is located below the rubber stopper 81 (in the vacuum chamber), and the remaining optical connector 19 'is disposed above the rubber stopper 81 (atmosphere side). Try to be wise. Then, the rubber plug 81 is inserted into the hollow portion 67a of the cylindrical receiving member 67, the length of the optical fiber core wire 15 on the vacuum chamber side is adjusted, and the ferrule 17 is inserted into the set hole of the set plate 65 and set. To do. Next, the pressing member 73 is placed on the rubber plug 81, and the fixed ring 75 is screwed into and advanced with respect to the cylindrical receiving member 67, and the taper portion 6 of the hollow portion 67 a of the cylindrical receiving member 67.
A seal structure is formed between 7b and the rubber plug 81. Then, the cover plate 63 is fixed to the apparatus main body 21 to complete the sealing structure of the vacuum chamber and complete the vapor deposition preparation.
【００２１】以下は通常の蒸着操作と同様であり、装置
本体２１の内部を真空排気した後、下方から真空蒸着を
行ない、光ファイバ端面１３に反射防止膜を形成する。
なお本発明では、形成される薄膜が反射防止膜に限定さ
れることはなく、また、薄膜形成装置も真空蒸着装置に
限定されない。The following is the same as a normal vapor deposition operation. After the inside of the apparatus main body 21 is evacuated, vacuum vapor deposition is performed from below to form an antireflection film on the end face 13 of the optical fiber.
In the present invention, the thin film to be formed is not limited to the antireflection film, and the thin film forming device is not limited to the vacuum vapor deposition device.
【００２２】[0022]
【発明の効果】本発明によれば、ケーブル化光ファイバ
を真空槽に持ち込む部分を少なくして、露出している光
ファイバ端面に簡単に薄膜を形成できる。According to the present invention, it is possible to easily form a thin film on the exposed end surface of an optical fiber by reducing the portion for bringing the cabled optical fiber into the vacuum chamber.
【図１】ケーブル化光ファイバを示す一部省略側面図で
ある。FIG. 1 is a partially omitted side view showing a cabled optical fiber.
【図２】本発明の薄膜形成方法の実施例を示す一部省略
断面図である。FIG. 2 is a partially omitted sectional view showing an embodiment of a thin film forming method of the present invention.
【図３】本発明で用いられる導入パッキンの一例を示す
一部省略斜視図である。FIG. 3 is a partially omitted perspective view showing an example of an introduction packing used in the present invention.
【図４】本発明の薄膜形成方法の実施例を示す一部省略
断面図である。FIG. 4 is a partially omitted sectional view showing an embodiment of a thin film forming method of the present invention.
【図５】本発明で用いるられる導入用シール部材の一例
を示す斜視図である。FIG. 5 is a perspective view showing an example of an introducing seal member used in the present invention.
１１ ケーブル化光ファイバ １３ 光ファイバ端面 １５ 光ファイバ心線 １７ フェルール １９ 光コネクタ ２１ 装置本体 ３１ 蒸着治具 ３３ 蓋板 ３５ セット板 ３７ 中間リング ４１ 導入パッキン ４３ 貫通孔 ４５ 切込み ５１，５３ ネジ ５５ パッキン ６１ 蒸着治具 ６３ 蓋板 ６３ａ 透孔 ６５ セット板 ６７ 筒状受け部材 ６７ａ 中空部 ６７ｂ テーパ部 ６９ パッキン ７１ ネジ ７３ 押え部材 ７５ 固定環 ８１ ゴム栓 ８３ 貫通孔 ８５ 切込み 11 cabled optical fiber 13 optical fiber end face 15 optical fiber core wire 17 ferrule 19 optical connector 21 device body 31 vapor deposition jig 33 cover plate 35 set plate 37 intermediate ring 41 introduction packing 43 through hole 45 notch 51, 53 screw 55 packing 61 Evaporation jig 63 Cover plate 63a Through hole 65 Set plate 67 Cylindrical receiving member 67a Hollow part 67b Tapered part 69 Packing 71 Screw 73 Holding member 75 Fixed ring 81 Rubber plug 83 Through hole 85 Notch
Claims (2)
膜を形成する方法であって、 薄膜形成装置の真空度を維持するためのパッキンに、パ
ッキンの幅方向を貫く、光ファイバ心線の直径に見合っ
た孔径の貫通孔を穿設し、 貫通孔に至る切込みをパッキン上面または下面から設
け、 切込みを通して光ファイバ心線を貫通孔内に嵌装し、 薄膜を形成すべき端面側のケーブル化光ファイバの一部
を薄膜形成装置内部に収納して所定位置にセットすると
ともに、残余のケーブル化光ファイバ部分は薄膜形成装
置の外部に置き留め、 薄膜形成装置内を真空排気して光ファイバ端面に薄膜を
形成することを特徴とする、ケーブル化された光ファイ
バ端面の薄膜形成方法。1. A method of forming a thin film on an end face of a cabled optical fiber, wherein a packing for maintaining a vacuum degree of a thin film forming device has a diameter of an optical fiber core wire that penetrates in the width direction of the packing. A through hole with a hole diameter corresponding to the above, and a cut to reach the through hole is made from the top or bottom surface of the packing. Part of the optical fiber is housed inside the thin film forming equipment and set in place, while the remaining cabled optical fiber portion is kept outside the thin film forming equipment, the inside of the thin film forming equipment is evacuated and the optical fiber end face is evacuated. A method for forming a thin film on an end surface of a cabled optical fiber, characterized in that a thin film is formed on the optical fiber.
膜を形成する方法であって、 真空槽に開口部を設けるとともに、該開口部を可撓性を
有する導入用シール部材で真空シールし、 導入用シール部材に、真空槽内部側から大気側に貫く、
光ファイバーの心線に見合った孔径の貫通孔を穿設し、 貫通穴に至る切込みを導入用シール部材の外周面から設
け、 切込みを通して光ファイバ心線を貫通孔内に嵌装し、 薄膜を形成すべき端面側のケーブル化光ファイバーの一
部を薄膜形成装置内部に収納して所定位置にセットする
とともに、残余のケーブル化光ファイバ部分は薄膜形成
装置の外部に置き留め、 薄膜形成装置内を真空排気して光ファイバ端面に薄膜を
形成することを特徴とする、ケーブル化された光ファイ
バ端面の薄膜形成方法。2. A method for forming a thin film on an end face of a cabled optical fiber, wherein an opening is provided in a vacuum chamber, and the opening is vacuum-sealed with a flexible introducing seal member, The seal member for introduction penetrates from the inside of the vacuum chamber to the atmosphere side,
A through hole with a hole diameter that matches the optical fiber's core wire is drilled, and a notch reaching the through hole is made from the outer peripheral surface of the introduction seal member, and the optical fiber core wire is fitted into the through hole through the notch to form a thin film. A part of the cabled optical fiber on the end face side that should be accommodated is set inside the thin film forming device and set in a predetermined position, and the remaining cabled optical fiber part is kept outside the thin film forming device, and the inside of the thin film forming device is vacuumed. A method for forming a thin film on an end face of a cabled optical fiber, which comprises evacuating and forming a thin film on the end face of the optical fiber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09441595A JP3633994B2 (en) | 1995-03-28 | 1995-03-28 | Method for forming a thin film on an end face of a cabled optical fiber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09441595A JP3633994B2 (en) | 1995-03-28 | 1995-03-28 | Method for forming a thin film on an end face of a cabled optical fiber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08269694A true JPH08269694A (en) | 1996-10-15 |
| JP3633994B2 JP3633994B2 (en) | 2005-03-30 |
Family
ID=14109616
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP09441595A Expired - Fee Related JP3633994B2 (en) | 1995-03-28 | 1995-03-28 | Method for forming a thin film on an end face of a cabled optical fiber |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3633994B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011002646A (en) * | 2009-06-18 | 2011-01-06 | Nippon Tsushin Denzai Kk | Optical fiber connector |
| CN102213809A (en) * | 2011-07-07 | 2011-10-12 | 江苏中天科技股份有限公司 | Residual cable frame |
| CN114774874A (en) * | 2022-04-13 | 2022-07-22 | 中国科学院上海微系统与信息技术研究所 | FC type joint optical fiber end face coating clamp, system and use method thereof |
-
1995
- 1995-03-28 JP JP09441595A patent/JP3633994B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011002646A (en) * | 2009-06-18 | 2011-01-06 | Nippon Tsushin Denzai Kk | Optical fiber connector |
| CN102213809A (en) * | 2011-07-07 | 2011-10-12 | 江苏中天科技股份有限公司 | Residual cable frame |
| CN114774874A (en) * | 2022-04-13 | 2022-07-22 | 中国科学院上海微系统与信息技术研究所 | FC type joint optical fiber end face coating clamp, system and use method thereof |
| CN114774874B (en) * | 2022-04-13 | 2023-12-15 | 中国科学院上海微系统与信息技术研究所 | FC type connector optical fiber end face coating clamp, system and use method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3633994B2 (en) | 2005-03-30 |
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